EP0617451A1 - Filtre en énergie d'électrons, produisant une image - Google Patents

Filtre en énergie d'électrons, produisant une image Download PDF

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Publication number
EP0617451A1
EP0617451A1 EP94102610A EP94102610A EP0617451A1 EP 0617451 A1 EP0617451 A1 EP 0617451A1 EP 94102610 A EP94102610 A EP 94102610A EP 94102610 A EP94102610 A EP 94102610A EP 0617451 A1 EP0617451 A1 EP 0617451A1
Authority
EP
European Patent Office
Prior art keywords
sector
electron energy
energy filter
filter according
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP94102610A
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German (de)
English (en)
Other versions
EP0617451B1 (fr
Inventor
Harald Prof. Dr. Rose
Stephan Uhlemann
Eugen Dr. Weimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss AG
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Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of EP0617451A1 publication Critical patent/EP0617451A1/fr
Application granted granted Critical
Publication of EP0617451B1 publication Critical patent/EP0617451B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/055—Arrangements for energy or mass analysis magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Definitions

  • Imaging electron energy filters are used in transmission electron microscopes to improve the contrast of the object image or of diffraction patterns by the selection of electrons of a certain energy range.
  • the registration of element distributions and energy loss spectra is also possible with such filter systems.
  • the dispersion in the energy-selective level of such spectrometers is about 1-2 ⁇ m per eV with an electron energy of 100 keV. This enables energy widths of around 1-2 eV to be set. Since the dispersion in the homogeneous magnetic fields decreases with increasing electron energy, filters with much larger dimensions are required to set the same minimum energy widths at higher electron energies. When used in an electron microscope, this leads to a considerable lengthening of the electron-optical column, as a result of which its mechanical Stability is reduced. In addition, the geometric image errors increase at the same time, since with larger-sized filters, off-axis rays are guided further away from the optical axis than with filters with a smaller dimension.
  • Magnetic spectrometers with inhomogeneous deflection fields are known for example from Review of Scientific Instruments, vol. 32, 1314 (1961) for electron spectroscopy.
  • the spectrometer has a single sector magnet, the pole shoe surfaces of which are inclined to one another.
  • the resulting gradient field causes focusing in addition to the beam deflection perpendicular to the plane of the electron beam axis.
  • the optical axes are not coaxial with one another when they enter or leave the filter. When used in electron microscopes, this leads to unstable overall structures.
  • a magnetic electron energy filter is to be created which, even at higher electron energies, in particular above 120 keV, allows a more compact structure with a simultaneously minimal minimum energy width.
  • an imaging electron energy filter which consists of several sector magnets for beam deflection. At least one first sector magnet has a homogeneous and at least one second sector magnet has an inhomogeneous deflection field.
  • inhomogeneous deflection fields By using inhomogeneous deflection fields, relatively large deflection angles can be realized, which can assume values over 120 °. Since the dispersion increases with the length of the path within the deflection fields, the dispersion is correspondingly large at large deflection angles, without larger radii of curvature and thus larger dimensions being required. A further reduction in dimensions is possible in that a sector magnet identifies an essentially homogeneous deflection field. Because this homogeneous deflection field can be traversed twice in different directions by the electron beam.
  • An advantageous embodiment of the invention has a first sector magnet with a homogeneous deflection field and two further sector magnets, each with inhomogeneous deflection fields. Field-free spaces are created between the sector magnets in which multipole elements are used Correction of second order image errors can be arranged.
  • a particularly compact arrangement is obtained if the distances between the sector magnets and the deflection angles are chosen so that the optical axis of the entering and exiting electrons touches or crosses twice in the homogeneous deflection field. This minimizes the distance between the filter input and the filter output.
  • the optical axis of the electron trajectories should be coaxial with itself when it enters and exits the filter.
  • the filter is optimally adapted to the structure of the electron microscope which is usually vertical for reasons of stability.
  • the sector magnets should be arranged symmetrically to a plane that is perpendicular to the plane in which the curved optical axis runs. When the electrons pass through the entire filter, some of the imaging errors already disappear for reasons of symmetry.
  • the electron energy filter according to the invention is particularly easy to manufacture if the pole shoe edges of the sector magnets are straight at the entry and exit surfaces of the electron beam.
