EP1589227A1 - Mehrstufige Vakuumpumpe und Pumpgerät mit einer solchen Pumpe - Google Patents

Mehrstufige Vakuumpumpe und Pumpgerät mit einer solchen Pumpe Download PDF

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Publication number
EP1589227A1
EP1589227A1 EP05290810A EP05290810A EP1589227A1 EP 1589227 A1 EP1589227 A1 EP 1589227A1 EP 05290810 A EP05290810 A EP 05290810A EP 05290810 A EP05290810 A EP 05290810A EP 1589227 A1 EP1589227 A1 EP 1589227A1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
stages
vacuum
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05290810A
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English (en)
French (fr)
Inventor
Pascal Durand
Jean-François Vuillermoz
Patrick Pilotti
Jean-François Grosdaillon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1589227A1 publication Critical patent/EP1589227A1/de
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the present invention relates to a multi-stage vacuum pump. She further extends to a pumping installation comprising such a pump.
  • a vacuum pump is a device capable of extracting and discharging gaseous molecules in order to lower the pressure inside a chamber.
  • the coarse vacuum is defined as pressures greater than about 1 mbar.
  • a so-called primary pump is used, such as a vane pump.
  • a mean vacuum corresponds to pressures between 1mbar and 10 -3 mbar.
  • a high vacuum is obtained for pressures of less than about 10 -3 mbar and up to about 10 -7 mbar, beyond it is referred to as ulta-vacuum.
  • a secondary pump such as a turbomolecular pump, is coupled to a primary pump.
  • multi-stage pump When several pumping stages of the same type are coupled in series in the same pump, it is called multi-stage pump.
  • a two-stage vacuum pump in common use has two stages.
  • the first stage in the direction of the flow or suction stage (usually called “low pressure stage” because it is the stage that generates the lowest pressure) is large enough to ensure a maximum pumping rate.
  • the second stage in the flow direction or discharge stage (usually called the “high pressure stage” because it is the stage that operates at the highest pressure) is generally smaller in size and less flow.
  • the invention relates in particular to an installation comprising at least two rooms requiring a different level of vacuum and each connected to a pumping unit. Due to the presence of several pumps with characteristics, such an installation proves to be particularly expensive in terms of investment, maintenance and consumption Energy. It is therefore clear the need for a facility requiring a number fewer pumps for equivalent performance and lower cost than currently known installations.
  • document US Pat. No. 5,733,104 describes an installation comprising four successive chambers in which vacuum is required.
  • the last three chambers are connected to a secondary pumping unit comprising two turbomolecular stages (multi-stage turbomolecular pump) and a molecular stage (molecular pump).
  • the two turbomolecular stages have their inlet ports respectively connected to the last two chambers of the installation, the second stage being also connected to the discharge of the first stage.
  • the molecular stage is connected to the discharge of the second turbomolecular stage and has an inlet connected to the third chamber.
  • These stages have their rotors enslaved to a common drive shaft, itself driven by a single motor and a single control member.
  • the first chamber is connected to a dry vacuum pump, like a diaphragm pump.
  • the dry primary pump is installed in series with the secondary pumping unit and connected by its suction port to the discharge of the molecular stage.
  • a conduit for pumping the first chamber is connected to the same orifice.
  • US-3,668,393 shows an installation, for example an electron microscope, comprising on the one hand an enclosure in which a high level of vacuum is required and on the other hand additional compartments under vacuum.
  • the installation also comprises a pumping unit comprising a turbomolecular assembly (turbomolecular group arrangement) and a two-stage primary pump.
  • the turbomolecular assembly consists of a main section (main section) connected to the enclosure and an auxiliary stage (auxiliary section) connected to the additional compartments.
  • the two stages are contained in the same housing and are connected by a common transmission shaft to a single motor; however, a partition with relative sealing separates the ups and downs of the two pumps that do not communicate with each other, each being forced to a different stage of the associated pump.
  • the primary pump comprises a high pressure stage whose inlet is connected to the output of the main pump of the turbomolecular assembly and whose discharge orifice continuously drives the gases to the low pressure stage of the pump. primary.
  • the low pressure stage is then connected to the high pressure stage by a transfer channel on which the output of the auxiliary pump is connected via a valve.
