EP2836722B1 - Pompe à vide à palettes rotatives - Google Patents

Pompe à vide à palettes rotatives Download PDF

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Publication number
EP2836722B1
EP2836722B1 EP13708741.7A EP13708741A EP2836722B1 EP 2836722 B1 EP2836722 B1 EP 2836722B1 EP 13708741 A EP13708741 A EP 13708741A EP 2836722 B1 EP2836722 B1 EP 2836722B1
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EP
European Patent Office
Prior art keywords
channel
rotary vane
vane pump
vacuum rotary
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13708741.7A
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German (de)
English (en)
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EP2836722A2 (fr
Inventor
Laurent FURRER
Jean-Francois Aubert
Frederic Jeziorowski
Laurent BREGIER
Eric Figoni
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Leybold GmbH
Original Assignee
Leybold GmbH
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Filing date
Publication date
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Publication of EP2836722A2 publication Critical patent/EP2836722A2/fr
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Publication of EP2836722B1 publication Critical patent/EP2836722B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves

Definitions

  • the invention relates to a vacuum rotary vane pump.
  • Rotary vane vacuum pumps have a suction chamber arranged in a housing.
  • a rotor is arranged eccentrically within the housing.
  • Two or more slides are usually connected to the rotor in slide slots.
  • the slides are pressed against an inner wall of the pump chamber while the rotor is rotating.
  • a suction opening of the vacuum rotary vane pump is connected to the room to be vacuumed. Due to the eccentricity of the rotor and the changing size of the chambers formed between the slides, the medium is conveyed through one or more discharge channels.
  • a certain amount of oil is always present in the pump chamber to form an oil film. Since the ejected medium is thus mixed with oil, the at least one ejection channel usually runs from the pump chamber into an oil chamber.
  • the vacuum rotary vane pump is suddenly stopped, for example due to a failure, the result is that the pump chamber overflows with oil via the lubricant supply. This leads to an increased torque as well as increased noise development during the next Starting the pump. Furthermore, the slide can be damaged due to the increased torque. There is also the risk that oil will enter the room to be vacuumed and cause damage there. It is therefore necessary that the suction chamber of the vacuum rotary vane pump is brought to atmospheric pressure after it has been stopped in order to prevent the lubricant from flowing in.
  • EP 1 899 608 B1 a vacuum rotary vane pump is known in which a compensation channel is connected to the discharge channel. There is essentially atmospheric pressure at the compensation channel.
  • the compensation channel is arranged in a flange of the pump housing and covered by a valve plate of the valve device. This solution by the applicant can prevent the pump chamber from filling up when the vacuum rotary vane pump fails or is switched off. If the vacuum rotary vane pump fails or is switched off, air is sucked into the pump chamber through the compensation channel, so that after a short time atmospheric pressure prevails in the pump chamber or the part of the pump chamber connected to the discharge channel.
  • the object of the invention is to provide a covered groove in the flange to develop an alternative solution that can be retrofitted, if necessary, more cost-effectively and / or in existing pumps.
  • the pump chamber is connected to an oil chamber via a discharge channel, a valve device being arranged between the oil chamber and the discharge channel.
  • the valve device serves to prevent a backflow of medium, d. H. usually a mixture of oil and air from the oil chamber to prevent the pump chamber.
  • at least one compensation channel is provided which connects the discharge channel to an area in which there is essentially atmospheric pressure.
  • the compensation channel is preferably connected to an air space of the oil chamber, the air space of the oil chamber being the area of the oil chamber which is above the oil bath and in which air, which may have been enriched with oil, is essentially present.
  • the medium By providing such a compensation channel in connection with a valve device arranged between the oil chamber and the discharge channel, the medium is pressed out of the pump chamber into the discharge channel during operation, whereby the medium, which is usually a mixture of gas such as air and oil acts, passes through the valve device into the oil chamber. Part of the oil present in the medium is pressed into the equalization channel or sucked in by it and thus seals it off. This ensures that no fresh air is sucked in via the compensation channel during operation, or that air with ambient pressure gets into the discharge channel. If the vacuum rotary vane pump fails or if the vacuum rotary vane pump is deliberately stopped, the oil is pressed out of the capillary and air is sucked in through the equalization channel due to the lower pressure prevailing in the pump chamber.
  • the medium which is usually a mixture of gas such as air and oil acts
  • the compensation channel is integrated into the valve device. This makes it possible, for example, to manufacture the valve device independently of the housing, in particular a groove provided in the housing. This has the advantage that a valve device configured according to the invention and having the compensation channel can be used for differently configured rotary vane pumps. It is also possible to retrofit existing rotary vane pumps by simply replacing the valve device.
  • the valve device has a valve plate which closes the discharge channel and which interacts with a spring element.