  • the entry and exit angles between the optical axis and the pole shoe edges of the sector magnets should be 90 ° each time the first entry into the homogeneous deflection field, the entry and exit from the inhomogeneous deflection fields and the last exit from the homogeneous deflection field. Refractions of the electron beam upon entry into or exit from the magnetic fields are thereby avoided.
  • the path is relatively smooth and there are no focusing effects at the edges of the Sector magnets. This makes the filter relatively insensitive to misalignments.
  • the multipole lenses which are used to correct the imaging errors, should also be arranged symmetrically to the plane of symmetry.
  • two multipole lenses arranged symmetrically to one another can be excited identically via a common control.
  • a multipole lens should be arranged in front of the input image plane in front of the first sector magnet and behind the symmetrical output image plane, which consists of the superposition of a quadrupole and a hexapole.
  • the quadrupole field and the hexapole field should be adjustable independently of each other. By varying the quadrupole lenses in conjunction with the continuous quadrupole in the inhomogeneous sector magnets, the focusing in the direction perpendicular to the plane of the path can be set as desired.
  • the hexapole fields in turn, like the hexapole fields arranged between the individual sector magnets, serve to correct the image errors and to focus the electron beam in the plane of the path.
  • the multipole elements When the multipole elements are suitably positioned along the electron path, there is an energy filter with a total of seven hexapoles between the input image plane and the output image plane, of which one hexapole is arranged between the second and third sector magnets in the plane of symmetry, and the two superposed multipoles arranged in the input image plane and the output image plane possible that has been corrected with regard to all geometric image errors and the energy-dependent errors of the second stage that are essential in the respective operating mode.
  • the input image plane is then stigmatic and achromatic with high resolution mapped in the initial image plane.
  • the third-order distortion of the filter disappears for reasons of symmetry.
  • the electron energy filter in connection with an electron microscope, in particular with a transmission electron microscope, it is also important that the distance between the image planes and the crossover planes, i.e. the distance between the input image plane and the input diffraction plane and the distance between the output image plane and the output diffraction plane to which the distances given by the electron-optical imaging system of the electron microscope are adapted.
  • the external quadrupoles also have the advantage that they can be used to correct an astigmatism caused by construction errors.
  • the electron energy filter shown in FIG. 1 consists of three sector magnets (1, 2, 3), of which only the pole pieces (1a, 2a, 3a) below the drawing plane are shown.
  • the optical axis of the filter is labeled (4). This optical axis (4) is identical to the central beam of the electron beam for a given target energy. Due to the dispersion in the magnetic sectors, the exact path of a single electron depends on the respective electron energy and is not shown here for reasons of clarity.
  • the central electron beam enters the electron energy filter along a vertical axis from above.
  • the optical axis (4) of the filter coincides with the optical axis of the electron microscope when it enters and exits the filter.
  • the input image plane (Be) coincides with an intermediate image plane of the electron microscope and the input diffraction plane (De) coincides with a diffraction plane of the electron microscope.
  • the pole pieces (1a) of the first sector magnet (1) have flat parallel pole piece surfaces on the inside.
  • the pole pieces (2a, 3a) of the other two sector magnets (2, 3) are truncated double cones.
  • Circumferential grooves (1b, 2b, 3b) are provided in the edge regions of the pole shoes (1a, 2a, 3a) for receiving the excitation coils, not shown here.
  • the sector magnet (1) has two pole pieces with flat pole piece surfaces which are arranged in two planes parallel to the drawing plane in FIG. 1.
  • the electron entering along the optical axis (4) perpendicular to the leading edge (1d) of the deflection field with the target energy is deflected between the pole shoes (1a) by the magnetic field perpendicular to the plane of the drawing onto a circular path with a radius of curvature (R1).
  • the optical axis (4) runs through a corresponding circular arc section over an angle of approximately 135 °.
  • the inclination between the optical axis (4) and the trailing edge (1e) of the homogeneous sector magnet (1) focuses the electron beam in the direction of the magnetic field. This focusing effect can alternatively be generated by additional quadrupoles behind the sector magnet (1) if the optical axis (4) is perpendicular to the trailing edge (1e).
  • the electrons After exiting the first deflection field, the electrons first pass through a field-free space in which three hexapoles (6a, 7a, 8a) are arranged and then enter the deflection field of the second sector magnet (2).
  • the deflection field within the second sector magnet (2) is an inhomogeneous magnetic Gradient field that is generated between two pole shoe surfaces (2a, 2f) inclined to one another (see FIG. 2).
