WO2016112417A1 - Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung - Google Patents
Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung Download PDFInfo
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- WO2016112417A1 WO2016112417A1 PCT/AT2015/050277 AT2015050277W WO2016112417A1 WO 2016112417 A1 WO2016112417 A1 WO 2016112417A1 AT 2015050277 W AT2015050277 W AT 2015050277W WO 2016112417 A1 WO2016112417 A1 WO 2016112417A1
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- WIPO (PCT)
- Prior art keywords
- coating
- coating layer
- titanium
- nitrogen
- aluminum
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
Definitions
- the invention relates to a method for coating an article, wherein a coating with one or more coating layers is applied to the article, wherein at least one coating layer is formed essentially of aluminum, titanium and nitrogen, wherein the coating layer at least partially adjacent lamellae of different chemical composition and is deposited from a gas phase with at least one aluminum precursor and at least one titanium precursor.
- the invention relates to a coating which is applied to an article by chemical vapor deposition (CVD), wherein the coating comprises one or more coating layers and wherein at least one coating layer is formed essentially of aluminum, titanium and nitrogen and at least in areas together having adjacent lamellae of different chemical composition.
- CVD chemical vapor deposition
- Cutting inserts are coated to increase tool life in the cutting insert with coating layers composed of titanium, aluminum and nitrogen.
- TiAIN coating layers are often referred to in this regard, with an average chemical composition, irrespective of whether one or more phases are present in the coating layer, being given as ⁇ _ ⁇ ⁇ ⁇ ⁇ .
- AITiN For coating layers containing more aluminum than titanium, the nomenclature AITiN or more precisely ⁇ ⁇ ⁇ _ ⁇ ⁇ is also common.
- a cubic structure of the AITiN is obtained at a relative proportion of aluminum nitride (AIN) up to 67 mole percent (mole%).
- AIN aluminum nitride
- mole% 67 mole percent
- a mixture of cubic AITiN and hexagonal AIN and at an AIN content of more than 75 mol% exclusively hexagonal AIN and cubic titanium nitride (TiN) is formed.
- PVD Physical Vapor Deposition
- maximum relative proportions of AIN are practically limited to 67 mol%, since otherwise it would be possible to overturn in phases containing aluminum only in the form of hexagonal AlN.
- a higher relative amount of cubic AlN is desirable in the art to maximize wear resistance as much as possible.
- the temperatures according to US Pat. No. 6,238,739 B1 can also be lower, specifically in the temperature window from 550.degree. C. to 650.degree. C., although high chlorine contents in the coating layer must be accepted, which proves to be disadvantageous for an application. Attempts have therefore been made to optimize CVD processes in such a way that these coating layers can be produced using these AITiN coating layers with a high proportion of aluminum and cubic structure (I. Endler et al., Proceedings Euro PM 2006, Ghent, Belgium, 23. to 25. October 2006, Vol. 1, 219).
- a cubic AITiN coating layer which is 3 ⁇ thick, to provide a 1 ⁇ thick coating layer, which is formed as a phase gradient layer and consists of a phase mixture of hexagonal AIN, TiN and cubic AITiN, wherein a cubic AITiN content with outward towards or to
- Coating process is extremely thick, since a temperature for forming the ultimate intended cubic AITiN coating layer is lower, which requires appropriate time. During this lowering of a process temperature, however, a thickness of the bonding or phase gradient layer grows rapidly, because in one
- a coated body and a method for coating a body have become known, wherein a special coating layer of ⁇ . ⁇ is formed in individual areas with a lamellar structure.
- This lamellar structure consists of alternating lamellae of ⁇ . ⁇ (predominantly Ti as metal) and, alternately, ⁇ . ⁇ (predominantly AI as metal) together.
- the ⁇ . ⁇ exists as a cubic phase, whereas the ⁇ . ⁇ has a hexagonal structure.
- the hexagonal AIN or ⁇ . ⁇ in the alternating formation with cubic TiN or ⁇ . ⁇ has proved to be advantageous in this special structure, which is attributed to the formation of the laminations in the nanometer range.
- a ⁇ . ⁇ coating layer according to WO 2013/134796 A1 already has excellent properties, it would be desirable to be able to provide even better coating layers in terms of hardness. This is where the object of the invention is based and sets itself the goal of specifying a method of the type mentioned above, with which coatings can be produced with a corresponding coating layer.
- Another object of the invention is to provide a coating of the type mentioned, which has a ⁇ . ⁇ coating layer with a high hardness.
