EP2549113B1 - Rotor magnétique et pompe rotative dotée d'un rotor magnétique - Google Patents
Rotor magnétique et pompe rotative dotée d'un rotor magnétique Download PDFInfo
- Publication number
- EP2549113B1 EP2549113B1 EP12174213.4A EP12174213A EP2549113B1 EP 2549113 B1 EP2549113 B1 EP 2549113B1 EP 12174213 A EP12174213 A EP 12174213A EP 2549113 B1 EP2549113 B1 EP 2549113B1
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- EP
- European Patent Office
- Prior art keywords
- rotor
- permanent magnet
- accordance
- metal
- metal jacket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 150000002430 hydrocarbons Chemical class 0.000 claims description 24
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 24
- 239000012530 fluid Substances 0.000 claims description 20
- 239000004215 Carbon black (E152) Substances 0.000 claims description 16
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- -1 ethylene propylene, ethylene tetrafluoroethylene Chemical class 0.000 claims description 14
- 229910052715 tantalum Inorganic materials 0.000 claims description 14
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 14
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000010931 gold Substances 0.000 claims description 12
- 229910052735 hafnium Inorganic materials 0.000 claims description 12
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052741 iridium Inorganic materials 0.000 claims description 12
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052758 niobium Inorganic materials 0.000 claims description 12
- 239000010955 niobium Substances 0.000 claims description 12
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 12
- 229910052762 osmium Inorganic materials 0.000 claims description 12
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052763 palladium Inorganic materials 0.000 claims description 12
- 229910052697 platinum Inorganic materials 0.000 claims description 12
- 229910052703 rhodium Inorganic materials 0.000 claims description 12
- 239000010948 rhodium Substances 0.000 claims description 12
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052707 ruthenium Inorganic materials 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
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- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 11
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 11
- 239000002033 PVDF binder Substances 0.000 claims description 10
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 10
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000004812 Fluorinated ethylene propylene Substances 0.000 claims description 6
- 229920009441 perflouroethylene propylene Polymers 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- CHJAYYWUZLWNSQ-UHFFFAOYSA-N 1-chloro-1,2,2-trifluoroethene;ethene Chemical group C=C.FC(F)=C(F)Cl CHJAYYWUZLWNSQ-UHFFFAOYSA-N 0.000 claims description 3
- 229920001780 ECTFE Polymers 0.000 claims description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims 2
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- 150000001335 aliphatic alkanes Chemical class 0.000 claims 2
- 229920000131 polyvinylidene Polymers 0.000 claims 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 20
- 239000002253 acid Substances 0.000 description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 12
- 239000000126 substance Substances 0.000 description 9
- 150000007513 acids Chemical class 0.000 description 8
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 7
- 239000004813 Perfluoroalkoxy alkane Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 230000009931 harmful effect Effects 0.000 description 4
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 235000012771 pancakes Nutrition 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- 229920007925 Ethylene chlorotrifluoroethylene (ECTFE) Polymers 0.000 description 2
- 229910017855 NH 4 F Inorganic materials 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
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- 229910021645 metal ion Inorganic materials 0.000 description 2
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- 238000005411 Van der Waals force Methods 0.000 description 1
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- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002505 iron Chemical class 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D13/00—Pumping installations or systems
- F04D13/02—Units comprising pumps and their driving means
- F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D13/00—Pumping installations or systems
- F04D13/02—Units comprising pumps and their driving means
- F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D13/0606—Canned motor pumps
- F04D13/064—Details of the magnetic circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/026—Selection of particular materials especially adapted for liquid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/04—Shafts or bearings, or assemblies thereof
- F04D29/046—Bearings
- F04D29/048—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/18—Rotors
- F04D29/22—Rotors specially for centrifugal pumps
- F04D29/2205—Conventional flow pattern
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/14—Noble metals, i.e. Ag, Au, platinum group metals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/14—Noble metals, i.e. Ag, Au, platinum group metals
- F05D2300/143—Platinum group metals, i.e. Os, Ir, Pt, Ru, Rh, Pd
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
- F05D2300/432—PTFE [PolyTetraFluorEthylene]
Definitions
- the invention relates to a magnetic rotor for a rotary pump according to independent claim 1.
