EP3596451A1 - Dispositif de caractérisation de la résistance électrique d'un objet sous test - Google Patents

Dispositif de caractérisation de la résistance électrique d'un objet sous test

Info

Publication number
EP3596451A1
EP3596451A1 EP18709975.9A EP18709975A EP3596451A1 EP 3596451 A1 EP3596451 A1 EP 3596451A1 EP 18709975 A EP18709975 A EP 18709975A EP 3596451 A1 EP3596451 A1 EP 3596451A1
Authority
EP
European Patent Office
Prior art keywords
contact
measuring
input
measuring device
input current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18709975.9A
Other languages
German (de)
English (en)
Inventor
Tobias Kosub
Denys Makarov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmholtz Zentrum Dresden Rossendorf eV
Original Assignee
Helmholtz Zentrum Dresden Rossendorf eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmholtz Zentrum Dresden Rossendorf eV filed Critical Helmholtz Zentrum Dresden Rossendorf eV
Publication of EP3596451A1 publication Critical patent/EP3596451A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/92—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating breakdown voltage

Definitions

  • the electrical resistance is usually not a scalar quantity, but a tensor with several different components.
  • the resistance tensor combines the spatial orientation of the current with the spatial orientation of the voltage.
  • the resistor may be, e.g. for material layers, characterized by the series resistance and the transverse resistance. For a current that runs within a layer (and parallel to the layer), the series resistance characterizes the ratio between the current and the voltage present in parallel with that current, and the transverse resistance characterizes the ratio between the current and the current within the layer (and parallel to the layer) perpendicular to this current voltage.
  • resistance current and voltage refer to the electrical resistance, the electrical current or the electrical voltage, unless something else results from the context.
  • the components of the resistance tensor are also referred to as resistance components.
  • the individual components of the resistance tensor may be e.g. be determined by the determination of each tensor component, a sample is prepared with such a sample geometry and in such
  • Circuit geometry is measured electrically that all components are negligible for the present sample and Bescensgeometrie except for the individual component to be determined.
  • the sample used to determine a single component can, for example, be structured and electrically connected in a four-point measurement such that the predetermined current direction and the predeterminedmmsabgriffspositionen the resistance is given essentially solely by the individual component to be determined.
  • the influence of the series resistance is zero or negligibly small, resulting in the detection of the cross arms between the other two opposing arms Voltage of the transverse resistance can be determined.
  • each individual component of the resistance tensor can be determined by means of a sample having a corresponding sample geometry. In order to determine different components, several samples or test objects with different sample geometries have to be produced, which requires one
  • the determined resistance components are also subject to a corresponding inaccuracy.
  • the invention is intended to provide a device by means of which the electrical resistance, in particular the series resistance, of a measurement object can be easily characterized with high accuracy.
  • the device may e.g. for the simultaneous determination of the longitudinal and the transverse resistance of
  • a device for characterizing the electrical resistance of a
  • the measuring device may e.g. to determine
  • the resistance tensor may be formed of different components of the resistance tensor, e.g. for determining the series resistance and / or the transverse resistance of the
  • the series resistance is also called longitudinal resistance
  • the transverse resistance is also referred to as transverse resistance.
  • the measurement object is preferably designed such that its extent in two of the three spatial dimensions is greater than its extent in the third
  • the measuring object is preferably a material layer whose length and width is greater than its thickness. Such a material layer is therefore substantially two-dimensional or can be assumed to be two-dimensional.
  • the measuring device has an electrical energy source for providing an electric current as an input current.
  • the power source has a first pole and a second pole, the input current being provided between these two electrical poles.
  • the poles form the connection points of the energy source and are therefore also referred to as the first and second terminal pole.
  • the energy source may be an electrical power source, e.g. a power source for providing a direct current or alternating current.
  • the power source may be an electrical power source, e.g. a
  • the measuring device also has a voltage measuring device for detecting or measuring an electrical voltage.
  • the voltage measuring device has a first and a second measuring input and is designed to detect the voltage present between these two measuring inputs as an output voltage.
  • the measuring device has at least four connection contacts, wherein each of the connection contacts is provided for electrical connection to a contact electrode to form an electrical connection between the connection contact and the contact electrode, and wherein the contact electrodes are provided for electrically contacting the measurement object.
  • the measuring device thus has at least one first terminal contact for connecting (i.e., electrically connecting to) a first contact electrode thereto, a second terminal contact for connecting a second contact electrode thereto, a third terminal
  • Terminal for connecting a third contact electrode thereto, and a fourth terminal for connecting a fourth contact electrode thereto; wherein the first, second, third and fourth contact electrodes for electrical
  • the measuring device can be connected by means of the connection contacts e.g. for forming a releasable connection (e.g., a detachable plug connection) between the terminals and
  • the measuring device can thus four
  • connection contacts for forming a releasable electrical connection to each of a contact electrode.
  • the connection contacts may e.g. when
  • the measuring device can accordingly have at least four electrodes (also called
  • the measuring device can thus have at least one first, one second, one third and one fourth contact electrode. Each of the contact electrodes has an exposed contact point provided for contacting the measurement object.
  • the first contact electrode is connected to the first connection contact to form an electrical connection, the second one
  • the measuring device has a switching device.
  • Switching device is for variable pairwise electrical connection of each one of the first pole of the power source, the second pole of the power source, the first measuring input of the voltage measuring device and the second measuring input of the voltage measuring device on the one hand with one of the first terminal, the second terminal, the third terminal and the fourth Terminal contact on the other hand formed.
  • each of the terminals is connected to the respective contact electrode, so that the measuring device by means of
  • Switching device for the variable pairwise electrical connection of each one of the first pole, the second pole, the first measuring input and the second
  • Measuring input on the one hand with one of the first contact electrode, the second contact electrode, the third contact electrode and the fourth contact electrode on the other hand is formed.
