EP2319102B1 - Piézoactionneur doté d'une couche de rupture préférentielle - Google Patents

Piézoactionneur doté d'une couche de rupture préférentielle Download PDF

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Publication number
EP2319102B1
EP2319102B1 EP09781366.1A EP09781366A EP2319102B1 EP 2319102 B1 EP2319102 B1 EP 2319102B1 EP 09781366 A EP09781366 A EP 09781366A EP 2319102 B1 EP2319102 B1 EP 2319102B1
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EP
European Patent Office
Prior art keywords
region
weak
barrier region
formation
barrier
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EP09781366.1A
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German (de)
English (en)
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EP2319102A1 (fr
Inventor
Reinhard Gabl
Alexander Glazunov
Martin Galler
Georg KÜGERL
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TDK Electronics AG
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Epcos AG
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Definitions

  • piezoelectric actuator which is composed of a plurality of piezoelectric layers with intermediate electrode layers. When an electrical voltage is applied to the electrode layers, the piezoelectric layers expand, producing a lift.
  • Such piezo actuators are used for example for actuating an injection valve in a motor vehicle.
  • the stacks are provided with predetermined breaking layers.
  • the predetermined breaking layers are designed so that cracks occur particularly easily in the predetermined breaking layers and propagate within the predetermined breaking layers.
  • a piezoelectric actuator which has predetermined breaking layers.
  • Other piezoelectric actuators are in the publications WO 2008/072767 A1 .
  • WO 2009/082006 A1 such as EP 2 237 337 A1 described.
  • piezoelectric actuator in multilayer construction specified in which piezoelectric layers and arranged therebetween electrode layers are arranged in a stack.
  • the piezoactuator is a monolithic multilayer actuator made of thin films of a piezoelectric material, such as lead zirconate titanate (PZT).
  • a metal paste for example a silver-palladium paste or a copper-containing paste, can be applied to the films by means of a screen printing process. The films are then stacked, pressed and sintered together. In this case, an electrode layer does not have to be applied to each piezoelectric layer.
  • a plurality of piezoelectric layers may be located between two electrode layers.
  • a multilayer piezoelectric actuator comprising a stack of piezoelectric layers and electrode layers interposed therebetween, and a predetermined breaking layer at least partially less resistant to tearing than adjacent piezoelectric layers, the predetermined breaking layer having a barrier area in which the formation of Barrier area leading through electrically conductive paths or the formation of passing through the barrier area cracks is impeded.
  • the piezoelectric actuator has two external electrodes which electrically connect the electrode layers of one polarity to one another, wherein in the piezoelectric actuator in the predetermined breaking layer, each connecting line between the external electrodes leads through the barrier region.
  • At the piezoelectric actuator is at least one Part of the barrier area provided in which the formation of electrically conductive paths or the formation of cracks is more hampered than in another area of the predetermined breaking layer, and in the piezoelectric actuator, the barrier area has a continuous path in which the tensile strength is lower than in the partial area of the Barrier area and in the piezoelectric actuator, the continuous path is longer than the barrier portion of each outer electrode connecting straight line.
  • external electrodes are applied to two opposite outer surfaces of the piezoelectric actuator.
  • An outer electrode comprises, for example, a base metallization, which can be produced analogously to the electrode layers by means of a stoving paste.
  • the electrode layers are alternately connected to the outer electrodes, for example along the stacking direction of the piezoelectric actuator.
  • the electrode layers are, for example, alternately guided to one of the outer electrodes and have a distance to the second outer electrode. In this way, the electrode layers of one polarity are electrically connected to one another via a common outer electrode.
  • the piezoelectric actuator has an enclosure.
  • the envelope can protect the piezoelectric actuator from external influences, for. B. prevent ingress of moisture or mechanical damage.
  • the sheath covers the outer electrodes and is applied to side surfaces of the piezoelectric actuator.
  • the envelope contains an elastic material.
  • the specified piezoactuator has a predetermined breaking layer whose tensile strength is at least partially lower than the tensile strength of adjacent piezoelectric layers.
  • the tensile strength of the predetermined breaking layer is at least partially less than 2/3 of the tensile strength of the composite of the piezoelectric layers and electrode layers.
  • the predetermined breaking layer is lateral, i. H. in a plane perpendicular to the stacking direction, designed inhomogeneous.
  • the predetermined breaking layer has at least one partial area which differs with respect to its chemical or physical properties from a further area of the predetermined breaking layer.
  • the material in the partial area differs from the material in the wider area of the predetermined breaking layer.
  • the subarea may be considered a barrier area or part of a barrier area.
  • Such a barrier area hampers the formation of electrically conductive paths leading through the barrier region.
  • the formation of cracks passing through the barrier area may be hindered.
