EP2272815A1 - Verfahren zur Reinigung von Acetylen - Google Patents
Verfahren zur Reinigung von Acetylen Download PDFInfo
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- EP2272815A1 EP2272815A1 EP10165240A EP10165240A EP2272815A1 EP 2272815 A1 EP2272815 A1 EP 2272815A1 EP 10165240 A EP10165240 A EP 10165240A EP 10165240 A EP10165240 A EP 10165240A EP 2272815 A1 EP2272815 A1 EP 2272815A1
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- adsorbent bed
- stream
- acetylene
- adsorption
- impurities
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- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
- B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
- B01J20/28052—Several layers of identical or different sorbents stacked in a housing, e.g. in a column
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- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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Definitions
- This invention relates to a process for removing carryover solvent, moisture and carbon dioxide from acetylene using adsorption media to produce high purity acetylene, and then regenerating in-situ the adsorption media for reuse.
- the high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.
- Acetylene is being used more and more as a source material for depositing carbon and carbon-containing films in semiconductor industry. Due to its instability, acetylene is conventionally dissolved in a solvent such as acetone, dimethylformamide (DMF) or N-methylpyrrolidone (NMP) and stored in cylinders containing porous material. When acetylene is withdrawn from the cylinder, an amount of solvent is carried over with the acetylene. The amount of solvent can range, depending on the cylinder temperature and pressure as well as the acetylene flow rate, from about 0.1 percent or less to about 10 percent or greater.
- a solvent such as acetone, dimethylformamide (DMF) or N-methylpyrrolidone (NMP)
- acetylene is not desirable in applications such as semiconductor applications, especially for the emerging application of acetylene as a source gas for carbon film deposition in the electronic industry.
- the carryover solvent in acetylene reduces film deposition rate, which affects process uniformity and consistency.
- Carbon-based adsorption is widely used in many industries as an effective means to remove volatile organic compounds from gas streams, such as air, nitrogen, etc.
- Activated carbon is a predominantly amorphous material having an extraordinarily large internal surface area that has been recognized as an effective means for solvent removal and recovery.
- Solvent removal from acetylene using activated carbon is disclosed, for example, in " Acetylene, Its Properties, Manufacture and Uses” published by Academic Press, New York and London, Vol.1, page 344, 1965 .
- the spent carbon may be then either disposed of in an approved manner or, more economically, the carbon bed is regenerated for reuse.
- the carbon bed should be regenerable in a manner so that the purification process can be cost effective.
- Acetylene from an acetylene cylinder contains not only large amount of solvent but also moisture ranging from about 20 parts per million or less to about 100 parts per million or greater due to the presence of water in the solvent added to the acetylene cylinders, residual moisture in the cylinders prior to solvent addition and/or moisture in the acetylene charged to the cylinder.
- the presence of moisture in acetylene has a markable promoting effect on the oxidation reaction of the solvent on activated carbon.
- the oxidation reaction can foul the activated carbon so as to reduce its lifetime and also create new impurities in acetylene.
- the oxidation of acetone may form acetic acid, carbon dioxide, carbon monoxide, and other impurities. Moisture is also an undesirable impurity in acetylene and reduces the efficiency of solvent adsorption on carbon.
- the activated carbon not only has the possibility of holding carbon monoxide and carbon dioxide but also contains surface oxides that may produce carbon monoxide and carbon dioxide upon adsorption of a solvent.
- the carbon monoxide and carbon dioxide will contaminate acetylene when acetylene is passed through the activated carbon bed. Therefore, a need exists for minimizing the oxidation reaction of solvent on carbon and reducing byproduct impurities, for example, carbon dioxide, in acetylene, in order to produce high purity acetylene suitable for use in semiconductor applications.
- a need also exists for cost effectively regenerating activated carbon for reuse in the purification of acetylene.
