EP3280916A1 - Vacuum-pump rotor - Google Patents
Vacuum-pump rotorInfo
- Publication number
- EP3280916A1 EP3280916A1 EP16725126.3A EP16725126A EP3280916A1 EP 3280916 A1 EP3280916 A1 EP 3280916A1 EP 16725126 A EP16725126 A EP 16725126A EP 3280916 A1 EP3280916 A1 EP 3280916A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- wing
- pump rotor
- rotor according
- hub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 45
- 239000004744 fabric Substances 0.000 claims description 5
- 230000001747 exhibiting effect Effects 0.000 claims description 2
- 239000000835 fiber Substances 0.000 description 48
- 239000004033 plastic Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000009728 tailored fiber placement Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/322—Blade mountings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/70—Treatment or modification of materials
- F05D2300/702—Reinforcement
Definitions
- the invention relates to a vacuum pump rotor, in particular a rotor for a turbomolecular vacuum pump.
- Vacuum pumps such as turbomolecular vacuum pumps, have a rotor on a rotor shaft.
- the rotor shaft is driven by an electric motor.
- the blades of the rotor cooperate with stator disks, which are usually fixed in a pump housing together.
- stator disks which are usually fixed in a pump housing together.
- high-speed rotors as used in particular in turbomolecular pumps, it is known to produce rotors made of aluminum, steel or corresponding alloys.
- the rotors In order to obtain a high vacuum of, in particular less than 10 "4 mbar, the rotors must be operated at high rotational speeds.
- the Tipspeed of the rotor blades that is, occurring at the wing tips tangential velocity.
- a speed of 400 m / s can be achieved with known rotors, which also involves conveying light gases, such as helium or hydrogen, since they have a high thermal velocity and, in order to promote high rotors, ie a high tip speed is required ,
- the object of the invention is to provide a vacuum pump rotor with which a high tip speed can be achieved.
- the object is achieved according to the invention by the features of claim 1.
- the vacuum pump rotor according to the invention has a hub element, which can be connected to the shaft of the vacuum pump or forms the shaft. With the hub member in particular employed at an angle rotor blades are connected.
- the rotor elements and / or the hub element have a plurality of layers of material. It is thereby possible to provide different materials during operation in high stress areas by material layers are arranged of different materials. It is particularly preferred in this case that at least one of the material layers has fiber-reinforced material. In particular, by providing at least one material layer with fiber reinforced material, it is possible to operate vacuum pump rotors at higher speeds. In particular, it is possible to achieve a tip speed of more than 400 m / s, in particular more than 500 m / s and particularly preferably more than 600 m / s.
- the vacuum pump rotor has a hub member for connection to a rotor shaft, wherein the rotor shaft can also be formed by a plurality of hub members.
- Several rotor blades surrounding the rotor element are connected to the rotor element.
- the rotor blades preferably each have a blade root connected to the hub element and a wing head connected thereto.
- the hub element has at least one fiber-reinforced material exhibiting retaining element.
- a base element is connected to the holding element of the hub element, wherein the base element is connected directly or indirectly to the wing base or the wing head of a respective rotor blade.
- connection between the holding element and the base element takes place such that these two elements partially overlap, so that at least two layers of material are thereby formed.
- at least one of the two elements has fiber-reinforced material, wherein it is preferred that both elements have fiber-reinforced material.
- the hub element preferably has two opposing holding elements, wherein a hub part of the base element is arranged between the two holding elements.
- a three-layer structure is realized in this area, wherein it is again preferred that both hub elements and / or the hub part are made of fiber-reinforced material.
- the entire base member is made of fiber reinforced material.
- a stiffening element which preferably comprises fiber-reinforced material.
- the at least one stiffening element is preferably connected in a flat manner to the holding element of the hub element, wherein it is particularly preferred for the stiffening element to protrude into the blade root of the respective rotor blade.
- the stiffening element thus forms a further material layer.
- two stiffening elements are provided, which are connected on opposite sides with the base element, in particular the hub portion of the base member.
- the Base element here represents in a particularly preferred embodiment, a middle material layer, wherein at least in the region of the hub part opposite each one stiffening element is arranged, which preferably projects into the viagelfuß and is in particular connected flat with the base member.
- Two further layers of material are given in a particular embodiment by the two holding elements, which in turn are arranged on the outer side of the stiffening elements and form an integral part of the hub member.