  • the contact electrodes are realized or formed, wherein each of the first pole with one of the four contact electrodes, the second pole with one of the four contact electrodes (in particular with another of the four contact electrodes as the first pole), the first
  • Measuring input with one of the four contact electrodes (in particular with a different one of the four contact electrodes than the first pole and the second pole), and the second measuring input with one of the four contact electrodes (in particular with a different one of the four contact electrodes than the first pole, the second pole and the first
  • the switching device is designed for the variable pairwise electrical connection of said elements, i. by means of the switching device can be at least two different
  • the switching device is designed to realize more than two Bescenskonfigurationen, eg to realize all possible Bescenskonfigurationen. It can be provided, for example, that the switching device is designed such that the first pole can be connected to any one of the four connection contacts (and thus to any of the four contact electrodes), the second pole to be connected to any one of the three remaining connection contacts ( and thus to any one of the three remaining contact electrodes), the first measurement input can be connected to any one of the two remaining terminal contacts (and thus to any of the two remaining contact electrodes), and the second measurement input to the single remaining terminal contact (and thus, with the only remaining contact electrode) can be connected.
  • connect or "connection” is presently an electrical connection or a means electrical connection, ie the formation of an electrically conductive connection, unless otherwise stated in the context. In the intended use of the measuring device are the
  • connection contacts in contact with the contact electrodes and the contact electrodes in contact with the measurement object, wherein by means of the electrical energy source, a current flow is generated in the measurement object.
  • the measuring device is designed in such a way that the input current flowing between the two connection contacts or contact electrodes, which are connected to the two poles of the energy source, can be detected by it as an input current signal.
  • Input current signal describes the input current as a function of time, so that the measuring device detects the input current time course as an input current signal. Due to the introduced input current is between the other two contact electrodes (ie with the two measuring inputs of the
  • Voltage measuring device connected contact electrodes
  • From the measuring device can by means of
  • Voltage measuring device are connected, present voltage as
  • the output voltage signal describes the output voltage as a function of time, so that of the
  • Measuring device is detected by means of the voltage measuring device of the output voltage over time as an output voltage signal.
  • the contact electrodes can be formed, the input current signal and the output voltage signal can be detected by means of the measuring device for different Besciblyskonfigurationen, and characterized based on the plurality of input current signals and the plurality of output voltage signals, the electrical resistance or marsstensor of the measurement object, eg be determined.
  • the measuring device for Characterizing or determining different resistance components based on the input current signals and output voltage signals detected for different Bescummingen be formed.
  • the measuring device is designed to perform at least a first and a second measurement sequence with different Beschariskonfigurationen as follows.
  • Measurement sequence required Bescellenskonfigurationen are feasible.
  • the first and second measurement sequences can be performed in any order.
  • In the first measurement sequence is the first by means of the switching device
  • the second terminal contact with the other of the two poles of the power source
  • the third terminal contact with one of the two measuring inputs of
  • the input current is between the first and the second
  • Terminal contact (or between the first and the second contact electrode) before and is detected by the measuring device as a first input current signal.
  • Terminal contact (or the third contact electrode) with one of the two poles of Power source
  • the fourth terminal contact (or the fourth contact electrode) with the other of the two poles of the power source
  • the first terminal contact (or the first contact electrode) with one of the two measuring inputs of
  • the input current is between the third and the fourth
  • Terminal contact (or between the third and the fourth contact electrode) before and is detected by the measuring device as a second input current signal.
  • the measuring device is, e.g. by means of an appropriately trained
  • Evaluation device for determining the series resistance and / or the
  • Transverse resistance of the DUT including the first and second input current signal and the first and second output voltage signal is formed. Based on the detected input current signals and
  • Output voltage signals is for one and the same measurement object, the determination of the series resistance and also allows the simultaneous determination of the longitudinal and the transverse resistance, whereby the uncomplicated determination of this
  • Resistor components is possible with high accuracy.
  • the longitudinal and the transverse resistance can be determined simultaneously without changing the sample or the test object.
  • the measuring device may e.g. be formed such that
  • the measuring device is designed to determine a first resistance value from the first output voltage signal and the first input current signal and to determine a second resistance value from the second output voltage signal and the second input current signal. The way of calculating the resistance values for
  • the resistance value is determined from that present in this wiring configuration
  • Bescenskonfiguration designates, in which the first pole of the power source with the i-th terminal contact (or with the ith contact electrode), the second pole of the power source with the terminal contact (or with the contact electrode),
  • the tension measuring device with the Connection contact (or with the Contact electrode) is electrically connected so that when used as intended, the measuring device, the input current between the ith and the contact electrode flows and the output voltage between the and
  • the resistance value present in the wiring configuration is called mi.
  • the input current is a (eg periodic) alternating current
  • Frequency component at the frequency is designated, and with
  • Phase portion of the respective frequency component is designated (which indicates the initial phase at the time).
  • the input current is an alternating current
  • resistive elements thus complex resistance elements and are therefore also referred to as impedance elements.
  • the resistance elements arise from the fundamental frequency corresponding frequency components of the output voltage signal and the
  • Input current signal which are also referred to as fundamental frequency components.
  • the real part of the resistance element results from the quotient of the amplitude the fundamental frequency portion of the output voltage signal and the amplitude of the fundamental frequency portion of the input current signal, wherein
  • this quotient is multiplied by the cosine of the difference between the initial phase the fundamental frequency component of the input current signal and the initial phase the fundamental frequency portion of the output voltage signal.