- magnetically mounted rotary pumps have prevailed in the art, in which an impeller is suspended in the interior of a preferably completely closed pump housing by magnetic forces and driven by a rotating field which is generated by a stator often arranged outside the pump housing.
- Such pumps are particularly advantageous for those applications in which the fluid to be pumped must not be contaminated, for example for conveying biological fluids such as blood or highly pure fluids such as ultrapure water.
- the WO 2006/039747 discloses a double-sealed pump rotor for such a blood pump.
- Such rotary pumps are suitable for pumping aggressive liquids that would destroy mechanical bearings in a short time. Therefore, such rotary pumps are particularly preferably used in the semiconductor industry, for example for conveying mechanically aggressive fluids when processing a surface of semiconductor wafers.
- CMP chemical-mechanical polishing processes
- a suspension commonly referred to as a slurry
- a slurry typically consists of very fine solid particles and a liquid on a rotating wafer applied and serves there for polishing or lapping the very fine semiconductor structures.
- Another example is the application of photoresist to the wafer, or the roughening of surfaces of computer hard disks to prevent sticking of the read / write heads by adhesion forces, for example by van der Waals forces.
- magnetically levitated rotary pumps are preferably used in practice.
- highly aggressive chemicals such as sulfuric acid (H 2 SO 4 ), which often have to be provided even at elevated temperatures, eg at 150 ° C to 200 ° C or even higher.
- phosphoric acid H 3 PO 4
- H 3 PO 4 phosphoric acid
- H 3 PO 4 hydrochloric acid
- HF hydrofluoric acid
- NO 3 nitric acid
- NH 4 F 2 ammonium fluoride
- mixtures such as sulfuric acid and ozone (H 2 SO 4 with O 3 ), sulfuric acid with hydrogen peroxide (H 2 SO 4 with H 2 O 2 ) or, for example, sulfuric acid with hydrofluoric acid and nitric acid (H 2 SO 4 with HF and HNO 3 ) often in use.
- fluorinated hydrocarbons very often do not form a sufficient barrier to gaseous constituents of the chemicals.
- an encapsulation made of a fluorinated hydrocarbon has only a very limited barrier effect against ozone (O 3 ), for example in a too pumping mixture of sulfuric acid and ozone (H 2 SO 4 with O 3 ) may be contained in substantial amounts.
- an encapsulation contains, for example, a metal
- the acids can be used to dissolve metal ions which, as a component of the fluid to be pumped, can then have an effect on subsequent work processes. This can lead to catastrophic consequences, for example, in applications in the semiconductor industry, since the dissolved metal ions can alter the doping of the semiconductors to be treated in an uncontrolled manner even in very low concentrations in the fluid, thus rendering the semiconductor products completely unusable in the worst case.
- a rotary pump, in particular canned motor pump which is adequately protected analogously to the inventive rotor against the aforementioned and known from the prior art harmful influences.
- a sufficient protection against aggressive acids with gaseous components even for use at high temperatures to be created.
- the invention thus relates to a magnetic rotor for a rotary pump, wherein the rotor for driving a fluid in a pump housing within a stator of the rotary pump is magnetically non-contact drivable and storable, and the rotor is encapsulated by means of an outer encapsulation comprising a fluorinated hydrocarbon.
- the rotor within the encapsulation comprises a permanent magnet encased in a metal jacket, the metal jacket comprising at least one metal Group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium.
- the permanent magnet of the rotor of the present invention is thus doubly encapsulated:
- An inner metal shell encloses the permanent magnet of the rotor substantially completely, more preferably, the permanent magnet is gas-tightly enclosed by the metal shell.
- the metal shell in turn is inside an outer encapsulation of a fluorinated hydrocarbon.
