EP3363045B1 - Device and method for self-adjustment of a component handling device for electronic components - Google Patents
Device and method for self-adjustment of a component handling device for electronic components Download PDFInfo
- Publication number
- EP3363045B1 EP3363045B1 EP16775131.2A EP16775131A EP3363045B1 EP 3363045 B1 EP3363045 B1 EP 3363045B1 EP 16775131 A EP16775131 A EP 16775131A EP 3363045 B1 EP3363045 B1 EP 3363045B1
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- Prior art keywords
- point
- pick
- component
- turning device
- turning
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Definitions
- This device and this method are explained in cooperation with a component handling device, a receiving device and an imaging sensor.
- a component here is, for example, an (electronic) semiconductor component, also referred to as "chip” or “die”.
- Such a component generally has a prismatic shape, an essentially polygonal, for example quadrangular (rectangular or square) cross section with a plurality of lateral surfaces, and an end face and a top face.
- the lateral surfaces and the two (lower and upper) top surfaces of the component are generally referred to below as side surfaces.
- the component can also have a different number of outer surfaces from four.
- a component can also be an optical component (prism, mirror, lens, etc.). Overall, a component can have any geometric shape.
- So-called pick-up and setting-down devices are known from the operational practice of the applicant, in which components are picked up from a component table by means of a suction device or holding device and then placed on a carrier or in a transport container or the like. An inspection of the component usually takes place before the component is put down. For this purpose, images of one or more side surfaces of the component are recorded with one or more cameras and evaluated using automated image processing.
- the pick-up and depositing devices of the components must be measured and then adjusted in order to compensate for manufacturing and assembly tolerances. This is done by an operator who first visualizes the pick-up and setting-down device with the aid of a microscope or a camera image in order to then measure and adjust it.
- the process is extremely time-consuming, prone to errors in practice and ties up highly qualified personnel.
- a component handling device should enable precise adjustment to be carried out in a time-efficient manner.
- a component handling device for removing prismatic components from a structured component supply and for storing the removed components on a receiving device, which has an integrated self-adjusting device.
- a first turning device with a plurality of pickups is set up to receive a component from the structured component supply at a dispensing point, to convey the received component by a first predetermined angle about its longitudinal or transverse axis to promote the deposit point.
- Position and property sensors assigned to the first and second turning devices are set up to record position data of the first and second turning devices, position data of components located on the sensors, and / or properties of components located on the sensors, and make them available for control ,
- the control is set up by position and property sensors, in particular before the actual component transfer operation, in the course of a self-adjustment for each transmission position in which the first and / or the second turning device receive or transfer components, a correction vector for the first and / or to determine the second turning device and / or for the storage location, which is directed in each case against the manufacturing and assembly inaccuracies of the component handling device determined in the course of the self-adjustment.
- the controller is also set up to rotate the first turning device about a first axis in a controlled manner by means of a first rotary drive, to move the first turning device along the first axis in a controlled manner by means of a first linear drive, and to rotate the second turning device about a to the first axis by means of a second rotary drive to rotate the non-collinear second axis in a controlled manner and to move the second turning device along the second axis in a controlled manner by means of a second linear drive.
- the correction vector determined by the self-adjustment is used to control the component handling device in the component transfer mode in order to counteract the manufacturing and assembly inaccuracies of the component handling device determined in the course of the self-adjustment by controlled movement and / or turning of the turning devices and / or the depositing point.
- the arrangement presented here forms an integrated handling / inspection device which enables automated self-adjustment.
- Imaging sensors inspect all or almost all of the top and / or side surface (s) of a component and also provide relevant data for the positioning of the manipulators (sensors) and the receiving points.
- This device thus forms the core of a closed machine system with the necessary process technology peripherals, for example for the provision of the components (for example wafer table) and component storage (for example pocket or carrier belt).
- the component handling device presented here takes over components from, for example, a component supply (wafer disc) arranged horizontally in the upper region of the component handling device with a stationary ejection unit. The supply of components moves in the plane relative to this stationary ejection unit.
- the ejection unit by means of a needle or contactlessly (for example by means of a laser beam), causes the components to be released individually from the component supply and to be picked up by a sensor.
- the ejected components are fed to a total of up to six or more inspection processes and then conveyed to receiving points (pockets) on the pocket or carrier belt.
- receiving point and (storage) bag are used interchangeably here. Bad parts can be removed.
- the optical examination of the component integrated in the transfer process is divided into several examination processes. It uses one or more imaging sensors for optically detecting the top and / or outer surface (s) of a component and the positions of the sensors at the transfer / reception points.
- imaging sensors are set up to in each case at least one image of one of the cover and / or lateral surfaces in a plurality of examination processes of a component.
- the conveying / transport of the components takes place while sensors of turning devices each hold one component. A held component passes through individual examination processes during transport.
- the recorded (image) data of the imaging sensors also serve to coordinate the position control of the manipulators (pickups) and the receiving points.
- the component conveyor is set up to convey a component along its path essentially continuously or in cycles.
- the device at least partially uses the imaging sensors provided for component inspection in component transfer mode.
- additional imaging sensors can be provided which optically detect those areas of the device on which a component is transferred from one device component to another device component from at least two different viewing angles.
- the controller is set up to determine a, up to 3-dimensional, correction vector for each component transfer point for each possible transfer position of the first and the second turning device, which correction vector serves to counteract the manufacturing and assembly inaccuracies of the component handling device during operation of the component handling device.
- the complete assembly presented here combines three functional aspects: handling, adjustment of handling, and inspection. These three functions are woven into each other for quick and precise qualitative assessment of several (up to six or more) sides of the components, while these are quickly removed individually from the component stock and classified as good parts by the inspection at the receiving point (s).
- the component handling device has only a first turning device, which picks up the component from the dispensing device at the dispensing point and conveys it to the depositing point in order to transfer it there to a receiving device.
- the component handling device has two, approximately star-shaped or wheel-shaped turning devices, preferably operated in a controlled manner, preferably arranged essentially orthogonally (90 ° plus minus up to 15 °) to one another.
- the turning devices could also have a rectangular shape.
- Each of these turning devices carries a plurality of transducers which can be moved radially with respect to its axis of rotation, in order to feed the components, each fixed on a transducer, within a swivel angle between component transfer and transfer to one or more process stations for inspection, bad part removal and possibly further stations.
- the star-shaped or wheel-shaped turning devices carry the components on radially outward-pointing sensors which are arranged on the (imaginary) circumference of the two turning devices. This can be seen in contrast to such component handling devices in which the sensors of one or both turning devices are oriented coplanar or parallel to the axis of rotation thereof.
- the (upper / lower) cover and / or (lateral) lateral surface (s) of a component detected by the imaging sensors in the individual examination processes can be different cover and / or lateral surfaces of the component.
- One aspect of the optical examination provides that the component conveyance with a component completes the component path essentially without or almost without standstill.
- One or more cover and / or lateral surfaces of a component are detected with the imaging sensors during the movement or during the minimal downtimes. These images are then evaluated using image processing methods.
- a variant of this optical detection / examination provides that one or more color cameras or black and white cameras are provided as imaging sensors.
- the imaging sensors can have one or more mirrors, optical prisms, lenses or the like.
- Radiation or light sources can be assigned to the imaging sensors. Each source can be set up to emit light / radiation with a different spectral or wavelength range for illuminating at least a section of the component. The wavelength ranges can at least partially differ from one another, overlap or match. For example the light of the first light source is red and the light of the second light source can be blue. The reverse assignment or another wavelength pairing (for example infrared and visible light) can also be selected.
- the light sources can be switched on briefly by a control arrangement at the moment when the sensor with the component is in the respective detection area, so that the top and / or outer surfaces of the component are exposed with a short flash of light for detection by the respective imaging sensor can.
- permanent lighting can be used.
- the component handling device is assigned a delivery device, which is set up to deliver a component from the structured component supply to a sensor of the first turning device that is appropriately positioned by the control.
- This can be a component ejector (the ejector), which repels the component through the wafer carrier film by means of a needle, or a laser pulse generator, which deliberately melts the adhesive of the component on the carrier film.
- the dispensing device is assigned a position and / or property sensor which is set up to detect the position of the dispensing device relative to the component to be dispensed and / or position data of the component to be dispensed, and / or properties of the component to be dispensed and for the control to actuate the To provide delivery device.
- this position and / or property sensor is set up to determine a position of a pickup of the first turning device relative to the dispensing device and to make it available to the controller for self-adjustment of the component handling device.
- the component handling device is equipped with a receiving device assigned to the storage location for a component conveyed there.
- Position and / or property sensors are assigned to the receiving device, which are set up to record position data of the component conveyed to the storage location, position data and / or properties of receiving points in the receiving device and / or the component located therein and are available for a control put.
- the position and / or property sensors are set up to position the receiving point relative to a sensor of the second turning device to be determined and made available to the control for self-adjustment of the component handling device.
- the controller is set up to use a third rotary drive to at least partially rotate the receiving device in a controlled manner about a third axis containing the storage location.
- the controller can also be set up to move the receiving device in a controlled manner at least partially along an axis by means of at least one third linear drive.
- the controller can also be set up to move a carrier guided by the receiving device along one of the first and / or second axes in a controlled manner by means of a linear drive. This carrier is used to hold the components in individual form.
- the transducers of the first and / or the second turning device are set up to be extended and retracted in a controlled manner radially to the axis of rotation or the center of rotation of the respective turning device, and / or to receive and deliver a component to be conveyed in a controlled manner Vacuum and / or overpressure to be applied, and / or to be immovable about their respective radial movement axis, or to be rotated in a controlled manner by an angle of rotation about their respective radial movement axis.
- the sensors of the first and / or the second turning device for radial extension / retraction at the dispensing point, the transfer point between the first and second turning devices are provided in a variant of these sensors.
- These linear drives engage in the correspondingly positioned transducers from outside the respective turning devices and move the respective transducer radially in and out.
- these linear drives only extend the respective transducer, while a return spring retracts the respective transducer.
- a bidirectional or unidirectional radial drive is assigned to each of the sensors.
- valves provide a supply of underpressure and excess pressure to each of the individual transducers individually and in the correct position in order to freely or position-controlled the functions: (i) suctioning the component, (ii) holding the component, (iii) depositing the component with or without a controlled blow-off pulse and / or free blow-off of the component.
- position and property sensors are assigned to the first turning device between the dispensing point and the transfer point, and / or the second turning device between the transfer point and the deposit point. These sensors are set up to record position data and / or properties of the conveyed component and / or position data for position control of the manipulators (pickups) and the receiving points and to make them available for the control.
- these sensors are set up to determine a position of a transducer of the first turning device relative to a previously defined reference point and / or to determine a position of a transducer of the second turning device to a previously defined reference point and these relative positions of the control for self-adjustment of the To provide component handling device.
- the relative positions of the transducers of the first and / or second turning device to the defined reference points with the relative positions of the transducers to each other and / or to the delivery device and / or to the receiving point for each transducer are compared by the controller in order to determine the detection quality of the Check sensors and / or the sensor's freedom from damage.
- At least some of the position and property sensors are set up to inspect at least one top surface and / or one or more lateral surfaces of the component being conveyed in order to record its position data and / or properties and to make them available for the control.
- At least one imaging property and / or position sensor for determining properties and / or the position of a component to be received or for determining the position of receiving points are in the center of the first turning device and / or in the center of the second turning device provided in the receiving device and / or component located therein. Based on the property data and / or the location data of the sensor / these sensors, a correction can then be made by the controller in the event of property errors and / or location errors of the component to be received or the receiving point.
- the imaging is / are Position sensor (s) set up to perform an image acquisition during the turning movement of the first or second turning device between adjacent sensors and to make them available for the control to initiate corresponding corrective movements of the ejection unit, the component supply or wafer, the turning devices and / or the receiving device.
- the ejection unit is fixed.
- the imaging position and / or property sensor (s) positioned in the center of the first / second turning device has / have a reflector arrangement which indirectly detects the ejection unit, the component supply or wafer, the sensors of the allowed first / second turning device and / or the receiving device while the turning devices are in a position intended for the transmission of components (transmission position).
- the position and / or property sensor in the center of the first turning device is set up to determine a position of a sensor of the first turning device relative to the dispensing device and to make it available to the controller for self-adjustment of the component handling device.
- a further position and / or property sensor is provided in the center of the first turning device, which is configured to determine a position of a sensor of the second turning device relative to the position of a sensor of the first turning device and is available to the control for self-adjustment of the component handling device to deliver.
- the position and / or property sensor in the center of the second turning device is set up to determine a position of the receiving point relative to a sensor of the second turning device and to make it available to the control for self-adjustment of the component handling device.
- a further position and / or property sensor is provided in the center of the second turning device, which is configured to determine a position of a sensor of the second turning device relative to the position of a sensor of the first turning device and is available to the controller for self-adjustment of the component handling device to deliver.
- imaging property and / or position sensors can be used to determine properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or the component located therein. Based on the property data and / or the location data of this sensor / these sensors, a correction can then be made by the controller in the event of property errors and / or location errors of the component to be received or the receiving point.
- an upward-facing component supply camera (with a 90 ° mirror system and lighting) or a preferably, but not necessarily identical, downward-facing assembly can be placed in the center of the two turning devices
- Filing camera can be arranged. They are used to record the position of the components or the receiving points with the aim of correcting the position in the event of position errors of the components or receiving points.
- the sensors for self-adjustment of the component handling device can be integrated.
- At least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the dispensing point of the components and are set up to position a sensor of the first turning device relative to the dispensing device to be determined and made available to the control for self-adjustment of the component handling device.
- At least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the transfer point of the components and are set up to position a sensor of the second turning device relative to the position to determine a transducer of the first turning device and to make it available to the controller for self-adjustment of the component handling device.
- At least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the depositing point of the components and are set up to position the receiving point relative to a sensor of the second To determine the turning device and to provide the control for self-adjustment of the component handling device.
- a transfer point is arranged upstream or downstream of the transfer point and / or the deposit point, which is set up, controlled by the control, to discharge a component identified as a bad part by the control by means of at least one of the position and property sensors, and it not to be placed as a good part in the receiving facility.
- the first and / or the second turning device are each assigned an integer number of n pickups.
- n> 2.
- the number of sensors of the first turning device and the number of sensors of the second turning device can be the same or different.
- the first, second and / or third axes each form an angle of 90 ° plus / minus a maximum of 10 ° or 15 °.
- the position / property sensors are imaging sensors with matching or differing detection spectra, or contact or distance sensors that measure distance, or property or sensors that measure contact or contact.
- the position and property sensors can be imaging sensors with straight or kinking optical axes.
- the spatial arrangement of the camera systems of the position and property sensors, including their mirror and lighting units, can be combined in such a way that the component inspection of the facing component surface and two of its lateral surfaces can be carried out in parallel at a single process position.
- two process positions are sufficient for the complete inspection of all six side surfaces of a cuboid component, for example.
- three of the six side surfaces are captured by the component at each of the two process positions.
- the inspection position of each turning device can be defined as the third process position approximately horizontally at the level of the axis of rotation or swivel.
- Additional position measuring tasks can be assigned to two other camera systems (front / rear camera).
- the first and / or second turning devices are at least approximately star-shaped or wheel-shaped.
- the turning devices can be precision-mounted and their positioning along the respective axes or around the respective axes can be carried out by means of an axially arranged linear or rotary drive, paired with a high-resolution (for example rotary or linear) encoder.
- the respective transducers can be distributed around the outer circumference and have suction contact points for the components to be conveyed that point radially outward.
- One advantage of the arrangement of the turning devices is that the components are in their position during the conveying process when transferring from one turning device to the next, a 90 ° rotation about the sensor axis, relative to the respective movement plane of the sensors ( or turning device axis) without the sensor itself having to be rotatably supported for this purpose.
- the detection of the incorrect positioning of the transducer and the component relative to one another or to the transfer and inspection positions is carried out using the camera systems as the measuring system that records the transducer or component position.
- three distance-measuring sensors can additionally be additionally provided for the bond tool position detection per turning device.
- the optical axes of the cameras "penetrate" the inspected component surface. They form a reference system for the sensor position. From this, deviations of the sensor movement path from the target movement path can be determined by the distance-measuring sensors arranged in a plane parallel to the ideal sensor movement plane of the rotating turning device. From this, the position errors that occur in the transfer positions can be determined and compensated for by the control.
- the reference measurements for the sensor position and / or the self-adjustment in the running process can also be carried out during cyclically repeating reference runs (for example, necessary by means of touching measuring sensors).
- the self-adjustment can be carried out before the component handling device is started up.
- the controller is set up to successively rotate each of the first and second turning devices and, with the optical position and property sensors and / or the additional position sensors, to first determine a relative position of each individual sensor of the first turning device relative to the dispensing device, each individual sensor of the second turning device to the transducer of the first turning device opposite each at the transfer point and to determine the position of the receiving points in each case to the transducer of the second turning device located at the storage location.
- the controller is set up to repeat the successive rotation of the turning devices and the determination of the relative positions at least as often until all possible positions of the turning devices with respect to the delivery device, to each other and to the receiving device have been reached at least once.
- the control is also set up to store the determined values in a control table.
- the determined position deviations of the sensors of the first turning device located at the dispensing point relative to a previously defined position relative to the dispensing device each form the correction vector for the first turning device during operation.
- the determined positional deviations of the receiving point relative to a previously defined position relative to the sensor of the second turning device opposite each other at the depositing point are added to the respective correction vector of the second turning device, the respective correction vector of the receiving device.
- a rotational correction movement of the rotor drive and, orthogonally, a linear correction movement in the axial direction is used to compensate for position errors of the turning devices of the transducers, in particular in the component transfer positions and the positioning errors of the components fixed thereon (in transfer and inspection positions), in particular determined by the self-adjustment executed.
- the rotor drive assembly can be arranged on a traversing slide and can be moved through limited travel segments by means of a position-controlled drive, for example an eccentric drive.
- the rigid coupling of a plurality of transducers to a turning device requires the correction values to be transferred from a component transfer position or inspection position to the next positions in the sequence. These corrections can start at a fixed transfer position and end at the last component transfer to the receiving point. The total positional errors along the up to three axes and the rotation around the up to three axes are compensated for by the receiving device.
- the pickups are not rotatably mounted on their respective turning device. This means that components cannot be compensated for errors in orientation themselves during conveying. Therefore, in a variant in the downstream peripheral area, in particular in the receiving device, a rotational correction option must also be provided in addition to the axis position correction.
- the rotation correction is carried out with rotatably mounted sensors. This can compensate for orientation errors of components during the conveying itself.
- the orientation error is then corrected by the rotatably mounted sensors of the upper and / or lower turning device, preferably by the sensors of the lower turning device.
- a solution for a receiving device in particular for a component handling device of the type presented above, is presented, which is set up to at least partially rotate relative to the deposit point by means of a rotary drive about a third axis containing the deposit point, and / or by means of at least one linear drive to move at least partially in a controlled manner along one of the first, second and / or third axes, and / or to move a carrier guided by the receiving device along one of the first and / or second axes in a controlled manner by means of a rotary drive.
- the solution presented here allows the position and position of the turning devices to be compensated simultaneously by the position and / or rotation of the receiving device.
- the component throughput of the machine can therefore be increased compared to the prior art.
- the drives In order to avoid play in the belt drive of the storage belt, the drives must be set relative to one another in the prior art.
- the solution presented here avoids this, since the transport always takes place in one direction. This is particularly helpful in applications in which the pockets of the carrier tape are gradually closed with an adhesive masking tape. If you were to transport the carrier tape back again, problems could arise if the masking tape were to be removed again. The play in the drive can be neglected.
- it can also be transported in the opposite direction.
- the position of the component is corrected at the receiving device. This gives you more time to do it.
- a return transport of the belt in which the components are stored is no longer necessary. So that the receiving device be built more simply.
- a second drive wheel for returning the tape as in the prior art is no longer required. Rather, the entire receiving device is moved against the transport direction of the storage belt in the required situations.
- the advantage is that a higher positioning accuracy of the belt is achieved compared to previously known variants, in which the positioning is accomplished exclusively by the transport of the conveyor belt.
- the subsequent application of a (self-adhesive) cover tape on the conveyor belt can also be done more easily.
- the receiving device is arranged above a stationary base plate, the motors of the three drives are arranged below the base plate.
- the position of the receiving device can be adjusted in X, Y and rotating about the Z axis. Each direction of movement of the receiving device has its own drive.
- the position of the individual drives is not specified.
- the axis of rotation for the Z correction is close to the component storage position or falls in the center thereof.
- the receiving device is equipped with two receiving points which are to be aligned at least approximately in alignment with the depositing point by controlled actuation of the rotary drive of the linear drive (s).
- the two receiving points are to be positioned in relation to one another in accordance with a grid dimension of adjacent component receptacles of the carrier.
- an imaging property and / or position sensor is provided for determining properties and / or the position of a component to be received in relation to its properties and / or its position to at least one of the receiving points in the receiving device.
- This imaging property and / or position sensor is located in or at the center of the lower turning device. The image data from this sensor can be used to generate correction instructions in the event of property and / or position errors of the component to be received or of the receiving point by the controller in order to initiate appropriate correction movements.
- two further imaging property and / or position sensors are provided in the receiving device.
- One sensor is directed from above onto the second window to examine quality errors.
- the other sensor is arranged laterally in the first window in order to be able to better detect a tilting of the component compared to the sensor explained above.
- the fourth rotary drive is set up to be controlled by control signals from the control, and by means of mechanical traction controls the carrier guided by the receiving device along one of the first and / or second axes by approximately 80-120%, preferably approximately 100%. plus minus a maximum of 3% of the grid dimension of adjacent component receptacles of the carrier.
- the rotary drive can also be set up to be controlled by control signals from the control, depending on signals from the imaging property and / or position sensor controls at least one of the receiving points with the component receptacle located there about the third axis containing the depositing point by up to plus minus 6 °, preferably by up to plus minus 3 °.
- the at least one linear drive can be set up to be controlled by control signals from the control, and the receiving device controls by approximately plus or minus a maximum of 20%, preferably by up to plus and minus 3% of the grid dimension of adjacent component receptacles of the carrier along one to move the first, second and / or third axes in a controlled manner.
- the fourth rotary drive is set up to convey the carrier guided through the receiving device forward along one of the first and / or second axes according to a grid dimension of adjacent component receptacles of the carrier.
- a suction and / or blow-out device is provided in order to remove a component identified as defective and / or defective from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
- a pinwheel driven by the fourth rotary drive engages in transport holes in the storage belt for its transport in the conveying direction.
- the spike wheel preferably rotates only in a forward direction.
- the storage belt has storage pockets for the components at regular intervals.
- the spike wheel per storage pocket rotates by a fixed angle (e.g. 30 °, 60 °, 90 °, 180 ° ..., 360 °).
- the position of the storage pocket into which the component has been placed is known from the image recording by the camera in the center of the second turning device. It is also known from the camera on the outer circumference of the second turning device whether the next component to be put down is held rotated on the pickup.
- the turning device will move accordingly in the x and y directions in order to correctly take over the component at the transfer position from the upper to the lower turning device. If necessary, the receiving device is then moved linearly along the (X, Y) axes and, if necessary, rotated to ensure the fine adjustment of the placement of the component.
- the camera has also detected in the center of the second turning device arranged above whether the component is faulty, i.e. whether it was damaged by dropping or had a defect beforehand. If a component was previously recognized as defective, it will not be stored.
- the storage position in the receiving device can also be a first suction position at the same time.
- an extractor with negative pressure is arranged at the storage position on the receiving device.
- the distance between the two windows corresponds to the grid size of the carrier tape and is adjustable to the grid size. If the component has not been placed correctly so that it lies at an angle, or is still partially protruding, this is recognized by a camera in the center of the second turning device. The carrier tape cannot be transported due to the incorrectly placed component.
- the component is therefore suctioned off at the storage position and replaced by the next component to be stored. If the component is damaged, it can also be removed at this position and replaced with the next component to be placed.
- an additional camera can be used to inspect for errors. In the case of a component identified as defective, the receiving device is moved back as a whole and suctioned off at the component recognized as defective at the storage position.
- the second suction position can be used to remove the component identified as defective.
- the component is with the first and second turning device to place, and to remove a component recognized as defective at the storage position. This takes place in a common position.
- the receiving device moves in three directions: in the X and Y directions, and about its (Z) vertical axis in / near the center of the storage position. This can also be seen in contrast to conventional arrangements in which the carrier belt is conveyed in the transport direction and the receiving device is moved perpendicular to the belt transport direction for positioning in relation to the component storage.
- the storage location can also be in the form of a shell (a tray, e.g. Jedec tray) or as an antenna track.
- a suction and / or blow-out device is assigned to the receiving device in order to remove a component identified as defective and / or incorrectly placed from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
- the receiving device can receive components from a turning device, the axis of rotation of which is oriented essentially parallel to the conveying direction of the receiving device, or in a further variant, the receiving device can receive components from a turning device, the axis of rotation of which is essentially transverse to the conveying direction of the receiving device.
- an imaging property and / or position sensor for determining properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or the component located therein is provided in the center of the turning device.
- This imaging property and / or position sensor is set up to carry out image acquisitions of at least one of the receiving points in the receiving device between adjacent sensors located on the periphery of the turning device.
- a deflection mirror or prism is arranged in the center of the turning device, which is assigned to the imaging property and / or position sensor arranged outside the turning device, for determining properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or component located therein.
- the deflecting mirror or the prism together with the imaging property and / or position sensor arranged outside the turning device are set up to carry out image feeds of at least one of the receiving points in the receiving device between adjacent sensors located on the periphery of the turning device.
- the receiving device can be moved at least partially along a first axis in a controlled manner in both directions relative to a storage location by means of a linear drive.
- a carrier guided through the receiving device can be moved along one of the first and / or second axes in a controlled manner in a conveying direction of the carrier.
- the carrier guided through the receiving device is equipped with two receiving points, which are to be aligned at least approximately in alignment with a depositing point for components by controlled actuation of the drives.
- An imaging property and / or position sensor delivers properties and / or position of a component to be examined with respect to its properties and / or its position in at least one of the receiving points in the receiving device.
- correction instructions for property and / or position errors of the component are given by a controller for initiating appropriate correction movements of the receiving device and / or of the carrier guided therein.
- a suction and / or blow-out device is assigned to the receiving device in order to remove a component identified as defective and / or defective from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
- the imaging position and / or property sensor (s) positioned in the center of the first / second turning device has / have a reflector arrangement which permits / allows the indirect detection of the receiving device, while the turning devices are in one Transfer of components intended position (transfer position).
- An imaging sensor is therefore proposed as a variant, which is suitable and intended for detecting the position and / or properties of a component, in particular in a component handling device of the type disclosed above.
- This imaging sensor is equipped with at least two different detection spectra. It is particularly suitable and intended for the detection of property errors and / or position errors of a component located in the receiving point of a receiving device.
- This imaging sensor is suitable and intended to interact with radiation sources which are matched to the imaging sensor with respect to the radiation spectrum and radiation incidence angle and / or radiation reflection angle relative to the imaging sensor.
- the imaging sensor is suitable and set up to provide a separate image acquisition for each of its acquisition spectra for an image evaluation arranged downstream of it.
- the at least two different detection spectra are configured in the visible and invisible range. They can also be designed as a red color range - 630 nm plus minus 30 nm -, and / or green color range - 530 nm plus minus 60 nm - and / or blue color range - 460 nm plus minus 50 nm - of a color sensor.
- optically active elements are provided which are set up to optically couple the sensor to a component in at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
- the optically active elements include deflecting mirrors, prisms, color filters and / or lenses.
- optically active elements and / or the radiation sources can be set up to be activated, aligned and / or adjusted / focused independently of others.