  • the real part of the resistance element is derived from the quotient of the amplitude of the fundamental frequency component of the output voltage signal and the amplitude of the fundamental component of the input current signal, this quotient being multiplied by the sine of the difference between the initial phase of the fundamental frequency component of the input current signal and the initial phase of the fundamental component the output voltage signal.
  • the measuring device can by means of the above-explained first and second
  • Measuring sequence eg for determining as the first resistance element and of
  • d be formed as a second resistance element.
  • the (average or half) sum of the first resistance value and the second resistance value is proportional to the transverse resistance of the measurement object and thus forms a measure of the transverse resistance.
  • the (average or half) difference between the first resistance value and the second resistance value is proportional to the series resistance of the measurement object and thus forms a measure of the series resistance.
  • the respective proportionality factors result from the respective Bescliensgeometrie and can, for example, based on the known Geometry of the DUT or by measuring on a reference sample with known resistance tensor and comparing the measurement result with the known resistance components are determined. Accordingly, it can be provided that the measuring device is designed to determine the series resistance and / or the transverse resistance of the measurement object based on the first resistance value and the second resistance value.
  • the measuring device is designed to determine the series resistance of the measurement object based on the difference between the first resistance value and the second resistance value and / or for determining the transverse resistance of the measurement object based on the sum of the first resistance value and the second resistance value , According to the above embodiment can thus according to equation (1) for the
  • the first resistance value are determined as 4 and the second
  • Resistance value can be determined as being the series resistance or
  • the measuring device can thus, for example by means of an appropriately trained evaluation, for determining the series resistance and / or the transverse resistance with reference to
  • Equations (7) and (8) in conjunction with equation (1) for the DC case and with equations (2) to (6) are designed for the AC case.
  • the measuring device is designed in addition to the first and second measuring sequence for performing at least one third and fourth measuring sequence with different Beschariskonfigurationen as follows.
  • the switching device for variable pairwise electrical connection of each one of the first pole, the second pole, the first measuring input and the second measuring input on the one hand with one of the four connection contacts (and thus with one of the four contact electrodes) on the other hand designed such that of the measuring device, the Beschariskonfigurationen required for the first, second, third and fourth measurement sequence can be realized.
  • the first, second, third and fourth measurement sequences can be performed in any order.
  • in the first measuring sequence by means of
  • the first terminal contact (and thus when using the measuring device according to the first contact electrode) with the first pole of the power source
  • the second terminal contact or the second contact electrode
  • the third terminal contact or the third contact electrode
  • the fourth connection contact or the fourth contact electrode
  • Input current signal ( ⁇ 12 ) is detected, and wherein by means of
  • Terminal contact (or the second contact electrode) with the first measuring input of the voltage measuring device, and the first terminal contact (or the first contact Contact electrode) is electrically connected to the second measuring input of the voltage measuring device, wherein the input current between the third and the fourth contact electrode (and thus between the third and fourth terminal contact) is present and as a second input current signal is detected, and wherein by means of the voltage measuring device between the first and the second
  • Terminal contact (or the second contact electrode) with the first pole of
  • Terminal contact (or the fourth contact electrode) with the first pole of
  • Voltage is detected as the fourth output voltage signal.
  • the measuring device can be designed, for example, by means of a suitably designed evaluation device for determining the series resistance and / or the transverse resistance of the measurement object including the first, second, third and fourth input current signal as well as the first, second, third and fourth output voltage signal.
  • the measuring device for determining a first resistance value from the first output voltage signal and the first input current signal, a second resistance value from the second
  • the fourth input current signal is formed.
  • the (average or quarter) sum of the first, second, third and fourth resistance value is proportional to the transverse resistance of the measurement object and thus forms a measure of the transverse resistance.
  • the (average or quarter) sum at which the two resistor values R 1234 and R 2143 for the input current between the first and the second contact electrode with a positive sign and the two resistance values R 3421 and R 4312 for the input current between the third and The fourth contact electrode with a negative sign (also referred to as "alternating sum"), is proportional to the series resistance of the measurement object and thus forms a measure of the series resistance.
  • the respective proportionality factors result from the respective wiring geometry and can be determined, for example, on the basis of the known geometry of the measurement object or by measurement on a reference sample with known resistance tensor and comparison of the measurement result with the known resistance components. Accordingly, it can be provided that the measuring device (eg by means of an appropriately designed evaluation device) for determining the measuring device (eg by means of an appropriately designed evaluation device) for determining the measuring device (eg by means of an appropriately designed evaluation device) for determining the
  • the measuring device is designed to determine the transverse resistance of the test object based on the sum of the first, the second, the third and the fourth resistance value.
  • the measuring device can thus for
  • Input current can be DC or AC.
  • the measuring device may be for storing the detected input current signals (i.e., the detected input current timings) and the detected
  • Output voltage signals may be formed in a data memory such that these detected signals are subsequently available as raw data for detecting different components of the resistance tensor of the DUT.
  • the measuring device can thus in particular for storing the first, second, third and / or fourth input current signal and for storing the first, second, third and / or fourth
  • Output voltage signal to be formed by means of a data memory.
  • the measuring device may be designed to store the determined resistance values (for example of the first, second, third and / or fourth resistance value) in a data memory such that these determined resistance values are subsequently used as raw data for the determination
  • the measuring device is designed to detect the electric current flowing between the first pole and the second pole of the electrical energy source as an input current signal.
  • the measuring device for detecting the between the first measuring input and the second measuring input of
  • Voltage measuring device present electrical voltage as
  • Input current signal as an AC signal the measuring device, e.g. by means of an appropriately designed evaluation device, for processing or
  • Analyzing the input current signals and / or output voltage signals may be formed by a Fourier transform.