- the metal sheath may preferably be completely encased directly by the encapsulation or, depending on requirements, a further material may be provided between the metal sheath and the outer encapsulation, for example to adapt the geometry, mass or other parameters of the rotor to particular requirements.
- the permanent magnet may also be enclosed directly by the metal sheath or there may be another material between metal sheath and permanent magnet, e.g. serves as a thermal compensation means for compensating different thermal expansions of the metal shell and / or the permanent magnet.
- a corresponding distance in the form of a gap between the metal shell and the permanent magnet can of course also be provided.
- the permanent magnet is at the same time, for example, against aggressive liquids such as sulfuric acid (H 2 SO 4 ), even at elevated temperatures, for example at 150 ° C to 200 ° C or even protected at higher temperatures. These are shielded from the permanent magnet by the outer fluorinated hydrocarbon encapsulation. But any existing gaseous component such as ozone, which may also be present in the aggressive liquid chemical, is effectively shielded.
- aggressive liquids such as sulfuric acid (H 2 SO 4 )
- the shield possibly Existing gaseous components or ionic constituents of the acid, which are not or only insufficiently retained by the outer encapsulation and diffuse through the outer encapsulation into the interior of the rotor, are prevented at the latest by the metal jacket surrounding the permanent magnet.
- the service lives of the rotors or the service lives of plant components according to the invention with an outer layer of fluorinated hydrocarbon and an underlying second layer of a metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum , Palladium, osmium, iridium, ruthenium and rhodium have been significantly extended by the present invention.
- the metal shell of the magnetic rotor consists only of at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium. In one for the practice Particularly preferred embodiment, the metal shell consists essentially only of tantalum.
- fluorinated hydrocarbons for external encapsulation are fluorinated ethylene-propylene (FEP), ethyltetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene chlorotrifluoroethylene (ECTFE), polyvinylidene fluoride (PVDF) or a combination of different fluorinated hydrocarbons.
- FEP fluorinated ethylene-propylene
- ETFE ethyltetrafluoroethylene
- PTFE polytetrafluoroethylene
- PFA perfluoroalkoxyalkane
- ECTFE ethylene chlorotrifluoroethylene
- PVDF polyvinylidene fluoride
- the permanent magnet of the magnetic rotor is usually positively and / or non-positively connected to the metal shell, so that the permanent magnet in the operating state with respect to the rest of the rotor body can not move substantially. This is crucial for safe driving of the rotor, since the external magnetic drive forces naturally act on the permanent magnet of the rotor, causing the rotor to rotate for pumping the fluid.
- the metal shell is positively and / or non-positively connected to the encapsulation, in particular to the plastic jacket.
- a recess is particularly advantageously provided, so that the metal shell is weldable without affecting the permanent magnet, which will be explained in more detail below with reference to the drawing.
- the thermal compensation means is simply a suitably narrow selected gap between the permanent magnet and metal shell, so that a positive and / or frictional connection between the metal shell and the permanent magnet despite the gap is still sufficiently ensured.
- the invention further relates to a rotary pump with the inventive magnetic rotor.
- an inner surface of a housing wall of the pump housing may be provided with a plastic barrier of the fluorinated hydrocarbon, wherein between the inner surface of the housing wall and the stator preferably provided a metal barrier, for example in the form of a pot or cylinder is, which includes at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium, so that the stator in completely analogous function as the permanent magnet in Inside of the rotor is protected against aggressive fluids to be pumped, especially against the above-mentioned acid mixtures with gaseous components optimally.
- the metal jacket of the rotor and / or the metal barrier towards the stator, in particular of the pump housing consists in a specific embodiment only of at least one metal of the group consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium , Iridium, ruthenium and rhodium.
- the fluorinated hydrocarbon particularly advantageously comprises fluorinated ethylene propylene (FEP), ethyltetrafluoroethylene (ETFE), polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene chlorotrifluoroethylene (ECTFE), or polyvinylidene fluoride (PVDF), or the encapsulation and / or the plastic barrier at the inner surface of the metal barrier to the stator consists essentially only of at least one of polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene chlorotrifluoroethylene, or polyvinylidene fluoride.
