EP2068000A2 - Vacuum pump mounting arrangement - Google Patents

Vacuum pump mounting arrangement Download PDF

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Publication number
EP2068000A2
EP2068000A2 EP08020361A EP08020361A EP2068000A2 EP 2068000 A2 EP2068000 A2 EP 2068000A2 EP 08020361 A EP08020361 A EP 08020361A EP 08020361 A EP08020361 A EP 08020361A EP 2068000 A2 EP2068000 A2 EP 2068000A2
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EP
European Patent Office
Prior art keywords
vacuum
chamber
vacuum pump
flange
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08020361A
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German (de)
French (fr)
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EP2068000B1 (en
EP2068000A3 (en
Inventor
Robert Watz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2068000A3 publication Critical patent/EP2068000A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to an arrangement with a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps with fast-rotating rotors store high energies due to the high rotational frequency of the rotor.
  • the rotational frequency is often at some 10,000 revolutions per minute.
  • rotor-stator crash there is contact between rotor and stator.
  • pump components e.g. Pump flange issued in the form of a torque.
  • the rotation of the pump in such a rotor-stator crash must be avoided as this creates a risk of injury to persons and damage to the system is expected. As a result of this rotation of the pump may also lead to leakage or tearing of the pump.
  • the vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient.
  • the vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient.
  • the flanges of the recipients and pipe components are usually not able to take the high moments.
  • vacuum pumps can also be fastened to the floor in addition to the flange, which can lead to tensioning of the pump or the slide due to non-aligned attachment points, so that trouble-free operation is not ensured.
  • the object of the invention is therefore to provide an arrangement with a vacuum pump with fast-rotating rotor, wherein in the case of a rotor-stator crash, the vacuum tightness is maintained.
  • Rotor-stator crash refers to the jamming of rotor and stator during operation of the rotor at high speeds with their subsequent mechanical deformation.
  • the rotational energy of the rotor is partly converted into this deformation, in part delivered to the housing of the vacuum pump.
  • Crash-torque proof therefore, designates a connection which is designed to transmit these torques without rotating elements joined together by them.
  • the intermediate component is protected from damage.
  • the connecting means is designed inexpensively and technically simply as a carrier arranged between the vacuum pump and the intermediate component. This avoids changes to the vacuum pump and intermediate component.
  • the spacer comprises a spacer sleeve which at least partially surrounds a screw connecting the carrier and the chamber flange. Screw and spacer sleeve form a rigid system, which is due to the bias by tightening the screw is very resistant to rotation of the assembly about the vertical plane to the chamber flange plane.
  • carrier and vacuum pump are made in one piece. This can be achieved by materially joining the two parts, for example by friction welding and equivalent methods. This achieves a low-cost crash-proof connection.
  • Another development relates to the chamber flange. This is connected to a arranged on the vacuum chamber web. This results in a connection between the vacuum chamber and chamber flange with a greater distance to the chamber flange center. This additionally increases the crash torque safety.
  • the chamber flange is angordnet on a flat wall of the vacuum chamber.
  • These walls should be as thin as possible on the one hand for cost reasons, on the other hand are exposed to the air pressure. This leads to deflections of the wall. Due to the small footprint, the arrangement is insensitive to such deflections, it will be introduced no tension in the arrangement. It is possible to arrange several arrangements side by side on the wall, without mutual interference.
  • FIG. 1 shows a section through the arrangement along its axis perpendicular to the chamber flange. Along this axis, the following components are arranged and connected to one another in the stated sequence: the vacuum pump 1, the carrier 7, the intermediate component 6, the chamber flange 5 and the vacuum chamber 4.
  • the vacuum pump has a high-speed rotor 2. This cooperates with a stator 3 to pump gas from the vacuum chamber 4.
  • the pump flange 25 of the vacuum pump is releasably secured by means of pump screws 12 to a support 7. This connection is dimensioned so that the maximum crash moment does not lead to a rotation of the vacuum pump and carrier together.
  • the intermediate member 6 which is designed as a vacuum slide valve, connected by slide bolts 14.
  • the vacuum slide valve is detachably fastened to the chamber flange 5 via further slide screws 14.
  • similarly acting means known in the art such as clamps, may be used.
  • sealing means are provided, for example, elastomeric O-rings.
  • the chamber flange 5 is secured to a cylindrical portions 26 crashworthy, for example, by a cohesive connection.
  • a web is provided between a wall 16 of the vacuum chamber and the chamber flange. It is connected with both force, material or form-fitting, so that it can absorb crash moments.
  • Carrier 7 and chamber flange 5 are connected by a screw 11, which is inserted through a spacer sleeve 10 therethrough.
  • the carrier 7 it is guided in a through hole and screwed into a thread 15 on the chamber flange.
  • the screw can receive pre-tension, ie be tightened with high torque, without the distance between the carrier and chamber flange is reduced. Tensions of the vacuum slide valve are therefore avoided.
  • the spacer sleeve surrounding the screw increases the security against rotation: at a torque about the axis of the arrangement, a tilting moment is created on the spacer sleeve, which counteracts the prestressing of the screw.
  • this arrangement is able to safely pick up a large crash torque from the vacuum pump and pass without loss of vacuum tightness on the carrier, screw and chamber flange to the vacuum chamber.
  • the crash moment does not lead to a load on the intermediate component, in this example, the vacuum slide valve.
  • FIG. 2 is a section through the arrangement along the line II 'shown.
  • the chamber wall 16 of the vacuum chamber has by way of example a rectangular shape with the shortest edge length W.
  • the chamber flange 5, which is connected to three webs 13, 13 'and 13 ", is arranged on this wall, and the chamber flange also has screwing holes 27, 27' and 27", in which the screws are screwed in between the carrier and chamber flange. It has a free diameter F, which allows the gas connection to the vacuum chamber.
  • the advantages of the arrangement come in such walls to advantage, in which the edge length W is much larger than the free diameter F. In the size ratio is also the wall thickness. A much larger ratio is when the deflection of the wall due to the air pressure exceeds the manufacturing tolerances of the flange dimensions, ie position on the wall, diameter, position of the screw holes 27, 27 ', 27 ".

