EP1206641B1 - Pompe a diaphragme - Google Patents

Pompe a diaphragme Download PDF

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Publication number
EP1206641B1
EP1206641B1 EP00949341A EP00949341A EP1206641B1 EP 1206641 B1 EP1206641 B1 EP 1206641B1 EP 00949341 A EP00949341 A EP 00949341A EP 00949341 A EP00949341 A EP 00949341A EP 1206641 B1 EP1206641 B1 EP 1206641B1
Authority
EP
European Patent Office
Prior art keywords
membrane
pump
working
diaphragm
additional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00949341A
Other languages
German (de)
English (en)
Other versions
EP1206641A1 (fr
Inventor
Erwin Hauser
Erich Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
Original Assignee
KNF Neuberger GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Publication of EP1206641A1 publication Critical patent/EP1206641A1/fr
Application granted granted Critical
Publication of EP1206641B1 publication Critical patent/EP1206641B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F04B43/009—Special features systems, control, safety measures leakage control; pump systems with two flexible members; between the actuating element and the pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms

Definitions

  • the invention relates to a diaphragm pump with a, a delivery chamber limiting working membrane, with one on the side facing away from the pumping chamber the Working diaphragm arranged additional membrane, with one between the working membrane and the Additional membrane provided membrane space as well as with a pump drive for one same-direction oscillating movement of the working and the additional membrane, wherein the membrane space with at least one suction channel for Pressure relief of the membrane gap connected is.
  • the membrane Diaphragm pump one strives to have an optimum between To achieve rigidity and elasticity. While a high elasticity of the membrane required is as low as the membrane voltages it is possible to keep it possible at the same time also strive for a high rigidity, so that the Membrane under the membrane upper and underside occurring differential pressure load does not buckle and so the Creation space volume reduced or vice versa, the dead space volume increased.
  • crank chamber can also be used to outgass the Lead the bearing oil in the connecting rod bearing, so that the ball bearing may run dry. Since the bearing grease in the crankcase over the connecting line vacuum side in the flow can reach, there is also the risk that the fluid is contaminated.
  • this prior art reciprocating pump has a reciprocating piston, are in this prior art pump with a elastic membrane at pressure differential loads not occurring problems. Rather, this can be previously known reciprocating pump, the gap between the Lifting piston or its associated sealing sleeve on the one hand and the sealing membrane on the other hand, especially in the Start this prior art pumping device, soon as far Be evacuated that an undesirable overflow of Displacement of the reciprocating pump in the space deleted or but largely avoided and the entire Pumping device when starting therefore faster ready for use is.
  • FR-A 1 292 254 discloses a membrane compressor known, which has a working diaphragm and an additional diaphragm has, which delimit between them a membrane gap.
  • the previously known membrane compressor has a pressure channel on, the membrane gap with the pressure side of Compressor connects. With the help of the pressure channel is in Membrane gap creates a pressure that the Working membrane should support and between the Atmospheric pressure and the discharge pressure is.
  • the membrane gap over the at least one suction channel with the Suction side of the diaphragm pump pneumatically connected.
  • the membrane gap evacuated continuously, such that on the top of the working diaphragm and on the bottom the working diaphragm during the suction phase always the same Pressures prevail. Because in this phase thus no Pressure difference between membrane top and bottom of the Working diaphragm works, the working diaphragm can not work Bumping direction of the pump room and an undesirable Reduction of the pump chamber volume is avoided.
  • the larger pumping chamber volume can increase the pumping speed in the Suction phase can be increased. This has a particularly positive effect in pressure ranges or pumping ranges, which are close to the final pressure. The pressure differences only act on the additional membrane, where they are not negative Influence on the pumping speed of the diaphragm pump can have.
  • the diaphragm pump according to the invention is the first stage of a multistage, in particular a two-stage pump or Pumping system forms, the advantage can be achieved that in the ejection phase the pressure on the membrane top of the Working diaphragm only slightly increases, because in two-stage Diaphragm pumps is the transfer pressure of the first stage well below atmospheric pressure.
  • this working diaphragm can be highly elastic be designed without the mentioned “Bulging" of this membrane is to be feared.
  • the Membrane stresses clearly, which in turn a significant Increasing the membrane life brings with it.
  • the efficiency of Improve pump and a by buckling the diaphragm conditional evacuation delay is avoided.
  • the diaphragm pump according to the invention can be increased, whereby a further increase in absorbency even at can be achieved approximately the same dimensions.
  • the membrane diaphragm of the working diaphragm no Atmospheric pressure acts and the working diaphragm therefore not more noisily in the pump head at the delivery chamber strikes in the membrane pump according to the invention the Noise development significantly reduces what is especially with such diaphragm pumps, which acts as Suction pumps in medical technology should be used.
  • a particularly simple embodiment according to the invention provides that the membrane space on the at least a suction channel parallel to the delivery chamber with the Pump inlet is pneumatically connected. At this Embodiment sucks the pump on the one hand over the Pump inlet and on the other hand via the suction from the Membrane gap on.