- the procedural goal is achieved if in a method of the type mentioned by setting a molar ratio of aluminum to titanium, the lamellae of different chemical composition are each formed with a cubic structure, while maintaining the crystal system, aluminum and titanium partly by other metals and nitrogen partially by oxygen and / or
- Carbon can be replaced.
- An advantage achieved by a method according to the invention can be seen in the fact that by setting a molar ratio of aluminum to titanium via appropriate supply of at least one aluminum precursor and at least one titanium precursor, the crystal systems in the slats in the direction of a cubic structure or Phase can be adjusted. If the titanium content is kept relatively high in comparison with the prior art, lamellae are formed, which alternately have cubic ⁇ _ ⁇ ⁇ ⁇ ⁇ and cubic ⁇ ⁇ ⁇ _ ⁇ ⁇ . In one of the alternating lamellae one composition is approximately TiN, in the other approximately AIN.
- silicon is particularly suitable for this purpose.
- the contents of the replacing metals, such as silicon, may be limited to 20%, preferably 10%, in particular 7.5%, for example, in order to avoid the original formation of the lamellae too much to disturb.
- substituting metals such as chromium in small proportions gives the possibility of the properties of the
- Coating layer targeted in relation to application requirements it is possible for nitrogen to be partially replaced by oxygen and / or carbon, again provided that the crystal system is maintained. For example, a slight replacement of nitrogen with oxygen may be beneficial for certain machining applications. Again, it is necessary that the cubic crystal system set in the slats be maintained by the partial replacement of nitrogen with oxygen and / or carbon, thereby providing upper thresholds for possible replacement of the nitrogen.
- a molar Al / Ti ratio in the gas phase at least temporarily to a maximum of 3, 0, preferably at most 2.0, in particular at most 1, 5, is limited.
- a molar Al / Ti ratio in the gas phase at least temporarily to a maximum of 3, 0, preferably at most 2.0, in particular at most 1, 5, is limited.
- the formation of cubic ⁇ . ⁇ -lamellae (with higher Ti content than Al content) is favored, which grow in interplay with ⁇ . ⁇ -lamellae (with a higher Al content than Ti content) the first type of lamellae is cubic and the second type of lamellae imposes this cubic structure or the crystal system.
- the lamellae can also be varied in thickness by setting a molar ratio of aluminum to titanium. It is preferred that the lamellae are deposited with a lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm. In particular in the range from about 8 nm to 13 nm, excellent coating layers with lamellae are produced, which are exclusively cubic at least in areas of the coating layer.
- the at least one coating layer of essentially aluminum, titanium and nitrogen with an average composition ⁇ ⁇ ⁇ _ ⁇ ⁇ and from a gas phase containing aluminum trichloride, titanium tetrachloride and ammonia is deposited. It is understood that in addition carrier gases such as nitrogen and / or Hydrogen can be used. Although in principle it is possible to work with one precursor each for aluminum and one precursor for titanium, it goes without saying that, if required, a plurality of precursors for the individual metals may also be used
- Reactive gas are added to incorporate chromium or silicon in the coating layer.
- chromium or silicon may be provided to replace aluminum and / or titanium.
- the at least one coating layer of essentially aluminum, titanium and nitrogen having an average composition ⁇ ⁇ ⁇ _ ⁇ ⁇ with 0.70 ⁇ x ⁇ 0.90, preferably 0.75 ⁇ x ⁇ 0.85 deposited becomes.
- Structures of the general formula ⁇ ⁇ ⁇ _ ⁇ ⁇ with aluminum contents as high as possible in order to maximize oxidation resistance, may according to the invention deliberately provided a slightly lower relative content of aluminum in the coating layer without an oxidation resistance would be disadvantageously reduced.
- the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited in a CVD method, wherein a pressure of 10 mbar to 80 mbar, in particular 20 mbar to 50 mbar, can be set.
- the adjustment of the pressure takes place by appropriate supply of the reaction gases or precursors together with carrier gases.
- a temperature control is selected so that the at least one coating layer of substantially aluminum, titanium and nitrogen is deposited at a temperature of about 750 ° C to 850 ° C.
- the desired configuration of the lamellae with cubic structure can be readily adjusted by varying the molar proportions of aluminum and titanium in the reaction gas.
- the at least one coating layer of essentially aluminum, titanium and nitrogen is generally deposited with a thickness of 1 ⁇ m to 20 ⁇ m, in particular 3 ⁇ m to 8 ⁇ m. If the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited on a suitable substrate such as sapphire, an epitaxial deposition can take place.