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The arrangement has a fast moving rotor (2) and a stator (3), a vacuum chamber (4) with a chamber flange (5) and an intermediate component (6) i.e. vacuum gate valve, provided between a vacuum pump (1) and the vacuum chamber. The vacuum chamber, the vacuum pump and the intermediate component are removably connected with each other. The vacuum pump is arranged at a connection unit (7) i.e. support, which is connected with the chamber flange in a secure crash moment manner. The support is arranged between the vacuum pump and the intermediate component.

Description

Die Erfindung betrifft eine Anordnung mit Vakuumpumpe nach dem Oberbegriff des ersten Anspruches.The invention relates to an arrangement with a vacuum pump according to the preamble of the first claim.

Vakuumpumpen mit schnelldrehenden Rotoren, beispielsweise Turbomolekularpumpen, speichern aufgrund der hohen Drehfrequenz des Rotors hohe Energien. Die Drehfrequenz liegt oftmals bei einigen 10 000 Umdrehungen pro Minute. Bei einem so genannten Rotor-Stator-Crash kommt es zu einem Kontakt von Rotor und Stator. Dabei werden diese hohen Energien über Pumpenbauteile wie z.B. Pumpenflansch in Form eines Drehmomentes abgegeben. Das Verdrehen der Pumpe bei einem solchen Rotor-Stator Crash muss vermieden werden, da dabei eine Verletzungsgefahr für Personen entsteht und eine Beschädigung der Anlage zu erwarten ist. In Folge dieser Verdrehung der Pumpe kann es außerdem zum Leckschlagen oder Abreißen der Pumpe kommen. In der Prozesstechnik werden zum Teil toxische Gase gepumpt, was dann zu einer Kontamination der Umgebung führt. Bei einem Leckschlagen der Anlage wird auch der laufende Prozess des Anwenders so stark beeinflusst, dass er in der Regel abgebrochen werden muss. Dadurch fallen Kosten an, die bei großen Prozessen, beispielsweise in der Halbleiterindustrie, sehr hohe Beträge erreichen können.Vacuum pumps with fast-rotating rotors, for example turbomolecular pumps, store high energies due to the high rotational frequency of the rotor. The rotational frequency is often at some 10,000 revolutions per minute. In a so-called rotor-stator crash, there is contact between rotor and stator. At the same time, these high energies are transmitted via pump components, e.g. Pump flange issued in the form of a torque. The rotation of the pump in such a rotor-stator crash must be avoided as this creates a risk of injury to persons and damage to the system is expected. As a result of this rotation of the pump may also lead to leakage or tearing of the pump. In process technology, toxic gases are sometimes pumped, which then leads to contamination of the environment. If the system leaks, the current process of the user is influenced so much that it usually has to be aborted. This results in costs that can reach very high amounts in large processes, for example in the semiconductor industry.

