EP2027474B1 - Capteur d'accélération - Google Patents

Capteur d'accélération Download PDF

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Publication number
EP2027474B1
EP2027474B1 EP07727691A EP07727691A EP2027474B1 EP 2027474 B1 EP2027474 B1 EP 2027474B1 EP 07727691 A EP07727691 A EP 07727691A EP 07727691 A EP07727691 A EP 07727691A EP 2027474 B1 EP2027474 B1 EP 2027474B1
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EP
European Patent Office
Prior art keywords
wing
torsion
acceleration sensor
seismic mass
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP07727691A
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German (de)
English (en)
Other versions
EP2027474A1 (fr
Inventor
Dietrich Schubert
Johannes Classen
Lars Tebje
Johannes Seelhorst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
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Robert Bosch GmbH
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Publication of EP2027474A1 publication Critical patent/EP2027474A1/fr
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Publication of EP2027474B1 publication Critical patent/EP2027474B1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Definitions

  • the present invention relates to an acceleration sensor according to the preamble of patent claim 1.
  • Such an acceleration sensor is out of the EP 0 244 581 known and is used for example for triggering occupant protection devices for motor vehicles such as airbags, belt tensioners, hazard warning lights and roll bars.
  • the acceleration sensor comprises a seismic mass having first and second vanes rotatable about a torsion bar and a base substrate, the vanes being configured to apply different torques to the torsion bar due to their mass distributions.
  • the seismic mass is housed in a housing filled with a medium (liquid), such as silicone oil.
  • a medium such as silicone oil.
  • the disadvantage is that the seismic mass experiences a different torque due to different damping forces for a deflection in one direction and for a deflection in the other direction.
  • the torsion bar different torques depending on which wing strikes against the base substrate.
  • equal amounts of acceleration in opposite directions cause different sensor signals in terms of magnitude.
  • vibrations can therefore lead to a systematic falsification of the measurement results.
  • the publication US2005 / 0109109 describes a micromechanical device in the form of an asymmetric rocker.
  • the asymmetric damping is reduced by perforating the mass or increasing the distance between the mass and the substrate.
  • the publication US6230566 describes a micro-mechanical device with a seismic mass with two wings, wherein a wing for an asymmetric mass distribution is perforated.
  • the present invention has for its object to provide a sensor whose sensor signal for two magnitude equal acceleration in opposite directions is equal in magnitude.
  • the seismic mass and the base substrate are formed in such a way that equal damping torques act on the at least one torsion bar for a torsion and for an equal amount of torsion in the opposite direction.
  • the corruption of a temporal averaging due to vibrations can be eliminated.
  • torsions in opposite directions are in this connection torsions, which lead to deflections of the seismic mass by the same angle in opposite directions.
  • a projection is provided on the base substrate below the first wing.
  • the formation of a projection on the base substrate for symmetrizing the damping torques is a structurally simple solution.
  • a first electrode is provided on the projection, a second electrode is provided under the second vane on the base substrate, and the first electrode has a smaller area than the second electrode.
  • a sufficiently large protrusion can be provided wherein the variation of the capacitances between the first electrode and the first vane and between the second electrode and the second vane is symmetrized by the electrode having a smaller area on the protrusion than the second electrode.
  • an electrode is provided under the first wing and under the second wing on the base substrate.
  • symmetric variation of the capacitances between the first electrode and the first vane and between the second electrode and the second vane can be easily achieved by mounting the electrodes on both sides of the substrate.
  • through holes are provided in the first wing and the second wing, and the holes in the first wing occupy a larger total area than the holes in the second wing.
  • the damping torques and mass distributions can easily be specified in terms of process technology.
  • a recess is provided in one of the wings at the end, which is opposite to the at least one torsion bar.
  • through holes are provided in the first wing and the second wing, and take the through holes in the first wing occupy a smaller total area than the holes in the second wing.
  • the effect of the recess can be compensated for the damping torque in a structurally simple manner.
  • the first wing is configured such that torsion of the at least one torsion bar in a first direction is limited by the first wing striking against the base substrate at a first point on a first edge, the second wing being such is formed so that the torsion of the at least one torsion bar in a second direction, which is opposite to the first direction, is limited in that the second wing abuts against the base substrate with a second point on a second edge, and is the
  • the first stop torque is therefore also equal in magnitude to the second stop torque. Even at the stop, a symmetrical characteristic is obtained for a sensor signal for deflection in both directions.
  • the at least one torsion bar is connected at two opposite ends to a web substrate surrounding the seismic mass.
  • the at least one torsion bar is connected to the base substrate via a carrier element.
  • such a structure can be made by a simple manufacturing process.
  • Fig. 1 shows a seismic mass 1 over a base substrate.
  • the seismic mass 1 is rectangular and has a first wing 2 and a second wing 3.
