EP2902637B1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
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- EP2902637B1 EP2902637B1 EP15150410.7A EP15150410A EP2902637B1 EP 2902637 B1 EP2902637 B1 EP 2902637B1 EP 15150410 A EP15150410 A EP 15150410A EP 2902637 B1 EP2902637 B1 EP 2902637B1
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- inlet
- vacuum pump
- vacuum
- chamber
- inlets
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- 230000004323 axial length Effects 0.000 claims description 6
- 238000005086 pumping Methods 0.000 description 35
- 230000008901 benefit Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000009456 molecular mechanism Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
Definitions
- the invention relates to a vacuum pump with at least one Holweckpump process with at least one Holweckstator and at least one Holweckrotor.
- the prior art ( EP 1 668 255 B1 ) includes a vacuum pump, which has two turbomolecular pumping stages and a Holweckpumpcut and is used for the evacuation of chambers of a mass spectrometer.
- an inlet is provided in front of the Holweckstator from a chamber to be evacuated and the incoming gas is passed completely through the Holweckpumpch.
- the prior art ( DE 10 2009 035 332 A1 ) includes a vacuum pump with a Holweckpumpfire and a turbomolecular pumping stage. In the area of the stator of the Holweckpumpfire a single inlet is arranged. This belonging to the prior art vacuum pump can be further improved in terms of efficiency.
- the technical problem underlying the invention is to pump the gas load, but with reduced power consumption.
- the vacuum pump according to the invention with at least one Holweckpump process with at least one Holweckstator and at least one Holweckrotor, wherein at least one gas inlet is provided in the Holweckstator the at least one Holweckpumphand, characterized in that at least two inlets are provided which are distributed in the axial length of the Holweckstators are arranged.
- This embodiment of a vacuum pump according to the invention has the advantage that the Holweck stage, which has an axial length, makes it possible to distribute one or more taps (Interstage ports) in axial length.
- At least two inlets are provided which are distributed in the axial length of the Holweckstators, as a result, a better division can be achieved.
- At least two inlets are provided in the tangential direction of the Holweckstators.
- gas inlets are provided in the axial direction of the Holweckstators.
- the gas inlets in the axial direction which are arranged at one and the same pressure level, but can be distributed over several inlets, which are advantageously arranged tangentially symmetrical in Holweckstator. However, they can also be arranged asymmetrically with respect to the radial circumference.
- the at least one inlet may be formed as a bore and / or slot and / or slot. These embodiments can be adapted to customer-specific requirements. This makes any geometry possible.
- a further embodiment of the invention provides that the inlets have the same or different cross sections.
- the inlets have different cross sections, as a result, an optimized pumping action can be adjusted.
- the openings of the inlets are advantageously larger than the openings in the fore-vacuum area.
- each inlet is connected to only one chamber to be evacuated.
- the arrangement of at least one inlet in the region of the Holweckstators has the advantage that in addition to the inlets further compression stages are present, which, as already stated, has a positive effect on the gas friction and the power consumption and temperature.
- At least one additional turbomolecular pump stage is advantageously provided.
- At least two inlets are arranged in the Holweckstator and the inlet, which is arranged in the axial direction of the vacuum pump closer to the turbomolecular pumping stage, is designed as an inlet arranged in the region of molecular flow.
- At least two inlets are arranged in the Holweckstator and the inlet, which is arranged in the axial direction of the vacuum pump further away from the turbomolecular pumping stage, is advantageously designed as an arranged in the region of the Knudsen flow inlet.
- Knudsen flow The transition from the viscous flow to the molecular flow is called Knudsen flow.
- the Knudsen flow prevails in the fine vacuum range from 0.1 Pascal to 100 Pascal.
- Knudsen number between 0.01 and 0.5 one speaks of Knudsen flow. Since many process pressures are in the fine vacuum range, this type of flow is correspondingly frequently represented in technical vacuum applications.
- the molecular flow prevails in contrast to the viscous flow, when the mean free path of the gas particles is significantly larger than the diameter of the flow, that is, when the Knudsen number is significantly greater than 1.
- the molecular flow is predominant in the high vacuum range ( 10 -3 to 10 -7 hPa) and ultrahigh vacuum range (smaller 10 -7 hPa).
- K n I ⁇ d ,
- the inlets are tapered in the direction of the Holweckrotors.
- the Holweckstator on channels and the at least one inlet is arranged in the region of a channel bottom.
- the pump-active structure of the Holweckstators is maintained, although an inlet is provided in the region of Holweckstators.
- the at least one inlet is arranged exclusively in a channel bottom. This ensures that the channels of the Holweckstators are not changed and thereby an optimal pumping action is achieved.
- a further advantageous embodiment of the invention provides that all inlets are arranged in the region of a channel bottom.
- a vacuum pump 1 and a chamber system 2 is shown in a chamber housing 2, a fore-vacuum chamber 4 and a high-vacuum chamber 12 are provided, which are connected to one another via a high-vacuum diaphragm 22.
- a particle beam can enter the pre-vacuum chamber 4 through a pre-vacuum diaphragm 14.
- a pump housing 40 of the vacuum pump 1 is vacuum-tight and releasably connected.
- a shaft 42 is arranged, which of a high-vacuum-side bearing 44 and a fore-vacuum side bearing 48 is rotatably supported.
