WO2008072767A1 - Élément piézoélectrique stratifié, dispositif d'éjection fourni avec cet élément et système gicleur de combustible - Google Patents

Élément piézoélectrique stratifié, dispositif d'éjection fourni avec cet élément et système gicleur de combustible Download PDF

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Publication number
WO2008072767A1
WO2008072767A1 PCT/JP2007/074242 JP2007074242W WO2008072767A1 WO 2008072767 A1 WO2008072767 A1 WO 2008072767A1 JP 2007074242 W JP2007074242 W JP 2007074242W WO 2008072767 A1 WO2008072767 A1 WO 2008072767A1
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WIPO (PCT)
Prior art keywords
layer
piezoelectric element
piezoelectric
low
multilayer
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PCT/JP2007/074242
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English (en)
Japanese (ja)
Inventor
Masahiro Sato
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Kyocera Corporation
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Priority to JP2008549393A priority Critical patent/JP5084744B2/ja
Publication of WO2008072767A1 publication Critical patent/WO2008072767A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603—Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means

Definitions

  • Multilayer piezoelectric element injection device including the same, and fuel injection system
  • the present invention relates to a multilayer piezoelectric element, an injection device including the same, and a fuel injection system.
  • the laminated piezoelectric element is used for, for example, a driving element (piezoelectric actuator), a sensor element, and a circuit element.
  • the driving element include a fuel injection device for an automobile engine, a liquid injection device such as an ink jet, a precision positioning device such as an optical device, and a vibration prevention device.
  • the sensor element include a combustion pressure sensor, a knock sensor, an acceleration sensor, a load sensor, an ultrasonic sensor, a pressure sensor, and a short sensor.
  • Examples of the circuit element include a piezoelectric gyro, a piezoelectric switch, a piezoelectric transformer, and a piezoelectric breaker.
  • multilayer piezoelectric elements have been required to ensure a large amount of displacement under a large pressure at the same time as miniaturization is advanced. For this reason, it is required to be able to be used under severe conditions where a higher electric field is applied and force is continuously driven for a long time.
  • the multilayer piezoelectric element undergoes dimensional changes intermittently.
  • the multilayer piezoelectric element is largely driven and deformed as a whole. Therefore, the deformation of the end portion of the element is particularly large, and a large stress force is applied to the end portion of the element.
  • Patent Document 1 proposes a piezoelectric element in which the thickness of the piezoelectric layer is changed.
  • Patent Document 1 JP-A-60-86880
  • Patent Document 1 By the method disclosed in Patent Document 1, a certain amount of force or stress is applied to the end of the piezoelectric element. You can power to ease. Therefore, it is necessary to more effectively relieve the force and stress applied to the element.
  • the present invention has been made in view of the above problems, and a multilayer piezoelectric element in which a decrease in displacement is suppressed even when continuously driven for a long time under a high electric field and high pressure,
  • the purpose of this is to provide a fuel injection system and a fuel injection system.
  • the multilayer piezoelectric element of the present invention includes a multilayer structure and positive and negative external electrodes.
  • a plurality of piezoelectric layers and a plurality of internal electrodes are alternately laminated.
  • the external electrode is formed on the side surface of the laminated structure and is connected to the internal electrode.
  • the laminated structure has a plurality of portions where the thicknesses of the piezoelectric layers are different from each other.
  • a stress relaxation part is provided between the two parts adjacent to each other in the stacking direction.
  • FIG. 1 is a perspective view showing a multilayer piezoelectric element that exerts a force on a first embodiment of the present invention.
  • FIG. 2 is an enlarged cross-sectional view of a portion where the stress relaxation portion of the embodiment shown in FIG. 1 is disposed.
  • FIG. 3 is a perspective view showing a multilayer piezoelectric element according to a second embodiment of the present invention.
  • FIG. 4 is a perspective view showing a multilayer piezoelectric element according to a third embodiment of the present invention.
  • FIG. 5 is an exploded perspective view in which a portion where the low-rigidity layer of the embodiment shown in FIG. 4 is disposed is enlarged.
  • FIG. 6 is a perspective view showing a multilayer piezoelectric element according to a fourth embodiment of the present invention.
  • FIG. 7 is a perspective view showing a multilayer piezoelectric element according to a fifth embodiment of the present invention.
  • FIG. 8 is a perspective view showing a multilayer piezoelectric element according to a sixth embodiment of the present invention.
  • FIG. 9 is a cross-sectional view showing a multilayer piezoelectric element that exerts a force in a seventh embodiment of the present invention and is parallel to the lamination direction.
  • FIG. 10 is an enlarged sectional view of a portion where a stress relaxation portion according to an eighth embodiment of the present invention is provided.
  • FIG. 11 is an enlarged view of a portion where a stress relaxation portion according to a ninth embodiment of the present invention is provided.
  • FIG. 11 is an enlarged view of a portion where a stress relaxation portion according to a ninth embodiment of the present invention is provided.
  • FIG. 12 is a schematic cross-sectional view showing an injection device according to an embodiment of the present invention.
  • FIG. 13 is a schematic view showing a fuel injection system according to one embodiment of the present invention.
  • the laminated piezoelectric element 1 (hereinafter also referred to as element 1) according to the first embodiment of the present invention includes a plurality of piezoelectric layers 3 and a plurality of internal electrodes 5. Are laminated alternately, and a positive electrode and a negative external electrode 9 formed on the side surface of the laminated structure 7 and connected to the internal electrode 5 are provided.
  • the laminated structure 7 has a plurality of portions where the thicknesses of the piezoelectric layers 3 are different from each other. That is, the laminated structure 7 has a portion A where the thickness of the piezoelectric layer 3 is L1 and a portion B where the thickness of the piezoelectric layer 3 is L2 (L1> L2).
  • the thickness of the piezoelectric layer 3 can be measured, for example, as follows. In the case where the external electrode 9 is formed! /, NA! /, And the internal electrode 5 is exposed on the side surface of the laminated structure 7! /, The internal electrode is formed at the center in the width direction perpendicular to the stacking direction. The thickness of the piezoelectric layer 3 between 5 may be measured. In addition, when the internal electrode 5 is not exposed on the side surface of the multilayer structure 7, the multilayer structure 7 is cut along a plane parallel to the stacking direction so that the internal electrode 5 is exposed. In addition, the thickness of the piezoelectric layer 3 between the internal electrodes 5 may be measured at the center in the width direction perpendicular to the stacking direction.
