EP1899608A1 - Vakuum-drehschieberpumpe - Google Patents
Vakuum-drehschieberpumpeInfo
- Publication number
- EP1899608A1 EP1899608A1 EP06763998A EP06763998A EP1899608A1 EP 1899608 A1 EP1899608 A1 EP 1899608A1 EP 06763998 A EP06763998 A EP 06763998A EP 06763998 A EP06763998 A EP 06763998A EP 1899608 A1 EP1899608 A1 EP 1899608A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- chamber
- channel
- oil
- vacuum rotary
- rotary vane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 239000000314 lubricant Substances 0.000 description 7
- 238000005086 pumping Methods 0.000 description 5
- 101100493712 Caenorhabditis elegans bath-42 gene Proteins 0.000 description 4
- 239000000839 emulsion Substances 0.000 description 3
- 238000004945 emulsification Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 101100165186 Caenorhabditis elegans bath-34 gene Proteins 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001804 emulsifying effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/028—Means for improving or restricting lubricant flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
- F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
- F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
Definitions
- the invention relates to a vacuum rotary vane pump.
- Vacuum rotary vane pumps have a pump chamber arranged in a housing. Within the housing, a rotor is arranged eccentrically. Two or more sliders are usually connected to the rotor in slide slots. Due to the centrifugal force, the slides are printed during a rotation of the rotor against an inner wall of the pump chamber. To generate a vacuum, a suction opening of the vacuum rotary vane pump is connected to the space to be vacuumed. Due to the eccentricity of the rotor and the changing size of the chambers formed between the sliders, the medium is conveyed through an ejection channel.
- the discharge channel usually extends from the pumping chamber into an oil chamber.
- the object of the invention is to provide a vacuum rotary vane pump in which a full run of the pump chamber is avoided by structurally simple measures.
- the suction chamber is connected to an oil chamber via an ejection channel, wherein a valve device is arranged between the oil chamber and the ejection channel.
- the valve device serves to prevent backflow of medium, ie usually a mixture of oil and air, from the oil chamber into the pump chamber.
- a compensation channel is also provided which connects the discharge channel to a region in which substantially atmospheric pressure prevails.
- the compensation channel is connected to an air space of the oil chamber, wherein it is in the air space of the oil chamber is around the area of the oil chamber, which is located above the oil bath and in which essentially enriched with oil air is present.
- the medium is expelled from the pump chamber into the discharge channel, the medium, which is usually a mixture of air and oil, enters the oil chamber through the valve device.
- the medium which is usually a mixture of air and oil
- a part of the oil present in the medium is pressed into the compensation channel and thus seals it off. It is thereby ensured that no fresh air is sucked in during operation via the compensation channel, or air with ambient pressure reaches the discharge channel. If a failure of the vacuum rotary vane pump or a deliberate stop the vacuum rotary vane pump, so is sucked through the compensation channel due to the pressure prevailing in the suction chamber lower pressure air.
- the period of time to equalize the pressure in the pump chamber is very small.
- Emulsion that can reduce noise. Since the air supply is very inaccurate and thus the degree of emulsion of the oil is inaccurate, the noise can be reduced only slightly.
- Controlled and defined emulsification of the oil is also achieved by providing the equalization channel.
- the compensation channel is at least partially filled with oil, while the medium is conveyed from a region of the pumping space between two adjacent slides into the discharge channel. If the trailing slide now subsequently passes through the opening of the ejection channel connected to the suction chamber, the oil reservoir stored in the compensation channel is conveyed into this space. In this case, a small amount of air from the Aus GmbHskanai is entrained, which leads to the emulsion of the oil.
- the number and shape design of the compensation channels a good emulsification of the lubricant can be ensured depending on the lubricant used.
- the provision of at least one compensation channel according to the invention thus also leads to a reduction in noise in rotational speed limits of the vacuum rotary vane pump.
- Due to the small cross-sectional area of the at least one compensation channel ensures that only a small amount of air enters the pump.
- the compensation channel or the compensation channels is formed as a groove in the housing, wherein the groove is partially covered.
- the grooves are provided in a flange surface of the housing facing in the direction of the oil chamber, _ R _
- grooves are preferably arranged within the ⁇ isch with ⁇ öammer attached to the flange. It is particularly preferred in this case to cover the grooves by a valve tongue of the valve device, so that the single groove or the grooves are covered by a small inlet opening which is connected to the air space of the oil chamber.