Die Vakuumpumpen werden mit dem Hochvakuumflansch an Rohrbauteile, Schieber oder direkt an den Rezipienten montiert. Insbesondere bei der Montage an einem Schieber besteht im Falle eines plötzlichen Blockierens die Gefahr einer Verdrehung oder Leckage des Schiebers. Auch sind die Flansche der Rezipienten und auch Rohrbauteile in der Regel nicht in der Lage, die hohe Momente aufzunehmen.The vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient. In particular, when mounted on a slide there is a risk of twisting or leakage of the slider in the case of a sudden blocking. Also, the flanges of the recipients and pipe components are usually not able to take the high moments.

Zum Teil können Vakuumpumpen zusätzlich zum Flansch auch am Boden befestigt werden, was aufgrund von nicht-fluchtenden Befestigungspunkten zu einer Verspannung der Pumpe oder des Schiebers führen kann, so dass ein störungsfreier Betrieb nicht sichergestellt ist.In some cases, vacuum pumps can also be fastened to the floor in addition to the flange, which can lead to tensioning of the pump or the slide due to non-aligned attachment points, so that trouble-free operation is not ensured.

Aufgabe der Erfindung ist es daher, eine Anordnung mit einer Vakuumpumpe mit schnelldrehendem Rotor vorzustellen, bei der im Falle eines Rotor-Stator-Crashes die Vakuumdichtheit erhalten bleibt.The object of the invention is therefore to provide an arrangement with a vacuum pump with fast-rotating rotor, wherein in the case of a rotor-stator crash, the vacuum tightness is maintained.

Diese Aufgabe wird gelöst durch eine Anordnung mit den Merkmalen des ersten Anspruches. Die Ansprüche 2 bis 8 geben vorteilhafte Weiterbildungen der Erfindung an.This object is achieved by an arrangement having the features of the first claim. The claims 2 to 8 indicate advantageous developments of the invention.

Durch Anordnen der Vakuumpumpe an einem Verbindungsmittel, welches crashmomentsicher mit dem Kammerflansch verbunden ist, wird die bei einem sogenannten Rotor-Stator-Crash freigesetzte Rotationsenergie sicher auf die Vakuumkammer übergeleitet und dadurch die Verbindungen zwischen den Bauteilen und damit die gesamte Anordnung vakuumdicht gehalten. Rotor-Stator-Crash bezeichnet dabei das Verklemmen von Rotor und Stator während des Betriebes des Rotors bei hohen Drehzahlen mit deren anschließenden mechanischen Verformung. Die Rotationsenergie des Rotors wird zum Teil in diese Verformung umgesetzt, zum Teil an das Gehäuse der Vakuumpumpe abgegeben. Es treten große Drehmomente auf. Crashmomentsicher bezeichnet daher eine Verbindung, die so gestaltet ist, dass sie diese Drehmomente übertragen kann, ohne dass sie durch sie verbundenen Elemente gegeneinander verdrehen. Über die Vakuumdichtheit hinaus wird das Zwischenbauteil vor Beschädigung geschützt.
In einer Weiterbildung ist das Verbindungsmittel kostengünstig und technisch einfach als ein zwischen Vakuumpumpe und Zwischenbauteil angeordneter Träger gestaltet. Dies vermeidet Änderungen an Vakuumpumpe und Zwischenbauteil.By arranging the vacuum pump on a connecting means which is crashworthy connected to the chamber flange, the rotational energy released in a so-called rotor-stator crash is safely transferred to the vacuum chamber, thereby keeping the connections between the components and thus the entire assembly vacuum-tight. Rotor-stator crash refers to the jamming of rotor and stator during operation of the rotor at high speeds with their subsequent mechanical deformation. The rotational energy of the rotor is partly converted into this deformation, in part delivered to the housing of the vacuum pump. There are great torques. Crash-torque proof, therefore, designates a connection which is designed to transmit these torques without rotating elements joined together by them. Beyond the vacuum tightness, the intermediate component is protected from damage.
In a further development, the connecting means is designed inexpensively and technically simply as a carrier arranged between the vacuum pump and the intermediate component. This avoids changes to the vacuum pump and intermediate component.