- the storage can be realized, for example, by two bearings, furthermore, the vorvakuum possiblye bearing can be designed as a rolling bearing and the high-vacuum side bearing as a permanent magnet bearing. Even a fully magnetic storage is possible.
- a permanent magnet 52 is provided which cooperates with the magnetic field of a drive coil 50 and thus the shaft 42 is set in rapid rotation.
- fast means that the pump-active components develop a pumping effect due to molecular mechanisms and the rotational speed is at some 10,000 revolutions per minute.
- the vacuum pump 1 has a first inlet 80 and a second inlet 82.
- the first inlet 80 is connected to the fore-vacuum chamber 4, while the second inlet 82 is connected to the high-vacuum chamber 12.
- the gas entering the vacuum pump 1 through the first inlet 80 passes into a pumping stage 70, as does the second inlet 82.
- This pumping stage 70 is formed as a Holweckpump process with a Holweckstator 74 and a Holweckzylinder 72.
- the Holweckstator 74 essentially has a thick-walled hollow cylinder with thread-like, running on its inside channels 76 with a square cross section. Within this cylinder, a ring nut 72 connected to the shaft 42 runs.
- the ring nut cylinder 72 may be made of a compound material such as carbon fiber reinforced plastic (CFRP), but may also be made of a metal, ideally an aluminum alloy. This at least partially surrounds the high-vacuum side bearing 44 and a bearing support 46 which fixes this bearing 44 on the pump housing 10.
- CFRP carbon fiber reinforced plastic
- a further pumping stage 60 is provided in the vacuum pump 1.
- the pumping stage 60 is designed as a turbomolecular pumping stage and therefore has respective rotor disks 62 and stator disks 64 provided with a blade ring. These are axially spaced by spacers 66.
- the pumping stage 60 may comprise a plurality of rotor and stator disks, depending on the required pressure ratio between the suction region and the discharge region of the pumping stage. The gas is transferred from the pumping stage 60 to an outlet 54 of the vacuum pump 1 and leaves through this the vacuum pump 1.
- turbo disks 62 may be individually fitted to the shaft 42, but one-piece turbo disks (bell rotors) are also possible.
- the fore-vacuum chamber 4 is evacuated.
- the high vacuum chamber 12 is evacuated.
- the inlets 80 and 82 are at different pressure levels of the Holweckpumphand 70.
- the pressure level of the high vacuum chamber 12 is below the pressure level of the Vorvakuumhunt. 4
- the gas ejected from the pumping stage 70 is conveyed further by the pumping stage 60 in the direction of the outlet 54.
- the arrangement of the inlets 80 and 82 in the region of the Holweckstators 74 ensures that the high gas load of the chamber 4 does not completely through the Holweckpumptreatment 70 flows, but only through a part, so that the gas flow flowing through the inlet 80, a takes a shorter path through the Holweckcut. This reduces the gas friction and especially the power consumption and the temperature.
- Fig. 2 shows the vacuum pump 1 with a chamber housing 2. Parts with Fig. 1 match, are provided with the same reference numbers.
- the chamber housing 2 three chambers 5, 6, 7 are arranged. Between the chambers 5, 6, a diaphragm 3 and between the chambers 6, 7, a diaphragm 8 is arranged. In the aperture 3 and in the aperture 8 openings are provided, so that in the direction of arrows A, B, the gas can enter the adjacent chambers.
- the Holweckpumptreatment 70 with the Holweckstator 74 has two inlets 11, 13, through which the gas from the chamber 6 in the direction of arrows C, D can get into the Holweckpumptreatment 70.
- These multiple inlets 11, 13 have the advantage that they are distributed in the axial length of the vacuum pumping stage 70. This has the advantage that the high gas load of the corresponding chamber 6 does not flow completely through an inlet 11 of the Holweckhand 70, but divides, so that a portion of the gas stream takes a shorter path through the Holweckcut69. This reduces the gas friction and especially the power consumption and the temperature.
- a further outlet 9 is provided, so that the chamber 7 is evacuated by the turbomolecular pumping stage 60.
- a particle beam can enter the vacuum chamber 5.
- the gas exiting the chamber 6 into the Holweckpumptreatment 70 is provided by the Holweckpumptreatment 70, consisting from Holweckstator 74 and Holweckrotor 72, promoted toward the turbomolecular pumping stage 60 and discharged via an outlet 54.
- Fig. 3 shows the vacuum pump 1 with a chamber system 2. The same parts are provided with the same reference numbers.
- an additional aperture 15 is arranged, so that about 80% of the gas from the chamber 6 are evacuated through the inlet 11 in the region of the Holweckstators 74 and about the inlet 13 about 20%.
- the inlet 11 has a larger cross-section than the inlet 13. This means that the inlet, which is arranged closer to the turbomolecular pumping stage 60 in the axial direction, has a smaller cross-section than the inlet, which is arranged farther away from the turbomolecular pumping stage 60 ,
- the Holweckstator 74 channels 76.
- the inlet 11 is arranged in the region of a channel 76 in order not to substantially change the structure of the Holweckstators 74 and thereby achieve an optimized pumping action.
- Fig. 5 shows the Holweckstator 74 with the channels 76.
- Radially symmetrically distributed inlets 11, 16, 17 in the Holweckstator 74 are arranged. These inlets 11, 16, 17 are seen in the axial direction of Holweckstators 74 at a pressure level, that is arranged lying at the same height.
- the inlet 16 is designed to taper in the direction of the hollow rotor 72, for example, but the inlets may also be cylindrical in cross-section, like the inlet 11.