  • a development according to the invention in contrast, provides that the pump inlet is pneumatically connected via the membrane gap and the suction channel with the delivery chamber.
  • the intake path in the pump interior runs from the pump inlet via the membrane interspace, the at least one suction channel and the inlet valve into the delivery chamber.
  • the Ansaugfilter- and / or Noise damping element made of an elastic material manufactured and on the one hand by the working membrane as well on the other hand is acted upon by the additional membrane.
  • the Ansaugfilter- and / or noise damping element the membrane gap substantially fills.
  • the suction filter in the membrane gap and / or noise damping element is with a particular associated with low manufacturing overhead when considered as a open - pored and between the working membrane and the Additional membrane arranged foam element designed is.
  • the working membrane is a dimensionally stable Associated with membrane support, which is connected to a connecting rod of the Pump drive is held and the working diaphragm on the Membrane back at least in a central area conformed supports.
  • Working membrane and the additional membrane to a double membrane are integrally connected to each other. That's it appropriate if the working membrane and the additional membrane integral with each other via a central intermediate piece are connected and if this intermediate piece at its the Pumping chamber side facing away from an undercut Mounting hole for insertion of a shape-matched and connected to a connecting rod of the pump drive Has fastening parts.
  • the conveyor chamber side Diaphragm upper side to the contour of the pump head Delivery chamber is adapted in top dead center of the pump.
  • the diaphragm pumps 101, 102, shown in FIGS. 1 to 5, 103, 104 and 105 have in contrast to a highly elastic, a delivery chamber 2 limiting Working membrane 1 also an additional membrane 3, wherein between the working diaphragm 1 and the additional diaphragm 3 Membrane space 4 is provided.
  • the in their outer Ring zones in the pump housing 5 firmly clamped membranes 1, 3 engage in their central area on the connecting rod one Pump drive on, the working diaphragm 1 and the Additional membrane 3 between a top dead center and a bottom dead center in the same direction oscillating back and forth emotional.
  • the connecting rod of the pump drive is here only the Connecting rod 6 shown.
  • Figs. 1 to 5 which is in the Pump 101, 102, 103, 104 and 105 provided diaphragm gap 4 via a suction channel 7 with the suction side connected to these diaphragm pumps.
  • Figs. 1, 3 and 5 illustrated diaphragm pumps 101, 103 and 105 of Membrane space 4 via the suction channel 7 parallel to Delivery chamber 2 pneumatically connected to the pump inlet 8.
  • the pump inlet 8 in contrast via the membrane gap 4 and the suction channel 7 with the delivery chamber 2 pneumatically connected.
  • the membrane gap 4 is continuous evacuated, such that on top of the working diaphragm 1 and on the underside of the working diaphragm 1 during the Suction phase always prevail the same pressures. Because in the Suction phase thus no pressure difference between membrane top and -unterseite the working diaphragm 1 acts, the Working diaphragm 1 not in the direction of the delivery chamber. 2 bulge and an undesirable reduction of the Creator volume is avoided. By the bigger one Pump chamber volume can increase the pumping speed in the intake phase increase.
  • Fig. 4 it is shown that in the membrane space 4 of the Diaphragm pump 104 a Ansaugfilter- and Noise damping element 9 is provided.
  • This Ansaugfilter- and noise damping element 9 is made of a elastic material, for example, from an open-pore Foam is made and on the one hand by the Working membrane 1 and on the other hand of the additional membrane 3 applied.
  • This the membrane gap 4 substantially filling intake and noise damping element 9 is ring-shaped, wherein the annular opening 10 of the the membranes 1, 3 interconnecting connecting rod 6 of the Pleuels is interspersed.
  • Ansaugfilter- and noise damping element 9 Parts can be omitted and space saved and the Diaphragm pump 104 are made particularly compact.
  • Fig. 5 it is shown that the working membrane 1 of the Membrane pump 105 a dimensionally stable membrane support 11th is assigned, which is held at the connecting rod 6 of the connecting rod. While in the single-stage diaphragm pumps 101 to 105 according to 1 to 5 of the membrane gap 4 in the suction phase is specifically used to increase the pumping chamber volume, will be in the ejection phase when the pressure on the membrane top continuously towards the atmospheric pressure increases, the diaphragm support 11 is used, which the Working diaphragm 1 of the diaphragm pump 105 on the back of the diaphragm at least in a central area form-adapted supported. As a result, the dead space volume is kept small.
  • the membranes 1, 3 in the region of a central Holding opening 12, 13 at the connecting rod 6 of the connecting rod fixed clamped. Not only the additional membrane 3, but also the Working diaphragm 1 of the pumps 101, 102, 104 and 105 is as Flat membrane designed.
  • the working diaphragm 1 of Fig. 3 shown Diaphragm pump 103 is in contrast as a molding membrane educated.
  • the working membrane 1 is with the additional membrane. 3 the diaphragm pump 103 via a central intermediate piece 14 to a double membrane 15 integrally connected.
  • Fig. 3 becomes clear, has the intermediate piece 14 of the double diaphragm 15th on its side facing away from the delivery chamber 2 a undercut mounting hole in the one mating and with the connecting rod of the pump drive connected fastening part 16 is inserted.
  • the Diaphragm pumps 101, 102, 103, 104 and 105 by a high Absorbency without bulging in the intake phase this comparatively highly elastic working membrane 1 to would be afraid.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Diaphragms And Bellows (AREA)