Dies lässt sich wiederum weiterbilden, indem zwischen Träger und Kammerflansch ein Abstandshalter angeordnet ist. Dieser ermöglicht eine sichere Verschraubung und damit Verbindung von Träger und Kammerflansch, ohne dass das Zwischenbauteil verspannt wird. Fehlfunktionen aufgrund von Verspannungen des Zwischenbauteils werden daher vermieden.This can in turn be further developed by arranging a spacer between the carrier and the chamber flange. This allows a secure screwing and thus connection of the carrier and the chamber flange, without the intermediate component is braced. Malfunctions due to tension of the intermediate component are therefore avoided.

In einer einfachen Lösung umfasst der Abstandshalter eine Abstandshülse, welche eine Träger und Kammerflansch miteinander verbindende Schraube wenigstens teilweise umgibt. Schraube und Abstandshülse bilden ein steifes System, das aufgrund der Vorspannung durch Anziehen der Schraube sehr widerstandsfähig gegen Verdrehungen der Anordnung um die zur Kammerflanschebene senkrechte Achse ist.In a simple solution, the spacer comprises a spacer sleeve which at least partially surrounds a screw connecting the carrier and the chamber flange. Screw and spacer sleeve form a rigid system, which is due to the bias by tightening the screw is very resistant to rotation of the assembly about the vertical plane to the chamber flange plane.

In einer anderen Weiterbildung sind Träger und Vakuumpumpe einstückig ausgeführt. Dies kann durch stoffschlüssiges Verbinden der beiden Teile erreicht werden, beispielsweise durch Reibschweißen und gleichwirkende Verfahren. Dies erreicht kostengünstig eine sehr crashmomentsichere Verbindung.In another embodiment, carrier and vacuum pump are made in one piece. This can be achieved by materially joining the two parts, for example by friction welding and equivalent methods. This achieves a low-cost crash-proof connection.

Eine weitere Weiterbildung bezieht sich auf den Kammerflansch. Dieser ist mit einem an der Vakuumkammer angeordneten Steg verbunden. Daraus ergibt sich eine Verbindung zwischen Vakuumkammer und Kammerflansch mit einem größeren Abstand zur Kammerflanschmitte. Dies erhöht die Crashmomentsicherheit zusätzlich.Another development relates to the chamber flange. This is connected to a arranged on the vacuum chamber web. This results in a connection between the vacuum chamber and chamber flange with a greater distance to the chamber flange center. This additionally increases the crash torque safety.

Die bisher genannten Vorteile der Anordnung kommen insbesondere zur Geltung, wenn das Zwischenbauteil als Vakuumschieberventil ausgeführt ist, da bei diesen Verspannungen besonders leicht zu Fehlfunktionen führen und Crashmomentsicherheit nur konstruktiv aufwändig und teuer zu bewerkstelligen ist.The above-mentioned advantages of the arrangement are particularly evident when the intermediate component is designed as a vacuum slide valve, since these tensions particularly easily lead to malfunction and crash torque safety is only structurally complex and expensive to accomplish.

In einer anderen Weiterbildung ist der Kammerflansch auf einer ebenen Wand der Vakuumkammer angordnet. Diese Wände sollen einerseits aus Kostengründen möglichst dünnwandig sein, sind andererseits dem Luftdruck ausgesetzt. Dies führt zu Durchbiegungen der Wand. Aufgrund der geringen Grundfläche ist die Anordnung unempfindlich gegen solche Durchbiegungen, es werden keine Verspannungen in die Anordnung eingeleitet. Es wird möglich, mehrere Anordnungen nebeneinander auf der Wand anzuordnen, ohne dass es zur gegenseitigen Beeinflussung kommt.In another embodiment, the chamber flange is angordnet on a flat wall of the vacuum chamber. These walls should be as thin as possible on the one hand for cost reasons, on the other hand are exposed to the air pressure. This leads to deflections of the wall. Due to the small footprint, the arrangement is insensitive to such deflections, it will be introduced no tension in the arrangement. It is possible to arrange several arrangements side by side on the wall, without mutual interference.

