EP2960519A1 - Siegbahn stage - Google Patents

Siegbahn stage Download PDF

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Publication number
EP2960519A1
EP2960519A1 EP15174030.5A EP15174030A EP2960519A1 EP 2960519 A1 EP2960519 A1 EP 2960519A1 EP 15174030 A EP15174030 A EP 15174030A EP 2960519 A1 EP2960519 A1 EP 2960519A1
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EP
European Patent Office
Prior art keywords
pump
stator
rotor
active surface
active
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Granted
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EP15174030.5A
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German (de)
French (fr)
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EP2960519B1 (en
Inventor
Mirko Mekota
Jan Hofmann
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2960519A1 publication Critical patent/EP2960519A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the present invention relates to a Siegbahncut a vacuum pump, in particular a turbomolecular pump or a side channel pump, having a stator and a rotor member, each having one of two opposing pump-active surfaces, wherein at least the pump-active surface of the stator comprises a structured surface. It further relates to a vacuum pump, in particular turbomolecular pump or side channel pump, with at least one such Siegbahncut and a method for producing such Siegbahncut.
  • Vacuum pumps are used in various technical processes to create a vacuum necessary for the respective process.
  • the victory track stages used in such vacuum pumps are provided in particular as pumping stages and / or for the separation of adjoining pumping spaces.
  • the previously known victory track stages consist of a planar rotor disk which faces a stator disk provided with a spiral structure.
  • the opposing pump-active surfaces of the stator and the rotor member are always designed as a flat, perpendicular to the rotor axis surfaces.
  • the spiral geometry is varied accordingly. If the spiral geometry is produced by material removing machining and, in particular, machining, this results in the disadvantage that a respective spiral groove may have to be traversed several times, for example with a milling cutter, in order to produce variable groove cross sections.
  • the invention has for its object to provide a Siegbahncut of the type mentioned above, which is easier and cheaper to produce considering different vacuum requirements.
  • a cost-effectively manufacturable vacuum pump as well as a suitable method for producing the Siegbahncut of the type mentioned are given.
  • the Siegbahnk invention is characterized in particular by the fact that at least the pump-active surface of the stator member comprises a structured surface and the opposite pump-active surfaces of the stator and the rotor member are not planar.
  • a structured surface is to be understood as meaning a surface which comprises a pump-active structure for conveying the gas to be pumped.
  • a surface comprises at least one depression which forms a conveying channel or a conveying structure for the gas to be pumped.
  • the conveying channel or the conveying structure can be provided in the form of a groove.
  • the groove may have a helical course and extend in particular in a direction perpendicular to the axis of rotation of the relevant pump-active surface level.
  • the groove can also be formed in a plane extending obliquely to the axis of rotation.
  • a structured surface may include two or more interleaved spiral grooves.
  • the groove cross-section may for example be rectangular, trapezoidal or triangular. Furthermore, the groove cross-section may be U-shaped.
  • the lateral groove walls are preferably oriented parallel to the axis of rotation of the respective pump-active surface.
  • the groove bottom can lie at least substantially in a plane perpendicular to the axis of rotation of the relevant pump-active surface plane. It is also conceivable that the floors of different, in particular spiral, grooves lie in different planes. The angle which a respective one of these planes encloses with the axis of rotation of the relevant pump-active surface can also deviate from 90 °.
  • planar it is meant herein that all points of a pump active surface lie on a single plane, with points on boundary surfaces of depressions optionally formed in the pump active surface not being taken into account, i. a planar surface does not become a non-planar surface by forming recesses in the planar surface.
  • the groove height of the structured surface of the relevant pump-active surface can also change, so that a further degree of freedom results for the setting of a respective required groove cross-section in addition to the groove width.
  • the groove height of a respective pump-active surface structure can now be varied accordingly instead of or in addition to the groove width.
  • a respective pump-active surface structure can thus be produced, for example, with a constant groove width, which considerably simplifies their production.
  • the stator member is preferably supported by or formed by a static part of the vacuum pump, for example the pump housing or a partition wall.
  • the rotor member is preferably carried by the rotor shaft and mounted in particular rotationally fixed to the rotor shaft.
  • the opposing pump-active surfaces of the stator and the rotor member may in particular have an at least substantially complementary shape.
  • the gap formed between the pump-active surfaces may, for example, have the same size, but alternatively, e.g. also be slightly larger radially outward.
  • the opposing pump-active surfaces of the stator and the rotor member with respect to the rotor axis each have a rotationally symmetrical shape.
  • At least one of the pump-active surfaces may have a conical shape or a curved shape.
  • the opposing pump-active surfaces of the stator element and of the rotor element each have a conical shape.
  • the pump-active surface of the rotor element has a conically tapered conical shape towards the pump-active surface of the stator element, and the pump-active surface of the stator element has a conical shape widening toward the pump-active surface of the rotor element.
  • a reverse embodiment of the opposite pump-active surfaces is conceivable.
  • stator element and / or the rotor element with their pump-active surfaces form relatively flat conical shapes, ie the cone angle-based on a plane perpendicular to the rotor axis - is relatively small. Possible values for the cone angles are given below.
  • the pump-active surface of the stator element encloses an angle ⁇ between 1 ° and 20 °, preferably between 1 ° and 10 °, in particular between 2 ° and 7 °, with a plane perpendicular to the rotor axis.
  • angles ⁇ and ⁇ ' are substantially equal.
  • essentially the same size is to be understood in particular a deviation of the two angles ⁇ , ⁇ 'from each other of not more than about 2 °, preferably not more than about 1 °, in particular not more than about 0.5 ° , Particularly preferably, the angles ⁇ and ⁇ 'are the same size.
  • the opposite pump-active surfaces of the stator and the rotor member each have a curved shape.
  • the pump-active surface of the rotor element preferably has a convex shape curved toward the pump-active surface of the stator element and the pump-active surface of the stator element has a concave shape curved away from the pump-active surface of the rotor element.
  • a reverse embodiment of the opposite pump-active surfaces is conceivable.
  • At least one of the opposing pump-active surfaces of the stator and the rotor organ has a structured surface with a spiral structure. It is particularly advantageous if at least one of the opposing pump-active surfaces of the stator and the rotor member is provided with at least one spiral groove, in particular of constant width, whereby the production of the pump-active structure is simplified.
  • a spiral groove bounding side walls parallel to the rotor axis.
  • embodiments are also conceivable in which only one of the two groove walls extends parallel to the rotor axis.
  • a structured surface may be provided with two or more spiral grooves, wherein only one spiral groove has side walls which run parallel to the rotor axis.
  • the bottom of the spiral groove can lie in a plane perpendicular to the rotor axis. If it is a textured surface with two or more spiral grooves, the bottoms of the individual grooves may be either on a common plane or at different levels. In principle, the planes can also enclose an angle deviating from 90 ° with the rotor axis.
  • the adaptation of the groove cross-section to the respective vacuum-technical requirements can be carried out in the present case by a corresponding variation of the configuration or curvature of the opposite pump-active surfaces, which can bring different Nut Eckn with it, which different groove cross-sections can be achieved.
  • a respective spiral can for example be milled in a single pass.
  • the pump-active surface of the stator is at least substantially smooth.
  • the rotor member can be produced in this case with very little effort, at the same time resulting in a structuring disadvantageous weakening of the rotor member is avoided.
  • the rotor member is therefore without further able to withstand the centrifugal loads occurring during operation of the vacuum pump, without excessive voltages that would reduce the reliability of the vacuum pump.
  • an imbalance of the rotor caused by the rotor element is largely avoided by an at least substantially smooth design of the pump-active surface of the rotor element.
  • the vacuum pump according to the invention which may in particular be a turbomolecular pump or side channel pump, is characterized in that it comprises at least one Siegbahn stage according to the invention.
  • the inventive method for producing a Siegbahncut a vacuum pump, in particular a turbomolecular pump or a side channel pump is characterized accordingly by the fact that a stator and a rotor member are provided, each having one of two opposing pump-active surfaces, the pump-active surface of the stator with a structured surface is provided and the opposite pump-active surfaces of the stator and the rotor member are not configured planar.
  • the opposing pump-active surfaces of the stator element and of the rotor element are preferably designed with an at least substantially complementary shape.
  • the opposing pump-active surfaces of the stator and the rotor member are each configured with a conical shape or in each case with a curved shape.
  • Fig. 1 shows a schematic representation of a provided with a spiral structure 10 flat stator 12 of a conventional Siegbahnlie, which also consists of one of these stator disc opposite (not shown) planar rotor disk.
  • the opposing pump-active surfaces of the stator 12 and the rotor disk of the known Siegbahncut are each flat and perpendicular to the rotor axis. If, for example, the spiral geometry is to be produced by machining, a respective spiral groove may have to be traversed several times with a milling cutter in order to achieve narrowing or widening groove cross sections.
  • Such a victor track stage 14 may be provided in a vacuum pump, in particular a turbomolecular pump or a side channel pump, for example as a pumping stage and / or for blocking between two pump chambers.
  • the victor track stage 14 comprises a stator element 16 and a rotor element 18, each of which has one of two opposing pump-active surfaces 20, 22.
  • the stator member 16 may in particular be supported by or formed by a static part of the vacuum pump, for example the pump housing or a partition wall.
  • the rotor member 18 may in particular be carried by a rotor shaft 24 and in particular rotatably mounted on the rotor shaft 24.
  • the pump-active surface 20 of the stator member 16 comprises a structured surface 30 while the pump-active surface 22 of the rotor member 18 is smooth, to mean by "smooth" herein relative to the patterning of the surface 30, i. insofar as the surface 22 of the rotor member 18 is not structured.
  • the pump-active surface 22 of the rotor member 18 comprises such a structured surface 30.
  • the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 are not planar.
  • these opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 have an at least substantially complementary shape.
  • the height of the gap 26 formed between these pump-active surfaces 20, 22 may for example also increase slightly radially outwards, ie the gap 26 does not have to have the same height everywhere, but such a configuration is possible.
  • Fig. 2 can also be removed, the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 with respect to the rotor axis 28 each have a rotationally symmetrical shape.
  • the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 each have a particular conical shape, in the present case, the pump-active surface 22 of the rotor member 18 to a pumping active surface 20 of the stator 16 towards tapering conical shape and the pump-active surface 20 of the stator 16 has a conically expanding to the pumping surface 22 of the rotor member 18 conical shape.
  • Both angles ⁇ , ⁇ ' are each preferably in a range between 2 ° and 7 ° and are substantially the same size.
  • the schematic representation according to Fig. 3 In this respect, it is relatively heavily oversubscribed in order to illustrate the actually only slightly conical shape of the pump-active surfaces 20, 22, ie the rotor element 18 and the stator element 16 continue to have substantially a disc-shaped shape despite the conical surfaces 20, 22.
  • the plane 36, to which the angle ⁇ is measured, is according to Fig. 3 in the same plane as the bottom 33 of the spiral groove 32, ie the bottom 33 lies in a plane perpendicular to the rotor axis 28.
  • the side walls 31 of the spiral groove 32 are formed parallel to the rotor axis 28 in this embodiment.
  • the spiral groove 32 has a substantially rectangular cross-section.
  • the groove cross-section for example, U-shaped is trained.
  • the in particular in a single, preferably perpendicular to the rotor axis 28 extending plane bottom of the groove is then formed in each groove cross-section of the lowest point of the groove, ie from the vertex of the "U".
  • the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 each have a curved shape
  • the pump-active surface 22 of the rotor member 18 to a pump-active surface 20 of the Statororgans 16 convex convex shape and the pump-active surface 20 of the stator 16 may have a curved away from the pumping active surface 22 of the rotor member 18 concave shape.
  • the pump-active surface 20 of the stator 16 has a spiral structure, which in the present case, for example, comprises at least one spiral groove 32 of constant width.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Eine Siegbahnstufe einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, umfasst ein Statororgan und ein Rotororgan, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen aufweisen, wobei zumindest die pumpaktive Flächen des Statororgans eine strukturierte Oberfläche umfasst. Dabei sind die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans nicht planar.A victory rail stage of a vacuum pump, in particular a turbomolecular pump or a side channel pump, comprises a stator element and a rotor element, each having one of two opposing pump-active surfaces, wherein at least the pump-active surfaces of the stator member comprises a structured surface. The opposing pump-active surfaces of the stator and the rotor member are not planar.

