EP2886870B2 - Vacuum pump with improved inlet geometry - Google Patents

Vacuum pump with improved inlet geometry Download PDF

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Publication number
EP2886870B2
EP2886870B2 EP14196002.1A EP14196002A EP2886870B2 EP 2886870 B2 EP2886870 B2 EP 2886870B2 EP 14196002 A EP14196002 A EP 14196002A EP 2886870 B2 EP2886870 B2 EP 2886870B2
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EP
European Patent Office
Prior art keywords
vacuum pump
inlet
rotor
stage
shaft
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Application number
EP14196002.1A
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German (de)
French (fr)
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EP2886870B1 (en
EP2886870A1 (en
Inventor
Bernhard Koch
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump or vacuum pump stage with a housing which has at least one inlet.
  • Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweck pump stage.
  • One or a plurality of sleeves is fastened on one side to a hub, which in turn is arranged on a shaft.
  • a hub which in turn is arranged on a shaft.
  • Such a structure is shown, for example, by DE 10 2011 112 689 A1 .
  • the inlet is not as in the prior art ( DE 10 2011 112 689 A1 ) belonging pump axially to the shaft, but arranged radially to the shaft and the rotating sleeve, as shown in the EP 1 302 667 A1 is shown.
  • These prior art pumps or pump stages have the disadvantage that, given the probable direction of movement of a gas molecule, it may happen that the molecule does not enter the Holweck channels but leaves the suction area again in the direction of the recipient. This has a negative effect on the pumping speed.
  • EP 2 385 257 A2 includes a side channel pump stage with a scraper and a vacuum pump with a high vacuum pump stage, which can be designed as a Holweck or turbo molecular pump stage. This prior art vacuum pump can be further improved with regard to the pumping speed.
  • the technical problem on which the invention is based consists in specifying a vacuum pump or vacuum pump stage with a radially arranged inlet in which the pumping speed is increased while the size of the inlet remains unchanged.
  • the inventive design of the inlet and thus the suction opening influences the direction of movement of the molecules in such a way that they can no longer leave the suction flange of the pump or pump stage in the direction of the recipient and continue to remain in the pumping process.
  • the gas molecules that hit this inner wall are deflected in the direction of the rotating sleeve after hitting the inner wall and enter the vacuum pump or vacuum pump stage with a high degree of probability.
  • the number of gas molecules that do not enter the pumping area of the vacuum pump or vacuum pumping stage directly after an impact on the inner wall of the widening inlet is most likely fed to the pumping area of the vacuum pump or vacuum pumping stage, so that the pumping speed of the vacuum pump or vacuum pumping stage is thereby increased significantly increased.
  • the same principle also applies to the radial inlet into a turbomolecular pumping stage with counter-rotating rotor and stator disc blades, in this case the gas molecules are already admitted into the active pumping area with a preferred direction, so that the pumping speed increases here as well.
  • This inlet can be located both on the high vacuum side of the rotor in front of or in the area of the first rotor disk and in the further course of the active pumping structure at any point to form an additional inlet for a split-flow pump.
  • the configuration according to the invention not only increases the probability that a gas molecule will successfully enter the active pumping area, but also that a gas molecule that was already in the active pumping area is then returned to the active pumping area if it does not exit the active pumping area into the inlet channel so that it can still be conveyed and thus additionally increases the pumping speed becomes.
  • the vacuum pump has at least one Holweck step with a one-piece shaft and surrounding stator, with the conveying structure lying on one of the two parts, or at least one cross-thread Holweck step with a one-piece shaft, the conveying structure being a counter-rotating thread structure or a turbo rotor of a turbo pump, the conveying structure containing at least one turbo rotor disk and one turbo stator disk.
  • the embodiment according to the invention with the inlet widening in the direction of the shaft can be used particularly advantageously in these vacuum pumps.
  • the vacuum pump stage is designed as a Holweck stage with a one-piece shaft and surrounding stator, the conveying structure being on one of the two parts, or as a cross-thread Holweck stage with a one-piece shaft, the conveying structure being a represents opposite thread structure is formed.
  • the embodiment according to the invention with the inlet widening in the direction of the shaft can also be used particularly advantageously in these vacuum pump stages.
  • the inlet is designed as an inlet, which conducts a gas through the inlet channels of the rotor which are arranged in the direction of rotation of the rotor.
  • This embodiment has the advantage that the gas molecules entering through the suction opening are conveyed directly into the channels arranged in the direction of rotation of the rotor, for example a Holweck stator. This direct supply also increases the pumping speed of the vacuum pump or vacuum pump stage.
  • the inlet is designed to widen in the direction of rotation of the rotor.
  • the opposite side of the inlet flange can, as is known from the prior art, be partially cylindrical.
  • the inlet is designed to widen in cross section with a curved outer contour.
  • the inlet can also be designed to widen with a straight outer contour.
  • the curved outer contour has the advantage that the contour can be adapted in such a way that the gas molecules are most likely to be deflected in the direction of the rotating sleeve after an impact on the outer contour and not in the opposite direction.
  • the curved outer contour allows a smaller expansion of the inlet in the direction of the pump chamber than is the case with a straight outer contour.