Claims (11)

  1. Pompe à vide à diaphragme (101, 102, 103, 104 105) comprenant un diaphragme de travail (1) délimitant une chambre d'alimentation (2), comprenant un diaphragme additionnel (3) disposé sur le côté du diaphragme de travail (1) opposé à la chambre d'alimentation (2), comprenant un espacement de diaphragme (4) prévu entre le diaphragme de travail (1) et le diaphragme additionnel (3) et comprenant également un entraínement de pompe pour un déplacement oscillatoire dans le même sens des diaphragmes de travail et additionnel (1, 3), la pompe à diaphragme formant le premier étage d'une pompe à plusieurs étages ou d'une installation de pompage et l'espacement de diaphragme (4) destiné à évacuer et à compenser les rapports de pression étant relié d'une part dans l'espacement de diaphragme (4) et d'autre part dans la chambre d'alimentation (2) par au moins un canal d'aspiration au côté d'aspiration de cette pompe à vide à diaphragme et le diaphragme de travail (1) étant étiré dans les points morts haut et bas de leur déplacement oscillatoire.
  2. Pompe à diaphragme (101, 103, 105) selon la revendication 1, caractérisée en ce que l'espacement de diaphragme (2) est relié de façon pneumatique à l'entrée de pompe (8) par au moins un canal d'aspiration (7) parallèlement à la chambre d'alimentation (2).
  3. Pompe à diaphragme (102, 104) selon la revendication 1, caractérisée en ce que l'entrée de pompe (8) est reliée de façon pneumatique par l'espacement de diaphragme (4) et le canal d'aspiration (79) à la chambre d'alimentation (2).
  4. Pompe à diaphragme (104) selon la revendication 3, caractérisée en ce qu'au moins un filtre aspirant et/ou un élément d'amortissement des bruits (9) sont prévus dans l'espacement de diaphragme (4).
  5. Pompe à diaphragme selon la revendication 4, caractérisée en ce que l'élément de filtre aspirant et/ou d'amortissement des bruits (9) est fabriqué en matériau élastique et est sollicité d'une part par le diaphragme de travail (1) et d'autre part par le diaphragme additionnel (3).
  6. Pompe à diaphragme selon la revendication 4 ou 5, caractérisée en ce que l'élément de filtre aspirant et/ou d'amortissement des bruits remplit sensiblement complètement l'espacement de diaphragme (4).
  7. Pompe à diaphragme selon l'une quelconque des revendications 4 à 6, caractérisée en ce que l'élément de filtre aspirant et/ou d'amortissement des bruits (9) est conçu comme un élément en mousse synthétique à pores ouverts et disposé entre le diaphragme de travail (1) et le diaphragme additionnel (3).
  8. Pompe à diaphragme (105) selon l'une quelconque des revendications 1 à 7, caractérisée en ce qu'au diaphragme de travail (1) est associé un support de diaphragme (11) indéformable, qui est fixé à une bielle de l'entraínement de pompe et qui supporte le diaphragme de travail (1) sur le côté arrière du diaphragme au moins dans une zone centrale en s'adaptant à sa forme.
  9. Pompe de diaphragme (103) selon l'une quelconque des revendications 1 à 8, caractérisée en ce que le diaphragme de travail (1) et le diaphragme additionnel (3) sont reliés l'un à l'autre en une seule pièce pour former un diaphragme double (15).
  10. Pompe à diaphragme (103) selon la revendication 9, caractérisée en ce que le diaphragme de travail (1) et le diaphragme additionnel (3) sont reliés l'un à l'autre en une seule pièce par un raccord central (11) et en ce que ce raccord (11) comprend sur son côté opposé à la chambre d'alimentation (2) une ouverture de fixation en contre-dépouille destinée à insérer un élément de fixation (16) adapté à la forme et relié à une bielle de l'entraínement de pompe.
  11. Pompe à diaphragme selon l'une quelconque des revendications 1 à 10, caractérisée en ce que le diaphragme de travail (1) est conçu comme un diaphragme profilé.
EP00949341A 1999-08-26 2000-07-14 Pompe a diaphragme Expired - Lifetime EP1206641B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19940498A DE19940498A1 (de) 1999-08-26 1999-08-26 Membranpumpe
DE19940498 1999-08-26
PCT/EP2000/006727 WO2001014744A1 (fr) 1999-08-26 2000-07-14 Pompe a diaphragme