  • the seismic mass 1 is rotatably connected via two torsion bars 4 of the same dimensions to a support element 14, which is arranged in the middle of the seismic mass 1.
  • the first wing 2 has a grid-shaped hole pattern of continuous square holes 5 and the second wing 3 has a grid-shaped hole pattern of continuous square holes 6.
  • a point on a first edge 7 of the first wing 2 opposite the torsion bars 4 is equidistant from one of the torsion bars 4 as a point on a second edge 8 of the second wing 3 opposite the torsion bars 4 (For the present embodiment of the seismic mass 1 as a quadrilateral with torsion bars 4 arranged in the middle, even any point on the first edge 7 has the same distance from one of the torsion bars 4 as any point on the second edge 8 of the second wing 3 opposite the torsion bar 4) , Between the two torsion bars 4 and the wings 2, 3, a gap 9 is formed in each case.
  • the wings 2, 3 are connected to the torsion bars 4 in each case via at least one bridge 10. At the end of the first wing 2, which is opposite to the torsion bars 4, a large square recess 11 is provided.
  • the holes 6 on the second wing 3 are formed larger than the holes 5 on the first wing. 2
  • the number of holes 6 is the same as the number of holes 5.
  • the holes 6 therefore occupy a larger total area. Instead of making the holes 6 larger than the holes 5, a larger number of holes 6 can be used for these and all other embodiments.
  • electrodes 12 are formed in the base substrate.
  • the signals from the electrodes 12 are evaluated in an evaluation circuit which may be monolithically integrated in the sensor (not shown).
  • the electrodes are, for example, diffused or applied by thin-film technology.
  • FIG. 12 is a sectional view of the seismic mass 1 and the base substrate 13.
  • FIG Fig. 1 The seismic mass 1 is plate-shaped.
  • the torsion bars 4 are connected to the base substrate 13 via a support element 14.
  • Such a structure may be formed, for example, by depositing an oxide layer on the base substrate 13, etching a recess in the oxide layer, and then depositing a polysilicon layer.
  • the polysilicon layer is defined so that a structure in the form of the seismic mass 1 is formed.
  • the deposited in the recess in the oxide polysilicon forms the support member 14.
  • the oxide is finally removed.
  • An acceleration acting on the sensor which is directed from the base substrate 13 to the seismic mass 1 along the support member 14, caused due to the inertia of the seismic mass 1, a first torque, which exerts the first wing 2 on the torsion bars 4, and a second torque exerted by the second wing 3 on the torsion bars 4. Due to its larger mass and its mass distribution, the farther away from the torsion bars 4 is centered, the second wing 3 exerts a greater torque on the torsion bars 4 than the first wing 2. Accordingly, the second wing 3 is turned to the base substrate 13 while the first wing 2 is rotated away from the base substrate 13. An acceleration in the opposite direction leads to an opposite torsion of the torsion bars 4 and an opposite orientation of the wings 2, 3.
  • the edge 7 or 8 abuts against the base substrate 13. Since the edges 7 and 8 are located at the same distance from one of the torsion webs 4, acts on the torsion bars 4 a magnitude substantially the same stop torque.
  • the force acting on the torsion bars 4 torque can be divided into two equal torques, each of which acts on one of the torsion bars 4. The statements about the torques are therefore correct if they are related to only one of the torsion bars 4.
  • the seismic mass 1 is housed in a casing filled with a medium such as a gas (nitrogen).
  • a medium such as a gas (nitrogen).
  • a damping torque acts due to the friction in the surrounding medium. This damping torque may be dependent on the direction of rotation.
  • the holes 6 are made larger than the holes 5 to compensate for the effect resulting from the recess 11.
  • the torsion bars 4 therefore experience in both directions of rotation for an arbitrary torsion in terms of magnitude equal torques.
  • FIG. 3 shows a further seismic mass 1 over a base substrate 13 with a projection 15 which is formed under the first wing 2.
  • the unequal masses and mass distributions of the first wing 2 and the second wing 3 are achieved by a different size of the holes 16 of the first wing 2 and the holes 17 of the second wing 3.
  • the number of holes 16 is the same as the number of holes 17.
  • the holes 16 are larger and therefore occupy a larger total area.
  • the different sizes of the holes 16 and 17 influence the damping torques, which act on the torsion bars 4 depending on the direction of rotation.
  • a dependence of the damping torque of the formation of a projection 15 under the first wing 2 is utilized.
  • a hole can also be formed under the second wing 3.
  • Amount equal damping torques in both opposite directions can thus be achieved by the special formation of holes and recesses on the seismic mass and providence of a projection or hole under one of the wings 2, 3 of the seismic mass 1. Both measures can also be combined.
  • FIG. 4 shows a sectional view of the seismic mass and the base substrate 13 with the protrusion 15 Fig. 3 , The projection 15 is formed directly beside the electrode 12.
  • FIG. 5 shows a sectional view of the seismic mass and the base substrate 13 with an alternative projection 18. On the projection 18, the electrode 12 is formed.
  • FIG. 6 shows a sectional view of a seismic mass and a base substrate 13 with a further alternative projection 18.
  • the formed on the projection 18 rectangular Electrode 19 has a smaller width but the same length as electrode 12. Due to the smaller area of the electrode 19, an effect on the capacitance resulting from its closer proximity to the seismic mass 1 is compensated. The capacitance between the seismic mass 1 and each of the electrodes 19, 12 then changes correspondingly for opposite torsion angles.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Claims (9)