- the integrated handling / inspection device disclosed here uses imaging sensors which on the one hand inspect all or almost all of the top and / or side surface (s) of a component and on the other hand also relevant data for positioning the manipulators (sensors) on the first and / or the deliver the second turning device and the receiving points.
- the imaging sensor of the first (upper) turning device is a color camera in the center of the turning device.
- the camera can also be a black / white camera, which in another variant interacts laterally and with a 45 ° deflection mirror in the center of the turning device.
- this camera captures the component separated from the component supply in the next step by the component ejector during the rotation of the upper turning device through the gap between two sensors. An inspection of the component as well as its exact position determination in the component stock is possible from the image acquisition obtained in the process. The image is taken in during the rotation of the upper turning device, in the period called the viewing window.
- the camera positioned in the center of the first (upper) turning device has a mirror arrangement which allows the component ejector to be detected indirectly, while the turning devices are in a position (transfer position) intended for transferring components.
- the integrated handling / inspection device disclosed here also uses imaging sensors in the form of lateral cameras on the upper turning device. These are arranged approximately at 90 ° radially outside the upper turning device in such a way that the component on its flight circle is captured frontally by a central camera and is detected by the circumferential surface opposite each other on both sides of the central camera. These cameras are not necessarily color cameras. Several image feeds can be made because the upper turning device stops briefly (10 ms to 60 ms, for example 40 ms) due to the subsequent component transfer in the 180 ° position. This short downtime is sufficient for the inspection. Black and white cameras can also be used for this. With the side inspection by the two Lateral cameras are used to examine the end faces of the component for damage.
- the back of the component is examined for damage.
- several image feeds can be carried out to highlight various defects.
- the cameras used here can also be color cameras. However, this is not absolutely necessary, since, as already mentioned above, sufficient time is available due to the downtime.
- the integrated handling / inspection device disclosed here also uses imaging sensors in the form of lateral cameras on the lower turning device. These are arranged approximately at 90 ° radially outside the lower turning device in such a way that the component on its flight circle is captured frontally by a central camera and opposite surfaces are detected by the cameras located on both sides of the central camera. These cameras are not necessarily color cameras. Rather, black and white cameras can also be used.
- the component is examined for errors and the image data are evaluated for position data.
- the cut surfaces of the component are examined for damage.
- the back inspection by the middle camera the back of the component is examined for damage.
- several image feeds can be carried out to highlight various defects.
- the position data (x, y, rotation) of the component can be determined with the side inspection.
- the back inspection is used for this. This information is used by the control to make any corrections.
- the cameras used here can also be color cameras. However, this is not absolutely necessary since there is sufficient time available during the downtime period.
- the integrated handling / inspection device disclosed here also uses imaging sensors in the form of a camera in the center of the lower turning device.
- This camera can be a color camera with three individual channels R, G, B. It is irrelevant whether a 3-chip color camera or a 1-chip color camera is used. 3-chip cameras have a separate image sensor for each color R, G, B, a 1-chip camera uses alternately activated filters in front of the image sensor.
- a black / white camera that can be used here has a channel with, for example, 255 gray levels, with a color camera each of the three channels has, for example, 255 Intensity levels of a color. It is essential that the three color channels of the camera can be addressed / read separately from one another, or at least that the three color channels can be split in the control.
- Different exposure times are possible for each channel.
- the following exposure times can be used here, for example: 5 ms (green), 12 ms (red), 15 ms (blue).
- different lighting colors are also used in the integrated handling / inspection device disclosed here.
- White light is a mixture of all colors, so that with this lighting color all channels could be addressed at the same time. However, this does not take place here if the achievable image quality does not meet the requirements.
- the imaging sensor is assigned a semitransparent mirror, which is arranged at an angle of approximately 45 ° to the optical axis of the camera chip and is used to optically couple in and on colored light from two, more or any number of different detection spectra from corresponding light sources to establish an inspection area.
- This light directed onto the inspection area that is to say the component top surface or side surface and possibly its surroundings in the pocket, is reflected there and is detected by at least one camera chip of the imaging sensor.
- the imaging sensor is assigned a light source as a ring light source around the inspection point.
- This ring light source provides scattered light at an angle of approximately 5 ° - 45 ° in a third color range.
- This light directed onto the inspection area is also reflected there and is detected by at least one camera chip of the imaging sensor.
- the light or the differently colored light sources can be arranged as desired or also have the same radiation angle.
- the integrated handling / inspection device disclosed here uses a deflecting mirror in the center of the lower turning device for coupling in a coaxial illumination of the receiving device. More precisely, the carrier guided through the receiving device is captured in the form of a storage belt with storage pockets for the components with the camera. With a single image acquisition, an inspection is carried out for errors, for example the component being placed at an angle so that it is not correctly positioned in its storage pocket, or for quality defects. In addition, the position data of the storage pocket of the storage belt for the storage of the next component are recorded by this single image recording.
- the one from the individual Color channels of information to be obtained can be divided as desired according to the tasks to be examined, for example as follows: Image channel 1 with lighting type 1: position of the storage pocket of the storage belt for positioning the next component. Image channel 2 with lighting type 2: quality inspection of the component (cracks, laser marks, breakouts, ). Image channel 3 with lighting type 3: additional inspections for special components or customer-specific errors.
- the component is deposited "blindly". This means that the actual filing process is based on information or position data that was obtained before the filing process from the image recording that is assigned to the previous component. At the moment of the depositing process, the camera does not see the depositing point in the center of the second turning device, since the pickup that is currently depositing blocks the view.
- information or position data as to whether a component is twisted is provided by a camera on the outer circumference of the lower turning device.
- the information or position data is passed on to the control of the receiving device.
- the position of the receiving device is known from the image of the component previously deposited in the storage pocket of the storage belt.
- the distance between the two pockets is also known. From this, it can be calculated for the next component to be deposited by which angle and x and y amount the receiving device has to be moved.
- the arrangement of imaging sensors presented here is able to manage with fewer image feeds than conventional sensor arrangements.
- the image data obtained can be evaluated both for the removal of bad parts and for the positioning of the actuators of the handling / inspection device.
- This integrated architecture and the resulting procedure reduce the process time and offer an increased inspection quality with an increased throughput.
- FIG. 1 A component handling device 100 for removing prismatic components B in the form of electronic semiconductor chips from a structured component supply and for storing them on a receiving device 200 is illustrated.
- the component handling device 100 presented here takes over the components B from a component supply arranged horizontally in the upper region of the component handling device, here a wafer, with a stationary ejection unit 110.
- the ejection unit 110 works with a needle controlled by a control ECU or, for example, works contactlessly with a laser beam in order to release the components individually from the component supply so that they are fed to a first turning device 130.
- This first turning device 130 has the shape of a star or wheel and has a plurality (in the example shown eight) of receivers 132 for the individual components B on its circumference.
- Each of the receivers 132 is set up to receive a component from the structured component supply at a dispensing point SPS, when it is closest to the ejection unit 110 at the 0 ° position of the first turning device 130.
- the sensors 132 are arranged on the (imaginary) circumference of the star-shaped or wheel-shaped first turning device 130 and point the components B.
- the sensors 132 of the first turning device 130 can be moved radially to the axis of rotation (here the X-axis).
- these pickups 132 can convey the components B, each fixed to one of the pickups 132, within a swivel angle - here between 0 ° and 180 ° - between component transfer and transfer.
- the first turning device 130 rotates the component B, controlled by the control unit ECU, which is not further illustrated, about a first axis, here the X axis, to a first transfer point US by a first predetermined angle, here 180 °.
- Component B is turned around its longitudinal or transverse axis.
- a second turning device 150 similar to the first turning device 130, with several, here also eight, second pickups 152 is set up to receive the component B at the transfer point ÜS from a pickup 132 of the first turning device 130 when the component is at 0 ° Position of the second turning device 130 is closest to the transfer point ÜS.
- the second turning device 150 turns the received component B, controlled by the control ECU, about a second axis, here the Y axis, by a second predetermined angle, here by about 180 °, about its longitudinal or transverse axis and conveys it to one Storage location ABS.
- the first turning device 130 also rotates the component B, controlled by the control unit ECU, which is not further illustrated, about the first axis (here the X axis) by a first predetermined angle, here 180 °.
- component B is also turned around its longitudinal or transverse axis, but is conveyed directly to the storage location ABS without first being transferred to a second turning device 150.
- the first, second and / or third axes each form an angle of 90 ° plus / minus a maximum of 10 ° or 15 ° and are based on a three-dimensional orthogonal coordinate system.
- the two star-shaped or wheel-shaped turning devices 130, 150 are arranged orthogonally to one another and otherwise have the same structure. Deviating from the representation in Fig. 1
- the arrangement of the two turning devices 130, 150 relative to the conveying direction of the receiving device 200 can also be rotated through 90 ° about the Z axis.
- the lower turning device 150 is oriented at least approximately transversely to the conveying direction of the receiving device 200.
- Position and property sensors K1 ... K4, K7 ... K11 are assigned to the first and second turning devices 130, 150. As in Fig. 1 shown, these sensors are located at several locations in the overall arrangement. They are set up to record position data of the first and second turning devices 130, 150, position data of components B located on the pickups 132, 152, and properties of components B located on the pickups 132, 152. The data obtained is made available to a controller. In the embodiment illustrated here, a first camera arrangement K1 in the center of the first turning device 130 is directed vertically upwards onto the component supply.
- Camera arrangement K1 in this case comprises a camera and two mirrors arranged at right angles to one another, each of which is attached at a 45 ° angle relative to the plane spanned by the X and Y axes. These mirrors allow the dispensing point SPS and the ejection unit 110 and the sensor 132 located at the dispensing point SPS to be detected indirectly from a first and a second detection direction.
- the mirrors are arranged in such a way that the two detection directions are orthogonal to one another.
- a second camera arrangement K2 with three cameras - in Fig. 1 not visible - is directed at the periphery of the first turning device 130 at 90 ° to the component B guided past it. Details of this second camera arrangement K2 are in connection with Fig. 3 explained.
- a third camera arrangement K3 with three cameras corresponding to the second camera arrangement K2 is directed at the periphery of the second turning device 150 at 90 ° to the component B guided past it.
- the camera arrangements K2 and K3 are also suitable in each case for determining a positional deviation of the sensor 132, 152 that is being passed to a previously defined reference point.
- a fourth camera arrangement K4 is directed in the center of the second turning device 150 onto the depositing point ABS or the first receiving point ES1 in the receiving device 200.
- Camera arrangement K4 comprises one camera and two mirrors arranged at right angles to each other, which are each mounted at a 45 ° angle relative to the plane spanned by the X and Y axes. These mirrors allow the storage location ABS and the receiving location ES1 and the sensor 152 located at the storage location ABS to be detected indirectly from a first and a second detection direction.
- the mirrors are arranged in such a way that the two detection directions are orthogonal to one another.
- a seventh camera arrangement K7 in the center of the first turning device 130 is directed at the transfer point ÜS and the sensors 132 and 152 of the first and second turning devices.
- Camera arrangement K7 in this case comprises a camera and two mirrors arranged at right angles to one another, each of which is attached at a 45 ° angle relative to the plane spanned by the X and Y axes. These mirrors allow the transfer point ÜS and the sensors 132, 152 located at the transfer point to be detected indirectly from a first and a second detection direction.
- the mirrors are arranged in such a way that the two detection directions are orthogonal to one another.
- the camera arrangement K7 functionally replaces the structurally identical camera arrangement K4.
- the camera arrangement K7 in the center of the first turning device 130 is directed to the depositing point ABS and the first receiving point ES1 in the receiving device 200.
- the mirrors of the camera arrangement are arranged in such a way that detection of the receiving point ES1 in the receiving device 200 from two mutually orthogonal detection directions is permitted.
- An eleventh camera arrangement K11 in the center of the second turning device 150 is directed at the transfer point ÜS and the pickups 132 and 152 of the first and second turning devices.
- Camera arrangement K11 in this case comprises a camera and two mirrors arranged at right angles to one another, each of which is attached at a 45 ° angle relative to the plane spanned by the X and Y axes. These mirrors allow the transfer point and the pick-up 132, 152 located at the transfer point ÜS to be detected indirectly from a first and a second detection direction.
- the mirrors are arranged in such a way that the two detection directions are orthogonal to one another.
- the control unit ECU is set up to rotate the first turning device 130 about a first axis (here the X-axis) in a controlled manner by means of a first rotary drive DA1 and to move the first turning device 130 along the first axis in a controlled manner by means of a first linear drive LA1.
- the control unit ECU is also set up to use a second rotary drive DA2 to rotate the second turning device 150 in a controlled manner about a second axis (here the X axis) that is not collinear with the first axis (here the Y axis), and by means of a second linear drive LA2 to move the second turning device 150 in a controlled manner along the second axis.
- a second rotary drive DA2 to rotate the second turning device 150 in a controlled manner about a second axis (here the X axis) that is not collinear with the first axis (here the Y axis)
- a second linear drive LA2 to move the second turning device 150 in a controlled manner along the second axis.
- the imaging sensors inspect the top and / or side surface (s) of component B and also supply relevant data for the positioning of the first and second turning devices 130, 150 along and about their axes, as well as the sensors 132, 152 and those located on them Components B and the receiving points.
- the data for positioning the first and second turning devices 130, 150 and the pickups 132, 152 can in particular also be used during the self-adjustment of the device.
- a camera arrangement K8 with two cameras - in Fig. 1 only one can be seen - is directed at the periphery of the first, second turning device 130, 150 from two different detection directions to the dispensing point PLC.
- the cameras are each offset by 90 °, plus / minus a maximum of 10 ° or 15 °, arranged in a plane spanned by the X and Y axes and directed towards the dispensing point SPS in such a way that they both the ejection unit 110 and the Detect transducer 132 at least in part.
- the camera arrangement K8 can determine a position of the pickup 132 relative to the ejection unit 110 along the X-, Y- and Z-axes due to the (essentially necessary for this purpose) arrangement of the two individual cameras.
- a camera arrangement K9 with two cameras - in Fig. 1 only one can be seen - is directed to the storage location ABS on the periphery of the first / second turning device 130, 150 from two different detection directions.
- the cameras are each offset by 90 °, plus / minus a maximum of 10 ° or 15 °, arranged in a plane spanned by the X and Y axes and directed towards the storage location ABS in such a way that they both the sensor 132, 152 and also capture the receiving point ES1 at least in part.
- the camera arrangement K9 can due to the (for this purpose necessarily) essentially rectangular arrangement of the Both individual cameras determine a positional deviation of the receiving point ES1 from the pickup 132, 152 along the X, Y and Z axes.
- a camera arrangement K10 with two cameras - in Fig. 1 only one can be seen - is directed at the periphery of the first / second turning device 130, 150 from two different detection directions onto the transfer point US.
- the cameras are each offset by 90 °, plus / minus a maximum of 10 ° or 15 °, arranged in a plane spanned by the X and Y axes and directed towards the transfer point ÜS in such a way that they both the sensor 132 and sensor 152 capture at least in parts.
- the camera arrangement K10 can determine a positional deviation of the pickup 152 from the pickup 132 along the X, Y and Z axes due to the (essentially necessary for this purpose) arrangement of the two individual cameras.
- the component handling device 100 is equipped with a receiving device 200 assigned to the storage location ABS for a component B conveyed there.
- the receiving device 200 is assigned position and property sensors K4 / K7, K5, which are set up to position data of the component B conveyed to the storage location ABS, location data and properties of receiving points ES1, ES2 in the receiving device 200 and the components B located therein capture and make available for a control ECU.
- the position and property sensor K5 is a fifth camera arrangement, which is aimed at a second window at the second receiving point ES2.
- the control unit ECU is set up to use a third rotary drive DA3 to control the receiving device 200 about a third axis containing the storage location ABS (here the Z axis) and by means of third and fourth linear drives LA3, LA4 to rotate the receiving device along the first and to move the second axes in a controlled manner.
- a fourth rotary drive DA4 the control ECU moves a carrier 320 guided by the receiving device 200 along the first axis (here the X axis) in a controlled manner.
- This carrier 320 serves to receive the components B in individual form from the turning device 130, 150.
- the turning devices 130, 150 and the rotary drives DA1, DA2,... Each have a high-resolution rotary angle encoder, which is connected to the control unit ECU and is not shown, for determining their respective rotational position.
- the fourth rotary drive DA4 is used to be controlled by control signals from the control ECU, and by the receiving device 200 guided carriers 320 along the first axis (here the X axis) are controlled to move about 100% plus minus a maximum of 3% of the grid dimension of adjacent component receptacles (pockets) of the carrier 320.
- the grid dimension results from the center distance between two successive pockets.
- the third rotary drive DA3 is set up to be controlled by control signals from the control ECU, depending on signals from the imaging property and position sensor in the center of the second turning device 150, or in a variant of the imaging property and position sensor in the center of the first turning device 130 , one of the receiving points ES1 with the component receptacle of the carrier 320 located there is controlled to rotate about the Z axis containing the deposit point by up to plus and minus 6 °.
- the fourth rotary drive DA4 of the receiving device 200 has in the in Fig. 4 shown variants a spiked wheel which engages in transport holes 325 of the carrier 320 (storage belt) in order to transport it in the conveying direction.
- the spike wheel preferably rotates only in a forward direction.
- a suction and / or blow-out device 340 is provided on the downstream side of the receiving device 200 to the receiving point ES1.
- this is optional.
- Components B recognized as defective or incorrectly controlled are thus removed from her pocket by control signals from the control unit ECU.
- a pneumatic unit For sucking in component B in the pickups 132, 152, for holding the component B in the pickups 132, 152, for depositing the component B with or without a controlled blow-off pulse, and for free blowing off the component B from the pickups 132, 152 these are connected to a pneumatic unit, not shown.
- the pneumatic unit controlled by the control unit ECU, acts on the individual transducers 132, 152 in a valve-controlled manner at the respectively required point in time or period of time with overpressure or underpressure in order to individually pick up, hold and release components B.
- the respective component B is placed in the receiving point ES1 currently located at the storage location ABS, that is to say the pocket of the carrier 320. If the inspection results obtained are negative, component B is rotated further by a further position to a first suction device 330, where it starts from its pickup 132, 152 the first or second turning device 130, 150 is drawn off. If a position and property sensor monitoring this receiving point ES1 (see also Fig. 5 ) shows that the deposited component B has a position or property error after being deposited, it is sucked out of the pocket of the carrier 320 by means of a second extractor 340 located downstream of the receiving point ES1.
- the entire receiving device 200 together with the carrier 320 is reset by the center distance of two pockets of the carrier 320 with the third linear drive unit LA3 against the conveying direction of the carrier 320.
- the next component B is then introduced into the free pocket of the carrier 320 on the turning device 130, 150.
- an additional suction device (not illustrated further) is assigned to the first receiving point ES1 in order to suction off a sloping component at the receiving point ES1.
- Any quality errors can be determined by the position and property sensor K4 / K7 or by the position and property sensor K5 on the second window. If the position and property sensor K5 detects a quality error, the receiving device 200 is transported back together with the carrier 320, and component B is then sucked out of the pocket of the carrier 320 at the storage location. Tilting of an obliquely lying component at the receiving point ES1 can be detected by a position and property sensor K6, not shown, which is assigned to the receiving point ES1.
- This position and property sensor K6 is arranged to the side of the carrier 320 and detects the receiving point ES1 directly or via a deflecting mirror over the upper edge of the carrier 320. In this way, any tilting or a protrusion of a component that has not been correctly stored can be detected.
- the camera arrangement K1 is directed in a variant as a position and property sensor in the center of the first turning device 130 to the component supply.
- the top surface D2 of component B is thus inspected for position and defects.
- the camera arrangement K1 is set up to carry out image acquisition between the two adjacent sensors 132 during the turning movement of the first turning device 130.
- the control uses these image data to generate corresponding correction movements of the ejection unit, the component supply or the wafer and the first turning device 130.
- the second camera arrangement K2 is directed as a position and property sensor with its three cameras on the periphery of the first turning device 130 at approximately 90 ° to the three sides S2, S4 and D1 of the component B.
- a top view of the camera arrangement K2 with its three cameras K2-1, K2-2 and K2-3 is shown in FIG Fig. 3 illustrated.
- the middle camera K2-2 inspects the top surface D1 of component B and the two outer cameras K2-1 and K2-3 via respective mirrors SP1 and SP2 the side surfaces S2 and S4 of component B. Defects of component B on these surfaces also determine the exact position and rotation of component B on its pickup 132.
- This information is used in the control unit ECU to change the alignment of the first turning device 130 and the second turning device 150 along their axes and rotational orientation when the inspected component B is transferred from the first turning device 130 to the second turning device 150 at the transfer point US .
- the second camera arrangement K2 is suitable for determining the deviation of each pickup 132 of the first turning device 130 from a previously defined common reference point.
- the third camera arrangement K3 is directed as a position and property sensor with its three cameras externally on the periphery of the second turning device 150 at approximately 90 ° to the three sides S1, S3 and D2 of the component B.
- the construction and arrangement of this camera arrangement K3 corresponds to the camera arrangement K2 with its three cameras and two mirrors in FIG Fig. 3 , In addition to any errors in component B on these surfaces, the exact position and rotation of component B on its pickup 152 of the second turning device 150 can be determined from the image indentations recorded in the process.
- This information is used in the control unit ECU to change the orientation of the second turning device 150 and the receiving device 200 along their axes and rotational orientations when the inspected component B at the transfer point ÜS from the second turning device 150 to the receiving point located at the deposit point ABS ES1, that is, the pocket of the carrier 320 is deposited.
- the third camera arrangement K3 is suitable for determining the deviation of each pickup 152 of the second turning device 150 from a previously defined common reference point.
- the fourth camera arrangement K4 is directed as a position and property sensor in the center of the second turning device 150 to the receiving point E1 in the receiving device 200.
- the control ECU then initiates corresponding correction movements of the second turning device 150 and the receiving device 200.
- the camera arrangement K4 is set up to simultaneously capture both the receiving point ES1 and the sensor 152 located at the storage point ABS with the aid of mirror optics from different detection directions, so that a position of the receiving point ES1 relative to the sensor 152 is achieved by the control for self-adjustment of the Component handling device 100 can be determined.
- the component handling device 100 shown includes a controller which controls the independent adjustment of the component handling device 100.
- Self-adjustment is possible in particular before the component handling device 100 is started up, but also during the operation of the component handling device 100.
- any combinations of the camera arrangements K1, K4, K7, K9, K9, K10 and K11 for self-adjustment of the component handling device 100 are possible if at least one sensor directed at the dispensing point SPS, at least one sensor directed at the transfer point ÜS and at least one at the depositing point ABS directional sensor are involved in the self-adjustment process.
- two camera arrangements are sufficient for self-adjustment of the component handling device 100, provided that at least one sensor directed at the dispensing point PLC and at least one sensor directed at the depositing point ABS are involved in the self-adjustment process are.
- the controller is set up to successively rotate the first turning device 130 during the self-adjustment process and to use camera sensors K1 and / or K8 to determine a relative position of each individual sensor 132 of the first turning device 130 relative to the ejection unit 110.
- the position of the pickup 152 of the second turning device 150 located at the transfer point ÜS is determined in relation to the pickup 132 of the first turning device 130 located at the transfer point.
- the position of the receiving point ES1 located in the receiving device 200 becomes the sensor 132, 152 located at the depositing point ABS first / second turning device 130, 150 determined.
- the controller is set up to repeat the successive rotation of the turning devices 130, 150 and the determination of the relative position at least as often until all possible transfer positions of the turning device 130, 150 have been reached at the dispensing point SPS, the transfer point ÜS and the delivery point ABS at least once.
- the control is also set up to store the determined values in a control table.
- the determined 3-dimensional position deviations of the pickups 132 of the first turning device 130 relative to a previously defined position relative to the ejection device 110 each form the 3-dimensional correction vector for the first turning device 130 for the respective transmission position during operation.
- the determined 3-dimensional position deviations of the transducer 152 of the second turning device 150 located at the transfer point ÜS form relative to a previously defined position to the transducer 132 of the first turning device 130, added to the 3-dimensional correction vector for the first turning device 130 for the respective transmission position , In operation, the 3-dimensional correction vector for the second turning device 150 for the respective transmission position.
- the 3-dimensional correction vector for the receiving device 200 becomes analogous with the positions of the receiving points ES1 relative to a defined position to the pickup 132 of the first turning device 130 and by the Addition developed with the 3-dimensional correction vector for the first turning device 130.
- the correction vector precision is increased when a plurality of complete rotations of the turning devices 130, 150 are carried out and average values for the correction vectors are determined in each case.
- the correction vector can be 2-dimensional or 1-dimensional, wherein the correction dimensions for the first turning device 130, the second turning device 150 and the receiving device 200 can be the same or different.
- a first check of the detection quality of the camera sensors used for self-adjustment is carried out by performing the self-adjustment method independently of one another with K1, K4 and K7 or K11 and / or K8 and then performing it with K2; Furthermore, the self-adjustment process can be carried out with K7, and / or K10. If the results do not match, there is a measurement error. The detection quality of the adjustment sensor arrangement is checked and / or the sensor 132 is checked for damage on the basis of the comparisons.
- any combinations of the camera sensors K1, K4, K7, K8, K9, K10 and K11 are possible for the independent self-adjustments, provided that none of the sensors is used in both self-adjustments and in both self-adjustments at least one sensor on the dispensing point PLC, the transfer point ÜS and the storage point ABS is directed.
- a second check of the detection quality of the camera sensors used for self-adjustment and an additional check of the damage-free nature of the sensors 132, 152 is carried out by the relative positions of the sensors 132, 152 determined by the camera arrangements K2 and K3 to the respective defined reference points with the relative positions of the sensors 132, 152 to each other, to the ejection unit 110 and to the receiving point ES1 for each pickup 132, 152 are compared by the controller. If the determined deviations do not match - at least - in their respective relationships to one another, there is a measurement error and / or one of the sensors 132, 152 is damaged.
- the first check of the detection quality of the self-adjustment takes place in that the self-adjustment is carried out independently of one another with the camera sensors K1 and K7 as well as K8 and K9. Agree the results does not match, there is a measurement error.
- Arbitrary combinations of the camera sensors K1, K7, K8, K9 are possible for the self-adjustments that are independent of one another, provided that none of the sensors is used in both self-adjustments and in both self-adjustments at least one sensor is directed at the dispensing point PLC and the depositing point ABS.
- the second check of the detection quality and the additional checking of the damage-freeness of the sensors 132 of the self-adjustment takes place by the relative positions of the sensors 132 determined by the camera arrangements K2 to the respective ones defined reference points with the relative positions of the pickups 132 to the ejection unit 110 and to the receiving point ES1 for each pickup 132 can be compared by the controller. If the determined deviations do not - at least - match in their respective relationships to one another, there is a measurement error and / or one of the sensors 132 is damaged.
- the position and property sensor 400 illustrated is, as an imaging sensor, a variant of the camera arrangements K1-K5.
- This sensor 400 has a camera chip 410 that records the visible light spectrum.
- the three differing acquisition spectra are as a red color range - 630 nm plus minus 30 nm -, as a green color range - 530 nm plus minus 60 nm - and as blue color range - 460 nm plus minus 50 nm - of a color sensor.
- a semi-transparent mirror 420 is assigned to the imaging sensor 400 and is arranged at an angle of approximately 45 ° to the optical axis of the camera chip 410.
- the semi-transparent mirror 420 is used to optically couple colored light from two detection spectra, here the green color range and the blue color range, from corresponding light sources 440 and to direct it onto a top surface of component B.
- the camera chip 410 detects this light directed at component B in the green and in the blue color range.
- other deflection mirrors, prisms, color filters or lenses can also be provided.
- a further light source 450 is arranged around the receiving point ES1 located at the storage location ABS and supplies scattered light at an angle of approximately 5 ° -45 ° in the red color range to the top surface of the Component B.