  • the inlet can be designed to widen linearly conically in cross section. This embodiment is easy to manufacture and the pumping speed of the vacuum pump or vacuum pump stage is increased nonetheless.
  • the inlet is only designed to widen in the direction of rotation of the rotor. If the inlet is designed to widen only on the side which is arranged in the direction of rotation of the rotor, the costs for the widening design of the inlet are reduced.
  • the vacuum pump is advantageously designed as a molecular vacuum pump, in particular as a Holweck pump.
  • the design of the inlet flange according to the invention can be applied to Holweck pumping stages in which the active pumping surfaces are arranged in the stator.
  • the invention can also be applied to Holweck pump stages in which the active pumping structures are arranged on the sleeve, that is to say on the rotor.
  • the invention can also be applied to cross-thread Holweck pump stages in which active pumping structures are arranged on both the rotor and the stator.
  • the invention can also be applied to turbo-molecular pumping stages, in which the active pumping structure consists of rotor and stator blades.
  • Fig. 1 shows a longitudinal section through a vacuum pump 1 belonging to the prior art.
  • a suction opening 4 is provided in a housing 2 of the vacuum pump 1, through which gas is sucked into the vacuum pump 1. After the compression, the gas is expelled from the vacuum pump 1 through an outlet 6.
  • a rotor 10 is provided inside the vacuum pump 1 which, together with a stator 30, generates the pumping effect.
  • the rotor 10 has a shaft 12, the end of which facing the suction opening 4 is supported by a permanent magnetic bearing 14. The opposite end is supported by a roller bearing 16.
  • This bearing arrangement has the advantage over other types of bearings that are also possible, such as the floating bearing with roller bearings on the side opposite the intake opening, that a lubricant-free bearing is used on the intake side and narrow gaps and a shorter overall length are achieved due to the rotor-dynamically simpler bearing.
  • a permanent magnet 20 is provided on the shaft, which works together with a powered drive coil.
  • the rotor 10 is set to a sufficiently fast speed. This is measured according to the pumping principle used and, with molecular principles, is usually a few 10,000 revolutions per minute.
  • the stator 30 has one or a plurality of helical channels 30 on its surface facing the rotor.
  • a hub 40 is attached to the shaft 12. It has a first side 42 and a second side 44 opposite this first side 42. The second side 44 faces the suction opening.
  • a first sleeve 50 is attached to the first side and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to generate a pumping effect according to Holweck.
  • the gas flow leads through the suction opening into a gap S between the second sleeve 52 and the stator 30.
  • the first sleeve 50 is arranged in the gas flow downstream of the second sleeve 52 and thus compresses towards the sleeve pressure.
  • Fig. 2 the housing 2 is shown, which has the inlet 4.
  • the rotating sleeve 52 and the pump-active structure 32 are shown.
  • FIG. 2 it is shown schematically how a gas molecule 60 hits the sleeve 52. Due to the probable direction of movement of the gas molecule 60, it can happen that the molecule does not enter the Holweck channels 32, but leaves the suction area 62 again in the direction of the recipient, i.e. against the direction of the arrow A. The resulting speed is shown by arrow 80.
  • Fig. 3 shows an inlet flange 4 known from practice, which is designed as an asymmetrically drilled inlet channel. This embodiment directs the gas molecules 60 in different directions of the inlet 4. The resulting velocity is shown by the arrow 80.
  • Fig. 4 shows an inlet geometry according to the invention which represents a further improvement compared to the prior art, in which the inlet 4 is designed to widen in the direction of the sleeve 52. This influences the direction of movement of the molecules 60 in such a way that they can no longer leave the suction flange of the pump 1 in the direction of the recipient, i.e. against the direction of the arrow A, and continue to remain in the pumping process.
  • FIG. 4 the likely direction of movement of the gas molecules 60 after they have been in contact with the rotating sleeve 52, it is found that if they do not enter the Holweck pump stage, there is an increased probability that they hit the housing wall 64 above the pump stage. The further movement of the molecules is subject to the usual probability distribution.
  • inlet 4 as in Fig. 4 configured in such a way that the gas molecules that strike here move back into the pump, this measure increases the pumping speed.
  • Fig. 5 Fig. 3 shows a modified embodiment of the invention.
  • the inlet 64 is according to Fig. 5 formed linearly conically widening. According to this inlet geometry, too, the gas molecules that abut the inner wall of the extension 64 of the inlet flange 4 move back again in the direction of the pump chamber, so that the pumping speed of the pump also increases significantly as a result.
  • Fig. 6 shows a turbo pumping stage 66 with a suction opening 62.
  • the turbo pumping stage has a rotor 68 with rotor blades 70.
  • the gas molecules (not shown) enter the vacuum pumping stage 66 in the direction of arrow A. If the gas molecules are deflected by the rotor blades 70 in the direction of the outlet, they strike the inner wall of the enlargement 64 of the suction opening 62 and are again directed in the direction of the rotor 68.
  • Fig. 7 shows a schematic representation of the pump stage 66 with the rotor 68.
  • the rotor 68 has rotor disks 72, 74 and stator disks 76, 78, the rotor disks 72, 74 and the stator disks 76, 78 have opposing rotor and stator blades.
  • a gas molecule which enters the suction opening 62 in the direction of the arrow A is correspondingly deflected by the widening 64 of the suction opening 62 and "passes through” the pump stage 66 and exits the pump stage 66 in the direction of the arrow B.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe oder Vakuumpumpstufe mit einem Gehäuse, welches wenigstens einen Einlass aufweist.The invention relates to a vacuum pump or vacuum pump stage with a housing which has at least one inlet.

