EP3245314A1 - Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung - Google Patents
Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtungInfo
- Publication number
- EP3245314A1 EP3245314A1 EP15798310.7A EP15798310A EP3245314A1 EP 3245314 A1 EP3245314 A1 EP 3245314A1 EP 15798310 A EP15798310 A EP 15798310A EP 3245314 A1 EP3245314 A1 EP 3245314A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coating
- coating layer
- titanium
- nitrogen
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
Definitions
- An advantage achieved by a method according to the invention can be seen in the fact that by setting a molar ratio of aluminum to titanium via appropriate supply of at least one aluminum precursor and at least one titanium precursor, the crystal systems in the slats in the direction of a cubic structure or Phase can be adjusted. If the titanium content is kept relatively high in comparison with the prior art, lamellae are formed, which alternately have cubic ⁇ _ ⁇ ⁇ ⁇ ⁇ and cubic ⁇ ⁇ ⁇ _ ⁇ ⁇ . In one of the alternating lamellae one composition is approximately TiN, in the other approximately AIN.
- the at least one coating layer of essentially aluminum, titanium and nitrogen with an average composition ⁇ ⁇ ⁇ _ ⁇ ⁇ and from a gas phase containing aluminum trichloride, titanium tetrachloride and ammonia is deposited. It is understood that in addition carrier gases such as nitrogen and / or Hydrogen can be used. Although in principle it is possible to work with one precursor each for aluminum and one precursor for titanium, it goes without saying that, if required, a plurality of precursors for the individual metals may also be used
- An article of a hard metal for use in particular a
- Lamella periodicity can be adjusted during production by changing the supplied contents of a titanium precursor at a fixed content of an aluminum precursor.
- Substantial aluminum, titanium and nitrogen have proved to be useful here, that it is deposited on a coating layer of TiCN, usually MT-TiCN. It is possible that the coating layer of TiCN is deposited directly on the coating layer of TiN. But it is also possible that between several more coating layers are deposited. It is also possible that several coating layers of essentially aluminum, titanium and nitrogen are deposited in interplay with other coating layers and / or an outer coating layer terminating the coating, for example of TiN, Al 2 0 3 or diamond is provided. According to the illustrated advantages, a cutting tool such as
- Coating layer 5 is preferably deposited at a pressure of 20 mbar to 80 mbar, in particular 25 mbar to 55 mbar, wherein the pressure over the
- FIG. 4 shows an X-ray diffractogram of a coating layer 5 from which, upon evaluation, it can be seen that a coating layer 5 with a cubic structure is formed and hexagonal phases can not be detected, which confirms the results from FIG. 3 for the gradient layer.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA50025/2015A AT516062B1 (de) | 2015-01-15 | 2015-01-15 | Verfahren zum Beschichten eines Gegenstandes und damit hergestellte Beschichtung |
PCT/AT2015/050277 WO2016112417A1 (de) | 2015-01-15 | 2015-11-03 | Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3245314A1 true EP3245314A1 (de) | 2017-11-22 |
Family
ID=54697404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15798310.7A Pending EP3245314A1 (de) | 2015-01-15 | 2015-11-03 | Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US10597776B2 (de) |
EP (1) | EP3245314A1 (de) |
JP (1) | JP2018504515A (de) |
CN (1) | CN107109640B (de) |
AT (1) | AT516062B1 (de) |
BR (1) | BR112017002732B1 (de) |
MX (1) | MX2017005895A (de) |
WO (1) | WO2016112417A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT511950B1 (de) | 2012-03-14 | 2013-04-15 | Boehlerit Gmbh & Co Kg | Beschichteter Körper und Verfahren zum Beschichten eines Körpers |
CN111902228B (zh) * | 2018-03-22 | 2023-01-31 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
JP6565092B1 (ja) * | 2018-03-22 | 2019-08-28 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
CN111886093B (zh) * | 2018-03-22 | 2023-01-31 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
JP6565091B1 (ja) * | 2018-03-22 | 2019-08-28 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
CN111902229B (zh) * | 2018-03-22 | 2023-02-21 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
WO2019181135A1 (ja) * | 2018-03-22 | 2019-09-26 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
