EP1161570A1 - Procede et dispositif pour recouvrir un corps support d'un materiau a base de se-fe-n magnetique dur, par projection au plasma - Google Patents

Procede et dispositif pour recouvrir un corps support d'un materiau a base de se-fe-n magnetique dur, par projection au plasma

Info

Publication number
EP1161570A1
EP1161570A1 EP00920387A EP00920387A EP1161570A1 EP 1161570 A1 EP1161570 A1 EP 1161570A1 EP 00920387 A EP00920387 A EP 00920387A EP 00920387 A EP00920387 A EP 00920387A EP 1161570 A1 EP1161570 A1 EP 1161570A1
Authority
EP
European Patent Office
Prior art keywords
coating
temperature
support body
hard magnetic
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00920387A
Other languages
German (de)
English (en)
Other versions
EP1161570B1 (fr
Inventor
Gotthard Rieger
Joachim Wecker
Thomas Duda
Wolfram Unterberg
Werner Rodewald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10002346A external-priority patent/DE10002346A1/de
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP1161570A1 publication Critical patent/EP1161570A1/fr
Application granted granted Critical
Publication of EP1161570B1 publication Critical patent/EP1161570B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/126—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing rare earth metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates

Definitions

  • the invention relates to a method for coating a support body with a layer of hard magnetic material of the SE-FE-B material system, the SE component containing at least one rare earth metal and the FE component containing at least one ferromagnetic element.
  • the coating process comprises a plasma sputtering process in which a melted powder is sprayed onto the carrier body from a pre-material of the hard magnetic material to be formed.
  • a plurality of coating phases are provided for each area of the carrier body to be coated, with heating of the surface of the layer to be coated in each case, and in each case an intermediate, coating-free phase.
  • the invention further relates to a corresponding
  • SE rare earth metal
  • FE ferromagnetic transition metal
  • H c high coercive force
  • BH high energy density
  • an isotropic Nd-Fe-B magnet material can be obtained on a support body made of copper (Cu) heated to 600 ° C., after the deposition process heat treatment for 0.5 hours at 750 ° C. With this heat treatment, the coercive field strength, the remanence and the energy product can be increased considerably.
  • a coercive field strength H c for anisotropic material of 12 sprayed onto a support body made of Cu kept at 600 ° C. called kA / cm.
  • the above-mentioned DE-A document shows a coating process comprising a plasma spraying process, in which a melted powder made from a starting material of a hard magnetic material to be formed is sprayed onto a base body, such as a rotor body of an electrical machine.
  • a base body such as a rotor body of an electrical machine.
  • Each area of the base body to be coated should be exposed to several coating phases, between which the respectively applied material and the underlying material can cool down.
  • the cooling rate is obviously so high that the material is amorphous after the coating process.
  • the basic body must therefore be heated to high temperatures of, for example, 800 to 900 ° C in order to recrystallize the material.
  • the object of the present invention is to further improve the known method and the device for carrying it out, so that layers with a high coercive force and a comparatively large layer thickness can be obtained. Elaborate recrystallization annealing should be avoided.
  • the support body is raised to a temperature level which ensures re-installation of a hard magnetic phase of the hard magnetic material, at least in a zone facing its surface to be coated, at least towards the end of the coating process.
  • further phases may optionally be present in the hard magnetic material.
  • the measures according to the invention are based on the knowledge that, during the coating process with a fluctuating temperature level, a very uniform layer structure with a low porosity and good adhesive property can be obtained on the support body, which is particularly the case with larger layer thicknesses. Comparatively higher hard magnetic properties are shown if the layer structure is raised to a temperature level which is sufficiently high for recrystallization by appropriate heating of the carrier body during the coating process. This temperature level should be reached by or at the end of the coating process at the latest, but can also be reached much sooner. At the same time, residual layer stresses are kept relatively low. Here it is taken into account that a continuous coating process does not result in thicker layers
  • a plasma spray jet advantageously advantageously and repeatedly detects different regions of the carrier body.
  • the plasma spray jet is preferably guided such that a coating of another area of the carrier body is carried out with respect to one area during a coating-free phase following a coating phase.