  • the flow of the low-pressure stage of the primary pump is mixed with that of the auxiliary turbomolecular pump to the high-pressure stage thereof, and then the gases pumped by these two channels are discharged to the outside.
  • the present invention aims to improve the facilities of the art previous, by proposing a multi-stage vacuum pump able to ensure both the primary pump function to obtain a coarse vacuum in a chamber, and simultaneously maintain a vacuum at lower pressure, such as at discharge of a secondary pump.
  • the object of the present invention is therefore a multi-stage vacuum pump having at least a first low pressure stage and at least a second high pressure stage at least one of said stages comprising at least one orifice for the admission of gases to be pumped (usually called “suction"), and one to at least one of said stages having at least one opening open to the outside intended for the evacuation of the pumped gases (usually called repression), said first and second communicating stages, to ensure the passage of gas between said first stage and said second stage, characterized in that said first stage works at a lower rate than said second stage.
  • the solution therefore consists in inverting the respective flow rates of the low and high pressure pumping stages compared to pumps currently known.
  • the first stage has a cyclic volume generated lower than that of the second floor.
  • “Generated cyclic volume” means the flow rate of a pump relative to the volume of its components, because the flow rate varies with the size of the volume transferred per turn (geometric dimension of elements) and with velocity of rotation.
  • the speeds of rotation are equal and a longer length translates a cyclic volume generated larger if the diameters are identical, or reciprocally equal lengths with different diameters can generate flow rates different.
  • a first low pressure stage is used low flow, for example to suck the gases from the discharge of a secondary pump, and a second high pressure stage whose flow is higher and which has a gas inlet, for example to suck gas from a room requiring a rough vacuum like a loading chamber of an installation (or "Load Lock").
  • the first and second floors are physically inverted, so the flows are thus changed.
  • the first stage or "low pressure" stage thus has a cyclic volume generated reduced which destines it more particularly to pumping at the repression of the secondary pump.
  • the second stage or repression stage sees its cyclic volume generated increase, and can then be used for aspiration to high flow through an additional intake port.
  • the invention applies in particular to volumetric pumps.
  • a volume filled with gas is cyclically isolated from its inlet point and transferred to a discharge point after a compression operation.
  • To increase the volumetric flow rate of a pump it is necessary, all other dimensions being equal, to increase the cyclic volume generated by the pump or its speed of rotation. Of course, this is not the case for the small flow pumps generated for which the stages can have the same dimension.
  • those rotary rotary ubrified pallets, called "oil seal" are multi-stage and used industrially today. They comprise a reserve of liquid oil in the form of a tank which generally surrounds the functional part of the pump, the stages, and a device for introducing the oil into the compression chamber.
  • This oil is multiple: in addition to its usual role of lubricant, it removes the heat of compression of the pump, it minimizes the dead volumes and constitutes a seal between the mechanical parts in relative movement. Without oil seal, the internal leaks at each stage are much higher and the compression ratio is reduced accordingly. By oil sealing of moving parts one can obtain a maximum compression ratio of 105 in one stage. A minimum leakage rate is the guarantee of a low limit pressure.
  • a prior art vane pump is usually equipped with an orifice for suction of the gaseous molecules from the outside which is located at the "low pressure” stage. The "high pressure" stage has its suction connected to the discharge of the "low pressure” stage and comprises an outlet towards the outside of the compressed compressed gases.
  • the high pressure stage is also defined as the stage in which the oil is introduced from the tank maintained at a pressure close to the atmosphere.
  • the oil which is in regular contact with the external atmosphere, absorbs air and, when it is introduced into the "high pressure” stage, it is released into the vacuum volume.
  • the air is re-evacuated during the discharge cycle and, on the other hand, it partially migrates in the form of an internal leak towards the suction of the "high pressure” stage.
  • the "low pressure” stage is supplied from the "high pressure” stage to oil already degassed therein. The suction pressure is then in the range of values of the high vacuum, and the lowest working pressures at the limit of the medium vacuum / high vacuum domains.
  • the floors retain the traditional position existing on art pumps previous but the role of the stages is reversed.
