EP0972938A2 - Dispositif de ballast de gaz pour une pompe volumétrique à plusieurs étages - Google Patents

Dispositif de ballast de gaz pour une pompe volumétrique à plusieurs étages Download PDF

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Publication number
EP0972938A2
EP0972938A2 EP99112217A EP99112217A EP0972938A2 EP 0972938 A2 EP0972938 A2 EP 0972938A2 EP 99112217 A EP99112217 A EP 99112217A EP 99112217 A EP99112217 A EP 99112217A EP 0972938 A2 EP0972938 A2 EP 0972938A2
Authority
EP
European Patent Office
Prior art keywords
gas
stage
pumps
pump
gas ballast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99112217A
Other languages
German (de)
English (en)
Other versions
EP0972938A3 (fr
EP0972938B1 (fr
Inventor
Karl-Heinz Bernhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0972938A2 publication Critical patent/EP0972938A2/fr
Publication of EP0972938A3 publication Critical patent/EP0972938A3/fr
Application granted granted Critical
Publication of EP0972938B1 publication Critical patent/EP0972938B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F04B37/20—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids for wet gases, e.g. wet air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/06—Pressure in a (hydraulic) circuit
    • F04B2205/061—Pressure in a (hydraulic) circuit after a throttle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a gas ballast device for a multi-stage positive displacement pump according to the preamble of the first claim.
  • Multi-stage positive displacement pumps with one inlet and one outlet valve are becoming today increasingly as backing pumps for high vacuum pumps - such as Turbomolecular pumps - used.
  • high vacuum pumps such as Turbomolecular pumps - used.
  • the associated backing pump must reach a pressure of approx. 1-5 mbar.
  • the vapors can in during the compression process the backing pump condense and are therefore no longer pumped.
  • gas ballast devices are used in rotary vane pumps used. Gas is released from the atmosphere into the Pump let in.
  • Rotary vane pumps are due to the fact that the scoops with oil are sealed, in many cases not an optimal solution as backing pumps for turbomolecular pumps.
  • turbomolecular pumps which as last stage - e.g. have a molecular pump in the manner of a Holweck pump, has succeeded in increasing the working range of such a pump combination Pushing to expand. This makes it possible to generate the effort of the backing vacuum according to the criteria of pump size and final pressure.
  • oil-sealed vacuum pumps dry pumps - e.g. Diaphragm pumps - to be replaced. These have become special proven where oil-free vacuum is required.
  • diaphragm pumps as backing pumps is particularly useful in this context if the High vacuum pump is a magnetically mounted turbomolecular pump.
  • the gas to be pumped does not come along in any phase of the pumping process Lubricant in contact, and it cannot contain volatiles like those in Lubricants are mostly included, diffuse to the high vacuum side and contaminate them.
  • the object of the invention is to provide a gas ballast system for multi-stage vacuum pumps - e.g. Diaphragm pumps or reciprocating pumps - to develop.
  • the seal remains Vacuum chamber is obtained when the backing pump is switched off or by increasing pressure in the scooping chamber still improved. This is for interval operation sensible. By continuously pumping gas through the exhaust valve of the first Stage this valve is prevented from sticking.
  • an effective gas ballast system for the Provided above forevacuum pumps in which the gas in the Intermediate vacuum space is taken in and metered in via throttling points so that no significant impairment of the pump properties and the final pressure takes place.
  • the invention is illustrated by the example of a two-stage on the basis of the single figure Displacement pump, which is shown here as a reciprocating pump, explained in more detail become.
  • Displacement pump which is shown here as a reciprocating pump, explained in more detail become.
  • the conditions apply accordingly to diaphragm pumps.
  • the illustration shows a two-stage positive displacement pump with two stages 1 and 2 shown.
  • the inlet valve is 3 and the outlet valve designated with 4.
  • the two stages are over the intermediate vacuum space 5 connected with each other.
  • There is a first one for the gas inlet into the intermediate vacuum space Arrangement 6 is provided, which is provided with a throttle point 9.
  • For A connection serves between the intermediate space 5 and the scooping space 8 Arrangement 7, which is provided with a throttle point 10.
  • the gap 5 can also be connected to the suction area 12 the arrangement 7 'can be connected to the throttle point 10'.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressor (AREA)
EP99112217A 1998-07-11 1999-06-25 Dispositif de ballast de gaz pour une pompe volumétrique à plusieurs étages Expired - Lifetime EP0972938B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19831123 1998-07-11
DE19831123A DE19831123A1 (de) 1998-07-11 1998-07-11 Gasballasteinrichtung für mehrstufige Verdrängerpumpen