- This invention relates in part to a process for producing high purity acetylene comprising:
- adsorbent bed containing adsorption media, said adsorption media comprising at least a first adsorption medium, a second adsorption medium and a third adsorption medium;
- This invention also relates in part to a method for providing high purity acetylene to a work device, said method comprising:
- adsorbent bed containing adsorption media, said adsorption media comprising at least a first adsorption medium, a second adsorption medium and a third adsorption medium;
- This invention further relates in part to a high purity acetylene delivery system comprising:
- a storage source containing acetylene and impurities, said impurities comprising moisture and solvent;
- a distribution line disposed between said storage source and an adsorbent bed for distributing a stream of acetylene and impurities from said storage source to said adsorbent bed;
- said adsorbent bed containing adsorption media capable of removing impurities from said stream;
- said adsorption media comprising at least a first adsorption medium for selectively removing moisture from said stream, a second adsorption medium for selectively removing solvent from said stream, and a third adsorption medium for selectively removing other impurities from said stream;
- a second distribution line disposed between said adsorbent bed and a work device for delivering high purity acetylene to said work device.
- the invention provides a number of advantages.
- an activated carbon medium in an adsorbent bed and regenerating in-situ the carbon medium By using an activated carbon medium in an adsorbent bed and regenerating in-situ the carbon medium, the utilization of solvent-based acetylene in electronics applications can be increased significantly.
- the capital cost of the adsorbent bed and carbon medium is much less than for some other techniques such as cold traps.
- the operation of the adsorbent bed is simple especially if it is integrated with the acetylene gas delivery system so that there is minimal additional labor required to operate the bed.
- a first adsorption medium e.g., a molecular sieve
- a second adsorption medium e.g., activated carbon
- a third adsorption medium e.g., a molecular sieve
- the removal of moisture from acetylene prior to passing the acetylene stream through activated carbon can reduce the reaction of solvent on carbon.
- the process can also improve the lifetime of activated carbon.
- the higher purity acetylene improves carbon film deposition rate/quality and thereby reduces cost.
- the high purity acetylene can be used for semiconductor applications such as amorphous carbon hardmask film deposition.
- Fig. 1 depicts a flow diagram for producing high purity acetylene in accordance with a process of this invention.
- Fig. 2 depicts an adsorption bed column containing adsorption media used in producing high purity acetylene.
- Fig. 3 is a schematic representation of an adsorbent bed or purifier setup with acetylene-containing cylinders.
- Fig. 4 graphically depicts acetone carryover removal from nitrogen using an activated carbon adsorbent bed or purifier from Example 1 below.
- Fig. 5 graphically depicts acetone carryover removal from acetylene using activated carbon adsorbent bed or purifier from Example 2 below.
- Fig. 6 graphically depicts a temperature profile of a carbon bed when acetylene was passed through from Example 2 below
- Fig. 7 graphically depicts outlet concentrations of acetone, moisture and carbon dioxide over time in nitrogen using an activated carbon adsorbent bed or purifier from Example 3 below.
- Fig. 8 graphically depicts outlet concentrations of acetone, moisture and carbon dioxide over time in nitrogen using a layered adsorbent bed or purifier of activated carbon and molecular sieve from Example 3 below.
- this invention relates in part to a process for producing high purity acetylene comprising:
- adsorbent bed containing adsorption media, said adsorption media comprising at least a first adsorption medium, a second adsorption medium and a third adsorption medium;
- the above process can further comprise:
- This invention may be applied to any solvents used to store acetylene in an acetylene cylinder such as DMF, acetone, NMP, and the like.
- This invention provides an improved process for selectively removing impurities from acetylene using adsorption media, and in-situ regeneration of the adsorption media for reuse.
- the process of this invention reduces the amount of impurities in acetylene such as, but not limited to, solvents (e.g., DMF, acetone and NMP), moisture, carbon dioxide, and other impurities, to provide high purity acetylene.
- the high purity acetylene has less than about 1000 parts per million (ppm) volume, preferably less than about 100 ppm volume, more preferably less than about 10 ppm volume, and most preferably less than about 1 ppm volume of solvent.
- the high purity acetylene has less than about 100 ppm volume, preferably less than about 10 ppm volume, and more preferably less than about 1 ppm volume of moisture.