Description

Die vorliegende Erfindung betrifft eine Siegbahnstufe einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, mit einem Statororgan und einem Rotororgan, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen aufweisen, wobei zumindest die pumpaktive Fläche des Statororgans eine strukturierte Oberfläche umfasst. Sie betrifft ferner eine Vakuumpumpe, insbesondere Turbomolekularpumpe oder Seitenkanalpumpe, mit wenigstens einer solchen Siegbahnstufe sowie ein Verfahren zur Herstellung einer derartigen Siegbahnstufe.The present invention relates to a Siegbahnstufe a vacuum pump, in particular a turbomolecular pump or a side channel pump, having a stator and a rotor member, each having one of two opposing pump-active surfaces, wherein at least the pump-active surface of the stator comprises a structured surface. It further relates to a vacuum pump, in particular turbomolecular pump or side channel pump, with at least one such Siegbahnstufe and a method for producing such Siegbahnstufe.

Vakuumpumpen werden in unterschiedlichen technischen Prozessen eingesetzt, um ein für den jeweiligen Prozess notwendiges Vakuum zu erzeugen. Dabei sind die in solchen Vakuumpumpen eingesetzten Siegbahnstufen insbesondere als Pumpstufen und/oder zur Trennung aneinandergrenzender Pumpräume vorgesehen.Vacuum pumps are used in various technical processes to create a vacuum necessary for the respective process. In this case, the victory track stages used in such vacuum pumps are provided in particular as pumping stages and / or for the separation of adjoining pumping spaces.