Anhand eines Ausführungsbeispieles soll die Erfindung näher erläutert und die Vorteile vertieft werden. Es zeigen:

Fig. 1:
Schnitt durch eine Anordnung mit Vakuumpumpe
Fig. 2:
Draufblick auf die entlang der Linie I-I' geschnittene Anordnung
Reference to an embodiment, the invention will be explained in more detail and the benefits are deepened. Show it:
Fig. 1:
Section through an arrangement with vacuum pump
Fig. 2:
Look at the arrangement cut along the line II '

Die Figur 1 zeigt einen Schnitt durch die Anordnung entlang ihrer zum Kammerflansch senkrechten Achse. Entlang dieser Achse sind in der genannten Reihenfolge folgende Bauteile angeordnet und miteinander verbunden: die Vakuumpumpe 1, der Träger 7, das Zwischenbauteil 6, der Kammerflansch 5 und die Vakuumkammer 4.The FIG. 1 shows a section through the arrangement along its axis perpendicular to the chamber flange. Along this axis, the following components are arranged and connected to one another in the stated sequence: the vacuum pump 1, the carrier 7, the intermediate component 6, the chamber flange 5 and the vacuum chamber 4.

Die Vakuumpumpe weist einen schnelldrehenden Rotor 2 auf. Dieser wirkt mit einem Stator 3 zusammen, um Gas aus der Vakuumkammer 4 abzupumpen. Der Pumpenflansch 25 der Vakuumpumpe ist mittels Pumpenschrauben 12 an einem Träger 7 lösbar befestigt. Diese Verbindung ist so dimensioniert, dass das maximale Crashmoment nicht zu einer Verdrehung von Vakuumpumpe und Träger gegeinander führt.The vacuum pump has a high-speed rotor 2. This cooperates with a stator 3 to pump gas from the vacuum chamber 4. The pump flange 25 of the vacuum pump is releasably secured by means of pump screws 12 to a support 7. This connection is dimensioned so that the maximum crash moment does not lead to a rotation of the vacuum pump and carrier together.

Mit dem Träger ist das Zwischenbauteil 6, welches als Vakuumschieberventil ausgeführt ist, durch Schieberschrauben 14 verbunden. Das Vakuumschieberventil wiederum ist über weitere Schieberschrauben 14 am Kammerflansch 5 lösbar befestigt. Anstelle der Pumpen- und Schieberschrauben können gleichwirkende und im Stand der Technik bekannte Mittel wie Klammern verwendet werden. Zwischen den Flanschverbindungen von Vakuumpumpe, Träger, Zwischenbauteil und Vakuumkammer sind nicht gezeigte und im Stand der Technik bekannte Dichtmittel vorgesehen, beispielsweise elastomere Rundschnurringe.With the carrier, the intermediate member 6, which is designed as a vacuum slide valve, connected by slide bolts 14. The vacuum slide valve, in turn, is detachably fastened to the chamber flange 5 via further slide screws 14. Instead of the pump and pusher screws, similarly acting means known in the art, such as clamps, may be used. Between the flange of vacuum pump, carrier, intermediate member and vacuum chamber not shown and known in the art sealing means are provided, for example, elastomeric O-rings.

Der Kammerflansch 5 ist an einem zylindrischen Abschnitte 26 crashmomentsicher befestigt, beispielsweise durch eine stoffschlüssige Verbindung. Ein Steg ist zwischen einer Wand 16 der Vakuumkammer und dem Kammerflansch vorgesehen. Er ist mit beiden kraft-, stoff- oder formschlüssig verbunden, so dass er Crashmomente aufnehmen kann.The chamber flange 5 is secured to a cylindrical portions 26 crashworthy, for example, by a cohesive connection. A web is provided between a wall 16 of the vacuum chamber and the chamber flange. It is connected with both force, material or form-fitting, so that it can absorb crash moments.