- the high purity acetylene has less than about 100 ppm volume, preferably less than about 10 ppm volume, and more preferably less than about 1 ppm volume of carbon dioxide.
- the high purity acetylene has less than about 100 ppm volume, preferably less than about 10 ppm volume, and more preferably less than about 1 ppm volume of other impurities.
- Fig. 1 is a flow diagram of a purification process of this invention wherein a crude acetylene stream is drawn from acetylene sources, typically an acetylene cylinder.
- the crude acetylene stream may contain, for example, 100 ppm or greater of solvent (e.g., acetone, DMF and NMP), 10 ppm or greater of moisture, and less than 1 ppm or greater of carbon dioxide.
- the crude acetylene stream is passed through a first portion of adsorbent material to selectively remove moisture contained therein and provides a partially purified acetylene stream.
- the first portion of adsorbent material may be any material that can selectively remove moisture from a crude acetylene stream.
- Suitable materials include commercially available materials such as molecular sieves.
- Illustrative materials may include, but are not limited to, molecular sieves 4A(NaA), 5A(CaA), 13X (NaX), NaY, NaF, activated alumina, silicon gel and mixtures thereof.
- the most preferred adsorbent material as first portion for moisture removal is molecular sieve 13X.
- the crude acetylene is passed through the first portion of adsorbent at temperatures ranging from about - 70°C to about 100°C and pressures at about 15 psig or less. The most preferred temperature is at room temperature.
- the partially purified acetylene is then passed through a second portion of adsorbent material to selectively remove solvent contained therein and to provide a purified solvent- free acetylene stream.
- the second portion of adsorbent material may be any material that can selectively remove solvent from a crude acetylene stream. Suitable materials include conventional materials that are available commercially such as activated carbon. Preferred adsorption materials include, but are not limited to, activated carbon.
- the activated carbon can be any commercial available types, such as water or acid washed, extruded or granular activated carbon produced from nutshells, coal, wood and the like.
- the crude acetylene is passed through the second portion of adsorbent at temperatures ranging from about -70°C to about 100°C and pressures of about 15 psig or less. The most preferred temperature is at room temperature.
- the solvent- free acetylene is then passed through a third portion of adsorbent material to selectively remove carbon dioxide contained therein and provide a high purity acetylene stream.
- the third portion of adsorbent may be any material that can selectively remove carbon dioxide from a crude acetylene stream. Suitable materials include commercially available materials such as molecular sieves. Illustrative materials may include, but are not limited to, molecular sieves 4A(NaA), 5A(CaA), 13X (NaX), NaY, NaF, activated alumina, silicon gel and mixtures thereof.
- the most preferred adsorbent material as third portion for carbon dioxide removal from acetylene is molecular sieve 13X.
- the crude acetylene is passed through the third portion of adsorbent at temperatures ranging from about -70°C to about 100°C and pressures at about 15 psig or less. The most preferred temperature is at room temperature.
- the first adsorption medium comprises a molecular sieve
- the second adsorption medium comprises activated carbon
- the third adsorption medium comprises a molecular sieve.
- the first adsorption medium comprises a molecular sieve 4A(NaA), 5A(CaA), 13X(NaX), NaY, NaF, activated alumina, silicon gel or mixtures thereof
- the second adsorption medium comprises activated carbon
- the third adsorption medium comprises a molecular sieve 4A(NaA), 5A(CaA), 13X(NaX), NaY, NaF, activated alumina, silicon gel or mixtures thereof.
- Fig. 2 depicts an adsorption vessel 1 with layered adsorbent materials used to selectively adsorb contaminants from feed acetylene.
- a portion of the adsorbent material is used to selectively adsorb moisture present in the feed acetylene in the moisture adsorption zone 3 at the bottom of adsorption vessel 1 .
- Solvent adsorption zone 2 above moisture adsorption zone 3 , is filled with adsorbent material used to selectively adsorb solvent in acetylene.