Die bisher bekannten Siegbahnstufen bestehen aus einer planen Rotorscheibe, die einer mit einer Spiralstruktur versehenen Statorscheibe gegenübersteht. Dabei sind die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans bisher stets als ebene, zur Rotorachse senkrechte Flächen ausgeführt. Zur Erzielung der jeweils gewünschten vakuumtechnischen Eigenschaften bzw. zur Erzeugung entsprechender Kanalgrößen der Siegbahnstufe wird die Spiralgeometrie entsprechend variiert. Wird die Spiralgeometrie durch eine Material entfernende Bearbeitung und insbesondere spanend erzeugt, so ergibt sich damit der Nachteil, dass eine jeweilige Spiralnut gegebenenfalls mehrfach beispielsweise mit einem Fräser abgefahren werden muss, um variable Nutquerschnitte zu erzeugen.The previously known victory track stages consist of a planar rotor disk which faces a stator disk provided with a spiral structure. In this case, the opposing pump-active surfaces of the stator and the rotor member are always designed as a flat, perpendicular to the rotor axis surfaces. To achieve the respectively desired vacuum technical properties or to generate corresponding channel sizes of the victor track stage, the spiral geometry is varied accordingly. If the spiral geometry is produced by material removing machining and, in particular, machining, this results in the disadvantage that a respective spiral groove may have to be traversed several times, for example with a milling cutter, in order to produce variable groove cross sections.

Der Erfindung liegt die Aufgabe zugrunde, eine Siegbahnstufe der eingangs genannten Art anzugeben, die unter Berücksichtigung unterschiedlicher vakuumtechnischer Anforderungen einfacher und entsprechend kostengünstiger herstellbar ist. Zudem sollen eine entsprechend kostengünstiger herstellbare Vakuumpumpe sowie ein geeignetes Verfahren zur Herstellung der Siegbahnstufe der eingangs genannten Art angegeben werden.The invention has for its object to provide a Siegbahnstufe of the type mentioned above, which is easier and cheaper to produce considering different vacuum requirements. In addition, a cost-effectively manufacturable vacuum pump as well as a suitable method for producing the Siegbahnstufe of the type mentioned are given.

Diese Aufgabe wird erfindungsgemäß durch eine Siegbahnstufe mit den Merkmalen des Anspruchs 1, eine Vakuumpumpe mit den Merkmalen des Anspruchs 12 sowie ein Verfahren mit den Merkmalen des Anspruchs 13 gelöst. Bevorzugte Ausführungsformen der erfindungsgemäßen Siegbahnstufe sowie bevorzugte Ausgestaltungen des erfindungsgemäßen Verfahrens sind in den Unteransprüchen angegeben.This object is achieved by a Siegbahnstufe with the features of claim 1, a vacuum pump with the features of claim 12 and a method having the features of claim 13. Preferred embodiments of the Siegbahnstufe invention and preferred embodiments of the method according to the invention are specified in the dependent claims.

Die erfindungsgemäße Siegbahnstufe zeichnet sich insbesondere dadurch aus, dass zumindest die pumpaktive Fläche des Statororgans eine strukturierte Oberfläche umfasst und die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans nicht planar sind.The Siegbahnstufe invention is characterized in particular by the fact that at least the pump-active surface of the stator member comprises a structured surface and the opposite pump-active surfaces of the stator and the rotor member are not planar.

Unter einer strukturierten Oberfläche soll vorliegend eine Oberfläche verstanden werden, die eine pumpaktive Struktur zur Förderung des zu pumpenden Gases umfasst. Eine solche Oberfläche umfasst insbesondere zumindest eine Vertiefung, die einen Förderkanal bzw. eine Förderstruktur für das zu pumpende Gas bildet. Der Förderkanal oder die Förderstruktur kann in Form einer Nut vorgesehen sein. Die Nut kann einen spiralförmigen Verlauf aufweisen und insbesondere in einer zur Rotationsachse der betreffenden pumpaktiven Fläche senkrechten Ebene verlaufen. Die Nut kann aber auch in einer schräg zur Rotationsachse verlaufenden Ebene ausgebildet sein. Ferner kann eine strukturierte Oberfläche zwei oder mehrere ineinander liegende spiralförmige Nuten umfassen. Denkbar sind auch konzentrisch angeordnete Nuten, die untereinander durch Kanäle verbunden sind, so dass das zu pumpende Gas von einer Nut zur nächsten gelangen kann. Der Nutquerschnitt kann beispielsweise rechteckig, trapezförmig oder dreieckförmig sein. Ferner kann der Nutquerschnitt U-förmig ausgebildet sein. Die seitlichen Nutwände sind vorzugsweise parallel zur Rotationsachse der betreffenden pumpaktiven Fläche orientiert. Der Nutboden kann zumindest im Wesentlichen in einer zur Rotationsachse der betreffenden pumpaktiven Fläche senkrechten Ebene liegen. Denkbar ist auch, dass die Böden verschiedener, insbesondere spiralförmiger, Nuten in unterschiedlichen Ebenen liegen. Der Winkel, den eine jeweilige dieser Ebenen mit der Rotationsachse der betreffenden pumpaktiven Fläche einschliesst, kann auch von 90° abweichen.In the present case, a structured surface is to be understood as meaning a surface which comprises a pump-active structure for conveying the gas to be pumped. In particular, such a surface comprises at least one depression which forms a conveying channel or a conveying structure for the gas to be pumped. The conveying channel or the conveying structure can be provided in the form of a groove. The groove may have a helical course and extend in particular in a direction perpendicular to the axis of rotation of the relevant pump-active surface level. However, the groove can also be formed in a plane extending obliquely to the axis of rotation. Further, a structured surface may include two or more interleaved spiral grooves. Are also conceivable concentrically arranged grooves which are interconnected by channels, so that the gas to be pumped can pass from one groove to the next. The groove cross-section may for example be rectangular, trapezoidal or triangular. Furthermore, the groove cross-section may be U-shaped. The lateral groove walls are preferably oriented parallel to the axis of rotation of the respective pump-active surface. The groove bottom can lie at least substantially in a plane perpendicular to the axis of rotation of the relevant pump-active surface plane. It is also conceivable that the floors of different, in particular spiral, grooves lie in different planes. The angle which a respective one of these planes encloses with the axis of rotation of the relevant pump-active surface can also deviate from 90 °.

Unter "planar" soll vorliegend verstanden werden, dass sämtliche Punkte einer pumpaktiven Oberfläche auf einer einzigen Ebene liegen, wobei Punkte auf Begrenzungsflächen von gegebenenfalls in der pumpaktiven Oberfläche ausgebildeten Vertiefungen nicht berücksichtigt werden, d.h. eine planare Fläche nicht dadurch zu einer nicht planaren Fläche wird, dass in der planaren Fläche Vertiefungen ausgebildet werden.By "planar" it is meant herein that all points of a pump active surface lie on a single plane, with points on boundary surfaces of depressions optionally formed in the pump active surface not being taken into account, i. a planar surface does not become a non-planar surface by forming recesses in the planar surface.

