EP0922165B1 - Pompe a faire le vide - Google Patents

Pompe a faire le vide Download PDF

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Publication number
EP0922165B1
EP0922165B1 EP97944768A EP97944768A EP0922165B1 EP 0922165 B1 EP0922165 B1 EP 0922165B1 EP 97944768 A EP97944768 A EP 97944768A EP 97944768 A EP97944768 A EP 97944768A EP 0922165 B1 EP0922165 B1 EP 0922165B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
inlet
valve
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97944768A
Other languages
German (de)
English (en)
Other versions
EP0922165A1 (fr
Inventor
Jürgen Meyer
Rudolf Bahnen
Hans-Josef Burghard
Wolfgang Giebmanns
Bernd Tennemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0922165A1 publication Critical patent/EP0922165A1/fr
Application granted granted Critical
Publication of EP0922165B1 publication Critical patent/EP0922165B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps

Definitions

  • the invention relates to a vacuum pump with the Features of the preamble of claim 1.
  • vacuum pumps in one first pumping phase, starting from atmospheric pressure, relative large amounts of gas are generated. These are through the Pump pumped and compressed by the pump stage (s), what annoying, often harmful overpressures in the pump.
  • a vacuum pump of this type is known from US-A-22 46 932 known. It has two compression levels, the at high suction pressures in parallel, at low suction pressures operated one after the other. A control mechanism automatically initiates the switchover. at high suction pressures flow through the relatively large ones Quantities of gas unhindered the inlet valves. At this Pump has the problem mentioned.
  • a vacuum pump designed as a piston pump, in which the problem mentioned does not exist is from US-A-48 54 825 known.
  • the technology consists of two cylindrical compression chambers on the inlet side of two of the four stepped cylinders in parallel switched and form a first pump stage.
  • the cylindrical compression chamber of a third cylinder forms the second stage of the pump.
  • the ring-shaped Compression chambers of the three cylinders, their cylindrical Compression chambers the first and the second pump stage form, are not equipped with inlets; she have no pump function.
  • the cylindrical compression chamber the fourth cylinder forms a third Stage of the vacuum pump. Your outlet is immediately available the outlet of the pump in connection.
  • the ring-shaped Compression chamber of this stepped cylinder has also pump function; however, it forms together with only a bypass to their inlet and outlet the exit from the third pump stage immediately inflowing gases, i.e. that only a part of the from the Gases escaping from the third pump stage this annular compression chamber to exit the Pump arrives.
  • US 4 171 188 A discloses a compressor with a Inlet valve using an oil pressure cylinder is controlled to be adequate in the initial phase Ensure the oil supply to the compressor.
  • US 4 396 345 A, GB 1 089 694 A and DE 44 32 263 A disclose machines with inlet valves that are also not pressure controlled. The other documents disclose pressure-controlled valves, the However, the object of the present invention purpose lie far away.
  • the present invention is based on the object in a vacuum pump due to the accumulation of large amounts of gas resulting overpressures in a simple manner avoid.
  • a differential pressure controlled inlet valve of the invention Art is simple and robust. constructional Measures in the vacuum pump and / or a second outlet valve are not required.
  • the piston vacuum pump 1 shown in Figure 1 includes the housing 2, the inlet 3 and the outlet 4. Inside there are four cylinder-piston systems in the housing 11, 21, 31 and 41, which are essentially identical are trained. They are opposed to each other in pairs - preferably arranged in one plane - that their pistons have a common crankshaft 5 can be driven.
  • the drive motor is 6 designated.
  • the cylinder-piston system 11 has the cylinder 12 and the piston 13. Both are tiered so that they are in known a cylindrical compression chamber 14 and form an annular compression chamber 15.
  • the cylindrical compression chamber 14 has the Inlet 16 and outlet 17, the annular compression chamber 15 the inlet 18 and the outlet 19 on.
  • the Inlets 16 and 18 are ring grooves in the wall of the Cylinder 12 formed so that the movement of the piston 13 causes the inlets to open and close.
  • the outlets 17 and 19 are not shown in detail Valves equipped.
  • the cylinder-piston system 21, 31 and 41 are corresponding trained and with corresponding reference numerals Mistake.
  • entry is 3 via line 51 - e.g. with the valve 52 - with the Inlets 16, 18, 26, 28 of the compression chambers 14, 15, 24 and 25, which components of the piston-cylinder systems 11 and 21 are connected.
  • the above, in parallel switched compression chambers form a first pump stage the piston vacuum pump 1, indicated by the dash-dotted line 54.
  • Connected to the outlets 17, 19, 27 and 29 of the first stage compression chambers connecting lines all flow into the line 55, with the inlets 36, 38 of the compression chambers 34, 35 are connected. These are part of the piston-cylinder system 31.