- FEP fluorinated ethylene propylene
- ETFE ethyltetrafluoroethylene
- PTFE polytetrafluoroethylene
- PFA perfluoroalkoxyalkane
- ECTFE ethylene chlorotrifluoroethylene
- PVDF polyvinylidene fluoride
- a drive for the rotary pump of the present invention is advantageously a per se long known bearingless motor, in principle in any embodiment in question, wherein in a particularly preferred embodiment, the stator is configured simultaneously as a bearing and drive stator, and an axial height of the rotor preferred is less than or equal to half the diameter of the rotor, so the rotor is a known so-called pancake.
- the Fig. 1 shows in schematic representation in section a magnetic rotor 1 according to the present invention.
- the magnetic rotor 1 according Fig. 1 for a rotary pump 2, as in a specific embodiment based on the Fig. 2 will be discussed below, is for conveying a fluid 3 in a pump housing 4 within a stator 5 of the rotary pump 2 in a conventional manner magnetically non-contact and drivable storable.
- the rotor 1 is encapsulated by means of an outer encapsulation 6 comprising a fluorinated hydrocarbon, wherein the fluorinated hydrocarbon of the encapsulation 6 comprises, for example, polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene, chlorotrifluoroethylene, or polyvinylidene fluoride.
- an outer encapsulation 6 comprising a fluorinated hydrocarbon
- the fluorinated hydrocarbon of the encapsulation 6 comprises, for example, polytetrafluoroethylene, perfluoroalkoxyalkane, ethylene, chlorotrifluoroethylene, or polyvinylid
- the encapsulation 6 consists only of at least one of the aforementioned fluorinated hydrocarbons.
- the rotor 1 comprises within the encapsulation 6 a permanent magnet 8 sheathed by the metal sheath 7, the metal sheath 7 comprising at least one metal of the group consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, Iridium, ruthenium and rhodium includes.
- the metal shell is only tantalum, except impurities.
- the permanent magnet 8 is positively connected to the metal shell 7, wherein between the permanent magnet 8 and the metal shell 7, a recess 9 is provided in the form of a chamfer on the permanent magnet, so that the metal shell 7 could be welded without affecting the permanent magnet 8 by excessive temperatures in the manufacture of the rotor 1.
- the metal jacket 7 preferably forms a gas-tight jacket of the permanent magnet 8, which is often ensured in practice by first placing the permanent magnet 8 inside the metal jacket 7 is and then the metal shell 7 gas-tight welded or soldered.
- a thermal compensation means 10 which is simply a suitable narrow gap between the permanent magnet 8 and metal shell 7 and serves to compensate for different thermal expansion of the metal shell 7 and the permanent magnet 8 here.
- the Fig. 2 finally shows schematically a section of a known rotary pump 2, which is equipped with a rotor 1 according to the present invention.
- the rotary pump 2 comprises a pump housing 4 with an inlet 11 for supplying a fluid 3 into the pump housing 4 and an outlet 12 for discharging the fluid 3 from the pump housing 4.
- the fluid 3 is for example a chemically aggressive acid with a proportion of a gas , for example, sulfuric acid with ozone.
- a magnetic rotor 1 is mounted without contact magnetically in a known manner in the pump housing 4, wherein the rotor 1 is likewise known to a drive 13, which comprises electrical coils 131 and the stator as essential elements 5, in particular formed by laminated iron, which are in magnetic operative connection with the permanent magnet 8 of the rotor 1.
- the drive is here in a special embodiment, a so-called known bearingless Motor is, in which the stator 5 is designed simultaneously as a storage and drive stator.
- Fig. 2 is the rotor 1 to a so-called pancake, wherein preferably an axial height of the rotor 1 is less than or equal to half a diameter of the rotor 1.
- the invention is not restricted to pancake, but is in principle applicable to all rotor types of any magnetically levitated rotary machines.