- the camera chip 410 also detects this light directed at component B in the red color range.
- optically active elements and / or the radiation sources can be set up to be aligned and / or adjusted / focused independently of others.
- the camera chip 410 is a color camera with three individual channels R, G, B. However, it can also be a camera with several channels. The three color channels of the camera can be addressed / read separately.
- the component B is inspected for defects with a single image acquisition, for example the inclination of the component B so that it is not correctly positioned in the provided pocket of the carrier 320, or for quality defects.
- the exact position data of the pocket of the carrier 320 for storing the next component B are recorded by this single image recording.
- the information to be obtained from the individual color channels is divided as follows: Image channel 1 with lighting type 1: position of the storage pocket of the storage belt for positioning the next component.
- Image channel 2 with lighting type 2 quality inspection of the component (cracks, laser marks, breakouts, ).
- Image channel 3 with lighting type 3 additional inspections for special components or customer-specific errors.
- the imaging sensor system presented here means that fewer image inputs are required than with conventional sensor arrangements in order to remove bad parts and position the actuators.
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Description
Hier werden eine Vorrichtung und ein Verfahren zum Selbstjustieren einer Bauteilhandhabungsvorrichtung für elektronische Bauteile beschrieben.Here, a device and a method for self-adjusting a component handling device for electronic components are described.
Diese Vorrichtung und dieses Verfahren werden im Zusammenwirken mit einer Bauteilhandhabungsvorrichtung, einer Empfangseinrichtung sowie einem bildgebenden Sensor erläutert.This device and this method are explained in cooperation with a component handling device, a receiving device and an imaging sensor.
Ein Bauteil ist hier zum Beispiel ein (elektronisches) Halbleiterbauteil, auch als "chip" oder "die" bezeichnet. Ein solches Bauteil hat in der Regel eine prismatische Gestalt, einen im Wesentlichen polygonalen, zum Beispiel viereckigen (rechteckförmigen oder quadratischen) Querschnitt mit mehreren Mantelflächen sowie eine Stirnfläche und eine Deckfläche. Die Mantelflächen sowie die beiden (untere und obere) Deckflächen des Bauteils sind nachfolgend allgemein als Seitenflächen bezeichnet. Das Bauteil kann auch eine von vier abweichende Anzahl von Mantelflächen haben. Ein Bauteil kann auch eine optisches Bauteil (Prisma, Spiegel, Linse, etc.) sein. Insgesamt kann ein Bauteil jede geometrische Form haben.A component here is, for example, an (electronic) semiconductor component, also referred to as "chip" or "die". Such a component generally has a prismatic shape, an essentially polygonal, for example quadrangular (rectangular or square) cross section with a plurality of lateral surfaces, and an end face and a top face. The lateral surfaces and the two (lower and upper) top surfaces of the component are generally referred to below as side surfaces. The component can also have a different number of outer surfaces from four. A component can also be an optical component (prism, mirror, lens, etc.). Overall, a component can have any geometric shape.
Aus der betrieblichen Praxis der Anmelderin sind so genannte Aufnehm- und Absetzvorrichtungen bekannt, in denen Bauteile mittels eines Saugers oder Festhalters von einem Bauteiltisch aufgenommen und anschließend auf einem Träger oder in einem Transportbehälter oder dergl. abgelegt werden. Vor dem Ablegen des Bauteils findet üblicherweise eine Inspektion des Bauteils statt. Dazu werden Abbildungen einer oder mehrerer Seitenflächen des Bauteils mit einer oder mehreren Kameras aufgenommen und mittels automatisierter Bildverarbeitung ausgewertet.So-called pick-up and setting-down devices are known from the operational practice of the applicant, in which components are picked up from a component table by means of a suction device or holding device and then placed on a carrier or in a transport container or the like. An inspection of the component usually takes place before the component is put down. For this purpose, images of one or more side surfaces of the component are recorded with one or more cameras and evaluated using automated image processing.
Um den in der Halbleiterfertigung geforderten Präzisionsansprüchen gerecht zu werden, ist eine Justierung der Aufnehm- und Absetzvorrichtung der Bauteile vor der Inbetriebnahme, nach dem Auswechseln von Vorrichtungsbestandteilen oder nach Wartungsarbeiten an der Vorrichtung notwendig.In order to meet the precision requirements required in semiconductor production, an adjustment of the pick-up and depositing device of the components is necessary before commissioning, after changing device components or after maintenance work on the device.
Hierzu müssen die der Aufnehm- und Absetzvorrichtungen der Bauteile vermessen und anschließend justiert werden, um Fertigungs- und Montagetoleranzen zu kompensieren. Dies geschieht durch einen Bediener, welcher die Aufnehm- und Absetzvorrichtung mit Hilfe eines Mikroskops oder eines Kamerabilds zunächst visualisiert um sie anschließend zu vermessen und zu justieren. Das Verfahren ist ausgesprochen zeitintensiv, in der Praxis fehleranfällig und bindet hochqualifiziertes Personal. Je größer die Komplexität einer Vorrichtung, insbesondere je mehr einzelne Vorrichtungsbestandteile je zueinander zu justieren sind, desto größer sind der Zeitaufwand und die Fehleranfälligkeit / Ungenauigkeit der Justierung.For this purpose, the pick-up and depositing devices of the components must be measured and then adjusted in order to compensate for manufacturing and assembly tolerances. This is done by an operator who first visualizes the pick-up and setting-down device with the aid of a microscope or a camera image in order to then measure and adjust it. The process is extremely time-consuming, prone to errors in practice and ties up highly qualified personnel. The greater the complexity of a device, in particular the more individual device components are to be adjusted relative to one another, the greater the time expenditure and the susceptibility to errors / inaccuracy of the adjustment.
Die Dokumente
Eine Bauteilhandhabungsvorrichtung soll das Durchführen einer präzisen Justierung zeiteffizient ermöglichen.A component handling device should enable precise adjustment to be carried out in a time-efficient manner.
Diese Aufgabe löst eine Bauteilhandhabungsvorrichtung zum Entnehmen von prismatischen Bauteilen von einem strukturierten Bauteilvorrat und zum Ablegen der entnommenen Bauteile an einer Empfangseinrichtung, welche über eine integrierte Selbstjustierungsvorrichtung verfügt. Eine erste Wendeeinrichtung mit mehreren Aufnehmern ist dazu eingerichtet, an einer Spendestelle ein Bauteil von dem strukturierten Bauteilvorrat zu empfangen, das empfangene Bauteil um einen ersten vorbestimmten Winkel um seine Längs- oder Querachse zu wenden Ablagestelle zu fördern. Den ersten und zweiten Wendeeinrichtungen zugeordnete Lage- und Eigenschaftssensoren sind dazu eingerichtet, Lagedaten der ersten und zweiten Wendeeinrichtungen, Lagedaten von an den Aufnehmern befindlichen Bauteilen, und/oder Eigenschaften von an den Aufnehmern befindlichen Bauteilen zu erfassen, und für eine Steuerung zur Verfügung zu stellen.This object is achieved by a component handling device for removing prismatic components from a structured component supply and for storing the removed components on a receiving device, which has an integrated self-adjusting device. A first turning device with a plurality of pickups is set up to receive a component from the structured component supply at a dispensing point, to convey the received component by a first predetermined angle about its longitudinal or transverse axis to promote the deposit point. Position and property sensors assigned to the first and second turning devices are set up to record position data of the first and second turning devices, position data of components located on the sensors, and / or properties of components located on the sensors, and make them available for control ,
Die Steuerung ist dazu eingerichtet, durch Lage- und Eigenschaftssensoren, insbesondere vor dem eigentlichen Bauteiltransferbetrieb, im Zuge einer Selbstjustierung für jede Übertragungsstellung, in welcher die erste und/oder die zweite Wendeeinrichtung Bauteile empfangen oder übergeben, jeweils einen Korrekturvektor für die erste und/oder die zweite Wendeeinrichtungen und/oder für die Ablagestelle zu ermitteln, welcher jeweils den im Zuge der Selbstjustierung ermittelten Fertigungs- und Montageungenauigkeiten der Bauteilhandhabungsvorrichtung entgegen gerichtet ist.The control is set up by position and property sensors, in particular before the actual component transfer operation, in the course of a self-adjustment for each transmission position in which the first and / or the second turning device receive or transfer components, a correction vector for the first and / or to determine the second turning device and / or for the storage location, which is directed in each case against the manufacturing and assembly inaccuracies of the component handling device determined in the course of the self-adjustment.
Die Steuerung ist weiterhin dazu eingerichtet, mittels eines ersten Drehantriebes die erste Wendeeinrichtung um eine erste Achse kontrolliert zu drehen, mittels eines ersten Linearantriebes die erste Wendeeinrichtung längs der ersten Achse kontrolliert zu verfahren, mittels eines zweiten Drehantriebes die zweite Wendeeinrichtung um eine zu der ersten Achse nicht kollineare zweite Achse kontrolliert zu drehen, und mittels eines zweiten Linearantriebes die zweite Wendeeinrichtung längs der zweiten Achse kontrolliert zu verfahren.The controller is also set up to rotate the first turning device about a first axis in a controlled manner by means of a first rotary drive, to move the first turning device along the first axis in a controlled manner by means of a first linear drive, and to rotate the second turning device about a to the first axis by means of a second rotary drive to rotate the non-collinear second axis in a controlled manner and to move the second turning device along the second axis in a controlled manner by means of a second linear drive.
Der durch die Selbstjustierung ermittelte Korrekturvektor dient der Steuerung der Bauteilhandhabungsvorrichtung im Bauteiltransferbetrieb dazu, durch kontrolliertes Verfahren und/oder Drehen der Wendeeinrichtungen und/oder der Ablagestelle, den im Zuge der Selbstjustierung bestimmten Fertigungs- und Montageungenauigkeiten der Bauteilhandhabungsvorrichtung entgegenzuwirken.The correction vector determined by the self-adjustment is used to control the component handling device in the component transfer mode in order to counteract the manufacturing and assembly inaccuracies of the component handling device determined in the course of the self-adjustment by controlled movement and / or turning of the turning devices and / or the depositing point.
So bildet die hier vorgestellte Anordnung eine integrierte Handhabungs-/Inspektionseinrichtung, welche eine automatisierte Selbstjustierung ermöglicht. Bildgebende Sensoren inspizieren alle oder fast alle Deck- und/oder Seitenfläche(n) eines Bauteils und liefern dabei auch relevante Daten zur Positionierung der Manipulatoren (Aufnehmer) und der Empfangsstellen. Diese Einrichtung bildet somit einen Kern eines geschlossenen Maschinensystems mit der notwendigen prozesstechnischen Peripherie, zum Beispiel zur Bereitstellung der Bauteile (zum Beispiel Wafertisch) und Bauteil-Ablage (zum Beispiel Taschen- oder Träger-Band). Die hier vorgestellte Bauteilhandhabungsvorrichtung übernimmt Bauteile von einem zum Beispiel horizontal im oberen Bereich der Bauteilhandhabungsvorrichtung angeordneten Bauteilvorrat (Waferscheibe) mit einer ortsfesten Ausstoßeinheit. Relativ zu dieser ortsfesten Ausstoßeinheit bewegt sich der Bauteilvorrat in der Ebene. Die Ausstoßeinheit bewirkt durch eine Nadel oder berührungslos (z.B. durch einen Laserstrahl), dass die Bauteile einzeln von dem Bauteilvorrat freikommen und von einem Aufnehmer aufgenommen werden. Die ausgestoßenen Bauteile werden insgesamt bis zu sechs oder mehr Inspektionsprozessen zugeführt und abschließend in Empfangsstellen (Taschen) des Taschen- oder Trägerbandes gefördert. Die Begriffe Empfangsstelle und (Ablage-)Tasche werden hier gleichbedeutend verwendet. Schlechtteile können dabei ausgeschleust werden. Die in den Übergabevorgang integrierte optische Untersuchung des Bauteils gliedert sich in mehrere Untersuchungsvorgänge auf. Sie nutzt einen oder mehrere bildgebende Sensoren zum optischen Erfassen von Deck- und/ oder Mantelfläche(n) eines Bauteils sowie der Positionen der Aufnehmer an den Übergabe-/ Empfangsstellen. Diese bildgebenden Sensoren sind dazu eingerichtet, in mehreren Untersuchungsvorgängen jeweils wenigstens ein Bild einer der Deck- und/ oder Mantelflächen eines Bauteils zu erfassen. Die Förderung / der Transport der Bauteile geschieht, während Aufnehmer von Wendeeinrichtungen jeweils ein Bauteil halten. Ein gehaltenes Bauteil passiert während des Transports einzelne Untersuchungsvorgänge. Die erfassten (Bild-)Daten der bildgebenden Sensoren dienen dabei auch dazu, die Positionsregelung der Manipulatoren (Aufnehmer) und der Empfangsstellen zu koordinieren. Die Bauteilförderung ist dazu eingerichtet, ein Bauteil im Wesentlichen kontinuierlich oder getaktet entlang seines Pfades zu fördern. Zur Selbstjustierung nutzt die Vorrichtung zumindest teilweise die im Bauteiltransferbetrieb zur Bauteilinspektion vorgesehenen bildgebenden Sensoren. Außerdem können zusätzliche bildgebende Sensoren vorgesehen sein, die jene Bereiche der Vorrichtung, an denen ein Bauteil von einem Vorrichtungsbestandteil zum einem anderen Vorrichtungsbestandteil übergeben wird, aus mindestens zwei verschiedenen Betrachtungswinkeln optisch erfassen. Die Steuerung ist dazu eingerichtet, für jede mögliche Übertragungsstellung der ersten und der zweiten Wendeeinrichtung einen, bis zu 3-dimensionalen, Korrekturvektor für jede Bauteilübergabestelle zu ermitteln, welcher im Betrieb der Bauteilhandhabungsvorrichtung jeweils dazu dient, den Fertigung- und Montageungenauigkeiten der Bauteilhandhabungsvorrichtung entgegenzuwirken.
Die hier vorgestellte komplette Baugruppe vereint funktional drei Aspekte: Handhabung, Justierung der Handhabung, und Inspektion. Diese drei Funktionen werden zur schnellen und präzisen qualitativen Beurteilung mehrerer (bis zu sechs oder mehr) Seiten der Bauteile ineinander verwoben, während diese schnell aus dem Bauteilvorrat vereinzelt entnommen und durch die Inspektion als Gutteile klassifiziert an der oder den Empfangsstellen präzise abgesetzt werden.The arrangement presented here forms an integrated handling / inspection device which enables automated self-adjustment. Imaging sensors inspect all or almost all of the top and / or side surface (s) of a component and also provide relevant data for the positioning of the manipulators (sensors) and the receiving points. This device thus forms the core of a closed machine system with the necessary process technology peripherals, for example for the provision of the components (for example wafer table) and component storage (for example pocket or carrier belt). The component handling device presented here takes over components from, for example, a component supply (wafer disc) arranged horizontally in the upper region of the component handling device with a stationary ejection unit. The supply of components moves in the plane relative to this stationary ejection unit. The ejection unit, by means of a needle or contactlessly (for example by means of a laser beam), causes the components to be released individually from the component supply and to be picked up by a sensor. The ejected components are fed to a total of up to six or more inspection processes and then conveyed to receiving points (pockets) on the pocket or carrier belt. The terms receiving point and (storage) bag are used interchangeably here. Bad parts can be removed. The optical examination of the component integrated in the transfer process is divided into several examination processes. It uses one or more imaging sensors for optically detecting the top and / or outer surface (s) of a component and the positions of the sensors at the transfer / reception points. These imaging sensors are set up to in each case at least one image of one of the cover and / or lateral surfaces in a plurality of examination processes of a component. The conveying / transport of the components takes place while sensors of turning devices each hold one component. A held component passes through individual examination processes during transport. The recorded (image) data of the imaging sensors also serve to coordinate the position control of the manipulators (pickups) and the receiving points. The component conveyor is set up to convey a component along its path essentially continuously or in cycles. For self-adjustment, the device at least partially uses the imaging sensors provided for component inspection in component transfer mode. In addition, additional imaging sensors can be provided which optically detect those areas of the device on which a component is transferred from one device component to another device component from at least two different viewing angles. The controller is set up to determine a, up to 3-dimensional, correction vector for each component transfer point for each possible transfer position of the first and the second turning device, which correction vector serves to counteract the manufacturing and assembly inaccuracies of the component handling device during operation of the component handling device.
The complete assembly presented here combines three functional aspects: handling, adjustment of handling, and inspection. These three functions are woven into each other for quick and precise qualitative assessment of several (up to six or more) sides of the components, while these are quickly removed individually from the component stock and classified as good parts by the inspection at the receiving point (s).
In einer Variante verfügt die Bauteilhandhabungsvorrichtung ausschließlich über eine erste Wendeeinrichtung, welche das Bauteil von der Abgabeeinrichtung an der Spendestelle aufnimmt, und zu der Ablagestelle fördert, um es dort auf eine Empfangseinrichtung zu übergeben.In one variant, the component handling device has only a first turning device, which picks up the component from the dispensing device at the dispensing point and conveys it to the depositing point in order to transfer it there to a receiving device.
In einer anderen Variante hat die Bauteilhandhabungsvorrichtung zwei vorzugsweise geregelt betriebene, vorzugsweise im Wesentlichen orthogonal (90° plus minus bis zu 15°) zueinander angeordnete, in etwa stern- oder radförmige Wendeeinrichtungen. Die Wendeeinrichtungen könnten auch eine rechteckige Gestalt haben. Jede dieser Wendeeinrichtungen trägt mehrere zu ihrer Drehachse radial verfahrbare Aufnehmer, um die Bauteile jeweils auf einem Aufnehmer fixiert innerhalb eines Schwenkwinkels zwischen Bauteil-Übernahme und -Übergabe einer oder mehreren Prozessstationen zur Inspektion, Schlechtteilausschleusung und ggf. weiteren Stationen zuzuführen.In another variant, the component handling device has two, approximately star-shaped or wheel-shaped turning devices, preferably operated in a controlled manner, preferably arranged essentially orthogonally (90 ° plus minus up to 15 °) to one another. The turning devices could also have a rectangular shape. Each of these turning devices carries a plurality of transducers which can be moved radially with respect to its axis of rotation, in order to feed the components, each fixed on a transducer, within a swivel angle between component transfer and transfer to one or more process stations for inspection, bad part removal and possibly further stations.
Bei der hier vorgestellten Bauteilhandhabungsvorrichtung tragen die stern- oder radförmigen Wendeeinrichtungen die Bauteile an radial nach außen weisenden Aufnehmern, die am (gedachten) Umfang der beiden Wendeeinrichtungen angeordnet sind. Dies ist im Unterschied zu solchen Bauteilhandhabungsvorrichtungen zu sehen, bei denen die Aufnehmer einer oder beider Wendeeinrichtungen koplanar oder parallel zur deren Rotationsachse orientiert sind.In the component handling device presented here, the star-shaped or wheel-shaped turning devices carry the components on radially outward-pointing sensors which are arranged on the (imaginary) circumference of the two turning devices. This can be seen in contrast to such component handling devices in which the sensors of one or both turning devices are oriented coplanar or parallel to the axis of rotation thereof.
Während vorstehend mehrere Untersuchungsvorgänge erwähnt sind, soll damit kein zeitlicher Ablauf oder eine Reihenfolge (zuerst eine Bilderfassung in einem ersten und dann eine Bilderfassung in einem weiteren Untersuchungsvorgang) festgelegt sein. Vielmehr sind auch Fälle denkbar, in denen die umgekehrte Reihenfolge günstiger ist. Da abhängig von der Anzahl der Aufnehmer an den einzelnen Wendeeinrichtungen auch gleichzeitig mehrere Bauteile an jeder der Wendeeinrichtungen aufgenommen sein können, finden die Untersuchungsvorgänge auch zeitgleich, wenn auch an unterschiedlichen Bauteilen, statt.While several examination processes have been mentioned above, this is not intended to define a chronological sequence or a sequence (first an image acquisition in a first and then an image acquisition in a further examination operation). Rather, cases are also conceivable in which the reverse order is more favorable. Since, depending on the number of transducers on the individual turning devices, a plurality of components can also be accommodated on each of the turning devices at the same time, the examination processes also take place simultaneously, even if on different components.
Die in den einzelnen Untersuchungsvorgängen durch die bildgebenden Sensoren er-fasste(n) (oberen/unteren) Deck- und/oder (seitlichen) Mantelfläche(n) eines Bauteils können voneinander abweichende Deck- und/oder Mantelflächen des Bauteils sein.The (upper / lower) cover and / or (lateral) lateral surface (s) of a component detected by the imaging sensors in the individual examination processes can be different cover and / or lateral surfaces of the component.
Ein Aspekt der optischen Untersuchung sieht vor, dass die Bauteilförderung mit einem Bauteil den Bauteilpfad im Wesentlichen ohne oder nahezu ohne Stillstand absolviert. Dabei werden während der Bewegung oder während der minimalen Stillstandszeiten eine oder mehrere Deck- und/oder Mantelflächen eines Bauteils mit den bildgebenden Sensoren erfasst. Diese Bilder werden anschließend mit Methoden der Bildverarbeitung ausgewertet. Eine Variante dieser optischen Erfassung / Untersuchung sieht vor, dass als bildgebende Sensoren eine oder mehrere Farb-Kameras oder Schwarzweiß-Kameras vorgesehen sind.One aspect of the optical examination provides that the component conveyance with a component completes the component path essentially without or almost without standstill. One or more cover and / or lateral surfaces of a component are detected with the imaging sensors during the movement or during the minimal downtimes. These images are then evaluated using image processing methods. A variant of this optical detection / examination provides that one or more color cameras or black and white cameras are provided as imaging sensors.
Die bildgebenden Sensoren können dabei einen oder mehrere Spiegel, optische Prismen, Linsen oder dergl. haben.The imaging sensors can have one or more mirrors, optical prisms, lenses or the like.
Den bildgebenden Sensoren können Strahlungs- oder Lichtquellen zugeordnet sein. Dabei kann jede Quelle dazu eingerichtet sein, Licht / Strahlung mit einem unterschiedlichen Spektral- oder Wellenlängenbereich zur Beleuchtung zumindest eines Abschnitts des Bauteils abzugeben. Die Wellenlängenbereiche können zumindest teilweise voneinander abweichen, überlappen oder übereinstimmen. So kann zum Beispiel das Licht der ersten Lichtquelle rot, und das Licht der zweiten Lichtquelle kann blau sein. Es kann aber auch die umgekehrte Zuordnung oder eine andere Wellenlängenpaarung (zum Beispiel infrarotes und sichtbares Licht) gewählt sein.Radiation or light sources can be assigned to the imaging sensors. Each source can be set up to emit light / radiation with a different spectral or wavelength range for illuminating at least a section of the component. The wavelength ranges can at least partially differ from one another, overlap or match. For example the light of the first light source is red and the light of the second light source can be blue. The reverse assignment or another wavelength pairing (for example infrared and visible light) can also be selected.
Die Lichtquellen können durch eine Steueranordnung in dem Moment jeweils kurz eingeschaltet werden, wenn sich der Aufnehmer mit dem Bauteil im jeweiligen Erfassungsbereich befindet, so dass die Deck- und/oder Mantelflächen des Bauteils mit einem kurzen Lichtblitz zur Erfassung durch den jeweiligen bildgebenden Sensor belichtet werden können. Alternativ kann eine dauerhafte Beleuchtung verwendet werden.The light sources can be switched on briefly by a control arrangement at the moment when the sensor with the component is in the respective detection area, so that the top and / or outer surfaces of the component are exposed with a short flash of light for detection by the respective imaging sensor can. Alternatively, permanent lighting can be used.
Der Bauteilhandhabungsvorrichtung ist in einer Variante eine Abgabeeinrichtung zugeordnet, die dazu eingerichtet ist, jeweils ein Bauteil aus dem strukturierten Bauteilvorrat an einen durch die Steuerung entsprechend positionierten Aufnehmer der ersten Wendeeinrichtung abzugeben. Dies kann ein Bauteil-Ausstoßer (die ejector) sein, der das Bauteil durch die Waferträgerfolie hindurch mittels einer Nadel abstößt oder ein Laserpulsgeber, der den Haftkleber des Bauteils an der Trägerfolie gezielt zum Schmelzen bringt. Der Abgabeeinrichtung ist ein Lage- und/oder Eigenschaftssensor zugeordnet, der dazu eingerichtet ist, die Lage der Abgabeeinrichtung relativ zu dem abzugebenden Bauteil und/oder Lagedaten des abzugebenden Bauteils, und/oder Eigenschaften des abzugebenden Bauteils zu erfassen und für die Steuerung zum Betätigen der Abgabeeinrichtung zur Verfügung zu stellen.In one variant, the component handling device is assigned a delivery device, which is set up to deliver a component from the structured component supply to a sensor of the first turning device that is appropriately positioned by the control. This can be a component ejector (the ejector), which repels the component through the wafer carrier film by means of a needle, or a laser pulse generator, which deliberately melts the adhesive of the component on the carrier film. The dispensing device is assigned a position and / or property sensor which is set up to detect the position of the dispensing device relative to the component to be dispensed and / or position data of the component to be dispensed, and / or properties of the component to be dispensed and for the control to actuate the To provide delivery device.
In einer Variante ist dieser Lage- und/oder Eigenschaftssensor dazu eingerichtet, eine Position eines Aufnehmers der ersten Wendeeinrichtung relativ zur Abgabeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, this position and / or property sensor is set up to determine a position of a pickup of the first turning device relative to the dispensing device and to make it available to the controller for self-adjustment of the component handling device.
Der Bauteilhandhabungsvorrichtung ist in einer Variante mit einer der Ablagestelle zugeordneten Empfangseinrichtung für ein dorthin gefördertes Bauteil ausgestattet. Der Empfangseinrichtung sind dabei Lage- und/oder Eigenschaftssensoren zugeordnet, die dazu eingerichtet sind, Lagedaten des an die Ablagestelle geförderten Bauteils, Lagedaten und/oder Eigenschaften von Empfangsstellen in der Empfangseinrichtung und/oder darin befindlichen Bauteils zu erfassen und für eine Steuerung zur Verfügung zu stellen.In one variant, the component handling device is equipped with a receiving device assigned to the storage location for a component conveyed there. Position and / or property sensors are assigned to the receiving device, which are set up to record position data of the component conveyed to the storage location, position data and / or properties of receiving points in the receiving device and / or the component located therein and are available for a control put.
In einer Variante sind die Lage- und/oder Eigenschaftssensoren dazu eingerichtet, eine Position der Empfangsstelle relativ zu einem Aufnehmer der zweiten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In one variant, the position and / or property sensors are set up to position the receiving point relative to a sensor of the second turning device to be determined and made available to the control for self-adjustment of the component handling device.
Die Steuerung ist dazu eingerichtet, mittels eines dritten Drehantriebes die Empfangseinrichtung zumindest teilweise um eine die Ablagestelle enthaltende dritte Achse kontrolliert zu drehen. Die Steuerung kann auch dazu eingerichtet sein, die Empfangseinrichtung mittels wenigstens eines dritten Linearantriebes zumindest teilweise längs einer Achse kontrolliert zu verfahren. Schließlich kann die Steuerung auch dazu eingerichtet sein mittels eines Linearantriebes einen durch die Empfangseinrichtung geführten Träger längs einer der ersten und/oder zweiten Achsen kontrolliert zu verfahren. Dieser Träger dient dazu, die Bauteile in vereinzelter Form aufzunehmen.The controller is set up to use a third rotary drive to at least partially rotate the receiving device in a controlled manner about a third axis containing the storage location. The controller can also be set up to move the receiving device in a controlled manner at least partially along an axis by means of at least one third linear drive. Finally, the controller can also be set up to move a carrier guided by the receiving device along one of the first and / or second axes in a controlled manner by means of a linear drive. This carrier is used to hold the components in individual form.