  • a stress relaxation portion 11 is provided between two portions adjacent to each other in the stacking direction.
  • the multilayer piezoelectric element 1 of the present embodiment has the portions A and B in which the thickness of the piezoelectric layer 3 is different from each other, and the stress relaxation portion 11 is provided between these portions A and B, thereby providing durability. Has been improved.
  • Site A and site B differ in the amount of displacement of the piezoelectric layer. Therefore, stress tends to concentrate in the vicinity of the piezoelectric layers having different displacement amounts. However, the stress applied to the portions A and B can be effectively relieved by providing the stress relaxation portion 11 between the portions A and B.
  • the stress relaxation portion 11 includes a pair of adjacent internal electrodes 5 and a piezoelectric layer 3 sandwiched between the pair of internal electrodes 5, and further includes a pair of
  • the internal electrode 5 is preferably connected to the external electrode 9 having the same polarity. Adjacent, connected to the same polarity external electrode 9
  • the piezoelectric layer 3 sandwiched between the two internal electrodes 5 shows almost no reverse piezoelectric effect. For this reason, it is easy to follow the fluctuations of the adjacent parts in the stacking direction, and a higher stress relaxation effect can be obtained.
  • a part consisting of two internal electrodes 5 connected to the external electrode 9 of the same polarity and the piezoelectric layer 3 sandwiched between the external electrodes 9 is referred to as a part C.
  • the piezoelectric layer 3 and the internal electrode 5 of the part C that hardly show such a reverse piezoelectric effect have the same main components as the piezoelectric layer 3 and the internal electrode 5 that form the parts A and B, respectively. It is preferable to force S. By using a material having the same main component, it is possible to obtain a high stress relaxation effect while having a simple shape that does not require a separate member. In addition, since the material having the same main component is used as the piezoelectric layer 3, the bonding force between the piezoelectric layers 3 can be increased.
  • a ceramic having piezoelectricity can be used as a material of the piezoelectric layer 3.
  • a ceramic having a high piezoelectric strain constant d is used. Specifically, dititanate
  • perovskite oxide such as lead ruconate (PbZrO 2 -PbTiO 3)
  • the piezoelectric layer 3 may be perovsk represented by barium titanate (BaTiO).
  • the piezoelectric strain constant d indicating the piezoelectric characteristics is high, and therefore, the force s can be increased.
  • the piezoelectric layer 3 is formed of a ceramic material, the piezoelectric layer 3 and the internal electrode 5 are fired simultaneously.
  • a conductive material can be used as the material of the internal electrode 5.
  • a conductive material can be used as the material of the internal electrode 5.
  • simple metals such as Cu and Ni, and alloys such as silver platinum and silver palladium alloys.
  • silver-palladium is preferred as the main component because it has migration resistance and oxidation resistance, has a low Young's modulus, and is inexpensive.
  • composition of the low-rigidity layer 17 including the metal part 19 can be measured as follows.
  • the composition of a part of the internal electrode 5 is measured by cutting the laminated structure 7 so that the internal electrode 5 is exposed.
  • chemical analysis such as ICP (inductively coupled plasma) emission analysis can be used.
  • the cut surface of the multilayer piezoelectric element 1 may be analyzed and measured using an EPMA (Electron Probe Micro Analysis) method.
  • An external electrode 9 is formed on the side surface of the multilayer structure 7.
  • the external electrode 9 It is formed as a pair of electrodes on the pole side. Since the anode-side and cathode-side external electrodes 9 may be disposed so as not to be electrically short-circuited with each other, they may be disposed on opposing side surfaces or on adjacent side surfaces. . However, it is preferable that the external electrode 9 is disposed on the opposite side surface in order to suppress the electrical short circuit and to disperse force and stress on the piezoelectric element as much as possible.
  • the material of the external electrode 9 a material having good conductivity can be used.
  • metals such as Cu and Ni, and alloys thereof can be used.
  • silver or an alloy containing silver it is preferable to use silver or an alloy containing silver as a main component because of its low electric resistance and easy handling.
  • low active layers 23 made of a piezoelectric material are laminated on both ends of the laminated structure 7 in the lamination direction.
  • the internal electrode 5 is disposed on one main surface side, and the internal electrode 5 is not disposed on the other main surface side. Almost no indication.
  • the lead wires may be connected and fixed to the pair of external electrodes 9 by soldering, and the lead wires may be connected to an external power source.
  • each piezoelectric layer 3 is displaced by the inverse piezoelectric effect.
  • the multilayer piezoelectric element 1 includes a stress relaxation portion 11.
  • a stress relaxation portion 11 As the stress relaxation portion 11, a plurality of portions C that hardly exhibit the above-described reverse piezoelectric effect are provided between the adjacent portions A and B.
  • the stress applied to the stress relaxation portion 11 can be dispersed in a wider range.
  • the durability of the multilayer piezoelectric element 1 can be further increased.
  • the thickness force of the piezoelectric layer 3 constituting the part C is preferable that the thickness is the same.
  • the piezoelectric generated at the time of cooling after sintering of the multilayer piezoelectric element 1 The stress caused by the difference in thermal expansion between the body layer 3 and the internal electrode 5 can be reduced.
  • the stress applied to the multilayer piezoelectric element 1 in the manufacturing process can be reduced.
  • the stress relaxation portion 11 includes a high elastic layer 15 having a higher elastic modulus than the piezoelectric layer 3! /.
  • a higher stress relaxation effect can be obtained.
  • the high elastic modulus means that the Young's modulus is small.
  • the reason why the Young's modulus is small is, for example, as in the eighth embodiment described later.
  • a method for measuring the Young's modulus for example, a nanoindentation method can be used.
  • a measuring device for example, “Nanoindenter II” manufactured by Nano Instruments Co., Ltd. can be used.