- the rotor 1 is encapsulated by means of an outer encapsulation 6 made of a fluorinated hydrocarbon and within the encapsulation 6 of the sheathed by the metal shell 7 permanent magnet 8 is provided.
- the metal shell 7 in this case comprises at least one metal of the group of elements consisting of tantalum, niobium, zirconium, titanium, hafnium, gold, platinum, palladium, osmium, iridium, ruthenium and rhodium.
- a plastic barrier made of the fluorinated hydrocarbon provided on an inner surface 411 of a housing wall 41 of the pump housing 4 is provided, wherein a metal barrier in the form of a pot 400 is provided between the inner surface 411 of the housing wall 41 and the stator 5.
- the permanent magnet 8 is as in Fig. 1 already described in detail positively and / or non-positively connected to the metal shell 7, wherein a thermal compensation means 10 is provided in the form of a narrow gap between metal shell 7 and permanent magnet 8 to compensate for different thermal expansions of the metal shell 7 and the permanent magnet.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Details And Applications Of Rotary Liquid Pumps (AREA)
- Permanent Field Magnets Of Synchronous Machinery (AREA)
Claims (15)
- Un rotor magnétique pour une pompe rotative (2), dans lequel le rotor peut être entraîné et monté magnétiquement sans contact dans un boîtier de pompe (4) à l'intérieur d'un stator (5) de la pompe rotative (2) pour convoyer un fluide (3), et le rotor est encapsulé par une encapsulation externe (6) comprenant un hydrocarbure fluoré, caractérisé en ce que le rotor comprend à l'intérieur de l'encapsulation (6) un aimant permanent (8) gainé dans une gaine métallique (7), dans lequel la gaine métallique (7) comprend au moins un métal du groupe des éléments consistant en tantale, niobium, zircon, titane, hafnium, or, platine, palladium, osmium, iridium, ruthénium et rhodium.
- Un rotor magnétique selon la revendication 1, dans lequel la gaine métallique (7) consiste en au moins un métal du groupe des éléments consistant en tantale, niobium, zircon, titane, hafnium, or, platine, palladium, osmium, iridium, ruthénium et rhodium.
- Un rotor magnétique selon l'une des revendications 1 ou 2, dans lequel l'hydrocarbure fluoré de l'encapsulation (6) comprend de l'éthylène propylène fluoré, de l'éthylène tétrafluoroéthylène, du polytétrafluoroéthylène, du perfluoroalcoxyalcane, de l'éthylène chlorotrifluoroéthylène ou du fluorure de polyvinylidène, ou l'encapsulation (6) consiste de préférence en au moins une substance parmi le polytétrafluoroéthylène, le perfluoroalkoxylalcane, l'éthylène chlorotrifluoroéthylène ou le polyfluorure de vinylidène.
- Un rotor magnétique selon l'une des revendications précédentes, dans lequel l'aimant permanent (8) est connecté par forme et / ou par adhérence à la gaine métallique (7).
- Un rotor magnétique selon l'une des revendications précédentes, dans lequel la gaine métallique (7) est connecté par forme et / ou par adhérence à l'encapsulation (6).
- Un rotor magnétique selon l'une des revendications précédentes, dans lequel un évidement (9) est prévu entre l'aimant permanent (8) et la gaine métallique (7) de telle sorte que la gaine métallique (7) peut être soudée sans affecter l'aimant permanent (8).
- Un rotor magnétique selon l'une des revendications précédentes, dans lequel un moyen de compensation thermique (10) est prévu pour compenser les différentes dilatations thermiques de la gaine métallique (7) et / ou de l'aimant permanent (8).
- Une pompe rotative, comprenant un boîtier de pompe (4) avec une entrée (11) pour fournir un fluide (3) dans le boîtier de pompe (4) et une sortie (12) pour décharger le fluide (3) du boîtier de pompe (4), dans lequel un rotor magnétique (1) est monté magnétiquement sans contact dans le boîtier de pompe (4) à l'intérieur d'un stator (5) pour convoyer le fluide (3) et le rotor (1) est relié de manière opérationnelle à un entraînement (13), caractérisé par un rotor selon la revendication 1.
