EP0545064B1 - Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter - Google Patents
Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter Download PDFInfo
- Publication number
- EP0545064B1 EP0545064B1 EP92118282A EP92118282A EP0545064B1 EP 0545064 B1 EP0545064 B1 EP 0545064B1 EP 92118282 A EP92118282 A EP 92118282A EP 92118282 A EP92118282 A EP 92118282A EP 0545064 B1 EP0545064 B1 EP 0545064B1
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- EP
- European Patent Office
- Prior art keywords
- condenser
- energy filter
- screen
- cylinder
- filter according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
Definitions
- the present invention relates to a method for Filtering of electrically charged particles according to the The preamble of claim 1, an energy filter according to that of claim 6 and an analyzer with such an energy filter according to claim 24.
- the mentioned energy filtering is particularly used in connection with plasma mass spectrometry.
- a filter system is formed, creating a beam charged molecular or atomic particles a selection regarding transmission is made in Function of the masses of the mentioned particles.
- the present invention on the technology of the mentioned energy filtering directed.
- Such is e.g. from EP-A-0 223 520 previously known.
- the one known from it works Energy filter technology based on the well-known principle of the cylinder mirror. Following this principle charged particles of a particle beam in the field space a cylindrical capacitor and are introduced through the cylinder jacket forming the outer electrode electrostatically deflected, i.e. mirrored to then exit the cylinder assembly.
- the energy filter effect is based on being higher energetic particles at a given electrostatic Field, a less curved trajectory pass through as deeper energetic particles with what only particles of a given energy band an intended exit opening through the mirror space to reach.
- the beam of charged particles axially supplied to the mirror cylinder assembly occurs into a coaxial opening arrangement which is formed is by a first pair, a deflection capacitor forming electrode surfaces. These electrode surfaces define a radially outward curved Field space, in which, according to the charge polarity and the capacitor polarity, charged particles be deflected radially outwards. After leaving of the curved, entrance-side field space the charged particles in the actual mirror room of the cylinder mirror, consisting of a internal coaxial electrode core and the coaxial Mirror capacitor outer jacket.
- the charged particles are redirected and occur symmetrically with respect to a radial plane to the entrance-side, curved field space, in the formed between two further electrode surfaces Exit field space, from which they, accordingly steered back, in one axis, with the entry axis aligned, emerge from the filter arrangement.
- the known filter arrangement mentioned takes effect that between the input pair of electrodes, which defines the curved input field space, generated electrostatic field even in the coaxial Cylinder condenser mirror space, with which on the one hand the electrostatic field conditions, due to the resulting overlays in the transition area the particles from the input field space into the cylinder mirror space, are difficult to estimate, and with what decoupled setting of the electrostatic fields, because of the field penetration, is not possible.
- the outer, axially adjacent capacitor electrodes of the the two field spaces are separated by an air gap.
- the inner capacitor electrode of the first extends Pair axially over a portion of the inner capacitor electrode of the second pair and, axially, also over a region of the outer capacitor electrode of the second Couple.
- the beam then enters another field space or spatial area, formed by a second, continuously curved Pair of capacitor electrodes.
- the inner capacitor electrode of this second pair is, terminal, with oneself perpendicular to the beam entering the second field space extending aperture portion provided, wherein an opening is provided, through which the beam, after passing through the first field space, enters the second.
- the structure is special simply by using the screen as one of the Electrodes for the first electrostatic field is used.
- the beam is substantially parallel exits to the direction of entry.
- An advantage of the filter arrangement mentioned above as known according to EP-A-0 223 520 is its coaxial structure. Coaxial to Axis of the cylinder mirror arrangement with the cylinder capacitor are also inlet and outlet deflection electrodes.
- the fed Ray is at a sharp, kind of singularity Tip of the cylindrical core forming an electrode surface divided and runs mirror-symmetrically to the axis through the arrangement. As is well known, such tips form high ones Field strengths.
- the cylindrical capacitor formed by the two central pairs of electrodes, the entry and exit arrangements through the outer electrode pairs.
- a cross-sectional quadrant of the cylindrical capacitor as a mirror capacitor used and there are entry and exit arrangements in the axially symmetrically opposite cross-sectional quadrant intended.
- the asymmetrical structure enables also not to provide any radial brackets in the mirror room.