Träger 7 und Kammerflansch 5 sind durch eine Schraube 11 miteinander verbunden, welche durch eine Abstandshülse 10 hindurch gesteckt ist. Im Träger 7 ist sie in einem Durchgangsloch geführt und am Kammerflansch in ein Gewinde 15 eingeschraubt. Durch die Abstandshülse kann die Schraube Vorgespannung erhalten, d.h. mit hohem Drehmoment angezogen werden, ohne dass der Abstand zwischen Träger und Kammerflansch verringert wird. Verspannungen des Vakuumschieberventils werden daher vermieden. Gleichzeitig erhöht die die Schraube umgebende Abstandshülse die Verdrehsicherheit: bei einem Drehmoment um die Achse der Anordnung entsteht ein Kippmoment auf die Abstandshülse, dem die Vorspannung der Schraube entgegenwirkt. Daher ist diese Anordnung in der Lage, ein großes Crashmoment sicher von der Vakuumpumpe aufzunehmen und ohne Verlust der Vakuumdichtheit über Träger, Schraube und Kammerflansch auf die Vakuumkammer überzuleiten. Das Crashmoment führt dabei nicht zu einer Belastung des Zwischenbauteils, in diesem Beispiel des Vakuumschieberventils.Carrier 7 and chamber flange 5 are connected by a screw 11, which is inserted through a spacer sleeve 10 therethrough. In the carrier 7, it is guided in a through hole and screwed into a thread 15 on the chamber flange. Through the spacer sleeve, the screw can receive pre-tension, ie be tightened with high torque, without the distance between the carrier and chamber flange is reduced. Tensions of the vacuum slide valve are therefore avoided. At the same time, the spacer sleeve surrounding the screw increases the security against rotation: at a torque about the axis of the arrangement, a tilting moment is created on the spacer sleeve, which counteracts the prestressing of the screw. Therefore, this arrangement is able to safely pick up a large crash torque from the vacuum pump and pass without loss of vacuum tightness on the carrier, screw and chamber flange to the vacuum chamber. The crash moment does not lead to a load on the intermediate component, in this example, the vacuum slide valve.

In Fig. 2 ist ein Schnitt durch die Anordnung entlang der Linie I-I' gezeigt. Die Kammerwand 16 der Vakuumkammer weist beispielhaft eine rechteckige Form mit der kürzesten Kantenlänge W auf. Auf dieser Wand ist der Kammerflansch 5 angeordnet, der mit drei Stegen 13, 13' und 13" verbunden ist. Der Kammerflansch weist zudem Verschraubungslöcher 27, 27' und 27" auf, in welche die Schrauben zwischen Träger und Kammerflansch eingeschraubt werden. Er weist einen freien Durchmesser F auf, der die Gasverbindung zur Vakuumkammer ermöglicht. Die Vorteile der Anordnung kommen bei solchen Wänden zur Geltung, bei der die Kantenlänge W wesentlich größer als der freie Durchmesser F ist. In das Größenverhältnis geht zusätzlich die Wandstärke ein. Ein wesentlich größeres Verhältnis liegt vor, wenn die Durchbiegung der Wand aufgrund des Luftdrucks die Fertigungstoleranzen der Flanschmaße übersteigt, d.h. Position auf der Wand, Durchmesser, Lage der Verschraubungslöcher 27, 27', 27".In Fig. 2 is a section through the arrangement along the line II 'shown. The chamber wall 16 of the vacuum chamber has by way of example a rectangular shape with the shortest edge length W. The chamber flange 5, which is connected to three webs 13, 13 'and 13 ", is arranged on this wall, and the chamber flange also has screwing holes 27, 27' and 27", in which the screws are screwed in between the carrier and chamber flange. It has a free diameter F, which allows the gas connection to the vacuum chamber. The advantages of the arrangement come in such walls to advantage, in which the edge length W is much larger than the free diameter F. In the size ratio is also the wall thickness. A much larger ratio is when the deflection of the wall due to the air pressure exceeds the manufacturing tolerances of the flange dimensions, ie position on the wall, diameter, position of the screw holes 27, 27 ', 27 ".

Claims (8)