  • the optical axis of the electron tracks is again designated by (4).
  • the bobbins embedded in the recesses (2b) of the conical pole shoe surfaces (2a, 2f) are indicated by the cross-lattice hatching.
  • the angle of inclination ⁇ between the two falling lines of the conical surfaces (2a, 2f) is approximately 4 °.
  • the entire sector magnet (2) results from rotation about the axis (13) perpendicular to the plane of the optical axis (4).
  • the intersection (12) of the two falling lines of the conical surfaces (2a, 2f) is, seen from the optical axis (4), behind the axis (13).
  • the inclination of the two pole shoe surfaces (2a, 2f) creates a gradient field in the wedge-shaped gap between the pole shoes.
  • the field lines are circular arc sections around the intersection (12) of the falling lines of the conical surfaces (2a, 2f), the field strength being due to the outward direction (positive x direction, compare the corresponding coordinate systems in FIGS. 1 and 2) increasing gap thickness decreases.
  • the gradient field has the effect of a dipole field, which is additionally superimposed on a quadrupole field. Like the dipole field of a homogeneous deflection field, the dipole field deflects the electron path on a circular path section and focuses in the x direction.
  • the superimposed quadrupole component additionally causes the electron beam to be focused in the y direction perpendicular to the plane of the drawing in FIG. 1.
  • the optical axis (4) stands at the entry edge (2d) when it enters the second deflection field and when it exits the second deflection field at the trailing edge (2e) perpendicular to the leading and trailing edge (2d, 2e).
  • the optical axis of the electron beam runs parallel to the optical axis before entering the first deflection field and subsequently passes through the likewise inhomogeneous gradient field of the third sector magnet (3) and a second time through the homogeneous deflection field of the first sector magnet (1), where it exits at the trailing edge (1f).
  • the entire filter is constructed symmetrically to a central plane (5) perpendicular to the path plane (drawing plane in FIG. 1).
  • the structure of the third sector magnet (3) therefore results from the structure of the second sector magnet (2) by mirroring on the plane of symmetry (5).
  • three further hexapoles (8b, 7b, 6b) are arranged symmetrically with respect to the plane of symmetry (5) to the hexapoles (8a, 7a, 6a).
  • Another hexapole (9) is provided between the second sector magnet (2) and the third sector magnet (3) in the plane of symmetry (5).
  • Be real intermediate image of the input image level
  • Two further multipole elements (10, 11) are arranged in front of the input image plane (Be) of the filter and behind the output image plane (Ba) which is mirrored with respect to the symmetry plane (5).
  • Each of these two multipole elements (10, 11) consists of a superposition of a quadrupole with a hexapole, each of which can be excited independently of one another.
  • the electron energy filter stigmatically and achromatically maps the input image plane (Be) into the output image plane (Ba).
  • the filter dispersively images the input diffraction plane (De) into the output diffraction plane (Da).
  • the distances between the individual sector magnets (1, 2, 3) are at the in the three associated deflection areas adapted identical deflection angle so that the electron paths cross twice in the first passage through the first sector magnet (1) and in the second passage through the sector magnet (1).
  • the distance between the input image plane (Be) and the output image plane (Ba), measured along the optical axis of the electron microscope is particularly small.
  • the electron-optical column of the microscope is therefore only slightly extended by the installation of the filter according to the invention and the mechanical stability of the overall system is not significantly affected.
  • the essential errors in the (dispersive) diffraction plane can be corrected without changing the fields generated in the multipole components (10, 11). All in all, by appropriately setting the nine multipole components (6a, 7a, 8a, 9, 8b, 7b, 6b, 10, 11), all geometrical image errors of the second order and the essential energy-dependent errors of the second stage can be corrected.
  • the filter allows a very good energy resolution in the image by inserting a selection aperture in the output diffraction plane (Da).
  • Da output diffraction plane
  • the total dispersion is of the filter still about 10 ⁇ m per eV, so that with a selection aperture of 1 ⁇ m opening diameter, energy widths of 0.1 - 0.2 eV can still be set.
  • the high energy resolution also reduces the color error of the objective of the electron microscope, which limits the resolution. This leads to an improvement in the resolution and the image contrast, the resolution gain for uncorrected lenses up to approximately 20% and for spherically corrected lenses up to a factor of three.
  • the filter is also particularly insensitive to misalignments due to the smooth path, in particular by avoiding refractions at the edges of the sector magnets.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
EP94102610A 1993-03-26 1994-02-22 Filtre en énergie d'électrons, produisant une image Expired - Lifetime EP0617451B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4310559 1993-03-26
DE4310559A DE4310559A1 (de) 1993-03-26 1993-03-26 Abbildendes Elektronenenergiefilter

