EP1662554A4 - Belichtungsvorrichtung, belichtungsverfahren und bauelementeherstellungsverfahren - Google Patents
Belichtungsvorrichtung, belichtungsverfahren und bauelementeherstellungsverfahrenInfo
- Publication number
- EP1662554A4 EP1662554A4 EP04772275A EP04772275A EP1662554A4 EP 1662554 A4 EP1662554 A4 EP 1662554A4 EP 04772275 A EP04772275 A EP 04772275A EP 04772275 A EP04772275 A EP 04772275A EP 1662554 A4 EP1662554 A4 EP 1662554A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- liquid
- exposure
- substrate
- exposure apparatus
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003297507 | 2003-08-21 | ||
JP2004038411 | 2004-02-16 | ||
PCT/JP2004/012319 WO2005020299A1 (ja) | 2003-08-21 | 2004-08-20 | 露光装置、露光方法及びデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1662554A1 EP1662554A1 (de) | 2006-05-31 |
EP1662554A4 true EP1662554A4 (de) | 2008-01-23 |
Family
ID=34220704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04772275A Withdrawn EP1662554A4 (de) | 2003-08-21 | 2004-08-20 | Belichtungsvorrichtung, belichtungsverfahren und bauelementeherstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (4) | US8064037B2 (de) |
EP (1) | EP1662554A4 (de) |
JP (10) | JP4524670B2 (de) |
KR (11) | KR101288632B1 (de) |
WO (1) | WO2005020299A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9429495B2 (en) | 2004-06-04 | 2016-08-30 | Carl Zeiss Smt Gmbh | System for measuring the image quality of an optical imaging system |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10261775A1 (de) | 2002-12-20 | 2004-07-01 | Carl Zeiss Smt Ag | Vorrichtung zur optischen Vermessung eines Abbildungssystems |
KR101288632B1 (ko) * | 2003-08-21 | 2013-07-22 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법 및 디바이스 제조 방법 |
KR20170070264A (ko) * | 2003-09-03 | 2017-06-21 | 가부시키가이샤 니콘 | 액침 리소그래피용 유체를 제공하기 위한 장치 및 방법 |
KR101664642B1 (ko) | 2003-09-29 | 2016-10-11 | 가부시키가이샤 니콘 | 노광장치, 노광방법 및 디바이스 제조방법 |
JP4691927B2 (ja) * | 2004-08-13 | 2011-06-01 | 株式会社ニコン | 顕微鏡観察装置 |
JP4548341B2 (ja) * | 2004-02-10 | 2010-09-22 | 株式会社ニコン | 露光装置及びデバイス製造方法、メンテナンス方法及び露光方法 |
JP4973754B2 (ja) * | 2004-03-04 | 2012-07-11 | 株式会社ニコン | 露光方法及び露光装置、デバイス製造方法 |
US7898642B2 (en) | 2004-04-14 | 2011-03-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
WO2005111722A2 (en) | 2004-05-04 | 2005-11-24 | Nikon Corporation | Apparatus and method for providing fluid for immersion lithography |
JP3870207B2 (ja) * | 2004-08-05 | 2007-01-17 | キヤノン株式会社 | 液浸露光装置及びデバイス製造方法 |
SG155929A1 (en) | 2004-09-17 | 2009-10-29 | Nikon Corp | Exposure apparatus, exposure method, and method for manufacturing device |
US20090226846A1 (en) * | 2005-03-30 | 2009-09-10 | Nikon Corporation | Exposure Apparatus, Exposure Method, and Device Manufacturing Method |
EP1881520A4 (de) * | 2005-05-12 | 2010-06-02 | Nikon Corp | Optisches projektionssystem, belichtungsvorrichtung und belichtungsverfahren |
US7170583B2 (en) * | 2005-06-29 | 2007-01-30 | Asml Netherlands B.V. | Lithographic apparatus immersion damage control |
US8054445B2 (en) * | 2005-08-16 | 2011-11-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
SG170060A1 (en) * | 2005-09-09 | 2011-04-29 | Nikon Corp | Exposure apparatus, exposure method, and device production method |
US7929109B2 (en) | 2005-10-20 | 2011-04-19 | Nikon Corporation | Apparatus and method for recovering liquid droplets in immersion lithography |
US7633073B2 (en) * | 2005-11-23 | 2009-12-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2007194484A (ja) | 2006-01-20 | 2007-08-02 | Toshiba Corp | 液浸露光方法 |
US9477158B2 (en) * | 2006-04-14 | 2016-10-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101529845B1 (ko) * | 2006-08-31 | 2015-06-17 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