  • the piezoelectric layers In order for the piezoelectric actuator to expand when a voltage is applied to the electrode layers, the piezoelectric layers must be polarized. For this purpose, for example, a DC voltage is applied across the outer electrodes between adjacent electrode layers and the stack is heated. In inactive zones, where adjacent electrode layers of different polarity do not overlap in the stacking direction, the piezoelectric material does not or only partially expand in the same direction as in the active zones. Due to the different expansion of the piezoelectric layers in active and inactive zones, mechanical stresses occur which can lead to cracks during polarization or during operation of the piezoactuator.
  • crack formation can be controlled in a targeted manner so that cracks only occur in the predetermined breaking layer and then spread out within the predetermined breaking layer.
  • the cracks extend in a plane perpendicular to the stacking direction and thus can not lead to a short circuit between adjacent electrode layers of different polarity.
  • the predetermined breaking layer at least partially has a greater average porosity than an adjacent piezoelectric layer.
  • the predetermined breaking layer contains a piezoelectric material whose porosity is greater than the porosity of an adjacent piezoelectric layer.
  • a larger porosity can be produced, for example, by introducing into a base material additives which generate cavities during the sintering process.
  • the cavities are formed by evaporation of the additive.
  • the predetermined breaking layer is formed by a porous ceramic layer.
  • the predetermined breaking layer contains a metal, such as silver, palladium, copper or an alloy of these metals.
  • the composition of the metal can be chosen so that during sintering of the piezoelectric actuator, a diffusion occurs, whereby also pores in the predetermined breaking layer arise.
  • the predetermined breaking layer runs within a metallic layer which has a similar or identical material as an electrode layer.
  • the mechanical strength of the predetermined breaking layer is preferably determined by the degree of porosity. If the predetermined breaking layer has a lower mechanical strength than the adjoining piezoelectric layers, cracks are preferably formed in the predetermined breaking layer and propagate within the predetermined breaking layer.
  • electrically conductive paths may occur, for example due to the penetration of water during operation at high humidity or through substances emerging from a passivation layer. This is particularly critical when a conductive path leads to the shorting of the outer electrodes. As a result, the operation of the piezoelectric actuator is greatly impaired or it may even lead to a failure of the component.
  • such predetermined breaking layers may favor a segmentation of the piezoelectric actuator during operation.
  • a segmentation can, for example, arise because a crack expands over the entire cross-sectional area of a piezoactuator, so that the piezoactuator is split into two partial stacks becomes. Such a segmentation may, for example, cause the external contact of the piezoelectric actuator is interrupted.
  • a segmentation can lead to the formation of conductive paths between the outer electrodes and thus a short circuit. If the piezoactuator has an enclosure, it can be segmented to an increased mechanical load on the enclosure and to damage, for. B. come a tearing of the envelope.
  • the barrier region is designed such that it impedes the formation of electrically conductive paths that pass through the barrier region.
  • the occurrence of a segmentation of the piezoelectric actuator can be prevented by a barrier region in the predetermined breaking layer.
  • the barrier area is designed such that it impedes the formation of cracks that pass through the barrier area.
  • the barrier region is arranged such that within the predetermined breaking layer, each connecting line between the external electrodes passes through the barrier region. Accordingly, within the predetermined breaking layer, each connecting line between the inactive zones passes through the barrier area.
  • At least a portion of the barrier area is provided in which the formation of electrically conductive paths or the formation of cracks is more impeded than in a further area of the predetermined breaking layer.
  • the further region of the predetermined breaking layer has a lower tensile strength than an adjacent piezoelectric layer. This area is preferably at least in the area of the inactive zones.
  • the partial area of the barrier area has a lower average porosity than the further area of the predetermined breaking layer.
  • the lower average porosity leads to an increased tensile strength, making it difficult to segment the piezoelectric actuator.
  • the portion contains the same material as an adjacent piezoelectric layer.
  • the partial area can also be regarded as an interruption of the predetermined breaking layer.
  • a predetermined breaking layer can be applied to a piezoelectric layer which does not extend over the entire cross section of the piezoelectric layer.
  • the interruptions of the predetermined breaking layer are filled during the compression and sintering of the material of the adjacent piezoelectric layers.
  • the predetermined breaking layer has no such interruptions, but points a lower tear resistance over the entire cross-section of the stack than an adjacent layer of the stack.
  • the formation of electrically conductive paths or the formation of cracks may be impeded, for example, by a variation in the porosity of the predetermined breaking layer.
  • the porosity of the portion of the barrier layer is greater than that of an adjacent piezoelectric layer and less than the porosity in a further region of the predetermined breaking layer.
  • the barrier area has a continuous path in which the tear resistance is lower than in the partial area of the barrier area.
  • the continuous path is longer than the barrier area portion of each straight line connecting the outer electrodes.