- Carbon dioxide adsorption zone 4 at the top of adsorption vessel 1 is filled with adsorbent material used to selectively remove carbon dioxide from acetylene.
- a conduit is connected to the bottom of said adsorption vessel 1 for the introduction of crude acetylene stream during adsorption step and for the discharge of purge gas and contaminants selectively removed from the acetylene during the desorption-regeneration step.
- a conduit is connected to the top of said adsorption vessel 1 for the removal of purified acetylene from adsorption vessel 1 during the adsorption step and for the introduction of purge gas to the adsorption vessel during the desorption-regeneration step.
- the adsorbent column can be configured, for example, by sizing the adsorbent column based on the use of the number of acetylene cylinders, and by automatically or manually switching the adsorbent column for regeneration when the cylinder switches.
- the amount of each adsorbent medium in each adsorption zone may vary depending upon a variety of factors such as, the flow rate of the acetylene stream, the amount of impurities contained within the acetylene, and the like.
- the purification may be conducted in discrete steps using separated adsorbent vessels.
- a first adsorption vessel may contain a first adsorbent medium selective for moisture removal
- a second adsorption vessel may contain a second adsorbent medium selective for solvent removal
- a third adsorption vessel may contain a third adsorbent medium selective for carbon dioxide removal.
- One or more other adsorbents or filtration media can be used in conjunction with the adsorption media above to remove various impurities from the acetylene stream, such as particle removal.
- the adsorbents can be mixed or layered one after another.
- phosphine arsine, sulfur compounds, and the like
- Other impurities such as phosphine, arsine, sulfur compounds, and the like may also be removed by the adsorbent media.
- the adsorbents can be conventional materials known in the art and can be used in amounts that may vary depending upon a variety of factors such as the flow rate of the acetylene stream, the amount of impurities contained within the acetylene, and the like.
- adsorption media e.g., activated carbon and molecular sieves
- adsorption media e.g., activated carbon and molecular sieves
- the removal of moisture prior to solvent, e.g., acetone, removal not only improves acetylene purity but also prevents moisture from enhancing the oxidation reaction of solvent on activated carbon which reduces carbon's lifetime and produces contaminants.
- the removal of carbon dioxide after solvent adsorption further improves acetylene impurities by removing any reaction byproducts if any.
- Adsorption conditions such as temperature, pressure and flow rate, may also vary greatly and any suitable combination of such conditions may be employed herein.
- the adsorption conditions should be sufficient to remove moisture, solvent and carbon dioxide from the crude acetylene stream
- the adsorption temperature may range from about -70°C to about 100°C, preferably at room temperature or below.
- the adsorption pressure may range from about atmospheric pressure to about 250 psig, preferably from about atmospheric pressure to about 15 psig.
- the crude acetylene stream can be withdrawn from the storage source, e.g., cylinder, at a rate of from about 0.1 liters per minute (1pm) to about 80 1pm. More cylinders may be bundled for higher flow rates.
- the process of this invention involves passing a crude acetylene stream through an adsorption bed containing adsorption media at a temperature and pressure sufficient to adsorb at least moisture, solvent and carbon dioxide impurities onto the adsorption media, shutting off the flow of the crude acetylene stream to the adsorption bed, and in situ regenerating the adsorption bed at a temperature, pressure and time sufficient to desorb the impurities from the adsorption media.
- the adsorbent regeneration is typically carried out at either high temperature and/or low pressure.
- Activated carbon is generally regenerated by passing hot steam and/or inert gas through the carbon medium.
- the adsorbent bed containing layers of activated carbon and molecular sieves may be regenerated by purging using a purge gas, e.g. nitrogen or acetylene, or evacuating the adsorption bed at elevated temperatures.
- a purge gas e.g. nitrogen or acetylene
- purge gas e.g. nitrogen or acetylene
- nitrogen will be introduced into the sys tem as an impurity that is difficult to be removed down to ppm levels.
- acetylene be used as a purge gas for the regeneration or a combination of inert gas and acetylene, e.g. nitrogen first and acetylene last.
