EP0855517B1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP0855517B1 EP0855517B1 EP98100372A EP98100372A EP0855517B1 EP 0855517 B1 EP0855517 B1 EP 0855517B1 EP 98100372 A EP98100372 A EP 98100372A EP 98100372 A EP98100372 A EP 98100372A EP 0855517 B1 EP0855517 B1 EP 0855517B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- region
- vacuum pump
- vacuum
- drive
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5806—Cooling the drive system
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Definitions
- the invention relates to a vacuum pump, for example of the turbomolecular pump type or a molecular pump or a combination of both types, in The following also called a friction pump according to the preamble of the first claim.
- Such vacuum pumps usually consist of a number of stages, which can be designed differently and each rotor and corresponding stator parts exhibit. These pump-active parts are in the axial direction of the pumped Gas permeated. For optimal pump properties, such as maximum gas throughput and to achieve maximum compression, the rotating parts circulate at high speed. The drive energy required for this purpose is only partially transformed into kinetic energy. Much of it is called Heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) or in the compression of gases. These heat sources lead to disturbing temperature increases in the drive and bearing area and in areas of the pump-active components in which they have adverse effects can. In extreme cases, it can cause the rotor to start up and destroy the Pump come. To avoid overheating of critical components these pumps are equipped with cooling devices.
- Friction pumps of the type described are increasingly being used Processes such as in chemical processes or in semiconductor manufacturing, where large amounts of easily condensable gases are produced.
- the gases to be extracted are from this range to a pressure range in which laminar flow prevails, compressed. That means relatively high pressure in this area large amounts of gas are produced.
- these gases are easily condensable are, which is all the more the case at low temperatures, liquid or Solid deposits to a considerable extent. This can cause corrosion and etching processes, which lead to the destruction of individual components or the entire pump.
- Through the deposition of solid parts especially the very narrow gaps in the area of molecular pumps narrowed even more, what with a decrease in performance or, in the worst case, with the destruction of the pump.
- EP O 352 688 is used to prevent heat transfer from a heated one Part on a cooled part, a thermal impedance element as an additional component placed between the cooled and heated part. This brings the Disadvantage of larger external dimensions. There are also additional Seals and connecting elements necessary, which represent critical components and complicate the setup. These disadvantages multiply when the Thermal separation of several areas of the pump is to be carried out.
- WO-A-9 400 694 describes a vacuum pump in which the high vacuum range and the fore vacuum area have different temperatures.
- DE-A-44 10 903 describes a system with a vacuum pump and one Measuring device, in which vacuum pump and measuring device common devices for Have supply, control, operation and display. The question of different Temperatures in the individual pump areas are irrelevant here.
- the object of the invention is to be able to be used in a wide pressure range
- a vacuum pump of the type of a friction pump in which Liquid and solid deposits are largely excluded and at the same time overheating of those sensitive to higher temperatures Components is avoided.
- the external dimensions of the pump should be maintained and additional critical components can be avoided.
- the three areas are thermally decoupled by the contact areas between them can be minimized by radial and axial free rotations. Those contact surfaces that are still necessary for structural reasons are largely formed by heat-insulating materials.
- the high vacuum area can be independent of the fore vacuum range and the motor and Storage area treated thermally in this way, i.e. controlled, cooled or heated be how it is the respective application and the respective stage of the application process require. The same applies to the fore vacuum area. For example here where, due to the increased pressure, liquid and solid deposits are favored, these can be avoided by specifically increasing the temperature.
- the heat generated in the engine and bearing area due to operation is largely dissipated by cooling, and an uncontrolled or unwanted transition from heat to the other components is avoided.
- the vacuum pump is divided into three areas: the high vacuum area 1, the Forevacuum area 2 and the drive and storage area 3.
- the high vacuum area 1 is in the example shown here as a turbomolecular pump with a rotor and Stator disks 9, 10 formed and provided with a gas inlet 13.