Mit einer nicht planaren Ausführung der pumpaktiven Flächen kann sich auch die Nuthöhe der strukturierten Oberfläche der betreffenden pumpaktiven Fläche ändern, so dass sich für die Einstellung eines jeweiligen erforderlichen Nutquerschnitts neben der Nutbreite ein weiterer Freiheitsgrad ergibt. Zur Berücksichtigung der jeweiligen vakuumtechnischen Anforderungen kann somit anstelle oder zusätzlich zur Nutbreite nunmehr auch die Nuthöhe einer jeweiligen pumpaktiven Oberflächenstruktur entsprechend variiert werden. Eine jeweilige pumpaktive Oberflächenstruktur kann also beispielsweise auch mit einer gleichbleibenden Nutbreite erzeugt werden, was deren Herstellung erheblich vereinfacht.With a non-planar design of the pump-active surfaces, the groove height of the structured surface of the relevant pump-active surface can also change, so that a further degree of freedom results for the setting of a respective required groove cross-section in addition to the groove width. To take account of the respective vacuum technical requirements, the groove height of a respective pump-active surface structure can now be varied accordingly instead of or in addition to the groove width. A respective pump-active surface structure can thus be produced, for example, with a constant groove width, which considerably simplifies their production.

Das Statororgan ist vorzugsweise von einem statischen Teil der Vakuumpumpe, zum Beispiel dem Pumpengehäuse oder einer Trennwand, getragen oder dadurch gebildet. Das Rotororgan ist vorzugsweise von der Rotorwelle getragen und insbesondere drehfest an der Rotorwelle angebracht.The stator member is preferably supported by or formed by a static part of the vacuum pump, for example the pump housing or a partition wall. The rotor member is preferably carried by the rotor shaft and mounted in particular rotationally fixed to the rotor shaft.

Die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans können insbesondere eine zumindest im Wesentlichen zueinander komplementäre Form besitzen. Dabei kann der zwischen den pumpaktiven Flächen gebildete Spalt beispielsweise die gleiche Größe aufweisen, alternativ jedoch z.B. auch radial nach außen leicht größer werden.The opposing pump-active surfaces of the stator and the rotor member may in particular have an at least substantially complementary shape. In this case, the gap formed between the pump-active surfaces may, for example, have the same size, but alternatively, e.g. also be slightly larger radially outward.

Vorteilhafterweise besitzen die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans bezüglich der Rotorachse jeweils eine rotationssymmetrische Form.Advantageously, the opposing pump-active surfaces of the stator and the rotor member with respect to the rotor axis each have a rotationally symmetrical shape.

Zumindest eine der pumpaktiven Flächen kann beispielsweise eine konische Form oder eine gewölbte Form besitzen.For example, at least one of the pump-active surfaces may have a conical shape or a curved shape.

Gemäß einer bevorzugten praktischen Ausführungsform der erfindungsgemäßen Siegbahnstufe besitzen die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans jeweils eine konische Form. Dabei besitzt zweckmäßigerweise die pumpaktive Fläche des Rotororgans eine sich zur pumpaktiven Fläche des Statororgans hin verjüngende konische Form und die pumpaktive Fläche des Statororgans eine sich zur pumpaktiven Fläche des Rotororgans hin erweiternde konische Form. Grundsätzlich ist jedoch auch eine umgekehrte Ausgestaltung der einander gegenüberliegenden pumpaktiven Flächen denkbar.According to a preferred practical embodiment of the victory track stage according to the invention, the opposing pump-active surfaces of the stator element and of the rotor element each have a conical shape. Expediently, the pump-active surface of the rotor element has a conically tapered conical shape towards the pump-active surface of the stator element, and the pump-active surface of the stator element has a conical shape widening toward the pump-active surface of the rotor element. In principle, however, a reverse embodiment of the opposite pump-active surfaces is conceivable.

Insbesondere bilden das Statororgan und/oder das Rotororgan mit ihren pumpaktiven Flächen relativ flache Konusformen, d.h. der Konuswinkel - bezogen auf eine senkrecht zur Rotorachse verlaufende Ebene - ist vergleichsweise klein. Mögliche Werte für die Konuswinkel sind nachstehend angegeben.In particular, the stator element and / or the rotor element with their pump-active surfaces form relatively flat conical shapes, ie the cone angle-based on a plane perpendicular to the rotor axis - is relatively small. Possible values for the cone angles are given below.

Vorzugsweise schliesst dabei die pumpaktive Fläche des Statororgans mit einer Ebene senkrecht zur Rotorachse einen Winkel α zwischen 1 ° und 20°, bevorzugt zwischen 1 ° und 10°, insbesondere zwischen 2° und 7° ein.Preferably, the pump-active surface of the stator element encloses an angle α between 1 ° and 20 °, preferably between 1 ° and 10 °, in particular between 2 ° and 7 °, with a plane perpendicular to the rotor axis.

Alternativ oder zusätzlich kann die pumpaktive Fläche des Rotororgans mit einer Ebene senkrecht zur Rotorachse einen Winkel α' zwischen 1 ° und 20°, bevorzugt 1 ° und 10°, insbesondere 2° und 7° einnehmen.Alternatively or additionally, the pump-active surface of the rotor member with a plane perpendicular to the rotor axis an angle α 'between 1 ° and 20 °, preferably 1 ° and 10 °, in particular 2 ° and 7 ° occupy.

Vorzugsweise sind die Winkel α und α' im Wesentlichen gleich groß. Unter "im Wesentlichen gleich groß" ist dabei insbesondere eine Abweichung der beiden Winkel α, α' voneinander von nicht mehr als ungefähr 2°, bevorzugt von nicht mehr als ungefähr 1°, insbesondere von nicht mehr als ungefähr 0,5°, zu verstehen. Besonders bevorzugt sind die Winkel α und α' gleich groß.Preferably, the angles α and α 'are substantially equal. By "essentially the same size" is to be understood in particular a deviation of the two angles α, α 'from each other of not more than about 2 °, preferably not more than about 1 °, in particular not more than about 0.5 ° , Particularly preferably, the angles α and α 'are the same size.

Gemäß einer weiteren vorteilhaften Ausführungsform der erfindungsgemäßen Siegbahnstufe besitzen die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans jeweils eine gewölbte Form. Dabei besitzt bevorzugt die pumpaktive Fläche des Rotororgans eine zur pumpaktiven Fläche des Statororgans hin gewölbte konvexe Form und die pumpaktive Fläche des Statororgans eine von der pumpaktiven Fläche des Rotororgans weg gewölbte konkave Form. Grundsätzlich ist jedoch auch eine umgekehrte Ausgestaltung der einander gegenüberliegenden pumpaktiven Flächen denkbar.According to a further advantageous embodiment of the Siegbahnstufe invention have the opposite pump-active surfaces of the stator and the rotor member each have a curved shape. In this case, the pump-active surface of the rotor element preferably has a convex shape curved toward the pump-active surface of the stator element and the pump-active surface of the stator element has a concave shape curved away from the pump-active surface of the rotor element. In principle, however, a reverse embodiment of the opposite pump-active surfaces is conceivable.

Vorteilhafterweise besitzt zumindest eine der einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans eine strukturierte Oberfläche mit einer Spiralstruktur. Dabei ist insbesondere von Vorteil, wenn zumindest eine der einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans mit wenigstens einer Spiralnut insbesondere konstanter Breite versehen ist, wodurch die Herstellung der pumpaktiven Struktur vereinfacht wird.Advantageously, at least one of the opposing pump-active surfaces of the stator and the rotor organ has a structured surface with a spiral structure. It is particularly advantageous if at least one of the opposing pump-active surfaces of the stator and the rotor member is provided with at least one spiral groove, in particular of constant width, whereby the production of the pump-active structure is simplified.