  • the coating process according to the invention can also be subdivided into a plurality of coating sections which are interrupted by at least one cooling section. It has proven to be particularly advantageous here if temperature control is carried out on the support body in such a way that at least the first coating section from room temperature to a first maximum temperature, the cooling section from the first maximum temperature to an intermediate temperature and the second coating section from this intermediate temperature up to a second maximum temperature.
  • the first and the second maximum temperature can be at the same temperature level.
  • the sections immediately adjacent to each other lead to temperature compensation over the entire surface and therefore to a particularly uniform layer structure.
  • Such a layer structure is to be ensured in particular if the first maximum temperature and / or the second maximum temperature are selected from a temperature range between 400 ° C. and 900 ° C., in particular between 500 ° C. and 800 ° C.
  • the at least one intermediate temperature is advantageously chosen to be at least 20 ° C., preferably at least 50 ° C. lower than the maximum temperature of the preceding coating phase.
  • the first coating section advantageously takes between 2 and 15 minutes, preferably between 3 and 10 minutes.
  • a coating section are provided line section a plurality of cycles in each case one cut and Abkuhlungsab-.
  • a region of the carrier body to be coated during a coating phase has a corresponding number of times of a plasma spray jet moved relative to it
  • Overflow is swept over.
  • a partial layer with a thickness between 1 and 20 ⁇ m, in particular between 3 and 15 ⁇ m, is preferably applied with each overflow. In at least 50 such overflows, the layer can then be deposited on the carrier body with the desired total thickness. With each overflow, only a partial area of the area of the carrier body that is detected during an overflow is thus detected. This leads to a further equalization of the temperature on the support body or to a corresponding reduction in local overheating and also to one
  • the support body can optionally also be subjected to a heat treatment, the heat treatment being carried out in particular at at least one temperature level which is between 550 ° and 800 ° C., preferably between 600 ° and 750 ° C.
  • a heat treatment can be used to improve the magnetic properties of the deposited, at least largely crystalline, material of the layer.
  • the support body is advantageously simple to hold indirectly at the desired temperature level by means of a holder which is to be placed and is to be placed at a predetermined temperature level.
  • the temperature level of the support body can be easily adjusted if the holder can be cooled.
  • the hot ambient temperature of the plasma spraying process on the carrier body can thus be reduced to the desired extent.
  • the plasma spray device can be designed to be pivotable. In this way, even complicated geometries of support bodies and large areas can be coated effortlessly.
  • the method and the device are particularly suitable for forming layers which contain at least the components Nd, Fe and B of the SE-FE-B material, in particular at least for the most part the hard magnetic Nd ⁇ Fe ⁇ B phase.
  • Corresponding layers are advantageously deposited on a support body made of Cu or a copper material, in particular of a Cu alloy, or of an alloyed or unalloyed steel. The invention is explained in more detail below with reference to the drawing using exemplary embodiments.
  • the Figure 1 schematically show a cross section through the essential parts of a suitable Be Schweizerungsvor ⁇ chtung whose figure 2 m a diagram showing the temperature history wah ⁇ end of a plasma spray process at the beginning of the inventive coating method, the 3 m a diagram showing the hysteresis curve of a erfmdungsgebound layer derived thereof 4 shows a diagram of the further temperature profile in the method according to the invention and FIGS. 5 to 7 the successive spread of the crystalline zone of a layer during a coating process according to the invention.
  • a substrate or support body 3 is to be coated with a layer 4 made of a special hard magnetic material with a volume V of a coating chamber (not shown) known per se that can be evacuated to a residual pressure p.
  • the device 2 has a known spray device 5 for plasma spraying.
  • This device comprises a housing 6, in which a cathode 7 and a nozzle 8 serving as an anode are provided.
  • a powder inlet 9 for a plasma gas 10 and channels 11 for a coolant, for example water.
  • the support body 3 is attached to a holder 12, which is preferably coolable. It therefore has, for example, cooling channels 13 for guiding a (further) cooling agent, such as water.
  • the holder is also advantageously located in a large-area thermal connection with the support body, so that its temperature level can be influenced by the holder.
  • the carrier body consists of a metallic, adapted to the temperature conditions of the plasma spraying process see or ceramic material.
  • Metallic support materials preferably Cu or a Cu-containing material such as a Cu alloy or alloyed or unalloyed steels such as CrNi steel, are particularly suitable for reasons of heat conduction.