- adsorbent bed may be evacuated using any vacuum generating means, such as vacuum pump, Venturi pump, and the like. Due to the instability of acetylene, a Venturi pump rather than a vacuum pump is preferred to evacuate the adsorbent bed.
- the regeneration steps involve switching the adsorbent vessel to be regenerated to the exhaust or scrubber system, turning on the Venturi pump, and applying a heating means for maintaining the adsorbent bed at a temperature above the boiling point of the solvent.
- the boiling temperature of the solvent can be lower than that at atmospheric pressure.
- Nitrogen rather than air is preferred to run the Venturi pump due to the safety concern of acetylene.
- the evacuation can involve pulling a vacuum on the adsorbent bed in a direction opposite to the direction that the stream passed through the adsorbent bed, and removing desorbed impurities from the adsorbent bed.
- Regeneration conditions such as temperature, pressure and evacuation time, may also vary greatly and any suitable combination of such conditions may be employed herein.
- the regeneration conditions should be sufficient to remove desorbed solvent from the adsorbent bed.
- the regeneration may be accomplished by evacuating the adsorbent bed by suitable vacuum-producing means at a temperature above the boiling temperature of the solvent.
- the regeneration temperature may range from about room temperature to about 350°C, preferably from about 50°C to about 250°C, and most preferably from about 100°C to about 200°C.
- the regeneration vacuum may be less than atmospheric pressure, preferably less than 200 torr, and most preferably less than 50 torr.
- the evacuating time of the adsorption bed depends on the bed size and can range from about 30 to about 720 minutes, preferably from about 60 to 360 minutes.
- high purity acetylene is produced that contains less than about 1000 parts per million (ppm) of solvent, preferably less than about 100 ppm of solvent, and more preferably less than about 10 ppm of solvent.
- Crude acetylene is passed through adsorption media and the adsorption media undergoes in-situ regeneration after adsorption to improve on-line time and reduce operating cost.
- the high purity acetylene further contains less than about 100 ppm of moisture, preferably less than 10 ppm of moisture, and more preferably less than 1 ppm of moisture.
- the high purity acetylene also contains less than about 100 ppm of carbon dioxide, preferably less than about 10 ppm of carbon dioxide, and more preferably less than about 1 ppm of carbon dioxide.
- the regeneration may be accomplished by evacuating the adsorbent bed at a temperature above the boiling temperature of the solvent.
- this invention relates in part to a method for providing high purity acetylene to a work device, said method comprising:
- adsorbent bed containing adsorption media, said adsorption media comprising at least a first adsorption medium, a second adsorption medium and a third adsorption medium;
- the method further comprises:
- the process of this invention reduces moisture, solvent and carbon dioxide in acetylene discharged from storage vessels, e.g., one or more cylinders, in order to provide high purity acetylene in a cost effective way.
- the process of this invention can further comprise:
- a second adsorbent bed in parallel to said adsorbent bed, said second adsorbent bed containing adsorption media, said adsorption media comprising at least a first adsorption medium, a second adsorption medium and a third adsorption medium;
- a second adsorbent bed can be provided in parallel with the first adsorbent bed.
- the passing of the stream comprising acetylene and solvent can be switched from the first adsorbent bed to the second adsorbent bed while the first adsorbent bed is being regenerated.
- the flow of the stream can be switched selectively between the first and second adsorbent beds based upon the amount of high purity acetylene provided to the work device, e.g., semiconductor processing tool.
- High purity acetylene can be supplied to a work device from the second adsorbent bed while the first adsorbent bed is regenerating.
- a high purity acetylene product can be supplied to a work device from the first adsorbent bed while the second adsorbent bed is regenerating.
- More adsorbent beds may be installed in parallel for high flow rates and less regeneration time.
- adsorbent bed may be positioned inside the acetylene gas cabinet or in a separate cabinet proximate to the acetylene cabinet.
- Fig. 3 shows an adsorbent bed or purifier setup in one cabinet with acetylene-containing cylinders in a separate cabinet.