- the two holding elements are arranged opposite one another and preferably connected directly or evenly flat with the respective upper conductors of the stiffening elements. It is possible to further improve the strength of the rotor blade, further intermediate layers, in particular of different material and / or with different orientation of fibers provided.
- the at least one, in particular both stiffening elements on an inner side may have a fixing element.
- the fixing element is preferably formed as an axially extending approach. This engages in the radial direction preferably the respective holding element.
- At least one additional wing element is formed, which preferably comprises fiber-reinforced material.
- the at least one additional wing element is connected directly or indirectly to the retaining element.
- the additional wing element is preferably connected directly or indirectly to the wing base and / or the hub part of the base element.
- the additional wing element may also be connected in particular flat with the wing head. In this case, it is preferable for the additional wing element to be flat as a further material layer.
- the additional wing element further has on an inner side a fixing element, which in turn can partially extend axially corresponding to a projection and / or in particular engages radially behind the retaining element.
- the additional wing element is designed as an inner additional wing element and at least one additional outer wing element is provided.
- This is preferably connected flat to the inner auxiliary wing element, wherein it is particularly preferred that the outer dimensions of the two additional wing elements are identical.
- the outer auxiliary wing element but also cover only a part of the inner auxiliary wing element. It is also possible that the outer dimensions of the inner auxiliary wing element are smaller than those of the outer additional wing element.
- the outer auxiliary wing member may extend into the wing head and possibly even completely cover it, wherein the inner auxiliary wing member is disposed only in the region of the blade root and / or optionally covers only parts of the wing head.
- the base element and at least one, preferably all, additional wing elements preferably have substantially the same outer contour, in particular a wing outer contour.
- the at least one stiffening element rests in the area of the blade foot directly on the surface of the base element and / or one of the additional wing elements and is preferably firmly connected thereto. Furthermore, it is preferred that the internal additive Wing element in the region of the blade root or the wing head abuts immediately flat on the outer auxiliary wing element and is preferably connected thereto.
- the construction of the individual rotor blades and also of the hub element is preferably multi-layered such that the structure is symmetrical to the base element.
- a usually ring-shaped hub member preferably has on the circumference a plurality of rotor blades in particular employed.
- the hub element and / or the rotor blades preferably have fiber-reinforced material.
- the fibers are preferably arranged to a large extent in accordance with stress. This has the consequence that the vacuum pump rotors according to the invention can be operated at higher speeds. In particular, it is possible to achieve a tip speed of more than 400 m / s, in particular more than 500 m / s and particularly preferably more than 600 m / s.
- the material used is preferably a long-fiber-reinforced material with fiber lengths of 1 to 50 mm or continuous fibers with lengths of more than 50 mm.
- the claim-oriented arrangement of the fibers is preferably carried out by a suitable orientation of the fibers, so that they can absorb the forces and moments occurring at such high speeds.
- a stress-sensitive arrangement is also achieved by optionally additionally varying the direction, the density, the strength and / or the thickness of the fibers used depending on the type of stress. This depends in particular on the region of the stress on the hub element and / or on the rotor blades. Furthermore, it is particularly preferred that for claim-appropriate arrangement additionally for the appropriate stress particularly suitable fibers are used.
- metal, plastic or carbon fibers are used.
- metal fibers in the region of the hub element or the part of the rotor blade facing the hub element if necessary, since they have a different fracture behavior.
- solid metal or plastic parts can also be incorporated into the laminate to stabilize the position of fibers or to create volumes.
- plastic, carbon and / or metal fibers are impregnated or preimpregnated.
- the impregnation with epoxy resin, phenolic resin, Bismaimiden and / or thermoplastics, but also polyurethane is preferred.
- TFP Trimed Fiber Placement
- load-compatible mixed forms of different fiber arrangements are possible and also preferred.
- the fibers provided in or on the hub element and / or in or on the rotor blades are arranged in accordance with stress, ie in particular in the main stress direction.
- the fibers preferably extend in the radial direction in order to absorb the forces.
- parts of the fibers are preferably placed purely in the circumferential direction, but other regions have different directions in order to enable a voltage displacement.
- the fiber volume fraction based on the total volume of the hub element and / or the rotor blades is in this case preferably greater than 50%, in particular greater than 60%.
- the fibers arranged in or on the hub element are preferably arranged substantially in the circumferential direction, ie in the direction of rotation of the hub element.