  • the spring element exerts a closing force on the valve plate.
  • the spring element is preferably also plate-shaped and has an elastic material for generating the spring force.
  • the valve plate has a connecting opening connected to the discharge channel.
  • the connection opening opens into the compensation channel.
  • the cross-sectional area of the connection opening and preferably also of the compensation channel is preferably selected as a function of the viscosity of the lubricant in such a way that the at least one compensation channel forms a capillary channel into which oil is sucked in during operation. This closes the compensation channel during operation.
  • a controlled and defined emulsification of the oil is also achieved by providing the compensation channel.
  • the compensation channel is at least partially filled with oil, while the medium is conveyed from an area of the pump chamber between two adjacent slides into the discharge channel. If the following slide then subsequently passes the opening of the discharge channel connected to the pump chamber, the oil supply stored in the compensation channel is conveyed into this chamber. A small amount of air is sucked in from the equalization duct, which leads to the emulsion of the oil.
  • good emulsification of the lubricant can be ensured in particular through the number and shape of the compensating channels.
  • the provision according to the invention of at least one equalizing channel thus also leads to a noise reduction in the rotational speed limit ranges of the vacuum rotary vane pump.
  • the small cross-sectional area of the at least one equalization channel ensures that only a small amount of air gets into the pump.
  • the amount of oil temporarily stored in the equalization channel (s) and the amount of air sucked in can be determined by the number and cross-sectional area and the shape of the at least one equalization channel.
  • an intermediate element is provided between the valve plate and the spring element of the valve device.
  • the at least one compensation channel is formed by the intermediate element.
  • the intermediate element preferably delimits the compensation channel laterally and below, so that a compensation channel opening is formed in an upper region of the intermediate element.
  • the compensation channel opening is connected to the oil chamber, the connection being made in the area of the oil chamber in which there is gas or air.
  • the lower area is thus the area opposite the upper area, the lower area preferably being arranged in the oil bath of the oil chamber.
  • the compensation channel is delimited by the valve plate and the spring element.
  • a versatile closed channel is formed which has an equalizing channel opening in the upper area and is closed in the lower area.
  • the intermediate element is preferably designed in such a way that it partially surrounds the connection opening.
  • the intermediate element is preferably U-shaped. If several compensation channels are provided, several individual intermediate elements or a common intermediate element can also be provided. Here, the individual intermediate elements are preferably U-shaped or, in the case of a common intermediate element, the intermediate elements have corresponding slots or openings that form the compensating channels.
  • the at least one intermediate element can be connected to the valve plate and / or the spring element or an intermediate part arranged between the spring element and the intermediate element. This can be done, for example, by gluing or welding. It is also possible for the intermediate element to be designed in one piece with the valve plate and / or the spring element. In particular, a one-piece design with the spring element made from an elastic plastic can take place. Preferably that is Intermediate element also made of elastic material in order to be able to guarantee a good seal.
  • the at least one intermediate element is made from elastomeric plastic. This can be a separate intermediate element that forms one or more compensating
  • the at least one compensation channel is provided in the valve plate.
  • a slot or a groove can be provided in the valve plate.
  • the at least one equalization channel formed in this way is in turn open at the top and has a corresponding equalization channel opening which, in particular, opens into the oil chamber in an area in which gas or air is present.
  • a bore could also be provided in the valve plate, with the provision of a slot or a groove being preferred for manufacturing reasons.
  • a groove is provided, it is open in one direction. This opening of the groove can be closed by a housing wall, such as a flange of the housing. It is also possible that the opening of the groove points in the other direction and is then closed by the spring element or an intermediate part.
  • a slot is provided in the valve plate, it is open in both directions and is then closed on one side by the housing wall and on the other side by the spring element or the intermediate part.
  • the pump chamber is connected to the oil chamber via several ejection channels which preferably run parallel to one another.
  • the multiple discharge channels can either be closed with separate valve devices, it being preferred to provide a common valve device.
  • This valve device can have a valve plate with several finger-like attachments, from each finger-like approach an ejection channel is closed.
  • the spring element is preferably designed accordingly.
  • At least one of the plurality of discharge channels is connected to a compensation channel integrated in the valve device according to the invention.
  • several, in particular all, discharge channels are connected to one equalization channel.