Molekulare Pumpprinzipien sind aus der Vakuumtechnik aufgrund der vielfältigen Anwendungen bei der Erzeugung industrieller Vakua nicht mehr wegzudenken. Letztlich gründet sich der Pumpeffekt auf den Impulsübertrag einer schnell bewegten Fläche auf Gasmoleküle, wodurch der statistischen thermischen Bewegung eine gerichtete Bewegung hinzuaddiert wird.Molecular pumping principles have become indispensable in vacuum technology due to the wide range of applications in the generation of industrial vacuums. Ultimately, the pumping effect is based on the momentum transfer of a rapidly moving surface to gas molecules, whereby a directed movement is added to the statistical thermal movement.

Rotierende Hülsen haben sich in Vakuumpumpen bewährt, beispielsweise in Form einer Holweckpumpstufe. Eine oder eine Mehrzahl von Hülsen wird einseitig an einer Nabe befestigt, die ihrerseits auf einer Welle angeordnet ist. Einen solchen Aufbau zeigt beispielsweise die DE 10 2011 112 689 A1 .Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweck pump stage. One or a plurality of sleeves is fastened on one side to a hub, which in turn is arranged on a shaft. Such a structure is shown, for example, by DE 10 2011 112 689 A1 .

In einigen Anwendungsfällen ist der Einlass nicht wie bei der zum Stand der Technik ( DE 10 2011 112 689 A1 ) gehörenden Pumpe axial zur Welle, sondern radial zur Welle und der sich drehenden Hülse angeordnet, wie dies in der EP 1 302 667 A1 dargestellt ist. Bei diesen zum Stand der Technik gehörenden Pumpen oder Pumpstufen tritt der Nachteil auf, dass in Anbetracht der wahrscheinlichen Bewegungsrichtung eines Gasmoleküles es dazu kommen kann, dass das Molekül nicht in die Holweckkanäle eintritt, sondern den Saugbereich wieder in Richtung Rezipient verlässt. Dies wirkt sich nachteilig auf das Saugvermögen aus.In some applications, the inlet is not as in the prior art ( DE 10 2011 112 689 A1 ) belonging pump axially to the shaft, but arranged radially to the shaft and the rotating sleeve, as shown in the EP 1 302 667 A1 is shown. These prior art pumps or pump stages have the disadvantage that, given the probable direction of movement of a gas molecule, it may happen that the molecule does not enter the Holweck channels but leaves the suction area again in the direction of the recipient. This has a negative effect on the pumping speed.

Zum Stand der Technik ( DE 20 2010 012 795 U1 ) gehört darüber hinaus eine Vakuumpumpe, bei der Umlenkelemente im Einlassbereich vorgesehen sind. Diese Umlenkelemente bewirken, dass ein Umlenken der Teilchen in Strömungs- beziehungsweise Förderrichtung der Pumpe erfolgt.To the state of the art ( DE 20 2010 012 795 U1 ) also includes a vacuum pump with deflection elements in the inlet area. The effect of these deflection elements is that the particles are deflected in the flow or conveying direction of the pump.

Diese zum Stand der Technik gehörenden Umlenkelemente weisen jedoch den Nachteil auf, dass sie technisch aufwendig sind und dass die Montage der Elemente in der Vakuumpumpe zeit- und kostenintensiv ist.However, these deflection elements belonging to the prior art have the disadvantage that they are technically complex and that the assembly of the elements in the vacuum pump is time-consuming and costly.

Zum Stand der Technik ( EP 2 385 257 A2 ) gehört eine Seitenkanalpumpstufe mit einem Abstreifer sowie eine Vakuumpumpe mit einer Hochvakuumpumpstufe, die als Holweck- oder Turbomolekularpumpstufe ausgebildet sein kann. Diese zum Stand der Technik gehörende Vakuumpumpe kann hinsichtlich des Saugvermögens weiter verbessert werden.To the state of the art ( EP 2 385 257 A2 ) includes a side channel pump stage with a scraper and a vacuum pump with a high vacuum pump stage, which can be designed as a Holweck or turbo molecular pump stage. This prior art vacuum pump can be further improved with regard to the pumping speed.

Weiterhin gehört zum Stand der Technik ( DE 198 48 406 A1 ) eine Molekularpumpe mit gerippter Rotorkonstruktion, die ebenfalls hinsichtlich des Saugvermögens weiter verbessert werden kann.Furthermore, the state of the art ( DE 198 48 406 A1 ) a molecular pump with a finned rotor construction, which can also be further improved in terms of pumping speed.

Das der Erfindung zugrunde liegende technische Problem besteht darin, eine Vakuumpumpe oder Vakuumpumpstufe mit einem radial angeordneten Einlass anzugeben, bei der das Saugvermögen bei unveränderter Größe des Einlasses erhöht wird.The technical problem on which the invention is based consists in specifying a vacuum pump or vacuum pump stage with a radially arranged inlet in which the pumping speed is increased while the size of the inlet remains unchanged.

Dieses technische Problem wird durch eine Vakuumpumpe oder Vakuumpumpstufe mit den Merkmalen gemäß Anspruch 1 gelöst.This technical problem is solved by a vacuum pump or vacuum pump stage with the features according to claim 1.

Die erfindungsgemäße Vakuumpumpe oder Vakuumpumpstufe mit einem Gehäuse, welches wenigstens einen Einlass aufweist mit einem Rotor, welcher eine Welle aufweist, wobei der Einlass radial zur Welle angeordnet ist, bei der die Vakuumpumpe oder Vakuumpumpstufe wenigstens eine Holweckpumpstufe aufweist mit einem Rotor, welcher eine Welle, eine mit der Welle verbundene Nabe und eine mit der Nabe verbundene und zur Welle konzentrische Hülse aufweist, zeichnet sich dadurch aus, dass der Einlass in Richtung Hülse und in Richtung Welle sich erweiternd ausgebildet ist und dass der Einlass in Drehrichtung des Rotors sich erweiternd ausgebildet ist.The vacuum pump or vacuum pump stage according to the invention with a housing which has at least one inlet with a rotor which has a shaft, the inlet being arranged radially to the shaft, in which the vacuum pump or vacuum pump stage has at least one Holweck pump stage with a rotor which has a shaft, has a hub connected to the shaft and a sleeve connected to the hub and concentric to the shaft, is characterized in that the inlet is designed to widen in the direction of the sleeve and in the direction of the shaft and that the inlet is designed to widen in the direction of rotation of the rotor .

Durch die erfindungsgemäße Ausgestaltung des Einlasses und damit der Saugöffnung wird die Bewegungsrichtung der Moleküle derart beeinflusst, dass diese den Saugflansch der Pumpe oder Pumpstufe möglichst nicht mehr in Richtung Rezipient verlassen können und weiterhin in dem Pumpprozess verbleiben.The inventive design of the inlet and thus the suction opening influences the direction of movement of the molecules in such a way that they can no longer leave the suction flange of the pump or pump stage in the direction of the recipient and continue to remain in the pumping process.