  • the barrier layer is formed so that electrically conductive paths or cracks in the barrier layer can form only along the continuous path.
  • the longer this contiguous path the lower the likelihood that it will become conductive along its entire length, for example by the in-diffusion of conductive substances, or that it leads to a segmentation of the piezoactuator.
  • the longer the coherent path the lower the probability that an electrically conductive path or a crack passes completely through the barrier layer.
  • the connected path contains the same material as the further region of the predetermined breaking layer.
  • the material within the path is more porous than in the portion of the barrier layer surrounding the path.
  • the continuous path is entangled, and is substantially longer than the barrier portion of each of the outer electrodes connecting straight line, ie its length is substantially greater than the width of the barrier layer.
  • such a design has the advantage that a crack formed in the predetermined breaking layer can propagate well within the predetermined breaking layer in a plane perpendicular to the stacking direction of the electrode layers. In this way, it is intended to prevent the formation of a crack edge at which an existing crack propagates into the adjacent piezoelectric layers.
  • the partial region of the barrier layer is formed such that within the predetermined breaking layer, each connecting line between the external electrodes passes through the partial region.
  • the partial area of the barrier area surrounds islands which have a lower tear resistance than the partial area.
  • the islands have a greater porosity than their surroundings.
  • the islands contain the same material as the wider region of the predetermined breaking layer.
  • the islands are z. B. circular, but they may also be rectangular or have any other shape.
  • At least one inactive zone is formed between two electrode layers of different polarity adjacent in the stacking direction, in which the electrode layers do not overlap in the stacking direction.
  • the barrier region is outside the inactive zone.
  • the predetermined breaking layer is optimally configured in terms of their ability to crack and crack steering. However, this can be accompanied by an increased probability that electrically conductive substances penetrate into the predetermined breaking layer. For example, with an increased porosity, electrically conductive substances penetrate more easily into the predetermined breaking layer.
  • two separate inactive zones are formed between two adjacent electrode layers of different polarity.
  • outer electrodes are arranged on two opposite outer surfaces of the piezoelectric actuator.
  • the electrode layers are guided in the stacking direction alternately up to an outer electrode and have a distance from the second outer electrode. In this way, two separate inactive zones, which adjoin the outer electrodes, are formed between two adjacent electrode layers of different polarity.
  • a multilayer piezoactuator comprising a stack of piezoelectric layers and electrode layers interposed therebetween, and a predetermined breaking layer having at least partially lower tensile strength than adjacent piezoelectric layers, the predetermined breaking layer having a barrier region in which the formation of passing the barrier region through electrically conductive paths or the formation of passing through the barrier area Cracks is prevented in which at least a portion of the barrier area is provided in which the formation of electrically conductive paths or the formation of cracks is more hindered than in another area of the predetermined breaking layer, and in which the porosity of the subregion is greater than the porosity of an adjacent piezoelectric layer and less than the porosity in another area of the predetermined breaking layer.
  • a piezoelectric actuator is provided with a predetermined breaking layer, in which there are additives in the barrier area, which impede the formation of electrically conductive paths or the formation of cracks.
  • Such additives can be introduced, for example, by doping the material of the predetermined breaking layer, by printing or by diffusion from the outside into the predetermined breaking layer.
  • the additives bind, for example, penetrating substances or cause a catalyst effect, so that the penetrating substances are converted into substances that do not lead to conductive paths.
  • the additives may result in increased barrier strength of the barrier area.
  • suitable additives may at least partially fill the pores.
  • the barrier region is arranged at least in the outer edge region of the predetermined breaking layer. In this way, the predetermined breaking layer is sealed against the ingress of moisture to the outside. Additionally or alternatively, in this way, the occurrence of cracks in the edge region of the piezoelectric actuator difficult and thus mechanical stresses can be prevented.
  • the entire predetermined breaking layer constitutes a barrier area which hampers the formation of electrically conductive paths through the predetermined breaking layer. In this case, therefore, the barrier area extends over the entire predetermined breaking layer.
  • a predetermined breaking layer which may extend over the entire cross section of the piezoelectric actuator, introduced with homogeneous concentration distribution additives that hinder the formation of electrically conductive paths.
  • a piezoelectric actuator in multilayer construction comprising a stack of piezoelectric layers and electrode layers disposed therebetween, and a predetermined breaking layer which at least partially has a lower tensile strength than adjacent piezoelectric layers, wherein the predetermined breaking layer has a barrier region in which the formation of by Barrier area leading through electrically conductive paths or the formation of penetrating through the barrier area cracks is hindered, in which at least a portion of the barrier area is provided in which the formation of electrically conductive paths or the formation of cracks is more hindered than in a wider range of Predetermined breaking layer, and wherein a plurality of such subregions are provided, which are separated from each other by bridges containing the material of the further region or wherein the at least one subarea surrounds islands t, the same Material contain as the wider area or where the material of the wider area extends finger-like into the barrier area.