  • a common compensation channel can be provided for several discharge channels or a separate compensation channel for each discharge channel.
  • the discharge channel is preferably opened and closed with the aid of the valve tongue or the valve plate.
  • the valve plate is made of an elastic, resilient material. According to the invention, a particularly good sealing of the valve plate can be achieved in that the area of the valve plate which seals the discharge channel is located in an oil bath, so that an additional contact pressure is built up. Due to the increased tightness, a further and more efficient evacuation can be carried out.
  • a rotary vane vacuum pump ( Fig. 1 ) has a housing 10.
  • a rotor 14 is arranged within the housing 10 in a suction chamber 12.
  • the rotor 14 has three slide slots 16, in each of which a slide 18 is arranged. The slide 18 is pressed by the rotation of the rotor 14 due to the centrifugal force against an inner wall 20 of the pumping chamber.
  • a suction opening 22 which is connected to the space to be evacuated, medium is sucked from the space to be evacuated into a first region 24 of the pumping space 12.
  • the area 24 of the pump chamber 12 is delimited by two adjacent slides 18.
  • a region 28 of the pump chamber 12 located in front of the region 24 in the direction of rotation 26 is reduced in size by the rotation of the rotor 14, so that the medium located therein is compressed.
  • the medium is conveyed from the area 28 through an ejection channel 30 from the pump chamber 12 in the direction of an oil chamber 32.
  • the oil chamber 32 is attached to a flange 34 of the housing 10 of the vacuum rotary vane pump.
  • the oil chamber 32 has an oil space or an oil bath 35 in which the oil supplied via the discharge channel 30, in particular together with the air removed from the space to be evacuated, collects.
  • valve device 38 An outlet opening 36 of the discharge channel 30 is closed with a valve device 38.
  • the valve device is an elastic valve plate 48 ( Fig. 2 ), which is fastened to the flange 34 of the housing 10 with the aid of a screw or nut 40, for example. It is particularly preferred in the area of the outlet opening 36 that To arrange valve plates 48 in an oil bath 42.
  • a separate oil chamber is formed in the oil chamber 32 by an intermediate wall 44, the oil flowing in the direction of an arrow 47 when the oil chamber is filled.
  • a compensation channel is integrated into the valve device 38.
  • a compensation channel 50 is formed by an intermediate element 52.
  • the intermediate element 52 is a U-shaped part made of elastic plastic.
  • the valve has a valve plate 48.
  • the valve plate 48 which in the illustrated embodiment closes three discharge channels 30 running parallel to one another, has finger-shaped projections 54 for this purpose. These finger-shaped projections 54 pointing downward each have a connecting opening 56.
  • the connection opening 56 represents a connection between the discharge channel 30 and the compensation channel 50.
  • the intermediate elements 52 are arranged on the finger-shaped projections 54, it being possible, for example, to fix them by gluing.
  • An intermediate part 58 which is part of the intermediate element, closes the front part of the respective compensation channels 50 pointing away from a flange surface 47.
  • the intermediate part 58 is also fixed by the screw 46.
  • the valve device also has a spring element 60.
  • This spring element made in particular of elastic plastic material, causes the valve plate 48 to be pushed back and thus the discharge channels 30 to be closed.
  • Both the intermediate part 58 and the spring element 60 have projections 62, 64 corresponding to the finger-shaped projections 54.
  • compensation channels 50 are thus delimited by the valve plate 48, the U-shaped intermediate elements 52 and the intermediate part 48. Compensation channels 50 are connected to discharge channels 30 via connection openings 56. Compensation channels 50 are connected to an air space 53 of oil chamber 32 via compensation channel openings 66, which are arranged in the upper region of the intermediate elements.
  • the oil supply present in the channels 50 is sucked into the discharge channel 30 together with a small amount of air, which is sucked in through the opening 66 from the air space 53 of the oil chamber 32.
  • the entrainment of air emulsifies the oil and thus reduces noise.
  • valve device 38 Due to the oil flow or oil circulation in the area of the valve device 38, in particular the valve plate 48, it is ensured that no deposits form here. In particular, pollution is the Valve device 38 avoided. This avoids jamming of the valve device 38. Furthermore, a good seal is ensured and an influence of the valve tightness on the pump performance is avoided.
  • a second preferred embodiment ( Figs. 3 and 4 ) has the same components with the exception of the design of the valve device 38, so that they are identified by the same reference numerals.
  • the mode of operation also corresponds to that above with reference to FIG Figs. 1 and 2 Function of the vacuum rotary vane pump described.
  • the at least one compensation channel is integrated into the valve device 38 in such a way that a slot is provided in the valve plate 48 to form a compensation channel 72. This extends in the vertical direction over a large part of the valve plate, in particular into one of the finger-shaped projections 54. The connection between the discharge channel 30 and the compensation channel 72 takes place in the lower region 74 of the slot.
  • the slot is limited laterally on the one hand by the valve plate 48 and on the other hand by the flange surface 47 and a correspondingly designed valve spring 60.
  • an intermediate part corresponding to the intermediate part 58 ( Fig. 2 ) be provided between the valve spring 60 and the valve plate 48.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (13)