- Conceivable cooling is here a convection cooling, a forced air cooling by means of a fan or a water cooling.
- Fig. 6 shows a chamber 12 in which a gas load Q of 5 mbar l / s (liters per second) flows.
- the chamber 12 has a tap 82 to a Holweckcut 72, 74.
- the single tap 82 has an inverse flow resistance, or conductance L of 4 l / s.
- the pumping direction runs in the direction of arrow E.
- Fig. 7 an embodiment of the invention with two outlets 80, 82 is shown.
- the chamber 12 flows a gas load Q of 5 mbar l / s.
- the chamber 12 has the two taps 80, 82 to the Holweckhand 72, 74.
- the upper tap 82 has an inverse flow resistance or conductance L 1 of 4 l / s.
- S 0-1 of 10 l / s at the axial height of the upper tap.
- S eff -1 an effective pumping rate
- the lower tap 80 has an inverse flow resistance or conductance L 2 of 4 l / s.
- L 2 inverse flow resistance or conductance
- 74 there is a nominal pumping speed S 0 - 1 of 5 l / s at the axial height of the lower tap.
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- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Reciprocating Pumps (AREA)
Description
Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer Holweckpumpstufe mit wenigstens einem Holweckstator und wenigstens einem Holweckrotor.The invention relates to a vacuum pump with at least one Holweckpumpstufe with at least one Holweckstator and at least one Holweckrotor.
Zum Stand der Technik (
Bei dieser zum Stand der Technik gehörenden Vakuumpumpe ist vor dem Holweckstator ein Einlass aus einer zu evakuierenden Kammer vorgesehen und das einströmende Gas wird vollständig durch die Holweckpumpstufe geleitet.In this prior art vacuum pump, an inlet is provided in front of the Holweckstator from a chamber to be evacuated and the incoming gas is passed completely through the Holweckpumpstufe.
Diese zum Stand der Technik gehörende Vakuumpumpe weist den Nachteil auf, dass die hohe Gaslast einen hohen Druck erzeugt, der durch Gasreibung bedingt zu einer sehr hohen Leistungsaufnahme und hohen Temperaturen führt.This belonging to the prior art vacuum pump has the disadvantage that the high gas load generates a high pressure, which leads due to gas friction to a very high power consumption and high temperatures.
Zum Stand der Technik (
Weiterhin gehört zum Stand der Technik (
Darüber hinaus gehört zum Stand der Technik (
Weiterhin gehört zum Stand der Technik (
Das der Erfindung zugrundeliegende technische Problem besteht darin, die Gaslast zu pumpen, jedoch mit reduzierter Leistungsaufnahme.The technical problem underlying the invention is to pump the gas load, but with reduced power consumption.
Dieses technische Problem wird durch eine Vakuumpumpe mit den Merkmalen gemäß Anspruch 1 gelöst.This technical problem is solved by a vacuum pump having the features according to
Die erfindungsgemäße Vakuumpumpe mit wenigstens einer Holweckpumpstufe mit wenigstens einem Holweckstator und wenigstens einem Holweckrotor, bei der in dem Holweckstator der wenigstens einen Holweckpumpstufe wenigstens ein Gaseinlass vorgesehen ist, zeichnet sich dadurch aus, dass wenigstens zwei Einlässe vorgesehen sind, die in axialer Länge des Holweckstators verteilt angeordnet sind. Diese erfindungsgemäße Ausführung einer Vakuumpumpe weist den Vorteil auf, dass die Holweckstufe, die eine axiale Baulänge aufweist, es ermöglicht, einen oder mehrere Anzapfungen (Interstageports) in axialer Länge zu verteilen. Dies hat den Vorteil, dass die hohe Gaslast der entsprechenden Kammer, die dem Einlass zugeordnet ist, nicht komplett durch eine Anzapfung der Holweckstufe strömt, sondern sich aufteilt, so dass ein Teil des Gasstromes einen kürzeren Weg durch die Holweckstufe nimmt. Hierdurch reduziert sich die Gasreibung und besonders die Leistungsaufnahme und die Temperatur.The vacuum pump according to the invention with at least one Holweckpumpstufe with at least one Holweckstator and at least one Holweckrotor, wherein at least one gas inlet is provided in the Holweckstator the at least one Holweckpumpstufe, characterized in that at least two inlets are provided which are distributed in the axial length of the Holweckstators are arranged. This embodiment of a vacuum pump according to the invention has the advantage that the Holweck stage, which has an axial length, makes it possible to distribute one or more taps (Interstage ports) in axial length. This has the advantage that the high gas load of the corresponding chamber, which is associated with the inlet, does not flow completely through a tapping of the Holweck stage, but divides itself, so that a part of the gas stream takes a shorter path through the Holweck stage. This reduces the gas friction and especially the power consumption and the temperature.
Gemäß dem Stand der Technik ist bekannt, wenigstens einen Gaseinlass in dem Holweckstator vorzusehen. Hierdurch wird schon erreicht, dass die hohe Gaslast nicht komplett durch die gesamte Holweckstufe strömt.According to the prior art, it is known to provide at least one gas inlet in the Holweckstator. This already ensures that the high gas load does not flow completely through the entire Holweckstufe.
