EP0737273A1 - Mikropumpe - Google Patents
MikropumpeInfo
- Publication number
- EP0737273A1 EP0737273A1 EP95902252A EP95902252A EP0737273A1 EP 0737273 A1 EP0737273 A1 EP 0737273A1 EP 95902252 A EP95902252 A EP 95902252A EP 95902252 A EP95902252 A EP 95902252A EP 0737273 A1 EP0737273 A1 EP 0737273A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- micropump
- movable wall
- pumping chamber
- fluid
- micropump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims abstract description 95
- 239000012530 fluid Substances 0.000 claims abstract description 28
- 239000012528 membrane Substances 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 8
- 239000003814 drug Substances 0.000 claims description 5
- 229940079593 drug Drugs 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 2
- 230000002277 temperature effect Effects 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 23
- 229910052710 silicon Inorganic materials 0.000 abstract description 23
- 239000010703 silicon Substances 0.000 abstract description 23
- 239000011521 glass Substances 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 32
- 239000000126 substance Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000004026 adhesive bonding Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
- 239000008188 pellet Substances 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH387893 | 1993-12-28 | ||
| CH3878/93 | 1993-12-28 | ||
| PCT/IB1994/000435 WO1995018307A1 (fr) | 1993-12-28 | 1994-12-21 | Micropompe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0737273A1 true EP0737273A1 (de) | 1996-10-16 |
| EP0737273B1 EP0737273B1 (de) | 1998-05-20 |
Family
ID=4265440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP95902252A Expired - Lifetime EP0737273B1 (de) | 1993-12-28 | 1994-12-21 | Mikropumpe |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5759015A (de) |
| EP (1) | EP0737273B1 (de) |
| JP (1) | JP3718724B2 (de) |
| AU (1) | AU681470B2 (de) |
| CA (1) | CA2179063C (de) |
| DE (1) | DE69410487T2 (de) |
| SG (1) | SG44800A1 (de) |
| WO (1) | WO1995018307A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2469089A1 (de) | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Elektronisches Steuerungsverfahren und System für eine piezoelektrische Pumpe |
Families Citing this family (137)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19546570C1 (de) * | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
| FR2748310A1 (fr) | 1996-05-03 | 1997-11-07 | Debiotech Sa | Dispositif d'obturation par pincement d'un tube souple |
| FR2757906A1 (fr) * | 1996-12-31 | 1998-07-03 | Westonbridge Int Ltd | Micropompe avec piece intermediaire integree |
| DE19719862A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
| AU9739898A (en) * | 1997-08-20 | 1999-03-08 | Westonbridge International Limited | Micro pump comprising an inlet control member for its self-priming |
| US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
| US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
| US6247908B1 (en) * | 1998-03-05 | 2001-06-19 | Seiko Instruments Inc. | Micropump |
| US6908770B1 (en) | 1998-07-16 | 2005-06-21 | Board Of Regents, The University Of Texas System | Fluid based analysis of multiple analytes by a sensor array |
| US6148635A (en) * | 1998-10-19 | 2000-11-21 | The Board Of Trustees Of The University Of Illinois | Active compressor vapor compression cycle integrated heat transfer device |
| EP0995908A1 (de) * | 1998-10-20 | 2000-04-26 | vanden Brande, Pierre | Molekularpumpe |
| JP3620316B2 (ja) * | 1998-11-16 | 2005-02-16 | 株式会社日立製作所 | マイクロポンプとその製造方法 |
| JP4539898B2 (ja) * | 1999-05-17 | 2010-09-08 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ | マイクロメカニック・ポンプ |