  • the also connected in parallel Compression chambers 34, 35 form the second pump stage the piston vacuum pump 1, indicated by the dash-dotted line 57.
  • This compression chamber 44 forms the third pump stage the piston vacuum pump 1 (see dash-dotted line 61).
  • the outlet 47 of the compression chamber 44 protrudes line 62 with inlet 48 of the annular compression chamber 45 in connection, which is also a component of the piston-cylinder system 41.
  • the outlet 49 of the annular compression chamber 45 stands with the Outlet 4 of the piston vacuum pump 1 in connection.
  • the Compression chamber 45 forms the fourth pumping stage Piston vacuum pump 1 (dashed line 63).
  • a nozzle 64 is also indicated in FIG. 1, via which the compression space 45 with the inside of the housing 2 the pump 1 is connected.
  • the size of the nozzle 64 is selected so that there is a vacuum of a few hundred milibars. The requirements for the sealing quality of the gap between the pistons and the cylinders in their neighbors to the inside of the housing This can further reduce areas.
  • FIG 2 shows again the piston-cylinder system 11 with its compression chambers 14 and 15.
  • the inlets 16 and 18 of these chambers (together with the inlets 26, 28 of the second piston-cylinder system 21) via the Valve 52 in connection with the inlet 3 of the vacuum pump.
  • the valve 52 fulfills the function in a first Throttle the pumping phase, relatively large amounts of gas or temporarily withhold to such an extent, that pressures in pump 1 do not occur.
  • To the valve 52 has a chamber 65 with an inlet opening 66, an outlet opening 67 and a passage opening 72 on. Is at the level of the passage opening 72 the chamber is conical.
  • Located in chamber 65 a closure body 68 with a central Bore or opening 69.
  • two axially arranged Springs preferably compression springs 70 and 71 the spherical closure body on the outlet side 68 guided against rotation. Hold without gas flow the compression springs hover the closure body.
  • FIG. 3 shows a modification of the valve 52 according to FIG 2.
  • the closure body 68 is designed as a disc. Its outer edge is one that surrounds the passage opening 72 Seal ring 73 assigned.
  • high e.g. Atmospheric pressure
  • the approximately hemispherical closure body 68 according to Figure 2 the conical section of the chamber 65 (upper illustration of valve 52 in FIG. 2).
  • the disk 68 of the seal lies 73 on.
  • the passage openings 72 are each - except for the hole or opening 69 - closed. Just gas passing through the bore or opening 69 gets into the pump 1. The pumping speed is reduced. The size and length of the bore or opening 69 are selected so that pressures in pump 1 do not occur.
  • Figures 4 to 7 show further variants for a pressure-dependent inlet valve 52.
  • a closure body elastic discs 74 to 77 are provided, which only are attached to the housing at one point.
  • the disks 74, 76 and 77 have central openings 78, 79 and 80, respectively on.
  • the Washer 75 assigned a constantly open bypass opening 81.
  • the outer edges of the discs are 74 to 77 in each case surrounding the passage cross section 72 or 72 ' Seats 82 to 85 assigned.
  • the elastic valve disks are curved in the direction of the inlet opening 66, that they are only in the area of their attachment point fit their seats. Give in their rest position the respective passage opening 72 or 72 ' essentially free.
  • the disks lie 74 to 77 each their seats 82 to 85 completely on.
  • the pumping speed is throttled. It will determined by the size of the openings 78, 79, 80 in the Disks 74, 76, 77 or through the bypass opening 81 (in the embodiment of Figure 5). Relieves the pressure on the inlet side, the disks 74 to 77 lift from their Sit 82 to 84 and each give their passage cross sections 72 or 72 'free. The full pumping speed is then available.
  • valve systems 76, 84 and 77, 85 arranged one behind the other.
  • the Opening 79 in the suction-side disk 76 is larger than the opening 80 in the outlet-side disk 77.
  • FIG. 7 corresponds to the embodiment according to FIG. 5.
  • a rigid disc 8 is provided instead of the elastic disk 75 .
  • the attachment points the disc 88 are under the action of springs 89 and 90, such that one of the springs (spring 89) in the closing direction, the other (spring 90) in the opening direction acts.
  • Figure 8 shows the course of the pumping speed S in dependence to the pressure p for the solutions according to FIGS. 2 to 5 (solid curve 86) and for the solution according to FIG 6 (dash-dotted curve 87), in which two valve systems 76, 83 and 77, 84 arranged one behind the other are.
  • the pumping speed is low at high pressures (greater than p 1 ).
  • the closure bodies or disks 68, 74, 75 each release their passage openings 72.
  • the pumping speed increases up to its maximum value.
  • the valve disk 76 first releases its associated passage opening 72 at p 2 .
  • the pumping speed increases to a value which is determined by the opening 80 in the disk 77 still resting on its seat 85. If the pressure continues to decrease to p3, the disk 76 also opens its passage opening 72 ', so that the pumping speed assumes its maximum value.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (14)