Gemäß der Erfindung sind wenigstens zwei Einlässe vorgesehen, die in axialer Länge des Holweckstators verteilt angeordnet sind, da hierdurch eine bessere Aufteilung erzielt werden kann.According to the invention, at least two inlets are provided which are distributed in the axial length of the Holweckstators, as a result, a better division can be achieved.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung sind in tangentialer Richtung des Holweckstators wenigstens zwei Einlässe vorgesehen.According to a further advantageous embodiment of the invention, at least two inlets are provided in the tangential direction of the Holweckstators.
Das bedeutet, dass in axialer Richtung des Holweckstators wenigstens zwei Gaseinlässe vorgesehen sind. Die Gaseinlässe in axialer Richtung, die auf ein und demselben Druckniveau angeordnet sind, können sich jedoch auf mehrere Einlässe verteilen, die vorteilhaft tangentialsymmetrisch im Holweckstator angeordnet sind. Sie können jedoch auch asymmetrisch, bezogen auf den radialen Umfang angeordnet sein.This means that at least two gas inlets are provided in the axial direction of the Holweckstators. The gas inlets in the axial direction, which are arranged at one and the same pressure level, but can be distributed over several inlets, which are advantageously arranged tangentially symmetrical in Holweckstator. However, they can also be arranged asymmetrically with respect to the radial circumference.
Der wenigstens eine Einlass kann als Bohrung und/oder Langloch und/oder Schlitz ausgebildet sein. Diese Ausführungsformen können den kundenspezifischen Anforderungen angepasst werden. Damit ist jede beliebige Geometrie möglich.The at least one inlet may be formed as a bore and / or slot and / or slot. These embodiments can be adapted to customer-specific requirements. This makes any geometry possible.
Eine weitere Ausführungsform der Erfindung sieht vor, dass die Einlässe gleiche oder unterschiedliche Querschnitte aufweisen.A further embodiment of the invention provides that the inlets have the same or different cross sections.
Vorteilhaft weisen die Einlässe unterschiedliche Querschnitte auf, da hierdurch eine optimierte Pumpwirkung eingestellt werden kann.Advantageously, the inlets have different cross sections, as a result, an optimized pumping action can be adjusted.
Im Hochvakuumbereich sind die Öffnungen der Einlässe vorteilhaft größer als die Öffnungen im Vorvakuumbereich.In the high vacuum range, the openings of the inlets are advantageously larger than the openings in the fore-vacuum area.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist jeder Einlass mit lediglich einer zu evakuierenden Kammer verbunden.According to a further advantageous embodiment of the invention, each inlet is connected to only one chamber to be evacuated.
Es besteht jedoch auch die Möglichkeit, dass mehrere Einlässe mit lediglich einer zu evakuierenden Kammer verbunden sind. Vorteilhaft ist auch, dass mit mehreren Anzapfungen ein niedrigerer Druck in der Kammer erreicht wird. Durch unterschiedliche Einlassgeometrien kann daher auch ein vom Anwender gewünschtes Druckprofil in der Kammer erreicht werden.However, there is also the possibility that several inlets are connected to only one chamber to be evacuated. It is also advantageous that with a plurality of taps a lower pressure in the chamber is achieved. By different inlet geometries, therefore, a user-desired pressure profile in the chamber can be achieved.
Die Anordnung von wenigstens einem Einlass im Bereich des Holweckstators hat den Vorteil, dass neben den Einlässen weitere Verdichtungsstufen vorhanden sind, was sich, wie schon ausgeführt, positiv auf die Gasreibung sowie die Leistungsaufnahme und die Temperatur auswirkt.The arrangement of at least one inlet in the region of the Holweckstators has the advantage that in addition to the inlets further compression stages are present, which, as already stated, has a positive effect on the gas friction and the power consumption and temperature.
Durch einen zweiten Einlass wird also die Gasreibung in der Holweckstufe vermindert. Diese Verminderung kann auch dazu genutzt werden, wiederum eine höhere Gaslast zu pumpen, um die gleiche Gasreibung wie im Stand der Technik zu erreichen.By a second inlet so the gas friction is reduced in the Holweckstufe. This reduction can also be used to pump a higher gas load again to achieve the same gas friction as in the prior art.
In der Vakuumpumpe ist vorteilhaft wenigstens eine zusätzliche Turbomolekularpumpstufe vorgesehen.In the vacuum pump, at least one additional turbomolecular pump stage is advantageously provided.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung sind in dem Holweckstator wenigstens zwei Einlässe angeordnet und der Einlass, der in axialer Richtung der Vakuumpumpe näher an der Turbomolekularpumpstufe angeordnet ist, ist als ein im Bereich molekularer Strömung angeordneter Einlass ausgebildet.According to a further advantageous embodiment of the invention, at least two inlets are arranged in the Holweckstator and the inlet, which is arranged in the axial direction of the vacuum pump closer to the turbomolecular pumping stage, is designed as an inlet arranged in the region of molecular flow.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung sind in dem Holweckstator wenigstens zwei Einlässe angeordnet und der Einlass, der in axialer Richtung der Vakuumpumpe weiter entfernt von der Turbomolekularpumpstufe angeordnet ist, ist vorteilhaft als ein im Bereich der Knudsen-Strömung angeordneter Einlass ausgebildet.According to a further advantageous embodiment of the invention, at least two inlets are arranged in the Holweckstator and the inlet, which is arranged in the axial direction of the vacuum pump further away from the turbomolecular pumping stage, is advantageously designed as an arranged in the region of the Knudsen flow inlet.