  • the low rigidity layer 17, the piezoelectric layer 3 or the internal electrode 5 may be exposed in a cross section perpendicular to or parallel to the stacking direction of the stacked structure 7, and the yang ratio may be measured using the above measuring device.
  • a material having a higher elastic modulus than the piezoelectric layer 3 and the internal electrode 5 specifically, a resin such as silicone rubber, epoxy resin, or polyimide resin can be used.
  • the elastic modulus can be made higher than that of the piezoelectric layer 3 and the internal electrode 5 due to the formation of many voids.
  • the multilayer piezoelectric element 1 includes a stress relaxation portion 11.
  • the stress relieving part 11 includes a low-rigidity layer 17 having rigidity lower than that of the piezoelectric layer 3 and the internal electrode 5!
  • the low rigidity layer 17 is easier to break than the piezoelectric layer 3 and the internal electrode 5. Therefore, when the low-rigidity layer 17 breaks, the force that restrains the piezoelectric layer 3 and the internal electrode 5 can be weakened.
  • the presence or absence of the low-rigidity layer 17 can be confirmed by applying a load to the element 1 from a direction perpendicular to the stacking direction by a JIS 3-point bending test (JIS R 1601). This is because it is sufficient to confirm at which part the element 1 breaks when the above test is performed.
  • the broken part is the part with the lowest rigidity in the element.
  • the low-rigidity layer 17 since the low-rigidity layer 17 is provided in the stress relaxation portion 11, the low-rigidity layer 17 breaks when a JIS 3-point bending test is performed. Thus, the presence or absence of the low-rigidity layer 17 can be confirmed by the force at which the fractured part is the part A or the part B or the low-rigidity layer 17 between the parts.
  • the presence or absence of the low-rigidity layer 17 can be confirmed by the following method. First, the specimen is processed into a column. Then, in accordance with the JIS 3-point bending test, place the specimen on 2 fulcrums arranged at a fixed distance. In addition, load is applied to one central point between the fulcrums. From the above, the presence or absence of the low-rigidity layer 17 can be confirmed.
  • the low-rigidity layer 17 is made of a material having lower rigidity than the piezoelectric layer 3 and the internal electrode 5, or many voids are formed as in an eighth embodiment to be described later. Therefore, the rigidity can be made lower than that of the piezoelectric layer 3 and the internal electrode 5.
  • the multilayer piezoelectric element according to the present embodiment includes a stress relaxation layer 11.
  • the stress relaxation portion 11 includes at least two portions C each including two internal electrodes 5 connected to the same-polarity external electrode 9 and piezoelectric layers 3 adjacent on both sides in the stacking direction, and these portions. And a low-rigidity layer 17 disposed via the piezoelectric body layer 3 between them and a force.
  • the stress relaxation portion 11 is formed in this way, the stress concentrated between the adjacent portions can be concentrated on the portion C. Furthermore, the stress shown above can be absorbed more by the low-rigidity layer 17 breaking.
  • the multilayer piezoelectric element having the force according to this embodiment includes a stress relaxation layer 11. Yes.
  • the stress relaxation portion 11 includes the two internal electrodes 5 connected to the external electrode 9 of the same polarity and the piezoelectric layer 3 adjacent on both sides in the stacking direction, and the piezoelectric layer 3 has low rigidity.
  • Layer 17 is provided. Since stress is concentrated between a plurality of portions where the thicknesses of the piezoelectric layer 3 are different from each other, the stress relaxation effect of the low-rigidity layer 17 can be further enhanced.
  • the multilayer piezoelectric element according to the present embodiment has a stress relaxation portion 11, and a plurality of low rigidity layers 17 are provided in the stress relaxation portion 11.
  • a greater stress relaxation effect can be obtained. This is particularly effective when the thickness of the piezoelectric layer 3 disposed in each of two portions adjacent to each other via the stress relaxation portion 11 is greatly different.
  • the thickness of the piezoelectric layer 3 gradually increases in accordance with the directional force from the central portion to the end portion. It is getting bigger. In this way, by changing the thickness of the piezoelectric layer 3, it is possible to disperse the stress and suppress the stress from being concentrated at a certain place. For this reason, the force S that exerts a strong stress on the end of the element is suppressed, and the possibility that an excessive stress S is applied to the stress relaxation portion 11 is further reduced.
  • the difference in thickness of the piezoelectric layer 3 between two adjacent portions is preferably 10% or more of the portion where the piezoelectric layer 3 is thick.
  • the stress relaxation effect by the stress relaxation portion 11 can be further improved.
  • the difference in thickness of the piezoelectric layer 3 between two adjacent portions is 50% or more.
  • the stress relaxation effect by the stress relaxation portion 11 can be further increased.
  • the piezoelectric layer 3 is disposed in each part so that the thickness of the piezoelectric layer 3 is substantially an integer multiple from the part located in the center in the stacking direction of the piezoelectric element 1 to the part located at the end. It is more preferable to change the thickness of the piezoelectric layer 3 formed. Specifically, when the thickness of the piezoelectric layer 3 disposed in the central portion is set to 1, the thickness of the piezoelectric layer 3 disposed in the portion adjacent to this portion is set to 2, and , The end of the laminated structure 7 The thickness of the piezoelectric layer 3 disposed in the adjacent part on the part side may be set to 3.
  • the piezoelectric layer 3 having a certain thickness may be prepared, and the multilayer structure 7 can be manufactured very easily. This is because the piezoelectric element 1 can be manufactured by changing the number of stacked piezoelectric layers 3 as approaching the end of the multilayer structure 7. With such a configuration, a low-cost and small piezoelectric element 1 can be manufactured. If there is a variation in the thickness of the piezoelectric layer 3 disposed in each part, the average of the piezoelectric layers 3 disposed in each part may be taken.
  • the piezoelectric element 1 is arranged in each part so that the force is directed from the part located in the center in the stacking direction to the part located at the end, and the thickness of the piezoelectric layer 3 in each part is doubled. It is also preferable to change the thickness of the piezoelectric layer 3 provided. Specifically, assuming that the thickness of the piezoelectric layer 3 located at the center is 1, the thickness of the piezoelectric layer 3 formed in a portion adjacent to this portion is set to 2, and further, The thickness of the piezoelectric layer 3 in a portion adjacent to the end side of the laminated structure 7 may be set to 4.
