EP0403537B1 - Ultrasonic polishing - Google Patents
Ultrasonic polishing Download PDFInfo
- Publication number
- EP0403537B1 EP0403537B1 EP89903596A EP89903596A EP0403537B1 EP 0403537 B1 EP0403537 B1 EP 0403537B1 EP 89903596 A EP89903596 A EP 89903596A EP 89903596 A EP89903596 A EP 89903596A EP 0403537 B1 EP0403537 B1 EP 0403537B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- workpiece
- tool
- configuration
- abrasive
- slurry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 48
- 239000002002 slurry Substances 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 42
- 239000002245 particle Substances 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 12
- 230000000295 complement effect Effects 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 238000007517 polishing process Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 229910052580 B4C Inorganic materials 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910001369 Brass Inorganic materials 0.000 claims description 2
- 229910000906 Bronze Inorganic materials 0.000 claims description 2
- 230000002411 adverse Effects 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010951 brass Substances 0.000 claims description 2
- 239000010974 bronze Substances 0.000 claims description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010431 corundum Substances 0.000 claims description 2
- 229910052593 corundum Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 description 16
- 238000009760 electrical discharge machining Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000010730 cutting oil Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010960 cold rolled steel Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
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- 239000011819 refractory material Substances 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
- B24B35/005—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency for making three-dimensional objects
Definitions
- the present invention relates to a method of polishing a workpiece according to the preamble of claim 1 (see US-A-2 850 854).
- the present invention is particularly adapted to polishing compound surfaces and complex shapes having fine or intricate detail where a reduction in surface roughness is needed without loss of resolution or detail.
- Ultrasonic machining is a well known machining process whereby the surface of a workpiece is abraded by a grit contained in a slurry circulated between the workpiece surface and a vibrating tool adjacent thereto, vibrating at frequencies above the audible range, i.e. typically within the range 19,500 to 20,500 cycles per second.
- the amplitude of vibration is less than 0.01 mm, and typically within the range 0.001 to 0.005 mm.
- the tool is made of a material having high strength and good ductility, in order to impart a high degree of impact resistance to minimize abrasion of the tool itself.
- the abrading tool face is provided with a three-dimensional form, while a negative compliment thereof is machined onto the workpiece surface.
- the tool Since the tool does not contact the workpiece, the actual cutting is done by the abrasive particles suspended in the slurry. These particles are driven with a percussive impact against the workpiece surface by the tool, ultrasonically vibrating perpendicular to the workpiece surface.
- This process finds particular utility in its ability to work difficult materials, such as glass, ceramics, calcined or vitrified refractory materials and hard and/or brittle metals, which are not susceptible to machining by any other traditional technique, or even such nontraditional techniques such as electrical discharge machining, electro-chemical machining or the like.
- Ultrasonic machining has proved particularly advantageous for reproducing complex shapes which could not be obtained by traditional machining, or by non-traditional techniques such as electrical discharge machining, electro-chemical machining, or the like because of the nature of the materials to be worked.
- Ultrasonic machining imparts some abrasive erosion of the tool as well as the workpiece, so that there is an ongoing and increasing loss of fine detail and resolution as the tool is used and worn. For this reason it has been considered rather important that the tool material be one that is comparatively tough and ductile, i.e. not readily abradable by ultrasonic machining, so as that the tool will be abraded to a much lesser degree than the workpiece.
- tools are commonly made of materials such as cold rolled steel, austenitic stainless steel, copper, aluminum and the like.
- ultrasonic machining in its normal practice, only abrades areas of the workpiece which are most adjacent to the tool face surfaces. Therefore, if ultrasonic machining is to be used on a workpiece that is already formed, or formed in part, as in a polishing operation, it is very important that the tool and workpiece be aligned and registered as accurately as possible, least the workpiece be abraded or polished nonuniformly and possibly even destroying the workpiece as desired. Setting-up the tool and workpiece with the necessarily accurate indexing and registration is a time consuming and laborious procedure .
- polishing by any method requires the removal of a very small amount of workpiece material, and ideally a very uniform removal thereof. Manual polishing, vibratory finishing, buffing, brushing and even extrusion honing cannot remove the workpiece material to the extent of uniformity often desired, particularly in the case of complex workpiece surfaces. Burnishing, on the other hand, tends to redistribute the workpiece surface material causing dimensional changes.