- the fibers are preferably arranged so that the fibers can absorb the forces in the circumferential direction.
- a deviation in an angular range of ⁇ 10 ° to ⁇ 20 ° is defined such that these are still fibers that run essentially in the circumferential direction.
- the fibers In or on the rotor blades, the fibers preferably extend substantially radially. In the area of the wings, the fibers must be arranged so that the fibers absorb the forces in the radial direction. A deviation in the range of ⁇ 10 ° to ⁇ 20 ° further defines a substantially radially extending fiber.
- the fibers in the salaried area of the wing parts of the rotor blades, it is preferable to additionally use intersecting fibers in order to make a stress-oriented arrangement of the fibers, for example against twisting of the wings.
- the fibers preferably extend in an angular range of ⁇ 30 ° to ⁇ 45 ° with respect to the wing longitudinal axis and ⁇ 70 ° to ⁇ 90 ° to each other.
- Suitable fiber layers are suitable here, such as patches or spread tows.
- fibers pass from the hub element into the rotor vanes, so that the connection region between the hub element and the rotor vanes is formed as stress-resistant as possible.
- the hub member and the rotor vanes are formed integrally.
- the rotor blades are connected by hooking, plugging into corresponding grooves and the like to the hub. Combinations thereof are also possible, so that initially hinged or otherwise connected to the hub member Wing elements are then connected via a fiber layer in this area with the hub member.
- Bonding of the fibers may be accomplished by subsequent potting, resination or the like. First of all, however, in order to define an exact position of the fibers, bonding of the fibers to one another can take place.
- the fibers may also be fixed or joined together by stitching, knitting or the like in the required direction.
- the rotor blades can have an angle of attack of 8 ° - 50 °.
- the vacuum pump rotors described above it is possible in particular to achieve a high tip speed of more than 400 m / s, in particular more than 500 m / s and particularly preferably more than 600 m / s.
- This has the advantage essential to the invention that the rotors are also suitable for conveying light gases, in particular helium and hydrogen. This also makes it possible to realize pump rotors with smaller diameters at high flow rates.
- one of the additional wing elements in particular both the inner and the outer auxiliary wing elements have a radial layer of a fiber-reinforced material, in particular fiber-reinforced plastic. Furthermore, it is preferred that one of the additional wing elements, in particular the two outer additional wing elements, have a Spreadtow fabric layer.
- the at least one stiffening element preferably also comprises fiber material, in particular plastic fiber material.
- a part of the fibers preferably runs in the circumferential direction.
- a tangential layer is formed.
- the at least one retaining element also comprises fibers which run in the circumferential direction, so that further tangential layers are formed.
- the particular inner additional wing elements have, as the main fiber direction in a preferred embodiment radially extending fibers, so that thereby radial layers are formed. In the preferably provided two outer additional wing elements, the fibers are arranged crossed to each other and in particular a Spreadtow fabric provided.
- the multi-layered design of the vacuum pump rotor of preferably different material layers with particularly preferred different orientations of the material fibers it is possible to produce vacuum pump rotors that withstand extremely high loads, so that very high tip speeds can be achieved.
- vacuum pump rotors are also preferred for other high-speed rotors, such as those used in the field of blowers, fans, gas extraction, according to the invention, this being an independent invention.
- the figure shows a section of a vacuum pump rotor in the assembled state and partially as an exploded view, wherein the representation is made schematically simplified.
- a part of a multi-layer vacuum pump rotor is shown schematically with interconnected material layers.
- a part of a hub member 10 is shown.
- the hub member 10 surrounds, for example, a rotor shaft with which it is firmly connected.
- a plurality of such annular hub elements are arranged one behind the other in the axial direction, so that a plurality of vacuum pump stages are formed and form, for example, a rotor for a turbomolecular pump.
- the individual hub elements can be connected to a rotor shaft or even form the rotor shaft by being connected together accordingly.
- the hub element 10 is connected in the circumferential direction in each case radially extending rotor blades 12 which are set at an angle, with only a single rotor blade 12 being shown for the purpose of illustration.
- a base element 14 is shown as the middle layer.
- the structure of the entire vacuum pump rotor in the illustrated preferred embodiment is constructed symmetrically to the base member 14.
- a stiffening element 16 is arranged, wherein symmetrically to the base member 14 on the opposite side, a further stiffening element is arranged symmetrically to the illustrated stiffening element 16.