Bei der Bauteilhandhabungsvorrichtung sind in einer Variante die Aufnehmer der ersten und/oder der zweiten Wendeeinrichtung dazu eingerichtet, radial zur Drehachse oder das Drehzentrum der jeweiligen Wendeeinrichtung kontrolliert aus- und eingefahren zu werden, und/ oder zum Empfangen und Abgeben eines zu fördernden Bauteils kontrolliert mit Unterdruck und/oder Überdruck beaufschlagt zu werden, und/ oder um ihre jeweilige radiale Bewegungsachse unbeweglich zu sein, oder um ihre jeweilige radiale Bewegungsachse um einen Drehwinkel kontrolliert gedreht zu werden.In one variant of the component handling device, the transducers of the first and / or the second turning device are set up to be extended and retracted in a controlled manner radially to the axis of rotation or the center of rotation of the respective turning device, and / or to receive and deliver a component to be conveyed in a controlled manner Vacuum and / or overpressure to be applied, and / or to be immovable about their respective radial movement axis, or to be rotated in a controlled manner by an angle of rotation about their respective radial movement axis.
Bei einer Bauteilhandhabungsvorrichtung dieser Art sind in einer Variante den Aufnehmern der ersten und/oder der zweiten Wendeeinrichtung zum radialen Aus-/Einfahren bei der Spendestelle, der Übergabestelle zwischen den ersten und zweiten Wendeeinrichtungen diesen zugeordnete Linearantriebe vorgesehen. Diese Linearantriebe greifen in die entsprechend positionierten Aufnehmer jeweils von außerhalb der jeweiligen Wendeeinrichtungen ein und fahren den jeweiligen Aufnehmer radial aus- und ein. In einer anderen Variante fahren diese Linearantriebe den jeweiligen Aufnehmer lediglich aus, während eine Rückstellfeder den jeweiligen Aufnehmer einfährt. In einer weiteren Variante ist jedem der Aufnehmer ein bidirektionaler oder unidirektionaler Radialantrieb zugeordnet.In a component handling device of this type, the sensors of the first and / or the second turning device for radial extension / retraction at the dispensing point, the transfer point between the first and second turning devices, are provided in a variant of these sensors. These linear drives engage in the correspondingly positioned transducers from outside the respective turning devices and move the respective transducer radially in and out. In another variant, these linear drives only extend the respective transducer, while a return spring retracts the respective transducer. In a further variant, a bidirectional or unidirectional radial drive is assigned to each of the sensors.
In einer Variante der Bauteilhandhabungsvorrichtung stellen Ventile zu jedem der einzelnen Aufnehmer individuell und positionsgerecht eine Zuführung von Unterdruck und Überdruck bereit um frei oder positionsgesteuert die Funktionen: (i) Ansaugen des Bauteils, (ii) Halten des Bauteils, (iii) Ablegen des Bauteils mit oder ohne gesteuertem Abblas-Impuls, und/oder freies Abblasen des Bauteils zu realisieren.In a variant of the component handling device, valves provide a supply of underpressure and excess pressure to each of the individual transducers individually and in the correct position in order to freely or position-controlled the functions: (i) suctioning the component, (ii) holding the component, (iii) depositing the component with or without a controlled blow-off pulse and / or free blow-off of the component.
In einer Variante der Bauteilhandhabungsvorrichtung sind der ersten Wendeeinrichtung zwischen der Spendestelle und der Übergabestelle, und/oder der zweiten Wendeeinrichtung zwischen der Übergabestelle und der Ablagestelle jeweils Lage- und Eigenschaftssensoren zugeordnet. Diese Sensoren sind dazu eingerichtet, Lagedaten und/oder Eigenschaften des geförderten Bauteils und/oder Positionsdaten zur Lageregelung der Manipulatoren (Aufnehmer) und der Empfangsstellen zu erfassen und für die Steuerung zur Verfügung zu stellen.In one variant of the component handling device, position and property sensors are assigned to the first turning device between the dispensing point and the transfer point, and / or the second turning device between the transfer point and the deposit point. These sensors are set up to record position data and / or properties of the conveyed component and / or position data for position control of the manipulators (pickups) and the receiving points and to make them available for the control.
In einer Variante sind diese Sensoren dazu eingerichtet, eine Position eines Aufnehmers der ersten Wendeeinrichtung relativ zu einem zuvor definierten Referenzpunkt zu bestimmen und/oder eine Position eines Aufnehmers der zweiten Wendeeinrichtung zu einem zuvor definierten Referenzpunkt zu bestimmen und diese relativen Positionen der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, these sensors are set up to determine a position of a transducer of the first turning device relative to a previously defined reference point and / or to determine a position of a transducer of the second turning device to a previously defined reference point and these relative positions of the control for self-adjustment of the To provide component handling device.
In einer Variante werden die relativen Positionen der Aufnehmer der ersten und/oder zweiten Wendeeinrichtung zu den definierten Referenzpunkten mit den relativen Positionen der Aufnehmer zueinander und/oder zur Abgabeeinrichtung und/oder zur Empfangsstelle für jeden Aufnehmer jeweils durch die Steuerung verglichen, um die Erfassungsqualität der Sensoren und/oder die Beschädigungsfreiheit der Aufnehmer zu überprüfen.In a variant, the relative positions of the transducers of the first and / or second turning device to the defined reference points with the relative positions of the transducers to each other and / or to the delivery device and / or to the receiving point for each transducer are compared by the controller in order to determine the detection quality of the Check sensors and / or the sensor's freedom from damage.
In einer Variante der Bauteilhandhabungsvorrichtung sind wenigstens einige der Lage- und Eigenschaftssensoren dazu eingerichtet, jeweils wenigstens eine Deckfläche und/oder eine oder mehrere Mantelflächen des geförderten Bauteils zu inspizieren um dessen Lagedaten und/oder Eigenschaften zu erfassen und für die Steuerung zur Verfügung zu stellen.In a variant of the component handling device, at least some of the position and property sensors are set up to inspect at least one top surface and / or one or more lateral surfaces of the component being conveyed in order to record its position data and / or properties and to make them available for the control.
In einer Variante der Bauteilhandhabungsvorrichtung sind im Zentrum der ersten Wendeeinrichtung und/oder im Zentrum der zweiten Wendeeinrichtung jeweils wenigstens ein bildgebender Eigenschafts- und/oder Lagesensor zum Ermitteln von Eigenschaften und/oder der Lage eines zu empfangenen Bauteils bzw. zum Ermitteln der Lage von Empfangsstellen in der Empfangseinrichtung und/oder darin befindlichen Bauteils vorgesehen. Basierend auf den Eigenschaftsdaten und/oder den Lagedaten des Sensors / dieser Sensoren kann dann eine Korrektur bei Eigenschaftsfehlern und/oder Lagefehlern des zu empfangenden Bauteils bzw. der Empfangsstelle durch die Steuerung erfolgen. Dabei ist/sind in einer Variante der/die bildgebende/n Lagesensor/en dazu eingerichtet, einen Bildeinzug jeweils während der Wendebewegung der ersten bzw. zweiten Wendeeinrichtung zwischen benachbarten Aufnehmern auszuführen und für die Steuerung zur Veranlassung entsprechender Korrekturbewegungen der Ausstoßeinheit, dem Bauteilvorrat oder Wafer, der Wendeeinrichtungen und/oder der Empfangseinrichtung zur Verfügung zu stellen. In einer anderen Variante ist die Ausstoßeinheit feststehend. In einer anderen Variante verfügt/verfügen der/die im Zentrum der ersten/zweiten Wendeeinrichtung positionierte/n bildgebende/n Lage- und/oder Eigenschaftssensor/en über eine Reflektoranordnung, welche die indirekte Erfassung der Ausstoßeinheit, des Bauteilvorrats oder Wafers, der Aufnehmer der ersten/zweiten Wendeeinrichtung und/oder der Empfangseinrichtung erlaubt, während sich die Wendeeinrichtungen in einer zur Übertragung von Bauteilen vorgesehenen Position (Übertragungsstellung) befinden.In a variant of the component handling device, at least one imaging property and / or position sensor for determining properties and / or the position of a component to be received or for determining the position of receiving points are in the center of the first turning device and / or in the center of the second turning device provided in the receiving device and / or component located therein. Based on the property data and / or the location data of the sensor / these sensors, a correction can then be made by the controller in the event of property errors and / or location errors of the component to be received or the receiving point. In one variant, the imaging is / are Position sensor (s) set up to perform an image acquisition during the turning movement of the first or second turning device between adjacent sensors and to make them available for the control to initiate corresponding corrective movements of the ejection unit, the component supply or wafer, the turning devices and / or the receiving device. In another variant, the ejection unit is fixed. In another variant, the imaging position and / or property sensor (s) positioned in the center of the first / second turning device has / have a reflector arrangement which indirectly detects the ejection unit, the component supply or wafer, the sensors of the allowed first / second turning device and / or the receiving device while the turning devices are in a position intended for the transmission of components (transmission position).
In einer Variante ist der Lage- und/oder Eigenschaftssensor im Zentrum der ersten Wendeeinrichtung dazu eingerichtet, eine Position eines Aufnehmers der ersten Wendeeinrichtung relativ zur Abgabeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In one variant, the position and / or property sensor in the center of the first turning device is set up to determine a position of a sensor of the first turning device relative to the dispensing device and to make it available to the controller for self-adjustment of the component handling device.
In einer Variante ist im Zentrum der ersten Wendeeinrichtung ein weiterer Lage- und/oder Eigenschaftssensor vorgesehen, der dazu eingerichtet ist, eine Position eines Aufnehmers der zweiten Wendeeinrichtung relativ zur Position eines Aufnehmers der ersten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, a further position and / or property sensor is provided in the center of the first turning device, which is configured to determine a position of a sensor of the second turning device relative to the position of a sensor of the first turning device and is available to the control for self-adjustment of the component handling device to deliver.
In einer Variante ist der Lage- und/oder Eigenschaftssensor im Zentrum der zweiten Wendeeinrichtung dazu eingerichtet, eine Position der Empfangsstelle relativ zu einem Aufnehmer der zweiten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In one variant, the position and / or property sensor in the center of the second turning device is set up to determine a position of the receiving point relative to a sensor of the second turning device and to make it available to the control for self-adjustment of the component handling device.
In einer Variante ist im Zentrum der zweiten Wendeeinrichtung ein weiterer Lage- und/oder Eigenschaftssensor vorgesehen, der dazu eingerichtet ist, eine Position eines Aufnehmers der zweiten Wendeeinrichtung relativ zur Position eines Aufnehmers der ersten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, a further position and / or property sensor is provided in the center of the second turning device, which is configured to determine a position of a sensor of the second turning device relative to the position of a sensor of the first turning device and is available to the controller for self-adjustment of the component handling device to deliver.
Zusätzlich oder alternativ zu diesen bildgebenden Eigenschafts- und/oder Lagesensoren können relativ zu den ersten und zweiten Wendeeinrichtungen extern vorgesehene bildgebende Eigenschafts- und/oder Lagesensoren zum Ermitteln von Eigenschaften und/oder der Lage eines zu empfangenen Bauteils bzw. zum Ermitteln der Lage von Empfangsstellen in der Empfangseinrichtung und/oder darin befindlichen Bauteils vorgesehen sein. Basierend auf den Eigenschaftsdaten und/oder den Lagedaten dieses Sensors / dieser Sensoren kann dann eine Korrektur bei Eigenschaftsfehlern und/ oder Lagefehlern des zu empfangenden Bauteils bzw. der Empfangsstelle durch die Steuerung erfolgen. Unabhängig von dem vorstehend beschriebenen Inspektionssystem und funktional als Bestandteil dem Handhabungssystem zuzuordnen, können jeweils im Zentrum der beiden Wendeeinrichtungen eine nach oben gerichtete Bauteilvorrats-Kamera (mit 90°-Spiegelsystem und Beleuchtung) bzw. eine bevorzugt aber nicht zwingend baugleiche nach unten gerichtete Baugruppe als Ablege-Kamera angeordnet sein. Sie dienen zur Positionserfassung der Bauteile bzw. der Empfangsstellen mit dem Ziel der Positionskorrektur bei auftretenden Lagefehlern der Bauteile bzw. der Empfangsstellen. In einer Variante können die Sensoren zur Selbstjustierung der Bauteilhandhabungsvorrichtung miteingebunden werden.In addition or as an alternative to these imaging property and / or position sensors, relative to the first and second turning devices, externally provided imaging property and / or position sensors can be used to determine properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or the component located therein. Based on the property data and / or the location data of this sensor / these sensors, a correction can then be made by the controller in the event of property errors and / or location errors of the component to be received or the receiving point. Regardless of the inspection system described above and functionally as part of the handling system, an upward-facing component supply camera (with a 90 ° mirror system and lighting) or a preferably, but not necessarily identical, downward-facing assembly can be placed in the center of the two turning devices Filing camera can be arranged. They are used to record the position of the components or the receiving points with the aim of correcting the position in the event of position errors of the components or receiving points. In a variant, the sensors for self-adjustment of the component handling device can be integrated.
In einer Variante sind mindestens 2 extern vorgesehene bildgebende Eigenschafts - und/oder Lagesensoren aus im Wesentlichen zueinander orthogonalen Betrachtungsrichtungen (90° plus/minus 15°) auf die Spendestelle der Bauteile gerichtet und dazu eingerichtet, eine Position eines Aufnehmers der ersten Wendeeinrichtung relativ zur Abgabeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, at least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the dispensing point of the components and are set up to position a sensor of the first turning device relative to the dispensing device to be determined and made available to the control for self-adjustment of the component handling device.
In einer Variante sind mindestens 2 extern vorgesehene bildgebende Eigenschafts - und/oder Lagesensoren aus im Wesentlichen zueinander orthogonalen Betrachtungsrichtungen (90° plus/minus 15°) auf die Übergabestelle der Bauteile gerichtet und dazu eingerichtet, eine Position eines Aufnehmers der zweiten Wendeeinrichtung relativ zur Position eines Aufnehmers der ersten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, at least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the transfer point of the components and are set up to position a sensor of the second turning device relative to the position to determine a transducer of the first turning device and to make it available to the controller for self-adjustment of the component handling device.
In einer Variante sind mindestens 2 extern vorgesehene bildgebende Eigenschafts - und/oder Lagesensoren aus im Wesentlichen zueinander orthogonalen Betrachtungsrichtungen (90° plus/minus 15°) auf die Ablagestelle der Bauteile gerichtet und dazu eingerichtet, eine Position der Empfangsstelle relativ zu einem Aufnehmer der zweiten Wendeeinrichtung zu bestimmen und der Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung zur Verfügung zu stellen.In a variant, at least 2 externally provided imaging property and / or position sensors are directed from essentially orthogonal viewing directions (90 ° plus / minus 15 °) to the depositing point of the components and are set up to position the receiving point relative to a sensor of the second To determine the turning device and to provide the control for self-adjustment of the component handling device.
In einer Variante der Bauteilhandhabungsvorrichtung ist der Übergabestelle und/oder der Ablagestelle eine Ausschleusstelle vor- oder nachgelagert, die dazu eingerichtet ist, durch die Steuerung gesteuert, ein durch die Steuerung mittels wenigstens eines der Lage- und Eigenschaftssensoren als Schlechtteil erkanntes Bauteil auszuschleusen, und es nicht als Gutteil in die Empfangseinrichtung abzulegen.
In einer Variante der Bauteilhandhabungsvorrichtung sind der ersten und/oder der zweiten Wendeeinrichtung jeweils eine ganzzahlige Anzahl von n Aufnehmern zugeordnet. Dabei gilt n >= 2. Die Anzahl der Aufnehmer der ersten Wendeeinrichtung und die Anzahl der Aufnehmer der zweiten Wendeeinrichtung können dabei gleich oder unterschiedlich sein.In a variant of the component handling device, a transfer point is arranged upstream or downstream of the transfer point and / or the deposit point, which is set up, controlled by the control, to discharge a component identified as a bad part by the control by means of at least one of the position and property sensors, and it not to be placed as a good part in the receiving facility.
In a variant of the component handling device, the first and / or the second turning device are each assigned an integer number of n pickups. Here n> = 2. The number of sensors of the first turning device and the number of sensors of the second turning device can be the same or different.
In einer Variante der Bauteilhandhabungsvorrichtung schließen die ersten, zweiten und/oder dritten Achsen zueinander jeweils einen Winkel von 90° plus/minus maximal 10° oder 15° ein.In a variant of the component handling device, the first, second and / or third axes each form an angle of 90 ° plus / minus a maximum of 10 ° or 15 °.
In einer Variante der Bauteilhandhabungsvorrichtung sind die Lage-/Eigenschaftssensoren bildgebende Sensoren mit übereinstimmenden oder voneinander abweichenden Erfassungsspektren, oder berührend oder berührungslos distanzmessende Lagesensoren, oder berührend oder berührungslos erfassende Eigenschaftssensoren.In a variant of the component handling device, the position / property sensors are imaging sensors with matching or differing detection spectra, or contact or distance sensors that measure distance, or property or sensors that measure contact or contact.
Die Lage- und Eigenschaftssensoren können bildgebende Sensoren mit geradlinigen oder abknickenden optischen Achsen sein.The position and property sensors can be imaging sensors with straight or kinking optical axes.
Die Kamera-Systeme der Lage- und Eigenschaftssensoren einschließlich ihrer Spiegel- und Beleuchtungseinheiten können durch ihre räumliche Anordnung derart kombiniert sein, dass die Bauteil-Inspektion der jeweils zugewandten Bauteilfläche und zweier seiner Mantelflächen parallelisiert an einer einzigen Prozessposition realisierbar ist. Insgesamt genügen zwei Prozesspositionen zur kompletten Inspektion aller sechs Seitenflächen eines zum Beispiel quaderförmigen Bauteils. Dazu werden an jeder der beiden Prozesspositionen von dem Bauteil drei der sechs Seitenflächen erfasst. Als Inspektionsposition einer jeden Wendeeinrichtung kann in einer Variante dabei die jeweils dritte Prozessposition in etwa horizontal auf Höhe der Rotations- oder Schwenkachse festgelegt sein.The spatial arrangement of the camera systems of the position and property sensors, including their mirror and lighting units, can be combined in such a way that the component inspection of the facing component surface and two of its lateral surfaces can be carried out in parallel at a single process position. In total, two process positions are sufficient for the complete inspection of all six side surfaces of a cuboid component, for example. For this purpose, three of the six side surfaces are captured by the component at each of the two process positions. In one variant, the inspection position of each turning device can be defined as the third process position approximately horizontally at the level of the axis of rotation or swivel.
Zusätzliche positionsmessende Aufgaben können zwei weiteren Kamera-Systemen (Vorder-/Rückseiten-Kamera) zugeordnet sein.Additional position measuring tasks can be assigned to two other camera systems (front / rear camera).
In einer Variante der Bauteilhandhabungsvorrichtung sind die ersten und/oder zweiten Wendeeinrichtungen zumindest annähernd stern- oder radförmig ausgestaltet. Die Wendeeinrichtungen können präzisionsgelagert sein und ihre Positionierung längs der jeweiligen Achsen bzw. um die jeweiligen Achsen kann mittels axial angeordnetem linear bzw. rotatorisch wirkendem Antrieb erfolgen, gepaart mit einem hochauflösenden (zum Beispiel rotatorischen oder linearen) Encoder. Die jeweiligen Aufnehmer können am äußeren Umfang verteilt angeordnet sein und radial nach außen weisende Saugkontaktstellen für die zu fördernden Bauteile haben.In a variant of the component handling device, the first and / or second turning devices are at least approximately star-shaped or wheel-shaped. The turning devices can be precision-mounted and their positioning along the respective axes or around the respective axes can be carried out by means of an axially arranged linear or rotary drive, paired with a high-resolution (for example rotary or linear) encoder. The respective transducers can be distributed around the outer circumference and have suction contact points for the components to be conveyed that point radially outward.
Ein Vorteil der axial um etwa 90° versetzten Anordnung der Wendeeinrichtungen zueinander besteht darin, dass die Bauteile in ihrer Lage während des Förder-Prozesses bei Übergabe von einer Wendeeinrichtung zur nächsten eine 90°-Drehung um die Aufnehmerachse, relativ zur jeweiligen Bewegungsebene der Aufnehmer (bzw. Wendeeinrichtung-Achse) ausführen, ohne, dass dafür der Aufnehmer selbst rotatorisch verfahrbar gelagert werden muss. Diese Orientierungsänderung der Bauteile ermöglicht wiederum eine wesentliche vereinfachte Inspektion der vier Bauteil-Schnittflächen (=Bauteilseitenflächen). Hierfür dient ein durch je ein, der Bauteil-Schnittfläche zugewandtes, orthogonal zur Aufnehmer-Bewegungsebene (also in axialer Richtung der Wendeeinrichtung) angeordnetes Kamera-System mit vorzugsweise sehr geringem Abstand zu den Bauteil-Schnittflächen (= Mantelflächen des Bauteils) selbst.One advantage of the arrangement of the turning devices, which is offset axially by about 90 °, is that the components are in their position during the conveying process when transferring from one turning device to the next, a 90 ° rotation about the sensor axis, relative to the respective movement plane of the sensors ( or turning device axis) without the sensor itself having to be rotatably supported for this purpose. This change in the orientation of the components in turn enables a significantly simplified inspection of the four component cut surfaces (= component side surfaces). This is achieved by using a camera system, each facing the component cutting surface and arranged orthogonally to the transducer movement plane (i.e. in the axial direction of the turning device), preferably at a very short distance from the component cutting surfaces (= lateral surfaces of the component) itself.
Die Erfassung der Fehlpositionierung von Aufnehmer und Bauteil zueinander bzw. zu den Übergabe- und Inspektionspositionen erfolgt unter Nutzung der Kamera- Systeme als Aufnehmer- bzw. Bauteil-Lage-erfassendes Messsystem. Bei sehr hohen Genauigkeitsanforderungen können zusätzlich jeweils drei distanzmessende Sensoren für die Bondtool-Lageerfassung je Wendeeinrichtung zusätzlich vorgesehen sein.The detection of the incorrect positioning of the transducer and the component relative to one another or to the transfer and inspection positions is carried out using the camera systems as the measuring system that records the transducer or component position. In the case of very high accuracy requirements, three distance-measuring sensors can additionally be additionally provided for the bond tool position detection per turning device.
Die optischen Achsen der Kameras "durchdringen" die inspizierte Bauteil-Oberfläche. Sie bilden ein Bezugssystem für die Aufnehmer-Lage. Hiervon abgeleitet lassen sich durch die in einer Ebene parallel zur idealen Aufnehmer-Bewegungsebene der rotierenden Wendeeinrichtung angeordneten distanzmessenden Sensoren Abweichungen der Aufnehmer-Bewegungsbahn von der Soll-Bewegungsbahn ermitteln. Daraus sind die auftretenden Positionsfehler in den Übergabepositionen bestimm- und durch die Steuerung kompensierbar.The optical axes of the cameras "penetrate" the inspected component surface. They form a reference system for the sensor position. From this, deviations of the sensor movement path from the target movement path can be determined by the distance-measuring sensors arranged in a plane parallel to the ideal sensor movement plane of the rotating turning device. From this, the position errors that occur in the transfer positions can be determined and compensated for by the control.
Je nach verwendeten optischen Lage-/Eigenschaftssensoren und/oder Funktionsprinzip der zusätzlichen Lagesensoren lassen sich die Referenzmessungen zur Aufnehmer-Lage und/oder die Selbstjustierung im laufenden Prozess oder auch während zyklisch sich wiederholender Referenzfahrten (zum Beispiel mittels tastend berührender Messsensoren erforderlich) realisieren. Dafür sind sowohl zu Prozessbeginn zur Erfassung räumlicher Lagefehler, als auch während des Prozesses zur Einbeziehung thermisch bedingter Verlagerungen zyklische Referenzfahrten (bei berührenden Sensoren mit kurzzeitiger Prozessunterbrechung) erforderlich, wobei letztere auch relativ lang sein können.Depending on the optical position / property sensors used and / or the functional principle of the additional position sensors, the reference measurements for the sensor position and / or the self-adjustment in the running process can also be carried out during cyclically repeating reference runs (for example, necessary by means of touching measuring sensors). This requires cyclical reference runs (for touching sensors with brief process interruptions) both at the beginning of the process to record spatial position errors and during the process to include thermal-related displacements, the latter also being relatively long.
In einer Variante der Vorrichtung lässt sich die Selbstjustierung vor Inbetriebnahme der Bauteilhandhabungsvorrichtung durchführen. Die Steuerung ist hierbei dazu eingerichtet, jeweils die erste und zweite Wendeeinrichtung sukzessive zu rotieren und mit den optischen Lage- und Eigenschaftssensoren und/oder den zusätzlichen Lagesensoren zunächst eine relative Position eines jeden einzelnen Aufnehmers der ersten Wendeeinrichtung zur Abgabeeinrichtung zu ermitteln, eines jeden einzelnen Aufnehmers der zweiten Wendeeinrichtung zu dem jeweils an der Übergabestelle gegenüberliegenden Aufnehmer der ersten Wendeeinrichtung zu ermitteln und die Position der Empfangsstellen jeweils zu dem an der Ablagestelle befindlichen Aufnehmer der zweiten Wendeeinrichtung zu ermitteln. Die Steuerung ist hierbei dazu eingerichtet, das sukzessive Rotieren der Wendeeinrichtungen und das ermitteln der relativen Positionen mindestens so oft zu wiederholen, bis alle möglichen Stellungen der Wendeeinrichtungen zur Abgabeeinrichtung, zueinander und zur Empfangseinrichtung mindestens einmal erreicht wurden. Die Steuerung ist hierbei weiter dazu eingerichtet, die ermittelten Werte in einer Steuerungstabelle zu speichern.In a variant of the device, the self-adjustment can be carried out before the component handling device is started up. The controller is set up to successively rotate each of the first and second turning devices and, with the optical position and property sensors and / or the additional position sensors, to first determine a relative position of each individual sensor of the first turning device relative to the dispensing device, each individual sensor of the second turning device to the transducer of the first turning device opposite each at the transfer point and to determine the position of the receiving points in each case to the transducer of the second turning device located at the storage location. The controller is set up to repeat the successive rotation of the turning devices and the determination of the relative positions at least as often until all possible positions of the turning devices with respect to the delivery device, to each other and to the receiving device have been reached at least once. The control is also set up to store the determined values in a control table.
Die ermittelten Positionsabweichungen der an der Spendestelle befindlichen Aufnehmer der ersten Wendeeinrichtung relativ zu einer zuvor definierten Position zur Abgabeeinrichtung bilden im Betrieb jeweils den Korrekturvektor für die erste Wendeeinrichtung.The determined position deviations of the sensors of the first turning device located at the dispensing point relative to a previously defined position relative to the dispensing device each form the correction vector for the first turning device during operation.
Die ermittelten Positionsabweichungen der Aufnehmer der zweiten Wendeeinrichtung relativ zu einer zuvor definierten Position zu dem jeweils an der Übergabestelle gegenüberliegenden Aufnehmer der ersten Wendeeinrichtung bilden, addiert mit dem jeweiligen Korrekturvektor für die erste Wendeeinrichtung, den jeweiligen Korrekturvektor der zweiten Wendeeinrichtung.The determined position deviations of the transducers of the second turning device relative to a previously defined position relative to the transducer of the first turning device opposite each other at the transfer point, added to the respective correction vector for the first turning device, add the respective correction vector of the second turning device.
