EP2071186A3 - Vacuum pump and its operating method - Google Patents

Vacuum pump and its operating method Download PDF

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Publication number
EP2071186A3
EP2071186A3 EP08020360.7A EP08020360A EP2071186A3 EP 2071186 A3 EP2071186 A3 EP 2071186A3 EP 08020360 A EP08020360 A EP 08020360A EP 2071186 A3 EP2071186 A3 EP 2071186A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
cooling
operating method
operating
determined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08020360.7A
Other languages
German (de)
French (fr)
Other versions
EP2071186A2 (en
EP2071186B1 (en
Inventor
Gernot Bernhardt
Jürgen Metzger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2071186A2 publication Critical patent/EP2071186A2/en
Publication of EP2071186A3 publication Critical patent/EP2071186A3/en
Application granted granted Critical
Publication of EP2071186B1 publication Critical patent/EP2071186B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/11—Outlet temperature
    • F04B2205/112—Outlet temperature between two stages in a multi-stage pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1; 201) mit einer gegen Atmosphäre verdichtenden Endpumpstufe(2; 214) und einer Kühlvorrichtung (7; 207) und ein Verfahren zum Betrieb einer solchen Vakuumpumpe. Um größere Dampfanteile in Gas-Dampf-Gemischen fördern, schlägt die Erfindung vor, dass die Vakuumpumpe eine Betriebselektronik (8; 208) zur Stellung der Kühlmenge der Kühlvorrichtung und einen mit der Betriebselektronik verbundenen Temperaturfühler (13; 213) aufweist. Das Verfahren sieht vor, dass eine Temperatur gemessen, anschließend die notwendige Kühlung ermittelt und dann die ermittelte Kühlung eingestellt wird.

Figure imgaf001
The invention relates to a vacuum pump (1; 201) having an end-pumping stage (2; 214), which condenses against the atmosphere, and a cooling device (7; 207) and a method for operating such a vacuum pump. In order to promote larger proportions of vapor in gas-vapor mixtures, the invention proposes that the vacuum pump has an operating electronics (8; 208) for setting the cooling amount of the cooling device and a temperature sensor (13; 213) connected to the operating electronics. The method provides that a temperature is measured, then the necessary cooling is determined and then the determined cooling is set.
Figure imgaf001
EP08020360.7A 2007-12-12 2008-11-22 Vacuum pump and its operating method Active EP2071186B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007059938A DE102007059938A1 (en) 2007-12-12 2007-12-12 Vacuum pump and method of operation

Publications (3)

Publication Number Publication Date
EP2071186A2 EP2071186A2 (en) 2009-06-17
EP2071186A3 true EP2071186A3 (en) 2014-09-03
EP2071186B1 EP2071186B1 (en) 2017-11-22

Family

ID=40139928

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08020360.7A Active EP2071186B1 (en) 2007-12-12 2008-11-22 Vacuum pump and its operating method

Country Status (3)

Country Link
EP (1) EP2071186B1 (en)
JP (1) JP5496498B2 (en)
DE (1) DE102007059938A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280965B (en) * 2010-06-12 2013-07-24 中国科学院沈阳科学仪器股份有限公司 Shield motor for vacuum pump
CN104019035A (en) * 2014-06-25 2014-09-03 上海千山远东制药机械有限公司 Vacuum pump gas ballast device of vacuum freeze drier
EP3434905B1 (en) * 2017-07-25 2023-04-26 Pfeiffer Vacuum Gmbh Vacuum pump and method for operating a vacuum pump
JP2021041943A (en) * 2019-09-09 2021-03-18 ホシザキ株式会社 Kitchen apparatus
CN111734615B (en) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 Control system and control method for rear-stage pump of vacuum system
CN112032021B (en) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 Temperature regulation and control device for vacuum pump and use method
EP3916225B1 (en) * 2021-09-29 2023-12-13 Pfeiffer Vacuum Technology AG Vacuum pump
EP4043733B1 (en) * 2022-06-17 2024-03-27 Pfeiffer Vacuum Technology AG Vacuum pump with separately controllable fans

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1138948A2 (en) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Cooling apparatus for vacuum pump
WO2003042542A1 (en) * 2001-11-15 2003-05-22 Leybold Vakuum Gmbh Tempering method for a screw-type vacuum pump
WO2006106302A1 (en) * 2005-04-07 2006-10-12 Edwards Limited Temperature control apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE702480C (en) 1935-12-22 1941-02-08 Wolfgang Gaede Dr Single or multi-stage vacuum pump for generating low pressures for extracting fumes and gas-steam mixtures
US4268230A (en) * 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
GB9223804D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
JP3858667B2 (en) * 2001-10-29 2006-12-20 日立工機株式会社 Scroll vacuum pump
DE102006058843A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1138948A2 (en) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Cooling apparatus for vacuum pump
WO2003042542A1 (en) * 2001-11-15 2003-05-22 Leybold Vakuum Gmbh Tempering method for a screw-type vacuum pump
WO2006106302A1 (en) * 2005-04-07 2006-10-12 Edwards Limited Temperature control apparatus

Also Published As

Publication number Publication date
EP2071186A2 (en) 2009-06-17
DE102007059938A1 (en) 2009-06-18
JP5496498B2 (en) 2014-05-21
EP2071186B1 (en) 2017-11-22
JP2009144709A (en) 2009-07-02

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