- the fore vacuum area 2 has, for example, a molecular pump of the Holweck pump type on. This consists of rotating cylinder parts 11 and a stator 12 with spiral grooves.
- the gas outlet opening is designated 14.
- the Drive and bearing area 3 essentially houses a drive motor 4 for the shaft 8, on which the rotating components of the high vacuum area and the Forevacuum area and storage facilities for the shaft 8, in the present Example of an axial and a radial magnetic bearing 5 and 6.
- a Another radial passive magnetic bearing 7 is arranged in the high vacuum region 1.
- the high vacuum area 1 can from the drive and storage area 3, e.g. B. by free spins 17, which are in the shaft 8 are thermally insulated. In the places where from constructional For free rotation not possible and contact surfaces not to be avoided these can be formed by materials with low heat conduction. So can e.g. B. between high vacuum area 1 and fore vacuum area 2 to the one with the 18th designated places inserts made of such materials are present as well the locations designated 19 between fore-vacuum region 2 and the drive and Storage area 3.
- the high vacuum area 1 and the drive and storage area 3 can by inserts made of poorly heat-conducting materials, e.g. B. in the wave the point designated 20 are thermally decoupled from each other.
- the high vacuum area is equipped with a cooling device 21 and a heating device 23.
- temperature sensors 25 can the high vacuum area is thermally monitored and the heating or cooling is controlled become.
- Rod-shaped heating elements are used to heat the fore-vacuum area 24 inserted radially from the outside into the housing.
- temperature sensors 26 can the fore-vacuum area is thermally monitored and the heating elements are regulated.
- the engine and bearing area is equipped with a cooling device 22 for removing it heat generated.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Electrophonic Musical Instruments (AREA)
Abstract
Description
Die Erfindung betrifft eine Vakuumpumpe beispielsweise vom Typ einer Turbomolekularpumpe oder einer Molekularpumpe oder einer Kombination beider Typen, im Folgendem auch Reibungspumpe genannt nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a vacuum pump, for example of the turbomolecular pump type or a molecular pump or a combination of both types, in The following also called a friction pump according to the preamble of the first claim.
Solche Vakuumpumpen bestehen in der Regel aus einer Anzahl von Stufen, welche unterschiedlich gestaltet sein können und jeweils Rotor und entsprechende Statorteile aufweisen. Diese pumpaktiven Teile werden in axialer Richtung von dem zu fördernden Gas durchsetzt. Um optimale Pumpeigenschaften, wie maximalen Gasdurchsatz und maximale Kompression, zu erreichen, müssen die rotierenden Teile mit hoher Geschwindigkeit umlaufen. Die zu diesem Zweck benötigte Antriebsenergie wird nur zum Teil in kinetische Energie verwandelt. Ein großer Teil davon wird als Verlustwärme freigesetzt. Weitere unerwünschte Wärmemengen werden frei durch die Lagerung (mechanische Verluste durch Reibung in Kugellagern oder elektrische Verluste in Magnetlagern) oder bei der Kompression von Gasen. Diese Wärmequellen führen zu störenden Temperaturerhöhungen im Antriebs- und Lagerbereich und in Bereichen der pumpaktiven Bauteile, in welchen sie nachteilige Auswirkungen haben können. Im Extremfall kann es zum Anlaufen des Rotors und zur Zerstörung der Pumpe kommen. Um eine Überhitzung von kritischen Bauteilen zu vermeiden, sind diese Pumpen mit Kühleinrichtungen ausgestattet.Such vacuum pumps usually consist of a number of stages, which can be designed differently and each rotor and corresponding stator parts exhibit. These pump-active parts are in the axial direction of the pumped Gas permeated. For optimal pump properties, such as maximum gas throughput and to achieve maximum compression, the rotating parts circulate at high speed. The drive energy required for this purpose is only partially transformed into kinetic energy. Much of it is called Heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) or in the compression of gases. These heat sources lead to disturbing temperature increases in the drive and bearing area and in areas of the pump-active components in which they have adverse effects can. In extreme cases, it can cause the rotor to start up and destroy the Pump come. To avoid overheating of critical components these pumps are equipped with cooling devices.