Die ermittelten Positionsabweichungen der Empfangestelle relativ zu einer zuvor definierten Position zu dem jeweils an der Ablagestelle gegenüberliegenden Aufnehmer der zweiten Wendeeinrichtung bilden, addiert mit dem jeweiligen Korrekturvektor der zweiten Wendeeinrichtung, den jeweiligen Korrekturvektor der Empfangseinrichtung.The determined positional deviations of the receiving point relative to a previously defined position relative to the sensor of the second turning device opposite each other at the depositing point are added to the respective correction vector of the second turning device, the respective correction vector of the receiving device.
In einer Variante wird zur Kompensation von, insbesondere durch die Selbstjustierung bestimmten, Positionsfehlern der Wendeeinrichtungen der Aufnehmer insbesondere in den Bauteil-Übergabepositionen und der Positionierungsfehler der darauf fixierten Bauteile (in Übergabe und Inspektionspositionen) eine rotatorische Korrekturbewegung des Rotorantriebes und orthogonal eine lineare Korrekturbewegung in Achsrichtung ausgeführt. Hierfür kann in einer Variante die Rotor-Antriebsbaugruppe auf einem Verfahrschlitten angeordnet sein und mittels eines positionsgeregelten Antriebes, zum Beispiel eines Exzenterantriebes um begrenzte Wegsegmente verfahren werden.In one variant, a rotational correction movement of the rotor drive and, orthogonally, a linear correction movement in the axial direction is used to compensate for position errors of the turning devices of the transducers, in particular in the component transfer positions and the positioning errors of the components fixed thereon (in transfer and inspection positions), in particular determined by the self-adjustment executed. For this purpose, in one variant, the rotor drive assembly can be arranged on a traversing slide and can be moved through limited travel segments by means of a position-controlled drive, for example an eccentric drive.
In einer Variante der Bauteilhandhabungsvorrichtung erfordert die starre Kopplung mehrerer Aufnehmer an einer Wendeeinrichtung eine Übertragung der Korrekturwerte von einer Bauteil-Übergabe-Position bzw. Inspektionsposition zu den in der Abfolge nächsten Positionen. Diese Korrekturen können an einer fixen Übergabeposition beginnen und bei der letzten Bauteil-Übergabe in die Empfangsstelle enden. Dabei werden die summarischen Lagefehler entlang der bis zu drei Achsen und die Verdrehung um die bis zu drei Achsen durch die Empfangseinrichtung kompensiert.In a variant of the component handling device, the rigid coupling of a plurality of transducers to a turning device requires the correction values to be transferred from a component transfer position or inspection position to the next positions in the sequence. These corrections can start at a fixed transfer position and end at the last component transfer to the receiving point. The total positional errors along the up to three axes and the rotation around the up to three axes are compensated for by the receiving device.
In einer Variante der Bauteilhandhabungsvorrichtung sind die Aufnehmer an ihrer jeweiligen Wendeeinrichtung nicht drehbar gelagert. So kann ein Orientierungsfehlerausgleich von Bauteilen während des Förderns selbst nicht erfolgen. Daher ist in einer Variante im nachgelagerten Peripheriebereich, insbesondere in der Empfangseinrichtung neben der Achsen-Lagekorrektur auch eine rotatorische Korrekturmöglichkeit vorzusehen.In a variant of the component handling device, the pickups are not rotatably mounted on their respective turning device. This means that components cannot be compensated for errors in orientation themselves during conveying. Therefore, in a variant in the downstream peripheral area, in particular in the receiving device, a rotational correction option must also be provided in addition to the axis position correction.
In einer anderen Variante der Bauteilhandhabungsvorrichtung erfolgt die Rotationskorrektur mit drehbar gelagerten Aufnehmern. Damit kann ein Ausgleichen von Orientierungsfehlern von Bauteilen während des Förderns selbst erfolgen. Der Orientierungsfehler wird dann durch die drehbar gelagerten Aufnehmer der oberen und/oder unteren Wendeeinrichtung korrigiert, bevorzugt durch die Aufnehmer der unteren Wendeeinrichtung.In another variant of the component handling device, the rotation correction is carried out with rotatably mounted sensors. This can compensate for orientation errors of components during the conveying itself. The orientation error is then corrected by the rotatably mounted sensors of the upper and / or lower turning device, preferably by the sensors of the lower turning device.
Die hier vorgestellten Varianten sind im Vergleich zum Stand der Technik kostengünstiger und bieten einen höheren Bauteiledurchsatz, mehr Zeit für Inspektionen und haben weniger bewegte Massen.The variants presented here are cheaper than the prior art and offer a higher throughput of components, more time for inspections and less moving masses.
Ein Verfahren zum Selbstjustieren der Bauteilhandhabungsvorrichtung weist folgende Schritte auf:
- Erfassen der Spendestelle, beinhaltend die Abgabeeinrichtung und den an dieser Stelle befindlichen Aufnehmer, aus mindestens zwei voneinander verschiedenen Erfassungsrichtungen, durch mindestens einen optischen Lage- oder Eigenschaftssensor.
- Erfassen der Übergabestelle, beinhaltend den an dieser Stelle befindlichen Aufnehmer der ersten Wendeeinrichtung und den an dieser Stelle befindlichen Aufnehmer der zweiten Wendeeinrichtung, aus mindestens zwei voneinander verschiedenen Erfassungsrichtungen, durch mindestens einen optischen Lage- oder Eigenschaftssensor.
- Erfassen der Ablagestelle, beinhaltend den an dieser Stelle befindlichen Aufnehmer und die Empfangsstelle, aus mindestens zwei voneinander verschiedenen Erfassungsrichtungen, durch mindestens einen optischen Lage- oder Eigenschaftssensor.
- Ermitteln der Position des an der Spendestelle befindlichen Aufnehmers in Relation zur Abgabeeinrichtung, und ermitteln einer Abweichung zu einer zuvor definierten Position des Aufnehmers.
- Ermitteln der Position des an der Übergabestelle befindlichen Aufnehmers der zweiten Wendeeinrichtung in Relation zum Aufnehmer der ersten Wendeeinrichtung, und ermitteln einer Abweichung zu einer zuvor definierten Position des Aufnehmers der zweiten Wendeeinrichtung.
- Ermitteln der Position der Empfangsstelle in Relation zu dem an der Ablagestelle befindlichen Aufnehmer und ermitteln eine Abweichung zu einer zuvor definierten Position der Empfangsstelle.
- Ermitteln, anhand der zuvor ermittelten jeweiligen Abweichungen, eines Korrekturvektors für die erste Wendeeinrichtung und/oder eines Korrekturvektors für die zweite Wendeeinrichtung und/oder eines Korrekturvektors für jeden einzelnen Aufnehmer und/oder eines Korrekturvektors für die Empfangseinrichtung.
- Wiederholung aller vorherigen Verfahrensschritte für jede mögliche Übertragungsstellung der ersten und/oder der zweiten Wendeeinrichtung.
- Überprüfung der Erfassungsqualität der Sensoren und/oder der Aufnehmer auf Beschädigungsfreiheit, indem die ermittelten relativen Positionen der Aufnehmer zur Abgabeeinrichtung, zueinander und zu den Empfangsstellen mit den relativen Positionen der Aufnehmer zu einem definierten Referenzpunkt hin verglichen werden. Die Position der Aufnehmer zu den Referenzpunkten (je einer für die erste und die zweite Wendeeinrichtung) wird hierbei durch die Lage- und Eigenschaftssensoren ermittelt, welche sich zwischen Spendestelle und Übergabestelle (für die erste Wendeeinrichtung) bzw. zwischen Übergabestelle und Ablagestelle (für die zweite Wendeeinrichtung) befinden.
- Steuern der Positionierung der ersten Wendeeinrichtung und/oder der zweiten Wendeeinrichtung und/oder der Empfangseinrichtung und/oder jedes einzelnen Aufnehmers während des Betriebs der Bauteilhandhabungsvorrichtung so, dass der Abweichung zwischen den ermittelten und den zuvor definierten Positionen der Aufnehmer und/oder der Empfangsstelle entgegengewirkt wird.
- Detecting the dispensing point, including the dispensing device and the sensor located at this point, from at least two mutually different detection directions, by means of at least one optical position or property sensor.
- Detecting the transfer point, including the sensor of the first turning device located at this point and the sensor of the second turning device located at this point, from at least two different detection directions, by at least one optical position or property sensor.
- Detection of the depositing point, including the pickup located at this point and the receiving point, from at least two different detection directions by at least one optical position or property sensor.
- Determining the position of the sensor located at the dispensing point in relation to the dispensing device and determining a deviation from a previously defined position of the sensor.
- Determining the position of the sensor of the second turning device located at the transfer point in relation to the sensor of the first turning device, and determining a deviation from a previously defined position of the sensor of the second turning device.
- Determining the position of the receiving point in relation to the pickup located at the depositing point and determining a deviation from a previously defined position of the receiving point.
- Determine, based on the previously determined respective deviations, a correction vector for the first turning device and / or a correction vector for the second turning device and / or a correction vector for each individual sensor and / or a correction vector for the receiving device.
- Repetition of all previous method steps for each possible transmission position of the first and / or the second turning device.
- Checking the detection quality of the sensors and / or the sensors for freedom from damage by the determined relative positions of the sensors to the delivery device, to one another and to the receiving points with the relative positions of the sensors towards a defined reference point be compared. The position of the transducers to the reference points (one for each of the first and the second turning device) is determined by the position and property sensors, which are located between the dispensing point and the transfer point (for the first turning device) or between the transfer point and deposit point (for the second Turning device).
- Controlling the positioning of the first turning device and / or the second turning device and / or the receiving device and / or each individual transducer during the operation of the component handling device in such a way that the deviation between the determined and the previously defined positions of the transducers and / or the receiving point is counteracted ,
Genauer wird eine Lösung für eine Empfangseinrichtung, insbesondere für eine Bauteilhandhabungsvorrichtung der oben vorgestellten Art vorgestellt, die dazu eingerichtet ist, relativ zu der Ablagestelle mittels eines Drehantriebes zumindest teilweise um eine die Ablagestelle enthaltende dritte Achse kontrolliert zu drehen, und/oder mittels wenigstens eines Linearantriebes zumindest teilweise längs einer der ersten, zweiten und/oder dritten Achsen kontrolliert zu verfahren, und/oder mittels eines Drehantriebes einen durch die Empfangseinrichtung geführten Träger längs einer der ersten und/oder zweiten Achsen kontrolliert zu verfahren.More precisely, a solution for a receiving device, in particular for a component handling device of the type presented above, is presented, which is set up to at least partially rotate relative to the deposit point by means of a rotary drive about a third axis containing the deposit point, and / or by means of at least one linear drive to move at least partially in a controlled manner along one of the first, second and / or third axes, and / or to move a carrier guided by the receiving device along one of the first and / or second axes in a controlled manner by means of a rotary drive.
Die hier vorgestellte Lösung erlaubt, die Position und Lage der Wendeeinrichtungen simultan durch Position und/oder Rotation der Empfangseinrichtung zu kompensieren. Deshalb kann der Bauteiledurchsatz der Maschine gegenüber dem Stand der Technik erhöht werden. Um Spiel im Bandantrieb des Ablagebandes zu vermeiden, müssen im Stand der Technik die Antriebe relativ zueinander eingestellt werden. Die hier vorgestellte Lösung vermeidet dies, da der Transport immer nur in eine Richtung erfolgt. Dies ist insbesondere in Anwendungen hilfreich, bei denen die Taschen des Trägerbandes mit einem klebenden Abdeckband nach und nach verschlossen werden. Würde man das Trägerband wieder zurücktransportieren, ergäben sich evtl. Probleme, wenn das Abdeckband wieder abzulösen wäre. Das Spiel im Antrieb kann dabei vernachlässigt werden.The solution presented here allows the position and position of the turning devices to be compensated simultaneously by the position and / or rotation of the receiving device. The component throughput of the machine can therefore be increased compared to the prior art. In order to avoid play in the belt drive of the storage belt, the drives must be set relative to one another in the prior art. The solution presented here avoids this, since the transport always takes place in one direction. This is particularly helpful in applications in which the pockets of the carrier tape are gradually closed with an adhesive masking tape. If you were to transport the carrier tape back again, problems could arise if the masking tape were to be removed again. The play in the drive can be neglected.
In einer anderen Variante kann auch in die entgegengesetzte Richtung transportiert werden.In another variant, it can also be transported in the opposite direction.
Die Korrektur der Position des Bauteils erfolgt an der Empfangseinrichtung. So steht mehr Zeit dafür zur Verfügung. Ein Rück-Transport des Bandes, in dem die Bauteile abgelegt werden, ist nicht mehr erforderlich. Damit kann die Empfangseinrichtung einfacher aufgebaut sein. Ein zweites Antriebsrad für den Rücktransport des Bandes wie beim Stand der Technik ist nicht mehr erforderlich. Vielmehr wird in den erforderlichen Situationen die gesamte Empfangseinrichtung entgegen der Transportrichtung des Ablagebandes bewegt. Der Vorteil ist, dass eine höhere Positioniergenauigkeit des Bandes gegenüber vorbekannten Varianten erreicht wird, in denen die Positionierung ausschließlich über den Transport des Transportbandes bewerkstelligt wird. Auch das nachfolgende Anbringen eines (selbstklebenden) Abdeckbandes (Cover-Tape) auf dem Transportband kann hierbei leichter erfolgen.The position of the component is corrected at the receiving device. This gives you more time to do it. A return transport of the belt in which the components are stored is no longer necessary. So that the receiving device be built more simply. A second drive wheel for returning the tape as in the prior art is no longer required. Rather, the entire receiving device is moved against the transport direction of the storage belt in the required situations. The advantage is that a higher positioning accuracy of the belt is achieved compared to previously known variants, in which the positioning is accomplished exclusively by the transport of the conveyor belt. The subsequent application of a (self-adhesive) cover tape on the conveyor belt can also be done more easily.
In einer Variante ist die Empfangseinrichtung oberhalb einer ortsfesten Grundplatte angeordnet, die Motoren der drei Antriebe sind unterhalb der Grundplatte angeordnet. Die Position der Empfangseinrichtung kann in X, Y und um die Z-Achse rotierend justiert werden. Jede Bewegungsrichtung der Empfangseinrichtung verfügt über einen eigenen Antrieb. Die Position der einzelnen Antriebe ist nicht festgelegt. Die Drehachse für die Z-Korrektur liegt nahe bei der Bauteil-Ablageposition oder fällt in deren Zentrum.In a variant, the receiving device is arranged above a stationary base plate, the motors of the three drives are arranged below the base plate. The position of the receiving device can be adjusted in X, Y and rotating about the Z axis. Each direction of movement of the receiving device has its own drive. The position of the individual drives is not specified. The axis of rotation for the Z correction is close to the component storage position or falls in the center thereof.
In einer Variante der Empfangseinrichtung ist diese mit zwei Empfangsstellen ausgestattet, welche zu der Ablagestelle durch kontrolliertes Betätigen des Drehantriebes des/der Linearantriebe zumindest annähernd fluchtend auszurichten sind. Die zwei Empfangsstellen sind einem Rastermaß benachbarter Bauteil-Aufnahmen des Trägers entsprechend zueinander zu positionieren.In a variant of the receiving device, it is equipped with two receiving points which are to be aligned at least approximately in alignment with the depositing point by controlled actuation of the rotary drive of the linear drive (s). The two receiving points are to be positioned in relation to one another in accordance with a grid dimension of adjacent component receptacles of the carrier.
In einer Variante der Empfangseinrichtung ist ein bildgebender Eigenschafts- und/ oder Lagesensor zum Ermitteln von Eigenschaften und/oder der Lage eines zu empfangenden Bauteils in Bezug auf dessen Eigenschaften und/oder seiner Lage zu wenigstens einer der Empfangsstellen in der Empfangseinrichtung vorgesehen. Dieser bildgebende Eigenschafts- und/ oder Lagesensor befindet sich im oder beim Zentrum der unteren Wendeeinrichtung. Mit den Bilddaten aus diesem Sensor kann die Erzeugung von Korrekturanweisungen bei Eigenschafts- und/oder Lagefehlern des zu empfangenden Bauteils bzw. der Empfangsstelle durch die Steuerung zur Veranlassung entsprechender Korrekturbewegungen erfolgen.In a variant of the receiving device, an imaging property and / or position sensor is provided for determining properties and / or the position of a component to be received in relation to its properties and / or its position to at least one of the receiving points in the receiving device. This imaging property and / or position sensor is located in or at the center of the lower turning device. The image data from this sensor can be used to generate correction instructions in the event of property and / or position errors of the component to be received or of the receiving point by the controller in order to initiate appropriate correction movements.
In einer anderen Variante sind zwei weitere bildgebende Eigenschafts- und/ oder Lagesensoren bei der Empfangseinrichtung vorgesehen. Der eine Sensor ist von oben auf das zweite Fenster gerichtet um Qualitätsfehler zu untersuchen. Der andere Sensor ist beim ersten Fenster seitlich angeordnet um ein Verkippen des Bauteils besser gegenüber dem oben erläuterten Sensor detektieren zu können.In another variant, two further imaging property and / or position sensors are provided in the receiving device. One sensor is directed from above onto the second window to examine quality errors. The other sensor is arranged laterally in the first window in order to be able to better detect a tilting of the component compared to the sensor explained above.
In einer Variante der Empfangseinrichtung ist der vierte Drehantrieb dazu eingerichtet, durch Steuersignale aus der Steuerung angesteuert, mittels einer mechanischen Traktion den durch die Empfangseinrichtung geführten Träger längs einer der ersten und/oder zweiten Achsen kontrolliert um etwa 80 - 120%, vorzugsweise etwa 100% plus minus maximal 3%, des Rastermaßes benachbarter Bauteil-Aufnahmen des Trägers zu verfahren. Dabei kann auch der Drehantrieb dazu eingerichtet sein, durch Steuersignale aus der Steuerung angesteuert, in Abhängigkeit von Signalen aus dem bildgebenden Eigenschafts- und/oder Lagesensor wenigstens eine der Empfangsstellen mit der dort befindlichen Bauteil-Aufnahme des Trägers um die die Ablagestelle enthaltende dritte Achse kontrolliert um bis zu plus minus 6 °, vorzugsweise um bis zu plus minus 3 ° zu drehen. Des Weiteren kann ergänzend oder alternativ der wenigstens eine Linearantrieb dazu eingerichtet sein, durch Steuersignale aus der Steuerung angesteuert, die Empfangseinrichtung kontrolliert um etwa plus minus maximal 20%, vorzugsweise um bis zu plus minus 3% des Rastermaßes benachbarter Bauteil-Aufnahmen des Trägers längs einer der ersten, zweiten und/oder dritten Achsen kontrolliert zu verfahren.In a variant of the receiving device, the fourth rotary drive is set up to be controlled by control signals from the control, and by means of mechanical traction controls the carrier guided by the receiving device along one of the first and / or second axes by approximately 80-120%, preferably approximately 100%. plus minus a maximum of 3% of the grid dimension of adjacent component receptacles of the carrier. The rotary drive can also be set up to be controlled by control signals from the control, depending on signals from the imaging property and / or position sensor controls at least one of the receiving points with the component receptacle located there about the third axis containing the depositing point by up to plus minus 6 °, preferably by up to plus minus 3 °. Furthermore, in addition or as an alternative, the at least one linear drive can be set up to be controlled by control signals from the control, and the receiving device controls by approximately plus or minus a maximum of 20%, preferably by up to plus and minus 3% of the grid dimension of adjacent component receptacles of the carrier along one to move the first, second and / or third axes in a controlled manner.
In einer Variante der Empfangseinrichtung ist der vierte Drehantrieb dazu eingerichtet, den durch die Empfangseinrichtung geführten Träger entsprechend einem Rastermaß benachbarter Bauteil-Aufnahmen des Trägers längs einer der ersten und/oder zweiten Achsen vorwärts zu fördern.In a variant of the receiving device, the fourth rotary drive is set up to convey the carrier guided through the receiving device forward along one of the first and / or second axes according to a grid dimension of adjacent component receptacles of the carrier.
In einer Variante der Empfangseinrichtung ist eine Absaug- und/oder Ausblaseinrichtung vorgesehen, um aus wenigstens einer der Empfangsstellen in der Empfangseinrichtung und/oder dem in der Empfangseinrichtung geführten Träger ein als schadhaft und/oder fehlerhaft platziert erkanntes Bauteil zu entfernen.In a variant of the receiving device, a suction and / or blow-out device is provided in order to remove a component identified as defective and / or defective from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
Im Betrieb einer Variante der Empfangseinrichtung greift ein durch den vierten Drehantrieb angetriebenes Stachelrad in Transportlöcher des Ablagebandes für dessen Transport in Förderrichtung ein. Das Stachelrad dreht dabei bevorzugt nur in eine Vorwärts-Richtung. Das Ablageband hat in regelmäßigen Abständen Ablagetaschen für die Bauteile. Pro Ablagetasche dreht das Stachelrad um einen festen Winkelbetrag (z.B. 30°, 60°, 90°, 180° ..., 360°). Aus der Bildaufnahme durch die Kamera im Zentrum der zweiten Wendeeinrichtung ist die Lage der Ablagetasche bekannt, in welche das Bauteil abgelegt wurde. Durch die Kamera am Außenumfang der zweiten Wendeeinrichtung ist überdies bekannt, ob das nächste abzulegende Bauteil am Aufnehmer verdreht gehalten wird. Aus diesen Lageinformationen wird in der Steuerung errechnet, um welche Strecken- und/oder Winkel-Beträge die Empfangseinrichtung umpositioniert werden muss. Außerdem wird bei der Positionierung der Empfangseinrichtung auch berücksichtigt, dass sich die Wendeeinrichtung in x- und y-Richtung entsprechend bewegen wird, um das Bauteil an der Übergabeposition von der oberen zur unteren Wendeeinrichtung korrekt zu übernehmen. Die Empfangseinrichtung wird dann, soweit notwendig, entlang der (X-, Y-)Achsen linear verfahren und ggf. rotiert um die Feinjustierung der Ablage des Bauteils sicherzustellen.In the operation of a variant of the receiving device, a pinwheel driven by the fourth rotary drive engages in transport holes in the storage belt for its transport in the conveying direction. The spike wheel preferably rotates only in a forward direction. The storage belt has storage pockets for the components at regular intervals. The spike wheel per storage pocket rotates by a fixed angle (e.g. 30 °, 60 °, 90 °, 180 ° ..., 360 °). The position of the storage pocket into which the component has been placed is known from the image recording by the camera in the center of the second turning device. It is also known from the camera on the outer circumference of the second turning device whether the next component to be put down is held rotated on the pickup. This position information becomes in the control calculates the distance and / or angle amounts by which the receiving device must be repositioned. In addition, when positioning the receiving device, it is also taken into account that the turning device will move accordingly in the x and y directions in order to correctly take over the component at the transfer position from the upper to the lower turning device. If necessary, the receiving device is then moved linearly along the (X, Y) axes and, if necessary, rotated to ensure the fine adjustment of the placement of the component.
Wenn ein Bauteil in der Ablageposition abgelegt wurde, hat die Kamera im Zentrum der darüber angeordneten zweiten Wendeeinrichtung auch erfasst, ob das Bauteil fehlerhaft ist, d.h. ob es durch das Ablegen beschädigt wurde oder schon vorher einen Defekt hatte. Sofern bereits vorher ein Bauteil als defekt erkannte wurde, wird es nicht abgelegt.If a component has been placed in the storage position, the camera has also detected in the center of the second turning device arranged above whether the component is faulty, i.e. whether it was damaged by dropping or had a defect beforehand. If a component was previously recognized as defective, it will not be stored.
Die Ablageposition in der Empfangseinrichtung kann gleichzeitig auch eine erste Absaugposition sein. Dazu ist an der Empfangseinrichtung ein Absauger mit Unterdruck an der Ablageposition angeordnet. In Förderrichtung des Trägerbandes gibt es eine zweite alternative Absaugposition. Das heißt, an der Empfangseinrichtung sind zwei Fenster vorgesehen: ein erstes Fenster mit einer Ablageposition und ein zweites Fenster mit einer Absaugposition. Der Abstand zwischen beiden Fenstern entspricht dem Rastermaß des Trägerbandes und ist auf das Rastermaß einstellbar. Wurde das Bauteil nicht korrekt abgelegt, so dass es schräg darin liegt, oder noch teilweise herausragt, wird dies durch eine Kamera im Zentrum der zweiten Wendeeinrichtung erkannt. Das Trägerband kann aufgrund des nicht korrekt abgelegten Bauteils nicht weitertransportiert werden. Deshalb wird das Bauteil an der Ablageposition abgesaugt und durch das nächste abzulegende Bauteil ersetzt. Ist das Bauteil beschädigt, kann es an dieser Position ebenfalls entfernt und durch das nächste abzulegende Bauteil ersetzt werden. An der Position des zweiten Fensters kann - ggf. mit einer weiteren Kamera - auf Fehler inspiziert werden. Bei einem als defekt erkanntem Bauteil wird die Empfangseinrichtung insgesamt zurückbewegt und an das als defekt erkannte Bauteil an der Ablageposition abgesaugt.The storage position in the receiving device can also be a first suction position at the same time. For this purpose, an extractor with negative pressure is arranged at the storage position on the receiving device. There is a second alternative suction position in the conveying direction of the carrier belt. This means that two windows are provided on the receiving device: a first window with a storage position and a second window with a suction position. The distance between the two windows corresponds to the grid size of the carrier tape and is adjustable to the grid size. If the component has not been placed correctly so that it lies at an angle, or is still partially protruding, this is recognized by a camera in the center of the second turning device. The carrier tape cannot be transported due to the incorrectly placed component. The component is therefore suctioned off at the storage position and replaced by the next component to be stored. If the component is damaged, it can also be removed at this position and replaced with the next component to be placed. At the position of the second window, an additional camera can be used to inspect for errors. In the case of a component identified as defective, the receiving device is moved back as a whole and suctioned off at the component recognized as defective at the storage position.
Alternativ kann die zweite Absaugposition verwendet werden, um das als defekt erkannte Bauteil zu entfernen.Alternatively, the second suction position can be used to remove the component identified as defective.
Mit der hier vorgestellten Anordnung ist es möglich, ein Bauteil zur Erkennung von Fehlern zu inspizieren. Das Bauteil ist mit der ersten und zweiten Wendeeinrichtung abzulegen, und ein als defekt erkanntes Bauteil an der Ablageposition zu entfernen. Dies erfolgt an einer gemeinsamen Position.With the arrangement presented here, it is possible to inspect a component for the detection of errors. The component is with the first and second turning device to place, and to remove a component recognized as defective at the storage position. This takes place in a common position.
Die Empfangseinrichtung bewegt sich in drei Richtungen: In X-, und Y-Richtung, und um ihre (Z-)Hochachse im / nahe dem Zentrum der Ablageposition. Dies ist auch im Unterschied zu herkömmlichen Anordnungen zu sehen, bei denen das Trägerband in Transportrichtung gefördert wird und die Empfangseinrichtung senkrecht zur Bandtransportrichtung für die Positionierung zur Bauteilablage bewegt wird. Die Ablegestelle kann auch in Gestalt einer Schale (eines Trays, z.B. Jedec-Tray,) oder als Antennenbahn vorliegen.The receiving device moves in three directions: in the X and Y directions, and about its (Z) vertical axis in / near the center of the storage position. This can also be seen in contrast to conventional arrangements in which the carrier belt is conveyed in the transport direction and the receiving device is moved perpendicular to the belt transport direction for positioning in relation to the component storage. The storage location can also be in the form of a shell (a tray, e.g. Jedec tray) or as an antenna track.
