EP0567894A1 - Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir - Google Patents

Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir Download PDF

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Publication number
EP0567894A1
EP0567894A1 EP93106347A EP93106347A EP0567894A1 EP 0567894 A1 EP0567894 A1 EP 0567894A1 EP 93106347 A EP93106347 A EP 93106347A EP 93106347 A EP93106347 A EP 93106347A EP 0567894 A1 EP0567894 A1 EP 0567894A1
Authority
EP
European Patent Office
Prior art keywords
pressure medium
lens
sleeve
cylinder
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93106347A
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German (de)
English (en)
Other versions
EP0567894B1 (fr
Inventor
Franz Bobst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Satisloh Oensingen AG
Original Assignee
Loh Engineering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Loh Engineering AG filed Critical Loh Engineering AG
Publication of EP0567894A1 publication Critical patent/EP0567894A1/fr
Application granted granted Critical
Publication of EP0567894B1 publication Critical patent/EP0567894B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005—Blocking means, chucks or the like; Alignment devices

Definitions

  • the invention relates to a device for guiding a workpiece or tool in the machining of toric or spherical surfaces of optical lenses on grinding or polishing machines, according to the preamble of patent claim 1.
  • the device is preferably intended for machining toric surfaces.
  • a toric surface is understood to mean a non-rotationally symmetrical aspherical surface which has two radii of different sizes in two sections perpendicular to one another, while all other sections represent curves of a higher order.
  • the grinding and polishing of the blanks of toric lenses is usually carried out using tools which have a continuous or interrupted toric surface which is complementary to the lens surface. It is essential that the two arcuate profiles of the toric lens are perpendicular to each other, especially in the case of correction lenses. It is therefore essential that in the course of clear grinding and polishing, the two particular perpendicular planes of the Grinding or polishing tools that are moved past a point on the surface of the lens always remain parallel to themselves.
  • devices for clear grinding and polishing have a tool which is caused to perform the most diverse possible orbital movements, but no rotary movement is provided about a vertical axis standing on the toric surface.
  • the devices for the clear grinding and polishing of toric lenses have a guide device which prevents such rotary movements and a driver device which ensures a change in position of the tool with respect to the lens.
  • the driver device essentially has a ball joint, in the axial direction of which the tool acts on the lens, and which deflects the various movements which cause a relative change in position between the lens and tool, a direction perpendicular to its axis, and thus a gimbal balance between Allows lens and tool.
  • a number of guiding devices are known which operate on this principle.
  • the known guiding devices which are used for individual machining are those in which the lens or the tool is held in place, while the other element, ie the tool or the lens, is guided by forks, drive rods and / or joints, in particular ball joints .
  • the guide systems working with a fork tend to make an eccentric adjustment, which prevents the torus from being fully realized.
  • the lens or tool is caused to rotate, while the other element, ie the tool or lens, is guided through a device which also has forks, drive rods and / or joints.
  • the devices used for guiding are correspondingly structured.
  • the lining for optical lenses known from German patent specification 22 52 503 made a significant advance in relation to the problems shown.
  • the orientation of the torus axes is not achieved via forks and the two otherwise usual ball pins, but rather a form-fitting lens carrier is used, which is guided by a rolling bellows in the circumferential direction and which holds the intermediate piece to be machined by means of an air cushion on the tool (or vice versa).
  • the lens carrier is designed to be axially displaceable, with the radial guide using a spherical pin Tip occurs around which the lens wearer can perform an oscillating movement, which is necessary for the positive, homokinetic adjustment of the tool and lens.