  • a high voltage is applied between the cathode 7 and the nozzle 8 designed as an anode via an electrical generator 14, so that an arc is ignited.
  • the supply of the plasma gas 10 creates a plasma flame 15 at the opening of the nozzle 8, through which a conical spray jet 16 of the powder supplied laterally via the powder inlet 9 is formed.
  • a large-area spray layer 4 can thus be formed on the substrate 3.
  • SE rare earth material
  • FE ferromagnetic element
  • the alloy to be formed of the layer to be produced advantageously has the following composition: SE x FE y B z , where the following should apply to the individual proportions: 6 ⁇ x ⁇ 11, 83 ⁇ y ⁇ 87 and 4 ⁇ z ⁇ 6 (in each case m atom% with x + y + z «100 including unavoidable impurities).
  • FE Fe
  • the alloy of the layer to be formed then has the composition SE X (FE, ZM) y B z .
  • V, Nb, Ta, Ti, Zr, Hf, Mn, Cr, Mo and W m in particular come into question as ZM elements.
  • the value ranges for the components x, y and z remain the same.
  • a deposition and formation of a layer from a material of the material system Nd-Fe-B which contains the hard magnetic Nd 2 Fe ⁇ B phase at least to a large extent (ie to more than 50% by volume) is assumed below as an exemplary embodiment.
  • Coating a carrier body 3 according to the invention by means of a plasma spraying process in an evacuable volume V offers considerable advantages over other coating methods.
  • the low porosity also contributes to the fact that there are good hard magnetic properties within Layer 4 can adjust.
  • desired layer thicknesses of in particular over 0.5 mm, preferably of at least 1 mm, for example between 0.2 and 2 mm can be specifically formed by varying the spraying time.
  • the process reduces impurities such as nitrogen and oxygen to a minimum. In this way, both high remanence values and high coercive field strengths of the end product of the layer are to be ensured. Due to the high particle speeds that can be achieved with vacuum plasma spraying and generally lie between 400 to 600 m / s, there is also a high adhesive tensile strength between the material of the carrier body 3 and the material of the layer 4.
  • a preferred embodiment of the coating device 2 provides for this that the carrier body 3 can be moved relative to the plasma spraying device 5.
  • the plasma spraying device is designed to be pivotable both in the horizontal and in the vertical direction.
  • support bodies with complicated geometries and / or large areas can be easily provided with layers made of the hard magnetic material.
  • an area of the carrier body to be coated during a coating phase is swept one or preferably several times (m so-called overflow) by the plasma spray jet moved relative to it. With each of these overflows, one becomes lamellar
  • Partial layer applied with a thickness which is generally between 3 and 20 microns, preferably between 5 and 15 microns.
  • a certain temperature profile on the support body 3 is to be maintained during the plasma spraying process, the process control advantageously being chosen in this way is that the support body is guided 3 m in the horizontal direction with simultaneous pivoting of the plasma spray device 5 and thus a large-area coating is made possible.
  • the carrier body is heated by the ambient temperature of the plasma spraying process prevailing in the coating chamber and in particular by the incident plasma spray jet 16.
  • the specific temperature on the support body can be indirectly established by cooling the holder 12 thermally connected to the support body.
  • several coating phases are provided while the carrier body 3 is being heated and an intermediate phase without coating the carrier body, so-called coating breaks, is provided.
  • the support body 3 heats up, in spite of any initial cooling, at least in a zone near the surface from room temperature to a first maximum temperature, this maximum temperature advantageously being between 400 ° C. and 900 ° C, especially between
  • a zone of the carrier body near the surface is understood to mean a partial region of the carrier body adjacent to the surface to be coated (3a, see FIG. 6) with a predetermined minimum depth projecting into the carrier body. This minimum depth is generally in the millimeter range, for example 1 mm.
  • the first coating section generally lasts between 2 and 15 minutes, for example between 3 and 10 minutes.
  • the support body cools due to the cooling of its holder 12 and because of the lack of exposure to the plasma spray jet 16 m, depending on the pause duration, to an intermediate temperature which is at least 20 ° C., preferably at least 50 ° C., lower than the maximum temperature mentioned.
  • the intermediate temperature can be in a temperature range between 100 ° C and 500 ° C, such as 170 ° C.
  • This cooling section can then be followed by a next coating section that is several minutes long, during which the support body 3 is heated again up to a second maximum temperature, which corresponds, for example, to the first maximum temperature.
  • This cycle of cooling section and coating / heating section is advantageously followed by at least one further corresponding cycle.