In einer alternativen Variante ist der Empfangseinrichtung eine Absaug- und/oder Ausblaseinrichtung zugeordnet, um aus wenigstens einer der Empfangsstellen in der Empfangseinrichtung und/oder dem in der Empfangseinrichtung geführten Träger ein als schadhaft und/oder fehlerhaft platziert erkanntes Bauteil zu entfernen.In an alternative variant, a suction and / or blow-out device is assigned to the receiving device in order to remove a component identified as defective and / or incorrectly placed from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
Die Empfangseinrichtung kann in einer Variante Bauteile von einer Wendeeinrichtung empfangen, deren Drehachse im Wesentlichen parallel zur Förderrichtung der Empfangseinrichtung orientiert ist, oder die Empfangseinrichtung kann in einer weiteren Variante Bauteile von einer Wendeeinrichtung empfangen, deren Drehachse im Wesentlichen quer zur Förderrichtung der Empfangseinrichtung orientiert ist.In one variant, the receiving device can receive components from a turning device, the axis of rotation of which is oriented essentially parallel to the conveying direction of the receiving device, or in a further variant, the receiving device can receive components from a turning device, the axis of rotation of which is essentially transverse to the conveying direction of the receiving device.
Im Zentrum der Wendeeinrichtung ist in einer Variante ein bildgebender Eigenschafts- und/oder Lagesensor zum Ermitteln von Eigenschaften und/oder der Lage eines zu empfangenen Bauteils bzw. zum Ermitteln der Lage von Empfangsstellen in der Empfangseinrichtung und/oder darin befindlichen Bauteils vorgesehen. Dieser bildgebende Eigenschafts- und/oder Lagesensor ist dazu eingerichtet, zwischen am Umfang der Wendeeinrichtung befindlichen benachbarten Aufnehmern hindurch Bildeinzüge wenigstens einer der Empfangsstellen in der Empfangseinrichtung auszuführen.In one variant, an imaging property and / or position sensor for determining properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or the component located therein is provided in the center of the turning device. This imaging property and / or position sensor is set up to carry out image acquisitions of at least one of the receiving points in the receiving device between adjacent sensors located on the periphery of the turning device.
In einer alternativen Variante ist im Zentrum der Wendeeinrichtung ein Umlenkspiegel oder Prisma angeordnet, der dem außerhalb der Wendeeinrichtung angeordneten bildgebenden Eigenschafts- und/oder Lagesensor zugeordnet ist, zum Ermitteln von Eigenschaften und/ oder der Lage eines zu empfangenen Bauteils bzw. zum Ermitteln der Lage von Empfangsstellen in der Empfangseinrichtung und/oder darin befindlichen Bauteils. Der Umlenkspiegel oder das Prisma zusammen mit dem außerhalb der Wendeeinrichtung angeordneten bildgebenden Eigenschafts- und/oder Lagesensor sind dazu eingerichtet, zwischen am Umfang der Wendeeinrichtung befindlichen benachbarten Aufnehmern hindurch Bildeinzüge wenigstens einer der Empfangsstellen in der Empfangseinrichtung auszuführen.In an alternative variant, a deflection mirror or prism is arranged in the center of the turning device, which is assigned to the imaging property and / or position sensor arranged outside the turning device, for determining properties and / or the position of a component to be received or for determining the position of receiving points in the receiving device and / or component located therein. The deflecting mirror or the prism together with the imaging property and / or position sensor arranged outside the turning device are set up to carry out image feeds of at least one of the receiving points in the receiving device between adjacent sensors located on the periphery of the turning device.
Die Empfangseinrichtung ist relativ zu einer Ablagestelle mittels eines Linearantriebes zumindest teilweise längs einer ersten Achse kontrolliert in beide Richtungen zu verfahren. Mittels eines Drehantriebes ist ein durch die Empfangseinrichtung geführter Träger längs einer der ersten und/oder zweiten Achsen kontrolliert in einer Förderrichtung des Trägers zu verfahren. Der durch die Empfangseinrichtung geführte Träger ist mit zwei Empfangsstellen ausgestattet, welche zu einer Ablagestelle für Bauteile durch kontrolliertes Betätigen der Antriebe zumindest annähernd fluchtend auszurichten sind. Ein bildgebender Eigenschafts- und/ oder Lagesensor liefert Eigenschaften und/oder Lage eines in Bezug auf dessen Eigenschaften und/oder seine Lage zu untersuchendes Bauteil in wenigstens einer der Empfangsstellen in der Empfangseinrichtung. Basierend auf Bilddaten aus dem Eigenschafts- und/ oder Lagesensor erfolgen Korrekturanweisungen bei Eigenschafts- und/oder Lagefehlern des Bauteils durch eine Steuerung zur Veranlassung entsprechender Korrekturbewegungen der Empfangseinrichtung und/oder des in ihr geführten Trägers. Der Empfangseinrichtung ist eine Absaug- und/oder Ausblaseinrichtung zugeordnet, um aus wenigstens einer der Empfangsstellen in der Empfangseinrichtung und/oder dem in der Empfangseinrichtung geführten Träger ein als schadhaft und/oder fehlerhaft platziert erkanntes Bauteil zu entfernen. In einer anderen Variante verfügt/verfügen der/die im Zentrum der ersten/zweiten Wendeeinrichtung positionierte bildgebende/n Lage- und/oder Eigenschaftssensor/en über eine Reflektoranordnung, welche die indirekte Erfassung der Empfangseinrichtung erlaubt/erlauben, während sich die Wendeeinrichtungen in einer zur Übertragung von Bauteilen vorgesehenen Position (Übertragungsstellung) befinden.The receiving device can be moved at least partially along a first axis in a controlled manner in both directions relative to a storage location by means of a linear drive. By means of a rotary drive, a carrier guided through the receiving device can be moved along one of the first and / or second axes in a controlled manner in a conveying direction of the carrier. The carrier guided through the receiving device is equipped with two receiving points, which are to be aligned at least approximately in alignment with a depositing point for components by controlled actuation of the drives. An imaging property and / or position sensor delivers properties and / or position of a component to be examined with respect to its properties and / or its position in at least one of the receiving points in the receiving device. On the basis of image data from the property and / or position sensor, correction instructions for property and / or position errors of the component are given by a controller for initiating appropriate correction movements of the receiving device and / or of the carrier guided therein. A suction and / or blow-out device is assigned to the receiving device in order to remove a component identified as defective and / or defective from at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device. In another variant, the imaging position and / or property sensor (s) positioned in the center of the first / second turning device has / have a reflector arrangement which permits / allows the indirect detection of the receiving device, while the turning devices are in one Transfer of components intended position (transfer position).
Ein Verfahren zum Entnehmen fehlerhafter Bauteile aus einer Empfangseinrichtung insbesondere der vorstehend beschriebenen Bau-/Funktionweise weist folgende Schritte auf:
- Erfassen eines nicht korrekt abgelegten Bauteils in einer Tasche des Trägers für ein Bauteil an der ersten Empfangsstelle,
- Bewegen der Empfangseinrichtung mittels eines Linearantriebes längs der Förderrichtung, so dass das nicht korrekt abgelegte Bauteil sich an der zweiten Empfangsstelle befindet, ohne dabei den in der Empfangseinrichtung geführten Träger zu fördern,
- Absaugen des nicht korrekt abgelegten Bauteils an der zweiten Empfangsstelle aus der Tasche für ein Bauteil;
- Zurückbewegen der Empfangseinrichtung mittels des Linearantriebes entgegen der Förderrichtung, so dass das eine leere Tasche für ein Bauteil sich an der ersten Empfangsstelle befindet, ohne dabei den in der Empfangseinrichtung geführten Träger zu fördern,
- Ablegen eines Bauteils in der Tasche des Trägers an der ersten Empfangsstelle.
- Detection of a component that has not been correctly stored in a pocket of the carrier for a component at the first receiving point,
- Moving the receiving device along the conveying direction by means of a linear drive, so that the incorrectly deposited component is located at the second receiving point without conveying the carrier guided in the receiving device,
- Vacuum off the incorrectly deposited component at the second receiving point the pocket for a component;
- Moving the receiving device back against the conveying direction by means of the linear drive, so that there is an empty pocket for a component at the first receiving point without conveying the carrier guided in the receiving device,
- Placing a component in the carrier's pocket at the first receiving point.
Aufgrund gestiegener Qualitätsanforderungen bei gleichzeitig sinkenden Abmessungen elektronischer Bauteile, die überdies in stets sinkenden Prozesszeiten zu verarbeiten sind, wurden die herkömmlichen Sensoranordnungen als nicht ausreichend erkannt.The conventional sensor arrangements were not recognized as sufficient due to the increased quality requirements and the simultaneously decreasing dimensions of electronic components, which moreover have to be processed in ever decreasing process times.
Als eine Variante wird daher ein bildgebender Sensor vorgeschlagen, der geeignet und bestimmt ist zur Erfassung von Lage- und/oder Eigenschaften eines Bauteils, insbesondere in einer Bauteilhandhabungsvorrichtung der vorstehend offenbarten Art. Dieser bildgebende Sensor ist mit wenigstens zwei voneinander abweichenden Erfassungsspektren ausgestattet. Er ist insbesondere geeignet und bestimmt zur Erfassung von Eigenschaftsfehlern und/oder Lagefehlern eines in der Empfangsstelle einer Empfangseinrichtung befindlichen Bauteils. Dieser bildgebende Sensor ist geeignet und bestimmt, mit Strahlungsquellen zusammenzuwirken, die hinsichtlich Strahlungsspektrum und Strahlungsauftreffwinkel und/oder Strahlungsreflexionswinkel relativ zu dem bildgebenden Sensor auf diesen abgestimmt sind. Der bildgebende Sensor ist geeignet und dazu eingerichtet, für jedes seiner Erfassungsspektren einer ihm nachgeordneten Bildauswertung einen separaten Bildeinzug bereitzustellen.An imaging sensor is therefore proposed as a variant, which is suitable and intended for detecting the position and / or properties of a component, in particular in a component handling device of the type disclosed above. This imaging sensor is equipped with at least two different detection spectra. It is particularly suitable and intended for the detection of property errors and / or position errors of a component located in the receiving point of a receiving device. This imaging sensor is suitable and intended to interact with radiation sources which are matched to the imaging sensor with respect to the radiation spectrum and radiation incidence angle and / or radiation reflection angle relative to the imaging sensor. The imaging sensor is suitable and set up to provide a separate image acquisition for each of its acquisition spectra for an image evaluation arranged downstream of it.
Bei diesem bildgebenden Sensor sind beispielsweise die wenigstens zwei voneinander abweichenden Erfassungsspektren im sichtbaren und nicht sichtbaren Bereich ausgestaltet. Sie können auch als roter Farbbereich - 630nm plus minus 30 nm -, und/ oder grüner Farbbereich - 530 nm plus minus 60 nm -, und/oder blauer Farbbereich - 460nm plus minus 50 nm - eines Farbsensors ausgestaltet sein.In this imaging sensor, for example, the at least two different detection spectra are configured in the visible and invisible range. They can also be designed as a red color range - 630 nm plus minus 30 nm -, and / or green color range - 530 nm plus minus 60 nm - and / or blue color range - 460 nm plus minus 50 nm - of a color sensor.
In einer Variante des bildgebenden Sensors sind optisch wirksame Elemente vorgesehen, die dazu eingerichtet sind, den Sensor mit einem Bauteil in wenigstens einer der Empfangsstellen in der Empfangseinrichtung und/oder dem in der Empfangseinrichtung geführten Träger optisch zu koppeln.In a variant of the imaging sensor, optically active elements are provided which are set up to optically couple the sensor to a component in at least one of the receiving points in the receiving device and / or the carrier guided in the receiving device.
In einer Variante des bildgebenden Sensors umfassen die optisch wirksamen Elemente Umlenkspiegel, Prismen, Farbfilter und/oder Linsen.In a variant of the imaging sensor, the optically active elements include deflecting mirrors, prisms, color filters and / or lenses.
Einzelne der optisch wirksamen Elemente und/oder der Strahlungsquellen können dazu eingerichtet sein, unabhängig von anderen aktiviert, ausgerichtet und/oder justiert / fokussiert zu werden.Some of the optically active elements and / or the radiation sources can be set up to be activated, aligned and / or adjusted / focused independently of others.
Die hier offenbarte integrierte Handhabungs-/Inspektionseinrichtung verwendet bildgebende Sensoren, die einerseits alle oder fast alle Deck- und/oder Seitenfläche(n) eines Bauteils inspizieren und dabei andererseits auch relevante Daten zur Positionierung der Manipulatoren (Aufnehmer) an der ersten und/oder der zweiten Wendeeinrichtung und der Empfangsstellen liefern.The integrated handling / inspection device disclosed here uses imaging sensors which on the one hand inspect all or almost all of the top and / or side surface (s) of a component and on the other hand also relevant data for positioning the manipulators (sensors) on the first and / or the deliver the second turning device and the receiving points.
Der bildgebende Sensor der ersten (oberen) Wendeeinrichtung ist in einer Variante eine Farbkamera im Zentrum der Wendeeinrichtung. Alternativ kann die Kamera auch eine Schwarz/Weiß-Kamera sein, die in einer weiteren Variante seitlich und mit einem 45° - Umlenkspiegel im Zentrum der Wendeeinrichtung zusammenwirkt. In einer Variante erfasst diese Kamera während der Rotation der oberen Wendeeinrichtung durch den Spalt zwischen zwei Aufnehmern das im nächsten Schritt von dem Bauteil-Ausstoßer aus dem Bauteilvorrat vereinzelte Bauteil. Aus dem dabei gewonnenen Bildeinzug ist sowohl eine Inspektion des Bauteils als dessen exakte Positionsbestimmung im Bauteilvorrat möglich. Der Bildeinzug findet während der Rotation der oberen Wendeeinrichtung, in dem als Blickfenster bezeichneten Zeitraum statt. In einer anderen Variante verfügt die im Zentrum der ersten (oberen) Wendeeinrichtung positionierte Kamera über eine Spiegelanordnung, welche die indirekte Erfassung des Bauteil-Ausstoßers erlaubt, während sich die Wendeeinrichtungen in einer zur Übertragung von Bauteilen vorgesehenen Position (Übertragungsstellung) befinden.In one variant, the imaging sensor of the first (upper) turning device is a color camera in the center of the turning device. Alternatively, the camera can also be a black / white camera, which in another variant interacts laterally and with a 45 ° deflection mirror in the center of the turning device. In one variant, this camera captures the component separated from the component supply in the next step by the component ejector during the rotation of the upper turning device through the gap between two sensors. An inspection of the component as well as its exact position determination in the component stock is possible from the image acquisition obtained in the process. The image is taken in during the rotation of the upper turning device, in the period called the viewing window. In another variant, the camera positioned in the center of the first (upper) turning device has a mirror arrangement which allows the component ejector to be detected indirectly, while the turning devices are in a position (transfer position) intended for transferring components.
Die hier offenbarte integrierte Handhabungs-/Inspektionseinrichtung verwendet außerdem bildgebende Sensoren in Form von seitlichen Kameras an der oberen Wendeeinrichtung. Diese sind etwa bei 90° radial außerhalb der oberen Wendeeinrichtung derart angeordnet, dass das Bauteil auf seinem Flugkreis von einer mittleren Kamera frontal erfasst wird und von den zu beiden Seiten der mittleren Kamera jeweils einander gegenüberliegende Mantelfläche erfasst werden. Diese Kameras sind nicht zwingend Farbkameras. Es können mehrere Bildeinzüge angefertigt werden, weil die obere Wendeeinrichtung kurzzeitig (10ms bis 60 ms, zum Beispiel 40 ms) jeweils wegen der nachfolgenden Bauteilübergabe in der 180° Position still steht. Dieser kurze Stillstandszeitraum ist ausreichend für die Inspektion. Dazu können auch Schwarz/Weiß-Kameras eingesetzt sein. Mit der Seiteninspektion durch die beiden seitlichen Kameras werden die Stirnseiten des Bauteils auf Beschädigungen untersucht. Mit der Rückseiteninspektion durch die mittlere Kamera wird die Bauteilrückseite auf Beschädigungen untersucht. Für die Rückseiteninspektion können mehrere Bildeinzüge durchgeführt werden um verschiedene Defekte hervorzuheben. Bei den hier verwendeten Kameras kann es sich ebenfalls um Farbkameras handeln. Dies ist jedoch nicht zwingend erforderlich, da wie oben bereits erwähnt aufgrund des Stillstandszeitraums ausreichend Zeit zur Verfügung steht.The integrated handling / inspection device disclosed here also uses imaging sensors in the form of lateral cameras on the upper turning device. These are arranged approximately at 90 ° radially outside the upper turning device in such a way that the component on its flight circle is captured frontally by a central camera and is detected by the circumferential surface opposite each other on both sides of the central camera. These cameras are not necessarily color cameras. Several image feeds can be made because the upper turning device stops briefly (10 ms to 60 ms, for example 40 ms) due to the subsequent component transfer in the 180 ° position. This short downtime is sufficient for the inspection. Black and white cameras can also be used for this. With the side inspection by the two Lateral cameras are used to examine the end faces of the component for damage. With the back inspection by the middle camera, the back of the component is examined for damage. For the back inspection, several image feeds can be carried out to highlight various defects. The cameras used here can also be color cameras. However, this is not absolutely necessary, since, as already mentioned above, sufficient time is available due to the downtime.
Die hier offenbarte integrierte Handhabungs-/Inspektionseinrichtung verwendet außerdem bildgebende Sensoren in Form von seitlichen Kameras an der unteren Wendeeinrichtung. Diese sind etwa bei 90° radial außerhalb der unteren Wendeeinrichtung derart angeordnet, dass das Bauteil auf seinem Flugkreis von einer mittleren Kamera frontal erfasst wird und von den zu beiden Seiten der mittleren Kamera befindlichen Kameras jeweils einander gegenüberliegende Mantelflächen erfasst werden. Diese Kameras sind nicht zwingend Farbkameras. Vielmehr können auch Schwarz/Weiß-Kameras eingesetzt sein. An dieser Position wird das Bauteil sowohl auf Fehler hin untersucht, als auch werden die Bilddaten auf Positionsdaten hin ausgewertet. Mit der Seiteninspektion durch die beiden seitlichen Kameras wird das Bauteil an seinen Schnittflächen auf Beschädigungen untersucht. Mit der Rückseiteninspektion durch die mittlere Kamera wird die Bauteilrückseite auf Beschädigungen untersucht. Für die Rückseiteninspektion können mehrere Bildeinzüge durchgeführt werden um verschiedene Defekte hervorzuheben. Für die nachfolgende Ablage des Bauteils in der Empfangseinrichtung können die Positionsdaten (x, y, Verdrehung) des Bauteils mit der Seiteninspektion ermittelt werden. In einer anderen Variante wird hierfür die Rückseiteninspektion verwendet. Diese Informationen werden von der Steuerung verwendet um etwaige Korrekturen durchzuführen. Bei den hier verwendeten Kameras kann es sich ebenfalls um Farbkameras handeln. Dies ist jedoch nicht zwingend erforderlich, da während des Stillstandszeitraums ausreichend Zeit zur Verfügung steht.The integrated handling / inspection device disclosed here also uses imaging sensors in the form of lateral cameras on the lower turning device. These are arranged approximately at 90 ° radially outside the lower turning device in such a way that the component on its flight circle is captured frontally by a central camera and opposite surfaces are detected by the cameras located on both sides of the central camera. These cameras are not necessarily color cameras. Rather, black and white cameras can also be used. At this position, the component is examined for errors and the image data are evaluated for position data. With the side inspection by the two cameras on the side, the cut surfaces of the component are examined for damage. With the back inspection by the middle camera, the back of the component is examined for damage. For the back inspection, several image feeds can be carried out to highlight various defects. For the subsequent storage of the component in the receiving device, the position data (x, y, rotation) of the component can be determined with the side inspection. In another variant, the back inspection is used for this. This information is used by the control to make any corrections. The cameras used here can also be color cameras. However, this is not absolutely necessary since there is sufficient time available during the downtime period.
Die hier offenbarte integrierte Handhabungs-/Inspektionseinrichtung verwendet des Weiteren bildgebende Sensoren in Form einer Kamera im Zentrum der unteren Wendeeinrichtung. Diese Kamera kann eine Farbkamera mit drei einzelnen Kanälen R, G, B sein. Dabei ist es unerheblich, ob eine 3-Chip Farbkamera oder eine 1-Chip Farbkamera eingesetzt wird. 3-Chip Kameras haben für jede Farbe R, G, B einen separaten Bildsensor, eine 1-Chip Kamera verwendet alternierend aktivierte Filter vor dem Bildsensor. Eine hier einsetzbare Schwarz/Weiß-Kamera hat einen Kanal mit zum Beispiel 255 Grau-Stufen, bei einer Farbkamera hat jeder der drei Kanäle zum Beispiel 255 Intensitäts-Stufen einer Farbe. Wesentlich ist, dass die drei Farbkanäle der Kamera getrennt voneinander ansprechbar/auszulesen sind, oder zumindest eine Aufspaltung der drei Farbkanäle in der Steuerung erfolgen kann. Für jeden Kanal sind unterschiedliche Belichtungszeiten möglich. Hier können zum Beispiel folgende Belichtungszeiten verwendet werden: 5 ms (grün), 12 ms (rot), 15 ms (blau). Entsprechend der jeweils aktivierten Farbkanäle werden bei der hier offenbarten integrierte Handhabungs-/Inspektionseinrichtung auch unterschiedliche Beleuchtungsfarben verwendet. Weißes Licht ist zwar eine Mischung aus allen Farben, so dass mit dieser Beleuchtungsfarbe alle Kanäle gleichzeitig angesprochen werden könnten. Dies findet hier jedoch dezidiert nicht statt, wenn die erzielbare Bildqualität den Anforderungen nicht entspricht.The integrated handling / inspection device disclosed here also uses imaging sensors in the form of a camera in the center of the lower turning device. This camera can be a color camera with three individual channels R, G, B. It is irrelevant whether a 3-chip color camera or a 1-chip color camera is used. 3-chip cameras have a separate image sensor for each color R, G, B, a 1-chip camera uses alternately activated filters in front of the image sensor. A black / white camera that can be used here has a channel with, for example, 255 gray levels, with a color camera each of the three channels has, for example, 255 Intensity levels of a color. It is essential that the three color channels of the camera can be addressed / read separately from one another, or at least that the three color channels can be split in the control. Different exposure times are possible for each channel. The following exposure times can be used here, for example: 5 ms (green), 12 ms (red), 15 ms (blue). Depending on the activated color channels, different lighting colors are also used in the integrated handling / inspection device disclosed here. White light is a mixture of all colors, so that with this lighting color all channels could be addressed at the same time. However, this does not take place here if the achievable image quality does not meet the requirements.
Dem bildgebenden Sensor ist in einer Variante ein halbdurchlässiger Spiegel zugeordnet, der unter einem Winkel von etwa 45° zur optischen Achse des Kamera-Chips angeordnet ist und dazu dient, farbiges Licht zweier, mehrerer oder beliebig vieler unterschiedlicher Erfassungsspektren aus entsprechenden Lichtquellen optisch einzukoppeln und auf einen Inspektionsbereich zu richten. Dieses auf den Inspektionsbereich, also die Bauteil-Deckfläche oder Seitenfläche und ggf. deren Umgebung in der Tasche, gerichtete Licht wird dort reflektiert und wird von wenigstens einem Kamera-Chip des bildgebenden Sensors erfasst.In one variant, the imaging sensor is assigned a semitransparent mirror, which is arranged at an angle of approximately 45 ° to the optical axis of the camera chip and is used to optically couple in and on colored light from two, more or any number of different detection spectra from corresponding light sources to establish an inspection area. This light directed onto the inspection area, that is to say the component top surface or side surface and possibly its surroundings in the pocket, is reflected there and is detected by at least one camera chip of the imaging sensor.
Weiterhin ist in einer Variante dem bildgebenden Sensor eine Lichtquelle als Ringlichtquelle um die Inspektionsstelle zugeordnet. Diese Ringlichtquelle liefert Streulicht unter einem Winkel von etwa 5° - 45° in einem dritten Farbbereich. Auch dieses auf den Inspektionsbereich gerichtete Licht wird dort reflektiert und wird von wenigstens einem Kamera-Chip des bildgebenden Sensors erfasst. Das Licht bzw. die verschiedenfarbigen Lichtquellen können beliebig angeordnet sein bzw. auch den gleichen Strahlungswinkel haben.Furthermore, in a variant, the imaging sensor is assigned a light source as a ring light source around the inspection point. This ring light source provides scattered light at an angle of approximately 5 ° - 45 ° in a third color range. This light directed onto the inspection area is also reflected there and is detected by at least one camera chip of the imaging sensor. The light or the differently colored light sources can be arranged as desired or also have the same radiation angle.
Die hier offenbarte integrierte Handhabungs-/Inspektionseinrichtung verwendet im Zentrum der unteren Wendeeinrichtung einen Umlenkspiegel zur Einkopplung einer koaxialen Beleuchtung der Empfangseinrichtung. Genauer wird der durch die Empfangseinrichtung geführte Träger in Form eines Ablagebandes mit Ablagetaschen für die Bauteile mit der Kamera erfasst. Durch eine einzige Bildaufnahme erfolgt eine Inspektion auf Fehler, zum Beispiel das schräge Ablegen des Bauteils, so dass es nicht korrekt in seiner Ablagetasche positioniert ist, oder auf Qualitätsmängel. Außerdem werden durch diese einzige Bildaufnahme die Positionsdaten der Ablagetasche des Ablagebandes für das Ablegen des nächsten Bauteils erfasst. Die aus den einzelnen Farbkanälen zu gewinnende Information kann nach zu untersuchenden Aufgabenstellungen beliebig aufgeteilt werden, beispielsweise wie folgt: Bildkanal 1 mit Beleuchtungstyp 1: Position der Ablagetasche des Ablagebandes zur Positionierung des nächsten Bauteils. Bildkanal 2 mit Beleuchtungstyp 2: Qualitätsinspektion des Bauteils (Risse, Lasermarken, Ausbrüche, ...). Bildkanal 3 mit Beleuchtungstyp 3: Zusatzinspektionen für spezielle Bauteile oder kundenspezifische Fehler.The integrated handling / inspection device disclosed here uses a deflecting mirror in the center of the lower turning device for coupling in a coaxial illumination of the receiving device. More precisely, the carrier guided through the receiving device is captured in the form of a storage belt with storage pockets for the components with the camera. With a single image acquisition, an inspection is carried out for errors, for example the component being placed at an angle so that it is not correctly positioned in its storage pocket, or for quality defects. In addition, the position data of the storage pocket of the storage belt for the storage of the next component are recorded by this single image recording. The one from the individual Color channels of information to be obtained can be divided as desired according to the tasks to be examined, for example as follows:
Das Bauteil wird bei einer Variante der integrierten Handhabungs-/Inspektionseinrichtung "blind" abgelegt. Das heißt, dass der eigentliche Ablegevorgang auf Informationen oder Positionsdaten basiert, die vor dem Ablegevorgang aus der Bildaufnahme gewonnen wurde, die dem vorherigen Bauteil zugeordnet ist. Im Moment des Ablegevorgangs sieht die Kamera im Zentrum der zweiten Wendeeinrichtung die Ablegestelle nicht, da der momentan ablegende Aufnehmer die Sicht versperrt.In a variant of the integrated handling / inspection device, the component is deposited "blindly". This means that the actual filing process is based on information or position data that was obtained before the filing process from the image recording that is assigned to the previous component. At the moment of the depositing process, the camera does not see the depositing point in the center of the second turning device, since the pickup that is currently depositing blocks the view.