Der Übergang von der viskosen Strömung zur molekularen Strömung wird Knudsen-Strömung genannt. Die Knudsen-Strömung herrscht im Feinvakuumbereich von 0,1 Pascal bis 100 Pascal.The transition from the viscous flow to the molecular flow is called Knudsen flow. The Knudsen flow prevails in the fine vacuum range from 0.1 Pascal to 100 Pascal.
Liegt die Knudsen-Zahl zwischen 0,01 und 0,5 spricht man von Knudsen-Strömung. Da viele Prozessdrücke im Feinvakuumbereich liegen, ist diese Strömungsart in technischen Vakuumanwendungen entsprechend häufig vertreten.If the Knudsen number between 0.01 and 0.5 one speaks of Knudsen flow. Since many process pressures are in the fine vacuum range, this type of flow is correspondingly frequently represented in technical vacuum applications.
Bei Knudsen-Zahlen größer als 0,5 findet eine Wechselwirkung der Teilchen untereinander praktisch nicht mehr statt. Es herrscht Molekularströmung. Die mittlere freie Weglänge ist deutlich größer als die Weite des Strömungskanals. In diesem Fall entspricht die Weite des Strömungskanal typischerweise dem Querschnitt des Einlasses.With Knudsen numbers greater than 0.5, an interaction of the particles with each other practically no longer takes place. There is molecular flow. The mean free path is significantly larger than the width of the flow channel. In this case, the width of the flow channel typically corresponds to the cross section of the inlet.
Die molekulare Strömung herrscht im Gegensatz zur viskosen Strömung vor, wenn die mittlere freie Weglänge der Gasteilchen deutlich größer ist als der Durchmesser der Strömung, das heißt, wenn die Knudsen-Zahl deutlich größer als 1 ist. Die molekulare Strömung ist im Hochvakuumbereich (10-3 bis 10-7 hPa) und Ultrahochvakuumbereich (kleiner 10-7 hPa) vorherrschend.The molecular flow prevails in contrast to the viscous flow, when the mean free path of the gas particles is significantly larger than the diameter of the flow, that is, when the Knudsen number is significantly greater than 1. The molecular flow is predominant in the high vacuum range ( 10 -3 to 10 -7 hPa) and ultrahigh vacuum range (smaller 10 -7 hPa).
Die Knudsenzahl Kn ist das Verhältnis von mittlerer freier Weglänge (I̅) und dem Durchmesser (d) eines Strömungskanals:
Gemäß einer vorteilhaften Ausführungsform der Erfindung sind die Einlässe in Richtung des Holweckrotors sich verjüngend ausgebildet. Durch diese in radialer Richtung vorhandene Verjüngung der Einlässe erhält man eine Optimierung der Einlaufströmung, wodurch sich die Leistung der Pumpstufe deutlich verbessert.According to an advantageous embodiment of the invention, the inlets are tapered in the direction of the Holweckrotors. By means of this tapering of the inlets existing in the radial direction, an optimization of the inlet flow is obtained, as a result of which the power of the pumping stage is significantly improved.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung weist der Holweckstator Kanäle auf und der wenigstens eine Einlass ist im Bereich eines Kanalgrundes angeordnet. Hierdurch bleibt die pumpaktive Struktur des Holweckstators erhalten, obwohl ein Einlass im Bereich des Holweckstators vorgesehen ist.According to a further advantageous embodiment of the invention, the Holweckstator on channels and the at least one inlet is arranged in the region of a channel bottom. As a result, the pump-active structure of the Holweckstators is maintained, although an inlet is provided in the region of Holweckstators.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist der wenigstens eine Einlass ausschließlich in einem Kanalgrund angeordnet. Hierdurch ist gewährleistet, dass die Kanäle des Holweckstators nicht verändert werden und hierdurch eine optimale Pumpwirkung erzielt wird.According to a further advantageous embodiment of the invention, the at least one inlet is arranged exclusively in a channel bottom. This ensures that the channels of the Holweckstators are not changed and thereby an optimal pumping action is achieved.
Eine weitere vorteilhafte Ausführungsform der Erfindung sieht vor, dass sämtliche Einlässe im Bereich eines Kanalgrundes angeordnet sind.A further advantageous embodiment of the invention provides that all inlets are arranged in the region of a channel bottom.
Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der mehrere Ausführungsbeispiele einer erfindungsgemäßen Vakuumpumpe nur beispielhaft dargestellt sind. In der Zeichnung zeigen:
- Fig. 1
- einen Längsschnitt durch eine Vakuumpumpe mit Holweckpumpstufe;
- Fig. 2
- eine Prinzipdarstellung einer Vakuumpumpe im Längsschnitt;
- Fig. 3
- ein geändertes Ausführungsbeispiel;
- Fig. 4
- einen Längsschnitt durch einen Holweckstator;
- Fig. 5
- einen Querschnitt durch einen Holweckstator,
- Fig. 6
- ein Berechnungsbeispiel einer zum Stand der Technik gehörenden Holweckpumpstufe;
- Fig. 7
- ein Berechnungsbeispiel für eine Holweckpumpstufe gemäß der Erfindung.