  • the effective contact pressure is transferred to the lens carrier via the roller bellows.
  • the entire chuck thus forms a homokinetic coupling, which allows the torque-free transmission of torques between the lens holder and the tool and, at the same time, hermetically seals the ball joint against the abrasive polishing and grinding agents.
  • the known chuck described above is according to the prior art (Loh Toro-X 2000, grinding and polishing machine for the recipe production of the companies Loh Optikmaschinen KG in CH-4702 Oensingen and Wilhelm Loh Wetzlar Optikmaschinen GmbH Co. KG in DE-6330 Wetzlar) used on an axially movable quill, on the inner end of which the receiving chuck is concentrically attached.
  • the respective position of the quill must be readjusted each time the workpiece or tool is changed in order to ensure that the receiving chuck functions properly.
  • the known device with the advantageous bellows receiving chuck must be operated by hand for the axial movements. Workpieces can also only be changed by hand.
  • the invention has for its object to provide a device based on the preamble of claim 1, in which to realize an automatic workpiece and tool change, the quill is automatically added or set and is held in the working position with optimal balancing effectiveness of the feed chuck.
  • the quill is moved axially by a pressure medium cylinder and piston arrangement through a pressure medium which simultaneously actuates the receiving chuck and brings it into a position which is most suitable for homokinetic compensatory movements.
  • all adjustment and delivery movements can be controlled exclusively and automatically by the pressure medium. This not only saves time, it also ensures a consistently high processing quality.
  • Gases and liquids can be used as pressure medium, but compressed air is preferred.
  • the desired balance of forces between the forces generated by the pressure medium cylinder and piston arrangement and the forces acting in the receiving chuck is preferably achieved in accordance with claim 2.
  • the measures of claim 4 ensure that not only the piston of the pressure medium cylinder and piston assembly is retracted after a working cycle, but that the intake chuck is brought into a position by the vacuum used, which favors an automatic change of the parts to be changed.
  • Claim 5 contains features for a special design of the parts forming the ball joint and their attachment to the quill.
  • An expedient design of the guide pin carrying the ball head of the ball joint can be seen from claim 6.
  • Claims 7 and 8 characterize a stop arrangement for the guide pin with integrated valve device for blocking the pressure medium supply to the receiving chuck when the guide pin is pushed out to the maximum.
  • the design of the device according to claims 9 to 11 is advantageous. This ensures that the intermediate piece holding the lens is latched and positioned on the lens holder of the receiving chuck, which facilitates the automatic loading and positioning of the parts to be changed.
  • the device can also be designed according to claim 12.
  • the device shown in Fig. 1 is part of a grinding or polishing machine, not shown, on which several of the devices shown (for example two) can be arranged in parallel. Such machines are used for prescription lens processing.
  • a rotationally symmetrical receiving chuck 2 is attached at the lower end of a quill 1.
  • the receiving chuck 2 has a bell-shaped flange 3 with a concentric hollow pin 4 and is non-rotatably and axially non-displaceably attached to the lower end of the sleeve 1 and fastened there in a suitable manner.
  • the outer wall 7 of a bellows 8 is firmly and tightly clamped between a peripheral wall 5 of the flange 3 and an outer ring 6 attached to it.
  • the inner wall 9 of the roller bellows 8 is fastened tightly to the cylindrical peripheral surface of a lens carrier 10.
  • the bellows 8 consists of an elastomeric material with an embedded reinforcement insert, which does not hinder the bending of the bellows, but excludes its elastic expansion.
  • the bellows can roll without being stretched and is rigid in the circumferential direction. Rotations of the lens carrier 10 with respect to the flange 3 can therefore not occur in the machining operation.
  • the rolling bellows 8 seals an articulated chamber 12 essentially delimited by the flange 3 and the lens carrier 10.
  • a ball joint consisting of a ball head 13 which engages in a ball socket 14 located in the lens carrier 10.