- any objects can be coated by a method according to the invention, this is preferably when coating a
- An article of a hard metal for use in particular a
- Cutting insert like an indexable insert.
- Substantially aluminum, titanium and nitrogen may be the only coating layer applied to an article. Especially with a coating of
- a multilayer coating As the first coating layer, a bonding layer of TiN, preferably with a thickness of less than 1, 0 ⁇ deposited.
- the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited on a coating layer of TiCN.
- the coating layer of TiCN is preferably a medium temperature TiCN (MT-TiCN) coating layer, as known in the art.
- MT-TiCN medium temperature TiCN
- Such a TiCN coating layer has a stalk-like structure extending perpendicularly from the surface of the substrate.
- On such a coating layer can be a coating layer in
- a method according to the invention can be carried out particularly efficiently if, in the deposition of a first coating layer and subsequent deposition, each one further deposition layer is lowered or held a deposition temperature respectively.
- a substrate or object on which a coating is produced can first be brought to a specific desired temperature, after which the deposition of the coating with several coating layers is started. Since after the deposition of the first coating layer no more heating is required, the application of a coating with multiple coating layers can be done relatively quickly and thus in an economical manner.
- Coating layer of substantially aluminum, titanium and nitrogen with a lamellar structure is provided within this coating layer, all
- Coating layers in the temperature window of 750 ° C to 900 ° C are deposited. Since the temperature window for the deposition of all coating layers is already relatively narrow and thus only a short time for the cooling to create the next
- the coating layer has to be awaited or, if appropriate, can also be worked at the same temperature, the result is an extremely rapid production of a coating with several coating layers.
- the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited by means of a CVD method.
- Coating layers provided, these are also conveniently deposited by means of a CVD method.
- the further object of the invention is achieved by a coating of the aforementioned type, wherein the lamellae of different chemical composition are each formed with a cubic structure, while replacing the cubic structure aluminum and titanium partially replaced by other metals and nitrogen by oxygen and / or carbon could be.
- Lamellas which in turn are part of a coating layer, excellent
- the lamellae are preferably formed with the lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm.
- Lamella periodicity can be adjusted during production by changing the supplied contents of a titanium precursor at a fixed content of an aluminum precursor.
- Lamella periodicity preferably about 8 nm to 13 nm, has proven to be particularly favorable for a high hardness.
- a lamellar periodicity a thickness of the sequence of two lamellae of different chemical composition is seen, as they are visible in a transmission electron microscope.
- the at least one coating layer of essentially aluminum, titanium and nitrogen may have an average composition ⁇ ⁇ ⁇ _ ⁇ ⁇
- the at least one coating layer of essentially aluminum, titanium and nitrogen can have a thickness of 1 ⁇ m to 20 ⁇ m, in particular 3 ⁇ m to 8 ⁇ m.
- epitaxial growth is possible in the at least one substantially aluminum, titanium and nitrogen coating layer.
- the coating is constructed in multiple layers. If the cutting insert is a hard metal, but also in other cases, a
- Bonding layer be useful as a first coating layer.
- Coating layer or bonding layer can then several more
- Coating layers are deposited. For the coating layer from im
- Substantial aluminum, titanium and nitrogen have proved to be useful here, that it is deposited on a coating layer of TiCN, usually MT-TiCN. It is possible that the coating layer of TiCN is deposited directly on the coating layer of TiN. But it is also possible that between several more coating layers are deposited. It is also possible that several coating layers of essentially aluminum, titanium and nitrogen are deposited in interplay with other coating layers and / or an outer coating layer terminating the coating, for example of TiN, Al 2 0 3 or diamond is provided. According to the illustrated advantages, a cutting tool such as
- Fig. 1 shows a basic structure of a coating on an object
- FIG. 2 shows a photograph with a transmission electron microscope (TEM);
- FIG. 3 is a diffraction diagram for recording according to FIG. 2;
- Fig. 5 is a graph of hardness and modulus of elasticity
- Fig. 6 is a TEM photograph
- FIG. 7 is an illustration of Polfiguren.
- an inventive article 1 is shown schematically.
- Article 1 is usually formed from a sintered cemented carbide consisting of carbides and / or carbonitrides of tungsten, titanium, niobium or other metals and a binder metal selected from the group cobalt, nickel and / or iron.
- a binding metal content is usually up to 10 wt .-%.
- the article 1 consists of up to 10% by weight of cobalt and / or other binder metals, with the remainder tungsten carbide and up to 5% by weight of further carbides and / or carbonitrides of other metals.
- coating layer 3 is deposited from TiN.