- valve tongue which may also cover the grooves, the opening and closing of the ejection channel.
- the valve tongue is made of an elastic, spring-back material! educated. A particularly good sealing of the valve tongue can be achieved if the area of the valve tongue which seals off the discharge channel is located in an oil bath, so that an additional contact pressure is built up. Due to the increased tightness, a further and more efficient evacuation can be carried out.
- FIG. 1 is a schematic sectional view of a vacuum
- Fig. 2 is a schematic sectional view taken along the line II-II in Fig. 1st
- a vacuum rotary vane pump has a housing 10. Inside the housing 10, a rotor 14 is arranged in a suction chamber 12. The rotor 14 has in the illustrated embodiment, three slide slots 16, in each of which a slide 18 is arranged. The slides 18 are pressed by the rotation of the rotor 14 due to the centrifugal force against an inner wall 20 of the pump chamber. Via a suction opening 22, which is connected to the space to be evacuated, medium is sucked from the space to be evacuated into a first area 24 of the pumping chamber 12. The region 24 of the suction chamber 12 is bounded by two adjacent slides 18.
- a region 28 of the pump chamber 12 located in front of the region 24 in rotation direction 26 is reduced by the rotation of the rotor 14, so that the medium contained therein is compressed. From the region 28, the medium is conveyed through an ejection channel 30 from the suction chamber 12 in the direction of an oil chamber 32.
- the oil chamber 32 is attached to a flange 34 of the housing 10 of the rotary vacuum pump.
- the oil chamber 32 has an oil space or an oil bath 34, in which the oil supplied via the discharge channel 30, in particular together with the air taken from the space to be evacuated, collects.
- valve device 38 An outlet opening 36 of the ejection channel 30 is provided with a valve device 38.
- the valve device is an elastic valve tongue, which is fastened to the flange 34 of the housing 10, for example by means of a screw or nut 40. It is particularly preferred to arrange the vent tongue in an oil bath 42 in the region of the outlet opening 36. For this purpose, a separate oil space is formed in the oil chamber 32 by an intermediate wall 44, wherein when the oil space is filled, the oil flows in the direction of an arrow 46.
- an oil bath 42 is on a back of the valve tongue, d. H. in the direction of the oil bath 42 facing side of the Vent ⁇ lzunge, pressure exerted. As a result, the tightness of the valve device 38 is increased.
- a plurality of compensation channels 50 are provided in a flange 48, which faces in the direction of the oil chamber 32.
- the Ausgle ⁇ chskanäle 50 are formed by grooves provided in the flange 48, which are covered by the arranged in this area valve tongue 38. in this connection - / -
- a plurality of equalization channels 50 are provided, which are preferably formed in a fan shape starting from the inlet opening 52.
- an oil-enriched medium is thus conveyed from the region 28 in the direction of an arrow 56 into the discharge channel 30. Due to the pressure, the valve tongue is printed back, so that the medium in the direction of an arrow 58 in the oil bath 42 and in the oil chamber 32 passes. A portion of the oil is in this case pressed into the compensation channels 50 and thus causes a seal.
- the oil reservoir present in the channels 50 together with a small amount of air sucked through the opening 52 from the air space 54 of the oil chamber 32, is sucked into the discharge channel 30 Air is emulsifying the oil and thus a noise reduction.