| AU1325201A (en) | 1999-07-16 | 2001-02-05 | Board Of Regents, The University Of Texas System | Detection system based on an analyte reactive particle |
| JP3814132B2 (ja) * | 1999-10-27 | 2006-08-23 | セイコーインスツル株式会社 | ポンプ及びその駆動方法 |
| EP1103305A1 (de) * | 1999-11-26 | 2001-05-30 | F.Hoffmann-La Roche Ag | Makroaktuator-Kopplungssystem als Bestandteil eines Pipettiermoduls |
| US20040053322A1 (en) | 2000-01-31 | 2004-03-18 | Mcdevitt John T. | System and method for the analysis of bodily fluids |
| JP4776139B2 (ja) | 2000-05-25 | 2011-09-21 | デビオテック エスエイ | マイクロ加工された流体装置およびその製造方法 |
| US7420659B1 (en) * | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
| US6837476B2 (en) * | 2002-06-19 | 2005-01-04 | Honeywell International Inc. | Electrostatically actuated valve |
| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6589229B1 (en) | 2000-07-31 | 2003-07-08 | Becton, Dickinson And Company | Wearable, self-contained drug infusion device |
| US7000330B2 (en) * | 2002-08-21 | 2006-02-21 | Honeywell International Inc. | Method and apparatus for receiving a removable media member |
| DE10039735C2 (de) * | 2000-08-16 | 2003-04-24 | Eppendorf Ag | Dosiersystem |
| US7198250B2 (en) * | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
| CA2431677A1 (en) * | 2000-09-18 | 2002-03-21 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
| US20050143789A1 (en) * | 2001-01-30 | 2005-06-30 | Whitehurst Todd K. | Methods and systems for stimulating a peripheral nerve to treat chronic pain |
| WO2002061392A2 (en) * | 2001-01-31 | 2002-08-08 | Board Of Regents, The University Of Texas System | Method and apparatus for the confinement of materials in a micromachined chemical sensor array |
| GB0123054D0 (en) | 2001-09-25 | 2001-11-14 | Randox Lab Ltd | Passive microvalve |
| US6729856B2 (en) | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
| DE10164474B4 (de) * | 2001-12-20 | 2006-06-14 | Mathias Frodl | Mikropumpe |
| US6591625B1 (en) | 2002-04-17 | 2003-07-15 | Agilent Technologies, Inc. | Cooling of substrate-supported heat-generating components |
| US8257967B2 (en) | 2002-04-26 | 2012-09-04 | Board Of Regents, The University Of Texas System | Method and system for the detection of cardiac risk factors |
| US6827559B2 (en) * | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
| EP1403519A1 (de) * | 2002-09-27 | 2004-03-31 | Novo Nordisk A/S | Membranpumpe mit dehnbarer Pumpenmembran |
| KR100483079B1 (ko) * | 2002-10-23 | 2005-04-14 | 재단법인서울대학교산학협력재단 | 능동형 마이크로 냉각기 |
| CN100344874C (zh) | 2003-01-28 | 2007-10-24 | 清华大学 | 一种流体的传输方法及实现该方法的微型蠕动泵 |
| WO2004094821A2 (en) * | 2003-04-22 | 2004-11-04 | The Regents Of The University Of California | Micromembrane shape memory alloy pump |
| JP4546474B2 (ja) * | 2003-08-21 | 2010-09-15 | ヌテック・プライベート・リミテッド | 電力供給分配装置 |
| WO2005059551A2 (en) * | 2003-12-11 | 2005-06-30 | Board Of Regents, The University Of Texas System | Method and system for the analysis of saliva using a sensor array |
| US8105849B2 (en) | 2004-02-27 | 2012-01-31 | Board Of Regents, The University Of Texas System | Integration of fluids and reagents into self-contained cartridges containing sensor elements |
| US8101431B2 (en) | 2004-02-27 | 2012-01-24 | Board Of Regents, The University Of Texas System | Integration of fluids and reagents into self-contained cartridges containing sensor elements and reagent delivery systems |
| DE102004011726A1 (de) * | 2004-03-05 | 2005-09-22 | Ing. Erich Pfeiffer Gmbh | Dosiervorrichtung |
| US20050225201A1 (en) * | 2004-04-02 | 2005-10-13 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