- the inventive energy filter on the inventive one Analyzer becomes a selective adjustability optimally enables the energy spectrum to be supplied to the mass filter, where in the preferred variants of the Energy filter with aligned beam entry and exit axes the entire analyzer structure becomes compact.
- An electron impact ionization source is preferably attached to it provided according to the wording of claim 25. It follows thanks to the axially extended accelerator tube, which means the neutral particles homogeneous, with the accelerating grid controllable, ionized by electron bombardment, a high Ionization yield. Especially in their training after Claim 26 or 27 results in an extremely homogeneous ionization distribution.
- the energy filter according to the invention can be well-known considerations, and in particular can the mentioned energy filter thanks to the decoupled adjustability its "filter stages" as an extremely narrow-band energy filter be used. This is because the vote of the mentioned "Filter stages” due to their field decoupling by the provided shielding can be done optimally.
- the energy filter ensures that the Beam propagation through the filter without becoming one Displacement of the entry and exit axis of the Lead beam.
- FIG. 1 schematically shows a longitudinal section through a known deflection arrangement for a beam of charged particles, for example known from EP-A-0 223 520.
- the beam of positively charged ions 1 enters a curved field space 3, formed between essentially equally curved ones Electrode surfaces 3a and 3b on electrode bodies 3a ', 3b'.
- an electrostatic field E 3 is generated in the field space 3 , essentially perpendicular to the dashed line of the beam S of charged ions 1.
- the field E 3 shows the Ions are deflected through the curved field space 3 from their original entry direction.
- Ions with greater kinetic energy experience less deflection in field E 3 than ions with lower kinetic energy.
- essentially ions of a defined energy band pass through the curved field space 3, while higher-energy and lower-energy ions collide with one of the two electrode surfaces and are neutralized.
- the electrode surface 3b on the outside of the curvature is continued at an acute angle after the exit region 5 from the field space 3 to the exit direction of the particle beam and forms with this extension electrode surface 7b of a further pair of electrode surfaces with 7a.
- a further electrostatic field E 7 is created between the pair of electrode surfaces 7a and 7b, essentially polarized inversely with respect to the field E 3 , with which the ions are redirected back in the path shown schematically in dashed lines, possibly already to an outlet arrangement 4 shown in dashed lines 7 applies that the ions are deflected more or less according to their kinetic energy, so that only ions of a certain energy band hit the opening at the outlet arrangement 4 and leave the energy filter.
- a well-known stray field is created in the field area 7 at the exit area 5 of the field space 3, whereby a superimposition of this stray field E 37 and the primary field E 7 prevailing there arises in this area with a resulting field that is both of E 7 as well depends on E 3 .
- a shield ring 9 is provided and, as proposed at the same time, is connected to the same potential as the electrode surfaces 3b and 7b, the result is the additional field E 79 shown in FIG. 1, which depends on the field E 7 and depending on the ion polarity exerts an accelerating or decelerating effect on the ions arriving in the field space 7 and thus falsifies their paths in the sense of poorer energy resolution or transmission.
- the field spaces correspond to 3 and 7 of FIG. 1 regarding the prevailing electrostatic Fields decoupled, with the above-mentioned interference effects to be avoided on the beam and due to the mutual Field isolation the electrostatic conditions in both field rooms independently of each other can be optimally adjusted.
- a shield 11 is provided according to the invention, which the beam S, as shown in dashed lines, on one Passes through slot 13.
- the potential of the screen 11 can initially be set as desired (dashed line at 6) if, by a suitable choice of the geometric arrangement of screen 11, electrodes 3a and 3b, the influence of the field between these three electrodes on the kinetic energy and deflection of the particles 1 between the exit zone 5 and passage slot 13 is minimized.
- the screen 11 is placed on the potential of the outer electrode 3b '.
- the preferred entry angle ⁇ 45 ° the influence of the electrostatic field E 11a between the screen 11 and the electrode body 3a 'is negligible due to the oblique passage of the space D through the beam.
- the screen 11, as further shown in FIG. 2, is preferably used as an electrode of the pair 7a, 7b according to FIG. 1. As can be seen, there is no field influence between the fields E 7 and E 3 due to the provision of a screen 11 penetrated by the beam, even if combined with the electrode 7b for the essential structural simplification.