Publications (3)

Publication Number Publication Date
EP0972938A2 true EP0972938A2 (fr) 2000-01-19
EP0972938A3 EP0972938A3 (fr) 2000-06-28
EP0972938B1 EP0972938B1 (fr) 2004-03-03

Family

ID=7873738

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99112217A Expired - Lifetime EP0972938B1 (fr) 1998-07-11 1999-06-25 Dispositif de ballast de gaz pour une pompe volumétrique à plusieurs étages

Country Status (5)

Country Link
US (1) US6071085A (fr)
EP (1) EP0972938B1 (fr)
JP (1) JP4159183B2 (fr)
AT (1) ATE261063T1 (fr)
DE (2) DE19831123A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
DE10021454C2 (de) 2000-05-03 2002-03-14 Knf Neuberger Gmbh Vorrichtung zum Fördern feuchter Gase
DE10255792C5 (de) * 2002-11-28 2008-12-18 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem
US7329105B2 (en) * 2003-12-03 2008-02-12 Haldex Brake Corporation Multi-directional pump
US7399345B2 (en) * 2006-05-09 2008-07-15 Rheodyne Llc Capillary flow restrictor apparatus
US20080063551A1 (en) * 2006-09-13 2008-03-13 R. Conrader Company Head Discharging Compressor System
JP6150477B2 (ja) * 2012-08-16 2017-06-21 株式会社アルバック 往復動式ポンプ
KR20170054708A (ko) * 2015-11-10 2017-05-18 엘지이노텍 주식회사 멀티 코일 무선 충전 방법 및 그를 위한 장치 및 시스템
US11873802B2 (en) * 2020-05-18 2024-01-16 Graco Minnesota Inc. Pump having multi-stage gas compression
CN112049769B (zh) * 2020-08-11 2022-09-02 珠海格力节能环保制冷技术研究中心有限公司 活塞压缩机和制冷设备

Family Cites Families (19)

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US272730A (en) * 1883-02-20 Thomas w
US688520A (en) * 1901-10-09 1901-12-10 Ebenezer Hill Air-compressor.
US1724934A (en) * 1926-12-01 1929-08-20 Sulzer Ag Compound-reciprocating compressor
US2205793A (en) * 1936-08-10 1940-06-25 Liquid Carbonic Corp Compressor
US2812771A (en) * 1953-08-31 1957-11-12 Arthur E Mcfarland Hydraulic testing equipment
DE1865607U (de) * 1962-08-17 1963-01-17 Dieteg G M B H Vakuumpumpe, insbesondere fuer melkmaschinen.
US3835874A (en) * 1967-12-22 1974-09-17 F Dellasala Method of introducing liquid doses
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
FR2423656A1 (fr) * 1978-04-19 1979-11-16 Hunsinger Emile Pompe a vide autoregulatrice
DE2927797A1 (de) * 1979-07-10 1981-02-05 Leybold Heraeus Gmbh & Co Kg Verdraenger-vakuumpumpe mit saugstutzenventil
US4784579A (en) * 1986-12-19 1988-11-15 Allied-Signal Inc. Hydraulic-pneumatic power transfer unit
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
DE4136950A1 (de) * 1991-11-11 1993-05-13 Pfeiffer Vakuumtechnik Mehrstufiges vakuumpumpsystem
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US5547347A (en) * 1995-09-21 1996-08-20 The Boc Group, Inc. Gas injection apparatus and method
DE19634519A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Eintritt und Austritt
US5820354A (en) * 1996-11-08 1998-10-13 Robbins & Myers, Inc. Cascaded progressing cavity pump system
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen

Non-Patent Citations (1)

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Title
None

Also Published As

Publication number Publication date
DE19831123A1 (de) 2000-01-13
JP4159183B2 (ja) 2008-10-01
US6071085A (en) 2000-06-06
EP0972938A3 (fr) 2000-06-28
EP0972938B1 (fr) 2004-03-03
JP2000038986A (ja) 2000-02-08
DE59908691D1 (de) 2004-04-08
ATE261063T1 (de) 2004-03-15

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