- the adsorbent bed may be controlled independently or integrated with the acetylene gas delivery system. For certain applications such as carbon hardmask deposition, it may be desirable to integrate the adsorbent bed with the acetylene gas delivery system.
- the adsorbent column is switched automatically by setting up a switching time or by monitoring the breakthrough. Since the content of solvent and moisture in acetylene changes as the acetylene cylinder pressure changes, it is difficult to determine the column switch by time. Additionally, it is costly to monitor the breakthrough.
- the simplest method is to size the adsorbent column so that it can be automatically or manually switched for regeneration when the acetylene cylinder or number of acetylene cylinders is switched.
- a 4 inch x 4 foot adsorption column containing layered adsorbent materials in accordance with this invention e.g., a first layer of about 0.6 kilograms (kg) of molecular sieve 13X, a second layer of about 4.8 kilograms of activated carbon, and a third layer of about 0.6 kilograms (kg) of molecular sieve 13X, should be sufficient to purify the contents of an acetone-based A420 acetylene cylinder (Praxair AHM grade).
- the column may be sized as needed if more cylinders are connected. Because the column is sized properly, it may be switched automatically or manually when the cylinder switches. Additionally, the columns may be regenerated automatically after switching.
- the column may be equipped with high temperature and high pressure shutdown.
- the desorbed solvent from the adsorbent bed may be collected by using water trap, cold trap, or any suitable exhaust scrubber.
- More than one purification column may be used to allow one or more to be undergoing regeneration while one or more other columns are on-line.
- the adsorbent column may be used alone or combined with other techniques, such as a cold trap. If a cold trap is used, it is preferred that acetylene with carryover acetone passes through the cold trap first so that the majority of acetone condenses inside the cold trap and then passes through an adsorbent bed containing layered adsorbent materials in accordance with this invention, so that impurities, such as moisture, solvent, carbon dioxide, and the like, are further reduced to a lower level.
- impurities such as moisture, solvent, carbon dioxide, and the like
- this invention relates in part to a high purity acetylene delivery system comprising:
- a storage source containing acetylene and impurities, said impurities comprising moisture and solvent;
- a distribution line disposed between said storage source and an adsorbent bed for distributing a stream of acetylene and impurities from said storage source to said adsorbent bed;
- said adsorbent bed containing adsorption media capable of removing impurities from said stream;
- said adsorption media comprising at least a first adsorption medium for selectively removing moisture from said stream, a second adsorption medium for selectively removing solvent from said stream, and a third adsorption medium for selectively removing other impurities from said stream;
- a second distribution line disposed between said adsorbent bed and a work device for delivering high purity acetylene to said work device.
- the high purity acetylene delivery system may further comprise:
- a second adsorbent bed disposed on said distribution line in parallel with said adsorbent bed
- said second adsorbent bed containing adsorption media capable of removing impurities from said stream;
- said adsorption media comprising at least a first adsorption medium for selectively removing moisture from said stream, a second adsorption medium for selectively removing solvent from said stream, and a third adsorption medium for selectively removing other impurities from said stream;
- a third distribution line disposed between said second adsorbent bed and a work device for delivering the high purity acetylene to said work device.
- the high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.
- the high purity acetylene can be used for semiconductor applications such as amorphous carbon hardmask film deposition.
- Granular activated carbon (4 x8 mesh) produced from coconut shells manufactured by Norit was used for the test.
- concentrations of acetone, moisture and carbon dioxide were monitored using an FT-IR equipped with an MCT detector (MAGNA-IR 760 from Nicolet).
- a preliminary test was done using nitrogen. Nitrogen containing acetone ranging from 5000 ppm to 8% was continuously passed through a stainless steel bed (2-inch inner diameter and 5-feet length) that contained 1.87 kilograms (kg) of activated carbon. The nitrogen pressure was controlled at 13 pounds per square inch gauge (psig) and flow rate was 12 standard liters per minute (s1pm). Nitrogen feed to bed was stopped when acetone breakthrough was observed. A total of 0.466 kg of acetone was collected by the carbon column. The acetone concentration profile over time is shown in Fig. 4 .