Reibungspumpen der beschriebenen Art kommen zunehmend zur Anwendung bei Verfahren wie z.B. in chemischen Prozessen oder in der Halbleiterfertigung, bei denen große Mengen von leichtkondensierbaren Gasen anfallen. Dabei werden die Rezipienten bis ins Ultrahochvakuumgebiet evakuiert. Die zu fördernden Gase werden von diesem Bereich bis in einen Druckbereich, in welchem laminare Strömung herrscht, komprimiert. Das bedeutet, dass in diesem Bereich höheren Druckes relativ große Gasmengen gefördert werden. Wenn dann diese Gase leicht kondensierbar sind, was bei tiefen Temperaturen umso mehr der Fall ist, kommt es zu Flüssigkeitsoder Feststoffabscheidungen in beträchtlichem Ausmaß. Dadurch können Korrosions- und Ätzvorgänge hervorgerufen werden, welche zur Zerstörung einzelner Bauteile oder der ganzen Pumpe führen können. Durch die Ablagerung von Feststoffteilen werden insbesondere die sehr schmalen Spalte im Bereich der Molekularpumpen noch mehr verengt, was mit einer Leistungsabnahme oder, im schlimmsten Fall, mit der Zerstörung der Pumpe verbunden ist.Friction pumps of the type described are increasingly being used Processes such as in chemical processes or in semiconductor manufacturing, where large amounts of easily condensable gases are produced. The Recipients evacuated to the ultra high vacuum area. The gases to be extracted are from this range to a pressure range in which laminar flow prevails, compressed. That means relatively high pressure in this area large amounts of gas are produced. Then if these gases are easily condensable are, which is all the more the case at low temperatures, liquid or Solid deposits to a considerable extent. This can cause corrosion and etching processes, which lead to the destruction of individual components or the entire pump. Through the deposition of solid parts especially the very narrow gaps in the area of molecular pumps narrowed even more, what with a decrease in performance or, in the worst case, with the destruction of the pump.
Eingangs wurde erläutert, dass die hier zur Diskussion stehende Art von Vakuumpumpen mit Kühleinrichtungen versehen sein müssen, um sie vor Überhitzung der kritischen Bauteile zu schützen. Diese Kühleinrichtungen fördern andererseits die Flüssigkeits- und Feststoffabscheidungen, wodurch es zu den oben beschriebenen Störungen beim Einsatz der Pumpen kommen kann.At the beginning it was explained that the type of vacuum pumps under discussion here must be provided with cooling devices to prevent them from overheating to protect critical components. On the other hand, these cooling devices promote the Liquid and solid deposits, making it one of those described above Malfunctions can occur when using the pumps.
Somit wird die Konstruktion von Vakuumpumpen der oben beschriebenen Art, welche z. B. in chemischen Prozessen oder in der Halbleiterfertigung eingesetzt werden und in einem weiteren Druckbereich funktionsfähig sein sollen, von zwei sich entgegenstehenden, wenn nicht sogar sich ausschließenden Forderungen bestimmt.Thus, the construction of vacuum pumps of the type described above, which z. B. in chemical processes or in semiconductor manufacturing and should be functional in a further printing area, of two opposing, if not even exclusive claims.
In der EP O 352 688 wird zur Verhinderung des Wärmeüberganges von einem geheizten Teil auf ein gekühltes Teil ein Wärmeimpedanzelement als zusätzliches Bauteil zwischen dem gekühlten und dem beheizten Teil angebracht. Dies bringt den Nachteil von größeren äußeren Abmessungen mit sich. Außerdem sind zusätzliche Dichtungen und Verbindungselemente notwendig, welche kritische Bauteile darstellen und den Aufbau komplizieren. Diese Nachteile multiplizieren sich, wenn die thermische Trennung mehrerer Bereiche der Pumpe durchgeführt werden soll. In EP O 352 688 is used to prevent heat transfer from a heated one Part on a cooled part, a thermal impedance element as an additional component placed between the cooled and heated part. This brings the Disadvantage of larger external dimensions. There are also additional Seals and connecting elements necessary, which represent critical components and complicate the setup. These disadvantages multiply when the Thermal separation of several areas of the pump is to be carried out.