  1. Pompe à vide avec entrée (3), sortie (4) et une soupape d'admission (52) commandée par pression différentielle,
       caractérisée en ce que la soupape d'admission (52) est configurée pour étrangler la capacité d'aspiration de la pompe à vide en présence d'une haute pression d'admission, un système de soupape avec un siège et un élément de fermeture faisant partie de la soupape d'admission (52), qui en présence d'une haute pression d'admission prend sa position de fermeture, le système de soupape étant muni d'une ouverture (69, 78, 79, 80, 81) qui est également ouverte en position de fermeture de l'élément de fermeture.
  2. Pompe à vide selon la revendication 1,
       caractérisée en ce que l'ouverture (69, 78, 79, 80) est prévue dans l'élément de fermeture (68, 74, 76, 77).
  3. Pompe à vide selon la revendication 1,
       caractérisée en ce que l'ouverture (81) est une ouverture de by-pass.
  4. Pompe à vide selon l'une quelconque des revendications 1 à 3,
       caractérisée en ce que l'élément de fermeture (68) est disposé entre deux ressorts (70, 71).
  5. Pompe à vide selon l'une quelconque des revendications 1 à 4,
       caractérisée en ce que l'élément de fermeture (68) présente sensiblement la forme d'une hémisphère, et que son siège entourant l'ouverture de passage (72) présente une forme sensiblement sphérique.
  6. Pompe à vide selon l'une quelconque des revendications 1 à 4,
       caractérisée en ce que l'élément de fermeture présente la forme d'un disque (68, 74, 75, 76, 77, 88).
  7. Pompe à vide selon la revendication 6,
       caractérisée en ce que le disque (74, 75, 76, 77) est réalisé à partir d'un matériau élastique, est recourbé en direction de l'admission et n'est fixé au siège qu'à un seul point.
  8. Pompe à vide selon la revendication 6,
       caractérisée en ce que le disque (88) est rigide et fixé au moyen de ressorts (89, 90) au siège de soupape au niveau de deux points de sa bordure situés sensiblement en regard l'un de l'autre, et ceci de telle façon que l'un des ressorts agisse dans la direction d'ouverture et l'autre dans la direction de fermeture.
  9. Pompe à vide selon l'une quelconque des revendications 1 à 8,
       caractérisée en ce que deux systèmes de soupape (76, 84 ; 77, 85) sont disposés l'un derrière l'autre.
  10. Pompe à vide selon l'une quelconque des revendications 1 à 10,
       caractérisée en ce qu'il s'agit d'une pompe à vide à piston à plusieurs étages.
  11. Pompe à vide selon la revendication 10,
       caractérisée en ce qu'elle comporte une entrée (3), une sortie (4) et quatre cylindres étagés (12, 22, 32, 42) qui conjointement avec respectivement un piston étagé (13, 23, 33, 43) forment respectivement une chambre de compression cylindrique (14, 24, 34, 44) et une chambre de compression annulaire (15, 25, 35, 45), elle présente pendant son fonctionnement normal quatre étages de pompage (54, 57, 61, 63) successifs et le premier étage est constitué de quatre chambres de compression (14, 15, 24, 25) fonctionnant en parallèle.
  12. Pompe à vide selon la revendication 11,
       caractérisée en ce que chacune des huit chambres de compression est munie d'une admission et d'une conduite d'échappement, l'entrée (3) de la pompe (1) est en communication avec les admissions (16, 18, 26, 28) des quatre chambres de compression (14, 15, 24, 25) de deux cylindres (12, 22), les conduites d'échappement (17, 19, 27, 29) de ces quatre chambres de compression sont reliées aux deux admissions (36, 38) des deux chambres de compression (34, 35) d'un troisième cylindre (32), les conduites d'échappement (37, 39) de ces deux chambres de compression (34, 35) sont reliées à l'admission de la chambre de compression cylindrique (44) du quatrième cylindre (41) et la conduite d'échappement (47) de cette chambre de compression cylindrique (44) est reliée à l'admission (48) de la chambre de compression annulaire (45) du quatrième cylindre (42).
  13. Pompe à vide selon la revendication 11 ou 12,
       caractérisée en ce que les systèmes cylindre-piston (11, 21, 31, 41) sont disposés par paires les uns en regard des autres de manière à pouvoir entraíner leurs pistons (13, 23, 33, 43) par un vilebrequin (5) commun.
  14. Pompe à vide selon la revendication 11, 12 ou 13,
       caractérisée en ce que la pompe (1) est munie d'un carter (2) étanche qui est relié par une buse (64) à l'une des chambres de compression, de préférence à la chambre de compression annulaire (45) située du côté de la sortie.
EP97944768A 1996-08-27 1997-08-19 Pompe a faire le vide Expired - Lifetime EP0922165B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19634519A DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt
DE19634519 1996-08-27
PCT/EP1997/004509 WO1998009079A1 (fr) 1996-08-27 1997-08-19 Soupape d'admission a effet d'etranglement et pompe a faire le vide a piston a etages multiples