  • the multilayer structure 7 can be produced very simply by preparing the piezoelectric layer 3 having a certain thickness. Can do. With such a configuration, it is possible to manufacture the multilayer piezoelectric element 1 having a higher stress relaxation effect with the force S.
  • the thickness force S of the piezoelectric layer 3a disposed in the stress relaxation portion 11, and the portion of the piezoelectric layer 3 having the larger thickness among the portions adjacent to the stress relaxation portion 11 It is preferable that the thickness is the same as the thickness of the piezoelectric layer 3 located in the region.
  • the piezoelectric layer 3 constituting each of the plurality of portions is arranged in the stacking direction of the stacked structure 7. It is preferable that the directional force and thickness distribution from the center to the first end portion and the directional force and thickness distribution from the center to the second end portion are substantially the same. In this way, the stress distribution can be made more uniform by making the thickness distribution of the piezoelectric layer 3 disposed in each part symmetrical in the vertical direction. As a result, the strain becomes smaller and the durability can be improved.
  • “being symmetrical in the vertical direction” means that the piezoelectric layers 3 at the adjacent portions toward each end of the laminated structure 7 with respect to the portion located at the center in the stacking direction. Thickness is almost equal.
  • the number of parts, the number of stress relaxation numbers 11, the number of low-rigidity layers 17, and the like are not limited to the present embodiment.
  • the multilayer piezoelectric element of the present embodiment has a low rigidity layer 17.
  • the low-rigidity layer 17 includes a plurality of metal portions 19 that are spaced apart from each other.
  • the low-rigidity layer 17 having the above configuration is more likely to break as compared with the piezoelectric layer 3.
  • the stress can be dispersed by the metal part 19 deforming or breaking following the fluctuation of the piezoelectric layer 3.
  • a laminated piezoelectric element 1 with improved durability and reliability can be obtained.
  • Examples of the metal part 19 include simple metals such as Cu and Ni, and alloys such as silver-white gold and silver palladium. Silver palladium is preferably used as a main component because it has migration resistance and oxidation resistance, has a low Young's modulus, and is inexpensive.
  • silver is preferably the main component! Since silver has excellent heat conduction properties, it can absorb heat efficiently even if the element is locally heated due to stress concentration. Further, it is preferable that no oxide layer film is formed on the surface. Metal particles with little oxide film are more flexible, so they can absorb stress more easily.
  • the composition of the low-rigidity layer 17 including the metal part 19 can be specified by using the EPMA analysis method already shown. Specifically, the composition of a part of the low-rigidity layer 17 may be measured by cutting the laminated structure 7 so that the metal part 19 of the low-rigidity layer 17 is exposed. Note that, on the cut surface of the multilayer piezoelectric element 1, the low-rigidity layer 17 is a In some cases, elements other than metals such as ceramic components may be included. Even in such a case, sites other than voids can be analyzed by the EPMA method.
  • the low-rigidity layer 17 may be one in which a large number of metal parts 19 having different sizes are randomly arranged. In the case where stress with a variation is applied to the low-rigidity layer 17, it is particularly effective to form the low-rigidity layer 17 in this way. This is because the possibility that the stress is locally concentrated on a part of the low-rigidity layer 17 is reduced and the stress can be distributed over a wider range.
  • the low-rigidity layer 17 preferably includes a plurality of metal portions 19 that are separated from each other via a gap. This is because the gap 19 makes it easier for the metal part 19 to be deformed or broken following the fluctuation of the piezoelectric layer 3. As a result, stress can be dispersed in the metal part 19 over a wider range of the low-rigidity layer 17, and the durability of the multilayer piezoelectric element 1 can be further improved.
  • the porosity of the low-rigidity layer 17 is preferably 10% to 95%. If it is 10% or more, it is possible to suppress the progress of cracks. If it is 95% or less, the force S can hold the outer shape of the multilayer piezoelectric element 1 stably.
  • the porosity is the ratio (%) of the area of the void to the cross-sectional area of the low-rigid layer 17 in a cross section perpendicular to or parallel to the lamination direction of the laminated structure 7.
  • the porosity may be measured as follows. First, the laminated structure 7 is polished using a known polishing means so that a cross section perpendicular to the stacking direction is exposed. For example, the polishing is performed with diamond paste using a table polishing machine KEME T-V-300 manufactured by Kemet Japan Co., Ltd. as a polishing apparatus.
  • the cross-section image is obtained by subjecting the cross-section exposed by this polishing process to a cross-section using a scanning electron microscope (SEM), an optical microscope, or a metal microscope.
  • SEM scanning electron microscope
  • optical microscope an optical microscope
  • metal microscope a metal microscope.
  • the percentage of the area occupied by the voids is measured. In this way, the porosity of each of the piezoelectric layer 3, the internal electrode 5, and the low rigidity layer 17 can be measured.
  • the low-rigidity layer includes a plurality of ceramic parts separated from each other. Since the ceramic part itself is damaged sequentially, The stress caused by the displacement can be dispersed. As a result, it is possible to obtain a laminated piezoelectric element having high durability and high reliability.
  • the ceramic portion is formed of a piezoelectric body.
  • the force can be obtained to obtain a higher stress relaxation effect for the following reason.
  • the degree of freedom of the ceramic parts is increased.
  • the degree of freedom of the ceramic portion increases, when stress is applied to the ceramic portion, the arrangement of ions in the crystal of the piezoelectric body moves, and the crystal structure is easily deformed according to the stress direction. As a result, the ceramic part more easily absorbs stress, and a high stress relaxation effect can be obtained.
  • a velovskite oxide such as lead zirconate titanate (PbZrO-PbTiO) can be used as the ceramic portion formed of the piezoelectric body.
  • PbZrO-PbTiO lead zirconate titanate
  • the components of the ceramic part to be formed can be analyzed and measured by using an analysis method such as EPMA as described above.
  • the low-rigidity layer may be one in which a large number of ceramic parts having different sizes are randomly arranged.