- FIG. 3 schematically shows a first preferred embodiment of the arrangement shown in principle with reference to FIG. 2. Again, the same item numbers are used for the same structural parts.
- the curvature outer electrode surface 3b or the body 3b 'defining it is continued away from the electrode surface 3a, and it surrounds - in one or more parts - this continuation 3d, in the sense of 3b' potentially identical parts, a cavity 15 which is traversed at an oblique angle by the beam between the exit region 5 and the passage slot 13.
- the interference field E 3a arises in accordance with the dimensions of the chamber 15 and the potential difference between the electrode surfaces 3b and 3a practically only in zones of the space 15 which are not traversed by the beam S, so that this interference field has hardly any influence on the beam deflection or the energy of its particles takes.
- the cavity 15 is, in particular in its from Beam S traversed area, essentially field-free, because of walls at the same potential edged.
- the one opposite the exit area 5 Wall section which borders the space 15, in turn forms the electrode surface 7b of the another pair of electrode surfaces 7a, 7b, where between the beam, following the principle of reflection, is redirected becomes.
- the Beam path in field-free room 15 before entry optimized in the field space 7, for example focused become.
- the aperture 15a are outer Hidden parts of the beam. All without that further fields would have to be taken into account.
- FIG. 4 is a preferred embodiment of the inventive Energy filter shown in the constructed essentially symmetrically to a plane E. is and in mirror image two of the with reference to FIG. 2 or 3 arrangements shown. There are again the same for the same components or sizes Position symbol used.
- deflection fields E 3 and field E 7 for deflecting positive ions are entered.
- this arrangement allows the entry axis A E and the exit axis A A to be aligned on the filter according to the invention by corresponding arrangement of the two curved field spaces 3 on the input and output sides, which, for the time being also without rotationally symmetrical design, creates the possibility of an analyzer with a downstream mass spectrometer , in particular a quadrupole mass spectrometer and possibly an upstream ionization source, in the common entry / exit axis A EA .
- the screen sections 11 can, if appropriate, be put together or separately, each at different potentials with respect to part 3b '. Of course, this requires electrical insulation of the parts mentioned.
- the inlet arrangement with curved field spaces 3, inner electrode surfaces 3a and outer electrode surfaces 3b and the electrode pairs 7a and 7b is cylindrical with a cylinder axis A Z.
- the incoming beam S is split at a sharp tip P of an inner cylinder body 3b ', which forms the electrode surfaces 3b and 7b and is mounted on a retaining web 17 in the field space 7.
- the beam path S is mirror-symmetrical to the cylinder axis A Z , in that the incoming beam S, as mentioned, is divided at the tip P - a kind of singularity - and passes through electrode pairs formed in mirror image with respect to the axis A Z or field fields therebetween. Because of the tip P, ions entering the axis A Z cannot pass through the arrangement. This also applies to ions that enter close to the axis A Z. Ions that can just pass the tip P have unfavorable entry parameters with respect to the cylinder mirror in space 7.
- FIG. 6 an energy filter arrangement according to the invention is again shown schematically, in which on the one hand with mirror-image formation on the input and output sides, for example to plane E, input axis A E and exit axis A A , as shown, in the cylinder axis A Z of the cylindrical filter may lie, but a beam splitting is avoided.
- FIG. 6 readily shows the arrangement in which the outer edge of the filter, essentially given by the outer electrode surfaces 7a, is cylindrical to the axis A Z , but not within the cylinder the beam path of the beam S.
- the cross-sectional dimension of the filter is poorly used in this configuration, in which the coaxiality of the filter structure, beam feed and path guidance can be realized. This is improved in the preferred embodiment, as shown in FIG. 7.
- the design according to FIG. 7 is much simpler in terms of production technology. It was assumed that holding onto a beam in and out of alignment with the cylinder axis A Z brings only minor advantages for the compilation of an analyzer system and these advantages are practically retained if the input axis A E and the exit axis A A are in alignment, the cross-sectional expansion is better utilized and significant advantages are obtained in terms of production technology.
- the jet inlet and jet outlet are axially aligned, but offset in such a way with respect to the cylinder axis A ' Z that if the inlet and outlet are provided in a cross-sectional quadrant Q 1 , the field space 7, in which the beam is deflected back in a mirror-reflecting manner, is arranged in the quadrant Q 2 opposite to the axis A ' Z.