Publications (2)

Publication Number Publication Date
EP0922165A1 EP0922165A1 (fr) 1999-06-16
EP0922165B1 true EP0922165B1 (fr) 2004-11-03

Family

ID=7803766

Family Applications (2)

Application Number Title Priority Date Filing Date
EP97936688A Expired - Lifetime EP0922163B1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation
EP97944768A Expired - Lifetime EP0922165B1 (fr) 1996-08-27 1997-08-19 Pompe a faire le vide

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP97936688A Expired - Lifetime EP0922163B1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation

Country Status (3)

Country Link
EP (2) EP0922163B1 (fr)
DE (3) DE19634519A1 (fr)
WO (2) WO1998009077A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19921711A1 (de) * 1999-05-12 2000-11-16 Leybold Vakuum Gmbh Kolbenvakuumpumpe
DE19926186A1 (de) * 1999-06-09 2000-12-14 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslassventil
DE19955688A1 (de) 1999-11-19 2001-05-23 Leybold Vakuum Gmbh Kolben-Vakuumpumpe
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
DE10127082A1 (de) * 2001-06-02 2002-12-05 Leybold Vakuum Gmbh Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032429A (en) * 1934-07-26 1936-03-03 Ingersoll Rand Co Load controlling apparatus for compressors
US2246932A (en) * 1939-09-21 1941-06-24 Chicago Pneumatic Tool Co Combination single and two stage vacuum pump
US2269620A (en) * 1940-06-15 1942-01-13 Chicago Pneumatic Tool Co Compressor regulator
US2765976A (en) * 1952-03-14 1956-10-09 Pennsylvania Pump & Compressor Two stage compressor
US3122162A (en) * 1963-06-20 1964-02-25 Asa D Sands Flow control device
DE1403963A1 (de) * 1963-07-02 1968-11-21 Kurt Braetsch Kompressor mit wenigstens drei Stufen
GB1089694A (en) * 1964-02-24 1967-11-01 J & E Hall Ltd Improvements in or relating to gas and vapour compressors
DE1910848A1 (de) * 1969-03-04 1970-09-17 Kurt Braetsch Kompressor
GB1258333A (fr) * 1968-04-08 1971-12-30
US4171188A (en) * 1976-08-03 1979-10-16 Chicago Pneumatic Tool Company Rotary air compressors with intake valve control and lubrication system
US4396345A (en) * 1981-05-07 1983-08-02 Ingersoll-Rand Company Unloader valve having bypass valving means
DE3279209D1 (en) * 1981-08-13 1988-12-15 Commw Scient Ind Res Org Reciprocatory piston and cylinder machine
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置
US4854825A (en) * 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump
JP3505233B2 (ja) * 1994-09-06 2004-03-08 サンデン株式会社 圧縮機
DE4432263C2 (de) * 1994-09-10 1996-07-11 Walterscheid Gmbh Gkn Kombinationsventil für sauggedrosselte Hydraulikpumpen

Also Published As

Publication number Publication date
DE59712067D1 (de) 2004-12-09
DE59705578D1 (de) 2002-01-10
EP0922163B1 (fr) 2001-11-28
EP0922163A1 (fr) 1999-06-16
DE19634519A1 (de) 1998-03-05
WO1998009079A1 (fr) 1998-03-05
WO1998009077A1 (fr) 1998-03-05
EP0922165A1 (fr) 1999-06-16

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