Publications (2)

Publication Number Publication Date
EP0617451A1 true EP0617451A1 (fr) 1994-09-28
EP0617451B1 EP0617451B1 (fr) 1997-03-26

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EP94102610A Expired - Lifetime EP0617451B1 (fr) 1993-03-26 1994-02-22 Filtre en énergie d'électrons, produisant une image

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US (1) US5449914A (fr)
EP (1) EP0617451B1 (fr)
JP (1) JP3732533B2 (fr)
DE (2) DE4310559A1 (fr)

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JP3139920B2 (ja) * 1994-07-25 2001-03-05 株式会社日立製作所 エネルギフィルタおよびこれを備えた透過電子顕微鏡
JP3363718B2 (ja) * 1995-11-28 2003-01-08 日本電子株式会社 オメガ型エネルギーフィルター
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JPH10125267A (ja) * 1996-10-16 1998-05-15 Jeol Ltd エネルギーフィルタ
JP3497336B2 (ja) * 1996-12-03 2004-02-16 日本電子株式会社 エネルギーフィルタ
JPH10302711A (ja) * 1997-02-27 1998-11-13 Jeol Ltd オメガ型エネルギーフィルタ
JP3376857B2 (ja) * 1997-05-07 2003-02-10 日新電機株式会社 イオン注入装置
JP3518271B2 (ja) * 1997-08-28 2004-04-12 株式会社日立製作所 エネルギーフィルタおよびこれを備えた電子顕微鏡
DE19860988B4 (de) * 1997-08-28 2007-12-13 Hitachi, Ltd. Elektronenmikroskop mit Energiefilter
DE19738070A1 (de) * 1997-09-01 1999-03-04 Leo Elektronenmikroskopie Gmbh Energiefilter, insbesondere für ein Elektronenmikroskop
DE19746785A1 (de) 1997-10-23 1999-04-29 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit Energiefilter
DE19855629A1 (de) 1998-12-02 2000-06-08 Leo Elektronenmikroskopie Gmbh Teilchenoptische Anordnung und Verfahren zur teilchenoptischen Erzeugung von Mikrostrukturen
JP3691954B2 (ja) * 1998-02-26 2005-09-07 日本電子株式会社 結像型エネルギフィルタ歪補正装置
JP3692011B2 (ja) * 1999-06-01 2005-09-07 日本電子株式会社 磁界型エネルギーフィルタ
JP2003504803A (ja) * 1999-07-02 2003-02-04 モーク マイケル ターゲット上への材料の蒸着とモニタリングとを同時に行なう方法及び装置
DE10001277A1 (de) * 2000-01-14 2001-07-19 Harald Rose Elektronenoptischer Korrektor zur Beseitigung der Bildfehler dritter Ordnung
DE10005347A1 (de) 2000-02-08 2001-08-09 Leo Elektronenmikroskopie Gmbh Elektronenenergiefilter mit magnetischen Umlenkbereichen
JP2002025485A (ja) 2000-07-06 2002-01-25 Jeol Ltd エネルギーフィルタ
US7022987B2 (en) 2001-02-20 2006-04-04 Carl Zeiss Nis Gmbh Particle-optical arrangements and particle-optical systems
DE10107910A1 (de) * 2001-02-20 2002-08-22 Leo Elektronenmikroskopie Gmbh Teilchenstrahlsystem mit einem Spiegelkorrektor
JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置
JP3867048B2 (ja) * 2003-01-08 2007-01-10 株式会社日立ハイテクノロジーズ モノクロメータ及びそれを用いた走査電子顕微鏡
US7341569B2 (en) * 2004-01-30 2008-03-11 Ekos Corporation Treatment of vascular occlusions using ultrasonic energy and microbubbles
US7351958B2 (en) * 2005-01-24 2008-04-01 Applera Corporation Ion optics systems
US7439520B2 (en) * 2005-01-24 2008-10-21 Applied Biosystems Inc. Ion optics systems
US7394069B1 (en) 2005-08-30 2008-07-01 Kla-Tencor Technologies Corporation Large-field scanning of charged particles
JP4685637B2 (ja) * 2006-01-05 2011-05-18 株式会社日立ハイテクノロジーズ モノクロメータを備えた走査電子顕微鏡
DE102009044989A1 (de) * 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
US8183526B1 (en) * 2011-02-11 2012-05-22 Electron Optica Mirror monochromator for charged particle beam apparatus
US9595417B2 (en) * 2014-12-22 2017-03-14 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH High resolution charged particle beam device and method of operating the same
US9472373B1 (en) * 2015-08-17 2016-10-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam separator device, charged particle beam device and methods of operating thereof
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JP6808772B2 (ja) * 2019-04-08 2021-01-06 日本電子株式会社 エネルギーフィルタおよび荷電粒子線装置
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Also Published As

Publication number Publication date
DE4310559A1 (de) 1994-09-29
EP0617451B1 (fr) 1997-03-26
US5449914A (en) 1995-09-12
JPH0737536A (ja) 1995-02-07
DE59402185D1 (de) 1997-04-30
JP3732533B2 (ja) 2006-01-05

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