- the invention consists in the method of polishing a workpiece surface having a configuration preformed therein without adversely effecting the configuration detail and resolution, comprising:
- U.S. Patent 2850854 shows a method for removing material by ultrasonic grinding.
- the ratio of stock removed to tool wear shall be at least 1:1, varying up to 100:1.
- the tool is abraded but only "polishing" amounts of material are removed from the workpiece, so that the ratio of "stock removed” to "tool wear” would be much less than 1 to 1, a difference of kind rather than mere degree.
- Japanese Patent No. JP-A-54-133697 also relates to a grinding process, but in which a molded shaped head is utilised to grind a subsequent workpiece. Minimal tool wear for a given grinding performance is desired, the opposite of the present invention.
- a method for ultrasonic polishing of a workpiece by means of a tool which is significantly more ultrasonically abradable than the workpiece and therefore, need not be preformed to provide a complement of the surface of the workpiece. Instead, a blank tool face can be used.
- the tool When the tool is vibrated, imparting its vibrations to an abrasive slurry disposed in the gap between the tool and workpiece, the tool is quickly eroded in such a fashion that it quickly develops a complementary form of the workpiece with a high degree of resolution and detail.
- the tool will continue to be abraded at a comparatively high rate while continuing to maintain its high degree of resolution and detail, while at the same time the surface of the workpiece is abraded to a much lesser degree so that it is merely polished while the tool is being progressively abraded down, but at all times maintaining its high resolution and detail complimentary work surface.
- the present invention may be employed to polish any material more resistant to ultrasonic erosion than the material of which the tool is made.
- the tool will be re-dressed continuously and inherently to the complementary form of the workpiece, by virtue of the fact that the tool will be eroded to a greater extent than the workpiece.
- the preferential working of the tool results in a constant or even increasing conformity to the fine detail and resolution of the workpiece, so that as polishing of the workpiece occurs, there is no loss of resolution.
- ultrasonic polishing is made applicable even to relatively soft and easy to work materials, such as bronze, brass, or gold, to polymeric materials, and a wide diversity of other materials which were not heretofore thought to be appropriate for ultrasonic techniques, in addition to very much harder materials, including those where ultrasonic machining techniques have been employed previously, as discussed above.
- ultrasonic polishing in accordance with the present invention, surface finishes can be attained, depending on the extent of polishing, of substantially any desired degree, regardless of the material and in any degree of intricacy and fineness of detail without substantial change in detail or resolution.
- Surface roughness can be reduced to as low as about 0.1 microns Ra, although such high degree of polish may not always be required and a lesser extent of polishing may often suffice for a given application.
- the process of this invention does remove a very uniform layer of material from a workpiece surface, the process is also ideally suited to the removal of thin layers of unwanted material from a workpiece surface, such as an EDM recast layer of material which is normally 0.003 to 0.006 mm thick.
- the process of this invention can be used to remove burrs from a workpiece surface or to radius the edges thereof.
- FIG. 1 An ultrasonic machine tool as employed in the present invention is shown schematically in Fig. 1.
- Figs. 2 and 3 are "before” and “after” photomicrographs of a carbide compacting die illustrating the effectiveness of this invention.
- Ultrasonic machine tools are known to the art and the present invention is generally applicable for use with any such machine, utilizing typical parameters for vibrational frequency, amplitude and abrading particles.
- such equipment comprises a frame 10 adapted to hold a workpiece 4 and a tool holder 1 including an ultrasonic driver which vibrates the tool 2 at a frequency typically of about 20 KHz but in some applications from 10 to 40 KHz, most often about 19 to 22 KHz.
- the tool holder 1 is adapted at 11 to advance the tool from a retracted position into working position and, during working, into the workpiece.
- the equipment will ordinarily be furnished with abrasive slurry handling means 6,7,8,9 so that the slurry can be disposed between the tool 2, and the workpiece 4.
- the slurry will often be pumped through the gap between the tool and workpiece to continuously provide fresh, unworn abrasive to the working surface and to flush away eroded material and debris.
- the slurry may be processed to remove debris and recirculated.
- the transducer will most typically be an electronically driven stack of piezoelectric element or a magnetostrictive transducer.
- the abrasive slurry will ordinarily be formed of hard abrasive particles disposed in a liquid carrier.
- the abrasives are typically tungsten carbide, silicon carbide, aluminum oxide, boron carbide, boron nitride, diamond and the like, although it should be noted that when polishing softer materials in the present invention, softer abrasives may be used, such as alumina, corundum, garnet, and the like.