  • Figure 1A shows a piezoelectric actuator 1 in multilayer construction, in which a plurality of piezoelectric layers 2, for example, ceramic layers, along a stacking direction S are arranged one above the other. Between some piezoelectric layers 2, electrode layers 3 are arranged. On opposite side surfaces 12a, 12b of the stack 11, an outer electrode 8a, 8b is applied in each case. For electrical contacting of the outer electrodes 8a, 8b leads can be soldered to the outer electrodes 8a, 8b (not shown).
  • the electrode layers 3 are alternately connected in the stacking direction S to the two outer electrodes 8a, 8b. For this purpose, an electrode layer 3a is alternately led to one of the outer electrodes 8a while being spaced from the second outer electrode 8b.
  • the electrode layer 3b adjacent in the stacking direction S is electrically connected to the second outer electrode 8b and spaced from the opposite outer electrode 8a.
  • a voltage is applied between the outer electrodes 8a, 8b, the polarity of the electrode layers 3a, 3b thus changes in the stacking direction S.
  • the piezoelectric layers 2 expand upon application of a voltage along the field lines.
  • the piezoelectric actuator has inactive zones 6a, 6b, in which in the stacking direction S adjacent electrode layers of different polarity 3a, 3b have no overlap. In the inactive zones 6a, 6b, the piezoelectric layers 2 therefore expand less than in an active zone 9 in which adjacent electrode layers of different polarity 3a, 3b overlap. This leads to mechanical stresses, which can cause cracks in the piezoelectric actuator 1.
  • predetermined breaking layers 4 are arranged between adjacent electrode layers 3a, 3b.
  • FIG. 1B shows a piezoelectric actuator 1, which is surrounded on its side surfaces by a sheath 10.
  • the sheath 10 covers the outer electrodes 8a, 8b and protects them from external influences.
  • the sheath 10 serves to protect against the ingress of moisture and from mechanical damage.
  • the sheath 10 contains an elastic material, for example silicone.
  • the piezoelectric actuator 1 has predetermined breaking layers 4 for targeted formation and steering of cracks.
  • FIG. 2A shows a section of a longitudinal section of a piezoelectric actuator 1, in which within a predetermined breaking layer 4, an electrically conductive path 4b is formed.
  • the predetermined breaking layer 4 contains a porous material and has a lower tensile strength than the adjacent piezoelectric layers 2a, 2c.
  • the predetermined breaking layer 4 contains a ceramic material whose porosity is higher than the porosity of the adjacent piezoelectric layers 2a, 2c.
  • the piezoelectric layers 2a, 2c also contain a ceramic material. Due to the increased porosity of the predetermined breaking layer 4, moisture can more easily penetrate into the predetermined breaking layer 4 than into adjacent piezoelectric layers 2a, 2c.
  • an electrically conductive path 4b which is shown here, can arise within the predetermined breaking layer 4 and connects the outer electrodes 8a, 8b to one another, thus resulting in a short circuit.
  • FIG. 2B shows a section of a piezoelectric actuator 1 according to FIG. 1B in which, within a predetermined breaking layer 4, a crack has formed, which has spread over the entire cross-sectional area of the predetermined breaking layer 4.
  • the piezoelectric actuator 1 is divided into two partial stacks 1a, 1b, which can be moved against each other. This leads to a increased mechanical stress on the envelope 10 of the piezoelectric actuator 1, which can lead to tearing of the sheath 10.
  • Embodiments are shown for predetermined breaking layers 4, which are designed laterally inhomogeneous.
  • the predetermined breaking layer 4 has at least one partial region 5 a, which differs with respect to its chemical or physical properties from a further region 4 a of the predetermined breaking layer 4.
  • the subdivision of the predetermined breaking layer 4 into at least one subregion 5a and a further region 4a runs in a plane perpendicular to the stacking direction S.
  • a barrier region 5 contains a subregion 5a, so as to prevent the propagation of cracks and electrically conductive paths across the cross sectional surface of the predetermined breaking layer 4 hampered by the portion 5a.
  • the predetermined breaking layers 4 a barrier region 5 with a portion 5a, in which the formation of electrically conductive paths or the formation of cracks is more hindered than in a further region 4a of the predetermined breaking layer 4.
  • the further region 4a contains a porous material.
  • the portion 5a includes the same material as the adjacent piezoelectric layers 2a, 2c.
  • the porosity of the material in the portion 5a and in the adjacent piezoelectric layers 2a, 2c is the same and the porosity of the material in wider area 4a of the predetermined breaking layer 4 greater than in the partial area 5a.
  • the term "porous material” refers to a material whose porosity is higher than the porosity of adjacent layers of the stack.