Informationen oder Positionsdaten, ob ein Bauteil verdreht ist, liefert in einer Variante eine Kamera am Außenumfang der unteren Wendeeinrichtung. Die Informationen oder Positionsdaten werden an die Steuerung der Empfangseinrichtung weitergegeben. Aus der Bildaufnahme des zuvor in der Ablagetasche des Ablagebandes abgelegten Bauteils ist die Position der Empfangseinrichtung bekannt. Der Abstand zwischen den beiden Taschen ist ebenso bekannt. Hieraus kann für das nächste abzulegende Bauteil errechnet werden, um welchen Winkel und x- und y-Betrag die Empfangseinrichtung bewegt werden muss.In one variant, information or position data as to whether a component is twisted is provided by a camera on the outer circumference of the lower turning device. The information or position data is passed on to the control of the receiving device. The position of the receiving device is known from the image of the component previously deposited in the storage pocket of the storage belt. The distance between the two pockets is also known. From this, it can be calculated for the next component to be deposited by which angle and x and y amount the receiving device has to be moved.
Aus den weiteren Vorrichtungsaspekten ergeben sich entsprechende ergänzende oder alternative Verfahrensschritte.Corresponding additional or alternative method steps result from the further device aspects.
Die hier vorgestellte Anordnung bildgebender Sensorik ist in der Lage, mit weniger Bildeinzügen als herkömmliche Sensoranordnungen auszukommen. Die gewonnenen Bilddaten lassen sich sowohl zur Schlechtteilausschleusung als auch zur Positionierung der Aktoren der Handhabungs-/Inspektionseinrichtung auswerten. Diese integrierte Architektur und die sich damit ermöglichende Vorgehensweise reduziert die Prozesszeit und bietet bei erhöhter Durchsatzzahl eine gesteigerte Inspektionsqualität.The arrangement of imaging sensors presented here is able to manage with fewer image feeds than conventional sensor arrangements. The image data obtained can be evaluated both for the removal of bad parts and for the positioning of the actuators of the handling / inspection device. This integrated architecture and the resulting procedure reduce the process time and offer an increased inspection quality with an increased throughput.
Weitere Merkmale, Eigenschaften, Vorteile und mögliche Abwandlungen werden für einen Fachmann anhand der nachstehenden Beschreibung deutlich, in der auf die beigefügten Zeichnungen Bezug genommen ist. Dabei zeigen die Fig. schematisch eine optische Untersuchungseinrichtung für ein Bauteil,
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Fig. 1 zeigt schematisch eine Bauteilhandhabungsvorrichtung mit Selbstjustierungsvorrichtung in einer Seitenansicht, wobei die Bauteilhandhabungsvorrichtung eine erste Wendeeinrichtung zum Entnehmen von prismatischen oder zylindrischen Bauteilen von einem strukturierten Bauteilvorrat und zum Ablegen an einer Empfangseinrichtung umfasst. -
Fig. 2 zeigt schematisch die Ausrichtung der diversen Lage- und Eigenschaftssensoren der Bauteilhandhabungsvorrichtung ausFig. 1 in Bezug auf die Seitenflächen eines Bauteils. -
Fig. 3 zeigt schematisch einen der am Umfang einer oder beider Wendeeinrichtungen der Bauteilhandhabungsvorrichtung angeordneten Lage- und Eigenschaftssensoren in einer Draufsicht. -
Fig. 4 zeigt schematisch eine Empfangseinrichtung zum Einsatz mit der Bauteilhandhabungsvorrichtung in einer perspektivischen Ansicht. -
Fig. 5 zeigt schematisch einen der Lage- und Eigenschaftssensoren mit zugeordneter Beleuchtungsanordnung zum Einsatz mit der Bauteilhandhabungsvorrichtung.
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Fig. 1 schematically shows a component handling device with self-adjusting device in a side view, the component handling device comprising a first turning device for removing prismatic or cylindrical components from a structured component supply and for storing them at a receiving device. -
Fig. 2 shows schematically the alignment of the various position and property sensors of the component handling deviceFig. 1 in relation to the side faces of a component. -
Fig. 3 schematically shows one of the position and property sensors arranged on the circumference of one or both turning devices of the component handling device in a plan view. -
Fig. 4 schematically shows a receiving device for use with the component handling device in a perspective view. -
Fig. 5 schematically shows one of the position and property sensors with an associated lighting arrangement for use with the component handling device.
In
Die Ausstoßeinheit 110 arbeitet in der gezeigten Variante mit einer durch eine Steuerung ECU kontrollierten Nadel oder sie arbeitet zum Beispiel berührungslos mit einem Laserstrahl, um die Bauteile einzeln von dem Bauteilvorrat freizugeben, damit sie einer ersten Wendeeinrichtung 130 zugeführt werden. Diese erste Wendeeinrichtung 130 hat die Form eines Sterns oder Rades und hat an ihrem Umfang mehrere (im gezeigten Beispiel acht) Aufnehmer 132 für die vereinzelten Bauteile B. Jeder der Aufnehmer 132 ist dazu eingerichtet, wenn er sich bei der 0°-Position der ersten Wendeeinrichtung 130 der Ausstoßeinheit 110 am nächsten befindet, an einer Spendestelle SPS ein Bauteil von dem strukturierten Bauteilvorrat zu empfangen.In the variant shown, the
Die Aufnehmer 132 sind radial nach außen weisend am (gedachten) Umfang der stern- oder radförmigen ersten Wendeeinrichtung 130 angeordnet und tragen die Bauteile B. Die Aufnehmer 132 der ersten Wendeeinrichtung 130 sind zur Drehachse (hier der X-Achse) radial verfahrbar. Somit können diese Aufnehmer 132 die Bauteile B, jeweils an einem der Aufnehmer 132 fixiert, innerhalb eines Schwenkwinkels - hier zwischen 0° und 180° - zwischen Bauteil-Übernahme und -Übergabe fördern.The
Die erste Wendeeinrichtung 130 rotiert das Bauteil B, gesteuert von der nicht weiter veranschaulichten Steuerung ECU um eine erste Achse, hier die X-Achse, zu einer ersten Übergabestelle ÜS um einen ersten vorbestimmten Winkel, hier 180°. Dabei wird das Bauteil B um seine Längs- oder Querachse gewendet. Eine der ersten Wendeeinrichtung 130 ähnliche zweite Wendeeinrichtung 150 mit mehreren, hier ebenfalls acht, zweiten Aufnehmern 152 ist dazu eingerichtet, das Bauteil B an der Übergabestelle ÜS von einem Aufnehmer 132 der ersten Wendeeinrichtung 130 zu empfangen, wenn das Bauteil sich bei der 0°-Position der zweiten Wendeeinrichtung 130 der Übergabestelle ÜS am nächsten befindet.The
Die zweite Wendeeinrichtung 150 wendet das empfangene Bauteil B, gesteuert von der Steuerung ECU, um eine zweite Achse, hier die Y-Achse, um einen zweiten vorbestimmten Winkel, hier um etwa 180°, um seine Längs- oder Querachse und fördert es zu einer Ablagestelle ABS.The
In einer anderen Variante rotiert die erste Wendeeinrichtung 130 das Bauteil B ebenfalls, gesteuert von der nicht weiter veranschaulichten Steuerung ECU um die erste Achse (hier die X-Achse) um einen ersten vorbestimmten Winkel, hier 180°. Dabei wird das Bauteil B ebenfalls um seine Längs- oder Querachse gewendet, jedoch unmittelbar zu der Ablagestelle ABS gefördert, ohne zuvor auf eine zweite Wendeeinrichtung 150 übertragen zu werden.In another variant, the
Die ersten, zweiten und/oder dritten Achsen schließen miteinander jeweils einen Winkel von 90° plus/minus maximal 10° oder 15° ein und orientieren sich an einem dreidimensionalen orthogonalen Koordinatensystem.The first, second and / or third axes each form an angle of 90 ° plus / minus a maximum of 10 ° or 15 ° and are based on a three-dimensional orthogonal coordinate system.
Die beiden stern- oder radförmigen Wendeeinrichtungen 130, 150 sind orthogonal zueinander angeordnet und stimmen ansonsten in ihrem Aufbau überein. Abweichend von der Darstellung in
Den ersten und zweiten Wendeeinrichtungen 130, 150 sind Lage- und Eigenschaftssensoren K1 ... K4, K7... K11 zugeordnet. Wie in
Eine zweite Kameraanordnung K2 mit drei Kameras - in
Eine vierte Kameraanordnung K4 ist im Zentrum der zweiten Wendeeinrichtung 150 auf die Ablagestelle ABS oder die erste Empfangsstelle ES1 in der Empfangseinrichtung 200 gerichtet. Kameraanordnung K4 umfasst hierbei eine Kamera und zwei rechtwinklig zueinander angeordnete Spiegel, welche jeweils in einem 45° Winkel relativ zur durch die X- und Y-Achse aufgespannten Ebene angebracht sind. Diese Spiegel erlauben es, die Ablagestelle ABS und die Empfangsstelle ES1 und den an der Ablagestelle ABS befindlichen Aufnehmer 152 indirekt aus einer ersten und einer zweiten Erfassungsrichtung zu erfassen. Die Spiegel sind hierbei so angeordnet, dass die zwei Erfassungsrichtungen orthogonal zueinander verlaufen.A fourth camera arrangement K4 is directed in the center of the
Eine siebte Kameraanordnung K7 im Zentrum der ersten Wendeeinrichtung 130 ist auf die Übergabestelle ÜS und die Aufnehmer 132 und 152 der ersten und zweiten Wendeeinrichtung gerichtet. Kameraanordnung K7 umfasst hierbei eine Kamera und zwei rechtwinklig zueinander angeordnete Spiegel, welche jeweils in einem 45° Winkel relativ zur durch die X- und Y-Achse aufgespannten Ebene angebracht sind. Diese Spiegel erlauben es, die Übergabestelle ÜS und die an der Übergabestelle befindlichen Aufnehmer 132,152 indirekt aus einer ersten und einer zweiten Erfassungsrichtung zu erfassen. Die Spiegel sind hierbei so angeordnet, dass die zwei Erfassungsrichtungen orthogonal zueinander verlaufen.A seventh camera arrangement K7 in the center of the
In jener Variante, in der die Bauteile von der ersten Wendeeinrichtung 130 auf die Empfangseinrichtung 200 übergeben werden, ersetzt die Kameraanordnung K7 funktional die baugleiche Kameraanordnung K4.In the variant in which the components are transferred from the
In jener Variante, in der die Bauteile B von der ersten Wendeeinrichtung 130 direkt auf die Empfangsstelle ES1 übergeben werden, ist die Kameraanordnung K7 im Zentrum der ersten Wendeeinrichtung 130 auf die Ablagestelle ABS und die erste Empfangsstelle ES1 in der Empfangseinrichtung 200 gerichtet. Die Spiegel der Kameraanordnung sind hierbei so angeordnet, dass eine Erfassung der Empfangsstelle ES1 in der Empfangseinrichtung 200 aus zwei zueinander orthogonalen Erfassungsrichtungen erlaubt wird.In the variant in which the components B are transferred from the
Eine elfte Kameraanordnung K11 im Zentrum der zweiten Wendeeinrichtung 150 ist auf die Übergabestelle ÜS und die Aufnehmer 132 und 152 der ersten und zweiten Wendeeinrichtung gerichtet. Kameraanordnung K11 umfasst hierbei eine Kamera und zwei rechtwinklig zueinander angeordnete Spiegel, welche jeweils in einem 45° Winkel relativ zur durch die X- und Y-Achse aufgespannten Ebene angebracht sind. Diese Spiegel erlauben es, die Übergabestelle und die den an der Übergabestelle ÜS befindlichen Aufnehmer 132, 152 indirekt aus einer ersten und einer zweiten Erfassungsrichtung zu erfassen. Die Spiegel sind hierbei so angeordnet, dass die zwei Erfassungsrichtungen orthogonal zueinander verlaufen.An eleventh camera arrangement K11 in the center of the
Die Steuerung ECU ist dazu eingerichtet, mittels eines ersten Drehantriebes DA1 die erste Wendeeinrichtung 130 um eine erste Achse (hier die X-Achse) kontrolliert zu drehen und mittels eines ersten Linearantriebes LA1 die erste Wendeeinrichtung 130 längs der ersten Achse kontrolliert zu verfahren.The control unit ECU is set up to rotate the
Die Steuerung ECU ist weiterhin dazu eingerichtet, mittels eines zweiten Drehantriebes DA2 die zweite Wendeeinrichtung 150 um eine zu der ersten Achse (hier die X-Achse) nicht kollineare zweite Achse (hier die Y-Achse) kontrolliert zu drehen, und mittels eines zweiten Linearantriebes LA2 die zweite Wendeeinrichtung 150 längs der zweiten Achse kontrolliert zu verfahren.The control unit ECU is also set up to use a second rotary drive DA2 to rotate the
Die bildgebenden Sensoren inspizieren die Deck- und/oder Seitenfläche(n) des Bauteils B und liefern dabei auch relevante Daten zur Positionierung der ersten und zweiten Wendeeinrichtungen 130, 150 längs und um deren Achsen, sowie der Aufnehmer 132, 152 und der an ihnen befindlichen Bauteile B und der Empfangsstellen. Die Daten zur Positionierung der ersten und zweiten Wendeeinrichtung 130, 150 und der Aufnehmer 132, 152 können insbesondere auch während der Selbstjustierung der Vorrichtung Verwendung finden.The imaging sensors inspect the top and / or side surface (s) of component B and also supply relevant data for the positioning of the first and
Eine Kameraanordnung K8 mit zwei Kameras - in
Eine Kameraanordnung K9 mit zwei Kameras - in
Eine Kameraanordnung K10 mit zwei Kameras - in
Die Bauteilhandhabungsvorrichtung 100 ist mit einer der Ablagestelle ABS zugeordneten Empfangseinrichtung 200 für ein dorthin gefördertes Bauteil B ausgestattet. Der Empfangseinrichtung 200 sind dabei Lage- und Eigenschaftssensoren K4/K7, K5 zugeordnet, die dazu eingerichtet sind, Lagedaten des an die Ablagestelle ABS geförderten Bauteils B, Lagedaten und Eigenschaften von Empfangsstellen ES1, ES2 in der Empfangseinrichtung 200 und der darin befindlichen Bauteile B zu erfassen und für eine Steuerung ECU zur Verfügung zu stellen. Dabei ist der Lage- und Eigenschaftssensor K5 eine fünfte Kameraanordnung, die auf ein zweites Fenster an der zweiten Empfangsstelle ES2 gerichtet ist. Die Steuerung ECU ist dazu eingerichtet, mittels eines dritten Drehantriebes DA3 die Empfangseinrichtung 200 um eine die Ablagestelle ABS enthaltende dritte Achse (hier die Z-Achse) kontrolliert zu drehen und mittels eines dritten und eines vierten Linearantriebes LA3, LA4 die Empfangseinrichtung längs der ersten und der zweiten Achsen kontrolliert zu verfahren. Mittels eines vierten Drehantriebes DA4 verfährt die Steuerung ECU einen durch die Empfangseinrichtung 200 geführten Träger 320 längs der ersten Achse (hier die X-Achse) kontrolliert. Dieser Träger 320 dient dazu, die Bauteile B in vereinzelter Form von der Wendeeinrichtung 130,150 aufzunehmen. Die Wendeeinrichtungen 130, 150 und die Drehantriebe DA1, DA2, ... haben jeweils einen mit der Steuerung ECU verbundenen, nicht weiter dargestellten hochauflösenden rotatorischen Winkel-Encoder zur Bestimmung ihrer jeweiligen Rotationsstellung.The
In der Empfangseinrichtung 200 dient der vierte Drehantrieb DA4 dazu, durch Steuersignale aus der Steuerung ECU angesteuert, den durch die Empfangseinrichtung 200 geführten Träger 320 längs der ersten Achse (hier der X-Achse) kontrolliert um etwa 100% plus minus maximal 3% des Rastermaßes benachbarter Bauteil-Aufnahmen (Taschen) des Trägers 320 zu verfahren. Das Rastermaß ergibt sich aus dem Mittenabstand zweier aufeinander folgender Taschen. Der dritte Drehantrieb DA3 ist dazu eingerichtet, durch Steuersignale aus der Steuerung ECU angesteuert, in Abhängigkeit von Signalen aus dem bildgebenden Eigenschafts- und Lagesensor im Zentrum der zweiten Wendeeinrichtung 150, oder in einer Variante der bildgebende Eigenschafts- und Lagesensor im Zentrum der ersten Wendeeinrichtung 130,eine der Empfangsstellen ES1 mit der dort befindlichen Bauteil-Aufnahme des Trägers 320 um die die Ablagestelle enthaltende Z-Achse kontrolliert um bis zu plus minus 6 ° zu drehen.In the receiving
Der vierte Drehantrieb DA4 der Empfangseinrichtung 200 hat in der in
Bei der Empfangseinrichtung 200 ist in dieser Variante eine Absaug- und/oder Ausblaseinrichtung 340 abstromseitig zur Empfangsstelle ES1 vorgesehen. Diese ist jedoch optional. Damit werden, durch Steuersignale aus der Steuerung ECU angesteuert, als schadhaft oder fehlerhaft platziert erkannte Bauteile B aus ihrer Tasche entfernt.In this variant, a suction and / or blow-out
Zum Ansaugen des Bauteils B in den Aufnehmern 132, 152, zum Halten des Bauteils B in den Aufnehmern 132, 152, zum Ablegen des Bauteils B mit oder ohne gesteuertem Abblas-Impuls, und zum freien Abblasen des Bauteils B aus den Aufnehmern 132, 152 sind diese mit einer nicht weiter veranschaulichten Pneumatikeinheit verbunden. Die Pneumatikeinheit beaufschlagt, von der Steuerung ECU kontrolliert, die einzelnen Aufnehmer 132, 152 ventilgesteuert zum jeweils erforderlichen Zeitpunkt oder Zeitraum mit Über- oder Unterdruck um die Bauteile B einzeln aufzunehmen, zu halten und wieder abzugeben.For sucking in component B in the
Sofern die mittels der Steuerung ECU und den Lage- und Eigenschaftssensoren an den einzelnen Stationen gewonnenen Inspektionsergebnisse positiv sind, wird das jeweilige Bauteil B in die momentan an der Ablegestelle ABS befindliche Empfangsstelle ES1, also die Tasche des Trägers 320 abgelegt. Sofern die gewonnenen Inspektionsergebnisse negativ sind, wird das Bauteil B um eine weitere Position zu einem ersten Absauger 330 weiter rotiert, wo es von seinem Aufnehmer 132,152 an der ersten oder zweiten Wendeeinrichtung 130,150 abgesogen wird. Sofern sich durch einen diese Empfangsstelle ES1 überwachenden Lage- und Eigenschaftssensor (siehe auch
Bei einer weiteren Variante ist der ersten Empfangsstelle ES1 eine zusätzliche, nicht weiter veranschaulichte Absaugeinrichtung zugeordnet, um ein schräg liegendes Bauteil an der Empfangsstelle ES1 abzusaugen. Durch den Lage- und Eigenschaftssensor K4/K7 oder durch den Lage- und Eigenschaftssensor K5 am zweiten Fenster können etwaige Qualitätsfehler festgestellt werden. Sofern der Lage- und Eigenschaftssensor K5 einen Qualitätsfehler erfasst, wird die Empfangseinrichtung 200 zusammen mit dem Träger 320 zurücktransportiert, an der Ablagestelle wird dann das Bauteil B aus der Tasche des Trägers 320 abgesaugt. Eine Verkippung eines schräg liegenden Bauteils an der Empfangsstelle ES1 kann durch einen nicht weiter dargestellten Lage- und Eigenschaftssensor K6 erkannt werden, welcher der Empfangsstelle ES1 zugeordnet ist. Dieser Lage- und Eigenschaftssensor K6 ist seitlich zum Träger 320 angeordnet und erfasst die Empfangsstelle ES1 direkt oder über einen Umlenkspiegel über die Oberkante des Trägers 320. So kann eine etwaige Verkippung oder ein Überstand eines nicht korrekt abgelegten Bauteils erkannt werden.In a further variant, an additional suction device (not illustrated further) is assigned to the first receiving point ES1 in order to suction off a sloping component at the receiving point ES1. Any quality errors can be determined by the position and property sensor K4 / K7 or by the position and property sensor K5 on the second window. If the position and property sensor K5 detects a quality error, the receiving
Wie in der
Die zweite Kameraanordnung K2 ist als Lage- und Eigenschaftssensor mit ihren drei Kameras an der Peripherie der ersten Wendeeinrichtung 130 bei etwa 90° auf die drei Seiten S2, S4 und D1 des Bauteils B gerichtet. Eine Draufsicht auf die Kameraanordnung K2 mit ihren drei Kameras K2-1, K2-2 und K2-3 ist in
Die dritte Kameraanordnung K3 ist als Lage- und Eigenschaftssensor mit ihren drei Kameras extern an der Peripherie der zweiten Wendeeinrichtung 150 bei etwa 90° auf die drei Seiten S1, S3 und D2 des Bauteils B gerichtet. Diese Kameraanordnung K3 entspricht in ihrem Aufbau und ihrer Anordnung der Kameraanordnung K2 mit ihren drei Kameras und beiden Spiegeln in
Die vierte Kameraanordnung K4 ist als Lage- und Eigenschaftssensor im Zentrum der zweiten Wendeeinrichtung 150 auf die Empfangsstelle E1 in der Empfangseinrichtung 200 gerichtet. Die Steuerung ECU veranlasst dann entsprechende Korrekturbewegungen der zweiten Wendeeinrichtung 150 und der Empfangseinrichtung 200.The fourth camera arrangement K4 is directed as a position and property sensor in the center of the
Weiter ist die Kameraanordnung K4 dazu eingerichtet, sowohl die Empfangsstelle ES1 als auch den an der Ablagestelle ABS befindlichen Aufnehmer 152 gleichzeitig mit Hilfe einer Spiegeloptik aus verschiedenen Erfassungsrichtung zu erfassen, sodass ein eine relative Position der Empfangsstelle ES1 zum Aufnehmer 152 durch die Steuerung zur Selbstjustierung der Bauteilhandhabungsvorrichtung 100 bestimmt werden kann.Furthermore, the camera arrangement K4 is set up to simultaneously capture both the receiving point ES1 and the
Die in
Eine Selbstjustierung ist insbesondere vor Inbetriebnahme der Bauteilhandhabungsvorrichtung 100 aber auch während des Betriebs der Bauteilhandhabungsvorrichtung 100 möglich.Self-adjustment is possible in particular before the
Beliebige Kombinationen der Kameraanordnungen K1, K4, K7, K9, K9, K10 und K11 zur Selbstjustierung der Bauteilhandhabungsvorrichtung 100 sind möglich, wenn mindestens ein auf die Spendestelle SPS gerichteter Sensor, mindestens ein auf die Übergabestelle ÜS gerichteter Sensor und mindestens ein auf die Ablagestelle ABS gerichteter Sensor am Selbstjustierungsverfahren beteiligt sind.Any combinations of the camera arrangements K1, K4, K7, K9, K9, K10 and K11 for self-adjustment of the
In jener Variante, in der die Bauteile von der ersten Wendeeinrichtung 130 auf die Empfangseinrichtung 200 übergeben werden, genügen zwei Kameraanordnungen zur Selbstjustierung der Bauteilhandhabungsvorrichtung 100, sofern mindestens ein auf die Spendestelle SPS gerichteter Sensor und mindestens ein auf die Ablagestelle ABS gerichteter Sensor am Selbstjustierungsverfahren beteiligt sind.In the variant in which the components are transferred from the
Die Steuerung ist dazu eingerichtet, während des Selbstjustierungsverfahrens die erste Wendeeinrichtung 130 sukzessive zu rotieren und mit den Kamerasensoren K1 und/oder K8 eine relative Position eines jeden einzelnen Aufnehmers 132 der ersten Wendeeinrichtung 130 zur Ausstoßeinheit 110 zu ermitteln. Mit den Kamerasensoren K7 und/oder K10 und/oder K11 wird die Position des an der Übergabestelle ÜS befindlichen Aufnehmers 152 der zweiten Wendeeinrichtung 150 in Relation zu dem an der Übergabestelle befindlichen Aufnehmer 132 der ersten Wendeeinrichtung 130 ermittelt. Mit den Kamerasensoren K9 und/oder K4/K7 (K4 in der Variante mit zwei Wendeeinrichtungen 130,150 und K7 in der Variante mit einer Wendeeinrichtung 130) wird die Position der in der Empfangseinrichtung 200 befindlichen Empfangsstelle ES1 zu dem an der Ablagestelle ABS befindlichen Aufnehmer 132,152 der ersten/zweiten Wendeeinrichtung 130,150 ermittelt.The controller is set up to successively rotate the
In der Variante mit nur einer ersten Wendeeinrichtung 132 werden nur die relativen Positionen an der Spendestelle SPS und der Ablagestelle ABS ermittelt.In the variant with only a
Die Steuerung ist hierbei dazu eingerichtet, das sukzessive Rotieren der Wendeeinrichtungen 130,150 und das ermitteln der relativen Position mindestens so oft zu wiederholen, bis alle möglichen Übertragungsstellung der Wendeeinrichtung 130,150 an der Spendestelle SPS, der Übergabestelle ÜS und der Abgabestelle ABS mindestens einmal erreicht wurden. Die Steuerung ist hierbei weiter dazu eingerichtet, die ermittelten Werte in einer Steuerungstabelle zu speichern.The controller is set up to repeat the successive rotation of the
Die ermittelten 3-dimensionalen Positionsabweichungen der Aufnehmer 132 der ersten Wendeeinrichtung 130 relativ zu einer zuvor definierten Position zu der Ausstoßeinrichtung 110 bilden im Betrieb jeweils den 3-dimensionalen Korrekturvektor für die erste Wendeeinrichtung 130 für die jeweilige Übertragungsstellung.The determined 3-dimensional position deviations of the
Die ermittelten 3-dimensionalen Positionsabweichungen des an der Übergabestelle ÜS befindlichen Aufnehmers 152 der zweiten Wendeeinrichtung 150 relativ zu einer zuvor definierten Position zu dem Aufnehmer 132 der ersten Wendeeinrichtung 130 bilden, addiert mit dem 3-dimensionalen Korrekturvektor für die erste Wendeeinrichtung 130 für die jeweilige Übertragungsstellung, im Betrieb jeweils den 3-dimensionalen Korrekturvektor für die zweite Wendeeinrichtung 150 für die jeweilige Übertragungsstellung.The determined 3-dimensional position deviations of the
Die ermittelten 3-dimensionalen Positionsabweichungen der Empfangsstellen ES1 relativ zu einer definierten Position zu dem an der Ablagestelle ABS befindlichen Aufnehmer 152 der zweiten Wendeeinrichtung 150 bilden, addiert mit dem 3-dimensionalen Korrekturvektor für die zweite Wendeeinrichtung 150 für die jeweilige Übertragungsstellung, im Betrieb jeweils den 3-dimensionalen Korrekturvektor für die Empfangseinrichtung 200 für die jeweilige Übertragungsstellung.The determined 3-dimensional positional deviations of the receiving points ES1 relative to a defined position relative to the pick-up 152 of the
In jener Variante, in der die Bauteilhandhabungsvorrichtung 100 nur über eine erste Wendeeinrichtung 130 verfügt, wird der 3-dimensionale Korrekturvektor für die Empfangseinrichtung 200 analog mit den Positionen der Empfangsstellen ES1 relativ zu einer definierten Position zu dem Aufnehmer 132 der ersten Wendeeinrichtung 130 und durch die Addition mit dem 3-dimensionalen Korrekturvektor für die erste Wendeeinrichtung 130 entwickelt.In that variant, in which the
Eine Erhöhung der Korrekturvektorpräzision erfolgt, wenn eine Mehrzahl von vollständigen Rotationen der Wendeeinrichtungen 130, 150 durchgeführt werden und jeweils Mittelwerte für die Korrekturvektoren ermittelt werden.The correction vector precision is increased when a plurality of complete rotations of the
Der Korrekturvektor kann in anderen Varianten der Bauteilhandhabungsvorrichtung 100 2-dimensional oder 1-dimensional sein, wobei die Korrekturdimensionen für die erste Wendeeinrichtung 130, die zweite Wendeeinrichtung 150 und die Empfangseinrichtung 200 gleich oder verschieden sein können.In other variants of the
Eine erste Kontrolle der Erfassungsqualität der zur Selbstjustierung verwendeten Kamerasensoren erfolgt, indem das Selbstjustierungsverfahren unabhängig voneinander mit K1, K4 und K7 oder K11 und/oder K8 durchgeführt wird und anschließend mit K2 durchgeführt wird; des Weiteren kann das Selbstjustierungsverfahren mit K7, und/ oder K10 durchgeführt werden. Stimmen die Ergebnisse nicht überein, liegt ein Messfehler vor. So erfolgt ein Prüfen der Erfassungsqualität der Justierungssensoranordnung und/oder ein Prüfen des Aufnehmers 132 auf Beschädigung anhand der Vergleiche.A first check of the detection quality of the camera sensors used for self-adjustment is carried out by performing the self-adjustment method independently of one another with K1, K4 and K7 or K11 and / or K8 and then performing it with K2; Furthermore, the self-adjustment process can be carried out with K7, and / or K10. If the results do not match, there is a measurement error. The detection quality of the adjustment sensor arrangement is checked and / or the
In anderen Varianten sind beliebige Kombinationen der Kamerasensoren K1, K4, K7, K8, K9, K10 und K11 für die voneinander unabhängigen Selbstjustierungen möglich, sofern keiner der Sensoren in beiden Selbstjustierungen Verwendung findet und in beiden Selbstjustierungen jeweils mindestens ein Sensor auf die Spendestelle SPS, die Übergabestelle ÜS und die Ablagestelle ABS gerichtet ist.In other variants, any combinations of the camera sensors K1, K4, K7, K8, K9, K10 and K11 are possible for the independent self-adjustments, provided that none of the sensors is used in both self-adjustments and in both self-adjustments at least one sensor on the dispensing point PLC, the transfer point ÜS and the storage point ABS is directed.