US11311945B2 (en) | 2018-03-22 | 2022-04-26 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool and method for manufacturing same |
DE102019103363A1 (de) * | 2019-02-11 | 2020-08-13 | Oerlikon Surface Solutions Ag | Beschichtetes Werkzeug für die Bearbeitung von schwer zu bearbeitenden Materialien |
JP2022523425A (ja) * | 2019-03-07 | 2022-04-22 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | 熱安定性が向上したtm-al-o-nコーティング層 |
PL243414B1 (pl) * | 2019-11-22 | 2023-08-21 | Can Pack Spolka Akcyjna | Sposób i urządzenie do powlekania pojemnika metalowego |
AT525425B1 (de) | 2022-03-03 | 2023-04-15 | Boehlerit Gmbh & Co Kg | Verfahren zur Herstellung einer Beschichtung auf einem Objekt und entsprechend hergestellter beschichteter Körper |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69526301T2 (de) * | 1994-10-28 | 2002-12-05 | Sumitomo Electric Industries, Ltd. | Mehrschichtiges Material |
FR2745299B1 (fr) | 1996-02-27 | 1998-06-19 | Centre Nat Rech Scient | Procede de formation de revetements de ti1-xalxn |
FR2767841B1 (fr) * | 1997-08-29 | 1999-10-01 | Commissariat Energie Atomique | PROCEDE DE PREPARATION PAR DEPOT CHIMIQUE EN PHASE VAPEUR (CVD) D'UN REVETEMENT MULTICOUCHE A BASE DE Ti-Al-N |
AU2003227598A1 (en) * | 2002-04-11 | 2003-10-20 | Cemecon Ag | Coated bodies and a method for coating a body |
US7244519B2 (en) * | 2004-08-20 | 2007-07-17 | Tdy Industries, Inc. | PVD coated ruthenium featured cutting tools |
DE102005032860B4 (de) | 2005-07-04 | 2007-08-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung |
SE529838C2 (sv) * | 2005-12-08 | 2007-12-04 | Sandvik Intellectual Property | Belagt hårdmetallskär, sätt att framställa detta samt dess användning för fräsning i stål |
EA014894B1 (ru) * | 2006-03-27 | 2011-02-28 | Коммонвелт Сайнтифик Энд Индастриэл Рисерч Организэйшн | Устройство и способ для производства соединений металлов |
SE0602814L (sv) * | 2006-12-27 | 2008-06-28 | Sandvik Intellectual Property | Skärverktyg med multiskiktbeläggning |
SE0701760L (sv) * | 2007-06-01 | 2008-12-02 | Sandvik Intellectual Property | Hårdmetallskär för avstickning, spårstickning och gängning |
SE0701761L (sv) * | 2007-06-01 | 2008-12-02 | Sandvik Intellectual Property | Finkornig hårdmetall för svarvning i varmhållfasta superlegeringar (HRSA) och rostfria stål |
DE102007000512B3 (de) * | 2007-10-16 | 2009-01-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung |
DE102008013966A1 (de) | 2008-03-12 | 2009-09-17 | Kennametal Inc. | Hartstoffbeschichteter Körper |
DE102008013964A1 (de) * | 2008-03-12 | 2009-09-17 | Kennametal Inc. | Hartstoffbeschichteter Körper |
DE102009046667B4 (de) * | 2009-11-12 | 2016-01-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper |
AT510963B1 (de) * | 2011-03-18 | 2012-08-15 | Boehlerit Gmbh & Co Kg | Beschichteter körper und verfahren zu dessen herstellung |
KR101297298B1 (ko) * | 2011-06-03 | 2013-08-16 | 한국야금 주식회사 | 절삭공구용 코팅층 |
AT511950B1 (de) * | 2012-03-14 | 2013-04-15 | Boehlerit Gmbh & Co Kg | Beschichteter Körper und Verfahren zum Beschichten eines Körpers |
JP6044336B2 (ja) * | 2012-12-27 | 2016-12-14 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
JP5618429B2 (ja) * | 2012-12-28 | 2014-11-05 | 住友電工ハードメタル株式会社 | 表面被覆部材およびその製造方法 |
-
2015
- 2015-01-15 AT ATA50025/2015A patent/AT516062B1/de active
- 2015-11-03 CN CN201580073689.3A patent/CN107109640B/zh active Active
- 2015-11-03 WO PCT/AT2015/050277 patent/WO2016112417A1/de active Application Filing
- 2015-11-03 EP EP15798310.7A patent/EP3245314A1/de active Pending
- 2015-11-03 US US15/543,781 patent/US10597776B2/en active Active
- 2015-11-03 JP JP2017506997A patent/JP2018504515A/ja active Pending
- 2015-11-03 BR BR112017002732-1A patent/BR112017002732B1/pt active IP Right Grant
- 2015-11-03 MX MX2017005895A patent/MX2017005895A/es unknown
Non-Patent Citations (2)
Title |
---|
None * |
See also references of WO2016112417A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2016112417A1 (de) | 2016-07-21 |
US10597776B2 (en) | 2020-03-24 |
AT516062A4 (de) | 2016-02-15 |
BR112017002732B1 (pt) | 2022-12-20 |
AT516062B1 (de) | 2016-02-15 |
MX2017005895A (es) | 2017-11-08 |
BR112017002732A2 (pt) | 2017-12-19 |
CN107109640A (zh) | 2017-08-29 |
CN107109640B (zh) | 2019-11-01 |
US20180023194A1 (en) | 2018-01-25 |
JP2018504515A (ja) | 2018-02-15 |
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