SG143137A1 (en) | 2006-11-13 | 2008-06-27 | Asml Netherlands Bv | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system |
JP5089143B2 (ja) * | 2006-11-20 | 2012-12-05 | キヤノン株式会社 | 液浸露光装置 |
US7692765B2 (en) | 2007-02-21 | 2010-04-06 | Asml Netherlands B.V. | Lithographic apparatus and method of removing liquid |
DE102007025340B4 (de) | 2007-05-31 | 2019-12-05 | Globalfoundries Inc. | Immersionslithograpieprozess unter Anwendung einer variablen Abtastgeschwindigkeit und Lithographiesystem |
NL1035757A1 (nl) * | 2007-08-02 | 2009-02-03 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
EP2221669A3 (de) * | 2009-02-19 | 2011-02-09 | ASML Netherlands B.V. | Lithografische Vorrichtung, Verfahren zum Steuern der Vorrichtung und Verfahren zur Herstellung eines Artikels |
NL2004305A (en) * | 2009-03-13 | 2010-09-14 | Asml Netherlands Bv | Substrate table, immersion lithographic apparatus and device manufacturing method. |
EP2264529A3 (de) * | 2009-06-16 | 2011-02-09 | ASML Netherlands B.V. | Lithografische Vorrichtung, Verfahren zum Steuern der Vorrichtung und Verfahren zur Herstellung eines Artikels unter Anwendung einer lithografischen Vorrichtung |
EP2381310B1 (de) | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Flüssigkeitshandhabungsstruktur und lithographischer Apparat |
US9568828B2 (en) * | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
CN108292101B (zh) | 2015-10-01 | 2020-07-21 | Asml荷兰有限公司 | 光刻设备及器件制造方法 |
JP7215819B2 (ja) | 2017-01-11 | 2023-01-31 | ダイキン工業株式会社 | 空気調和装置及び室内ユニット |
JP7225030B2 (ja) * | 2019-05-31 | 2023-02-20 | キヤノン株式会社 | インプリント方法、及び、物品の製造方法 |
Citations (3)
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DD221563A1 (de) * | 1983-09-14 | 1985-04-24 | Mikroelektronik Zt Forsch Tech | Immersionsobjektiv fuer die schrittweise projektionsabbildung einer maskenstruktur |
EP0605103A1 (de) * | 1992-11-27 | 1994-07-06 | Canon Kabushiki Kaisha | Projektionsvorrichtung zur Tauchbelichtung |
EP1653501A1 (de) * | 2003-07-28 | 2006-05-03 | Nikon Corporation | Belichtungsvorrichtung, bauelemente-herstellungsverfahren und steuerverfahren für eine belichtungsvorrichtung |
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-
2004
- 2004-08-20 KR KR1020127013877A patent/KR101288632B1/ko active IP Right Grant
- 2004-08-20 KR KR1020127025007A patent/KR101343655B1/ko active IP Right Grant
- 2004-08-20 KR KR1020117030494A patent/KR101239632B1/ko active IP Right Grant
- 2004-08-20 KR KR1020167009407A patent/KR101769722B1/ko active IP Right Grant
- 2004-08-20 EP EP04772275A patent/EP1662554A4/de not_active Withdrawn
- 2004-08-20 KR KR1020137031266A patent/KR101441844B1/ko active IP Right Grant
- 2004-08-20 JP JP2005513370A patent/JP4524670B2/ja not_active Expired - Fee Related
- 2004-08-20 KR KR1020067003551A patent/KR101259095B1/ko active IP Right Grant
- 2004-08-20 KR KR1020177021912A patent/KR101915921B1/ko active IP Right Grant
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DD221563A1 (de) * | 1983-09-14 | 1985-04-24 | Mikroelektronik Zt Forsch Tech | Immersionsobjektiv fuer die schrittweise projektionsabbildung einer maskenstruktur |
EP0605103A1 (de) * | 1992-11-27 | 1994-07-06 | Canon Kabushiki Kaisha | Projektionsvorrichtung zur Tauchbelichtung |
EP1653501A1 (de) * | 2003-07-28 | 2006-05-03 | Nikon Corporation | Belichtungsvorrichtung, bauelemente-herstellungsverfahren und steuerverfahren für eine belichtungsvorrichtung |
Non-Patent Citations (1)
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Cited By (1)
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US9429495B2 (en) | 2004-06-04 | 2016-08-30 | Carl Zeiss Smt Gmbh | System for measuring the image quality of an optical imaging system |
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