Eine zweite Kontrolle der Erfassungsqualität der zur Selbstjustierung verwendeten Kamerasensoren und eine zusätzliche Überprüfung der Beschädigungsfreiheit der Aufnehmer 132, 152 erfolgt, indem die durch die Kameraanordnungen K2 und K3 ermittelten relativen Positionen der Aufnehmer 132, 152 zu den jeweiligen definierten Referenzpunkten mit den relativen Positionen der Aufnehmer 132, 152 zueinander, zur Ausstoßeinheit 110 und zur Empfangsstelle ES1 für jeden Aufnehmer 132, 152 jeweils durch die Steuerung verglichen werden. Stimmen die ermittelten Abweichungen nicht - zumindest - in ihren jeweiligen Relationen zueinander überein, liegt ein Messfehler vor und/oder einer der Aufnehmer 132, 152 ist beschädigt.A second check of the detection quality of the camera sensors used for self-adjustment and an additional check of the damage-free nature of the
In jener Variante, in der die Bauteilhandhabungsvorrichtung 100 nur über eine erste Wendeeinrichtung 130 verfügt, erfolgt die erste Kontrolle der Erfassungsqualität der Selbstjustierung, indem die Selbstjustierung voneinander unabhängig mit den Kamerasensoren K1 und K7 sowie K8 und K9 durchgeführt wird. Stimmen die Ergebnisse nicht überein, liegt ein Messfehler vor. Beliebige Kombinationen der Kamerasensoren K1, K7, K8, K9, für die voneinander unabhängigen Selbstjustierungen sind möglich, sofern keiner der Sensoren in beiden Selbstjustierungen Verwendung findet und in beiden Selbstjustierungen jeweils mindestens ein Sensor auf die Spendestelle SPS und die Ablagestelle ABS gerichtet ist.In the variant in which the
In jener Variante, in der die Bauteilhandhabungsvorrichtung 100 nur über eine erste Wendeeinrichtung 130 verfügt, erfolgt die zweite Kontrolle der Erfassungsqualität und die zusätzliche Überprüfung der Beschädigungsfreiheit der Aufnehmer 132 der Selbstjustierung, indem die durch die Kameraanordnungen K2 ermittelten relativen Positionen der Aufnehmer 132 zu den jeweiligen definierten Referenzpunkten mit den relativen Positionen der Aufnehmer 132 zur Ausstoßeinheit 110 und zur Empfangsstelle ES1 für jeden Aufnehmer 132 jeweils durch die Steuerung verglichen werden. Stimmen die ermittelten Abweichungen nicht - zumindest - in ihren jeweiligen Relationen zueinander überein, liegt ein Messfehler vor und/oder einer der Aufnehmer 132 ist beschädigt.In that variant, in which the
Der in
Dem bildgebenden Sensor 400 ist ein halbdurchlässiger Spiegel 420 zugeordnet, der unter einem Winkel von etwa 45° zur optischen Achse des Kamera-Chips 410 angeordnet ist. Der halbdurchlässige Spiegel 420 dient dazu, farbiges Licht zweier Erfassungsspektren, hier dem grünen Farbbereich und dem blauen Farbbereich, aus entsprechenden Lichtquellen 440 optisch einzukoppeln und auf eine Deckfläche des Bauteils B zu richten. Dieses auf das Bauteil B gerichtete Licht im grünen und im blauen Farbbereich erfasst der Kamera-Chip 410. Je nach räumlichen Gegebenheiten können auch andere Umlenkspiegel, Prismen, Farbfilter oder Linsen vorgesehen sein.A
Eine weitere Lichtquelle 450 ist in einer Ausgestaltung als Ringlichtquelle um die an der Ablegestelle ABS befindliche Empfangsstelle ES1 angeordnet und liefert Streulicht unter einem Winkel von etwa 5° - 45° im roten Farbbereich auf die Deckfläche des Bauteils B. Auch dieses auf das Bauteil B gerichtete Licht im roten Farbbereich erfasst der Kamera-Chip 410.In a configuration as a ring light source, a further
Einzelne der optisch wirksamen Elemente und/oder der Strahlungsquellen können dazu eingerichtet sein, unabhängig von anderen ausgerichtet und/oder justiert / fokussiert zu werden.Some of the optically active elements and / or the radiation sources can be set up to be aligned and / or adjusted / focused independently of others.
Der Kamera-Chip 410 ist in der vorliegenden Variante eine Farbkamera mit drei einzelnen Kanälen R, G, B. Es kann aber auch eine Kamera mit mehreren Kanälen sein. Die drei Farbkanäle der Kamera sind getrennt voneinander ansprechbar/ auszulesen. Mit einer einzigen Bildaufnahme wird das Bauteil B auf Fehler inspiziert, zum Beispiel das schräge Ablegen des Bauteils B, so dass es nicht korrekt in der vorgesehenen Tasche des Trägers 320 positioniert ist, oder auf Qualitätsmängel. Außerdem werden durch diese einzige Bildaufnahme die exakten Positionsdaten der Tasche des Trägers 320 für das Ablegen des nächsten Bauteils B erfasst. Die aus den einzelnen Farbkanälen zu gewinnende Information teilt sich wie folgt auf: Bildkanal 1 mit Beleuchtungstyp 1: Position der Ablagetasche des Ablagebandes zur Positionierung des nächsten Bauteils. Bildkanal 2 mit Beleuchtungstyp 2: Qualitätsinspektion des Bauteils (Risse, Lasermarken, Ausbrüche, ...). Bildkanal 3 mit Beleuchtungstyp 3: Zusatzinspektionen für spezielle Bauteile oder kundenspezifische Fehler.In the present variant, the
Durch die hier vorgestellte bildgebende Sensorik sind weniger Bildeinzüge erforderlich als mit herkömmlichen Sensoranordnungen um eine Schlechtteilausschleusung und eine Positionierung der Aktoren zu realisieren.The imaging sensor system presented here means that fewer image inputs are required than with conventional sensor arrangements in order to remove bad parts and position the actuators.
Es sei bemerkt, dass obwohl hier numerische Bereiche und numerische Werte offenbart wurden, alle numerischen Werte zwischen den offenbarten Werten und jedem numerischen Unterbereich innerhalb der genannten Bereiche als ebenfalls offenbart anzusehen sind.It should be noted that although numerical ranges and numerical values have been disclosed herein, all numerical values between the disclosed values and each numerical sub-range within the ranges mentioned are also to be considered as disclosed.
Die vorangehend beschriebenen Varianten der Vorrichtung sowie deren Aufbau- und Betriebsaspekte dienen lediglich dem besseren Verständnis der Struktur, der Funktionsweise und der Eigenschaften; sie schränken die Offenbarung nicht etwa auf die Ausführungsbeispiele ein. Die Fig. sind teilweise schematisch, wobei wesentliche Eigenschaften und Effekte zum Teil deutlich vergrößert dargestellt sind, um die Funktionen, Wirkprinzipien, technischen Ausgestaltungen und Merkmale zu verdeutlichen. Dabei kann jede Funktionsweise, jedes Prinzip, jede technische Ausgestaltung und jedes Merkmal, welches/welche in den Fig. oder im Text offenbart ist/sind, mit allen Ansprüchen, jedem Merkmal im Text und in den anderen Fig., anderen Funktionsweisen, Prinzipien, technischen Ausgestaltungen und Merkmalen, die in dieser Offenbarung enthalten sind oder sich daraus ergeben, frei und beliebig kombiniert werden, so dass alle denkbaren Kombinationen der beschriebenen Vorgehensweise zuzuordnen sind. Dabei sind auch Kombinationen zwischen allen einzelnen Ausführungen im Text, das heißt in jedem Abschnitt der Beschreibung, in den Ansprüchen und auch Kombinationen zwischen verschiedenen Varianten im Text, in den Ansprüchen und in den Fig. umfasst. Auch die Ansprüche limitieren nicht die Offenbarung und damit die Kombinationsmöglichkeiten aller aufgezeigten Merkmale untereinander. Alle offenbarten Merkmale sind explizit auch einzeln und in Kombination mit allen anderen Merkmalen hier offenbart. Der Schutzumfang wird jedoch durch die beigefügten Ansprüche definiert.The variants of the device described above, as well as their construction and operational aspects, only serve to better understand the structure, the mode of operation and the properties; they do not restrict the disclosure to the exemplary embodiments. The figures are partially schematic, with essential properties and effects being shown in a partially enlarged manner in order to clarify the functions, operating principles, technical designs and features. Every mode of operation, every principle, every technical design and every feature which is / are disclosed in the figures or in the text can be used with all Claims, each feature in the text and in the other figures, other functions, principles, technical configurations and features, which are contained in or result from this disclosure, can be freely and arbitrarily combined, so that all conceivable combinations of the described procedure can be assigned , Combinations between all individual statements in the text, that is to say in each section of the description, in the claims and also combinations between different variants in the text, in the claims and in the figures are also included. The claims also do not limit the disclosure and thus the possible combinations of all the features shown. All disclosed features are explicitly disclosed here individually and in combination with all other features. However, the scope is defined by the appended claims.
- Ablagestelle ABS Storage location ABS
- Bauteil B Component B
- Seitenflächen S1, S2, S3, S4 des BauteilsSide faces S1, S2, S3, S4 of the component
- Deckflächen D1, D2 des BauteilsCover surfaces D1, D2 of the component
- erster Drehantrieb DA1 zum Drehen der ersten Wendeeinrichtung um erste Achse (X-Achse)first rotary drive DA1 for rotating the first turning device about the first axis (X axis)
- zweiter Drehantrieb DA2 zum Drehen der zweiten Wendeeinrichtung um zweite Achse (Y-Achse)second rotary drive DA2 for rotating the second turning device about the second axis (Y axis)
- dritter Drehantrieb DA3 zum Drehen der Empfangseinrichtung um eine die Ablagestelle ABS enthaltende dritte Achse (Z-Achse)third rotary drive DA3 for rotating the receiving device about a third axis containing the storage location ABS (Z axis)
- vierter Drehantrieb DA4 der Empfangseinrichtung transportiert den Träger in Förderrichtungfourth rotary drive DA4 of the receiving device transports the carrier in the conveying direction
- erster Linearantrieb LA1 zum Verfahren der ersten Wendeeinrichtung längs erster Achse (X-Achse)first linear drive LA1 for moving the first turning device along the first axis (X axis)
- zweiter Linearantrieb LA2 zum Verfahren der zweiten Wendeeinrichtung längs zweiter Achse (Y-Achse)second linear drive LA2 for moving the second turning device along the second axis (Y axis)
- dritter Linearantrieb LA3 zum Verfahren der Empfangseinrichtung längs erster Achsethird linear drive LA3 for moving the receiving device along the first axis
- vierter Linearantrieb LA4 zum Verfahren der Empfangseinrichtung längs zweiter Achsefourth linear drive LA4 for moving the receiving device along the second axis
- fünfter Linearantrieb LA5 zum Verfahren eines durch die Empfangseinrichtung geführten Trägers längs erster Achse (X-Achse)Fifth linear drive LA5 for moving a carrier guided through the receiving device along the first axis (X axis)
- erste Empfangsstelle ES1 first receiving point ES1
- zweite Empfangsstelle ES2 second receiving point ES2
- Steuerung ECU Control ECU
- Lage- und Eigenschaftssensoren K1 ... K11 Position and property sensors K1 ... K11
- erste Kameraanordnung K1 im Zentrum der ersten Wendeeinrichtung senkrecht nach oben gerichtetfirst camera arrangement K1 directed vertically upwards in the center of the first turning device
- zweite Kameraanordnung K2 mit drei Kameras ist an der Peripherie der ersten Wendeeinrichtung bei 90° auf das daran vorbeigeführte Bauteil gerichtetsecond camera arrangement K2 with three cameras is directed at the periphery of the first turning device at 90 ° to the component guided past it
- dritte Kameraanordnung K3 mit drei Kameras ist an der Peripherie der zweiten Wendeeinrichtung bei 90° auf das daran vorbeigeführte Bauteil gerichtetthird camera arrangement K3 with three cameras is directed at the periphery of the second turning device at 90 ° to the component guided past it
- vierte Kameraanordnung K4 ist im Zentrum der zweiten Wendeeinrichtung auf die Ablagestelle oder die erste Empfangsstelle in der Empfangseinrichtung gerichtetfourth camera arrangement K4 is directed in the center of the second turning device onto the depositing point or the first receiving point in the receiving device
- fünfte Kameraanordnung K5 ist auf zweites Fenster an der zweiten Empfangsstelle gerichtetfifth camera arrangement K5 is aimed at a second window at the second receiving point
- siebte Kameraanordnung K7 ist im Zentrum der ersten Wendeeinrichtung auf die Übergabestelle ÜS gerichtetSeventh camera arrangement K7 is aimed at the transfer point ÜS in the center of the first turning device
- achte Kameraanordnung K8 mit zwei Kameras ist an der Peripherie der Wendeeinrichtungen aus zwei zueinander orthogonalen Erfassungsrichtungen auf die Spendestelle gerichtetEighth camera arrangement K8 with two cameras is directed at the periphery of the turning devices from two mutually orthogonal detection directions to the dispensing point
- neunte Kameraanordnung K9 mit zwei Kameras ist an der Peripherie der Wendeeinrichtungen aus zwei zueinander orthogonalen Erfassungsrichtungen auf die Übergabestelle gerichtetNinth camera arrangement K9 with two cameras is directed at the periphery of the turning devices from two mutually orthogonal detection directions to the transfer point
- zehnte Kameraanordnung K10 mit zwei Kameras ist an der Peripherie der Wendeeinrichtungen aus zwei zueinander orthogonalen Erfassungsrichtungen auf die Ablagestelle gerichtetTenth camera arrangement K10 with two cameras is directed to the storage location on the periphery of the turning devices from two mutually orthogonal detection directions
- elfte Kameraanordnung K11 ist im Zentrum der zweiten Wendeeinrichtung auf die Übergabestelle ÜS gerichtetEleventh camera arrangement K11 is aimed at the transfer point ÜS in the center of the second turning device
- Spiegel SP1, SP2 Mirror SP1, SP2
- Spendestelle SPS Donation point SPS
- Übergabestelle ÜS Transfer point ÜS
-
Bauteilhandhabungsvorrichtung 100
Component handling device 100 -
Ausstoßeinheit 110
Ejection unit 110 -
erste Wendeeinrichtung 130
first turning device 130 -
erste Aufnehmer 132
first transducer 132 -
zweite Wendeeinrichtung 150
second turning device 150 -
zweite Aufnehmer 152
second transducer 152 -
Empfangseinrichtung 200 Receiving
device 200 - Träger 320 Carrier 320
- Transportlöcher 325 Transport holes 325
-
erster Absauger 330
first suction device 330 -
Ausschleusstelle 335
Exit point 335 -
Absaug- und/oder Ausblaseinrichtung 340 Suction and / or blow-out
device 340 -
Sensor 400
Sensor 400 -
Kamera-Chip 410
Camera chip 410 -
halbdurchlässiger Spiegel 420
semi-transparent mirror 420 -
Lichtquellen 440
Light sources 440 -
weitere Lichtquelle 450 additional
light source 450
Claims (11)
- A device for the self-adjustment of a component-handling device (100) for electronic components (B), which is designed and arranged to transfer the components (B) from a delivery device (110) at a dispensing point (SPS) to a first adjustable turning device (130) having a plurality of pick-up elements (132), and
to turn the received component (B) through a first predetermined angle about its longitudinal or transverse axis (LA, QA), to feed it to a deposit point (AS), and to deposit it there on an adjustable reception device (200) at a predetermined reception point (ES1), comprising:a first adjustment sensor arrangement (K1, K8) directed at the dispensing point (SPS), which is designed and arrangedto detect a position of the pick-up element (132) positioned at the dispensing point (SPS) in relation to the delivery device (110), anda second adjustment sensor arrangement directed at the deposit point (AS), which is designed and arrangedto detect a position of the reception point (ES1) in relation to the position of the pick-up element (132) positioned at the deposit point (AS), whereinthe first and the second adjustment sensor arrangements are each designed and arranged to detect the dispensing point (SPS)/the deposit point (AS) from at least two detection directions which are different from one another, andthe first and second adjustment sensor arrangements are each designed and arranged to provide image acquisitions for each transfer position of the first turning device (130) to a downstream controller, whereinfor each transfer position of the first turning device (130), the controller determines, on the basis of the image acquisitions obtained, a correction vector which is used during operation of the component-handling device (100) to adjust the first turning device (130) and/or the individual pick-up elements (132) and/or the reception device (200). - The device as claimed in claim 1, further comprising:
a position and property sensor (K3) which is directed from the periphery of the first turning device (130) at 90° at the pick-up elements (132) guided past thereon and which is in particular a camera sensor which is designed and arranged to determine a position of the pick-up element (132) relative to a previously defined reference point. - The device as claimed in claim 1, wherein the first adjustment sensor arrangement and/or the second adjustment sensor arrangement each consist of a first imaging sensor, in particular a first camera, and a second imaging sensor, in particular a second camera.
- The device as claimed in claim 1, wherein
the first adjustment sensor arrangement and/or the second adjustment sensor arrangement each consist of an imaging sensor, in particular a camera, directed from the center of the first turning device (130) perpendicularly at the dispensing point (SPS) or the deposit point (AS), and at least two reflectors, in particular mirrors, arranged at right angles to one another, wherein
the imaging sensor is suitable and intended for detecting the dispensing point (SPS) or the deposit point (AS) indirectly from a first and second detection direction, wherein
the reflectors are so arranged that the two detection directions are orthogonal to one another. - The device as claimed in any one of the preceding claims, wherein
the controller is suitable and intended, on the basis of the image acquisitions obtained by the adjustment sensor arrangements, for determining and storing the position of the pick-up element (132) situated at the dispensing point (SPS) in relation to the delivery device (110), and
determining and storing the position of the reception point (ES1) in relation to the pick-up element (132) situated at the deposit point (AS), and/or
determining and storing a position deviation of the particular pick-up element (132) from a previously defined position according to claim 2, and
on the basis of the determined positions, determining a correction vector for the position of the individual pick-up elements (132) and/or for the first turning device (130) to which the pick-up elements (132) are fixed, and/or
on the basis of the determined positions, determining a correction vector for the reception device (200), and
determining further correction vectors for each transfer position of the first turning device (130) in the same manner, and
controlling the positioning of the first turning device (130) and/or of the individual pick-up elements (132) during operation in order to counteract the deviation between the determined position of the pick-up elements (132) relative to the position of the ejection unit (110), and
controlling the positioning of the reception device (200) and/or of the individual pick-up elements (132) during operation in order to counteract the deviation between the determined position of the reception point (ES1) relative to the position of the pick-up elements (132), and/or
comparing the position of the pick-up element (132) relative to the position of the delivery device (110) and/or to the position of the reception point (ES1) with the position of the pick-up element (132) relative to the defined reference point according to claim 2. - The device as claimed in any one of the preceding claims, wherein the first and/or second adjustment sensor arrangement is permanently connected to the component-handling device (100), and/or
the position and property sensor (K3) according to claim 2 is permanently connected to the component-handling device (100). - The device as claimed in any one of the preceding claims, further comprising:a second adjustable turning device (150) having a plurality of pick-up elements, which is designed and arranged to receive the component at a transfer point (ÜS) from a pick-up element (132) of the first turning device (130), to turn the received component (B) through a second predetermined angle about its longitudinal or transverse axis (LA, QA), to feed it to the deposit point (AS) and to deposit it there on an adjustable reception device (200) at the predetermined reception point (ES1), further comprisinga third adjustment sensor arrangement, directed at the transfer point (US) between the first turning device (130) and the second turning device (150), which is designed and arranged to detect a position of the pick-up element (152) of the second turning device (150) positioned at the transfer point (US) in relation to the pick-up element (132) of the first turning device (130) positioned at the transfer point (ÜS).
- A method for the self-adjustment of a component-handling device (100) which transfers electronic components (B) from a delivery device (110) at a dispensing point (SPS) to a first turning device (130) having a plurality of pick-up elements (132), and
turns the received components (B) through a first predetermined angle about their longitudinal or transverse axis (LA, QA), feeds them to a deposit point (AS) and deposits them there on an adjustable reception device (200) at a predetermined reception point (ES1) and comprises the following process steps:- detecting the dispensing point (SPS), containing the delivery device (110) and the pick-up element (132) situated at that point, from at least two detection directions which are different from one another, by means of an adjustment sensor arrangement,- detecting the deposit point (AS), containing the pick-up element (132) situated at that point and the reception point (ES1), from at least two detection directions which are different from one another, by means of an adjustment sensor arrangement,- determining the position of the pick-up element (132) situated at the dispensing point (SPS) in relation to the delivery device (110), and
determining a deviation from a previously defined position of the pick-up element (132),- determining the position of the reception point (ES1) in relation to the pick-up element (132) situated at the deposit point (AS), and
determining a deviation from a previously defined position of the reception point (ES1),- determining, on the basis of the previously determined deviations, a correction vector for the first turning device (130) and/or for each individual pick-up element (132) and/or for the reception device (200),- repeating all the preceding method steps for every possible transfer position of the first turning device (130), and- controlling the positioning of the first turning device (130) and/or of the reception device (200) and/or of each individual pick-up element (132) during operation of the component-handling device (100) so that the deviation between the determined and the defined position of the pick-up elements (132) and/or of the reception point (ES1) is counteracted in every possible transfer position. - The method as claimed in claim 8, further comprising:- detecting a position of the pick-up element (132) in relation to a previously defined reference point by means of a position and property sensor (K3) which in particular is a camera sensor, and- comparing the determined relative position of the pick-up element (132) to the reception point (ES1) and/or to the delivery device (110) with the relative position of the pick-up element (132) to the defined reference point, and- repeating all the preceding method steps for every possible transfer position of the first turning device (130).
- The method as claimed in claim 8 or 9, wherein the electronic components (B) are transferred at a transfer point (US) from the first adjustable turning device (130) to a second adjustable turning device (150), and
the received components (B) are turned by the second turning device through a second predetermined angle about their longitudinal or transverse axis (LA, QA), fed to a deposit point (AS) and deposited there on an adjustable reception device (200) at a predetermined reception point (ES1), wherein the method comprises the following further steps:- detecting the deposit point (US), containing the pick-up element (132) of the first turning device (130) situated at that point and the pick-up element (152) of the second turning device (150) situated at that point, from at least two detection directions which are different from one another, by means of an adjustment sensor arrangement, and- determining the position of the pick-up element (152) of the second turning device (150) situated at the transfer point (US) in relation to the pick-up element (132) of the first turning device (130) situated at the transfer point (ÜS), and- determining a deviation from a previously defined position of the pick-up element (152),- controlling the positioning of the second turning device (150) and/or of each individual pick-up element (152) during operation of the component-handling device (100) so that the deviation between the determined and the defined position of the pick-up elements (152) is counteracted in every possible transfer position. - The method as claimed in any one of the preceding claims, wherein a check of the detection quality of the adjustment sensor arrangement and/or a check of the pick-up element (132) for damage is carried out on the basis of the comparisons.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015013495.7A DE102015013495B4 (en) | 2015-10-16 | 2015-10-16 | Receiving device for components and methods for removing defective components from this |
PCT/EP2016/072482 WO2017063838A1 (en) | 2015-10-16 | 2016-09-22 | Device and method for self-adjustment of a component-handling device for electronic components |
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EP3363045A1 EP3363045A1 (en) | 2018-08-22 |
EP3363045B1 true EP3363045B1 (en) | 2020-01-08 |
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EP16775131.2A Active EP3363045B1 (en) | 2015-10-16 | 2016-09-22 | Device and method for self-adjustment of a component handling device for electronic components |
EP16775129.6A Active EP3363042B1 (en) | 2015-10-16 | 2016-09-22 | Reception device for components |
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EP (2) | EP3363045B1 (en) |
JP (2) | JP2018533842A (en) |
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CN108352346A (en) | 2018-07-31 |
US20180303015A1 (en) | 2018-10-18 |
WO2017063838A1 (en) | 2017-04-20 |
TW201715948A (en) | 2017-05-01 |
KR20180071264A (en) | 2018-06-27 |
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MY194246A (en) | 2022-11-24 |
JP6626195B2 (en) | 2019-12-25 |
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JP2018533843A (en) | 2018-11-15 |
CN108352346B (en) | 2022-09-30 |
EP3363045A1 (en) | 2018-08-22 |
US10347514B2 (en) | 2019-07-09 |
CN108369917A (en) | 2018-08-03 |
KR20180071317A (en) | 2018-06-27 |
EP3363042B1 (en) | 2019-11-27 |
KR102186429B1 (en) | 2020-12-03 |
CN108369917B (en) | 2022-05-10 |
JP2018533842A (en) | 2018-11-15 |
TWI704851B (en) | 2020-09-11 |
SG11201803057VA (en) | 2018-05-30 |
DE102015013495B4 (en) | 2018-04-26 |
KR102067203B1 (en) | 2020-01-17 |
EP3363042A1 (en) | 2018-08-22 |
MY196046A (en) | 2023-03-09 |
WO2017063835A1 (en) | 2017-04-20 |
PH12018500800A1 (en) | 2018-10-29 |
TWI714634B (en) | 2021-01-01 |
DE102015013495A1 (en) | 2017-04-20 |
SG11201802020WA (en) | 2018-05-30 |
TW201715946A (en) | 2017-05-01 |
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