  • stresses with variations are applied to the low-rigidity layer, it is particularly effective to form the low-rigidity layer as described above. This is because the possibility that the stress is locally concentrated on a part of the low-rigidity layer is reduced, and the stress can be distributed over a wider range.
  • the low-rigidity layer includes a plurality of ceramic portions that are separated from each other via a gap. Since the ceramic part itself is more easily damaged, it is possible to distribute the stress generated by the displacement of the piezoelectric layer over a wider range.
  • the porosity of the low rigidity layer is more preferably 30% to 90%.
  • the porosity of the low-rigidity layer is 30% or more, there is sufficient space to absorb and relax the stress, so that a highly reliable multilayer piezoelectric element can be obtained. Furthermore, the porosity is more preferably 50% or more. When the stress is transmitted to the piezoelectric layer in contact with the low-rigidity layer, it can be sufficiently deformed against the stress of the ceramic part in contact with the gap. As a result, since the effect of stress absorption by the ceramic portion is further enhanced, the highly reliable multilayer piezoelectric element 1 can be obtained.
  • the porosity of the low-rigidity layer is 90% or less, the element dimensions are changed by long-time driving.
  • the shape can be suppressed and driven stably. This is because the piezoelectric layers in contact with the low rigidity layer are stably supported by the ceramic portion.
  • the possibility that the column is gradually broken from the stress-concentrated portion that does not break suddenly and the device is suddenly broken can be reduced.
  • the element drive control system it becomes possible to detect an abnormality with a margin, and the drive of the element can be finely controlled from the outside of the element by the signal control system circuit.
  • the porosity in this embodiment is the same as described above. Also, use the method shown above for the porosity measurement method!
  • the multilayer piezoelectric element of the present embodiment has a low rigidity layer 17.
  • the low-rigidity layer 17 includes a plurality of metal portions 19 and a plurality of ceramic portions 21 that are spaced apart from each other.
  • the multilayer piezoelectric element 1 with improved durability can be obtained. This is because the abrupt stress is absorbed mainly by the ceramic part and the constantly applied stress is absorbed mainly by the metal part 19. As a result, since it can cope with various forms of stress, it is possible to obtain the laminated piezoelectric element 1 having extremely excellent durability.
  • the metal portion 19 and the ceramic portion 21 in the low-rigidity layer 17 are preferably in contact with each other or separated from each other through a gap.
  • each stress relaxation effect by the metal part 19 and the ceramic part 21 can be enhanced.
  • the metal part 19 and the ceramic part 21 are each characterized by the effect of stress relaxation. Since the metal part 19 and the ceramic part 21 are in contact with each other, the metal part 19 and the ceramic part 21 are not connected to each other because the metal part 19 and the ceramic part 21 do not act separately. It is because it can be made to act as one. Further, when the metal part 19 and the ceramic part 21 are separated from each other via a force gap, the effect of stress relaxation by the metal part 19 and the ceramic part 21 can be further enhanced.
  • the ratio of the metal part 19 and the ceramic part 21 is approximately the same.
  • the ratio is the sum of the areas of the metal part 19 and the ceramic part 21 in the cross section perpendicular to or parallel to the lamination direction of the laminated structure 7. Means the ratio.
  • the internal electrode 5 located in the portion where the thickness of 3 is larger has more voids than the internal electrode 5 located in the portion where the thickness of the piezoelectric layer 3 is smaller. Since the gaps in the internal electrode 5 are formed as described above, the electric field strength applied to the internal electrode 5 positioned at the portion where the thickness of the piezoelectric layer 3 is larger is reduced. The displacement of the body layer 3 is reduced. For this reason, the stress force applied to the low-rigidity layer 17 is biased toward the piezoelectric layer 3 located in the thicker portion than the piezoelectric layer 3 located in the smaller portion of the piezoelectric layer 3.
  • the porosity is as shown in the sixth embodiment.
  • the porosity measurement method may be the method shown in the sixth embodiment.
  • the piezoelectric layer 3 constituting the portion closer to the end of the multilayer structure 7 constitutes the other portion. Thickness is greater than the piezoelectric layer 3!
  • a binder and a plasticizer are added to and mixed with the metal powder and ceramic powder constituting the internal electrode 5 such as silver / palladium to prepare a conductive paste.
  • This is printed on the upper surface of each green sheet to a thickness of about 1 to 40 m by screen printing.
  • a single piezoelectric green sheet 3 is formed at a central location, and two ceramic green sheets are stacked at a location adjacent to this location.
  • the piezoelectric layer 3 is formed. Furthermore, it is only necessary to form one piezoelectric layer 3 by stacking three ceramic green sheets at a position adjacent to this portion and the end of the laminated structure 7.
  • the multilayer structure 7 can be manufactured very simply by preparing a ceramic green sheet having a certain thickness. This is because the piezoelectric element 1 of the present embodiment can be manufactured by changing the number of stacked piezoelectric layers 3 as the end of the laminated structure 7 is approached. With such a configuration, a low-cost and small piezoelectric element 1 can be manufactured.
  • the piezoelectric element 1 is arranged at each part so that the force is directed from the part located at the center in the stacking direction to the part located at the end, and the thickness of the ceramic green sheet at each part doubles. It is also effective to change the number of laminated ceramic green sheets. Specifically, when the number of laminated ceramic green sheets per layer of the piezoelectric layer 3 located in the center is 1, the number of laminated ceramic green sheets formed in the part adjacent to this part is Further, the number of laminated ceramic green sheets in the part adjacent to the end of the laminated structure 7 at this part may be four.
  • a paste to be the ceramic part 21 is prepared by adding and mixing a binder and a plasticizer to the calcined powder of the electroceramic. This is printed at a desired position on the upper surface of each green sheet to a thickness of about 1 to 40 m by screen printing or the like and dried. After As a result, a green sheet to be the ceramic part 21 is produced.
  • the size of the ceramic portion 21 and the size of the gap are increased.
  • the porosity can be changed.
  • a paste to be the metal part 19 is prepared by adding a binder and a plasticizer to a silver-palladium metal powder. This is printed at a desired position on the upper surface of each green sheet to a thickness of about 1 to 40 am by screen printing or the like.