Betrachtet man die wahrscheinliche Bewegungsrichtung der Gasmoleküle, nachdem diese in Kontakt zu dem sich drehenden zylindrischen Rotor waren, stellt man fest, dass die Gasmoleküle, wenn sie nicht in die Vakuumpumpe oder Vakuumpumpstufe eintreten, mit erhöhter Wahrscheinlichkeit oberhalb der Pumpstufe auf die Innenwand des Einlasses treffen. Die weitere Bewegung der Gasmoleküle ist mit der üblichen Wahrscheinlichkeitsverteilung behaftet.If one considers the probable direction of movement of the gas molecules after they have been in contact with the rotating cylindrical rotor, one finds that the gas molecules, if they do not enter the vacuum pump or vacuum pumping stage, are more likely to hit the inner wall of the inlet above the pumping stage . The further movement of the gas molecules is subject to the usual probability distribution.

Durch die erfindungsgemäße Ausgestaltung des Einlasses, nämlich in Richtung Welle sich erweiternd, werden die Gasmoleküle, die auf diese Innenwand treffen, in Richtung der sich drehenden Hülse nach dem Auftreffen auf die Innenwand abgelenkt und treten mit hoher Wahrscheinlichkeit in die Vakuumpumpe oder Vakuumpumpstufe ein. Hierdurch wird die Anzahl der Gasmoleküle, die nicht unmittelbar in den Pumpbereich der Vakuumpumpe oder Vakuumpumpstufe eintreten, nach einem Aufprall auf der Innenwand des sich erweiternden Einlasses mit großer Wahrscheinlichkeit dem Pumpenbereich der Vakuumpumpe oder Vakuumpumpstufe zugeführt, so dass sich hierdurch das Saugvermögen der Vakuumpumpe oder Vakuumpumpstufe signifikant erhöht.Due to the inventive design of the inlet, namely widening in the direction of the shaft, the gas molecules that hit this inner wall are deflected in the direction of the rotating sleeve after hitting the inner wall and enter the vacuum pump or vacuum pump stage with a high degree of probability. As a result, the number of gas molecules that do not enter the pumping area of the vacuum pump or vacuum pumping stage directly after an impact on the inner wall of the widening inlet is most likely fed to the pumping area of the vacuum pump or vacuum pumping stage, so that the pumping speed of the vacuum pump or vacuum pumping stage is thereby increased significantly increased.

Das gleiche Prinzip gilt auch für den radialen Einlass in eine Turbomolekular-Pumpstufe mit gegenläufiger Rotor- und Statorscheibenbeschaufelung, in diesem Fall werden die Gasmoleküle bereits mit einer Vorzugsrichtung in den pumpaktiven Bereich eingelassen, so dass sich das Saugvermögen auch hier erhöht. Dabei kann dieser Einlass sowohl auf der Hochvakuumseite des Rotors vor oder im Bereich der ersten Rotorscheibe als auch im weiteren Verlauf der pumpaktiven Struktur an einer beliebigen Stelle zur Bildung eines Zusatzeinlasses für eine Split-Flow-Pumpe liegen.The same principle also applies to the radial inlet into a turbomolecular pumping stage with counter-rotating rotor and stator disc blades, in this case the gas molecules are already admitted into the active pumping area with a preferred direction, so that the pumping speed increases here as well. This inlet can be located both on the high vacuum side of the rotor in front of or in the area of the first rotor disk and in the further course of the active pumping structure at any point to form an additional inlet for a split-flow pump.

Durch die erfindungsgemäße Ausgestaltung wird nicht nur die Wahrscheinlichkeit erhöht, dass ein Gasmolekül erfolgreich in den pumpaktiven Bereich eintritt, sondern auch, dass ein Gasmolekül, welches sich bereits im pumpaktiven Bereich befand, bei einem nicht erwünschten Austritt aus dem pumpaktiven Bereich in den Einlasskanal danach erneut zurück in den pumpaktiven Bereich geleitet wird, so dass es trotzdem gefördert werden kann und damit das Saugvermögen zusätzlich erhöht wird.The configuration according to the invention not only increases the probability that a gas molecule will successfully enter the active pumping area, but also that a gas molecule that was already in the active pumping area is then returned to the active pumping area if it does not exit the active pumping area into the inlet channel so that it can still be conveyed and thus additionally increases the pumping speed becomes.

Gemäß einer vorteilhaften Ausführungsform der Erfindung weist die Vakuumpumpe wenigstens eine Holweckstufe mit einteiliger Welle und umgebenden Stator auf, wobei die fördernde Struktur auf einem der beiden Teile liegt, oder wenigstens eine Kreuzgewinde-Holweckstufe mit einteiliger Welle, wobei die fördernde Struktur eine gegenläufige Gewindestruktur darstellt oder einen Turbo-Rotor einer Turbo-Pumpe, wobei die fördernde Struktur mindestens eine Turbo-Rotorscheibe und eine Turbo-Statorscheibe enthält. Die erfindungsgemäße Ausführungsform mit dem sich in Richtung Welle erweiternden Einlass ist bei diesen Vakuumpumpen besonders vorteilhaft einsetzbar.According to an advantageous embodiment of the invention, the vacuum pump has at least one Holweck step with a one-piece shaft and surrounding stator, with the conveying structure lying on one of the two parts, or at least one cross-thread Holweck step with a one-piece shaft, the conveying structure being a counter-rotating thread structure or a turbo rotor of a turbo pump, the conveying structure containing at least one turbo rotor disk and one turbo stator disk. The embodiment according to the invention with the inlet widening in the direction of the shaft can be used particularly advantageously in these vacuum pumps.

Eine andere vorteilhafte Ausführungsform der Erfindung sieht vor, dass die Vakuumpumpstufe als eine Holweckstufe mit einteiliger Welle und umgebenden Stator ausgebildet ist, wobei die fördernde Struktur auf einem der beiden Teile liegt, oder als eine Kreuzgewinde-Holweckstufe mit einteiliger Welle, wobei die fördernde Struktur eine gegenläufige Gewindestruktur darstellt, ausgebildet ist. Auch bei diesen Vakuumpumpstufen ist die erfindungsgemäße Ausführungsform mit dem sich in Richtung Welle erweiternden Einlass besonders vorteilhaft einsetzbar.Another advantageous embodiment of the invention provides that the vacuum pump stage is designed as a Holweck stage with a one-piece shaft and surrounding stator, the conveying structure being on one of the two parts, or as a cross-thread Holweck stage with a one-piece shaft, the conveying structure being a represents opposite thread structure is formed. The embodiment according to the invention with the inlet widening in the direction of the shaft can also be used particularly advantageously in these vacuum pump stages.