In einer bevorzugten Ausführungsform verlaufen eine Spiralnut begrenzende Seitenwände parallel zur Rotorachse. Es sind jedoch auch Ausgestaltungen denkbar, bei welchen nur eine der beiden Nutwände parallel zur Rotorachse verläuft. Ferner kann eine strukturierte Oberfläche mit zwei oder mehr Spiralnuten versehen sein, wobei nur eine Spiralnut Seitenwände aufweist, die parallel zur Rotorachse verlaufen.In a preferred embodiment, a spiral groove bounding side walls parallel to the rotor axis. However, embodiments are also conceivable in which only one of the two groove walls extends parallel to the rotor axis. Furthermore, a structured surface may be provided with two or more spiral grooves, wherein only one spiral groove has side walls which run parallel to the rotor axis.

Ferner kann der Boden der Spiralnut in einer zur Rotorachse senkrecht verlaufenden Ebene liegen. Handelt es sich um eine strukturierte Oberfläche mit zwei oder mehr Spiralnuten, können die Böden der einzelnen Nuten entweder auf einer gemeinsamen Ebene oder auf verschiedenen Ebenen liegen. Die Ebenen können grundsätzlich auch einen Winkel abweichend von 90° mit der Rotorachse einschließen.Furthermore, the bottom of the spiral groove can lie in a plane perpendicular to the rotor axis. If it is a textured surface with two or more spiral grooves, the bottoms of the individual grooves may be either on a common plane or at different levels. In principle, the planes can also enclose an angle deviating from 90 ° with the rotor axis.

Die Anpassung des Nutquerschnitts an die jeweiligen vakuumtechnischen Anforderungen kann im vorliegenden Fall durch eine entsprechende Variation der Ausgestaltung bzw. Krümmung der einander gegenüberliegenden pumpaktiven Flächen erfolgen, was unterschiedliche Nuthöhen mit sich bringen kann, womit unterschiedliche Nutquerschnitte erzielt werden können. Infolge der in einer möglichen Ausgestaltung gleichbleibenden Nutbreite kann eine jeweilige Spirale beispielsweise in einem einzigen Zug gefräst werden.The adaptation of the groove cross-section to the respective vacuum-technical requirements can be carried out in the present case by a corresponding variation of the configuration or curvature of the opposite pump-active surfaces, which can bring different Nuthöhen with it, which different groove cross-sections can be achieved. As a result of the groove width remaining the same in one possible embodiment, a respective spiral can for example be milled in a single pass.

Bevorzugt ist die pumpaktive Fläche des Statororgans zumindest im Wesentlichen glatt. Das Rotororgan ist in diesem Fall mit besonders geringem Aufwand herstellbar, wobei gleichzeitig eine sich durch eine Strukturierung ergebende nachteilige Schwächung des Rotororgans vermieden wird. Das Rotororgan ist daher ohne weiteres in der Lage, den während des Betriebs der Vakuumpumpe auftretenden Fliehkraftbelastungen Stand zu halten, ohne dass übermäßige Spannungen auftreten, die die Betriebssicherheit der Vakuumpumpe verringern würden. Ferner wird eine durch das Rotororgan hervorgerufene Unwucht des Rotors durch eine zumindest im Wesentlichen glatte Ausgestaltung der pumpaktiven Oberfläche des Rotororgans weitestgehend vermieden.Preferably, the pump-active surface of the stator is at least substantially smooth. The rotor member can be produced in this case with very little effort, at the same time resulting in a structuring disadvantageous weakening of the rotor member is avoided. The rotor member is therefore without further able to withstand the centrifugal loads occurring during operation of the vacuum pump, without excessive voltages that would reduce the reliability of the vacuum pump. Furthermore, an imbalance of the rotor caused by the rotor element is largely avoided by an at least substantially smooth design of the pump-active surface of the rotor element.

Die erfindungsgemäße Vakuumpumpe, bei der es sich insbesondere um eine Turbomolekularpumpe oder Seitenkanalpumpe handeln kann, zeichnet sich dadurch aus, dass sie zumindest eine erfindungsgemäße Siegbahnstufe umfasst.The vacuum pump according to the invention, which may in particular be a turbomolecular pump or side channel pump, is characterized in that it comprises at least one Siegbahn stage according to the invention.

Das erfindungsgemäße Verfahren zur Herstellung einer Siegbahnstufe einer Vakuumpumpe, insbesondere eine Turbomolekularpumpe oder einer Seitenkanalpumpe, zeichnet sich entsprechend dadurch aus, dass ein Statororgan und ein Rotororgan bereitgestellt werden, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen aufweisen, die pumpaktive Fläche des Statororgans mit einer strukturierten Oberfläche versehen wird und die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans nicht planar ausgestaltet werden.The inventive method for producing a Siegbahnstufe a vacuum pump, in particular a turbomolecular pump or a side channel pump is characterized accordingly by the fact that a stator and a rotor member are provided, each having one of two opposing pump-active surfaces, the pump-active surface of the stator with a structured surface is provided and the opposite pump-active surfaces of the stator and the rotor member are not configured planar.

Dabei werden die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans bevorzugt mit einer zumindest im Wesentlichen zueinander komplementären Form ausgestaltet.In this case, the opposing pump-active surfaces of the stator element and of the rotor element are preferably designed with an at least substantially complementary shape.

Vorteilhafterweise werden die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans jeweils mit einer konischen Form oder jeweils mit einer gewölbten Form ausgestaltet.Advantageously, the opposing pump-active surfaces of the stator and the rotor member are each configured with a conical shape or in each case with a curved shape.

Die Erfindung wird im Folgenden anhand eines Ausführungsbeispiels unter Bezugnahme auf die Zeichnung näher erläutert; in dieser zeigen:

Fig. 1
eine schematische Darstellung einer mit einer Spiralstruktur versehenen flachen Statorscheibe einer herkömmlichen Siegbahnstufe nach dem Stand der Technik,
Fig. 2
eine schematische Darstellung einer beispielhaften Ausführungsform einer erfindungsgemäßen Siegbahnstufe, und
Fig. 3
die Ausführungsform gemäß Fig. 2 unter besonderer Hervorhebung der Winkel α und α'.
The invention will be explained in more detail below with reference to an embodiment with reference to the drawing; in this show:
Fig. 1
1 is a schematic representation of a flat stator disk provided with a spiral structure of a conventional Siegbahnstufe according to the prior art,
Fig. 2
a schematic representation of an exemplary embodiment of a Siegbahnstufe invention, and
Fig. 3
the embodiment according to Fig. 2 with special emphasis on the angles α and α '.