- Fig. 1
- a longitudinal section through a vacuum pump with Holweckpumpstufe;
- Fig. 2
- a schematic diagram of a vacuum pump in longitudinal section;
- Fig. 3
- a modified embodiment;
- Fig. 4
- a longitudinal section through a Holweckstator;
- Fig. 5
- a cross section through a Holweckstator,
- Fig. 6
- a calculation example of a Holweckpumpstufe belonging to the prior art;
- Fig. 7
- a calculation example for Holweckpumpstufe according to the invention.
In
Mit dem Kammergehäuse 2 ist ein Pumpengehäuse 40 der Vakuumpumpe 1 vakuumdicht und lösbar verbunden. In einem Pumpengehäuse 40 ist eine Welle 42 angeordnet, welche von einem hochvakuumseitigen Lager 44 und einem vorvakuumseitigen Lager 48 drehbar unterstützt wird.With the
Dabei sind beliebige Lagerungen denkbar. Die Lagerung kann zum Beispiel durch zwei Wälzlager realisiert werden, weiterhin kann das vorvakuumseitige Lager als Wälzlager ausgeführt sein und das hochvakuumseitige Lager als Permanentmagnetlager. Auch eine vollmagnetische Lagerung ist möglich.Any storage is conceivable. The storage can be realized, for example, by two bearings, furthermore, the vorvakuumseitige bearing can be designed as a rolling bearing and the high-vacuum side bearing as a permanent magnet bearing. Even a fully magnetic storage is possible.
Auf der Welle 42 ist ein Permanentmagnet 52 vorgesehen, der mit dem magnetischen Feld einer Antriebsspule 50 zusammenwirkt und damit die Welle 42 in schnelle Drehung versetzt. Schnell bedeutet im Rahmen einer solchen Vakuumpumpe 1, dass die pumpaktiven Bauteile eine Pumpwirkung aufgrund molekularer Mechanismen entfalten und die Drehzahl bei einigen 10.000 Umdrehungen pro Minute liegen.On the
Die Vakuumpumpe 1 weist einen ersten Einlass 80 und einen zweiten Einlass 82 auf. Der erste Einlass 80 ist mit der Vorvakuumkammer 4 verbunden, während der zweite Einlass 82 mit der Hochvakuumkammer 12 verbunden ist. Das durch den ersten Einlass 80 in die Vakuumpumpe 1 eintretende Gas gelangt in eine Pumpstufe 70, ebenso wie der zweite Einlass 82. Diese Pumpstufe 70 ist als Holweckpumpstufe ausgebildet mit einem Holweckstator 74 und einem Holweckzylinder 72. Der Holweckstator 74 weist im Wesentlichen einen dickwandigen Hohlzylinder mit gewindeartigen, an seiner Innenseite verlaufenden Kanälen 76 mit viereckigem Querschnitt auf. Innerhalb dieses Zylinders läuft ein mit der Welle 42 verbundener Holweckzylinder 72. Der Holweckzylinder 72 kann aus einem Compound-Material, wie zum Beispiel kohlenstofffaserverstärktem Kunststoff (CFK) hergestellt sein, kann aber auch aus einem Metall, idealerweise einer Aluminiumlegierung bestehen. Dieser umgibt wenigstens teilweise das hochvakuumseitige Lager 44 und einen Lagerträger 46, der dieses Lager 44 am Pumpengehäuse 10 fixiert.The
In der Vakuumpumpe 1 ist eine weitere Pumpstufe 60 vorgesehen. Die Pumpstufe 60 ist als Turbomolekularpumpstufe gestaltet und weist daher jeweils mit einem Schaufelkranz versehene Rotorscheiben 62 und Statorscheiben 64 auf. Diese sind durch Distanzringe 66 axial beabstandet. Die Pumpstufe 60 kann eine Mehrzahl von Rotor- und Statorscheiben umfassen, je nach gefordertem Druckverhältnis zwischen Ansaugbereich und Ausstoßbereich der Pumpstufe. Das Gas wird von der Pumpstufe 60 an einen Auslass 54 der Vakuumpumpe 1 übergeben und verlässt durch diesen die Vakuumpumpe 1.In the
Die Turboscheiben 62 können zum Beispiel einzeln auf die Welle 42 gefügt werden, aber auch einstückige Turboscheiben (Glockenrotor) sind möglich.For example, the
Durch den Einlass 80 wird die Vorvakuumkammer 4 evakuiert. Durch den Einlass 82 wird die Hochvakuumkammer 12 evakuiert. Die Einlässe 80 und 82 befinden sich auf verschiedenen Druckniveaus der Holweckpumpstufe 70. Das Druckniveau der Hochvakuumkammer 12 liegt unterhalb des Druckniveaus der Vorvakuumkammer 4.Through the
Das von der Pumpstufe 70 ausgestoßene Gas wird von der Pumpstufe 60 weitergefördert in Richtung Auslass 54.The gas ejected from the pumping
Durch die Anordnung der Einlässe 80 und 82 im Bereich des Holweckstators 74 wird erreicht, dass die hohe Gaslast der Kammer 4 nicht komplett durch die Holweckpumpstufe 70 strömt, sondern lediglich durch einen Teil, so dass der Gasstrom, der durch den Einlass 80 einströmt, einen kürzeren Weg durch die Holweckstufe nimmt. Hierdurch reduziert sich die Gasreibung und besonders die Leistungsaufnahme und die Temperatur.The arrangement of the