  • the ratio of the binder and the plasticizer to the metal powder is changed, the frequency of the screen mesh is changed, or a screen pattern is formed.
  • the metal thickness can be changed by changing the resist thickness. As a result, the size of the metal part 19, the size of the gap, the porosity, etc. can be changed.
  • the internal electrode 5 is made of silver-palladium
  • a conductive paste having a silver ratio of silver palladium higher than that of the conductive paste to be the internal electrode 5 can be used without complicated steps.
  • a low rigidity layer 17 can be formed. This is because when the above-described conductive paste having a high silver ratio is disposed at the position where the low-rigidity layer 17 is formed and the laminated structure 7 is formed by simultaneous firing, the high silver ratio is obtained from the conductive paste. This is because silver diffuses! As a result of the diffusion of silver, voids are formed. As a result, the conductive paste having a high silver ratio becomes a low-rigidity layer 17 having a lower rigidity than the piezoelectric layer 3 and the internal electrode 5.
  • the print pattern of the paste to be the ceramic part 21 and the print pattern of the paste to be the metal part 19 do not overlap with each other.
  • the low rigidity layer 17 from having a large thickness, a small portion and a small thickness, and a portion due to not overlapping each other. Thereby, it is possible to suppress unnecessary peeling between the low-rigidity layer 17 and the adjacent piezoelectric layer 3.
  • a green sheet for forming the low active layer 23 a green sheet on which a conductive paste is printed, and a green sheet for forming the low rigidity layer 17 are laminated in a desired configuration.
  • Guidance By printing a conductive paste on a plurality of green sheets that are not printed with a conductive paste, portions having different thicknesses are formed. Of course, green sheets with different thicknesses are prepared in advance, and conductive paste is printed on them to form parts with different thicknesses. After debinding at a specified temperature while pressing the laminated structure 7 by placing a weight, etc., remove the pressure load so that there is a difference in the thickness of the metal layer 900 ⁇ ; 1200 ° By firing with C, the laminated structure 7 is produced.
  • the low active layer 23 and the piezoelectric layer 3 are sintered by adding a metal powder constituting the internal electrode 5 such as silver-palladium to the green sheet of the low active layer 23 portion.
  • the shrinkage behavior during shrinkage and the shrinkage rate can be approached. In this way, a denser laminated structure 7 can be formed.
  • a slurry including a metal powder, an inorganic compound, a binder, and a plasticizer constituting the internal electrode 5 such as silver palladium is printed on the green sheet. Therefore, the shrinkage behavior and shrinkage rate of the low active layer 23 and the piezoelectric layer 3 during sintering can be made closer to each other.
  • the multilayer structure 7 is not limited to the one manufactured by the above manufacturing method, and the multilayer structure 7 is formed by alternately laminating a plurality of piezoelectric layers 3 and a plurality of internal electrodes 5. If it can be formed, V can be formed by the manufacturing method of deviation.
  • grooves are formed on the two side surfaces of the multilayer structure 7 along the internal electrode 5 every other layer so as to alternate.
  • An insulator such as resin or rubber having a Young's modulus lower than that of the piezoelectric layer 3 is disposed in the groove.
  • a silver glass conductive paste to be the external electrode 9 is prepared.
  • a silver glass conductive paste is prepared by adding a binder to the glass powder. This silver glass conductive paste is formed into a sheet and dried. Here, the step of drying the above-mentioned silver glass conductive paste is preferably controlled so that the solvent is scattered and the raw density of the sheet is 6 to 9 g / cm 3. The sheet thus produced is transferred to the surface of the laminated structure 7 where the external electrodes 9 are formed. Then, baking is performed at a temperature higher than the softening point of the glass, lower than the melting point of silver (965 ° C), and lower than 4/5 of the firing temperature of the laminated structure 7 (° C). Go. As a result, the binder component in the sheet produced using the silver glass conductive paste is scattered and disappears, and the external electrode 9 having a porous conductor force forming a three-dimensional network structure is formed. The power S to do.
  • the paste constituting the external electrode 9 may be baked after being laminated on a multilayer sheet, or may be baked after being laminated one by one.
  • the multilayer sheet when the glass component is changed for each layer, a sheet in which the mass ratio of the glass component is changed for each sheet may be used. If you want to form a very thin glass-rich layer on the surface closest to the piezoelectric layer 3, print a glass-rich paste on the laminated structure 7 using a method such as screen printing, and then stack multiple layers. Can be used. At this time, a sheet of 5 m or less may be used instead of printing.
  • the baking temperature of the silver glass conductive paste is preferably set in the range of 500 to 800 ° C. This is because the neck portion can be formed effectively and the silver in the silver glass conductive paste and the internal electrode 5 can be diffusion bonded. Thereby, voids in the external electrode 9 can be effectively left. Further, the external electrode 9 and the side surface of the columnar laminated structure 7 can be partially joined.
  • the softening point of the glass component in the silver glass conductive paste is preferably 500 to 800 ° C! /.
  • the baking temperature By setting the baking temperature to 800 ° C or lower, it is possible to prevent the silver powder of the silver glass conductive paste from being excessively sintered. As a result, a porous conductor having a three-dimensional network structure can be formed, so that the external electrode 9 can be made reasonably dense. Therefore, the Young's modulus of the external electrode 9 is suppressed from becoming too high, and the disconnection of the external electrode 9 is suppressed. As a result, the stress during driving can be dispersed over a wider range. More preferably, baking is performed at a temperature within 1.2 times the softening point of the glass.
  • the baking temperature to 500 ° C or higher, it is possible to further improve the bondability by diffusion between the end of the internal electrode 5 and the external electrode 9. As a result, a stronger neck portion can be formed. As a result, the power S can be used to more stably energize the internal electrode 5 and the external electrode 9 during driving.
  • a lead wire is connected to the external electrode 9, and a DC voltage of 0.1 to 3 kV / mm is applied to the pair of external electrodes 9 via the lead wire to polarize the laminated structure 7.
  • a piezoelectric actuator using the bright laminated piezoelectric element 1 is completed.