  • the ball head 13 is located at the free end of a guide pin 15 which is guided axially displaceably in a piston-like manner within an axial bore 11 which is continuous over the length of the sleeve 1 and within a guide bush 16 inserted therein.
  • the guide pin 15 has a longitudinal bore 17 closed at both ends, which is connected by an upper transverse bore 18 to the axial bore 11 and by a lower transverse bore 19 to the joint chamber 12 forming a pressure medium space.
  • the receiving chuck 2 with its ball joint 13, 14 and the rolling bellows 8 forms an exactly backlash-free, homokinetic coupling between the lens carrier 10 and the flange 3 in the circumferential direction because of the rigidity of the rolling bellows Rigid bellows 8 does not hinder the tiltability of the lens carrier 10 about the ball joint 13, 14 relative to the flange 3, so that tilting compensatory movements of the lens carrier 10 are possible without restriction.
  • the bellows 8 hermetically seals the ball joint 13, 14 against the abrasive polishing and grinding agents.
  • the lens carrier 10 is detachably latched with an intermediate piece 21, which is concentrically attached thereto and holds the lens 20.
  • an intermediate piece 21 is provided on a lower cylindrical wall of the lens carrier 10 and a circumferential outer groove 23 on a complementary cylindrical wall of the intermediate piece 21.
  • An O-ring 24 is inserted into the circumferential inner groove 22, which is the locking element effective between the two grooves 22, 23.
  • the intermediate piece 21 engages in a form-fitting and positioning manner in the lens carrier 10.
  • the intermediate piece 21 sits on the grinding or polishing tool 25 with the interposition of the lens 20 fastened to it for processing.
  • the sleeve 1 can be moved axially in the manner described below by a pressure medium cylinder and piston arrangement arranged coaxially thereto.
  • the piston 26 is designed as an annular piston attached to the quill 1, which is displaceable within the cylinder 27 with the quill 1 acting as a piston rod.
  • the cylinder 27 is closed at one end by an upper cylinder cover 29 provided with a pressure medium chamber 28.
  • the pressure medium chamber 28 is located within a cup-shaped extension 30 of the cylinder cover 29.
  • the sleeve 1, which dips into the pressure medium chamber 28 with its upper end, is guided axially displaceably but non-rotatably in the upper cylinder cover 29.
  • a guide ring is fastened axially immovably and non-rotatably within the upper cylinder cover 29.
  • the Quill 1 passes through the guide ring 31 and is non-rotatable with respect to it by multi-spline toothing elements or the like, which are partly attached to the quill 1 above the piston 26 and partly in the corresponding through bore of the guide ring 31.
  • connection bore 32 for the optional supply of the pressure medium or the application of a negative pressure.
  • the connection bore 32 is in constant communication with both the pressure medium chamber 28 and with a pressure medium space 33.
  • the pressure medium space 33 is delimited by the cylinder 27, the upper cylinder cover 29, the outer surface of the sleeve 1 and the piston 26. Since there is no pressure difference between the pressure medium chamber 28 and the pressure medium space 33 due to the arrangement described, a seal between the sleeve 1 and the upper cylinder cover 29 or the guide ring 31 is omitted, as a result of which the sleeve 1 passes through the guide ring 31 with low friction.
  • the sleeve 1 With its end carrying the receiving chuck 2, the sleeve 1 is axially displaceably guided through a lower cylinder cover 34 which closes the lower end of the cylinder 27.
  • a seal between the lower cylinder cover 34 and the sleeve 1 passed through it is not necessary to reduce friction because no pressure medium is supplied to the cylinder space between the piston 26 and the lower cylinder cover 34.
  • This space is in permanent communication with the outside atmosphere via a ventilation opening 35 through the lower cylinder cover 34.
  • the two cylinder covers 29 and 34 and the cylinder 27 are held together by suitable means.
  • the entire device can, for example, by means of the lower cylinder cover 34 on a crosshead or the like. be attached to the grinding and polishing machine, which is movably driven (not shown) in accordance with the kinematic requirements for machining toric surfaces.