  • both the partial area 5a and the further area 4a contain a ceramic material.
  • the partial region 5 a Due to its lower porosity, the partial region 5 a has a higher average strength than the further region 4 a of the predetermined breaking layer 4. As a result, both the formation of conductive paths and the segmentation of the piezo stack 1 can be prevented.
  • FIG. 3A shows a predetermined breaking layer 4, in which the barrier region 5 is arranged in a region between the two inactive zones 6a, 6b.
  • the barrier region 5 extends over the entire diagonal 90 of the predetermined breaking layer 4, which extends transversely to the inactive zones 6a, 6b, ie perpendicular to a connecting line between the inactive zones 6a, 6b. In this way, within the predetermined breaking layer, each connecting line between the outer electrodes 8a, 8b passes through the barrier region 5.
  • the formation of an electrically conductive path can be prevented, which electrically connects the outer electrodes 8a, 8b, which are arranged at the edge of the piezoelectric actuator in the region of the inactive zones 6a, 6b, to one another.
  • the generation of a crack which connects the outer electrodes 6a, 6b to each other can be prevented.
  • the predetermined breaking layer 4 contains a porous material which is designed to be optimized in terms of crack formation and crack deflection.
  • FIG. 3B shows a further embodiment for the arrangement of a barrier layer 5 in a predetermined breaking layer 4, in which the barrier layer 5 is not, as in FIG. 3A , extends along the diagonal 90, but connects two side surfaces of the piezoelectric actuator 1. Also in this case, each connecting line between the outer electrodes 8a, 8b and thus also each connecting line between the inactive zones 6a, 6b within the predetermined breaking layer 4 passes through the barrier region 5.
  • FIG. 3C shows a further embodiment of a predetermined breaking layer 4, with a portion 5a in the barrier region 5.
  • the portion 5a is also formed here so that within the predetermined breaking layer 4, each connecting line between the outer electrodes 8a, 8b through the portion 5a leads.
  • the portion 5a forms a continuous looped path which extends over the diagonal 90 of the predetermined breaking layer 4.
  • the material of the further region 4 a of the predetermined breaking layer 4 extends like a finger into the barrier region 5 and is toothed with the partial region 5 a. In this way, mechanical stresses of the piezoelectric actuator 1 can be compensated particularly well.
  • Figure 3D shows an embodiment of the predetermined breaking layer 4, in which are located in the barrier area 5 circular islands 5b of porous material.
  • the islands 5b are surrounded by the partial area 5a of the barrier area 5. Within these islands 5b targeted cracks in the piezoelectric actuator 1 can arise.
  • FIG. 3E shows an embodiment of the predetermined breaking layer 4, in which there are 5 in the barrier region 5 rectangular islands of porous material.
  • FIG. 3F shows an embodiment of the predetermined breaking layer 4, in which in the barrier region 5 porous material forms a continuous path 5c.
  • the continuous path 5c is longer than the portion of each connecting line between the outer electrodes 8a, 8b located in the barrier region 5. This reduces the probability that an electrically conductive path is created by penetrating moisture, which leads completely through the barrier region 5 and thus can connect the outer electrodes 8a, 8b. In addition, a segmentation of the piezoelectric actuator 1 can be prevented.
  • the diagonal 90 extending across the predetermined breaking layer 4 to the inactive zones 6a, 6b cuts both the partial region 5a of the barrier region 5 and the further region 4a of the predetermined breaking layer 4. This can contribute to the reduction of mechanical stresses in the piezoactuator 1.
  • FIG. 4 shows a predetermined breaking layer 4 with a barrier region 5.
  • the barrier region 5 extends along a diagonal 90 of the predetermined breaking layer 4 and contains a material which is less porous than the material of a further region 4a of the predetermined breaking layer 4, but is more porous than adjacent piezoelectric layers. In this way, penetration of moisture into the barrier area 5 can be hindered. In addition, the occurrence of cracks in the barrier area 5 can be difficult and thus a segmentation of the piezoelectric actuator 1 can be prevented. Also in the barrier area 5 is the Tear resistance to adjacent piezoelectric layers reduced. In the inactive zones 6a, 6b, the predetermined breaking layer 4 has a reduced tensile strength owing to its higher porosity and is therefore optimized in the inactive zones 6a, 6b with regard to their cracking and crack-steering capability.
  • FIG. 5 shows a further embodiment of a predetermined breaking layer 4, in which 5 additives 7 are introduced into the barrier area.
  • the predetermined breaking layer 4 is made of a porous material.
  • the pores of the additives 7 are largely filled and thus the penetration of moisture into the barrier area 5 is hindered. Additionally or alternatively, such additives 7 can lead to an increased tensile strength of the barrier region 5.