Gemäß einer vorteilhaften Ausführungsform der Erfindung ist der Einlass als ein Gas durch den Einlass in die Drehrichtung des Rotors angeordnete Kanäle des Rotors leitender Einlass ausgebildet. Diese Ausführungsform weist den Vorteil auf, dass die durch die Ansaugöffnung eintretenden Gasmoleküle unmittelbar in die in Drehrichtung des Rotors angeordneten Kanäle, beispielsweise eines Holweckstators, gefördert wird. Diese unmittelbare Zuführung erhöht ebenfalls das Saugvermögen der Vakuumpumpe oder Vakuumpumpstufe. Erfindungsgemäß ist der Einlass in Drehrichtung des Rotors sich erweiternd ausgebildet.According to an advantageous embodiment of the invention, the inlet is designed as an inlet, which conducts a gas through the inlet channels of the rotor which are arranged in the direction of rotation of the rotor. This embodiment has the advantage that the gas molecules entering through the suction opening are conveyed directly into the channels arranged in the direction of rotation of the rotor, for example a Holweck stator. This direct supply also increases the pumping speed of the vacuum pump or vacuum pump stage. According to the invention, the inlet is designed to widen in the direction of rotation of the rotor.

Da die Gasmoleküle, wenn sie in Kontakt mit der sich drehenden Hülse getreten sind, in Richtung der Drehrichtung abgelenkt werden, ist es ausreichend, den Einlass in dieser Richtung sich erweiternd auszugestalten. Die gegenüberliegende Seite des Einlassflansches kann, wie aus dem Stand der Technik bekannt, teilzylinderförmig ausgebildet sein.Since the gas molecules, when they have come into contact with the rotating sleeve, are deflected in the direction of rotation, it is sufficient to design the inlet to widen in this direction. The opposite side of the inlet flange can, as is known from the prior art, be partially cylindrical.

Gemäß einer weiteren vorteilhaften Ausgestaltung der Erfindung ist der Einlass im Querschnitt mit einer gekrümmten Außenkontur sich erweiternd ausgebildet. Der Einlass kann grundsätzlich auch mit einer geraden Außenkontur sich erweiternd ausgebildet sein. Die gekrümmte Außenkontur weist jedoch den Vorteil auf, dass die Kontur derart angepasst werden kann, dass die Gasmoleküle mit der größten Wahrscheinlichkeit nach einem Aufprall an der Außenkontur in Richtung der sich drehenden Hülse abgelenkt werden und nicht in die entgegengesetzte Richtung. Gleichzeitig erlaubt die gekrümmte Außenkontur eine geringere Erweiterung des Einlasses in Richtung des Pumpenraumes als dies bei einer geraden Außenkontur der Fall ist.According to a further advantageous embodiment of the invention, the inlet is designed to widen in cross section with a curved outer contour. In principle, the inlet can also be designed to widen with a straight outer contour. However, the curved outer contour has the advantage that the contour can be adapted in such a way that the gas molecules are most likely to be deflected in the direction of the rotating sleeve after an impact on the outer contour and not in the opposite direction. At the same time, the curved outer contour allows a smaller expansion of the inlet in the direction of the pump chamber than is the case with a straight outer contour.

Der Einlass kann, wie schon ausgeführt, im Querschnitt sich linear konisch erweiternd ausgebildet sein. Diese Ausführungsform ist einfach herstellbar und das Saugvermögen der Vakuumpumpe oder Vakuumpumpstufe wird trotzdem erhöht.As already stated, the inlet can be designed to widen linearly conically in cross section. This embodiment is easy to manufacture and the pumping speed of the vacuum pump or vacuum pump stage is increased nonetheless.

Gemäß der Erfindung ist der Einlass lediglich in Drehrichtung des Rotors sich erweiternd ausgebildet. Wird der Einlass lediglich an der Seite, die in Drehrichtung des Rotors angeordnet ist, sich erweiternd ausgebildet, vermindern sich die Kosten für die sich erweiternde Ausgestaltung des Einlasses.According to the invention, the inlet is only designed to widen in the direction of rotation of the rotor. If the inlet is designed to widen only on the side which is arranged in the direction of rotation of the rotor, the costs for the widening design of the inlet are reduced.

Vorteilhaft ist die Vakuumpumpe als Molekularvakuumpumpe, insbesondere als Holweckpumpe ausgebildet.The vacuum pump is advantageously designed as a molecular vacuum pump, in particular as a Holweck pump.

Die erfindungsgemäße Ausbildung des Einlassflansches lässt sich auf Holweckpumpstufen anwenden, bei denen die pumpaktiven Flächen im Stator angeordnet sind. Gleichermaßen lässt sich die Erfindung auch auf Holweckpumpstufen anwenden, bei denen die pumpaktiven Strukturen auf der Hülse, das heißt auf dem Rotor angeordnet sind. Weiterhin lässt sich die Erfindung auch auf Kreuzgewinde-Holweckpumpstufen anwenden, bei denen pumpaktive Strukturen sowohl auf dem Rotor als auch Stator angeordnet sind. Auch lässt sich die Erfindung auf Turbomolekular-Pumpstufen anwenden, bei denen die pumpaktive Struktur aus Rotor- und Statorschaufeln besteht.The design of the inlet flange according to the invention can be applied to Holweck pumping stages in which the active pumping surfaces are arranged in the stator. In the same way, the invention can also be applied to Holweck pump stages in which the active pumping structures are arranged on the sleeve, that is to say on the rotor. Furthermore, the invention can also be applied to cross-thread Holweck pump stages in which active pumping structures are arranged on both the rotor and the stator. The invention can also be applied to turbo-molecular pumping stages, in which the active pumping structure consists of rotor and stator blades.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der ein Ausführungsbeispiel eines erfindungsgemäßen Einlasses nur beispielhaft dargestellt ist. In der Zeichnung zeigen:

Fig. 1
einen Querschnitt durch eine Vakuumpumpe;
Fig. 2
eine Darstellung der Bewegung der Gasmoleküle in einem Einlass gemäß dem Stand der Technik;
Fig. 3
eine Darstellung der Bewegung der Gasmoleküle in einem zum Stand der Technik gehörenden Einlass;
Fig. 4
eine erfindungsgemäße Ausgestaltung eines Einlasses im Querschnitt;
Fig. 5
ein geändertes Ausführungsbeispiel eines Einlasses im Querschnitt;
Fig. 6
ein geändertes Ausführungsbeispiel eines Einlasses einer Turbomolekularpumpstufe mit einem Rotor im Querschnitt;
Fig. 7
eine schematische Darstellung der Turbopumpstufe der Fig. 6 im Längsschnitt.
Further features and advantages of the invention emerge from the associated drawing, in which an embodiment of an inlet according to the invention is shown only by way of example. In the drawing show:
Fig. 1
a cross section through a vacuum pump;
Fig. 2
a representation of the movement of the gas molecules in an inlet according to the prior art;
Fig. 3
a representation of the movement of the gas molecules in an inlet belonging to the prior art;
Fig. 4
an inventive embodiment of an inlet in cross section;
Fig. 5
a modified embodiment of an inlet in cross section;
Fig. 6
a modified embodiment of an inlet a turbo molecular pumping stage with a rotor in cross section;
Fig. 7
a schematic representation of the turbo pumping stage of Fig. 6 in longitudinal section.

Fig. 1 zeigt einen Längsschnitt durch eine zum Stand der Technik gehörende Vakuumpumpe 1. In einem Gehäuse 2 der Vakuumpumpe 1 ist eine Ansaugöffnung 4 vorgesehen, durch die Gas in die Vakuumpumpe 1 eingesaugt wird. Nach dem Verdichten wird das Gas durch einen Auslass 6 aus der Vakuumpumpe 1 ausgestoßen. Fig. 1 shows a longitudinal section through a vacuum pump 1 belonging to the prior art. A suction opening 4 is provided in a housing 2 of the vacuum pump 1, through which gas is sucked into the vacuum pump 1. After the compression, the gas is expelled from the vacuum pump 1 through an outlet 6.

Innerhalb der Vakuumpumpe 1 ist ein Rotor 10 vorgesehen, der zusammen mit einem Stator 30 die Pumpwirkung erzeugt. Der Rotor 10 weist eine Welle 12 auf, deren der Ansaugöffnung 4 zugewandtes Ende von einem Permanentmagnetlager 14 getragen wird. Das gegenüberliegende Ende wird von einem Wälzlager 16 unterstützt. Diese Lageranordnung besitzt gegenüber anderen, ebenfalls möglichen Lagerarten, wie der fliegenden Lagerung mit Wälzlagern auf der der Ansaugöffnung gegenüberliegenden Seite, den Vorteil, dass ein schmiermittelfreies Lager ansaugseitig eingesetzt wird und aufgrund der rotordynamisch einfacheren Lagerung enge Spalte und eine kürzere Baulänge erreicht werden.A rotor 10 is provided inside the vacuum pump 1 which, together with a stator 30, generates the pumping effect. The rotor 10 has a shaft 12, the end of which facing the suction opening 4 is supported by a permanent magnetic bearing 14. The opposite end is supported by a roller bearing 16. This bearing arrangement has the advantage over other types of bearings that are also possible, such as the floating bearing with roller bearings on the side opposite the intake opening, that a lubricant-free bearing is used on the intake side and narrow gaps and a shorter overall length are achieved due to the rotor-dynamically simpler bearing.

Auf der Welle ist ein Permanentmagnet 20 vorgesehen, der mit einer bestromten Antriebsspule zusammenwirkt. Hierdurch wird der Rotor 10 in eine ausreichend schnelle Drehzahl versetzt. Diese bemisst sich nach dem verwendeten Pumpprinzip und liegt bei molekularen Prinzipien in der Regel bei einigen 10.000 Umdrehungen pro Minute.A permanent magnet 20 is provided on the shaft, which works together with a powered drive coil. As a result, the rotor 10 is set to a sufficiently fast speed. This is measured according to the pumping principle used and, with molecular principles, is usually a few 10,000 revolutions per minute.

Der Stator 30 weist auf seiner dem Rotor zugewandten Oberfläche einen oder eine Mehrzahl schraubenlinienartiger Kanäle 30 auf.The stator 30 has one or a plurality of helical channels 30 on its surface facing the rotor.

An der Welle 12 ist eine Nabe 40 befestigt. Sie weist eine erste Seite 42 und eine dieser ersten Seite 42 gegenüberliegende zweite Seite 44 auf. Die zweite Seite 44 ist der Ansaugöffnung zugewandt. An der ersten Seite ist eine erste Hülse 50 befestigt, an der zweiten Seite eine zweite Hülse 52. Beide Hülsen 50, 52 wirken mit dem Stator 30 und dessen schraubenlinienartigen Kanal 32 zur Erzeugung einer Pumpwirkung nach Holweck zusammen. Der Gasstrom führt durch die Ansaugöffnung in einen Spalt S zwischen zweiter Hülse 52 und Stator 30. Die erste Hülse 50 ist im Gasstrom der zweiten Hülse 52 nachfolgend angeordnet und verdichtet damit zum Hülsendruck hin. Durch die Verwendung der Hülsen 50 und 52 zusammen mit der beschriebenen Gasführung wirken sich Fertigungstoleranzen im geringeren Maße auf den Spalt S aus, so dass dieser enger als bei einer vergleichbaren einzelnen Hülse ausgeführt wird, deren Länge der Summe der Längen der beiden Hülsen L1 und L2 entspricht.A hub 40 is attached to the shaft 12. It has a first side 42 and a second side 44 opposite this first side 42. The second side 44 faces the suction opening. A first sleeve 50 is attached to the first side and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to generate a pumping effect according to Holweck. The gas flow leads through the suction opening into a gap S between the second sleeve 52 and the stator 30. The first sleeve 50 is arranged in the gas flow downstream of the second sleeve 52 and thus compresses towards the sleeve pressure. By using the sleeves 50 and 52 together with the gas routing described, manufacturing tolerances have a lesser effect on the gap S, so that it is made narrower than with a comparable single sleeve, the length of which is the sum of the lengths of the two sleeves L1 and L2 corresponds.