- Une pompe rotative selon la revendication 8, dans laquelle une surface intérieure (411) d'une paroi de boîtier (41) du boîtier de pompe (4) est pourvue d'une barrière plastique au ledit hydrocarbure fluoré et une barrière métallique est prévue de préférence entre la surface intérieure (411) de la paroi du boîtier (41) et le stator (5), laquelle barrière métallique comprend au moins un métal du groupe des éléments consistant en tantale, niobium, zircon, titane, hafnium, or, platine, palladium, osmium, iridium, ruthénium et rhodium.
- Une pompe rotative selon l'une des revendications 8 ou 9, dans laquelle la gaine métallique (7) du rotor (1) et / ou la barrière métallique consiste en au moins un métal du groupe des éléments consistant en tantale, niobium, zircon, titane, hafnium, or, platine, palladium, osmium, iridium, ruthénium et rhodium.
- Une pompe rotative selon l'une des revendications 8 à 10, dans laquelle l'hydrocarbure fluoré comprend de l'éthylène propylène fluoré, de l'éthylène tétrafluoroéthylène, du polytétrafluoroéthylène, du perfluoroalcoxyalcane, de l'éthylène chlorotrifluoroéthylène ou du fluorure de polyvinylidène, ou l'encapsulation (6) et / ou la barrière plastique à la surface intérieure (411) consiste de préférence en au moins une substance parmi le polytétrafluoroéthylène, le perfluoroalkoxylalcane, l'éthylène chlorotrifluoroéthylène ou le polyfluorure de vinylidène.
- Une pompe rotative selon l'une des revendications 8 à 11, dans laquelle l'aimant permanent (8) est connecté par forme et / ou par adhérence à la gaine métallique (7) et / ou dans laquelle la gaine métallique (7) est connecté par forme et / ou par adhérence à l'encapsulation (6).
- Une pompe rotative selon l'une des revendications 8 à 12, dans laquelle un évidement (9) est prévu entre l'aimant permanent (8) et la gaine métallique (7) de telle sorte que la gaine métallique (7) peut être soudée sans affecter l'aimant permanent (8).
- Une pompe rotative selon l'une des revendications 8 à 13, dans laquelle un moyen de compensation thermique (10) est prévu pour compenser les différentes dilatations thermiques de la gaine métallique (7) et / ou de l'aimant permanent (8).
- Une pompe rotative selon l'une des revendications 8 à 14, dans laquelle l'entraînement est un moteur sans palier, et le stator (5) est de préférence conçu comme stator de palier et stator d'entraînement, dans laquelle de préférence, une hauteur axiale du rotor (1) est inférieure ou égale à un demi-diamètre du rotor (1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12174213.4A EP2549113B1 (fr) | 2011-07-20 | 2012-06-28 | Rotor magnétique et pompe rotative dotée d'un rotor magnétique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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EP11174669 | 2011-07-20 | ||
EP12174213.4A EP2549113B1 (fr) | 2011-07-20 | 2012-06-28 | Rotor magnétique et pompe rotative dotée d'un rotor magnétique |
Publications (3)
Publication Number | Publication Date |
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EP2549113A2 EP2549113A2 (fr) | 2013-01-23 |
EP2549113A3 EP2549113A3 (fr) | 2017-07-26 |
EP2549113B1 true EP2549113B1 (fr) | 2018-10-24 |
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EP12174213.4A Active EP2549113B1 (fr) | 2011-07-20 | 2012-06-28 | Rotor magnétique et pompe rotative dotée d'un rotor magnétique |
Country Status (6)