- the axis A ' Z is shifted with respect to the axes A E and A A , as shown at A' Z in FIG. 6.
- FIG. 8 schematically shows a cross-sectional illustration along line IIX-IIX of FIG. 7, the two bodies defining the electrode surfaces 3a and 3b again being designated 3a ′ and 3b ′ and, in dash-dot lines, the quadrants Q 1 , Q 2 are entered.
- the insulation 9 between the parts 3a ', 3b' is visible, as is of course provided in some way in all the design variants according to FIGS. 2 to 4, 6 to 7.
- the cross-sectional dimension of the filter is better utilized.
- Fig. 9 the essential elements are preferred Energy filter according to the present invention shown in longitudinal section, an inventive Filter, which one Providing one Between the following field spaces and Utilization of the cylinder mirroring without beam splitting, taking advantage of the cross-sectional extent of the mirror cylinder, are realized according to a Combination of the arrangements according to FIGS. 4 and 7. Again, to facilitate cross-comparisons chosen the same reference numerals.
- the electrode bodies 3a ', 3b' are rotating bodies.
- the two parts 3a 'and 3b' that define the field space 3 are, as shown at 20, electrically insulated, corresponding to 9 of FIG. 8.
- the exit direction for the beam S from the curved field space 3 in the exit region 5 is A E and / or A Z approx. 45 °.
- the hollow cylinder 3b ' forms the essentially field-free spaces 15 and has the passage slots 13 for the deflected beam S.
- the mirror cylinder 7a' is provided, which forms the electrode surface 7a as a cylindrical capacitor surface with respect to the electrode surface 7b on the hollow cylinder 3b '.
- the beam outlet again with a curved field space 3, is constructed symmetrically with respect to the beam inlet, the beam exit axis A A is aligned with the beam entry axis A E , and both axes are offset with respect to the axis of rotation A Z of the cylindrical arrangement.
- the potential differences applied are entered, for example, as shown schematically in U 1 and U 2 with adjustable voltage sources.
- both parts 3a ' are connected to the same potential, which is not mandatory.
- the hollow cylinder 3b ' is placed at a positive potential, which according to the invention forms shield 11, field-free space 15 and electrode of field space 7.
- the outer electrode 7a corresponding to the hollow cylinder 7a ', is set to a positive potential with respect to the hollow cylinder 3b'.
- a mass spectrometer preferably a quadrupole mass spectrometer 24, is preferably connected downstream of the energy filter, as shown, to form an analyzer according to the invention. If neutral particles are to be analyzed on the analyzer, an ionization source, preferably an electron impact ionization source 26, is connected upstream of the energy filter.
- a beam diaphragm 15 is preferably provided in a field-free space 15. In this space, the beam is preferably focused on the cylinder axis A 'Z, and the diaphragm 15a suppresses edge regions and scattered ions of the beam. At focus F there is a crossover of the ion beam, ie a crossover of the ion trajectories.
- FIG. 10 An ionization source is shown in FIG. 10, which is preferably used with the energy filter shown.
- an aperture 30 with an opening 32 neutral particles are withdrawn from the plasma by diffusion and enter an axially extended cylinder grid 34.
- At least one electron emitter preferably in the form of at least one hot cathode 36, is provided, preferably a plurality of hot cathodes 36 are arranged azimuthally around the grid 34.
- the electron emitter cathodes 36 are set to a negative potential with respect to the grating 34, which means that the grating 34 acts as an acceleration grating for the emitted electrons e - .
- the heating current at the electron emitter cathodes 36 is set at current sources I.
- the ions generated within the grid 34 by electron impact emerge through a further aperture 38 with a controllable potential corresponding to U 4 .
- the potential of the aperture 38 is preferably chosen to be at least substantially equal to that of the grid 34. Because of the axially extended lattice arrangement and the provided, preferably several and identical electron emitters outside the lattice, neutral particles within the lattice are homogeneously ionized with a high ionization rate.
- the ionization source 10 preferably with the inventive energy filter according to the preceding Figures, especially Fig. 9, combined to with a mass spectrometer connected downstream of the latter, preferably quadrupole mass spectrometer, to form a neutral particle analyzer.