  • the measuring device can also be designed to characterize the series resistance and / or the transverse resistance of the measurement object based on the Fourier-transformed input current signals and / or the Fourier-transformed output voltage signals.
  • the measuring device is for Fourier transforming the output voltage signal and / or for Fourier transforming the
  • the measuring device is for
  • the detected input current signals e.g., the first, second, third, and fourth input current signals, respectively
  • output voltage signals e.g., the first, second, third, and fourth output voltage signals, respectively
  • Output voltage signals are subjected to a Fourier transform.
  • the input current signal describes the course of the input current as a function of time and the output voltage signal describes the course of the
  • the respective time signal is assigned a frequency spectrum which describes which frequencies are included at which proportions in the original time signal.
  • the measuring device can thus be designed in such a way that it transforms the input current signal by means of the Fourier transformation into a Fourier-transformed input current signal according to equation (2), and / or that of it the output voltage signal is transformed by means of the Fourier transformation into a Fourier-transformed output voltage signal according to equation (3).
  • distortions of the signal profiles in particular of the detected voltage profiles
  • the measured object has a non-linear electrical resistance
  • the measuring device is based on the Fourier-transformed input current signals and / or the Fourier-transformed output voltage signals for determining the series resistance and / or the transverse resistance of the measurement object for different frequencies or
  • the input current may be in the form of an alternating current, for example in the form of a harmonic alternating current (ie an alternating current, the one
  • Output voltage signal shares at this fundamental frequency and at integer multiples of this fundamental frequency. If the input current signal consists of several harmonic alternating currents with different
  • the output voltage signal shares at these different fundamental frequencies and at integer multiples of these different fundamental frequencies. From the comparison of
  • Frequency spectra of the input current signals and the output voltage signals can be used to draw conclusions about the resistance of the test object and its
  • the measuring device may be based on the Fourier transformed input current signals and the Fourier transform
  • the input current signal may be in the form
  • the measuring device is thus designed such that it comprises an input current in the form of a harmonic alternating current with an input current amplitude and an input current frequency provided
  • Fundamental frequency is called. It can be provided that the amplitude and the fundamental frequency of the input current are predetermined or detected by the energy source. However, it can also be provided that the measuring device for Fourier transforming the input current signals and determining the
  • Measuring device further for Fourier transforming the output voltage signals and for detecting the individual frequency components each
  • the measuring device can also be used to determine the for a given
  • Harmonic order n present first, second, third and / or fourth resistive element according to equations (11) to (15) to be formed.
  • Harmonic component of the output voltage signal and the amplitude the fundamental frequency component of the input current signal this quotient being multiplied by the cosine of the negative initial phase the harmonic content of the output voltage signal.
  • the imaginary part of the resistance element results from the quotient of the amplitude the respective harmonic component of the output voltage signal and the amplitude the fundamental frequency component of the input current signal, this quotient being multiplied by the sine of the negative initial phase of the harmonic component of the
  • the measuring device may also be analogous to those described with reference to the equations (7) to (10) for determining the for several
  • the measuring device for determining the present for a given harmonic order n series resistance and / or transverse resistance of the measurement object based on the for the given
  • the measuring device for determining the present for the predetermined harmonic order is trained. It can be provided in particular that the measuring device for determining the present for the predetermined harmonic order
  • the measuring device can eg (analogous to the equations (7) and (8)) based on the harmonic-dependent resistive elements for determining the harmonic-dependent series resistance and / or the
  • the measuring device for determining the longitudinal resistance and / or transverse resistance of the test object present for a given harmonic order ⁇ based on that for the
  • predetermined harmonic order present first, second, third and fourth resistance value is formed. It can be provided in particular that the measuring device for determining the for a given
  • Harmonic order present longitudinal resistance of the measuring object is formed based on the alternating sum of the present for the predetermined harmonic order first, second, third and fourth resistance value.
  • the measuring device for determining the present for a given harmonic order can be provided that the measuring device for determining the present for a given harmonic order
  • Transverse resistance of the measuring object is formed based on the sum of the present for the predetermined harmonic order first, second, third and fourth resistance value. Accordingly, the measuring device can, for example (analogous to the equations (9) and (10)) based on the harmonic-dependent resistance elements for
  • Distortion orders are detected as separate frequency components. All of these distortion orders can be based on different effects, which can be differentiated and separated from each other by such an analysis. A corresponding generalization is possible in the event that the
  • Measuring device for detecting the input current signals and the output voltage signals in the form of digital signals to be formed (e.g.
  • the switching device has at least a first, a second, a third and a fourth electrical input contact and at least a first, a second, a third and a fourth electrical Output contact on.
  • Terminal contact the second output contact of the switching device with the second terminal contact, the third output contact of the switching device to the third terminal contact, and the fourth output contact of the switching device to the fourth terminal contact electrically connected.
  • the intended use of the measuring device is thus the first output contact of the measuring device
  • the switching device is according to this embodiment for the variable pairwise
  • the power source may be a power source, e.g. be a DC power source or an AC power source.
  • the power source may be a power source, e.g. be a DC power source or an AC power source.
  • Power source is a voltage source, such as a DC voltage source or an AC voltage source. If the power source is a DC power source or a DC power source, the input power is in the form of a DC current. If the power source is an AC power source or an AC power source, the input power is in the form of an AC current. In embodiment of the energy source as a voltage source can be provided that one of the two poles of the voltage source to an electrical
  • Reference potential is switched, e.g. to the ground potential of the measuring device.
  • Measuring device e.g. be formed such that one of the two poles of
  • Voltage source is connected to the ground potential, wherein the voltage source for applying the other of the two poles is formed with a DC potential or with a DC voltage.