  • the pressure medium space of the joint chamber 12 and the pressure medium space 33 of the pressure medium cylinder and piston arrangement 26, 27 communicate with one another, i.e. are directly connected to the connection bore 32 in the case of the pressure medium chamber 33 and indirectly in the case of the pressure medium chamber of the joint chamber 12.
  • the pressure medium supplied via the connection bore 32 passes through a feed bore 36 in the upper cylinder cover 29 or in the guide ring 31 into the pressure medium chamber 33.
  • pressure medium of the same pressure passes from the connection bore 32 into the pressure medium chamber 28 and from there via the axial bore 11 in the sleeve 1 and via the bores 18, 17 and 19 in the guide pin 15 into the pressure medium chamber of the joint chamber 12.
  • the pressure medium chamber of the joint chamber 12 and the pressure medium chamber 33 located above the piston 26 are therefore acted upon simultaneously by the pressure medium.
  • the dimensions of the pressure medium effective surfaces on the piston 26, including the end ring surface of the sleeve 1 located in the pressure medium chamber 28, on the one hand, and the pressure medium active surfaces in the receiving chuck 2, on the other hand, are designed for a balance between the axially effective forces directed in the opposite working position.
  • the bellows 8 should have the cross-sectional configuration shown in FIGS.
  • Tilting movements ie compensating movements of the lens carrier 10, on the other hand, are more difficult or at least restricted if the rolling bellows 8 have the configuration shown in FIGS. 2 and 3 shows.
  • the pressure medium applied to the receiving chuck 2 is too high, while in FIG. 3 it is too low.
  • there is a tightening of the bellows which impairs the tilting movement of the rolling bellows 8.
  • the quill 1 and the receiving chuck 2 assume approximately the position shown in FIG. 1, in which the aforementioned balance of forces is present and a sufficient contact pressure is applied between the workpiece and the tool for the intended machining process.
  • the guide pin 15 also has a special feature illustrated by FIG. 5. When it is acted upon by the pressure medium on its end face, its outward displacement path is limited by a stop. For this purpose, an O-ring 37 inserted into a circumferential groove of the same is provided at the upper end of the guide pin 15 and, when the guide pin is pushed out to the maximum, strikes the end face 38 of the guide bush 16 inserted into the axial bore 11 of the sleeve 1. This arrangement also acts as a valve device.
  • the device is moved into the working position by supplying the pressure medium to the connection bore 32.
  • the pressure medium flows through the connection bore 32 into the pressure medium space 33, the pressure medium chamber 28 and via the bores described in the pressure medium space of the joint chamber 12.
  • the rolling bellows 8 with the lens carrier 10 and the intermediate piece 21 holding the lens 20 is extended downward in the receiving chuck 2, the stop arrangement described with valve device at the upper end the guide pin 15 prevents an ancestor from being too wide.
  • the piston 26 extends with the sleeve 1 until the workpiece, ie the lens 20, is pressed against the tool to the extent necessary for the machining.
  • the device is returned to its starting position, the sleeve 1 being returned to its loading and starting position by applying a negative pressure via the connection bore 32 to the pressure medium chamber 33.
  • the lens carrier 10 with the intermediate piece 21 and the processed lens 20 located thereon is lifted off the tool 25. Since the negative pressure applied also acts on the pressure medium chamber of the joint chamber 12 via the bores and spaces described, the membrane formed by the bellows 8 and the lens carrier 10 is pulled against the intermediate piece 21 and the lens 20 against the stop in the bell-shaped flange 3 .
  • the precise positioning of the workpiece or of the parts carrying the workpiece required for automatic loading is achieved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
EP93106347A 1992-05-01 1993-04-20 Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir Expired - Lifetime EP0567894B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4214266A DE4214266A1 (de) 1992-05-01 1992-05-01 Vorrichtung zur fuehrung eines werkstuecks oder werkzeugs bei der bearbeitung torischer oder sphaerischer flaechen optischer linsen auf schleif- oder poliermaschinen
DE4214266 1992-05-01