  1. Capteur d'accélération comprenant une masse sismique (1) par-dessus un substrat de base (13), la masse sismique (1) présentant une première et une deuxième aile (2, 3), qui peuvent tourner autour d'au moins une barre de torsion (4), les ailes (2, 3) étant réalisées de telle sorte que sur la base de leurs répartitions de masse, différents couples soient exercés sur l'au moins une barre de torsion (4), caractérisé en ce que la masse sismique (1) et le substrat de base (13) sont réalisés de telle sorte que des couples d'amortissement de même ampleur agissent sur l'au moins une barre de torsion (4) pour une certaine torsion et pour une torsion de même ampleur dans le sens contraire, la première aile (2) étant réalisée de telle sorte qu'une torsion de l'au moins une barre de torsion (4) soit limitée dans une première direction par le fait que la première aile (2) bute contre le substrat de base (13) avec un premier point sur la première arête (7), en ce que la deuxième aile (3) est réalisée de telle sorte que la torsion de l'au moins une barre de torsion (4) dans une deuxième direction, opposée à la première direction, soit limitée par le fait que la deuxième aile (3) bute contre le substrat de base (13) avec un deuxième point sur une deuxième arête (8), et en ce que la distance du premier point à l'au moins une barre de torsion (4) est égale à la distance du deuxième point à l'au moins une barre de torsion (4).
  2. Capteur d'accélération selon la revendication 1, caractérisé en ce que l'on prévoit une saillie (15, 18) sur le substrat de base (13) et la première aile (2).
  3. Capteur d'accélération selon la revendication 2, caractérisé en ce que l'on prévoit sur la saillie une première électrode (19), en ce que l'on prévoit sous la deuxième aile (3) sur le substrat de base (13) une deuxième électrode, et en ce que la première électrode (19) présente une plus petite surface que la deuxième électrode (12).
  4. Capteur d'accélération selon l'une quelconque des revendications précédentes, caractérisé en ce que l'on prévoit sous la première aile (2) et sous la deuxième aile (3) sur le substrat de base (13) à chaque fois une électrode (12).
  5. Capteur d'accélération selon l'une quelconque des revendications 2 à 4, caractérisé en ce que dans la première aile (2) et la deuxième aile (3) sont prévus des trous traversants (5, 6, 16, 17), et en ce que les trous dans la première aile (2) occupent une plus grande surface totale que les trous (6) dans la deuxième aile (3).
  6. Capteur d'accélération selon l'une quelconque des revendications 1 à 4, caractérisé en ce que l'on prévoit un évidement (11) dans l'une des ailes (2, 3) à l'extrémité qui est opposée à l'au moins une barre de torsion (4).
  7. Capteur d'accélération selon la revendication 6, caractérisé en ce que dans la première aile (2) et la deuxième aile (3) sont prévus des trous traversants (5, 6, 16, 17), et en ce que les trous (5) dans la première aile (2) occupent une plus petite surface totale que les trous (6) dans la deuxième aile (3).
  8. Capteur d'accélération selon la revendication 1, caractérisé en ce que l'au moins une barre de torsion (4) est connectée à deux extrémités opposées à un substrat de barre entourant la masse sismique (1).
  9. Capteur d'accélération selon la revendication 1, caractérisé en ce que l'au moins une barre de torsion (4) est connectée par le biais d'un élément de support (14) au substrat de base (13).
EP07727691A 2006-05-16 2007-04-03 Capteur d'accélération Active EP2027474B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006022811A DE102006022811A1 (de) 2006-05-16 2006-05-16 Beschleunigungssensor
PCT/EP2007/053220 WO2007131835A1 (fr) 2006-05-16 2007-04-03 Capteur d'accélération