Country | Link |
---|---|
US (1) | US20130022481A1 (fr) |
EP (1) | EP2549113B1 (fr) |
JP (1) | JP2013024239A (fr) |
KR (1) | KR20130011940A (fr) |
CN (1) | CN102891553A (fr) |
TW (1) | TWI588370B (fr) |
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FR3011887B1 (fr) * | 2013-10-14 | 2018-03-09 | Pompes Salmson | Pompe de circulation de fluide a moteur synchrone a rotor noye |
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CN105641762A (zh) * | 2016-03-14 | 2016-06-08 | 正仁(北京)医疗仪器有限公司 | 体外非植入式磁悬浮心室辅助离心血泵 |
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DE102016214700A1 (de) | 2016-08-08 | 2018-02-08 | Efficient Energy Gmbh | Elektrischer Scheibenläufer mit einem Druckreduzierer für den Motorspalt |
DE102016214696A1 (de) | 2016-08-08 | 2018-02-08 | Efficient Energy Gmbh | Elektrischer Scheibenmotor mit Medientrennung im Motorspalt |
DE102016224071A1 (de) | 2016-12-02 | 2018-06-07 | Efficient Energy Gmbh | Mehrteiliger stator für einen elektromotor, verfahren zum herstellen eines mehrteiligen stators, elektromotor und wärmepumpe |
DE102016224070A1 (de) | 2016-12-02 | 2018-06-07 | Efficient Energy Gmbh | Scheibenläufermotor mit nuten |
DE102017205729B4 (de) | 2017-04-04 | 2022-03-03 | Efficient Energy Gmbh | Stator für einen Elektromotor mit Kühlrohr |
DE102017206759A1 (de) | 2017-04-21 | 2018-10-25 | Efficient Energy Gmbh | Rotor für einen elektromotor mit speziell geformtem rückschlusselement und verfahren zur herstellung |
DE102017206762A1 (de) | 2017-04-21 | 2018-10-25 | Efficient Energy Gmbh | Rotor für einen elektromotor mit wärmeabschirmender beschichtung und verfahren zur herstellung |
EP3425204B1 (fr) * | 2017-07-04 | 2021-04-14 | Levitronix GmbH | Rotor magnétique et machine comprenant un tel rotor |
GB2565592A (en) * | 2017-08-18 | 2019-02-20 | Cooltera Ltd | A cooling unit |
DE102017214869A1 (de) | 2017-08-24 | 2019-02-28 | Efficient Energy Gmbh | Elektromotor mit verschiedenen Sternpunkten |
CN107519549A (zh) * | 2017-09-30 | 2017-12-29 | 清华大学天津高端装备研究院 | 一种新型单自由度磁悬浮离心式叶轮 |
US10833570B2 (en) | 2017-12-22 | 2020-11-10 | Massachusetts Institute Of Technology | Homopolar bearingless slice motors |
US10278894B1 (en) | 2018-02-05 | 2019-05-07 | Luraco, Inc. | Jet assembly having a friction-reducing member |
EP3900159A1 (fr) | 2018-12-20 | 2021-10-27 | Efficient Energy GmbH | Moteur électrique à différents points neutres |
JP2020128745A (ja) | 2019-02-01 | 2020-08-27 | ホワイト ナイト フルイド ハンドリング インコーポレーテッドWhite Knight Fluid Handling Inc. | ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法 |
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- 2012-06-28 EP EP12174213.4A patent/EP2549113B1/fr active Active
- 2012-07-09 JP JP2012153458A patent/JP2013024239A/ja active Pending
- 2012-07-17 TW TW101125648A patent/TWI588370B/zh active
- 2012-07-18 KR KR1020120078105A patent/KR20130011940A/ko not_active IP Right Cessation
- 2012-07-19 CN CN201210250374XA patent/CN102891553A/zh active Pending
- 2012-07-20 US US13/554,826 patent/US20130022481A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
KR20130011940A (ko) | 2013-01-30 |
CN102891553A (zh) | 2013-01-23 |
TWI588370B (zh) | 2017-06-21 |
US20130022481A1 (en) | 2013-01-24 |
TW201323728A (zh) | 2013-06-16 |
EP2549113A3 (fr) | 2017-07-26 |
JP2013024239A (ja) | 2013-02-04 |
EP2549113A2 (fr) | 2013-01-23 |
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