In Fig. 2 ist das Gehäuse 2 dargestellt, welches den Einlass 4 aufweist. Darüber hinaus ist die sich drehende Hülse 52 gezeigt sowie die pumpaktive Struktur 32.In Fig. 2 the housing 2 is shown, which has the inlet 4. In addition, the rotating sleeve 52 and the pump-active structure 32 are shown.

In der Fig. 2 ist schematisch dargestellt, wie ein Gasmolekül 60 auf die Hülse 52 trifft. Aufgrund der wahrscheinlichen Bewegungsrichtung des Gasmoleküls 60 kann es hierbei dazu kommen, dass das Molekül nicht in die Holweckkanäle 32 eintritt, sondern den Saugbereich 62 wieder in Richtung Rezipient, also entgegen der Richtung des Pfeiles A verlässt. Die resultierende Geschwindigkeit ist mit dem Pfeil 80 dargestellt.In the Fig. 2 it is shown schematically how a gas molecule 60 hits the sleeve 52. Due to the probable direction of movement of the gas molecule 60, it can happen that the molecule does not enter the Holweck channels 32, but leaves the suction area 62 again in the direction of the recipient, i.e. against the direction of the arrow A. The resulting speed is shown by arrow 80.

Fig. 3 zeigt einen aus der Praxis bekannten Einlassflansch 4, der als asymmetrisch gebohrter Einlasskanal ausgebildet ist. Diese Ausführungsform lenkt die Gasmoleküle 60 in verschiedene Richtungen des Einlasses 4. Die resultierende Geschwindigkeit ist mit dem Pfeil 80 dargestellt. Fig. 3 shows an inlet flange 4 known from practice, which is designed as an asymmetrically drilled inlet channel. This embodiment directs the gas molecules 60 in different directions of the inlet 4. The resulting velocity is shown by the arrow 80.

Fig. 4 zeigt eine erfindungsgemäße Einlassgeometrie, die gegenüber dem Stand der Technik eine weitere Verbesserung darstellt, bei der der Einlass 4 sich in Richtung Hülse 52 erweiternd ausgebildet ist. Hierdurch wird die Bewegungsrichtung der Moleküle 60 so beeinflusst, dass diese den Saugflansch der Pumpe 1 möglichst nicht mehr in Richtung Rezipient, also entgegen der Richtung des Pfeiles A verlassen können und weiterhin in dem Pumpprozess verbleiben. Fig. 4 shows an inlet geometry according to the invention which represents a further improvement compared to the prior art, in which the inlet 4 is designed to widen in the direction of the sleeve 52. This influences the direction of movement of the molecules 60 in such a way that they can no longer leave the suction flange of the pump 1 in the direction of the recipient, i.e. against the direction of the arrow A, and continue to remain in the pumping process.

Betrachtet man gemäß Fig. 4 die wahrscheinliche Bewegungsrichtung der Gasmoleküle 60, nachdem diese in Kontakt mit der sich drehenden Hülse 52 waren, so stellt man fest,
dass sie, wenn sie nicht in die Holweckpumpstufe eintreten, mit erhöhter Wahrscheinlichkeit oberhalb der Pumpstufe auf die Gehäusewandung 64 treffen. Die weitere Bewegung der Moleküle ist mit der üblichen Wahrscheinlichkeitsverteilung behaftet.Considered accordingly Fig. 4 the likely direction of movement of the gas molecules 60 after they have been in contact with the rotating sleeve 52, it is found
that if they do not enter the Holweck pump stage, there is an increased probability that they hit the housing wall 64 above the pump stage. The further movement of the molecules is subject to the usual probability distribution.

Wird der Einlass 4, wie in Fig. 4 dargestellt ausgestaltet, derart, dass die Gasmoleküle, die hier auftreffen, sich wieder in die Pumpe zurückbewegen, so erhöht sich durch diese Maßnahme das Saugvermögen.If inlet 4, as in Fig. 4 configured in such a way that the gas molecules that strike here move back into the pump, this measure increases the pumping speed.

Fig. 5 zeigt ein geändertes Ausführungsbeispiel der Erfindung. Der Einlass 64 ist gemäß Fig. 5 sich linear konisch erweiternd ausgebildet. Auch gemäß dieser Einlassgeometrie bewegen sich die Gasmoleküle, die an der Innenwand der Erweiterung 64 des Einlassflansches 4 anstoßen, wieder in Richtung des Pumpenraumes zurück, so dass sich auch hierdurch das Saugvermögen der Pumpe deutlich erhöht. Fig. 5 Fig. 3 shows a modified embodiment of the invention. The inlet 64 is according to Fig. 5 formed linearly conically widening. According to this inlet geometry, too, the gas molecules that abut the inner wall of the extension 64 of the inlet flange 4 move back again in the direction of the pump chamber, so that the pumping speed of the pump also increases significantly as a result.

Fig. 6 zeigt eine Turbopumpstufe 66 mit einer Ansaugöffnung 62. Die Turbopumpstufe weist einen Rotor 68 auf mit Rotorschaufeln 70. Die Gasmoleküle (nicht dargestellt) treten in Richtung des Pfeiles A in die Vakuumpumpstufe 66 ein. Werden die Gasmoleküle von den Rotorschaufeln 70 in Richtung des Auslasses abgelenkt, stoßen sie an die Innenwand der Erweiterung 64 der Ansaugöffnung 62 und werden wiederum in Richtung des Rotors 68 geleitet. Fig. 6 shows a turbo pumping stage 66 with a suction opening 62. The turbo pumping stage has a rotor 68 with rotor blades 70. The gas molecules (not shown) enter the vacuum pumping stage 66 in the direction of arrow A. If the gas molecules are deflected by the rotor blades 70 in the direction of the outlet, they strike the inner wall of the enlargement 64 of the suction opening 62 and are again directed in the direction of the rotor 68.