  • At the end of the entire coating process which generally comprises at least 50 overflows of the plasma spray jet within the first coating section and the at least one cycle, there is then a lamellar, at least largely crystalline structure of layer 4, the magnetic properties of which, however, cannot yet be optimal.
  • the support body 3 coated in this way can therefore subsequently be subjected to heat treatment or annealing at a predetermined temperature level in a manner known per se in order to optimize the desired magnetic properties.
  • the at least one annealing temperature is generally between 550 ° and 800 ° C, preferably between 600 ° and 750 ° C. A period of at least half an hour is normally provided for the duration of the heat treatment.
  • the support body 3 can be if necessary, they are subjected to a magnetization treatment after the coating process in order to impress a preferred direction of magnetization in the hard magnetic material.
  • the following table shows the influence of subsequent heat treatments of several samples at different temperatures on the coercive field strength H c .
  • the samples each had layers of Nd-Fe-B deposited according to the invention with a stochiometry corresponding to the hard magnetic phase.
  • the support bodies consisted of Cu or a chrome-nickel (CrNi) steel. The thickness of the deposited layers was also varied.
  • the heat treatments were carried out for one hour in a high vacuum.
  • the intermediate temperature at the end of the single cooling section between two heating sections was approximately 170 ° C.
  • T m maximum temperature (s) during the plasma spraying process
  • T t tempering temperature of the subsequent heat treatment
  • aq plasma spraying process without subsequent heat treatment
  • D thickness of the deposited layer.
  • layer thicknesses D of at least 0.5 mm are particularly advantageous. It should also be noted that the second Cu sample, for which the maximum temperature of 760 ° C was chosen, is the highest
  • the diagram of FIG. 2 shows the specific heating and cooling cycle of this second Cu sample during the coating process.
  • the time t (m mm) and ordmate direction the temperature T on the support body (m ° C.) are plotted in the abscissa direction.
  • a first coating section I was immediately followed by a cooling section II to an intermediate temperature of 170 °.
  • This cooling section was immediately followed by a new coating section III.
  • the coating process was complete after 9 minutes with a layer thickness of 0.5 mm.
  • the reinforced points on the curve shown represent temperature measuring points.
  • FIG. 3 shows a diagram of the hysteresis curve of the correspondingly produced material (sample No. 9) after the optimized heat treatment following the plasma spraying process.
  • the abscissa direction is the magnetic field strength H (m kOe) and the m abscissa direction is the magnetic polarization J (m T).
  • H magnetic field strength
  • m T magnetic polarization J
  • FIGS. 2 and 3 it was assumed that the individual coating and cooling sections had approximately the same length of time. Take intervals m of the order of 1.5 to 5 minutes.
  • the method according to the invention is not limited to such a procedure. You can for example also have a very gradual increase in temperature provide the first coating section through a pronouncedswei ⁇ se extended period of, for example, between 5 and 12 minutes while, the then join generally several cycles of Abkuhl- and coating sections of much shorter duration. The individual phases of such a cycle can last between 0.3 minutes and 3 minutes.
  • the hard magnetic material is deposited from the SE-FE-B material system by means of a special plasma spotting process in several coating phases.
  • a corresponding structure of a layer of this material on a particularly cooled support body 3 is indicated in the sectional views in FIGS. 5 to 7.
  • a desired thickness d of layer 4 of more than 0.5 mm, preferably of at least 1 mm, for example of several millimeters (cf. FIG. 7), is determined by a large number of coating phases hereinafter referred to as overflows or scans of the plasma jet reached.
  • the delivery speed of the powder e layer growth ⁇ d see FIG.
  • each overflow in the micrometer range, in particular between 1 and 20 ⁇ m, preferably between 3 and 15 ⁇ m, for example of approximately 5 ⁇ m .
  • three such amorphous partial layers, each with an overflow are designated by l a .
  • the initially amorphous partial layers 1 a (cf. FIG. 5) are crystallized out from the surface 3 a of the substrate or support body 3 because of the heating of the support body which is associated with the progressing coating process.
  • These crystallized partial layers are denoted by l k and form a layer zone z facing the surface 3a (cf. FIG. 6).
  • This crystallized zone z thus grows as the coating process proceeds from the surface 3a and extends at the end of the coating process practically through the entire layer 4 of thickness d (cf. FIG. 7).
  • This heat treatment integrated in the process control can advantageously at least largely eliminate the subsequent heat treatment required for re-installation.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Hard Magnetic Materials (AREA)
  • Thin Magnetic Films (AREA)

