EP2071186A3 - Vakuumpumpe und Verfahren zum Betrieb - Google Patents

Vakuumpumpe und Verfahren zum Betrieb Download PDF

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Publication number
EP2071186A3
EP2071186A3 EP08020360.7A EP08020360A EP2071186A3 EP 2071186 A3 EP2071186 A3 EP 2071186A3 EP 08020360 A EP08020360 A EP 08020360A EP 2071186 A3 EP2071186 A3 EP 2071186A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
cooling
operating method
operating
determined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08020360.7A
Other languages
English (en)
French (fr)
Other versions
EP2071186A2 (de
EP2071186B1 (de
Inventor
Gernot Bernhardt
Jürgen Metzger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2071186A2 publication Critical patent/EP2071186A2/de
Publication of EP2071186A3 publication Critical patent/EP2071186A3/de
Application granted granted Critical
Publication of EP2071186B1 publication Critical patent/EP2071186B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/11—Outlet temperature
    • F04B2205/112—Outlet temperature between two stages in a multi-stage pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1; 201) mit einer gegen Atmosphäre verdichtenden Endpumpstufe(2; 214) und einer Kühlvorrichtung (7; 207) und ein Verfahren zum Betrieb einer solchen Vakuumpumpe. Um größere Dampfanteile in Gas-Dampf-Gemischen fördern, schlägt die Erfindung vor, dass die Vakuumpumpe eine Betriebselektronik (8; 208) zur Stellung der Kühlmenge der Kühlvorrichtung und einen mit der Betriebselektronik verbundenen Temperaturfühler (13; 213) aufweist. Das Verfahren sieht vor, dass eine Temperatur gemessen, anschließend die notwendige Kühlung ermittelt und dann die ermittelte Kühlung eingestellt wird.
EP08020360.7A 2007-12-12 2008-11-22 Vakuumpumpe und Verfahren zum Betrieb Active EP2071186B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007059938A DE102007059938A1 (de) 2007-12-12 2007-12-12 Vakuumpumpe und Verfahren zum Betrieb

Publications (3)

Publication Number Publication Date
EP2071186A2 EP2071186A2 (de) 2009-06-17
EP2071186A3 true EP2071186A3 (de) 2014-09-03
EP2071186B1 EP2071186B1 (de) 2017-11-22

Family

ID=40139928

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08020360.7A Active EP2071186B1 (de) 2007-12-12 2008-11-22 Vakuumpumpe und Verfahren zum Betrieb

Country Status (3)

Country Link
EP (1) EP2071186B1 (de)
JP (1) JP5496498B2 (de)
DE (1) DE102007059938A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280965B (zh) * 2010-06-12 2013-07-24 中国科学院沈阳科学仪器股份有限公司 真空泵用屏蔽电机
CN104019035A (zh) * 2014-06-25 2014-09-03 上海千山远东制药机械有限公司 真空冷冻干燥机的真空泵气镇装置
EP3434905B1 (de) * 2017-07-25 2023-04-26 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie verfahren zum betreiben einer vakuumpumpe
JP2021041943A (ja) * 2019-09-09 2021-03-18 ホシザキ株式会社 厨房機器
CN111734615B (zh) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 用于真空***的后级泵控制***及控制方法
CN112032021B (zh) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 一种真空泵用温度调控装置及使用方法
EP3916225B1 (de) * 2021-09-29 2023-12-13 Pfeiffer Vacuum Technology AG Vakuumpumpe
EP4043733B1 (de) * 2022-06-17 2024-03-27 Pfeiffer Vacuum Technology AG Vakuumpumpe mit separat ansteuerbaren lüftern

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1138948A2 (de) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Kühlvorrichtung für eine Vakuumpumpe
WO2003042542A1 (de) * 2001-11-15 2003-05-22 Leybold Vakuum Gmbh Temperierugsverfahren einer schraubenvakuumpumpe
WO2006106302A1 (en) * 2005-04-07 2006-10-12 Edwards Limited Temperature control apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE702480C (de) 1935-12-22 1941-02-08 Wolfgang Gaede Dr Ein- oder mehrstufige Vakuumpumpe zur Erzeugung tiefer Druecke zum Absaugen von Daempfen und Gas-Dampf-Gemischen
US4268230A (en) * 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
GB9223804D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
JP3858667B2 (ja) * 2001-10-29 2006-12-20 日立工機株式会社 スクロール形真空ポンプ
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1138948A2 (de) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Kühlvorrichtung für eine Vakuumpumpe
WO2003042542A1 (de) * 2001-11-15 2003-05-22 Leybold Vakuum Gmbh Temperierugsverfahren einer schraubenvakuumpumpe
WO2006106302A1 (en) * 2005-04-07 2006-10-12 Edwards Limited Temperature control apparatus

Also Published As

Publication number Publication date
EP2071186A2 (de) 2009-06-17
JP2009144709A (ja) 2009-07-02
JP5496498B2 (ja) 2014-05-21
DE102007059938A1 (de) 2009-06-18
EP2071186B1 (de) 2017-11-22

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