  • the lead wire is connected to an external voltage supply unit and a voltage is applied to the piezoelectric layer 3 via the lead wire and the external electrode 9, each piezoelectric layer 3 is greatly displaced by the inverse piezoelectric effect.
  • it can function as an automobile fuel injection valve that supplies fuel to the engine.
  • the multilayer piezoelectric element 1 typified by the above-described embodiment is stored in a storage device 29 having an injection hole 27 at one end.
  • a needle valve 31 capable of opening and closing the injection hole 27 is disposed in the storage container 29 in the storage container 29, a needle valve 31 capable of opening and closing the injection hole 27 is disposed.
  • a fluid passage 33 is arranged in the injection hole 27 so that it can communicate with the movement of the needle valve 31.
  • the fluid passage 33 is connected to an external fluid supply source, and the fluid is always supplied to the fluid passage 33 at a high pressure. Therefore, when the needle valve 31 opens the injection hole 27, the fluid supplied to the fluid passage 33 is ejected to the outside or an adjacent container, for example, a fuel chamber (not shown) of the internal combustion engine. .
  • the upper end portion of the needle valve 31 has a large inner diameter, and a cylinder 35 formed in the storage device 29 and a slidable piston 37 are disposed. In the storage device 29, the laminated piezoelectric element 1 described above is stored.
  • the fluid flow path 33 may be opened by applying a voltage to the multilayer piezoelectric element 1, and the fluid flow path may be closed by stopping the application of the voltage.
  • the injection device 25 of the present invention includes a container having the injection holes 27 and the multilayer piezoelectric element 1, and fluid filled in the container is driven by the multilayer piezoelectric element 1 to eject the injection holes 27. It may be configured to discharge from. That is, the multilayer piezoelectric element 1 does not necessarily have to be inside the container, and the multilayer piezoelectric element 1 may be configured so that pressure is applied to the inside of the container by driving the multilayer piezoelectric element 1.
  • the fluid means fuel, ink.
  • various liquid fluids (such as conductive paste) and gases are included.
  • an injection device that employs the multilayer piezoelectric element of the present invention is used in an internal combustion engine, it is possible to accurately inject fuel into a fuel chamber of an internal combustion engine such as an engine for a longer period of time compared to a conventional injection device. Touch with S.
  • the fluid ejection system 41 of the present embodiment includes a common rail 43 that stores high-pressure fluid, a plurality of the above-described injection devices 25 that inject the fluid stored in the common rail 43, and a high pressure applied to the common rail 43.
  • the injection control unit 47 controls the amount and timing of fluid injection based on external information or an external signal. For example, when an injection control unit is used for engine fuel injection, the amount of fuel injection can be controlled while sensing the state of the combustion chamber of the engine with a sensor or the like.
  • the pressure pump 45 plays a role of feeding fluid fuel from the fluid tank 49 to the common rail 43 at a high pressure. For example, in the case of an engine fuel injection system, it is about 1000 to 2000 atm., Preferably ⁇ 1500 to about 1700 atm.
  • the fuel sent from the pressure pump 45 is stored and sent to the injector 25 as appropriate.
  • the injection device 25 injects a certain fluid from the injection hole 27 to the outside of the injection device force or an adjacent container. For example, in the case of an engine, fuel is injected into the combustion chamber in the form of a mist.
  • a piezoelectric actuator provided with a multilayer piezoelectric element was manufactured as follows. First, piezoelectric containing lead zirconate titanate (? 2 0 -PbTiO 3) with an average particle size of 0.4 111
  • a slurry was prepared by mixing a calcined ceramic powder, a binder, and a plasticizer. Using this slurry, a ceramic green sheet to be a piezoelectric layer 3 having a thickness of 150 m was produced by a doctor blade method.
  • the thickness of the green sheet is made constant by printing the conductive paste on one side of each green sheet. And 300 sheets of these sheets were laminated and fired. Firing was performed at 1000 ° C after holding at 800 ° C.
  • the ceramic green sheet serving as a reference is obtained by stacking two or three green sheets based on the thickness of the ceramic green sheet. Green sheets that are twice or three times as thick as the above were produced. The conductive paste was printed on one side of each of the green sheets. These green sheets with different thicknesses were stacked for each of the different thicknesses, thereby forming portions with different thicknesses of the piezoelectric layer 3.
  • the multilayer piezoelectric element 1 of Sample No. 3 has the structure shown in FIG. As shown in FIG. 2, stress relaxation comprising two internal electrodes 5 connected to an external electrode 9 of the same polarity between a part A and a part B where the thicknesses of the piezoelectric layer 3 are different from each other. Part C, which is part 11, is provided.
  • the laminated piezoelectric element 1 of Sample No. 46 has the structure shown in FIG. That is, these laminated piezoelectric elements 1 have a low-rigidity layer 17. Also, the multilayer piezoelectric element 1 of sample number 7 has the structure shown in FIG. That is, it has two internal electrodes 5 connected to the same-polarity external electrode 9 and a piezoelectric layer 3 adjacent to each other on both sides in the stacking direction, and a low-rigidity layer 17 formed in the piezoelectric layer 3. ing.
  • the laminated piezoelectric element 1 of the sample number 4 7 has a green sheet for forming the low-rigidity layer 17 as shown in Table 1 with the metal part 19 and / or ceramic. Part 21 is formed by printing.
  • the low-rigidity layer 17 of the multilayer piezoelectric element 1 of sample numbers 6 and 7 includes a metal part 19 and a ceramic part 21 as shown in FIG. [0122]
  • the ceramic portion 21 is a pressure containing lead zirconate titanate (PbZrO 2 -PbTiO 3), which is the same as the ceramic green sheet used for forming the piezoelectric layer 3.
  • a sheet made of calcined powder of an electroceramic, a binder and a plasticizer is used. Also
  • the conductive paste used for forming the internal electrode 5 was used as the metal part 19, and the plate having a resist thickness of 5 m was formed at the place where the desired metal part 19 was to be formed. Print to the thickness of!
  • flaky silver powder having an average particle diameter of 2,1 m was mixed with glass powder having a softening point of 40 ° C, the balance of which was mainly composed of keye having an average particle diameter of 2 ⁇ m. .