  • the measuring device may be e.g. be formed such that one of the two poles of the voltage source on the
  • the voltage source for applying the other of the two poles is formed with an AC potential or with an AC voltage.
  • the voltage source as an alternating voltage source, it may alternatively be provided that the alternating voltage source is designed to act on the two poles with mutually opposite-phase alternating voltages (the voltage or the voltage always being present under the voltage present at one pole
  • the measuring device may comprise a current measuring device for detecting the electric current present between the first and the second pole of the energy source as an input current signal. It can be provided, for example, that the measuring device for detecting the input current signal one or more electrical resistances (ie electrical components in the form of a resistor or resistance components), which are arranged in the current path of the input current.
  • the measuring device can, for example, for tapping or detecting the voltage drop across such a resistance component as
  • Resistor device may be formed (for example, by the input current signal is formed as a quotient of the measurement voltage and the resistance value).
  • a resistance component is also referred to as a measuring resistor.
  • the measuring device accordingly has at least one resistance component which is connected in series with one of the two poles of the energy source between this pole and the connection contacts (and thus also between these poles and the contact electrodes). It can e.g.
  • the resistance component is connected in series with one of the two poles between this pole and the switching device.
  • the measuring device may be e.g. a resistance device connected in series with the first pole of the power source between the first pole and the
  • the resistance device being e.g. can be connected between the first pole and the switching device.
  • the measuring device may be e.g. a resistance device connected in series with the second pole of the power source between the second pole and the terminals (and thus also between the second pole and the contact electrodes), the resistance device being e.g. can be connected between the second pole and the switching device. It can e.g.
  • the measuring device comprises a resistance component, which is connected in series with the first pole of the power source between the first pole and the first input contact of the switching device.
  • the measuring device a resistance component, which is connected in series with the first pole of the power source between the first pole and the first input contact of the switching device.
  • the measuring device has two
  • Resistance components of equal resistance e.g., two identically designed resistance components
  • Resistor devices are connected in series with the first pole of the power source between the first pole and the terminals (e.g., between the first pole and the switching device), and the second of these two
  • Resistor components in series with the second pole of the power source between the second pole and the terminal contacts (for example, between the second pole and the switching device) is connected. It can e.g. be provided that the
  • Measuring device comprises two resistance components of equal resistance value (e.g., two identically constructed resistance components), the first of these two resistance components being connected in series with the first pole of the power source between the first pole and the first input contact of the first input terminal
  • Resistor components is connected in series with the second pole of the power source between the second pole and the second input contact of the switching device.
  • Such a configuration with two resistance components having an equal resistance value (wherein the resistance value of the first resistance component equal to the resistance value of the second
  • Resistor component is), due to the associated symmetry contributes to a high accuracy of measurement, especially in combination with a
  • the measuring device which is designed to act on the two poles with mutually opposite-phase AC voltages.
  • the measuring device may also be designed such that it is connected in series with it for at least one of these in series with a pole of the energy source
  • the voltage dropping across this resistor component voltage is detected as a measurement voltage or measurement voltage signal, and that based on the detected measurement voltage (and, for example, the known electrical resistance value of the resistance device) of the
  • Input current signal can be determined.
  • the contact electrodes may be in different configurations or
  • the measuring device is designed such that the contact electrodes can be moved relative to the measurement object (or to a measurement object receptacle of the measurement device).
  • Measuring device may in particular be designed such that the (fore)
  • contact points of the contact electrodes relative to the measurement object or to the measurement object recording are movable.
  • the measuring device can in particular one for recording or
  • the contact electrodes are movable relative to the measurement object recording.
  • the first, second, third and fourth contact electrodes being movable relative to the measuring object or the measuring object receptacle, e.g. different measuring objects are characterized by means of the measuring device.
  • the measurement object is not part of the measuring device.
  • the contact electrodes are not permanently (in particular not materially bonded) connected to the measurement object.
  • the contact electrodes may be designed such that they can be moved relative to the measurement object or the measurement object receptacle in such a way that the contact electrodes can be brought into contact with the measurement object after a measurement object has been introduced into the measurement object recording, then the measurement for
  • the measuring device is also designed such that the contact electrodes are movable relative to one another and thus can be positioned variably relative to one another.
  • the measuring device may in particular be designed such that the contact points of the contact electrodes (provided for contacting the measuring object) are movable relative to each other or can be variably positioned. Accordingly, the positions of the first, second, third and fourth contact electrodes relative to each other (and thus also the
  • each of the contact electrodes may be disposed at different (eg, any) positions and brought into contact with the measurement object.
  • each of the contact electrodes is arranged at the free end of a flexible electrical conductor (eg a wire) or is formed by the same, so that the contact electrode or its
  • the measuring device is designed such that the contact electrodes are not movable relative to each other, but are arranged relative to each other in a fixed predetermined geometry. It can e.g. be provided that the contact electrodes are arranged in a fixed predetermined geometry such that the connecting line between the first and the second contact electrode is not parallel and not perpendicular to the connecting line between the third and the fourth contact electrode. It can be provided in particular that the contact electrodes are arranged in a fixed predetermined geometry such that the connecting line between the contact point of the first contact electrode and the contact point of the second contact electrode is not parallel and not perpendicular to the connecting line between the contact point of the third contact electrode and the contact point the fourth contact electrode.
  • the four contact electrodes are arranged so that they (or their contact points) form the vertices of a rectangle (preferably an uneven rectangle, ie a rectangle in which the length is different than the width), wherein the first and the second contact electrode are diagonally opposite, and wherein the third and fourth contact electrode are diagonally opposite.
  • the measuring device has a contact element, wherein the contact electrodes (in particular the first, second, third and fourth contact electrode) are fixed to form one of the above-explained geometries on the contact element, so that they are arranged relative to each other in a fixed predetermined geometry.