- Crude acetylene from an acetone-based A390 AA grade acetylene cylinder was continuously passed through a stainless steel column (2 inch inner diameter and 3 feet length) that contained 1.12 kg of activated carbon.
- the pressure of acetylene was regulated at 13 psig and flow rate was 12 slpm.
- Acetylene cylinder temperature was not controlled and varied with ambient temperature. Ambient temperature was 20°C initially and dropped to 15°C at the end of the test. The maximum temperature difference between the acetylene cylinder and ambient was around 6°C. The acetylene flow to the carbon bed was stopped when the acetylene cylinder pressure dropped to 20 psig.
- the purifier temperature increased sharply to about 63°C due to initial acetylene adsorption and then was cooled down by the incoming acetylene flow. The bed temperature then increased slowly due to acetone adsorption that displaced the acetylene adsorbed. Overall, the temperature exotherm of the purifier was manageable. The temperature profile is shown in Fig. 6 .
- the amount of carbon needed for acetone removal from various types of acetylene cylinders may be calculated. For example, based on a simulated result, the maximum acetone released from an A420 cylinder is around 0.5-0.9 kg. The carbon needed to remove the released acetone from one A420 cylinder would be around 3.7 kg. Due to low packing density, a 4 inch by 4 foot column containing around 5.9 kg of carbon would be good for the application.
- a nitrogen stream containing 2% acetone and 260 ppm moisture was passed through two columns of 1.5 inch diameter and 8 inch length, respectively.
- One column was packed with activated carbon only and the other was packed with layered adsorbents containing activated carbon and molecular sieve 13X, respectively.
- the nitrogen inlet stream did not contain carbon dioxide or carbon monoxide.
- the nitrogen inlet flow rate was 12 slpm.
- the two columns were activated by maintaining at a temperature of 200°C and purging with nitrogen for a period of 5 hours. The amount and types of adsorbents in the columns are shown in table below.
- 13X molecular sieve is APG3 (8x12 mesh sphere) manufactured by UOP.
- the activated carbon is 4x8 mesh coconut based granular carbon manufactured by Norit. Column No. Adsorbents #1 (Activated carbon) Activated carbon (139 grams) #2 (Layered adsorbents) 1st portion: 13X molecular sieve (15 grams) 2nd portion: activated carbon (110 grams) 3rd portion: 13X molecular sieve (15 grams)
- Fig. 7 The concentrations of acetone, moisture and carbon dioxide from the purifier outlet are shown in Fig. 7 (column #1) and Fig. 8 (column #2).
- molecular sieve 13X By using molecular sieve 13X on the bottom and headspace of the purifier, moisture and carbon dioxide were removed completely. When acetone breakthrough was observed, the adsorption process was stopped.
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Cited By (5)
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JP2013194005A (ja) * | 2012-03-21 | 2013-09-30 | Taiyo Nippon Sanso Corp | 溶解アセチレンの精製方法及び装置 |
JP2013194004A (ja) * | 2012-03-21 | 2013-09-30 | Taiyo Nippon Sanso Corp | 溶解アセチレンの精製方法 |
CN104496740A (zh) * | 2014-12-15 | 2015-04-08 | 苏州金宏气体股份有限公司 | 一种工业乙炔纯化为高纯乙炔的装置及提纯方法 |
CN111013239A (zh) * | 2019-03-29 | 2020-04-17 | 赣州中能实业有限公司 | 一种n-甲基吡咯烷酮纯化用分子筛处理器 |
EP3972718A4 (de) * | 2019-05-20 | 2023-01-11 | Transform Materials LLC | Systeme und verfahren zur acetylenreinigung |
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TW201107288A (en) | 2011-03-01 |
TWI494302B (zh) | 2015-08-01 |
KR20100138792A (ko) | 2010-12-31 |
US8398747B2 (en) | 2013-03-19 |
US20100319536A1 (en) | 2010-12-23 |
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