Die Holweckpumpstufe 70 mit dem Holweckstator 74 weist zwei Einlässe 11, 13 auf, durch die das Gas aus der Kammer 6 in Richtung der Pfeile C, D in die Holweckpumpstufe 70 gelangen kann. Diese mehreren Einlässe 11, 13 weisen den Vorteil auf, dass sie in axialer Länge der Vakuumpumpstufe 70 verteilt angeordnet sind. Dies hat den Vorteil, dass die hohe Gaslast der entsprechenden Kammer 6 nicht komplett durch einen Einlass 11 der Holweckstufe 70 strömt, sondern sich aufteilt, so dass ein Teil des Gasstromes einen kürzeren Weg durch die Holweckstufe 70 nimmt. Dadurch reduziert sich die Gasreibung und besonders die Leistungsaufnahme und die Temperatur.The
In der Kammer 7 ist ein weiterer Auslass 9 vorgesehen, so dass die Kammer 7 von der Turbomolekularpumpstufe 60 evakuiert wird.In the
Durch die Vorvakuumblende 14 kann ein Teilchenstrahl in die Vakuumkammer 5 gelangen.Through the
Das aus der Kammer 6 in die Holweckpumpstufe 70 austretende Gas wird von der Holweckpumpstufe 70, bestehend aus Holweckstator 74 und Holweckrotor 72, in Richtung der Turbomolekularpumpstufe 60 gefördert und über einen Auslass 54 ausgestoßen.The gas exiting the
In der Kammer 6 ist eine zusätzliche Blende 15 angeordnet, so dass durch den Einlass 11 im Bereich des Holweckstators 74 circa 80 % des Gases aus der Kammer 6 evakuiert werden und über den Einlass 13 circa 20 %.In the
Vorteilhaft weist der Einlass 11 einen größeren Querschnitt auf als der Einlass 13. Das bedeutet, dass der Einlass, der in axialer Richtung näher an der Turbomolekularpumpstufe 60 angeordnet ist, einen kleineren Querschnitt aufweist als der Einlass, der weiter entfernt von der Turbomolekularpumpstufe 60 angeordnet ist.Advantageously, the
Wie in
Die Vakuumpumpe kann durch hohe Gasreibung sehr heiß werden. Daher muss in bestimmten Anwendungsfällen die Wärme mittels Kühlung abgeführt werden. Denkbare Kühlungen sind hier eine Konvektionskühlung, eine gezwungene Luftkühlung mittels Lüfter oder eine Wasserkühlung.The vacuum pump can become very hot due to high gas friction. Therefore, in certain applications, the heat must be dissipated by means of cooling. Conceivable cooling is here a convection cooling, a forced air cooling by means of a fan or a water cooling.
Zusammen mit dem Leitwert der Anzapfung 82 gibt es ein effektives Saugvermögen Seff von 2,86 l/s in der Kammer 12. Damit resultiert ein Kammerdruck pKammer von 1,75 mbar.Together with the conductance of the
In der Holweckstufe 72, 74 selbst stellt sich ein Druck (Holweckdruck) pHW von 0,5 mbar ein. Am Auslass der Holweckstufe beträgt das Saugvermögen am Auslass S 0Auslass = 5 l/s. Damit beträgt der Druck in der Holweckstufe (Auslassdruck Holweckstufe) pAuslass = 1 mbar.In the
Die Pumprichtung verläuft in Richtung des Pfeiles E.The pumping direction runs in the direction of arrow E.
Gemäß
Die untere Anzapfung 80 hat einen inversen Stömungswiderstand beziehungsweise Leitwert L 2 von 4 l/s. In der pumpenden Holweckstufe 72, 74 gibt es auf der axialen Höhe der unteren Anzapfung ein nominelles Saugvermögen S0-1 von 5 l/s.The
Zusammen mit dem Leitwert der unteren Anzapfung 80 gibt es ein effektives Saugvermögen S eff-2 von 2,22 l/s bei der unteren Anzapfung 80 der Kammer 12.Together with the conductance of the
Damit resultiert ein Gesamtsaugvermögen Seff Ges in der Kammer von 5,08 l/s. Damit resultiert ein Kammerdruck pKammer von 0,98 mbar. Die Gaslast beträgt durch die obere Anzapfung Q 1 = 2,81 mbar l/s. Die Gaslast durch die untere Anzapfung beträgt Q 2 = 2,19 mbar l/s. Damit beträgt der Druck an der oberen Anzapfung in der Holweckstufe pHW1 = 0,281 mbar. Der Druck an der unteren Anzapfung in der Holweckstufe beträgt pHW2 = 1 mbar.This results in a total absorbency S eff Ges in the chamber of 5.08 l / s. This results in a chamber pressure p chamber of 0.98 mbar. The gas load is through the upper tap Q 1 = 2.81 mbar l / s. The gas load through the lower tap is Q 2 = 2.19 mbar l / s. Thus, the pressure at the upper tap in the Holweckstufe p HW1 = 0.281 mbar. The pressure at the lower tap in the Holweck stage is p HW2 = 1 mbar.
Damit erhält man einen niedrigeren Kammerdruck, eine kleinere Gaslast in dem oberen Teil der Holweckstufe, einen niedrigeren Druck entlang der Holweckstufe und eine geringere Gasreibung in der gesamten Holweckstufe.This results in a lower chamber pressure, a smaller gas load in the upper part of the Holweck stage, a lower pressure along the Holweck stage and a lower gas friction throughout the Holweck stage.