- the coating layer 3 generally has a thickness of less than 2 ⁇ , preferably 0.4 to 1, 2 ⁇ , on.
- a coating layer 4 of TiCN serving as an intermediate layer is deposited.
- This coating layer 4 is an MT-TiCN coating layer.
- Such a coating layer 4 generally has a columnar structure with columnar crystals, which are aligned substantially parallel to the surface normal to the object 1.
- On the coating layer 4 is finally another coating layer 4 of TiCN serving as an intermediate layer.
- Coating layer 5 deposited.
- the coating layer 5 is formed essentially of aluminum, titanium and nitrogen and deposited by a CVD method. Depending on the method used or the gases used, smaller amounts of chlorine and oxygen may also be present in the coating layer 5. The rest, too
- Coating layers 3, 4 may be deposited by a CVD method.
- the article 1 may in particular be a cutting insert such as an indexable insert.
- the deposition takes place from a gas consisting of nitrogen, hydrogen, acetonitrile and titanium tetrachloride.
- the corresponding process temperature and the use of acetonitrile as carbon or nitrogen source ensures formation of the interlayer with columnar growth or stem-like crystals of TiCN.
- the TiCN coating layer in this case has cross-sectionally elongated crystals, which are preferably parallel, at least
- Object 1 run.
- a good bonding of the subsequently deposited coating layer 5 with an average composition ⁇ ⁇ ⁇ _ ⁇ ⁇ results.
- the TiCN coating layer have an average composition TiC a . a with a in the range of 0.3 to 0.8, in particular 0.4 to 0.6, having.
- the coating layer 5 is applied with aluminum, titanium and nitrogen, for which the temperature is about 800 ° C to 830 ° C is lowered.
- the coating layer 5 which is but need not be an outermost coating layer, is made up of a gas containing aluminum trichloride, nitrogen, hydrogen, titanium tetrachloride, and a separately supplied mixture of ammonia and nitrogen.
- each a process temperature can be lowered, which is extremely economical and allows rapid creation of the coating 2 on the cutting insert.
- Coating layer 5 is preferably deposited at a pressure of 20 mbar to 80 mbar, in particular 25 mbar to 55 mbar, wherein the pressure over the
- FIG. 2 shows a TEM image of a coating structure in which a gradient layer AITiN has been applied to a cemented carbide and has been applied in principle as described above, although the content of the titanium precursor is steadily increased and that of the aluminum precursor constant was held.
- the gradient layer starts with AI 90 Ti 10 N and ends with AI 7 oTi 3 oN.
- the structure known from WO 2013/134796 A1 initially forms with alternating lamellae at even lower levels of the titanium precursor
- Nanometer range can be adjusted.
- the lamella periodicity is approx. 9 nm.
- FIG. 4 shows an X-ray diffractogram of a coating layer 5 from which, upon evaluation, it can be seen that a coating layer 5 with a cubic structure is formed and hexagonal phases can not be detected, which confirms the results from FIG. 3 for the gradient layer.
- a coating layer 5 surprisingly not only has a high hardness, but also a good toughness.
- the gradient layer in the area of the exclusively cubic design has a hardness as well as a toughness
- FIG. 6 shows a high-resolution TEM image of a coating layer 5, which was produced as described above.
- the formed lamellae are visible, which have a Lamellenperiodiztician of a few nanometers.
- the coating layer 5 is not only particularly resistant to oxidation and formed with high hardness and toughness, but also very temperature resistant. Thermal continuous loads at 950 ° C to 1050 ° C for one hour showed that cracks occur in carbide substrates from 1000 ° C, whereas a coating layer 5 withstands the thermal stress apart from the simultaneous demolition with hard metal parts.
- a coating layer 5 is deposited on a suitable substrate such as sapphire, an epitaxial growth can also take place, which can be deduced from the pole figures in FIG. 7, which relate to a coating layer 5 deposited directly on sapphire.