Fig. 7 zeigt eine schematische Darstellung der Pumpstufe 66 mit dem Rotor 68. Der Rotor 68 weist Rotorscheiben 72, 74 sowie Statorscheiben 76, 78 auf, wobei die Rotorscheiben 72, 74 und die Statorscheiben 76, 78 gegenläufige Rotor- und Statorbeschaufelungen aufweisen. Fig. 7 shows a schematic representation of the pump stage 66 with the rotor 68. The rotor 68 has rotor disks 72, 74 and stator disks 76, 78, the rotor disks 72, 74 and the stator disks 76, 78 have opposing rotor and stator blades.

Ein Gasmolekül, welches in Richtung des Pfeiles A in die Ansaugöffnung 62 eintritt, wird von der Erweiterung 64 der Ansaugöffnung 62 entsprechend abgelenkt und "durchläuft" die Pumpstufe 66 und tritt aus der Pumpstufe 66 in Richtung des Pfeiles B aus.A gas molecule which enters the suction opening 62 in the direction of the arrow A is correspondingly deflected by the widening 64 of the suction opening 62 and "passes through" the pump stage 66 and exits the pump stage 66 in the direction of the arrow B.

BezugszahlenReference numbers

11
VakuumpumpeVacuum pump
22
Gehäusecasing
44th
AnsaugöffnungSuction opening
66th
AuslassOutlet
1010
Rotorrotor
1212
Wellewave
1414th
PermanentmagnetlagerPermanent magnet bearings
1616
Wälzlagerroller bearing
2020th
PermanentmagnetPermanent magnet
3030th
Statorstator
3232
Kanäle im StatorChannels in the stator
4040
Nabehub
4242
erste Seite der Nabefirst side of the hub
4444
zweite Seite der Nabesecond side of the hub
5050
erste Hülsefirst sleeve
5252
zweite Hülsesecond sleeve
6060
Molekülmolecule
6262
AnsaugöffnungSuction opening
6464
Erweiterung des Einlassflansches 4Extension of the inlet flange 4
6666
TurbopumpstufeTurbo pump stage
6868
Rotorrotor
7070
RotorschaufelnRotor blades
7272
RotorscheibeRotor disk
7474
RotorscheibeRotor disk
7676
StatorscheibeStator disc
7878
StatorscheibeStator disc
8080
Pfeil (resultierende Geschwindigkeit)Arrow (resulting speed)
AA.
Pfeilarrow
BB.
Pfeilarrow

Claims (8)

  1. Vacuum pump or vacuum pump stage comprising a housing which has at least one inlet, and comprising a rotor which has a shaft, the inlet being arranged radially to the shaft, wherein the vacuum pump or vacuum pump stage has at least one Holweck pump stage with a rotor which has a shaft, a hub connected to the shaft, and a sleeve (52) which is connected to the hub and is concentric with the shaft,
    characterised in that the inlet (4) widens in the direction of the sleeve (52) and in the direction of the shaft (12), and in that the inlet (4) widens in the direction of rotation of the rotor, and in that the inlet (4) widens solely in the direction of rotation of the rotor.
  2. Vacuum pump according to claim 1, characterised in that the vacuum pump has at least one Holweck stage with one-piece shaft and surrounding stator, or at least one cross-thread Holweck stage with one-piece shaft, wherein a conveying structure is formed as an oppositely directed thread structure, or a turbo rotor of a turbo pump, wherein the conveying structure contains at least one turbo rotor disc (72, 74) and turbo stator disc (76, 78).
  3. Vacuum pump stage according to claim 1, characterised in that the vacuum pump stage is configured as a Holweck stage with one-piece shaft and surrounding stator, or as a cross-thread Holweck stage with one-piece shaft, wherein the conveying structure is formed as an oppositely directed thread structure.
  4. Vacuum pump or vacuum pump stage according to claim 1,
    characterised in that the inlet (4) is formed as an inlet (4) conducting a gas through the inlet (4) into channels (32) arranged in the direction of rotation of the rotor.
  5. Vacuum pump or vacuum pump stage according to any one of the preceding claims, characterised in that the inlet (4) widens in cross-section with a curved outer contour (64).
  6. Vacuum pump or vacuum pump stage according to any one of claims 1 to 5, characterised in that the inlet (4) widens linearly conically in cross-section.
  7. Vacuum pump according to any one of the preceding claims, characterised in that the vacuum pump (1) is configured as a molecular vacuum pump.
  8. Vacuum pump according to any one of the preceding claims, characterised in that the vacuum pump (1) is configured as a Holweck pump.
EP14196002.1A 2013-12-18 2014-12-03 Vacuum pump with improved inlet geometry Active EP2886870B2 (en)

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DE102013114290.7A DE102013114290A1 (en) 2013-12-18 2013-12-18 vacuum pump

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EP (1) EP2886870B2 (en)
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JP6578838B2 (en) * 2015-09-15 2019-09-25 株式会社島津製作所 Vacuum pump and mass spectrometer

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JPS6146492A (en) 1984-08-11 1986-03-06 Mitsuwa Seiki Co Ltd Molecular pump
JPH0213195U (en) * 1988-06-30 1990-01-26
FR2641582B1 (en) * 1989-01-09 1991-03-22 Cit Alcatel GAEDE CHANNEL TYPE VACUUM PUMP
JPH0475196U (en) * 1990-11-09 1992-06-30
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Publication number Publication date
EP2886870B1 (en) 2017-12-20
JP6118784B2 (en) 2017-04-19
EP2886870A1 (en) 2015-06-24
US20150167679A1 (en) 2015-06-18
JP2015117697A (en) 2015-06-25
DE102013114290A1 (en) 2015-06-18

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