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Description
- Fig. 1
- schematisch eine bekannte Strahlumlenkanordnung im Längsschnitt,
- Fig. 2
- in Darstellung analog zu Fig. 1 das Vorgehen zur Strahlumlenkung gemäss vorliegender Erfindung,
- Fig. 3
- in Darstellung analog zu den Fig. 1 und 2 eine Weiterausbildung des erfindungsgemässen Vorgehens nach Fig. 2,
- Fig. 4
- eine weitere bevorzugte Ausbildungsvariante des erfindungsgemässen Vorgehens,
- Fig. 5
- schematisch im Längsschnitt die bekannte Strahlumlenkanordnung, betrachtet unter einem weiteren Aspekt,
- Fig. 6
- in Darstellung analog zu Fig. 5 unter einem weiteren Aspekt das erfindungsgemässe Vorgehen beim Strahlumlenken,
- Fig. 7
- in Darstellung analog zu den Fig. 5 und 6 eine weitere bevorzugte Ausbildungsvariante des erfindungsgemässen Vorgehens,
- Fig. 8
- schematisch eine Querschnittsdarstellung gemäss Linie IIX-IIX von Fig. 7,
- Fig. 9
- schematisch eine bevorzugte Ausführungsform eines erfindungsgemässen Energiefilters im Längsschnitt mit Kombination der erfindungsgemässen Massnahmen sowie, schematisch, dem Filter vorgeschaltet, eine Crossbeam-Ionisierungsquelle,
- Fig. 10
- schematisch im Längsschnitt eine Ionisierungsquelle, vorzugsweise mit dem erfindungsgemässen Filter kombiniert.
Claims (27)
- Verfahren zur Filterung elektrisch geladener Teilchen eines Teilchenstrahls nach ihrer kinetischen Energie, bei dem der Strahl durch ein erstes elektrostatisches Feld (E7) zwischen einem Paar erster Kondensator-Elektrodenflächen (7a, 7b) eines ersten Kondensator-Elektrodenpaares in einem ersten Raumbereich (7) umgelenkt wird und in einem, dem ersten Raumbereich (7) in Strahlausbreitungsrichtung vor- und/oder zweiten nachgeschalteten Raumbereich (3) durch ein zweites elektrisches Feld (E3) zwischen einem Paar zweiter Kondensator-Elektrodenflächen (3a, 3b) eines zweiten Kondensator-Elektrodenpaares (3a', 3b') entgegengesetzt umgelenkt wird und der erste Raumbereich (7) gegen den zweiten (3) bezüglich elektrischen Feldern (E) mittels eines Schirmes (11) abgeschirmt wird, der auf das elektrische Potential einer der ersten Kondensator-Elektrodenflächen (7b) gelegt ist, und der (11) eine dem ersten Raumbereich (7) zugewandte erste Fläche sowie eine dem zweiten Raumbereich (3) zugewandte zweite Fläche aufweist, dadurch gekennzeichnet, dassdie eine der ersten Kondensator-Elektrodenflächen (7b) durch die erste Fläche des Schirmes (11) gebildet wird, der durch den Strahl durchdrungen (13) wird;mittels der zweiten Fläche des Schirmes (11) und einer Fläche einer der Kondensator-Elektroden (3b') des zweiten Kondensator-Elektrodenpaares (3a', 3b') ein weiteres Kondensator-Elektrodenflächenpaar mit einem vom Strahl (S) durchlaufenen dritten Raumbereich (D) gebildet wird, der den ersten (7) und zweiten (3) Raumbereich verbindet;der Schirm (11) auf ein gegebenes elektrostatisches Potential (6, 6a) gelegt wird.
- Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass der Schirm (11) auf das elektrische Potential der einen (3b') des zweiten Kondensator-Elektrodenpaares (3a', 3b') gelegt wird und damit der dritte Raumbereich (D) feldfrei ausgebildet wird.
- Verfahren nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass der zweite Raumbereich (3) zwischen zwei im wesentlichen gleich gekrümmten zweiten Kondensator-Elektrodenflächen (3a, 3b) erzeugt wird und der Schirm (11) durch Fortführung der die Krümmungsäussere der Kondensator-Elektrodenflächen (3b) bildenden Kondensator-Elektrode (3b') gebildet wird.
- Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass der Strahl (S) in den ersten oder zweiten Raumbereich (3, 7) eintritt und entsprechend aus dem zweiten oder dem ersten austritt, wobei die Umlenkungen so erfolgen, dass Ein- und Austritt zueinander im wesentlichen parallel sind.
- Verfahren nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass zwei zweite Raumbereiche (3) je mit einem zweiten Kondensator-Elektrodenpaar, das je zweite Kondensator-Elektrodenflächen bildet, vorgesehen werden, der Strahl (S) je in einem der zwei zweiten Raumbereiche (3) ein- und austritt, wobei die Umlenkungen so erfolgen, dass Ein- und Austrittsrichtungen im wesentlichen fluchten.
- Energiefilter zur Filterung elektrisch geladener Teilchen eines Teilchenstrahles nach ihrer kinetischen Energie mit einer Strahleintritts- und einer -austrittsanordnung sowie mindestens zwei sich im wesentlichen in Strahldurchlaufrichtung zwischen Ein- und Austritt erstreckenden, hintereinander angeordneten Kondensator-Elektrodenpaaren (3a, 3b; 7a, 7b), die je ein im wesentliches senkrecht zur Strahlausbreitungsrichtung gerichtetes, relativ zueinander invers gepoltes elektrisches Feld (E3, E7) erzeugen, wobeiein erstes (7a, 7b) der Kondensator-Elektrodenpaare ein Paar erster Kondensator-Elektrodenflächen bildet, dazwischen einen ersten (7) Raumbereich festlegt,ein zweites (3a', 3b') der Kondensator-Elektrodenpaare ein Paar zweiter Kondensator-Elektrodenflächen (3a, 3b) bildet, dazwischen einen zweiten Raumbereich (3) festlegt,
dadurch gekennzeichnet, dassdie eine der ersten Kondensator-Elektrodenflächen (7b) durch die erste Fläche des Schirmes (11) gebildet ist, der eine Durchtrittsöffnung (13) für den Strahl (S) aufweist;die zweite Fläche des Schirmes (11) im Bereich der Durchtrittsöffnung (13) mit einer Fläche einer der zweiten Kondensator-Elektroden (3b') ein drittes Kondensator-Elektrodenflächenpaar und dazwischen einen dritten Raumbereich (D) bildet, der den ersten und zweiten Raumbereich verbindet;der Schirm (11) auf ein gegebenes Potential (6, 6a) gelegt ist. - Energiefilter nach Anspruch 6, dadurch gekennzeichnet, dass der Schirm (11) auf das Potential der einen (3b') der zweiten Kondensator-Elektroden (3a', 3b') gelegt ist.
- Energiefilter nach einem der Ansprüche 6 oder 7, dadurch gekennzeichnet, dass das zweite Kondensator-Elektrodenflächenpaar (3a, 3b) zwischen sich einen gekrümmten zweiten Raumbereich (3) definiert und die die krümmungsaussenseitige Fläche (3b) bildende Kondensator-Elektrode (3b') mit einer Fortführung den Schirm (11) bildet.
- Energiefilter nach einem der Ansprüche 6 bis 8, dadurch gekennzeichnet, dass der dritte Raumbereich (D, 15) im wesentlichen feldfrei ist, mit auf Äquipotential gelegener Umrandung, wobei die Umrandung des dritten Raumbereiches (D, 15) vorzugsweise durch eine Fortführung der einen (3b') der zweiten Kondensator-Elektroden (3a', 3b') gebildet wird.
- Energiefilter nach Anspruch 9, dadurch gekennzeichnet, dass im dritten Raumbereich (D, 15) mindestens eine Blende (15a) vorgesehen ist.
- Energiefilter nach einem der Ansprüche 6 bis 10, dadurch gekennzeichnet, dass Strahleintritt und -austritt zueinander im wesentlichen parallel sind.
- Energiefilter nach einem der Ansprüche 6 bis 11, dadurch gekennzeichnet, dass zwei der ersten und zwei der zweiten Kondensator-Elektrodenpaare vorgesehen sind.
- Energiefilter nach Anspruch 12, dadurch gekennzeichnet, dass die mittleren zwei Kondensator-Elektrodenpaare erste Kondensator-Elektrodenpaare sind und vorzugsweise baulich vereint sind (7a, 7b).