  • Contact element may be movable relative to the measurement object or relative to the measurement object recording.
  • the specified geometries allow a reliable and accurate simultaneous determination of the longitudinal and transverse resistance.
  • Figure 2 is an exemplary input current signal (Fig.2A) and its
  • Figure 3 shows a contact element with contact electrode in a fixed predetermined
  • FIG. 4 shows a measuring device according to an embodiment with a
  • Figure 1 shows a measuring device 1 according to an embodiment of the
  • Measuring object 3 is in the form of a material layer and is received or stored in a measuring object holder 4 or measuring object holder 4 of the measuring device 1.
  • the measuring device 1 has an electrical energy source 5 with a first pole 7 and a second pole 9.
  • the power source 5 is an electrical AC voltage source 5, by means of which an electrical
  • AC voltage is provided so that in the presence of an electrical
  • Input current is called. As shown in Figure 1, the power source 5 a
  • the measuring device 1 has a voltage measuring device 11 with a first measuring input 13 and a second measuring input 15.
  • the Voltage measuring device 11 is designed to detect the voltage present between the first 13 and the second measuring input 15, which is referred to as the output voltage. Since, according to FIG. 1, the input current is an alternating current, the output voltage is an alternating voltage.
  • the measuring device 1 also has a first contact electrode 17, a second contact electrode 19, a third contact electrode 21 and a fourth contact electrode 23.
  • the contact electrodes are provided for physically and electrically contacting the measurement object 3. When the measuring device 1 is used as intended, the contact electrodes 17, 19, 21 and 23 are in physical contact with the measuring object 3, as shown in FIG.
  • the DUT 3 is electrically contacted by means of the contact electrodes.
  • the measuring device 1 has a switching device 27, which between the
  • the measuring device 1 has a first connection contact 16, a second connection contact 18, a third connection contact 20, and a fourth connection contact 22, the connection contacts 16, 18, 20, 22 being e.g. may be formed on the switching device 27.
  • the connection contacts 16, 18, 20, 22 may e.g. be designed as connection sockets.
  • the switching device 27 is for variable pairwise electrical connection of each one of the first pole 7, the second pole 9, the first measuring input 13 and the second measuring input 15 on the one hand with one of the four
  • Terminal contacts are connected to one of the contact electrodes by means of a detachable electrical connection (e.g., a connector).
  • a detachable electrical connection e.g., a connector
  • Terminal contact 16 is electrically connected to first contact electrode 17
  • second terminal contact 18 is electrically connected to second contact electrode 19
  • third terminal contact 20 is electrically connected to third contact electrode 21
  • fourth terminal contact 22 is connected to fourth
  • Switching device 27 is thus for the variable pairwise electrical connection of each one of the first pole 7, the second pole 9, the first measuring input 13 and the second measuring input 15 on the one hand with one of the four contact electrodes 17, 19, 21, 23 on the other hand formed.
  • the switching device 27 has four electrical input contacts and four electrical output contacts, namely a first input contact 29, a second input contact 31, a third input contact 33, a fourth
  • Input contact 35 a first output contact 37, a second
  • the first input contact 29 is connected to the first pole 7, the second input contact 31 is connected to the second pole 9, the third input contact 33 is connected to the first measurement input 13, and the fourth input contact 35 is electrically connected to the second measurement input 15.
  • the first output contact 37 is connected to the first connection contact 16 (and thus to the first contact electrode 17), the second output contact 39 is to the second connection contact 18 (and thus to the second contact electrode 19), the third output contact 41 is to the third connection contact 20 (and thus with the third contact electrode 21), and the fourth output contact 43 is electrically connected to the fourth terminal contact 22 (and thus to the fourth contact electrode 23).
  • the switching device 27 is designed for the variable pairwise electrical connection of each of the input contacts 29, 31, 33, 35 with one of the output contacts 37, 39, 41, 43 (illustrated in FIG. 1 by the intersecting dashed lines, which show the
  • the measuring device 1 is designed in such a way that from it the electrical current which, when the first pole 7 is electrically connected to the i-th terminal contact or the i-th contact electrode and electrical connection of the second pole 9 to the The terminal contact or the contact electrode between the first pole 7 and the second pole 9 is detected as an input current signal (FIG
  • the measuring device 1 has an electrical
  • Resistor component 45 which also acts as a measuring resistor 45 and is called.
  • the measuring resistor 45 is connected in series with the first pole 7 between the first pole 7 and the connection contacts 16, 18, 20, 22 (and thus also between the first pole 7 and the contact electrodes 17, 19, 21, 23), in particular between the first pole 7 and the switching device 27.
  • the present case is the
  • Measuring resistor 45 connected as an example between the first pole 7 of the power source 5 and the first input contact 29 of the switching device 27.
  • the measuring device 1 is for detecting the above the measuring resistor 45
  • Input current signals formed based on the detected measurement voltage.
  • the measuring device 1 has, as an example, a current signal generating device 47 which is designed to pick up the electrical voltage falling across the measuring resistor 45 and to determine the electric current corresponding to this voltage as an input current (for example, by the
  • Input current signal is formed as a quotient of the measured voltage and the known resistance value of the measuring resistor 45).
  • the input current signal describes the input current as a function of time and is therefore also called written, where ⁇ ⁇ denotes the time.
  • the measuring device 1 also has a second electrical resistance component 49 which is connected in series with the second pole 9 between the second pole 9 and the connection contacts 16, 18, 20, 22 (and thus also between the second pole 7 and the contact electrodes 17, 19, 21, 23), in particular between the second pole 9 and the switching device 27.