- 11
- Vakuumpumpevacuum pump
- 22
- Kammergehäusechamber housing
- 33
- Blendecover
- 44
- Vorvakuumkammerpreliminary vacuum
- 55
- Kammerchamber
- 66
- Kammerchamber
- 77
- Kammerchamber
- 88th
- Blendecover
- 99
- Auslassoutlet
- 1010
- Pumpengehäusepump housing
- 1111
- Einlassinlet
- 1212
- HochvakuumkammerHigh vacuum chamber
- 1313
- Einlassinlet
- 1414
- VorvakuumblendeVorvakuumblende
- 1515
- Blendecover
- 1616
- Einlassinlet
- 1717
- Einlassinlet
- 2222
- HochvakuumblendeHigh vacuum aperture
- 4040
- Pumpengehäusepump housing
- 4242
- Wellewave
- 4444
- Lagercamp
- 4646
- Lagerträgerbearing bracket
- 4848
- Lagercamp
- 5050
- Antriebsspuledrive coil
- 5252
- Permanentmagnetpermanent magnet
- 5454
- Auslassoutlet
- 6060
- TurbomolekularpumpstufeTurbo molecular pump stage
- 6262
- Rotorscheiberotor disc
- 6464
- Statorscheibestator
- 6666
- Distanzringspacer
- 7070
- HolweckpumpstufeHolweckpumpstufe
- 7272
- HolweckzylinderHolweckzylinder
- 7474
- HolweckstatorHolweckstator
- 7676
- Kanälechannels
- 8080
- Einlassinlet
- 8282
- Einlassinlet
- AA
- Pfeilarrow
- BB
- Pfeilarrow
- CC
- Pfeilarrow
- DD
- Pfeilarrow
- Ee
- Pfeilarrow
Claims (9)
- Vacuum pump having at least one Holweck pump stage comprising at least one Holweck stator and at least one Holweck rotor, wherein in the Holweck stator (74) of the at least one Holweck pump stage (70) at least one gas inlet (11, 13, 16, 17) is provided,
characterised in that at least two inlets (11, 13) are provided which are arranged distributed in the axial length of the Holweck stator. - Vacuum pump according to claim 1, characterised in that at least two inlets (11, 13, 16, 17) are provided in the tangential direction of the Holweck stator (74).
- Vacuum pump according to claim 2, characterised in that the at least two inlets (11, 13, 16, 17) are arranged tangentially symmetrically or asymmetrically in the Holweck stator (74).
- Vacuum pump according to one of the preceding claims, characterised in that the at least one inlet (11, 13, 16, 17) is configured as a bore and/or an elongate hole and/or a slit.
- Vacuum pump according to one of the preceding claims, characterised in that the vacuum pump (1) comprises at least one additional turbomolecular pump stage (60).
- Vacuum pump according to one of the preceding claims, characterised in that at least one inlet (11, 82) in the high vacuum range has a larger cross-section than at least one inlet (13, 80) in the fore-vacuum range.
- Vacuum pump according to one of the preceding claims, characterised in that at the at least one inlet (11, 13, 80, 82) an applied pressure of from 1 to 100 Pascal is provided.
- Vacuum pump according to one of the preceding claims, characterised in that the inlets (16) are configured narrowing in the direction of the Holweck rotor (72).
- Vacuum pump according to one of the preceding claims, characterised in that the Holweck stator (74) has channels (76), and in that the at least one inlet (11, 13, 16, 17, 80, 82) is arranged in the region of a channel bottom or in that the at least one inlet (11, 13, 16, 17, 80, 82) is arranged exclusively in a channel bottom or in that all the inlets (11, 13, 16, 17, 80, 82) are arranged in the region of a channel bottom.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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DE102014101257.7A DE102014101257A1 (en) | 2014-02-03 | 2014-02-03 | vacuum pump |
Publications (3)
Publication Number | Publication Date |
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EP2902637A2 EP2902637A2 (en) | 2015-08-05 |
EP2902637A3 EP2902637A3 (en) | 2015-09-02 |
EP2902637B1 true EP2902637B1 (en) | 2017-11-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP15150410.7A Active EP2902637B1 (en) | 2014-02-03 | 2015-01-08 | Vacuum pump |
Country Status (2)
Country | Link |
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EP (1) | EP2902637B1 (en) |
DE (1) | DE102014101257A1 (en) |
Families Citing this family (1)
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JP6578838B2 (en) * | 2015-09-15 | 2019-09-25 | 株式会社島津製作所 | Vacuum pump and mass spectrometer |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE10302987A1 (en) * | 2003-01-25 | 2004-08-05 | Inficon Gmbh | Leak detector with an inlet |
DE10308420A1 (en) * | 2003-02-27 | 2004-09-09 | Leybold Vakuum Gmbh | Test gas leak detector |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE202005019644U1 (en) * | 2005-12-16 | 2007-04-26 | Leybold Vacuum Gmbh | Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings |
DE102008024764A1 (en) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Multi-stage vacuum pump |
DE102009035332A1 (en) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | vacuum pump |
WO2012104387A1 (en) * | 2011-02-03 | 2012-08-09 | Oerlikon Leybold Vacuum Gmbh | Leakage search device |
-
2014
- 2014-02-03 DE DE102014101257.7A patent/DE102014101257A1/en active Pending
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2015
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Non-Patent Citations (1)
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DE102014101257A1 (en) | 2015-08-06 |
EP2902637A2 (en) | 2015-08-05 |
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