Publications (2)

Publication Number Publication Date
EP1206641A1 EP1206641A1 (fr) 2002-05-22
EP1206641B1 true EP1206641B1 (fr) 2005-08-17

Family

ID=7919682

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00949341A Expired - Lifetime EP1206641B1 (fr) 1999-08-26 2000-07-14 Pompe a diaphragme

Country Status (6)

Country Link
US (1) US6796215B1 (fr)
EP (1) EP1206641B1 (fr)
JP (1) JP4755374B2 (fr)
DE (2) DE19940498A1 (fr)
TW (1) TW482873B (fr)
WO (1) WO2001014744A1 (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2388163A (en) * 2001-05-09 2003-11-05 David R Marshall Cooling a flexible pump seal
DE10357320A1 (de) * 2003-12-05 2005-06-30 Crane Process Flow Technologies Gmbh Schlauchpumpe mit Vorrichtung zur Vakuumerzeugung
DE10360067A1 (de) * 2003-12-20 2005-07-21 Leybold Vakuum Gmbh Membrankompressor
US8197231B2 (en) 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
US20100221131A1 (en) * 2005-09-27 2010-09-02 Minoru Sangyo Co., Ltd Pump
US20080232987A1 (en) * 2006-11-28 2008-09-25 S.A.M. Amstar Diaphragm circulator
DE102007005223A1 (de) * 2006-02-10 2007-09-13 Continental Teves Ag & Co. Ohg Motor-Pumpenaggregat
US7562617B2 (en) * 2006-05-15 2009-07-21 Centipede Systems, Inc. Mounting apparatus
CN100513783C (zh) * 2006-06-21 2009-07-15 王明显 多级隔膜泵
NL1033204C2 (nl) * 2007-01-10 2008-07-11 Weir Minerals Netherlands Bv Enkelwerkende verdringerinrichting.
JP4248003B2 (ja) * 2007-03-27 2009-04-02 岡山県 ポンプ
CN101372957B (zh) * 2007-08-24 2012-06-20 张坤林 可防卡死的气泵
WO2010069320A2 (fr) 2008-12-19 2010-06-24 Stobbe Tech A/S Installation de produits biopharmaceutiques dans une colonne
US8017409B2 (en) 2009-05-29 2011-09-13 Ecolab Usa Inc. Microflow analytical system
GB2475879B (en) * 2009-12-03 2012-02-15 Power Ramps Ltd Seal
CH702436A1 (fr) * 2009-12-23 2011-06-30 Jean-Denis Rochat Pompe doseuse a usage medical.
JP5820145B2 (ja) * 2011-05-20 2015-11-24 応研精工株式会社 ダイヤフラムポンプ
DE102011107580B4 (de) 2011-07-16 2015-02-05 Festo Ag & Co. Kg Faltenbalg und Verfahren zur Herstellung eines Faltenbalges
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
KR101374048B1 (ko) 2012-06-14 2014-03-13 한국과학기술연구원 유체 펌핑 장치, 이를 이용하는 연료전지 장치 및 연료 가스 재순환 방법
DE102016201182A1 (de) 2016-01-27 2017-07-27 Siemens Aktiengesellschaft Membranpumpe mit Staubansaugung von unten
KR101746830B1 (ko) 2016-03-11 2017-06-15 주식회사 나래나노텍 개선된 약액 가압 장치, 및 이를 구비한 약액 공급 장치
DE102016216012A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Membranpumpe mit porösem, gewölbtem Aluminiumfilter
DE102016216016A1 (de) 2016-08-25 2018-03-15 Siemens Aktiengesellschaft Herstellung eines porösen Aluminiumfilters für eine Membranpumpe
DE102016216006A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Doppelmembran für eine Staubpumpe