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MX2017005895A MX2017005895A (es) | 2015-01-15 | 2015-11-03 | Metodo para recubrir un objeto y recubrimiento producido mediante el mismo. |
BR112017002732-1A BR112017002732B1 (pt) | 2015-01-15 | 2015-11-03 | Processo para revestimento de um objeto, revestimento preparado pelo mesmo e objeto |
CN201580073689.3A CN107109640B (zh) | 2015-01-15 | 2015-11-03 | 用于盖覆物体的方法以及由此生产的盖覆物 |
EP15798310.7A EP3245314A1 (de) | 2015-01-15 | 2015-11-03 | Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung |
JP2017506997A JP2018504515A (ja) | 2015-01-15 | 2015-11-03 | 対象物をコーティングする方法およびそれにより生成されたコーティング |
US15/543,781 US10597776B2 (en) | 2015-01-15 | 2015-11-03 | Process for coating an article and coating produced thereby |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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ATA50025/2015 | 2015-01-15 | ||
ATA50025/2015A AT516062B1 (de) | 2015-01-15 | 2015-01-15 | Verfahren zum Beschichten eines Gegenstandes und damit hergestellte Beschichtung |
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WO2016112417A1 true WO2016112417A1 (de) | 2016-07-21 |
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PCT/AT2015/050277 WO2016112417A1 (de) | 2015-01-15 | 2015-11-03 | Verfahren zum beschichten eines gegenstandes und damit hergestellte beschichtung |
Country Status (8)
Country | Link |
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US (1) | US10597776B2 (de) |
EP (1) | EP3245314A1 (de) |
JP (1) | JP2018504515A (de) |
CN (1) | CN107109640B (de) |
AT (1) | AT516062B1 (de) |
BR (1) | BR112017002732B1 (de) |
MX (1) | MX2017005895A (de) |
WO (1) | WO2016112417A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9636750B2 (en) | 2012-03-14 | 2017-05-02 | Boehlerit Gmbh & Co.Kg. | Coated body and method for coating a body |
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JP6565092B1 (ja) * | 2018-03-22 | 2019-08-28 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
WO2019181133A1 (ja) * | 2018-03-22 | 2019-09-26 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
KR102350221B1 (ko) | 2018-03-22 | 2022-01-14 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | 표면 피복 절삭 공구 및 그 제조 방법 |
EP3769869A4 (de) | 2018-03-22 | 2021-12-29 | Sumitomo Electric Hardmetal Corp. | Oberflächenbeschichtetes schneidewerkzeug und verfahren zu seiner herstellung |
JP6565091B1 (ja) * | 2018-03-22 | 2019-08-28 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
WO2019181134A1 (ja) * | 2018-03-22 | 2019-09-26 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
CN111971138B (zh) * | 2018-03-22 | 2023-02-21 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
EP3935202A1 (de) * | 2019-03-07 | 2022-01-12 | Oerlikon Surface Solutions AG, Pfäffikon | Tm-al-o-n-beschichtungsschichten mit erhöhter thermischer stabilität |
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- 2015-01-15 AT ATA50025/2015A patent/AT516062B1/de active
- 2015-11-03 CN CN201580073689.3A patent/CN107109640B/zh active Active
- 2015-11-03 US US15/543,781 patent/US10597776B2/en active Active
- 2015-11-03 MX MX2017005895A patent/MX2017005895A/es unknown
- 2015-11-03 JP JP2017506997A patent/JP2018504515A/ja active Pending
- 2015-11-03 WO PCT/AT2015/050277 patent/WO2016112417A1/de active Application Filing
- 2015-11-03 EP EP15798310.7A patent/EP3245314A1/de active Pending
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Cited By (4)
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---|---|---|---|---|
US9636750B2 (en) | 2012-03-14 | 2017-05-02 | Boehlerit Gmbh & Co.Kg. | Coated body and method for coating a body |
DE102019103363A1 (de) * | 2019-02-11 | 2020-08-13 | Oerlikon Surface Solutions Ag | Beschichtetes Werkzeug für die Bearbeitung von schwer zu bearbeitenden Materialien |
PL243414B1 (pl) * | 2019-11-22 | 2023-08-21 | Can Pack Spolka Akcyjna | Sposób i urządzenie do powlekania pojemnika metalowego |
WO2023164731A1 (de) | 2022-03-03 | 2023-09-07 | Boehlerit Gmbh & Co.Kg. | Verfahren zur herstellung einer beschichtung auf einem objekt und entsprechend hergestellter beschichteter körper |
Also Published As
Publication number | Publication date |
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AT516062A4 (de) | 2016-02-15 |
BR112017002732B1 (pt) | 2022-12-20 |
CN107109640B (zh) | 2019-11-01 |
AT516062B1 (de) | 2016-02-15 |
MX2017005895A (es) | 2017-11-08 |
BR112017002732A2 (pt) | 2017-12-19 |
US10597776B2 (en) | 2020-03-24 |
JP2018504515A (ja) | 2018-02-15 |
US20180023194A1 (en) | 2018-01-25 |
CN107109640A (zh) | 2017-08-29 |
EP3245314A1 (de) | 2017-11-22 |
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