In der WO-A-9 400 694 wird eine Vakuumpumpe beschrieben, bei der der Hochvakuumbereich und der Vorvakuumbereich unterschiedliche Temperaturen haben. Der Einfluss des Antriebs- und Lagerbereichs, welcher für die gesamte Wärmebilanz der Pumpe eine ausschlaggebende Rolle spielt, wird jedoch in die Gesamtbetrachtung nicht mit einbezogen.WO-A-9 400 694 describes a vacuum pump in which the high vacuum range and the fore vacuum area have different temperatures. The Influence of the drive and bearing area, which for the entire heat balance of the Pump plays a pivotal role, however, is considered in the overall picture not included.
Die DE-A-44 10 903 beschreibt ein System mit einer Vakuumpumpe und einem Messgerät, bei dem Vakuumpumpe und Messgerät gemeinsame Einrichtungen zur Versorgung, Steuerung, Bedienung und Anzeige haben. Die Frage der unterschiedlichen Temperaturen in den einzelnen Pumpbereichen spielt hier keine Rolle.DE-A-44 10 903 describes a system with a vacuum pump and one Measuring device, in which vacuum pump and measuring device common devices for Have supply, control, operation and display. The question of different Temperatures in the individual pump areas are irrelevant here.
Die Erfindung hat sich zur Aufgabe gestellt, eine in einem weiten Druckbereich einsetzbare Vakuumpumpe vom Typ einer Reibungspumpe vorzustellen, bei welcher Flüssigkeits- und Feststoffabscheidungen weitgehend ausgeschlossen werden und gleichzeitig eine Überhitzung von gegenüber höheren Temperaturen empfindlichen Bauteilen vermieden wird. Dabei sollen die äußeren Abmessungen der Pumpe beibehalten und zusätzliche kritische Bauteile vermieden werden.The object of the invention is to be able to be used in a wide pressure range To introduce a vacuum pump of the type of a friction pump, in which Liquid and solid deposits are largely excluded and at the same time overheating of those sensitive to higher temperatures Components is avoided. The external dimensions of the pump should be maintained and additional critical components can be avoided.
Die Aufgabe wird durch die kennzeichnenden Merkmale der Patentansprüche 1
und 2 gelöst. Die Ansprüche 3 bis 7 stellen weitere Ausgestaltungsformen der Erfindung
dar.The object is achieved by the characterizing features of
Durch die Ausgestaltung einer Vakuumpumpe entsprechend der kennzeichnenden Merkmale der Patentansprüche wird erreicht, dass die sich entgegenstehenden Forderungen, welche der Konstruktion einer solchen Pumpe zugrunde liegen, erfüllt werden können. Die drei Bereiche werden thermisch entkoppelt, indem die Kontaktflächen zwischen ihnen durch radiale und axiale Freidrehungen minimiert werden. Diejenigen Kontaktflächen, welche aus bautechnischen Gründen noch notwendig sind, werden weitgehend durch wärmeisolierende Materialien gebildet. Der Hochvakuumbereich kann unabhängig von dem Vorvakuumbereich und dem Motor- und Lagerbereich thermisch so behandelt, das heißt kontrolliert, gekühlt oder aufgeheizt werden, wie es der jeweilige Anwendungsfall und das jeweilige Stadium des Anwendungsprozesses erfordern. Das gleiche gilt für den Vorvakuumbereich. Zum Beispiel können hier, wo durch den erhöhten Druck Flüssigkeits- und Feststoffabscheidungen begünstigt sind, diese durch gezielte Erhöhung der Temperatur vermieden werden. Die Wärme, welche im Motor- und Lagerbereich betriebsbedingt entsteht, wird weitgehend durch die Kühlung abgeführt, und ein unkontrollierter oder ungewollter Übergang von Wärme auf die anderen Bauteile wird vermieden.By designing a vacuum pump according to the characteristic Characteristics of the claims is achieved that the conflicting claims, which are the basis of the construction of such a pump can be. The three areas are thermally decoupled by the contact areas between them can be minimized by radial and axial free rotations. Those contact surfaces that are still necessary for structural reasons are largely formed by heat-insulating materials. The high vacuum area can be independent of the fore vacuum range and the motor and Storage area treated thermally in this way, i.e. controlled, cooled or heated be how it is the respective application and the respective stage of the application process require. The same applies to the fore vacuum area. For example here where, due to the increased pressure, liquid and solid deposits are favored, these can be avoided by specifically increasing the temperature. The heat generated in the engine and bearing area due to operation is largely dissipated by cooling, and an uncontrolled or unwanted transition from heat to the other components is avoided.