Abstract

L'invention concerne un procédé et un dispositif (2) correspondant permettant de recouvrir un corps support (3) d'une couche (4) relativement épaisse de matériau à base de SE-FE-B (SE= terres rares, FE= élément ferromagnétique ; notamment NdFeB), par projection au plasma. Il est prévu plusieurs phases de revêtement avec des pauses intermédiaires. A cet effet, la température du corps support (3) doit être augmentée au moins vers la fin du processus de recouvrement, à un niveau permettant la recristallisation du matériau magnétique. Différentes zones du corps support pouvant être touchées successivement et à plusieurs reprises par un faisceau plasmatique (16). A cet effet, un appareil de projection de plasma (5) du dispositif (2) peut être pivotant.
EP00920387A 1999-03-16 2000-03-13 Procede pour recouvrir un corps support d'un materiau a base de se-fe-n magnetique dur, par projection au plasma Expired - Lifetime EP1161570B1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19911609 1999-03-16
DE19911609 1999-03-16
DE10002346 2000-01-20
DE10002346A DE10002346A1 (de) 1999-03-16 2000-01-20 Verfahren und Vorrichtung zur Beschichtung eines Trägerkörpers mit einem hartmagnetischen SE-FE-B-Material mittels Plasmaspritzens
PCT/DE2000/000781 WO2000055384A1 (fr) 1999-03-16 2000-03-13 Procede et dispositif pour recouvrir un corps support d'un materiau a base de se-fe-n magnetique dur, par projection au plasma

Publications (2)

Publication Number Publication Date
EP1161570A1 true EP1161570A1 (fr) 2001-12-12
EP1161570B1 EP1161570B1 (fr) 2003-07-30

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EP00920387A Expired - Lifetime EP1161570B1 (fr) 1999-03-16 2000-03-13 Procede pour recouvrir un corps support d'un materiau a base de se-fe-n magnetique dur, par projection au plasma

Country Status (3)

Country Link
EP (1) EP1161570B1 (fr)
JP (1) JP2002539331A (fr)
WO (1) WO2000055384A1 (fr)

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WO2010128147A1 (fr) * 2009-05-08 2010-11-11 Sulzer Metco Ag Procédé de revêtement d'un support et support doté d'un revêtement
DE102009032222A1 (de) 2009-07-08 2010-04-15 Daimler Ag Elektrische Maschine sowie Verfahren zum Herstellen einer elektrischen Maschine
CN101830865B (zh) * 2010-03-19 2012-05-02 华东交通大学 一种含羟基的噻二唑衍生物及其制备方法和应用
CN107254656B (zh) * 2017-08-17 2023-06-13 桂林电子科技大学 钕铁硼永磁材料表面等离子喷涂陶瓷层及其制备方法
CN109468576B (zh) * 2018-12-29 2021-01-22 安徽大地熊新材料股份有限公司 一种烧结钕铁硼磁体表面高耐蚀涂层及其制备方法
KR102396336B1 (ko) * 2020-04-10 2022-05-11 (주)티티에스 냉각장치를 포함하는 지그 및 이를 포함하는 슬러리 플라즈마 스프레이 장치

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US4297388A (en) * 1978-11-06 1981-10-27 The Charles Stark Draper Laboratory, Inc. Process of making permanent magnets
US4897283A (en) * 1985-12-20 1990-01-30 The Charles Stark Draper Laboratory, Inc. Process of producing aligned permanent magnets
JPH04214849A (ja) * 1990-12-14 1992-08-05 Toyota Autom Loom Works Ltd トルクセンサ用磁歪膜の形成方法
AU6733196A (en) * 1995-08-30 1997-03-19 Danfoss A/S Method of producing magnetic poles on a base member, and rotor of an electrical machine

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Publication number Publication date
EP1161570B1 (fr) 2003-07-30
WO2000055384A1 (fr) 2000-09-21
JP2002539331A (ja) 2002-11-19

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