| US7290993B2 (en) * | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7312554B2 (en) | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
| US7287965B2 (en) * | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7484940B2 (en) * | 2004-04-28 | 2009-02-03 | Kinetic Ceramics, Inc. | Piezoelectric fluid pump |
| US7104767B2 (en) * | 2004-07-19 | 2006-09-12 | Wilson Greatbatch Technologies, Inc. | Diaphragm pump for medical applications |
| US20060134510A1 (en) * | 2004-12-21 | 2006-06-22 | Cleopatra Cabuz | Air cell air flow control system and method |
| US7222639B2 (en) * | 2004-12-29 | 2007-05-29 | Honeywell International Inc. | Electrostatically actuated gas valve |
| US7322803B2 (en) * | 2004-12-30 | 2008-01-29 | Adaptivenergy, Llc. | Pumps with diaphragms bonded as bellows |
| WO2006074037A1 (en) * | 2004-12-30 | 2006-07-13 | Par Technologies, Llc | Diaphragm pumps with controlled output |
| US7267043B2 (en) * | 2004-12-30 | 2007-09-11 | Adaptivenergy, Llc | Actuators with diaphragm and methods of operating same |
| US20060147329A1 (en) * | 2004-12-30 | 2006-07-06 | Tanner Edward T | Active valve and active valving for pump |
| US7258533B2 (en) * | 2004-12-30 | 2007-08-21 | Adaptivenergy, Llc | Method and apparatus for scavenging energy during pump operation |
| US7328882B2 (en) * | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
| US7445017B2 (en) * | 2005-01-28 | 2008-11-04 | Honeywell International Inc. | Mesovalve modulator |
| US20060194724A1 (en) * | 2005-02-25 | 2006-08-31 | Whitehurst Todd K | Methods and systems for nerve regeneration |
| US20060232166A1 (en) * | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
| US20060232171A1 (en) * | 2005-04-13 | 2006-10-19 | Par Technologies, Llc | Piezoelectric diaphragm assembly with conductors on flexible film |
| WO2006113344A2 (en) * | 2005-04-13 | 2006-10-26 | Par Technologies, Llc | Actuators with connected diaphragms |
| EP1910824A4 (de) | 2005-05-31 | 2012-11-21 | Labnow Inc | Verfahren und zusammensetzungen in zusammenhang mit der erstellung und verwendung eines weissen blutbildes |
| US7320338B2 (en) * | 2005-06-03 | 2008-01-22 | Honeywell International Inc. | Microvalve package assembly |
| EP2508867A1 (de) * | 2005-06-24 | 2012-10-10 | Board Of Regents, The University Of Texas System | Systeme und Verfahren einschliesslich in sich geschlossener Kassetten mit Nachweissystemen und Flüssigkeitszufuhrsystemen |
| US7517201B2 (en) * | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
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| US20070129681A1 (en) * | 2005-11-01 | 2007-06-07 | Par Technologies, Llc | Piezoelectric actuation of piston within dispensing chamber |
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| US20070140875A1 (en) * | 2005-12-16 | 2007-06-21 | Green James S | Piezoelectric pump |
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| US7934912B2 (en) | 2007-09-27 | 2011-05-03 | Curlin Medical Inc | Peristaltic pump assembly with cassette and mounting pin arrangement |
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| CN103334907A (zh) * | 2013-07-08 | 2013-10-02 | 吉林大学 | 悬臂式压电隔膜泵 |
| EP2868970B1 (de) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Regelungsvorrichtung |
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| GB2544236B (en) * | 2014-08-27 | 2020-10-28 | Ge Aviation Systems Llc | Airflow generator |
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| US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
| EP3337597B1 (de) | 2015-08-20 | 2022-11-30 | Cytiva Sweden AB | Verbessertes verfahren zur verbesserung der filtrationsausbeute in einem tangentialflussfiltrationssystem |
| US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