An Hand der Abbildung soll die Erfindung an einem Beispiel näher erläutert werden.On the basis of the figure, the invention will be explained in more detail using an example.
Die Vakuumpumpe ist in drei Bereiche gegliedert: Den Hochvakuumbereich 1, den
Vorvakuumbereich 2 und den Antriebs- und Lagerbereich 3. Der Hochvakuumbereich
1 ist in dem hier gezeigten Beispiel als Turbomolekularpumpe mit Rotor- und
Statorscheiben 9, 10 ausgebildet und mit einem Gaseinlass 13 versehen. Der Vorvakuumbereich
2 weist beispielsweise eine Molekularpumpe vom Typ einer Holweckpumpe
auf. Diese besteht aus rotierenden Zylinderteilen 11 und aus einem Stator
12 mit spiralförmigen Nuten. Die Gasaustrittsöffnung ist mit 14 bezeichnet. Der
Antriebs- und Lagerbereich 3 beherbergt im wesentlichen einen Antriebsmotor 4 für
die Welle 8, auf der sich die rotierenden Bauteile des Hochvakuumbereichs und des
Vorvakuumbereichs befinden sowie Lagereinrichtungen für die Welle 8, im vorliegenden
Beispiel aus einem axialen und einem radialen Magnetlager 5 und 6. Ein
weiteres radiales passives Magnetlager 7 ist im Hochvakuumbereich 1 angeordnet.
Werden anstelle der Magnetlager ganz oder teilweise andere Lagertypen, wie z. B.
Kugellager verwendet, dann ändert dies am Wesen der Erfindung nichts.The vacuum pump is divided into three areas: the high vacuum area 1, the
Forevacuum
Zwischen dem Hochvakuumbereich 1 und dem Vorvakuumbereich 2 sind zum Zwecke
der thermischen Isolierung radiale und axiale Freidrehungen 15 vorhanden.
Ebenso sind radiale und axiale Freidrehungen 16 zwischen dem Vorvakuumbereich 2
und dem Antriebs- und Lagerbereich 3 vorgesehen. Der Hochvakuumbereich 1 kann
von dem Antriebs- und Lagerbereich 3, z. B. durch Freidrehungen 17, welche sich in
der Welle 8 befinden, thermisch isoliert sein. An den Stellen, an denen aus bautechnischen
Gründen Freidrehungen nicht möglich und Kontaktflächen nicht zu vermeiden
sind, können diese durch Materialien mit niedriger Wärmeleitung gebildet werden. So
können z. B. zwischen Hochvakuumbereich 1 und Vorvakuumbereich 2 an den mit 18
bezeichneten Stellen Einsätze aus solchen Materialien vorhanden sein wie auch an
den mit 19 bezeichneten Stellen zwischen Vorvakuumbereich 2 und dem Antriebsund
Lagerbereich 3. Der Hochvakuumbereich 1 und der Antriebs- und Lagerbereich 3
können durch Einsätze aus schlecht wärmeleitenden Materialien, z. B. in der Welle an
der mit 20 bezeichneten Stelle, thermisch voneinander abgekoppelt werden.Between the high vacuum area 1 and the
Zur Regulierung der Temperatur ist der Hochvakuumbereich mit einer Kühlvorrichtung
21 und einer Heizvorrichtung 23 versehen. Durch Temperatursensoren 25 kann
der Hochvakuumbereich thermisch überwacht und die Heizung oder Kühlung gesteuert
werden. Zur Aufheizung des Vorvakuumbereichs sind stabförmige Heizelemente
24 radial von außen in das Gehäuse eingeführt. Durch Temperatursensoren 26 kann
der Vorvakuumbereich thermisch überwacht und die Heizelemente geregelt werden.