Anordnung mit einer Vakuumpumpe (1) mit einem schnelldrehenden Rotor (2) und einem Stator (3), einer Vakuumkammer (4) mit einem Kammerflansch (5) und einem zwischen Vakuumpumpe und Vakuumkammer vorgesehenen Zwischenbauteil (6), wobei Vakuumkammer, Vakuumpumpe und Zwischenbauteil lösbar miteinander verbunden sind, dadurch gekennzeichnet, dass die Vakuumpumpe an einem Verbindungsmittel (7) angeordnet ist, welches crashmomentsicher mit dem Kammerflansch (5) verbunden ist.Arrangement comprising a vacuum pump (1) with a high-speed rotor (2) and a stator (3), a vacuum chamber (4) with a chamber flange (5) and an intermediate component (6) provided between the vacuum pump and the vacuum chamber, wherein the vacuum chamber, vacuum pump and intermediate component are detachably connected to each other, characterized in that the vacuum pump is arranged on a connecting means (7), which is connected crashworthy with the chamber flange (5). Anordnung nach Anspruch 1, dadurch gekennzeichnet, dass das Verbindungsmittel (7) einen zwischen Vakuumpumpe und Zwischenbauteil angeordneten Träger umfasst, mit welchem Vakuumpumpe (1) und Zwischenbauteil (6) lösbar verbunden sind.Arrangement according to claim 1, characterized in that the connecting means (7) comprises a arranged between the vacuum pump and the intermediate member carrier, with which the vacuum pump (1) and intermediate member (6) are detachably connected. Anordnung nach Anspruch 2, dadurch gekennzeichnet, dass das Verbindungsmittel (7) einen zwischen Träger und Kammerflansch (5) angeordneten Abstandshalter (10) umfasst.Arrangement according to claim 2, characterized in that the connecting means (7) comprises a between carrier and chamber flange (5) arranged spacers (10). Anordnung nach Anspruch 3, dadurch gekennzeichnet, dass der Abstandshalter (10) eine Abstandshülse umfasst, welche eine Träger und Kammerflansch (5) miteinander verbindende Schraube (11) wenigstens teilweise umgibt.Arrangement according to claim 3, characterized in that the spacer (10) comprises a spacer sleeve which surrounds a support and chamber flange (5) interconnecting screw (11) at least partially. Anordnung nach Anspruch 2 bis 4, dadurch gekennzeichnet, dass Träger und Vakuumpumpe (1) einstückig ausgeführt sind.Arrangement according to claim 2 to 4, characterized in that carrier and vacuum pump (1) are made in one piece. Anordnung nach einem der Ansprüche 2 bis 5, dadurch gekennzeichnet, dass der Kammerflansch (5) und ein an der Vakuumkammer angeordneter Steg (13, 13', 13") miteinander verbunden sind.Arrangement according to one of claims 2 to 5, characterized in that the chamber flange (5) and arranged on the vacuum chamber web (13, 13 ', 13 ") are interconnected. Anordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Zwischenbauteil (6) ein Vakuumschieberventil umfasst.Arrangement according to one of the preceding claims, characterized in that the intermediate component (6) comprises a vacuum slide valve. Anordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Kammerflansch (5) auf einer ebenen Wand (16) der Vakuumkammer (4) angeordnet ist.Arrangement according to one of the preceding claims, characterized in that the chamber flange (5) is arranged on a flat wall (16) of the vacuum chamber (4).
EP08020361.5A 2007-12-08 2008-11-22 Vacuum pump mounting arrangement Active EP2068000B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710059257 DE102007059257A1 (en) 2007-12-08 2007-12-08 Arrangement with vacuum pump

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EP2068000A2 true EP2068000A2 (en) 2009-06-10
EP2068000A3 EP2068000A3 (en) 2014-01-22
EP2068000B1 EP2068000B1 (en) 2018-08-15

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016114709A1 (en) 2016-08-09 2018-02-15 Karlsruher Institut für Technologie Torque protection and flange connection with such
JP6729408B2 (en) * 2017-01-13 2020-07-22 株式会社島津製作所 Valve device
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580477A1 (en) * 2004-03-22 2005-09-28 Alcatel Damping connection for vacuum pump
EP1795757A2 (en) * 2005-12-12 2007-06-13 Pfeiffer Vacuum GmbH Vacuum casing

Family Cites Families (4)

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Publication number Priority date Publication date Assignee Title
JP3426734B2 (en) * 1994-10-17 2003-07-14 三菱重工業株式会社 Turbo molecular pump
JP4484470B2 (en) * 2002-10-23 2010-06-16 エドワーズ株式会社 Molecular pump and flange
JP4609082B2 (en) * 2005-01-25 2011-01-12 株式会社島津製作所 Flange and turbomolecular pump with this flange
JP2007278164A (en) * 2006-04-06 2007-10-25 Shimadzu Corp Fastening structure and rotary vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1580477A1 (en) * 2004-03-22 2005-09-28 Alcatel Damping connection for vacuum pump
EP1795757A2 (en) * 2005-12-12 2007-06-13 Pfeiffer Vacuum GmbH Vacuum casing

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JP5467758B2 (en) 2014-04-09
DE102007059257A1 (en) 2009-06-10
JP2009138740A (en) 2009-06-25
EP2068000B1 (en) 2018-08-15
EP2068000A3 (en) 2014-01-22

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