EP2071186A3 - Vacuum pump and its operating method - Google Patents
Vacuum pump and its operating method Download PDFInfo
- Publication number
- EP2071186A3 EP2071186A3 EP08020360.7A EP08020360A EP2071186A3 EP 2071186 A3 EP2071186 A3 EP 2071186A3 EP 08020360 A EP08020360 A EP 08020360A EP 2071186 A3 EP2071186 A3 EP 2071186A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- cooling
- operating method
- operating
- determined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011017 operating method Methods 0.000 title 1
- 238000001816 cooling Methods 0.000 abstract 5
- 238000000034 method Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B25/00—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/11—Outlet temperature
- F04B2205/112—Outlet temperature between two stages in a multi-stage pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Die Erfindung betrifft eine Vakuumpumpe (1; 201) mit einer gegen Atmosphäre verdichtenden Endpumpstufe(2; 214) und einer Kühlvorrichtung (7; 207) und ein Verfahren zum Betrieb einer solchen Vakuumpumpe. Um größere Dampfanteile in Gas-Dampf-Gemischen fördern, schlägt die Erfindung vor, dass die Vakuumpumpe eine Betriebselektronik (8; 208) zur Stellung der Kühlmenge der Kühlvorrichtung und einen mit der Betriebselektronik verbundenen Temperaturfühler (13; 213) aufweist. Das Verfahren sieht vor, dass eine Temperatur gemessen, anschließend die notwendige Kühlung ermittelt und dann die ermittelte Kühlung eingestellt wird. The invention relates to a vacuum pump (1; 201) having an end-pumping stage (2; 214), which condenses against the atmosphere, and a cooling device (7; 207) and a method for operating such a vacuum pump. In order to promote larger proportions of vapor in gas-vapor mixtures, the invention proposes that the vacuum pump has an operating electronics (8; 208) for setting the cooling amount of the cooling device and a temperature sensor (13; 213) connected to the operating electronics. The method provides that a temperature is measured, then the necessary cooling is determined and then the determined cooling is set.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007059938A DE102007059938A1 (en) | 2007-12-12 | 2007-12-12 | Vacuum pump and method of operation |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2071186A2 EP2071186A2 (en) | 2009-06-17 |
EP2071186A3 true EP2071186A3 (en) | 2014-09-03 |
EP2071186B1 EP2071186B1 (en) | 2017-11-22 |
Family
ID=40139928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08020360.7A Active EP2071186B1 (en) | 2007-12-12 | 2008-11-22 | Vacuum pump and its operating method |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2071186B1 (en) |
JP (1) | JP5496498B2 (en) |
DE (1) | DE102007059938A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102280965B (en) * | 2010-06-12 | 2013-07-24 | 中国科学院沈阳科学仪器股份有限公司 | Shield motor for vacuum pump |
CN104019035A (en) * | 2014-06-25 | 2014-09-03 | 上海千山远东制药机械有限公司 | Vacuum pump gas ballast device of vacuum freeze drier |
EP3434905B1 (en) * | 2017-07-25 | 2023-04-26 | Pfeiffer Vacuum Gmbh | Vacuum pump and method for operating a vacuum pump |
JP2021041943A (en) * | 2019-09-09 | 2021-03-18 | ホシザキ株式会社 | Kitchen apparatus |
CN111734615B (en) * | 2020-06-28 | 2022-03-18 | 安图实验仪器(郑州)有限公司 | Control system and control method for rear-stage pump of vacuum system |
CN112032021B (en) * | 2020-09-10 | 2024-04-26 | 北京通嘉宏瑞科技有限公司 | Temperature regulation and control device for vacuum pump and use method |
EP3916225B1 (en) * | 2021-09-29 | 2023-12-13 | Pfeiffer Vacuum Technology AG | Vacuum pump |
EP4043733B1 (en) * | 2022-06-17 | 2024-03-27 | Pfeiffer Vacuum Technology AG | Vacuum pump with separately controllable fans |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1138948A2 (en) * | 2000-03-27 | 2001-10-04 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Cooling apparatus for vacuum pump |
WO2003042542A1 (en) * | 2001-11-15 | 2003-05-22 | Leybold Vakuum Gmbh | Tempering method for a screw-type vacuum pump |
WO2006106302A1 (en) * | 2005-04-07 | 2006-10-12 | Edwards Limited | Temperature control apparatus |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE702480C (en) | 1935-12-22 | 1941-02-08 | Wolfgang Gaede Dr | Single or multi-stage vacuum pump for generating low pressures for extracting fumes and gas-steam mixtures |
US4268230A (en) * | 1979-04-26 | 1981-05-19 | Varian Associates, Inc. | Gas ballast for oil sealed mechanical vacuum vane pump |
GB9223804D0 (en) * | 1992-11-13 | 1993-01-06 | Boc Group Plc | Improvements in vacuum pumps |
JP3858667B2 (en) * | 2001-10-29 | 2006-12-20 | 日立工機株式会社 | Scroll vacuum pump |
DE102006058843A1 (en) * | 2006-12-13 | 2008-06-19 | Pfeiffer Vacuum Gmbh | vacuum pump |
-
2007
- 2007-12-12 DE DE102007059938A patent/DE102007059938A1/en not_active Ceased
-
2008
- 2008-11-22 EP EP08020360.7A patent/EP2071186B1/en active Active
- 2008-12-09 JP JP2008312968A patent/JP5496498B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1138948A2 (en) * | 2000-03-27 | 2001-10-04 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Cooling apparatus for vacuum pump |
WO2003042542A1 (en) * | 2001-11-15 | 2003-05-22 | Leybold Vakuum Gmbh | Tempering method for a screw-type vacuum pump |
WO2006106302A1 (en) * | 2005-04-07 | 2006-10-12 | Edwards Limited | Temperature control apparatus |
Also Published As
Publication number | Publication date |
---|---|
EP2071186A2 (en) | 2009-06-17 |
DE102007059938A1 (en) | 2009-06-18 |
JP5496498B2 (en) | 2014-05-21 |
EP2071186B1 (en) | 2017-11-22 |
JP2009144709A (en) | 2009-07-02 |
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