RU197740U1 (ru) * 2020-03-13 2020-05-25 Общество с ограниченной ответственностью "Завод дозировочной техники "Ареопаг" Насосная головка мембранного насоса
CN111537280B (zh) * 2020-04-09 2023-04-07 南京万德斯环保科技股份有限公司 一种膜隔非标管抽液***及方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE337271C (de) * 1918-02-05 1921-05-27 Leybold S Nachfolger E Membranpumpe mit mehreren Membranen
US2414806A (en) * 1942-09-07 1947-01-28 Mining Process & Patent Co Diaphragm pump
US3027848A (en) * 1959-07-13 1962-04-03 Gen Motors Corp Diaphragm pump
FR1292254A (fr) * 1961-03-20 1962-05-04 Dba Sa Compresseur à membrane
US3387566A (en) * 1966-01-10 1968-06-11 Ici Australia Ltd Fluid operated prime mover
GB1214809A (en) * 1967-02-08 1970-12-02 Dunlop Co Ltd Improvements in or relating to diaphragm pumps
US3692437A (en) * 1970-01-29 1972-09-19 Itt Pump
DE2212322A1 (de) * 1972-03-15 1973-09-20 Erich Becker Membranpumpe zur druck- oder vakuumerzeugung
GB1418993A (en) * 1972-03-08 1975-12-24 Becker E Diaphragm pump particularly for the generation of vacuum
DE2408119A1 (de) * 1973-02-21 1974-08-22 Girling Ltd Vakuum-bremsanlage fuer ein kraftfahrzeug
FR2273961A1 (fr) * 1974-06-06 1976-01-02 Venditti Bernard Dispositif d'etancheite pour pompes alternatives ou analogues
DE2502566C3 (de) * 1975-01-23 1980-03-13 Erich 7812 Bad Krozingen Becker Membranpumpe
US4086036A (en) * 1976-05-17 1978-04-25 Cole-Parmer Instrument Company Diaphragm pump
US4286932A (en) * 1978-02-14 1981-09-01 Nippondenso Co., Ltd. Diaphragm pump
JPS54134902U (fr) * 1978-03-13 1979-09-19
JPH0788815B2 (ja) * 1984-08-25 1995-09-27 アイシン精機株式会社 ダイアフラム式バキユ−ムポンプ
JPS61244884A (ja) * 1985-04-24 1986-10-31 Hitachi Ltd バキユ−ムポンプ
JPS63219886A (ja) * 1987-03-09 1988-09-13 Teijin Ltd 真空ポンプ及びそれを用いた酸素富化装置
JPH032480A (ja) * 1989-05-31 1991-01-08 Matsushita Electric Ind Co Ltd 宅配ロッカーシステム
DE4026670C2 (de) * 1990-08-23 1995-06-22 Alcatel Hochvakuumtechnik Gmbh Mechanische Vakuumpumpe
EP0626516B1 (fr) 1993-04-15 1997-06-04 KNF Neuberger GmbH Dispositif de pompe à vide sans lubrifiant
DE9305554U1 (de) * 1993-04-15 1993-06-17 KNF-Neuberger GmbH, 7800 Freiburg Zweifach-Verdrängerpumpe
DE4328559C5 (de) * 1993-08-25 2004-11-25 Knf-Neuberger Gmbh Membranpumpe mit wenigstens zwei Membranen
JP3002480U (ja) * 1994-01-25 1994-09-27 白光株式会社 ダイヤフラム式真空ポンプ及びこれを備えるはんだ除去器

Also Published As

Publication number Publication date
JP2003507658A (ja) 2003-02-25
DE19940498A1 (de) 2001-03-22
WO2001014744A1 (fr) 2001-03-01
US6796215B1 (en) 2004-09-28
EP1206641A1 (fr) 2002-05-22
JP4755374B2 (ja) 2011-08-24
TW482873B (en) 2002-04-11
DE50010984D1 (de) 2005-09-22

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