Der Motor- und Lagerbereich ist mit einer Kühlvorrichtung 22 zur Abführung der dort
entstehenden Wärme versehen.To regulate the temperature, the high vacuum area is equipped with a
Claims (7)
- Vacuum pump comprising a high-vacuum region (1) and a backing pressure region (2), both with rotating (9,11) and stationary (10, 12) structural parts, which generate a pumping effect on their interaction, further comprising a drive and bearing region (3), characterised in that the three regions are structured and disposed relative to one another in such a manner that they can be subjected to different thermal treatments, and in that at least two of the regions are thermally insulated from one another by recesses (15, 16, 17) present between their structural parts, through which the contact surfaces of the structural parts of the different regions are restricted to a minimum.
- Vacuum pump comprising a high-vacuum region (1) and a backing pressure region (2), both with rotating (9,11) and stationary (10, 12) structural parts, which generate a pumping effect on their interaction, further comprising a drive and bearing region (3), characterised in that the three regions are structured and disposed relative to one another in such a manner that they can be subjected to different thermal treatments, and in that at least two of the regions are thermally insulated from one another by parts (18, 19, 20) made of poorly heat conductive material, by which the contact surfaces still necessary for structural reasons are fully or partly formed.
- Vacuum pump according to one of Claims 1 or 2, characterised in that the high-vacuum region (1) is fitted with a cooling device (21).
- Vacuum pump according to one of the preceding claims, characterised in that the drive and bearing region is fitted with a cooling device (22).
- Vacuum pump according to one of the preceding claims, characterised in that the backing pressure region (2) is fitted with a heating device (24).
- Vacuum pump according to Claim 5, characterised in that the heating device (24) comprises rod-type heating elements, which project radially or axially into the housing part of the backing pressure region (2).
- Vacuum pump according to Claim 5 or 6, characterised in that temperature sensors (26) are attached in the backing pressure region (2) to monitor this region and regulate the heating device (24).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702456A DE19702456B4 (en) | 1997-01-24 | 1997-01-24 | vacuum pump |
| DE19702456 | 1997-01-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0855517A2 EP0855517A2 (en) | 1998-07-29 |
| EP0855517A3 EP0855517A3 (en) | 1999-07-07 |
| EP0855517B1 true EP0855517B1 (en) | 2003-10-08 |
Family
ID=7818235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP98100372A Revoked EP0855517B1 (en) | 1997-01-24 | 1998-01-12 | Vacuum pump |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0855517B1 (en) |
| JP (1) | JP4235273B2 (en) |
| AT (1) | ATE251722T1 (en) |
| DE (2) | DE19702456B4 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2589814B1 (en) | 2010-07-02 | 2018-12-26 | Edwards Japan Limited | Vacuum pump |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002048088A (en) | 2000-07-31 | 2002-02-15 | Seiko Instruments Inc | Vacuum pump |
| JP2002115692A (en) * | 2000-10-04 | 2002-04-19 | Osaka Vacuum Ltd | Compound vacuum pump |
| DE10107341A1 (en) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
| DE10142567A1 (en) | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbo molecular pump |