Fig. 1 zeigt in schematischer Darstellung eine mit einer Spiralstruktur 10 versehene flache Statorscheibe 12 einer herkömmlichen Siegbahnstufe, die überdies aus einer dieser Statorscheibe gegenüberstehenden (nicht dargestellten) planaren Rotorscheibe besteht. Die einander gegenüberliegenden pumpaktiven Flächen der Statorscheibe 12 und der Rotorscheibe der bekannten Siegbahnstufe sind jeweils eben und senkrecht zur Rotorachse ausgeführt. Soll die Spiralgeometrie beispielsweise spanend erzeugt werden, so muss eine jeweilige Spiralnut gegebenenfalls mehrfach mit einem Fräser abgefahren werden, um sich verengende oder aufweitende Nutquerschnitte zu erzielen. Fig. 1 shows a schematic representation of a provided with a spiral structure 10 flat stator 12 of a conventional Siegbahnstufe, which also consists of one of these stator disc opposite (not shown) planar rotor disk. The opposing pump-active surfaces of the stator 12 and the rotor disk of the known Siegbahnstufe are each flat and perpendicular to the rotor axis. If, for example, the spiral geometry is to be produced by machining, a respective spiral groove may have to be traversed several times with a milling cutter in order to achieve narrowing or widening groove cross sections.

Fig. 2 zeigt in schematischer Darstellung eine beispielhafte Ausführungsform einer erfindungsgemäßen Siegbahnstufe 14. Eine solche Siegbahnstufe 14 kann in einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, beispielsweise als Pumpstufe und/oder zur Absperrung zwischen zwei Pumpenräumen vorgesehen sein. Fig. 2 Such a victor track stage 14 may be provided in a vacuum pump, in particular a turbomolecular pump or a side channel pump, for example as a pumping stage and / or for blocking between two pump chambers.

Die Siegbahnstufe 14 umfasst ein Statororgan 16 und ein Rotororgan 18, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen 20, 22 aufweisen.The victor track stage 14 comprises a stator element 16 and a rotor element 18, each of which has one of two opposing pump-active surfaces 20, 22.

Das Statororgan 16 kann insbesondere von einem statischen Teil der Vakuumpumpe, zum Beispiel dem Pumpengehäuse oder einer Trennwand, getragen oder dadurch gebildet sein. Das Rotororgan 18 kann insbesondere von einer Rotorwelle 24 getragen und insbesondere drehfest an der Rotorwelle 24 angebracht sein.The stator member 16 may in particular be supported by or formed by a static part of the vacuum pump, for example the pump housing or a partition wall. The rotor member 18 may in particular be carried by a rotor shaft 24 and in particular rotatably mounted on the rotor shaft 24.

Beim vorliegenden Ausführungsbeispiel umfasst die pumpaktive Fläche 20 des Statororgans 16 eine strukturierte Oberfläche 30, während die pumpaktive Fläche 22 des Rotororgans 18 glatt ist, wobei unter "glatt" hier relativ zu der Strukturierung der Oberfläche 30 zu verstehen, d.h. insofern die Fläche 22 des Rotororgans 18 nicht strukturiert ist. Grundsätzlich sind jedoch auch solche Ausführungen denkbar, bei denen zusätzlich die pumpaktive Fläche 22 des Rotororgans 18 eine solche strukturierte Oberfläche 30 umfasst.In the present embodiment, the pump-active surface 20 of the stator member 16 comprises a structured surface 30 while the pump-active surface 22 of the rotor member 18 is smooth, to mean by "smooth" herein relative to the patterning of the surface 30, i. insofar as the surface 22 of the rotor member 18 is not structured. In principle, however, such embodiments are also conceivable in which additionally the pump-active surface 22 of the rotor member 18 comprises such a structured surface 30.

Wie anhand der Fig. 2 zu erkennen ist, sind die einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 nicht planar.As based on the Fig. 2 can be seen, the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 are not planar.

Dabei besitzen diese einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 eine zumindest im Wesentlichen zueinander komplementäre Form. Die Höhe des zwischen diesen pumpaktiven Flächen 20, 22 gebildeten Spaltes 26 kann radial nach außen hin beispielsweise auch leicht zunehmen, d.h. der Spalt 26 muss nicht überall die gleiche Höhe besitzen, wobei eine solche Ausgestaltung aber möglich ist.In this case, these opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 have an at least substantially complementary shape. The height of the gap 26 formed between these pump-active surfaces 20, 22 may for example also increase slightly radially outwards, ie the gap 26 does not have to have the same height everywhere, but such a configuration is possible.

Wie der Fig. 2 ebenfalls entnommen werden kann, besitzen die einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 bezüglich der Rotorachse 28 jeweils eine rotationssymmetrische Form.Again Fig. 2 can also be removed, the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 with respect to the rotor axis 28 each have a rotationally symmetrical shape.

Wie dargestellt, können die einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 jeweils eine insbesondere konische Form besitzen, wobei im vorliegenden Fall die pumpaktive Fläche 22 des Rotororgans 18 eine sich zur pumpaktiven Fläche 20 des Statororgans 16 hin verjüngende konische Form und die pumpaktive Fläche 20 des Statororgans 16 eine sich zur pumpaktiven Fläche 22 des Rotororgans 18 hin erweiternde konische Form besitzt.As shown, the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 each have a particular conical shape, in the present case, the pump-active surface 22 of the rotor member 18 to a pumping active surface 20 of the stator 16 towards tapering conical shape and the pump-active surface 20 of the stator 16 has a conically expanding to the pumping surface 22 of the rotor member 18 conical shape.

Die Winkel α, α', welche die pumpaktive Fläche 20 des Statororgans 16 und die pumpaktive Fläche 22 des Rotororgans 18 jeweils in Bezug auf eine senkrecht zur Rotorachse 28 stehende Ebene 36, 36' einschließen, sind anhand von Fig. 3 verdeutlicht.The angles .alpha., .Alpha. ', Which enclose the pump-active surface 20 of the stator element 16 and the pump-active surface 22 of the rotor element 18 in each case with respect to a plane 36, 36' perpendicular to the rotor axis 28, are based on FIG Fig. 3 clarified.

Beide Winkel α, α' liegen jeweils vorzugsweise in einem Bereich zwischen 2° und 7° und sind im Wesentlichen gleich groß. Die schematische Darstellung gemäß Fig. 3 ist insofern relativ stark überzeichnet, um die tatsächlich nur leicht konische Form der pumpaktiven Flächen 20, 22 zu verdeutlichen, d.h. das Rotororgan 18 und das Statororgan 16 besitzen trotz der konischen Flächen 20, 22 weiterhin im Wesentlichen eine scheibenförmige Gestalt.Both angles α, α 'are each preferably in a range between 2 ° and 7 ° and are substantially the same size. The schematic representation according to Fig. 3 In this respect, it is relatively heavily oversubscribed in order to illustrate the actually only slightly conical shape of the pump-active surfaces 20, 22, ie the rotor element 18 and the stator element 16 continue to have substantially a disc-shaped shape despite the conical surfaces 20, 22.