  • the second resistance element 49 is an example between the second pole 9 of the power source 5 and the second input contact 31 of
  • Resistor device 49 is the same size as the resistance value of first resistor device 45, as an example, first resistor device 45 and second resistor device 49 are formed identical to each other.
  • the second resistance element 49 may function as a measuring resistor for detecting the input current signal, wherein which may be the measuring device 1 for detecting the 49 drop across the second resistance element the electrical voltage as a measurement voltage and detecting the input current signal ⁇ ⁇ ⁇ formed based on the detected measurement voltage (not shown in Figure 1).
  • the second resistor component 49 alone Symmetrieschreibn in addition to the measuring resistor 45 contribute. Due to the electrical input current between the ith and the j-th contact electrode is between the two remaining contact electrodes, ie
  • the measuring device 1 is designed in such a way that it supplies the electrical voltage between the first measuring input 13 and the first contact input electrode when the first measuring input 13 is electrically connected to the sixth contact electrode and the second measuring input 15 is electrically connected second measuring input 15 is present, is detected as an output voltage signal.
  • Output voltage signal describes the output voltage as a function of time and is therefore also written as, where ⁇ ⁇ denotes the time.
  • the measuring device 1 is designed by means of the switching device 27 for carrying out a first, second, third and fourth measuring sequence as follows.
  • the first measurement sequence is:
  • the first terminal contact 16 (and thus also the first contact electrode 17) electrically connected to the first pole 7 by the first input contact 29 is electrically connected to the first output contact 37 of the switching device 27, - the second terminal contact 18 (and thus also the second contact electrode 19) is electrically connected to the second pole 9, in that the second input contact 31 is electrically connected to the second output contact 39 by the switching device 27,
  • Input current is detected as a first input current signal ⁇ 12 , and wherein the voltage present between the third 20 and the fourth 22 terminal contact (or between the third 21 and the fourth 23 contact electrode) is detected as the first output voltage signal ⁇ ⁇ 34 .
  • the second measurement sequence is:
  • the third connection contact 20 (and thus also the third contact electrode 21) is electrically connected to the first pole 7, in that the first input contact 29 is electrically connected to the third output contact 41 by the switching device 27, the fourth connection contact 22 (and thus also the fourth contact electrode 23) is electrically connected to the second pole 9, by the switching means 27, the second input contact 31 to the fourth output contact 43 electrically
  • the third input contact 33 is electrically connected to the second output contact 39, and
  • the first connection contact 16 (and therefore also the first contact electrode 17) is electrically connected to the second measuring input 15, in that the fourth input contact 35 is electrically connected to the first output contact 37 by the switching device 27,
  • Input current is detected as a second input current signal, and wherein the
  • the second connection contact 18 (and therefore also the second contact electrode 19) is electrically connected to the first pole 7, in that the first input contact 29 is electrically connected to the second output contact 39 by the switching device 27,
  • the first connection contact 16 (and therefore also the first contact electrode 17) is electrically connected to the second pole 9, in that the second input contact 31 is electrically connected to the first output contact 37 by the switching device 27,
  • the fourth connection contact 22 (and thus also the fourth contact electrode 23) is electrically connected to the first measuring input 13, in that the third input contact 33 is electrically connected to the fourth output contact 43 by the switching device 27, and
  • the third connection contact 20 (and thus also the third contact electrode 21) is electrically connected to the second measuring input 15 by the fourth input contact 35 being electrically connected to the third output contact 41 by the switching device 27,
  • Input current is detected as a third input current signal, and wherein the
  • the fourth connection contact 22 (and thus also the fourth contact electrode 23) is electrically connected to the first pole 7, in that the first input contact 29 is electrically connected to the fourth output contact 43 by the switching device 27, - the third connection contact 20 (and thus also the third contact electrode 21) is electrically connected to the second pole 9, in that the second input contact 31 is electrically connected to the third output contact 41 by the switching device 27,
  • Output contact 39 is electrically connected
  • Input current as fourth input current signal and the voltage present between the first 16 and second 18 terminal contacts (or between the first 17 and second 19 contact electrodes) is detected as the fourth output voltage signal.
  • the energy source 5 is designed to provide an alternating voltage, the alternating voltage source 5 being designed as an example for providing a harmonic or sinusoidal alternating voltage.
  • the AC voltage source 5 is designed such that the first pole 7 and the second pole 9 are acted upon with antiphase alternating voltages or AC potentials, so that for the voltage applied to the first pole 7 AC voltage () and the voltage applied to the second pole 9 AC voltage (as in Figure 1 by the
  • the AC voltage source 5 may be formed (not shown) such that one of the two poles (eg, the first pole 7) is connected to the ground potential of the measuring device 1, and that the other of the two poles (eg, the second pole 9) an AC potential or with a
  • the measuring device 1 is by means of the evaluation device 51 for determining the series resistance and the transverse resistance of the measurement object 3
  • Measuring object 3 is formed based on the Fourier transform input current signals and the Fourier transform output voltage signals.
  • the input current signals and the input current signals are formed based on the Fourier transform input current signals and the Fourier transform output voltage signals.
  • Output voltage signals are detected as analog signals, these digitized analog signals and thus converted into digital signals, and these digital signals Fourier transform by means of discrete Fourier transform (also referred to as DFT).
  • DFT discrete Fourier transform
  • Measuring device 1 a second analog-to-digital converter ADC2 for converting the output voltage signals into digital signals and a second
  • Output voltage signals by means of DFT has. It can also be provided that the analog-to-digital converters ADC1 and ADC2 and the Fourier analyzers DFT1 and DFT2 (or their functionality) in the evaluation device 51
  • harmonic alternating voltage provided by the power source 5 leads to harmonic or sinusoidal input current signals according to the equation
  • FIG. 2A shows the temporal course of an exemplary harmonic
  • FIG. 2B shows the associated Fourier-transformed
  • Input current signal which is in the form of a frequency domain signal.