Publications (2)

Publication Number Publication Date
EP0567894A1 true EP0567894A1 (fr) 1993-11-03
EP0567894B1 EP0567894B1 (fr) 1995-11-29

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EP93106347A Expired - Lifetime EP0567894B1 (fr) 1992-05-01 1993-04-20 Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir

Country Status (3)

Country Link
US (1) US5421770A (fr)
EP (1) EP0567894B1 (fr)
DE (1) DE4214266A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0740979A1 (fr) * 1995-05-03 1996-11-06 ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) Pré-molette pour le glantage d'une lentille optique, et son procédé de mise en oeuvre
EP1034888A2 (fr) * 1999-03-12 2000-09-13 Mitsubishi Materials Corporation Support et dispositif de polissage de plaquette semiconductrice, et procédé de fabrication de plaquettes semiconductrices
US7503834B2 (en) 2004-01-15 2009-03-17 Carl Zeiss Vision Gmbh Apparatus and a method of polishing an optical surface; an optical component; and a method of manufacturing a polishing tool
US7588480B2 (en) 2000-02-03 2009-09-15 Carl Zeiss Vision Gmbh Polishing head for a polishing machine
CN102172867A (zh) * 2011-02-16 2011-09-07 厦门大学 参数可调式大口径平面光学元件抛光夹具装置
US8979618B2 (en) 2010-04-30 2015-03-17 Carl Zeiss Vision Gmbh Polishing tool for processing optical surfaces
US20180333822A1 (en) * 2013-07-22 2018-11-22 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus
CN110977678A (zh) * 2019-12-03 2020-04-10 上饶市恒辉玻璃有限公司 一种光学镜片表面划伤修复装置

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DE4442181C1 (de) * 1994-11-26 1995-10-26 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung optischer Flächen
DE19800841C2 (de) * 1998-01-13 2001-07-19 Optotech Optikmasch Gmbh Verfahren zum gleichzeitigen Polieren von mindestens zwei optischen Linsen und Vorrichtung zur Durchführung des Verfahrens
US6080044A (en) * 1998-03-26 2000-06-27 Gerber Coburn Optical, Inc. Fining/polishing machine
US6089960A (en) * 1998-06-03 2000-07-18 One Source Manufacturing Semiconductor wafer polishing mechanism
FR2784923B1 (fr) * 1998-10-22 2001-01-05 Essilor Int Dispositif de serrage d'un palet sur une machine a deborder les verres optiques
US6257968B1 (en) * 1998-12-16 2001-07-10 National Optronics, Incorporated Quick-release lens clamp pad assembly for use in eyeglass lens processing
DE10053230A1 (de) * 2000-10-26 2002-05-08 Schneider Gmbh & Co Kg Spannfutter für eine Vorrichtung zum Polieren von Linsen und Vorrichtung mit einem solchen Spannfutter
DE10057228B4 (de) * 2000-11-18 2006-04-20 Optotech Optikmaschinen Gmbh Verfahren zum Schleifen von optischen Linsen mittels Ring- und Formwerkzeugen und Vorrichtung zur Durchführung des Verfahrens
EP1894672B1 (fr) 2002-01-09 2012-05-02 Hoya Corporation Procédé de poilssage
DE10250856A1 (de) 2002-10-25 2004-05-13 Carl Zeiss Verfahren und Vorrichtung zum Herstellen von optischen Gläsern
DE10319945A1 (de) * 2003-05-02 2005-01-27 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung von optisch wirksamen Flächen
EP1728590B1 (fr) * 2004-02-20 2009-08-26 Hoya Corporation Dispositif et procede pour bloquer une lentille optique
KR100597649B1 (ko) * 2004-11-26 2006-07-05 삼성전자주식회사 베리어 메탈을 포함하는 반도체 디바이스의 제조방법 및그 구조
DE202008016454U1 (de) * 2008-06-17 2009-03-05 Satisloh Gmbh Werkzeug zum Polieren und Feinschleifen von optisch wirksamen Flächen in der Feinoptik
DE102009036981A1 (de) 2009-08-12 2011-02-17 Satisloh Ag Flexibles Polierwerkzeug zur Feinbearbeitung von optisch wirksamen Flächen an insbesondere Brillengläsern
TW201134971A (en) * 2010-04-14 2011-10-16 Hon Hai Prec Ind Co Ltd Sputtering bracket and sputtering machine
FR2980386B1 (fr) * 2011-09-27 2014-09-12 Visioptimum Internat Dispositif de polissage de lentilles optiques
JP6270865B2 (ja) * 2013-10-29 2018-01-31 オリンパス株式会社 レンズ保持具
CN105764649B (zh) * 2013-11-27 2018-04-03 依视路国际公司 用于以气动方式封阻光学镜片的固持器
EP3418000B1 (fr) * 2017-06-19 2024-02-21 Schneider GmbH & Co. KG Porte-outil et dispositif de polissage de lentilles
CN109352553A (zh) * 2018-10-19 2019-02-19 山东中衡光电科技有限公司 一种光学镜面球面隔膜支撑装置

