EP0855517B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP0855517B1
EP0855517B1 EP98100372A EP98100372A EP0855517B1 EP 0855517 B1 EP0855517 B1 EP 0855517B1 EP 98100372 A EP98100372 A EP 98100372A EP 98100372 A EP98100372 A EP 98100372A EP 0855517 B1 EP0855517 B1 EP 0855517B1
Authority
EP
European Patent Office
Prior art keywords
region
vacuum pump
vacuum
drive
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP98100372A
Other languages
German (de)
English (en)
Other versions
EP0855517A2 (fr
EP0855517A3 (fr
Inventor
Kurt Hölss
Heinrich Lotz
Matthias. Mädler
Heinz Reichert
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7818235&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0855517(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0855517A2 publication Critical patent/EP0855517A2/fr
Publication of EP0855517A3 publication Critical patent/EP0855517A3/fr
Application granted granted Critical
Publication of EP0855517B1 publication Critical patent/EP0855517B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the invention relates to a vacuum pump, for example of the turbomolecular pump type or a molecular pump or a combination of both types, in The following also called a friction pump according to the preamble of the first claim.
  • Such vacuum pumps usually consist of a number of stages, which can be designed differently and each rotor and corresponding stator parts exhibit. These pump-active parts are in the axial direction of the pumped Gas permeated. For optimal pump properties, such as maximum gas throughput and to achieve maximum compression, the rotating parts circulate at high speed. The drive energy required for this purpose is only partially transformed into kinetic energy. Much of it is called Heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) or in the compression of gases. These heat sources lead to disturbing temperature increases in the drive and bearing area and in areas of the pump-active components in which they have adverse effects can. In extreme cases, it can cause the rotor to start up and destroy the Pump come. To avoid overheating of critical components these pumps are equipped with cooling devices.
  • Friction pumps of the type described are increasingly being used Processes such as in chemical processes or in semiconductor manufacturing, where large amounts of easily condensable gases are produced.
  • the gases to be extracted are from this range to a pressure range in which laminar flow prevails, compressed. That means relatively high pressure in this area large amounts of gas are produced.
  • these gases are easily condensable are, which is all the more the case at low temperatures, liquid or Solid deposits to a considerable extent. This can cause corrosion and etching processes, which lead to the destruction of individual components or the entire pump.
  • Through the deposition of solid parts especially the very narrow gaps in the area of molecular pumps narrowed even more, what with a decrease in performance or, in the worst case, with the destruction of the pump.
  • EP O 352 688 is used to prevent heat transfer from a heated one Part on a cooled part, a thermal impedance element as an additional component placed between the cooled and heated part. This brings the Disadvantage of larger external dimensions. There are also additional Seals and connecting elements necessary, which represent critical components and complicate the setup. These disadvantages multiply when the Thermal separation of several areas of the pump is to be carried out.
  • WO-A-9 400 694 describes a vacuum pump in which the high vacuum range and the fore vacuum area have different temperatures.
  • DE-A-44 10 903 describes a system with a vacuum pump and one Measuring device, in which vacuum pump and measuring device common devices for Have supply, control, operation and display. The question of different Temperatures in the individual pump areas are irrelevant here.
  • the object of the invention is to be able to be used in a wide pressure range
  • a vacuum pump of the type of a friction pump in which Liquid and solid deposits are largely excluded and at the same time overheating of those sensitive to higher temperatures Components is avoided.
  • the external dimensions of the pump should be maintained and additional critical components can be avoided.
  • the three areas are thermally decoupled by the contact areas between them can be minimized by radial and axial free rotations. Those contact surfaces that are still necessary for structural reasons are largely formed by heat-insulating materials.
  • the high vacuum area can be independent of the fore vacuum range and the motor and Storage area treated thermally in this way, i.e. controlled, cooled or heated be how it is the respective application and the respective stage of the application process require. The same applies to the fore vacuum area. For example here where, due to the increased pressure, liquid and solid deposits are favored, these can be avoided by specifically increasing the temperature.
  • the heat generated in the engine and bearing area due to operation is largely dissipated by cooling, and an uncontrolled or unwanted transition from heat to the other components is avoided.
  • the vacuum pump is divided into three areas: the high vacuum area 1, the Forevacuum area 2 and the drive and storage area 3.
  • the high vacuum area 1 is in the example shown here as a turbomolecular pump with a rotor and Stator disks 9, 10 formed and provided with a gas inlet 13.
  • the fore vacuum area 2 has, for example, a molecular pump of the Holweck pump type on. This consists of rotating cylinder parts 11 and a stator 12 with spiral grooves.
  • the gas outlet opening is designated 14.
  • the Drive and bearing area 3 essentially houses a drive motor 4 for the shaft 8, on which the rotating components of the high vacuum area and the Forevacuum area and storage facilities for the shaft 8, in the present Example of an axial and a radial magnetic bearing 5 and 6.
  • a Another radial passive magnetic bearing 7 is arranged in the high vacuum region 1.
  • the high vacuum area 1 can from the drive and storage area 3, e.g. B. by free spins 17, which are in the shaft 8 are thermally insulated. In the places where from constructional For free rotation not possible and contact surfaces not to be avoided these can be formed by materials with low heat conduction. So can e.g. B. between high vacuum area 1 and fore vacuum area 2 to the one with the 18th designated places inserts made of such materials are present as well the locations designated 19 between fore-vacuum region 2 and the drive and Storage area 3.
  • the high vacuum area 1 and the drive and storage area 3 can by inserts made of poorly heat-conducting materials, e.g. B. in the wave the point designated 20 are thermally decoupled from each other.
  • the high vacuum area is equipped with a cooling device 21 and a heating device 23.
  • temperature sensors 25 can the high vacuum area is thermally monitored and the heating or cooling is controlled become.
  • Rod-shaped heating elements are used to heat the fore-vacuum area 24 inserted radially from the outside into the housing.
  • temperature sensors 26 can the fore-vacuum area is thermally monitored and the heating elements are regulated.
  • the engine and bearing area is equipped with a cooling device 22 for removing it heat generated.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)