- two outer additional wing elements 20 are provided and in turn arranged symmetrically to the base member 14.
- two holding elements 22 are provided, which in turn are arranged symmetrically to the base element 14.
- the holding elements 22 in this case represent the essential elements of the hub member 10.
- the base element 14, which forms the plane of symmetry, in the illustrated preferred embodiment has an outer contour that corresponds to the outer contour of the wing 12.
- the base element 14 in this case has a hub part 24 which projects into the hub element 10 or is arranged between the two retaining elements 22 of the hub element 10. It should be noted that the two holding elements 22 in particular annular are formed, between which two annular support members 22 a plurality of hub portions corresponding to the number of rotor blades 12 are arranged.
- a wing base 26 is connected and in particular integrally formed.
- the wing base 26 represents the connecting element between the hub part and a wing head 28.
- the wing head 28 is in this case the essential part of the rotor blade 12.
- the base element 14 is preferably formed in one piece and has a carbon fiber fleece in a preferred embodiment.
- the next layer is formed by the two opposing stiffening elements 16.
- the outer contour of the stiffening elements 16 corresponds in the illustrated embodiment, the outer contour of the hub portion 24 and the wellgelfußes 26.
- the stiffening element 16 protrudes only in a part of the wellgelfußes 26.
- the stiffening element has on an inner side a fixing element 30. This protrudes axially outward and engages behind each of the two holding elements 22.
- the stiffening element 16 is preferably formed as a tangential layer and thus has a plurality in the circumferential direction for receiving tangential forces suitable fibers.
- the Dickengradient is high at the hub interior.
- the next material layer is formed by the two inner additional wing elements 18.
- the outer contour of the inner additional wing elements corresponds to the outer contour of the base element.
- the inner additional wing elements 18 likewise have a fixing element 32, which engages radially behind the retaining elements 22 in accordance with the fixing element 32.
- the material fibers of the inner auxiliary wing members 18 are radially aligned so that these layers can be considered as radial layers.
- the next layers of material are formed by the outer auxiliary wing elements 20.
- the outer contour of the outer additional wing elements 20 in turn corresponds to the outer contour of the base element 14.
- the outer additional wing elements 20 also have a fixing element 34, which in turn radially engages behind the two retaining elements 22. It is preferred that the outer auxiliary wing members 20 are made of a Spreadtow fabric.
- the outer material layer is formed by the two holding elements 22, wherein these do not extend into the rotor blade 12, but essentially form the hub element.
- the holding elements 22 preferably also comprise material fibers, in particular plastic fibers or carbon fibers.
- vacuum pump rotor Essential for the invention is the multilayer structure of the vacuum pump rotor.
- the design and the choice of material of the individual layers are hereby preferably selected such that a selection of material that is as stress-resistant as possible and a fiber course suitable for the strain are realized.
- vacuum pump rotors can be produced which withstand extremely high stresses and in particular can achieve a tip speed of more than 400 m / s, in particular more than 500 m / s and in particular more than 600 m / s.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202015004001.2U DE202015004001U1 (en) | 2015-06-08 | 2015-06-08 | vacuum pump rotor |
DE202015004160.4U DE202015004160U1 (en) | 2015-06-15 | 2015-06-15 | Vacuum pump rotor |
PCT/EP2016/061786 WO2016198260A1 (en) | 2015-06-08 | 2016-05-25 | Vacuum-pump rotor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3280916A1 true EP3280916A1 (en) | 2018-02-14 |
EP3280916B1 EP3280916B1 (en) | 2021-10-20 |
Family
ID=56081480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16725126.3A Active EP3280916B1 (en) | 2015-06-08 | 2016-05-25 | Vacuum-pump rotor |