| JP2003269369A (en) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | Vacuum pump |
| JP2004270692A (en) * | 2003-02-18 | 2004-09-30 | Osaka Vacuum Ltd | Heat insulation structure of molecular pump |
| JP2010025122A (en) * | 2003-02-18 | 2010-02-04 | Osaka Vacuum Ltd | Heat insulation structure of molecular pump |
| JP4243996B2 (en) * | 2003-08-21 | 2009-03-25 | 株式会社荏原製作所 | Turbo vacuum pump and semiconductor manufacturing apparatus equipped with the turbo vacuum pump |
| JP4916655B2 (en) * | 2004-11-17 | 2012-04-18 | 株式会社島津製作所 | Vacuum pump |
| JP5104288B2 (en) * | 2007-12-25 | 2012-12-19 | 富士通セミコンダクター株式会社 | Vacuum pump, semiconductor device manufacturing apparatus, and semiconductor device manufacturing method |
| JP5486184B2 (en) * | 2008-12-10 | 2014-05-07 | エドワーズ株式会社 | Vacuum pump |
| JP2014029129A (en) * | 2012-07-31 | 2014-02-13 | Edwards Kk | Vacuum pump |
| JP5924414B2 (en) * | 2012-09-24 | 2016-05-25 | 株式会社島津製作所 | Turbo molecular pump |
| JP6735058B2 (en) * | 2013-07-31 | 2020-08-05 | エドワーズ株式会社 | Vacuum pump |
| DE102013109637A1 (en) * | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vacuum pump and arrangement with a vacuum pump |
| DE202013008470U1 (en) | 2013-09-24 | 2015-01-08 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| JP6484919B2 (en) * | 2013-09-24 | 2019-03-20 | 株式会社島津製作所 | Turbo molecular pump |
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| JP6776971B2 (en) | 2017-03-27 | 2020-10-28 | 株式会社島津製作所 | Vacuum pump and pump-integrated power supply |
| GB201715151D0 (en) * | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
| JP7048391B2 (en) | 2018-03-30 | 2022-04-05 | エドワーズ株式会社 | Vacuum pump |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE619944A (en) * | 1961-08-04 | 1963-01-09 | Snecma | Advanced Turbomolecular Vacuum Pump |
| DE2757599A1 (en) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Rotary molecular pump with bladed rotor and stator - reduces rotor and=or stator temp. to improve compression ratio and=or suction |
| DE3508483A1 (en) * | 1985-03-09 | 1986-10-23 | Leybold-Heraeus GmbH, 5000 Köln | HOUSING FOR A TURBOMOLECULAR VACUUM PUMP |
| JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
| FR2634829B1 (en) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | VACUUM PUMP |
| KR950007378B1 (en) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | Vacuum pump |
| EP0646220B1 (en) * | 1992-06-19 | 1997-01-08 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Gas friction vacuum pump |
| DE4410903A1 (en) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System with vacuum pump, measuring device as well as supply, control, operating and display devices |
-
1997
- 1997-01-24 DE DE19702456A patent/DE19702456B4/en not_active Revoked
- 1997-12-19 JP JP35053397A patent/JP4235273B2/en not_active Expired - Fee Related
-
1998
- 1998-01-12 EP EP98100372A patent/EP0855517B1/en not_active Revoked
- 1998-01-12 AT AT98100372T patent/ATE251722T1/en not_active IP Right Cessation
- 1998-01-12 DE DE59809829T patent/DE59809829D1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2589814B1 (en) | 2010-07-02 | 2018-12-26 | Edwards Japan Limited | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4235273B2 (en) | 2009-03-11 |
| EP0855517A2 (en) | 1998-07-29 |
| JPH10205486A (en) | 1998-08-04 |
| DE19702456B4 (en) | 2006-01-19 |
| DE19702456A1 (en) | 1998-07-30 |
| ATE251722T1 (en) | 2003-10-15 |
| DE59809829D1 (en) | 2003-11-13 |
| EP0855517A3 (en) | 1999-07-07 |
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