  • the additives 7 can also be introduced only in the edge region of the predetermined breaking layer 4, so that the barrier region 5 is arranged in the edge region.
  • FIGS. 6A to 6G show further examples of structured predetermined breaking layers 4, which have at least one subregion 5a, which differs from a further region in its chemical or physical properties.
  • the partial area 5a is, for example, part of a barrier area 5 which limits the formation of conductive paths or cracks within the predetermined breaking layer 5.
  • the barrier region 5 does not extend over the entire diagonal 90.
  • FIG. 6A shows a predetermined breaking layer 4 with a portion 5a, which has a rectangular shape and extends mainly along the diagonal 90 of the predetermined breaking layer 4. in the Difference to the in FIG. 3A shown embodiment of a barrier region 5 here the barrier area does not extend to the corners of the predetermined breaking layer 4th
  • FIG. 6B shows a predetermined breaking layer 4 with two sections 5a, which extend mainly along the diagonal 90 and in particular in the corners of the predetermined breaking layer 4, which do not belong to the inactive zones 6a, 6b.
  • the two sections 5a are separated by a bridge 5d in the middle.
  • the bridge 5d contains the material of a further region 4a of the predetermined breaking layer 4 and thus has a reduced tensile strength in comparison to the partial regions 5a.
  • FIG. 6C shows an embodiment of a predetermined breaking layer 4, in which portions 5a extend bar-shaped along the diagonal 90.
  • the sections 5a are separated from each other by bridges 5d of porous material.
  • FIG. 6D shows a predetermined breaking layer 4, which includes a portion 5a, similar to that in FIG. 6A , rectangular. Here, however, the portion 5a is interrupted by circular islands 5b of porous material.
  • FIG. 6E shows an embodiment of the predetermined breaking layer 4, in which the portion 5a a similar geometry as in FIG. 6B shown portion 5a has.
  • the portion 5a is interrupted by rectangular islands 5b of porous material.
  • FIG. 6F shows an embodiment of the predetermined breaking layer 4, in which the portion 5a as in FIG. 3B does not extend along the diagonal 90, but is arranged parallel to the outer electrodes 8a, 8b.
  • the portion 5a does not extend to the side surfaces.
  • partial areas may have such a direction of extension.
  • FIG. 6G shows an embodiment of the predetermined breaking layer 4, in which the partial region 5a has an elliptical outline.
  • the longitudinal axis of the portion 5a extends along the diagonal 90th
  • the shapes of the subregions 5a and barrier regions 5 described here are not limited to the geometries shown here. So z. B. the boundary between the barrier region 5 and the further region 4 a of the predetermined breaking layer 4 instead of a straight course also have a curved course.
  • the barrier area not only, as in FIG. 3A shown diagonally or as in FIG. 3B shown, parallel to the side surfaces of the piezoelectric actuator, but also have a different orientation.
  • FIG. 7 shows a further embodiment for a predetermined breaking layer 4, in which a barrier region 5, which impedes the formation of electrically conductive paths passing through the barrier region, extends over the entire predetermined breaking layer 4.
  • a barrier region 5 which impedes the formation of electrically conductive paths passing through the barrier region, extends over the entire predetermined breaking layer 4.
  • additives 7 are introduced, which impede the penetration of moisture in the predetermined breaking layer 4.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (15)

  1. Piézoactionneur en structure multicouche comportant :
    - une pile de couches piézoélectriques (2) et de couches d'électrode (3) intercalées ;
    - une couche de rupture théorique (4), comportant au moins en partie une résistance à la déchirure davantage limitée que les couches piézoélectriques (2a, 2c) connexes ;
    - la couche de rupture théorique (4) comportant une zone de barrière (5) dans laquelle la déformation de chemins électriquement conducteurs introduits à travers la zone de barrière (5) ou la déformation des déchirures introduites à travers la zone de barrière (5) est entravée ;
    - avec deux électrodes extérieures (8a, 8b) reliant entre elles sur le plan électrique les couches d'électrode (3a, 3b) d'une polarité ;
    - dans lequel dans la couche de rupture théorique (4), chaque ligne de jonction prévue entre les électrodes extérieures (8a, 8b) est amenée à travers la zone de barrière (5) ;
    - dans lequel au moins une zone partielle (5a) de la zone de barrière (5) est prévue dans laquelle la déformation des chemins électriquement conducteurs ou la déformation des déchirures est plus fortement entravée que dans une autre zone (4a) de la couche de rupture théorique (4) ;
    - dans lequel la zone de barrière (5) comporte un chemin (5c) rattaché dans lequel la résistance à la déchirure est plus limitée que dans la zone partielle (5a) de la zone de barrière (5) ; et
    - dans lequel le chemin rattaché (5c) est plus long que la section se trouvant dans la zone de barrière (5) de chacune droite reliant les électrodes extérieures (8a, 8b).