  • the oil is injected into the second floor, the one with the largest flow.
  • the second floor is therefore the floor "high pressure”.
  • the degassed oil then passes from the high flow stage to the lower flow or "low pressure” stage.
  • the transfer channel is modified accordingly to transfer the gas towards the suction of the "high pressure” stage.
  • An advantage of the invention is that when using the "low” stage pressure "to a steady flow at low pressure as to the discharge of a turbomolecular pump for example, the discharge pressure of the stage “low pressure” will be lower than with a pump of the prior art. upstairs “high pressure” having a higher generated flow rate, the flow discharged by the stage “low pressure” will be released in a larger volume so at a pressure less. In case of cyclic pumping of an airlock by the "high pressure” stage, the volume of the floor and its generated flow being larger, the rise of pressure will be less and time to lower it too.
  • the invention can also be applied to other types of vacuum pumps volumetric like a diaphragm pump, rotating or oscillating piston. It can also be applied to a dynamic compression pump as a Roots multi-stage dry pump. In this case we do not meet any more lubrication problem.
  • the present invention also relates to a vacuum system comprising such a multi-stage pump and further comprising at least one turbomolecular pump whose discharge port is connected to the multi-stage pump.
  • the installation comprises at least two chambers.
  • a first chamber is connected to the multi-stage pump according to the invention, and a second chamber is connected to a turbomolecular pump whose discharge port is connected to the multi-stage pump.
  • the gas inlet of the first low flow stage is connected to the discharge of the turbomolecular pump, and the gas inlet of the second higher flow stage is directly connected to the first chamber.
  • mass spectrometry devices with continuous flow introduction and the CD / DVD replication applications.
  • the devices of mass spectrometry have a coarse pressure inlet chamber and chambers requiring a high vacuum equipped with secondary pumps.
  • Applications of CD / DVD replication include process chambers almost continuously under a high vacuum and whose pressure is much lower than the mbar, and transfer chambers and loading of substrates (or "Load Lock") that pass cyclically from atmospheric pressure to a mean vacuum of the order of a few mbar.
  • FIG. 1 shows a two-stage rotating rotary vane vacuum pump lubricated 1 according to the invention.
  • the pump 1 comprises in known manner a first so-called “low pressure” stage 2 which extracts gas molecules from an enclosure where the vacuum is required, and compresses them before sending them to a second so-called “high pressure” stage 3 in which gas molecules are compressed at a higher pressure before being expelled to the outside.
  • the stages 2, 3 are of similar structure, and each comprise a rotor 4, 5 integral with a mechanical energy transmission shaft provided by a motor (not shown) and having externally a cylindrical surface of a generator parallel to the axis of the tree.
  • the rotor 4, 5 is mounted eccentrically and tangentially inside a stator 6, 7.
  • the low-pressure "low-pressure” stage 2 comprises an orifice 11 allowing admission of the gas to be sucked up, coming for example from the discharge of a secondary pump.
  • the "high pressure" stage 3 of higher flow comprises an orifice 12 for admitting gas to be sucked, for example from a loading chamber and an orifice 13 for the discharge to the outside of the gas to be discharged.
  • Each stage may further comprise openings provided with evacuation valves (not shown).
  • the rotor assembly 4, 5 and stator 6, 7 of each stage is placed in a tank 14 full of oil serving as reservoir 15.
  • the liquid oil is contained in this tank 15 and introduced into the "high pressure” stage 3 by a pipe 16.
  • the Oil circulation can be natural or forced by an oil pump. During a cycle of operation, the oil is transferred from the "high" stage pressure "3 upstairs” low pressure "2 through passage 18.
  • the plant according to the present invention shown in FIG. 2 comprises two chambers 20, 21.
  • the outlet 22 of the first chamber 20 is connected to the intake port 12 of the "high pressure" stage 3 of the pump 1 according to the invention of higher flow, so having the largest pumping volume.
  • the outlet 23 of the next chamber 21 is connected to a pump turbomolecular 24 whose discharge port 25 is itself connected to the inlet port 13 of the "low pressure" stage 2 of the pump 1 according to the invention of lower flow.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
  • Rotary Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP05290810A 2004-04-21 2005-04-13 Mehrstufige Vakuumpumpe und Pumpgerät mit einer solchen Pumpe Withdrawn EP1589227A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0450741 2004-04-21
FR0450741A FR2869369B1 (fr) 2004-04-21 2004-04-21 Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe

Publications (1)

Publication Number Publication Date
EP1589227A1 true EP1589227A1 (de) 2005-10-26

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EP05290810A Withdrawn EP1589227A1 (de) 2004-04-21 2005-04-13 Mehrstufige Vakuumpumpe und Pumpgerät mit einer solchen Pumpe

Country Status (4)

Country Link
US (1) US7670119B2 (de)
EP (1) EP1589227A1 (de)
JP (1) JP2005307978A (de)
FR (1) FR2869369B1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161318B1 (de) * 2014-06-27 2020-02-05 Ateliers Busch S.A. Verfahren zum pumpen in einem system aus vakuumpumpen und system aus vakuumpumpen
FR3112578A3 (fr) * 2020-07-20 2022-01-21 Pfeiffer Vacuum Pompe à vide à palettes, détecteur et installation de lyophilisation

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080226480A1 (en) * 2007-03-15 2008-09-18 Ion Metrics, Inc. Multi-Stage Trochoidal Vacuum Pump
DE102010019635B4 (de) * 2010-05-06 2014-04-03 Multivac Sepp Haggenmüller Gmbh & Co. Kg Siegelstation für eine Verpackungsmaschine
EP2946082B1 (de) * 2013-01-18 2019-11-06 United Technologies Corporation Ölpumpentransferplatte
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
CN106540470A (zh) * 2016-11-02 2017-03-29 佛山市龙眼智能制造科技有限公司 一种高效节能集中烘料的真空***及其工作方法
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
CN219262678U (zh) * 2020-06-18 2023-06-27 米沃奇电动工具公司 具有电磁阀的真空泵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür

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US3116872A (en) * 1959-05-18 1964-01-07 Bendix Balzers Vacuum Inc Gas ballast pumps
JPS5237214A (en) * 1975-09-19 1977-03-23 Hitachi Ltd Multi-stage screw compressor
JPS6223501A (ja) * 1985-07-24 1987-01-31 Kobe Steel Ltd サイドストリ−ム形スクリユ−膨張機
JPH03271578A (ja) * 1990-03-20 1991-12-03 Mitsubishi Motors Corp 二段ベーンポンプ
JPH0436091A (ja) * 1990-05-29 1992-02-06 Shimadzu Corp 油回転真空ポンプ
JPH0726625B2 (ja) * 1990-12-12 1995-03-29 株式会社荏原製作所 ２段スクリュー真空ポンプ
JPH0518382A (ja) * 1991-07-10 1993-01-26 Ebara Corp スクリユー形真空ポンプ
JPH0658278A (ja) * 1992-08-05 1994-03-01 Ebara Corp 多段スクリュー式真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161318B1 (de) * 2014-06-27 2020-02-05 Ateliers Busch S.A. Verfahren zum pumpen in einem system aus vakuumpumpen und system aus vakuumpumpen
FR3112578A3 (fr) * 2020-07-20 2022-01-21 Pfeiffer Vacuum Pompe à vide à palettes, détecteur et installation de lyophilisation

Also Published As

Publication number Publication date
US7670119B2 (en) 2010-03-02
US20050238502A1 (en) 2005-10-27
JP2005307978A (ja) 2005-11-04
FR2869369B1 (fr) 2006-07-21
FR2869369A1 (fr) 2005-10-28

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