- Ventil ⁇ nraum 38 avoided. Furthermore, a good seal is ensured and an influence of the valve tightness on the pumping power is avoided.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005031718A DE102005031718A1 (de) | 2005-07-07 | 2005-07-07 | Vakuum-Drehschieberpumpe |
PCT/EP2006/063748 WO2007006666A1 (de) | 2005-07-07 | 2006-06-30 | Vakuum-drehschieberpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1899608A1 true EP1899608A1 (de) | 2008-03-19 |
EP1899608B1 EP1899608B1 (de) | 2011-10-19 |
Family
ID=36942562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06763998A Active EP1899608B1 (de) | 2005-07-07 | 2006-06-30 | Vakuum-drehschieberpumpe |
Country Status (7)
Country | Link |
---|---|
US (2) | US8469684B2 (de) |
EP (1) | EP1899608B1 (de) |
JP (1) | JP4996601B2 (de) |
KR (1) | KR101291228B1 (de) |
CN (1) | CN101203677B (de) |
DE (1) | DE102005031718A1 (de) |
WO (1) | WO2007006666A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202012002882U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
DE202012002881U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
DE202012002883U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101397771B1 (ko) * | 2008-12-26 | 2014-05-20 | 히타치가세이가부시끼가이샤 | 포지티브형 감광성 수지 조성물, 레지스트 패턴의 제조 방법, 반도체 장치 및 전자 디바이스 |
IT1393277B1 (it) * | 2009-03-17 | 2012-04-12 | Vhit Spa | Pompa per vuoto rotativa con un dispositivo di disaccoppiamento dal motore di azionamento |
DE102010051610B4 (de) | 2009-11-24 | 2023-10-26 | Hanon Systems Efp Deutschland Gmbh | Vakuumpumpe |
JP2012167590A (ja) * | 2011-02-14 | 2012-09-06 | Nabtesco Automotive Corp | ケーシングの製造方法及び真空ポンプ |
CN103061820B (zh) * | 2012-12-27 | 2013-12-04 | 潍坊天瑞重工凿岩机械有限公司 | 具有内置式供油器的气动滑片式钻机 |
DE102013200410B4 (de) * | 2013-01-14 | 2017-12-07 | Schwäbische Hüttenwerke Automotive GmbH | Gaspumpe mit Druckentlastung zur Reduzierung des Anfahrdrehmoments |
GB2533621B (en) * | 2014-12-23 | 2019-04-17 | Edwards Ltd | Rotary screw vacuum pumps |
CN105526171A (zh) * | 2016-02-05 | 2016-04-27 | 无锡明治泵业有限公司 | 一种汽车真空泵降低泵腔内积油量的结构 |
CN105526174A (zh) * | 2016-02-05 | 2016-04-27 | 无锡明治泵业有限公司 | 一种用于降低真空泵泵腔内积油量的机构 |
IT201700115881A1 (it) * | 2017-10-13 | 2019-04-13 | D V P Vacuum Tech S P A | Pompa per il vuoto lubrificata |
CN112963349A (zh) * | 2021-01-22 | 2021-06-15 | 淄博真空泵厂有限公司 | 新型水环真空机组 |
JP7052101B1 (ja) * | 2021-01-27 | 2022-04-11 | 株式会社アルバック | 真空ポンプ及び真空ポンプの復圧方法 |
WO2024078678A1 (de) | 2022-10-10 | 2024-04-18 | Busch Produktions Gmbh | Verbesserte drehschieberpumpe |
Family Cites Families (26)
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US3053439A (en) * | 1957-07-24 | 1962-09-11 | Leybolds Nachfolger E | Rotary vacuum pump |
US3040973A (en) * | 1958-12-02 | 1962-06-26 | Prec Scient Company | Vacuum pump |
DE1123076B (de) | 1959-04-18 | 1962-02-01 | Leybolds Nachfolger E | Rotierende mechanische Vakuumpumpe |
US3326456A (en) * | 1965-09-13 | 1967-06-20 | Prec Scient Company | Check valve for a vacuum pump |
US3301474A (en) * | 1965-09-24 | 1967-01-31 | Bendix Balzers Vacuum Inc | Oil sealed mechanical rotary vacuum pump |
GB1140452A (en) * | 1966-03-16 | 1969-01-22 | Edwards High Vacuum Int Ltd | Improvements relating to liquid sealed mechanical vacuum pumps |
JPS4910005B1 (de) * | 1969-01-20 | 1974-03-07 | ||
JPS4911645B1 (de) * | 1969-09-22 | 1974-03-19 | ||
US3782868A (en) * | 1971-11-26 | 1974-01-01 | Componetrol | Rotary vane pump |