  2. Piézoactionneur selon la revendication 1, dans lequel la couche de rupture théorique (4) comporte au moins en partie une plus grande porosité moyenne qu'une couche piézoélectrique (2) connexe.
  3. Piézoactionneur selon l'une quelconque des revendications 1 et 2, dans lequel la zone partielle (5a) de la zone de barrière (5) comporte une porosité moyenne davantage réduite qu'une autre zone (4a) de la couche de rupture théorique (4).
  4. Piézoactionneur selon l'une quelconque des revendications 1 à 3,
    - dans lequel entre deux couches d'électrode (3a, 3b) de polarité différente connexes dans la direction de la pile (S), au moins une zone inactive (6a, 6b) est réalisée dans laquelle les couches d'électrode (3a, 3b) ne se chevauchent pas dans la direction de la pile (S) ; et
    - dans lequel la zone de barrière (5) se trouve à l'extérieur de la zone inactive (6a, 6b).
  5. Piézoactionneur selon l'une quelconque des revendications 1 à 4, dans lequel la zone partielle (5a) de la zone de barrière (5) est réalisée de telle sorte que dans la couche de rupture théorique (4), chaque ligne de jonction prévue entre les électrodes extérieures (8a, 8b) est amenée à travers la zone partielle (5a) de la zone de barrière (5).
  6. Piézoactionneur selon l'une quelconque des revendications 1 à 5, dans lequel la zone partielle (5a) de la zone de barrière (5) entoure des îlots (5b) présentant une résistance à la déchirure davantage limitée que la zone partielle (5a).
  7. Piézoactionneur selon l'une quelconque des revendications 1 à 6, dans lequel la zone partielle (5a) de la zone de barrière (5) contient la même matière qu'une couche piézoélectrique (2) connexe.
  8. Piézoactionneur selon l'une quelconque des revendications précédentes, dans lequel la couche de rupture théorique (4) contient au moins une matière composée d'une certaine quantité de céramique et de métal.
  9. Piézoactionneur selon l'une quelconque des revendications précédentes, dans lequel la couche de rupture théorique (4) est réalisée de façon hétérogène dans un plan perpendiculaire à la direction de pile (S) de la pile (S).
  10. Piézoactionneur selon l'une quelconque des revendications 1 à 9, dans lequel on trouve dans la zone de barrière (5) des substances supplémentaires (7) entravant la déformation des chemins électriquement conducteurs ou la déformation des déchirures.
  11. Piézoactionneur selon l'une quelconque des revendications 1 à 10, dans lequel la zone de barrière (5) est disposée au moins dans la zone de bordure extérieure de la couche de rupture théorique (4).
  12. Piézoactionneur selon la revendication 10, dans lequel une zone de barrière (5) entravant la déformation de chemins électriquement conducteurs introduits à travers la zone de barrière (5) s'étend sur la totalité de la couche de rupture théorique (4).
  13. Piézoactionneur en structure multicouche comportant :
    - une pile de couches piézoélectriques (2) et de couches d'électrode (3) intercalées ;
    - une couche de rupture théorique (4) comportant au moins en partie une résistance à la déchirure davantage limitée que les couches piézoélectriques (2a, 2c) connexes ;
    - la couche de rupture théorique (4) comportant une zone de barrière (5) dans laquelle la déformation de chemins électriquement conducteurs introduits à travers la zone de barrière (5) ou la déformation des déchirures introduites à travers la zone de barrière (5) est plus fortement entravée que dans une autre zone (4a) de la couche de rupture théorique (4) ;
    - dans lequel on trouve dans la zone de barrière (5) une matière de la couche de rupture théorique (4) comportant des substances supplémentaires (7) à cette matière, les substances supplémentaires (7) entravant la déformation des chemins électriquement conducteurs ou la déformation des déchirures.
  14. Piézoactionneur en structure multicouche comportant :
    - une pile de couches piézoélectriques (2) et de couches d'électrode (3) intercalées ;
    - une couche de rupture théorique (4) comportant au moins en partie une résistance à la déchirure davantage limitée que les couches piézoélectriques (2a, 2c) connexes ;
    - la couche de rupture théorique (4) comportant une zone de barrière (5) dans laquelle la déformation de chemins électriquement conducteurs introduits à travers la zone de barrière (5) ou la déformation des déchirures introduites à travers la zone de barrière (5) est entravée ;
    - dans lequel au moins une zone partielle (5a) de la zone de barrière (5) est prévue dans laquelle la déformation des chemins électriquement conducteurs ou la déformation des déchirures est plus fortement entravée que dans une autre zone (4a) de la couche de rupture théorique (4) ;
    - dans lequel la porosité de la zone partielle (5a) est supérieure à la porosité d'une couche piézoélectrique (2) connexe et plus réduite que la porosité dans une autre zone (4a) de la couche de rupture théorique (4).