  • FIG. 2C shows the time course of one of the input current signal caused exemplary output voltage signal
  • FIG. 2D shows the associated Fourier-transformed output voltage signal which is shown in FIG
  • the harmonic-dependent resistance elements result from the
  • the measuring device 1 is also designed (eg by means of the evaluation device 51 or a data memory implemented therein) for storing the detected input current signals, the detected output voltage signals, and the determined resistance values.
  • the measuring device 1 has a measuring object receptacle 4 for storing the
  • Each of the contact electrodes 17, 19, 21, 23 is formed with a tip, wherein the tip acts as a contact point for contacting the measurement object 3.
  • the measuring device 1 is designed in such a way that the first 17, second 19, third 21 and fourth 23 contact electrodes (or their contact points) are movable relative to the measuring object receptacle 4 and the measuring object 3 (in FIG.
  • the measuring device 1, a contact element 55, wherein the contact electrodes 17, 19, 21, 23 are fixed in a fixed predetermined geometry on the contact element 55.
  • the contact element 55 can be moved together with the contact electrodes along the direction of movement indicated by the double arrow 55 relative to the measurement object receptacle 4.
  • the contact electrodes are fixed to the contact element 55 in such a geometry that the
  • Connecting line between the first 17 and the second 19 contact electrode is not parallel and not perpendicular to the connecting line between the third 21 and the fourth 23 contact electrode.
  • the contact electrodes are arranged as an example such that the contact electrodes (or their contact points) form the vertices of a non-rectilinear rectangle, with the first 17 and second 19 contact electrodes facing each other diagonally, and with the third 21 and fourth 23 contact electrodes facing each other diagonally ,
  • Figure 3 illustrates the contact element 55 with the in the form of an uneven rectangle
  • FIG. 4 shows a measuring device 1 according to another embodiment.
  • the energy source 5 is designed as a DC voltage source 5, of which between the poles 7 and 9, a DC electrical voltage is provided.
  • the input current is a direct current.
  • the measuring device according to FIG. 4 is designed to carry out the first, second, third and fourth measuring sequences already described with reference to FIG. 1 with the corresponding wiring configurations, in particular for detecting the associated first, second, third and fourth input current signal and for detecting the first second, third and fourth
  • the measuring device 1 according to FIG. 4 is designed without the second resistance component 49.
  • the measuring device 1 according to FIG. 4 is designed as an example in such a way that the first input current signal from it in the respective measuring sequence by means of the current signal generating device 47 , the second input current signal is the third
  • Input current signal the fourth input current signal and by means of
  • the first output voltage signal the second output voltage signal the third output voltage signal 3 and the fourth output voltage signal be recorded. As shown in FIG. 4, the
  • the measuring device 1 is for determining the series resistance and the transverse resistance of the measuring object 3 based on the first, second, third and fourth input current signal and based on the first, second, third and fourth output voltage signal, as explained in more detail below. According to the embodiment of Figure 4, the measuring device 1 according to according to equation (1) for determining the quotient U 34 / I 12 from the first
  • ADC1 first analog-to-digital converter
  • ADC2 second analog-to-digital converter

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Abstract

L'invention concerne un dispositif de mesure servant à caractériser la résistance électrique d'un objet sous test, comprenant une source d'énergie électrique présentant deux pôles, un dispositif de mesure de la tension présentant deux entrées de mesure, quatre contacts de connexion pour le raccordement de quatre électrodes de contact, et un dispositif de commutation pour la connexion électrique variable par paires respectivement d'un des pôles et des entrées de mesure avec respectivement un des contacts de connexion de manière à former différentes configurations de circuit, le dispositif de mesure étant conçu pour réaliser au moins deux séquences de mesure avec différentes configurations de circuit et pour déterminer la résistance longitudinale de l'objet sous test en tenant compte de signaux de courant et de tension détectés dans ces configurations de circuit.
EP18709975.9A 2017-03-14 2018-03-01 Dispositif de caractérisation de la résistance électrique d'un objet sous test Pending EP3596451A1 (fr)

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DE102017105317.4A DE102017105317B3 (de) 2017-03-14 2017-03-14 Vorrichtung zum Charakterisieren des elektrischen Widerstandes eines Messobjekts
PCT/EP2018/054992 WO2018166800A1 (fr) 2017-03-14 2018-03-01 Dispositif de caractérisation de la résistance électrique d'un objet sous test

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DE102018106466B3 (de) * 2018-03-20 2019-04-25 Helmholtz-Zentrum Dresden - Rossendorf E.V. Verfahren zur kontinuierlichen Bestimmung sämtlicher Komponenten eines Widerstandstensors von Dünnschichten
DE102018125789A1 (de) * 2018-10-17 2020-04-23 Krohne Messtechnik Gmbh Leitfähigkeitssensor und Verfahren zur Herstellung eines Leitfähigkeitssensors
RU2739518C1 (ru) * 2020-03-12 2020-12-25 Федеральное государственное унитарное предприятие «Всероссийский научно-исследовательский институт автоматики им.Н.Л.Духова» (ФГУП «ВНИИА») Способ измерения падения напряжения с помощью четырёхконтактных устройств с исключением падения напряжения на контактных сопротивлениях

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US20190346387A1 (en) 2019-11-14
DE202018006813U1 (de) 2023-02-28
US11156574B2 (en) 2021-10-26
CN110392827A (zh) 2019-10-29
WO2018166800A1 (fr) 2018-09-20
CN110392827B (zh) 2022-05-13
DE102017105317B3 (de) 2018-05-09

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