Country Status (7)
Country | Link |
---|---|
US (1) | US10393124B2 (en) |
EP (1) | EP3280916B1 (en) |
JP (1) | JP6731421B2 (en) |
KR (1) | KR102521349B1 (en) |
CN (1) | CN107646076B (en) |
SG (1) | SG11201708740XA (en) |
WO (1) | WO2016198260A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2570925B (en) * | 2018-02-12 | 2021-07-07 | Edwards Ltd | Reinforced vacuum system component |
GB2600878B (en) * | 2018-02-12 | 2022-12-14 | Edwards Ltd | Reinforced vacuum system component |
GB2583938A (en) * | 2019-05-14 | 2020-11-18 | Edwards Ltd | Vacuum rotor blade |
Family Cites Families (23)
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DE1071275B (en) | 1959-12-17 | |||
JPH09303288A (en) * | 1996-05-16 | 1997-11-25 | Daikin Ind Ltd | Turbo-molecular pump blade |
GB2456637B (en) * | 1997-06-03 | 2010-01-13 | Rolls Royce Plc | A fibre reinforced metal rotor |
JP4324649B2 (en) * | 2001-11-28 | 2009-09-02 | 福井県 | Fiber reinforced thermoplastic resin sheet, structural material using the same, and method for producing fiber reinforced thermoplastic resin sheet |
FR2845737B1 (en) * | 2002-10-11 | 2005-01-14 | Cit Alcatel | TURBOMOLECULAR PUMP WITH COMPOSITE SKIRT |
GB0229355D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
GB0314692D0 (en) * | 2003-06-25 | 2003-07-30 | Boc Group Plc | Improvements in turbomolecular pumps |
DE10354204B4 (en) * | 2003-11-20 | 2016-03-10 | Leybold Vakuum Gmbh | molecular pump |
JP2006090231A (en) * | 2004-09-24 | 2006-04-06 | Boc Edwards Kk | Method for manufacturing fixed blade of turbo molecular pump and vacuum pump |
DE102007006915A1 (en) | 2007-02-13 | 2008-08-14 | Oerlikon Leybold Vacuum Gmbh | Turbo-molecular pump rotor element, has reinforcement element connecting parts of pinions with each other and providing improved distribution of loads during operation of rotor element |
CN201050492Y (en) * | 2007-06-29 | 2008-04-23 | 成都无极真空科技有限公司 | Vertical turbine molecular pump |
EP2040354B2 (en) * | 2007-09-21 | 2019-01-23 | Grundfos Management A/S | Rotor can of a drive motor for a pump assembly |
CN101254578A (en) * | 2008-04-09 | 2008-09-03 | 北京中科科仪技术发展有限责任公司 | Manufacturing method of turbine rotor of large-sized turbine molecular pump |
CN102597527B (en) * | 2009-08-26 | 2015-06-24 | 株式会社岛津制作所 | Turbo-molecular pump and method of manufacturing rotor |
ITTO20100070A1 (en) | 2010-02-01 | 2011-08-02 | Varian Spa | VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP. |
EP2587069B1 (en) * | 2010-06-24 | 2020-03-25 | Edwards Japan Limited | Vacuum pump |
GB2498816A (en) * | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
DE102012003680A1 (en) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
JP5982999B2 (en) * | 2012-05-01 | 2016-08-31 | 株式会社Ihi | Rotor blade and fan |
US9239062B2 (en) * | 2012-09-10 | 2016-01-19 | General Electric Company | Low radius ratio fan for a gas turbine engine |
US20140178204A1 (en) * | 2012-12-21 | 2014-06-26 | General Electric Company | Wind turbine rotor blades with fiber reinforced portions and methods for making the same |
DE202013002970U1 (en) | 2013-03-27 | 2014-06-30 | Oerlikon Leybold Vacuum Gmbh | Tool for producing a multiple rotor blades having rotor disk and rotor disk |
DE202015004160U1 (en) | 2015-06-15 | 2016-09-19 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump rotor |
-
2016
- 2016-05-25 US US15/568,840 patent/US10393124B2/en active Active
- 2016-05-25 SG SG11201708740XA patent/SG11201708740XA/en unknown
- 2016-05-25 EP EP16725126.3A patent/EP3280916B1/en active Active
- 2016-05-25 WO PCT/EP2016/061786 patent/WO2016198260A1/en active Application Filing
- 2016-05-25 CN CN201680025153.9A patent/CN107646076B/en active Active
- 2016-05-25 JP JP2017556803A patent/JP6731421B2/en active Active
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CN107646076B (en) | 2020-06-09 |
CN107646076A (en) | 2018-01-30 |
WO2016198260A1 (en) | 2016-12-15 |
SG11201708740XA (en) | 2017-11-29 |
EP3280916B1 (en) | 2021-10-20 |
US20180100510A1 (en) | 2018-04-12 |
JP6731421B2 (en) | 2020-08-05 |
JP2018517090A (en) | 2018-06-28 |
KR20180018488A (en) | 2018-02-21 |
US10393124B2 (en) | 2019-08-27 |
KR102521349B1 (en) | 2023-04-12 |
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