  15. Piézoactionneur en structure multicouche comportant :
    - une pile de couches piézoélectriques (2) et de couches d'électrode (3) intercalées ;
    - une couche de rupture théorique (4) comportant au moins en partie une résistance à la déchirure davantage limitée que les couches piézoélectriques (2a, 2c) connexes ;
    - la couche de rupture théorique (4) comportant une zone de barrière (5) dans laquelle la déformation de chemins électriquement conducteurs introduits à travers la zone de barrière (5) ou la déformation des déchirures introduites à travers la zone de barrière (5) est entravée ;
    - dans lequel au moins une zone partielle (5a) de la zone de barrière (5) est prévue dans laquelle la déformation des chemins électriquement conducteurs ou la déformation des déchirures est plus fortement entravée que dans une autre zone (4a) de la couche de rupture théorique (4) ;
    - plusieurs zones partielles (5a) de ce type étant prévues et séparées les unes des autres par des ponts (5d) contenant la matière de l'autre zone (4a) ou l'au moins une zone partielle (5a) entourant des îlots (5b) contenant la même matière que l'autre zone (4a) ou la matière de l'autre zone (4a) s'étendant à la façon d'un doigt dans la zone de barrière (5).
EP09781366.1A 2008-08-01 2009-07-31 Piézoactionneur doté d'une couche de rupture préférentielle Not-in-force EP2319102B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008035924 2008-08-01
DE102008052914A DE102008052914A1 (de) 2008-08-01 2008-10-23 Piezoaktor mit Sollbruchschicht
PCT/EP2009/059966 WO2010012830A1 (fr) 2008-08-01 2009-07-31 Piézoactionneur doté d'une couche de rupture préférentielle

Publications (2)

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EP2319102A1 EP2319102A1 (fr) 2011-05-11
EP2319102B1 true EP2319102B1 (fr) 2014-06-04

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US (1) US8304963B2 (fr)
EP (1) EP2319102B1 (fr)
JP (1) JP5518065B2 (fr)
DE (1) DE102008052914A1 (fr)
WO (1) WO2010012830A1 (fr)

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JP5421373B2 (ja) * 2009-07-28 2014-02-19 京セラ株式会社 積層型圧電素子およびこれを用いた噴射装置ならびに燃料噴射システム
DE102010006587A1 (de) 2010-02-02 2011-08-04 Epcos Ag, 81669 Piezoelektrisches Bauelement
JP5842635B2 (ja) * 2012-01-27 2016-01-13 Tdk株式会社 積層型圧電素子
WO2016077560A1 (fr) * 2014-11-12 2016-05-19 The Trustees Of Dartmouth College Matériau piézo-électrique poreux à surface dense, et procédés et dispositifs associés
JP6367693B2 (ja) * 2014-11-21 2018-08-01 京セラ株式会社 圧電素子、圧電振動装置、音響発生器、音響発生装置および電子機器

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DE10234787C1 (de) 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
DE10307825A1 (de) 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
DE602005027914D1 (de) * 2005-09-16 2011-06-16 Delphi Tech Holding Sarl Piezoelektrischer Aktor
DE102006031085A1 (de) 2006-03-16 2007-09-20 Epcos Ag Elektrisches Vielschichtbauelement
DE102006026644A1 (de) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelektrischer Aktor
JP5153095B2 (ja) * 2006-07-27 2013-02-27 京セラ株式会社 積層型圧電素子およびこれを用いた噴射装置
JP5431155B2 (ja) * 2006-08-09 2014-03-05 コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング 信頼性の高いセラミック多層構造のピエゾアクチュエータ
CN101563795B (zh) 2006-10-20 2011-03-23 京瓷株式会社 压电致动器装置及其制造方法
WO2008072768A1 (fr) 2006-12-15 2008-06-19 Kyocera Corporation Élément piézoélectrique laminé, dispositif d'injection comportant l'élément piézoélectrique laminé et système d'injection de carburant
WO2008072767A1 (fr) * 2006-12-15 2008-06-19 Kyocera Corporation Élément piézoélectrique stratifié, dispositif d'éjection fourni avec cet élément et système gicleur de combustible
DE102007008120A1 (de) * 2007-02-19 2008-08-21 Siemens Ag Piezostapel und Verfahren zum Herstellen eines Piezostapels
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Publication number Publication date
US8304963B2 (en) 2012-11-06
WO2010012830A1 (fr) 2010-02-04
US20110181155A1 (en) 2011-07-28
JP5518065B2 (ja) 2014-06-11
EP2319102A1 (fr) 2011-05-11
JP2011530162A (ja) 2011-12-15
DE102008052914A1 (de) 2010-04-08

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