Claims (7)

  1. Pompe à vide qui comprend une zone de vide poussé (1) et une zone de vide préliminiaire (2), les deux comportant des éléments rotatifs (9, 11) et des éléments fixes (10, 12) dont l'action conjointe produit un effet de pompage, et qui comprend en outre une zone d'entraínement et de logement (3), caractérisée en ce que les trois zones sont constituées et agencées les unes par rapport aux autres d'une façon telle qu'elles peuvent être soumises à des traitements thermiques différents, et en ce qu'au moins deux des zones sont thermiquement isolées l'une de l'autre par des coussinets flottants (15, 16, 17) disposés entre les éléments de ces zones, moyennant quoi les surfaces de contact des éléments des différentes zones sont limitées à un minimum.
  2. Pompe à vide qui comprend une zone de vide poussé (1) et une zone de vide préliminiaire (2), les deux comportant des éléments rotatifs (9, 11) et des éléments fixes (10, 12) dont l'action conjointe produit un effet de pompage, et qui comprend en outre une zone d'entraínement et de logement (3), caractérisée en ce que les trois zones sont constituées et agencées les unes par rapport aux autres d'une façon telle qu'elles peuvent être soumises à des traitements thermiques différents, et en ce qu'au moins deux des zones sont thermiquement isolées l'une de l'autre par des éléments (18, 19, 20) composés d'un matériau faiblement thermoconducteur et dont sont constituées, entièrement ou partiellement, les surfaces de contacts qui restent nécessaires pour des raisons structurelles.
  3. Pompe à vide selon une des revendications 1 ou 2, caractérisée en ce que la zone de vide poussé (1) est équipée d'un dispositif de refroidissement (21).
  4. Pompe à vide selon une quelconque des revendications précédentes, caractérisée en ce que la zone d'entraínement et de logement est équipée d'un dispositif de refroidissement (22).
  5. Pompe à vide selon une quelconque des revendications précédentes, caractérisée en ce que la zone de vide préliminaire (2) est équipée d'un dispositif de chauffage (24).
  6. Pompe à vidé selon la revendication 5, caractérisée en ce que le, dispositif de chauffage (24) est constitué de thermocouples en forme d'aiguille qui s'avancent dans le sens radial ou axial dans la partie de carter de la zone de vide préliminaire (2).
  7. Pompe à vide selon la revendication 5 ou 6, caractérisée en ce qu'il est disposé dans la zone de vide préliminaire (2) des capteurs thermiques (26) qui surveillent cette zone et règlent le dispositif de chauffage (24).
EP98100372A 1997-01-24 1998-01-12 Pompe à vide Revoked EP0855517B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19702456 1997-01-24
DE19702456A DE19702456B4 (de) 1997-01-24 1997-01-24 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP0855517A2 EP0855517A2 (fr) 1998-07-29
EP0855517A3 EP0855517A3 (fr) 1999-07-07
EP0855517B1 true EP0855517B1 (fr) 2003-10-08

Family

ID=7818235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98100372A Revoked EP0855517B1 (fr) 1997-01-24 1998-01-12 Pompe à vide

Country Status (4)

Country Link
EP (1) EP0855517B1 (fr)
JP (1) JP4235273B2 (fr)
AT (1) ATE251722T1 (fr)
DE (2) DE19702456B4 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2589814B1 (fr) 2010-07-02 2018-12-26 Edwards Japan Limited Pompe à vide

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048088A (ja) 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
JP2002115692A (ja) * 2000-10-04 2002-04-19 Osaka Vacuum Ltd 複合真空ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP2004270692A (ja) * 2003-02-18 2004-09-30 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP2010025122A (ja) * 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP4243996B2 (ja) * 2003-08-21 2009-03-25 株式会社荏原製作所 ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置
JP4916655B2 (ja) * 2004-11-17 2012-04-18 株式会社島津製作所 真空ポンプ
JP5104288B2 (ja) * 2007-12-25 2012-12-19 富士通セミコンダクター株式会社 真空ポンプ、半導体装置の製造装置及び半導体装置の製造方法
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
JP2014029129A (ja) * 2012-07-31 2014-02-13 Edwards Kk 真空ポンプ
US9745989B2 (en) 2012-09-24 2017-08-29 Shimadzu Corporation Turbo-molecular pump
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6484919B2 (ja) * 2013-09-24 2019-03-20 株式会社島津製作所 ターボ分子ポンプ
JP6375631B2 (ja) * 2014-02-05 2018-08-22 株式会社島津製作所 ターボ分子ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP6776971B2 (ja) 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7048391B2 (ja) 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ
JP2022046347A (ja) 2020-09-10 2022-03-23 エドワーズ株式会社 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE619944A (fr) * 1961-08-04 1963-01-09 Snecma Pompe à vide turbomoleculaire perfectionnée
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
DE59305085D1 (de) * 1992-06-19 1997-02-20 Leybold Ag Gasreibungsvakuumpumpe
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2589814B1 (fr) 2010-07-02 2018-12-26 Edwards Japan Limited Pompe à vide

Also Published As

Publication number Publication date
DE19702456B4 (de) 2006-01-19
JP4235273B2 (ja) 2009-03-11
DE19702456A1 (de) 1998-07-30
EP0855517A2 (fr) 1998-07-29
DE59809829D1 (de) 2003-11-13
EP0855517A3 (fr) 1999-07-07
JPH10205486A (ja) 1998-08-04
ATE251722T1 (de) 2003-10-15

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