- Energiefilter nach einem der Ansprüche 12 oder 13, dadurch gekennzeichnet, dass die beiden äusseren Kondensator-Elektrodenpaare zweite Kondensator-Elektrodenpaare (3a', 3b') sind und je einen gekrümmten zweiten Raumbereich (3) definieren, gleichsinnig gekrümmt und je die krümmungsaussenseitig gelegenen Kondensator-Elektroden (3b') des Paares eine Fortführung aufweisen, welche den Schirm (11) bilden.
- Energiefilter nach Anspruch 14, dadurch gekennzeichnet, dass die beiden krümmungsäusseren Kondensator-Elektroden (3b') baulich vereint sind.
- Energiefilter nach Anspruch 15, dadurch gekennzeichnet, dass die beiden Fortführungen (11) baulich vereint sind.
- Energiefilter nach einem der Ansprüche 6 bis 16, dadurch gekennzeichnet, dass die Wandungsstärke (d) des Schirmes (11) mindestens gleich der kleinsten Durchmesserausdehnung der Durchtrittsöffnung (13) ist.
- Energiefilter nach einem der Ansprüche 14 bis 17, dadurch gekennzeichnet, dass die beiden äussersten Kondensator-Elektrodenpaare (3a, 3b) im wesentlichen zueinander parallele Eintrittstangenten bzw. Austrittstangenten für den Strahl definieren und vorzugsweise diese Tangenten fluchten.
- Energiefilter nach einem der Ansprüche 6 bis 18, dadurch gekennzeichnet, dass er nach dem Prinzip des Zylinderspiegels in einem Zylinderkondensator, mit Ein- und Austrittsvorrichtungen für den Strahl zum Zylinderkondensator, aufgebaut ist, wobei Ein- und Austrittsachsen (AE, AA) im wesentlichen fluchtend angeordnet sind und der Strahlengang (S) bezüglich der Zylinderachse (AZ) des Zylinderkondensators asymmetrisch ist.
- Energiefilter nach Anspruch 19, dadurch gekennzeichnet, dass die Ein- und Austrittsachse (AE, AA) zur Achse (AZ) des Zylinderkondensators parallel versetzt sind.
- Energiefilter nach einem der Ansprüche 19 oder 20, dadurch gekennzeichnet, dass der Zylinderkondensator (7a, 7b) durch die beiden zentralen Elektrodenpaare, die Ein- und Austrittsanordnungen (3a, 3b) durch die äusseren nach einem der Ansprüche 11 bis 18 gebildet sind.
- Energiefilter nach einem der Ansprüche 19 bis 21, dadurch gekennzeichnet, dass der Zylinderkondensator (7a, 7b) einen äusseren Zylinder (7a) aufweist und in einem Querschnittsquadranten als Spiegelkondensator wirkt und Ein- und Austrittsanordnung (3a, 3b) in dem axialsymmetrisch zum genannten Quadranten gegenübergelegenen Quadranten der Zylinderkondensator-Querschnittsfläche vorgesehen sind.
- Energiefilter nach einem der Ansprüche 19 bis 22, dadurch gekennzeichnet, dass der Strahl auf der Achse des Zylinderkondensators fokussiert ist.
- Analysator, vorzugsweise Plasmaanalysator, mit einem Energiefilter nach mindestens einem der Ansprüche 6 bis 23 sowie einem dem Energiefilter nachgeschalteten Massefilter, vorzugsweise einem Quadrupolmassenanalysator.
- Analysator nach Anspruch 24, dadurch gekennzeichnet, dass er eine dem Energiefilter vorgeschaltete Elektronenstoss-Ionisierungsquelle mit Eintrittsöffnungsanordnung für neutrale Teilchen sowie einer Austrittsanordnung für Ionen aufweist und dass, koaxial zur zwischen Ein- und Austrittsanordnung definierten Transmissionsachse, ein axial ausgedehntes Beschleunigungsgitterrohr vorgesehen ist und, radial ausserhalb, mindestens eine Heisskathode.
- Analysator nach Anspruch 25, dadurch gekennzeichnet, dass radial ausserhalb des axial ausgedehnten Beschleunigungsgitters, vorzugsweise regelmässig verteilt, mehrere Heisskathoden vorgesehen sind.