| JP6293825B2 (ja) * | 2016-07-12 | 2018-03-14 | 科際精密股▲ふん▼有限公司 | 圧電ポンプ及びその操作方法 |
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| TWI625462B (zh) * | 2017-01-05 | 2018-06-01 | 研能科技股份有限公司 | 微型氣壓動力裝置 |
| US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
| US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
| TWI680232B (zh) * | 2018-08-13 | 2019-12-21 | 科際精密股份有限公司 | 流體驅動裝置 |
| EP3722605A1 (de) * | 2019-04-11 | 2020-10-14 | FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. | Strömungserzeuger |
| JP2023544088A (ja) * | 2020-09-09 | 2023-10-20 | フラウンホーファー－ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン | 静電マイクロポンプ及び静電マイクロポンプを製造するプロセス |
| WO2022192292A1 (en) * | 2021-03-09 | 2022-09-15 | Aita Bio Inc. | Micropump with integrated piezoelectric technologies for providing valve and pump functionality |
| WO2023141072A1 (en) * | 2022-01-19 | 2023-07-27 | Aita Bio Inc. | Mems micropump with multi-chamber cavity for a device for delivering insulin |
| US20230293300A1 (en) * | 2022-03-16 | 2023-09-21 | Boston Scientific Scimed, Inc. | Fluid control system for an implantable inflatable device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US417035A (en) * | 1889-12-10 | Apparatus for feeding reagents | ||
| US1183486A (en) * | 1915-02-08 | 1916-05-16 | John L Pardue | Pressure-indicating device. |
| FR1177065A (fr) * | 1956-05-29 | 1959-04-20 | Kontak Mfg Co Ltd | Diaphragme et pompe à diaphragme |
| JPS60159387A (ja) * | 1984-01-30 | 1985-08-20 | Sharp Corp | ポンプ |
| CH679555A5 (de) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
| KR910012538A (ko) * | 1989-12-27 | 1991-08-08 | 야마무라 가쯔미 | 마이크로 펌프 및 그 제조 방법 |
| EP0435653B1 (de) * | 1989-12-27 | 1994-06-01 | Seiko Epson Corporation | Mikropumpe |
| US5271724A (en) * | 1990-08-31 | 1993-12-21 | Westonbridge International Limited | Valve equipped with a position detector and a micropump incorporating said valve |
-
1994
- 1994-12-21 US US08/640,797 patent/US5759015A/en not_active Expired - Lifetime
- 1994-12-21 SG SG1996007796A patent/SG44800A1/en unknown
- 1994-12-21 CA CA002179063A patent/CA2179063C/en not_active Expired - Fee Related
- 1994-12-21 EP EP95902252A patent/EP0737273B1/de not_active Expired - Lifetime
- 1994-12-21 DE DE69410487T patent/DE69410487T2/de not_active Expired - Lifetime
- 1994-12-21 AU AU11180/95A patent/AU681470B2/en not_active Ceased
- 1994-12-21 JP JP51787595A patent/JP3718724B2/ja not_active Expired - Lifetime
- 1994-12-21 WO PCT/IB1994/000435 patent/WO1995018307A1/fr active IP Right Grant
Non-Patent Citations (1)
| Title |
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| See references of WO9518307A1 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2469089A1 (de) | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Elektronisches Steuerungsverfahren und System für eine piezoelektrische Pumpe |
| WO2012085814A2 (en) | 2010-12-23 | 2012-06-28 | Debiotech S.A. | Electronic control method and system for a piezo-electric pump |
| RU2569796C2 (ru) * | 2010-12-23 | 2015-11-27 | Дебиотех С.А. | Пьезоэлектрическое насосное устройство и способ приведения в действие такого устройства |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3718724B2 (ja) | 2005-11-24 |
| DE69410487D1 (de) | 1998-06-25 |
| EP0737273B1 (de) | 1998-05-20 |
| CA2179063A1 (en) | 1995-07-06 |
| CA2179063C (en) | 2005-02-15 |
| DE69410487T2 (de) | 1998-11-05 |
| US5759015A (en) | 1998-06-02 |
| AU681470B2 (en) | 1997-08-28 |
| JPH09507279A (ja) | 1997-07-22 |
| AU1118095A (en) | 1995-07-17 |
| WO1995018307A1 (fr) | 1995-07-06 |
| SG44800A1 (en) | 1997-12-19 |
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