  1. Pompe rotative à palettes dotée
    d'un carter (10) comportant une chambre d'aspiration (12),
    d'un rotor (14) disposé de manière excentrique dans la chambre d'aspiration (12),
    de palettes (18) reliées au rotor (14) de manière coulissante,
    d'un canal d'éjection (30) relié à la chambre d'aspiration (12) et à un compartiment à huile (32),
    d'un dispositif de soupape (38) disposé entre le compartiment à huile (32) et le canal d'éjection (30), destiné à éviter un reflux de fluide de la chambre à huile (32) dans la chambre d'aspiration (12), dans laquelle le dispositif de soupape (38) fermant l'au moins un canal d'éjection (30) est disposé dans un bain d'huile (42) dans la zone de l'au moins un canal d'éjection (30) et dans laquelle le dispositif de soupape (38) comporte une plaque de soupape (48) fermant l'au moins un canal d'éjection (30) et un élément de ressort (60) agissant sur la plaque de soupape (48) et
    d'au moins un canal de compensation (50, 72) relié au canal d'éjection (30), à l'intérieur duquel s'applique une pression sensiblement atmosphérique, dans laquelle l'au moins un canal de compensation (50, 72) est intégré dans le dispositif de soupape (38),
    caractérisée en ce que la plaque de soupape (48) comporte une ouverture de liaison (56, 74) reliée au canal d'éjection (30) et débouchant dans le canal de compensation (50, 72).
  2. Pompe rotative à palettes selon la revendication 1, caractérisée en ce que le canal de compensation (50, 72) est réalisé par un élément intermédiaire (52) disposé entre la plaque de soupape (48) et l'élément de ressort (60).
  3. Pompe rotative à palettes selon la revendication 2, caractérisée en ce que l'élément intermédiaire (52) délimite le canal de compensation (50) sur les côtés et le dessous et une ouverture de canal de compensation (66) est réalisée dans la zone du dessus.
  4. Pompe rotative à palettes selon la revendication 1, caractérisée en ce que le canal de compensation (50) est en outre délimité par la plaque de soupape (48) et l'élément de ressort (60) ou une partie intermédiaire (58).
  5. Pompe rotative à palettes selon l'une des revendications 2 à 4, caractérisée en ce que l'élément intermédiaire (52) entoure partiellement l'ouverture de liaison (56) et est de préférence réalisé en forme de U.
  6. Pompe rotative à palettes selon l'une des revendications 2 à 5, caractérisée en ce que l'élément intermédiaire (52) est relié à la plaque de soupape (48) et/ou à l'élément de ressort (60) et/ou à la partie intermédiaire (58) ou est réalisé d'une pièce avec la plaque de soupape (48) et/ou l'élément de ressort (60) et/ou la partie intermédiaire (58).
  7. Pompe rotative à palettes selon l'une des revendications 2 à 6, caractérisée en ce que l'élément intermédiaire (52) est fabriqué en matière élastique, en particulier en plastique élastomère.
  8. Pompe rotative à palettes selon la revendication 1, caractérisée en ce que le canal de compensation (72) est prévu dans la plaque de soupape (48).
  9. Pompe rotative à palettes selon la revendication 8, caractérisée en ce que le canal de compensation (72) est prévu comme fente ou rainure dans la plaque de soupape (48), fermée latéralement par l'élément de ressort (60) ou une partie intermédiaire (58) et/ou une paroi (47) du carter (10), la fente ou la rainure est de préférence ouverte vers le haut.
  10. Pompe rotative à palettes selon l'une des revendications 1 à 9, caractérisée en ce que le canal de compensation (50, 72) est fermé par de l'huile lors du fonctionnement de la pompe rotative à palettes.
  11. Pompe rotative à palettes selon l'une des revendications 1 à 10, caractérisée en ce que le canal de compensation (50, 72) est réalisé comme canal capillaire.
  12. Pompe rotative à palettes selon l'une des revendications 1 à 11, caractérisée en ce qu'entre la chambre d'aspiration (12) et le compartiment à huile (32) sont prévus plusieurs canaux d'éjection (30) de préférence parallèles les uns aux autres, lesquels sont de préférence fermés par un même dispositif de soupape (38), dans laquelle au moins un, de préférence plusieurs et en particulier tous les canaux d'éjection (30) sont reliés à un canal de compensation (50, 72).
  13. Pompe rotative à palettes selon l'une des revendications 1 à 12, caractérisée en ce que l'au moins un canal de compensation (50, 72) est relié à un volume d'air (53) du compartiment à huile (32).
EP13708741.7A 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives Active EP2836722B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202012002882U DE202012002882U1 (de) 2012-03-22 2012-03-22 Vakuum-Drehschieberpumpe
PCT/EP2013/054004 WO2013139570A2 (fr) 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives

Publications (2)

Publication Number Publication Date
EP2836722A2 EP2836722A2 (fr) 2015-02-18
EP2836722B1 true EP2836722B1 (fr) 2021-11-03

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EP13708741.7A Active EP2836722B1 (fr) 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives

Country Status (5)

Country Link
EP (1) EP2836722B1 (fr)
CN (1) CN104204533B (fr)
DE (1) DE202012002882U1 (fr)
ES (1) ES2900750T3 (fr)
WO (1) WO2013139570A2 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202014009218U1 (de) 2014-07-11 2015-10-14 GM Global Technology Operations LLC (n. d. Ges. d. Staates Delaware) Drehschiebervakuumpumpe
FR3048462B1 (fr) * 2016-03-03 2020-01-10 Mil's Pompe, notamment a palettes lubrifiees
CN108119297B (zh) * 2017-11-14 2019-09-10 武汉船用机械有限责任公司 一种液压马达壳体和液压马达
WO2024078678A1 (fr) 2022-10-10 2024-04-18 Busch Produktions Gmbh Pompe rotative améliorée à palettes coulissantes
CN117212157B (zh) * 2023-11-08 2024-02-27 江苏芬奇工业设备制造有限公司 一种可自动润滑旋片的旋片式真空泵

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WO2007003215A1 (fr) * 2005-07-05 2007-01-11 Vhit S.P.A. Pompe à vide à palettes avec soupape de refoulement
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WO2009018906A1 (fr) * 2007-08-04 2009-02-12 Ixetic Hückeswagen Gmbh Pompe à vide
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WO2013139570A3 (fr) 2014-07-03
EP2836722A2 (fr) 2015-02-18
CN104204533B (zh) 2017-03-08
ES2900750T3 (es) 2022-03-18
CN104204533A (zh) 2014-12-10
DE202012002882U1 (de) 2013-06-25
WO2013139570A2 (fr) 2013-09-26

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