Die Ebene 36, zu welcher der Winkel α gemessen wird, liegt gemäß Fig. 3 in derselben Ebene wie der Boden 33 der Spiralnut 32, d.h. der Boden 33 liegt in einer zur Rotorachse 28 senkrechten Ebene. Die Seitenwände 31 der Spiralnut 32 sind in dieser Ausführungsform parallel zur Rotorachse 28 ausgebildet. Die Spiralnut 32 weist einen im Wesentlichen rechteckigen Querschnitt auf. Es sind allerdings auch Ausführungsformen denkbar, bei denen der Nutquerschnitt z.B. U-förmig ausgebildet ist. Der insbesondere in einer einzigen, bevorzugt senkrecht zur Rotorachse 28 verlaufende Ebene liegende Boden der Nut wird dann in jedem Nutquerschnitt von dem tiefsten Punkt der Nut gebildet, d.h. von dem Scheitelpunkt des "U".The plane 36, to which the angle α is measured, is according to Fig. 3 in the same plane as the bottom 33 of the spiral groove 32, ie the bottom 33 lies in a plane perpendicular to the rotor axis 28. The side walls 31 of the spiral groove 32 are formed parallel to the rotor axis 28 in this embodiment. The spiral groove 32 has a substantially rectangular cross-section. However, embodiments are also conceivable in which the groove cross-section, for example, U-shaped is trained. The in particular in a single, preferably perpendicular to the rotor axis 28 extending plane bottom of the groove is then formed in each groove cross-section of the lowest point of the groove, ie from the vertex of the "U".

Es ist jedoch beispielsweise auch eine solche Ausführung der Siegbahnstufe denkbar, bei der die einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 jeweils eine gewölbte Form besitzen, wobei beispielsweise die pumpaktive Fläche 22 des Rotororgans 18 eine zur pumpaktiven Fläche 20 des Statororgans 16 hin gewölbte konvexe Form und die pumpaktive Fläche 20 des Statororgans 16 eine von der pumpaktiven Fläche 22 des Rotororgans 18 weg gewölbte konkave Form besitzen kann.However, it is also conceivable, for example, such an embodiment of the Siegbahnstufe, in which the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 each have a curved shape, for example, the pump-active surface 22 of the rotor member 18 to a pump-active surface 20 of the Statororgans 16 convex convex shape and the pump-active surface 20 of the stator 16 may have a curved away from the pumping active surface 22 of the rotor member 18 concave shape.

Die pumpaktive Fläche 20 des Statororgans 16 besitzt eine Spiralstruktur, die im vorliegenden Fall beispielsweise wenigstens eine Spiralnut 32 konstanter Breite umfasst.The pump-active surface 20 of the stator 16 has a spiral structure, which in the present case, for example, comprises at least one spiral groove 32 of constant width.

Durch eine entsprechende nicht planare Ausgestaltung der einander gegenüberliegenden pumpaktiven Flächen 20, 22 des Statororgans 16 und des Rotororgans 18 kann der Nutquerschnitt der strukturierten Oberfläche 30 bzw. der Spiralstruktur an die jeweiligen vakuumtechnischen Anforderungen angepasst werden, obwohl die Nutbreite im Verlauf einer jeweiligen Spirale gleich bleibt, womit diese beispielsweise mit einem Fräswerkzeug in einem Zug gefräst werden kann.By a corresponding non-planar configuration of the opposing pump-active surfaces 20, 22 of the stator 16 and the rotor member 18 of the groove cross-section of the structured surface 30 and the spiral structure can be adapted to the respective vacuum requirements, although the groove width remains the same in the course of a respective spiral , so that it can be milled with a milling tool in one go, for example.

Während die dem Statororgan 16 zugewandte pumpaktive Fläche 22 des Rotororgans 18 eine sich zum Statororgan 16 hin verjüngende konische Form besitzt, ist die vom Statororgan 16 abgewandte Stirnseite 34 des Rotororgans 18 eben und zur Rotorachse 28 senkrecht orientiert. Damit ergibt sich eine spannungstechnisch optimale Bauweise des Rotororgans 18.While the pumping active surface 22 of the rotor element 18 facing the stator element 16 has a conical shape tapering towards the stator element 16, the end face 34 of the rotor element 18 facing away from the stator element 16 is planar and perpendicular to the rotor axis 28. This results in a voltage-technically optimal design of the rotor member 18th

BezugszeichenlisteLIST OF REFERENCE NUMBERS

1010
Spiralstrukturspiral structure
1212
Statorscheibestator
1414
SiegbahnstufeSiegbahn stage
1616
StatororganStatororgan
1818
Rotororganrotor organ
2020
pumpaktive Flächepumping area
2222
pumpaktive Flächepumping area
2424
Rotorwellerotor shaft
2626
Spaltgap
2828
Rotorachserotor axis
3030
strukturierte Oberflächestructured surface
3131
Seitenwand der SpiralnutSidewall of the spiral groove
3232
Spiralnutspiral
3333
Boden der SpiralnutBottom of the spiral groove
3434
Stirnseitefront
36,36
Ebene senkrecht zur Rotorachse 28Plane perpendicular to the rotor axis 28
36'36 '
Ebene senkrecht zur Rotorachse 28Plane perpendicular to the rotor axis 28
αα
Winkel zwischen pumpaktiver Fläche 20 und Ebene 36Angle between pumping surface 20 and level 36
α'α '
Winkel zwischen pumpaktiver Fläche 22 und Ebene 36'Angle between pumping surface 22 and plane 36 '

Claims (15)