  • a binder was added so as to be 8 parts by mass with respect to 100 parts by mass of the total mass of silver powder and glass powder.
  • a silver glass conductive paste was prepared by thoroughly mixing the mixture with the binder. The silver glass conductive paste thus produced was screen-printed on a release film and dried. Then, it peeled off from the release film and obtained the silver glass conductive sheet. Then, the silver glass conductive sheet was transferred to the external electrode 9 forming surface of the laminated structure 7 and laminated, and baked at 700 ° C. for 30 minutes to form the external electrode 9.
  • a lead wire is connected to the external electrode 9, a 3 kV / mm DC electric field is applied to the positive and negative external electrodes 9 through the lead wire for 15 minutes, and polarization treatment is performed.
  • a piezoelectric actuator provided with the electric element 1 was produced.
  • the porosity of the plurality of internal electrodes 5 was the same.
  • the porosity force of the internal electrode 5 that is one layer adjacent to the stress relaxation part 11 The internal electrode 5 and the stress relaxation part 11 are laminated. It was smaller than the porosity of the internal electrode 5 which was two layers with respect to the stress relaxation portion 11 adjacent on the opposite side of the direction. In this way, since the void ratio of the internal electrode 5 closer to the stress relaxation portion 11 where the stress is concentrated is large and easily displaced! /, A greater stress relaxation effect was obtained.
  • the low-rigidity layer 17 has a metal part.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

La présente invention concerne un élément piézoélectrique stratifié accompagné d'une structure stratifiée et d'électrodes externes positive et négative. La structure stratifiée comprend une pluralité de couches piézoélectriques et une pluralité d'électrodes internes stratifiées alternativement. L'électrode externe est formée sur une surface latérale de la structure stratifiée et comporte l'électrode interne connectée. La structure stratifiée comporte une pluralité de portions et les épaisseurs des couches piézoélectriques sont différentes l'une de l'autre. Une section de modification de contrainte est placée entre les deux portions adjacentes les unes aux autres dans le sens de la stratification. Dans l'élément piézoélectrique stratifié, une telle structure disperse la contrainte concentrée en raison de la différence entre les quantités de déplacement des couches piézoélectriques.
PCT/JP2007/074242 2006-12-15 2007-12-17 Élément piézoélectrique stratifié, dispositif d'éjection fourni avec cet élément et système gicleur de combustible WO2008072767A1 (fr)

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US20100013359A1 (en) * 2005-08-29 2010-01-21 Kyocera Corporation Multi-Layer Piezoelectric Element and Injection Apparatus Using the Same
WO2010012830A1 (fr) 2008-08-01 2010-02-04 Epcos Ag Piézoactionneur doté d'une couche de rupture préférentielle
JP2011100861A (ja) * 2009-11-06 2011-05-19 Murata Mfg Co Ltd アクチュエータ
JP2011249659A (ja) * 2010-05-28 2011-12-08 Kyocera Corp 圧電素子、これを備えた噴射装置及び燃料噴射システム
JPWO2010024276A1 (ja) * 2008-08-28 2012-01-26 京セラ株式会社 積層型圧電素子
EP2149921A3 (fr) * 2008-07-28 2013-07-10 Robert Bosch GmbH Piézoactionneur doté de zones passives à la tête et/ou au pied
EP2149922A3 (fr) * 2008-07-28 2013-07-10 Robert Bosch GmbH Piézoactionneur doté de zones passives à la tête et/ou au pied
JP2013229663A (ja) * 2012-04-24 2013-11-07 Kyocera Corp 圧電振動素子ならびにそれを用いた圧電振動装置および携帯端末
JP5409772B2 (ja) * 2009-03-25 2014-02-05 京セラ株式会社 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム
JP2018206800A (ja) * 2017-05-30 2018-12-27 京セラ株式会社 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2018206801A (ja) * 2017-05-30 2018-12-27 京セラ株式会社 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2021136409A (ja) * 2020-02-28 2021-09-13 日本特殊陶業株式会社 圧電アクチュエータ

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100013359A1 (en) * 2005-08-29 2010-01-21 Kyocera Corporation Multi-Layer Piezoelectric Element and Injection Apparatus Using the Same
US8339017B2 (en) * 2005-08-29 2012-12-25 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus using the same
EP2149922A3 (fr) * 2008-07-28 2013-07-10 Robert Bosch GmbH Piézoactionneur doté de zones passives à la tête et/ou au pied
EP2149921A3 (fr) * 2008-07-28 2013-07-10 Robert Bosch GmbH Piézoactionneur doté de zones passives à la tête et/ou au pied
JP2011530162A (ja) * 2008-08-01 2011-12-15 エプコス アクチエンゲゼルシャフト 破断規制層を有する圧電アクチュエータ
US8304963B2 (en) 2008-08-01 2012-11-06 Epcos Ag Piezoactuator with a predetermined breaking layer
WO2010012830A1 (fr) 2008-08-01 2010-02-04 Epcos Ag Piézoactionneur doté d'une couche de rupture préférentielle
JPWO2010024276A1 (ja) * 2008-08-28 2012-01-26 京セラ株式会社 積層型圧電素子
JP5409772B2 (ja) * 2009-03-25 2014-02-05 京セラ株式会社 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム
JP2011100861A (ja) * 2009-11-06 2011-05-19 Murata Mfg Co Ltd アクチュエータ
JP2011249659A (ja) * 2010-05-28 2011-12-08 Kyocera Corp 圧電素子、これを備えた噴射装置及び燃料噴射システム
JP2013229663A (ja) * 2012-04-24 2013-11-07 Kyocera Corp 圧電振動素子ならびにそれを用いた圧電振動装置および携帯端末
JP2018206800A (ja) * 2017-05-30 2018-12-27 京セラ株式会社 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2018206801A (ja) * 2017-05-30 2018-12-27 京セラ株式会社 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム
JP2021136409A (ja) * 2020-02-28 2021-09-13 日本特殊陶業株式会社 圧電アクチュエータ
JP7164847B2 (ja) 2020-02-28 2022-11-02 日本特殊陶業株式会社 圧電アクチュエータ

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