NL173343C (nl) | 1972-03-29 | 1984-01-02 | Philips Nv | Inrichting voor het uitlezen van een schijfvormige registratiedrager met in optische vorm gecodeerde beeld-en/of geluidssignalen. |
JPS5343209Y2 (de) | 1973-10-26 | 1978-10-18 | ||
DE2401177A1 (de) | 1974-01-11 | 1975-07-24 | Pfeiffer Vakuumtechnik | Vorrichtung zur geraeuschdaempfung bei drehschieberpumpen |
FR2383335A1 (fr) | 1977-03-08 | 1978-10-06 | Leybold Heraeus Sogev | Pompe mecanique a joint d'huile |
JPS5343209U (de) * | 1977-09-01 | 1978-04-13 | ||
JPS5676186U (de) | 1979-11-17 | 1981-06-22 | ||
JPS57172482A (en) | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Image position detecting system |
DE3616515A1 (de) * | 1986-05-16 | 1987-11-19 | Mugioiu Dipl Ing Ioan | Drehschiebervakuumpumpe |
DE4016014C2 (de) * | 1989-06-01 | 1998-02-19 | Barmag Barmer Maschf | Flügelzellen-Vakuumpumpe |
DE3933047A1 (de) * | 1989-10-04 | 1991-04-11 | Barmag Barmer Maschf | Fluegelzellen-vakuumpumpe |
DE19961317C1 (de) * | 1999-12-18 | 2001-06-28 | Bayerische Motoren Werke Ag | Vakuumpumpe, insbesondere Flügelzellenvakuumpumpe |
AU2002223455A1 (en) * | 2000-10-11 | 2002-04-22 | Luk Automobilitechnik Gmbh And Co. Kg | Vacuum pump for a servosystem in a motor vehicle |
JP2002349458A (ja) | 2001-05-22 | 2002-12-04 | Matsushita Electric Ind Co Ltd | 密閉型スクロール圧縮機 |
GB2380523A (en) | 2001-06-27 | 2003-04-09 | Luk Automobiltech Gmbh & Co Kg | Vacuum generator |
WO2004024985A1 (ja) | 2002-09-11 | 2004-03-25 | Inspire Technology Resource Management Corporation | 無電解メッキ液、及びこれを用いた無電解メッキ方法及び無電解メッキ被処理物 |
DE10393279D2 (de) | 2002-11-13 | 2005-06-02 | Luk Automobiltech Gmbh & Co Kg | Vakuumpumpe |
CN2688932Y (zh) * | 2004-01-18 | 2005-03-30 | 吴允叔 | 旋转式防回油真空/压气两用泵 |
-
2005
- 2005-07-07 DE DE102005031718A patent/DE102005031718A1/de not_active Ceased
-
2006
- 2006-06-30 WO PCT/EP2006/063748 patent/WO2007006666A1/de active Application Filing
- 2006-06-30 JP JP2008519915A patent/JP4996601B2/ja active Active
- 2006-06-30 EP EP06763998A patent/EP1899608B1/de active Active
- 2006-06-30 CN CN2006800224665A patent/CN101203677B/zh active Active
- 2006-06-30 US US11/988,408 patent/US8469684B2/en active Active
- 2006-06-30 KR KR1020077030305A patent/KR101291228B1/ko active IP Right Grant
-
2013
- 2013-05-23 US US13/900,843 patent/US9017051B2/en active Active
Non-Patent Citations (1)
Title |
---|
See references of WO2007006666A1 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202012002882U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
DE202012002881U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
DE202012002883U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
WO2013139570A2 (de) | 2012-03-22 | 2013-09-26 | Oerlikon Leybold Vacuum Gmbh | Vakuum-drehschieberpumpe |
WO2013139570A3 (de) * | 2012-03-22 | 2014-07-03 | Oerlikon Leybold Vacuum Gmbh | Vakuum-drehschieberpumpe |
Also Published As
Publication number | Publication date |
---|---|
JP2008545096A (ja) | 2008-12-11 |
KR20080024149A (ko) | 2008-03-17 |
CN101203677B (zh) | 2011-04-06 |
WO2007006666A1 (de) | 2007-01-18 |
US9017051B2 (en) | 2015-04-28 |
CN101203677A (zh) | 2008-06-18 |
US8469684B2 (en) | 2013-06-25 |
JP4996601B2 (ja) | 2012-08-08 |
US20130251578A1 (en) | 2013-09-26 |
KR101291228B1 (ko) | 2013-07-31 |
US20090297376A1 (en) | 2009-12-03 |
DE102005031718A1 (de) | 2007-01-18 |
EP1899608B1 (de) | 2011-10-19 |
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