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0740979A1 (fr) * 1995-05-03 1996-11-06 ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) Pré-molette pour le glantage d'une lentille optique, et son procédé de mise en oeuvre
FR2733710A1 (fr) * 1995-05-03 1996-11-08 Essilor Int Pre-molette pour le glantage d'une lentille optique, et son procede de mise en oeuvre
US5669807A (en) * 1995-05-03 1997-09-23 Essilor International Compagnie Generale D'optique Preform for attaching a holding member to an optical lens, and method of using it
EP1034888A2 (fr) * 1999-03-12 2000-09-13 Mitsubishi Materials Corporation Support et dispositif de polissage de plaquette semiconductrice, et procédé de fabrication de plaquettes semiconductrices
US6242353B1 (en) 1999-03-12 2001-06-05 Mitsubishi Materials Corporation Wafer holding head and wafer polishing apparatus, and method for manufacturing wafers
EP1034888A3 (fr) * 1999-03-12 2001-06-20 Mitsubishi Materials Corporation Support et dispositif de polissage de plaquette semiconductrice, et procédé de fabrication de plaquettes semiconductrices
KR100715384B1 (ko) * 1999-03-12 2007-05-07 가부시키가이샤 에바라 세이사꾸쇼 웨이퍼 보유 지지 헤드, 웨이퍼 연마 장치 및 웨이퍼 제조방법
US7588480B2 (en) 2000-02-03 2009-09-15 Carl Zeiss Vision Gmbh Polishing head for a polishing machine
EP1251997B2 (fr) † 2000-02-03 2011-06-08 Carl Zeiss Vision GmbH Tete de polissage pour une polisseuse
US8011996B2 (en) 2000-02-03 2011-09-06 Carl Zeiss Vision Gmbh Polishing head for a polishing machine
EP1386694B2 (fr) † 2000-02-03 2013-01-09 Carl Zeiss Vision GmbH Procédé et machine de polissage
US7503834B2 (en) 2004-01-15 2009-03-17 Carl Zeiss Vision Gmbh Apparatus and a method of polishing an optical surface; an optical component; and a method of manufacturing a polishing tool
US8979618B2 (en) 2010-04-30 2015-03-17 Carl Zeiss Vision Gmbh Polishing tool for processing optical surfaces
CN102172867A (zh) * 2011-02-16 2011-09-07 厦门大学 参数可调式大口径平面光学元件抛光夹具装置
CN102172867B (zh) * 2011-02-16 2012-10-10 厦门大学 参数可调式大口径平面光学元件抛光夹具装置
US20180333822A1 (en) * 2013-07-22 2018-11-22 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus
US10252393B2 (en) * 2013-07-22 2019-04-09 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus
CN110977678A (zh) * 2019-12-03 2020-04-10 上饶市恒辉玻璃有限公司 一种光学镜片表面划伤修复装置

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US5421770A (en) 1995-06-06
DE4214266A1 (de) 1993-11-04
EP0567894B1 (fr) 1995-11-29

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