Siegbahnstufe (14) einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, mit einem Statororgan (16) und einem Rotororgan (18), die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen (20, 22) aufweisen, wobei zumindest die pumpaktive Fläche (20) des Statororgans (16) eine strukturierte Oberfläche (30) umfasst und wobei die einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) nicht planar sind.Siegbahnstufe (14) of a vacuum pump, in particular a turbomolecular pump or a side channel pump, with a stator (16) and a rotor member (18), each having one of two opposing pump-active surfaces (20, 22), wherein at least the pump-active surface (20 ) of the stator member (16) comprises a structured surface (30) and wherein the opposed pump active surfaces (20, 22) of the stator member (16) and the rotor member (18) are not planar. Siegbahnstufe nach Anspruch 1,
dadurch gekennzeichet, dass die einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) eine zumindest im Wesentlichen zueinander komplementäre Form besitzen.Siegbahnstufe according to claim 1,
characterized in that the opposite pump active surfaces (20, 22) of the stator (16) and the rotor member (18) have an at least substantially complementary shape. Siegbahnstufe nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass zumindest eine der einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) eine konische Form besitzt.Victory train stage according to one of the preceding claims,
characterized in that at least one of the opposed pump active surfaces (20, 22) of the stator member (16) and the rotor member (18) has a conical shape. Siegbahnstufe nach Anspruch 3,
dadurch gekennzeichnet, dass die pumpaktive Fläche (22) des Rotororgans (18) eine sich zur pumpaktiven Fläche (20) des Statororgans (16) hin verjüngende konische Form und/oder die pumpaktive Fläche (20) des Statororgans (16) eine sich zur pumpaktiven Fläche (22) des Rotororgans (18) hin erweiternde konische Form besitzt.Siegbahnstufe according to claim 3,
characterized in that the pump-active surface (22) of the rotor member (18) to the pumping active surface (20) of the stator (16) towards tapered conical shape and / or the pump-active surface (20) of the Statororgans (16) to a pump active Surface (22) of the rotor member (18) has flared conical shape. Siegbahnstufe nach Anspruch 3 oder 4,
dadurch gekennzeichnet, dass die pumpaktive Fläche (20) des Statororgans (16) und/oder die pumpaktive Fläche (22) des Rotororgans (18) mit einer Ebene (36, 36') senkrecht zur Rotorachse (28) einen Winkel (α, α') zwischen 1° und 20°, bevorzugt zwischen 1° und 10°, insbesondere zwischen 2° und 7°, einschliesst.Siegbahnstufe according to claim 3 or 4,
characterized in that the pump-active surface (20) of the Statororgans (16) and / or the pump-active surface (22) of the rotor member (18) having a plane (36, 36 ') perpendicular to the rotor axis (28) an angle (α, α ') between 1 ° and 20 °, preferably between 1 ° and 10 °, in particular between 2 ° and 7 °, including. Siegbahnstufe nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass zumindest eine der einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) eine gewölbte Form besitzt.Victory train stage according to one of the preceding claims,
characterized in that at least one of the opposed pump-active surfaces (20, 22) of the stator unit (16) and the rotor member (18) has a curved shape. Siegbahnstufe nach Anspruch 6,
dadurch gekennzeichnet, dass die pumpaktive Fläche (22) des Rotororgans (18) eine zur pumpaktiven Fläche (20) des Statororgans (16) hin gewölbte konvexe Form und die pumpaktive Fläche (20) des Statororgans (16) eine von der pumpaktiven Fläche (22) des Rotororgans (18) weg gewölbte konkave Form besitzt.Siegbahnstufe according to claim 6,
characterized in that the pump-active surface (22) of the rotor member (18) to a pump-active surface (20) of the stator (16) arched convex shape and the pump-active surface (20) of the Statororgans (16) one of the pump-active surface (22 ) of the rotor member (18) has a curved concave shape. Siegbahnstufe nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass zumindest eine der einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) mit wenigstens einer Spiralnut (32) versehen ist, wobei insbesondere die Spiralnut (32) eine konstante Breite aufweist.Victory train stage according to one of the preceding claims,
characterized in that at least one of the opposing pump-active surfaces (20, 22) of the stator (16) and the rotor member (18) is provided with at least one spiral groove (32), wherein in particular the spiral groove (32) has a constant width. Siegbahnstufe nach Anspruch 8,
dadurch gekennzeichnet, dass die die Spiralnut (32) begrenzenden Seitenwände (31) parallel zur Rotorachse (28) verlaufen.Siegbahnstufe according to claim 8,
characterized in that the spiral walls (32) delimiting side walls (31) parallel to the rotor axis (28). Siegbahnstufe nach Anspruch 8 oder 9,
dadurch gekennzeichnet, dass der Boden (33) der Spiralnut (32) in einer zur Rotorachse (28) senkrechten Ebene verläuft.Siegbahnstufe according to claim 8 or 9,
characterized in that the bottom (33) of the spiral groove (32) extends in a plane perpendicular to the rotor axis (28). Siegbahnstufe nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass die pumpaktive Fläche (22) des Rotororgans (18) glatt ist.Victory train stage according to one of the preceding claims,
characterized in that the pump-active surface (22) of the rotor member (18) is smooth. Vakuumpumpe, insbesondere Turbomolekularpumpe oder Seitenkanalpumpe, mit zumindest einer Siegbahnstufe (14) nach einem der vorstehenden Ansprüche.Vacuum pump, in particular turbomolecular pump or side channel pump, with at least one Siegbahnstufe (14) according to any one of the preceding claims. Verfahren zur Herstellung einer Siegbahnstufe (14) einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, bei dem ein Statororgan (16) und ein Rotororgan (18) bereitgestellt werden, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen (20, 22) aufweisen,
zumindest die pumpaktive Fläche (20) des Statororgans (16) mit einer strukturierten Oberfläche (30) versehen wird, insbesondere durch spanende Bearbeitung, und
die einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) nicht planar ausgestaltet werden.Method for producing a victor track stage (14) of a vacuum pump, in particular a turbomolecular pump or a side channel pump, in which a stator element (16) and a rotor element (18) are provided, each having one of two opposing pump active surfaces (20, 22),
at least the pump-active surface (20) of the stator (16) is provided with a structured surface (30), in particular by machining, and
the pump active surfaces (20, 22) of the stator element (16) and of the rotor element (18) lying opposite one another are not made planar. Verfahren nach Anspruch 13,
dadurch gekennzeichnet, dass die einander gegenüberliegenden pumpaktiven Flächen (20, 22) des Statororgans (16) und des Rotororgans (18) mit einer zumindest im Wesentlichen zueinander komplementäre Form ausgestaltet werden.Method according to claim 13,
characterized in that the pumping active surfaces (20, 22) of the stator element (16) and of the rotor element (18) lying opposite to one another are configured with a shape which is at least substantially complementary to one another. Verfahren nach Anspruch 13 oder 14,
dadurch gekennzeichnet, dass die einander gegenüberliegenden pumpaktiven Flächen (20) des Statororgans (16) und des Rotororgans (18) jeweils mit einer konischen Form oder jeweils mit einer gewölbten Form ausgestaltet werden.Method according to claim 13 or 14,
characterized in that the opposite pump active surfaces (20) of the stator (16) and the rotor member (18) are each configured with a conical shape or in each case with a curved shape.
EP15174030.5A 2014-06-26 2015-06-26 Siegbahn stage Active EP2960519B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014109004.7A DE102014109004A1 (en) 2014-06-26 2014-06-26 Siegbahn stage

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EP2960519A1 true EP2960519A1 (en) 2015-12-30
EP2960519B1 EP2960519B1 (en) 2019-11-06

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (en) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbo high vacuum pump
US2954157A (en) * 1958-01-27 1960-09-27 Edwin E Eckberg Molecular vacuum pump
EP1170508A1 (en) * 2000-06-21 2002-01-09 Varian, Inc. Molecular drag vacuum pumps

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1165792A (en) * 1956-02-02 1958-10-29 Pfeiffer Arthur Molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE
JPH0412197A (en) * 1990-05-01 1992-01-16 Daikin Ind Ltd Vacuum pump
JPH04148099A (en) * 1990-10-12 1992-05-21 Mitsubishi Heavy Ind Ltd Siegbahn type vacuum pump
JP2000161284A (en) * 1998-11-26 2000-06-13 Hitachi Ltd Turbo-vacuum pump
DE10203648B4 (en) * 2001-02-10 2016-05-25 Pfeiffer Vacuum Gmbh Rotor and stator disks for a turbomolecular pump
JP2005042709A (en) * 2003-07-10 2005-02-17 Ebara Corp Vacuum pump
JP6102222B2 (en) * 2012-11-30 2017-03-29 株式会社島津製作所 Vacuum pump
DE102012222230A1 (en) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh vacuum pump
DE102013108482A1 (en) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vacuum pump stage

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (en) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbo high vacuum pump
US2954157A (en) * 1958-01-27 1960-09-27 Edwin E Eckberg Molecular vacuum pump
EP1170508A1 (en) * 2000-06-21 2002-01-09 Varian, Inc. Molecular drag vacuum pumps

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EP2960519B1 (en) 2019-11-06
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