- Analysator nach einem der Ansprüche 25 oder 26, dadurch gekennzeichnet, dass das Verhältnis der Länge des Elektroneneinfallbereiches am Gitterrohr zu dessen Durchmesser mindestens 1,5 ist, vorzugsweise 3, vorzugsweise grösser als 3 ist.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH3536/91 | 1991-12-02 | ||
CH353691 | 1991-12-02 | ||
CH353691 | 1991-12-02 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0545064A2 EP0545064A2 (de) | 1993-06-09 |
EP0545064A3 EP0545064A3 (en) | 1993-08-04 |
EP0545064B1 true EP0545064B1 (de) | 2001-08-08 |
Family
ID=4258111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92118282A Expired - Lifetime EP0545064B1 (de) | 1991-12-02 | 1992-10-26 | Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter |
Country Status (4)
Country | Link |
---|---|
US (1) | US5365064A (de) |
EP (1) | EP0545064B1 (de) |
JP (1) | JP3435179B2 (de) |
DE (1) | DE59209914D1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5672870A (en) * | 1995-12-18 | 1997-09-30 | Hewlett Packard Company | Mass selective notch filter with quadrupole excision fields |
US5598001A (en) * | 1996-01-30 | 1997-01-28 | Hewlett-Packard Company | Mass selective multinotch filter with orthogonal excision fields |
US6867414B2 (en) * | 2002-09-24 | 2005-03-15 | Ciphergen Biosystems, Inc. | Electric sector time-of-flight mass spectrometer with adjustable ion optical elements |
US7679051B2 (en) * | 2006-05-17 | 2010-03-16 | Southwest Research Institute | Ion composition analyzer with increased dynamic range |
WO2011009065A2 (en) * | 2009-07-17 | 2011-01-20 | Kla-Tencor Corporation | Charged-particle energy analyzer |
US8294093B1 (en) * | 2011-04-15 | 2012-10-23 | Fei Company | Wide aperature wien ExB mass filter |
US8835866B2 (en) | 2011-05-19 | 2014-09-16 | Fei Company | Method and structure for controlling magnetic field distributions in an ExB Wien filter |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3805057A (en) * | 1971-03-22 | 1974-04-16 | Hitachi Ltd | Energy analyzer of coaxial cylindrical type |
US4219730A (en) * | 1977-08-29 | 1980-08-26 | Hitachi, Ltd. | Charge-particle energy analyzer |
US4758722A (en) * | 1980-05-12 | 1988-07-19 | La Trobe University | Angular resolved spectrometer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU29047A1 (ru) * | 1932-03-08 | 1933-01-31 | В.П. Михайлик | Приспособление дл автоматического регулировани объема мерника в зависимости от температуры |
US4126781A (en) * | 1977-05-10 | 1978-11-21 | Extranuclear Laboratories, Inc. | Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis |
GB8527438D0 (en) * | 1985-11-07 | 1985-12-11 | Vg Instr Group | Charged particle energy analyser |
SU1411850A1 (ru) * | 1986-07-07 | 1988-07-23 | Предприятие П/Я В-8754 | Дефлекторный энергетический анализатор |
SU1492397A1 (ru) * | 1986-12-23 | 1989-07-07 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Устройство дл транспортировки и энергоанализа зар женных частиц |
-
1992
- 1992-10-26 DE DE59209914T patent/DE59209914D1/de not_active Expired - Lifetime
- 1992-10-26 EP EP92118282A patent/EP0545064B1/de not_active Expired - Lifetime
- 1992-11-30 US US07/983,398 patent/US5365064A/en not_active Expired - Lifetime
- 1992-12-02 JP JP32333892A patent/JP3435179B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3805057A (en) * | 1971-03-22 | 1974-04-16 | Hitachi Ltd | Energy analyzer of coaxial cylindrical type |
US4219730A (en) * | 1977-08-29 | 1980-08-26 | Hitachi, Ltd. | Charge-particle energy analyzer |
US4758722A (en) * | 1980-05-12 | 1988-07-19 | La Trobe University | Angular resolved spectrometer |
Also Published As
Publication number | Publication date |
---|---|
EP0545064A2 (de) | 1993-06-09 |
JPH05251036A (ja) | 1993-09-28 |
DE59209914D1 (de) | 2001-09-13 |
US5365064A (en) | 1994-11-15 |
EP0545064A3 (en) | 1993-08-04 |
JP3435179B2 (ja) | 2003-08-11 |
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