Publications (2)

Publication Number Publication Date
EP2027474A1 EP2027474A1 (fr) 2009-02-25
EP2027474B1 true EP2027474B1 (fr) 2010-09-15

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EP07727691A Active EP2027474B1 (fr) 2006-05-16 2007-04-03 Capteur d'accélération

Country Status (5)

Country Link
EP (1) EP2027474B1 (fr)
JP (1) JP2009537803A (fr)
CN (1) CN101443665B (fr)
DE (2) DE102006022811A1 (fr)
WO (1) WO2007131835A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058747A1 (de) * 2006-12-12 2008-06-19 Robert Bosch Gmbh Mikromechanischer z-Sensor
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
DE102009029248B4 (de) 2009-09-08 2022-12-15 Robert Bosch Gmbh Mikromechanisches System zum Erfassen einer Beschleunigung
JP2012088120A (ja) * 2010-10-18 2012-05-10 Seiko Epson Corp 物理量センサー素子、物理量センサーおよび電子機器
JP5979344B2 (ja) 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5935986B2 (ja) 2012-04-06 2016-06-15 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5942554B2 (ja) * 2012-04-11 2016-06-29 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP6206650B2 (ja) 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体
DE102013216915A1 (de) * 2013-08-26 2015-02-26 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
JP2015072188A (ja) * 2013-10-03 2015-04-16 セイコーエプソン株式会社 物理量検出素子、および物理量検出装置、電子機器、移動体
DE102014202816B4 (de) * 2014-02-17 2022-06-30 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
JP6274413B2 (ja) 2014-02-25 2018-02-07 セイコーエプソン株式会社 機能素子、電子機器、および移動体
JP6401868B2 (ja) * 2015-09-15 2018-10-10 株式会社日立製作所 加速度センサ
US9617142B1 (en) * 2015-09-30 2017-04-11 Mems Drive, Inc. MEMS grid for manipulating structural parameters of MEMS devices
JP6606601B2 (ja) * 2016-04-18 2019-11-13 株式会社日立製作所 加速度センサ
JP2019045171A (ja) 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP2019045170A (ja) 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP2019045172A (ja) 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体

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Also Published As

Publication number Publication date
DE102006022811A1 (de) 2007-11-22
WO2007131835A1 (fr) 2007-11-22
CN101443665A (zh) 2009-05-27
DE502007005051D1 (de) 2010-10-28
CN101443665B (zh) 2011-04-13
JP2009537803A (ja) 2009-10-29
EP2027474A1 (fr) 2009-02-25

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