- the liquid carrier must be one capable of transmitting ultrasonic vibrations and should be chosen to be compatible with the workpiece and the electrode materials. Water is the best such transmitters, although other liquids such as cutting oil or fluid and the like may be used. When water is used, it may be necessary to add rust inhibitors.
- liquids other than water such as cutting oil, can be used to effect a low amplitude particle movement, or in the alternative a lower power can be used with the water as the transmitter.
- the particle size of the abrasive is not critical as long as the particle size is such that it can be held in suspension. It is generally preferred, therefore, to use small particle sizes, less than 0.075 mm (200 mesh), and preferably, 0.025 to 0.015 mm (600 to 1000 mesh), with a particle concentration of from 10 to 20 volume percent of the fluid to attain the highest levels of polish.
- the workpiece to be polished can be substantially any material which, contrary to prior art practices, is ultrasonically harder than the tool material, typically, a metallic workpiece.
- the extent of polishing required will be determined by the initial surface roughness of the workpiece and the finish required after polishing. Both an advantage and a limitation of the procedure of the present invention resides in the fact that the configuration of the workpiece will not be altered during the polishing operation. It is thus important to recognize that the present invention will not improve resolution of fine detail, and the quality of the final product will, except for surface finish, be determined by the initial workpiece.
- the tool must be formed of a material that is considerably more ultrasonically abradable than the workpiece material.
- An ultrasonically more abradable material does not mean one that is softer, but usually one that is more brittle.
- ultrasonic abradability it should be realized that in the ultrasonic machining of a surface, the tiny abrasive particles suspended in the fluid are impinged against the workpiece surface at an ultrasonic velocity, so that the tiny particles microscopically chip-away at the workpiece surface. To be chipped away in this fashion, the workpiece must have some degree of brittleness, whether or not the material is hard.
- an ideal tool material would be a material having a significantly greater degree of ultrasonic abradability, such as graphite, glass, quartz and other such materials which have normally been considered ideal workpiece materials but not normally tool materials.
- the tool When employed with suitable equipment, the tool may be provided with passages (5) communicating with the gap through which the abrasive slurry may be pumped to provide flushing of debris from the gap.
- the debris will predominantly be tool material particles eroded from the tool combined with minor amounts of material polished from the surfaces of the workpiece.
- the pumping will serve to provide fresh abrasive slurry to the gap so that cutting edges are not excessively worn during use.
- the surface contour of the workpiece first serves to shape the tool surface into very exact registration therewith.
- the tool is continually eroded and will perpetually generate and maintain very exact registration in situ .
- the preferential erosion of the tool is the feature of the present invention which permits a high polish on the workpiece surface by a very thin, highly uniform surface removal.
- the process of this invention is also ideally suited to the removal of any undesired layer of material from a workpiece surface.
- an EDM recast layer typically from 0.003 to 0.006 mm (0.0001 to 0.0002 inch) thick can readily be removed by the practice of this process with the result that the recast layer is removed without any loss of resolution of detail in the workpiece surface.
- workpieces coated with material such as ceramic can be processed as described herein to remove or selectively remove the ceramic coating therefrom without any loss of resolution of detail in the workpiece surface.
- the process of this invention can be used to remove burrs which protrude from the workpiece surface, or to radius sharp corners on the edges of the workpiece. Either of these objects can be readily effected by using such an ultrasonically abradable tool without losing any of the workpiece detail.
Abstract
Description
- The present invention relates to a method of polishing a workpiece according to the preamble of claim 1 (see US-A-2 850 854).
- The present invention is particularly adapted to polishing compound surfaces and complex shapes having fine or intricate detail where a reduction in surface roughness is needed without loss of resolution or detail.
- Ultrasonic machining is a well known machining process whereby the surface of a workpiece is abraded by a grit contained in a slurry circulated between the workpiece surface and a vibrating tool adjacent thereto, vibrating at frequencies above the audible range, i.e. typically within the range 19,500 to 20,500 cycles per second. The amplitude of vibration is less than 0.01 mm, and typically within the range 0.001 to 0.005 mm. The tool is made of a material having high strength and good ductility, in order to impart a high degree of impact resistance to minimize abrasion of the tool itself. The abrading tool face is provided with a three-dimensional form, while a negative compliment thereof is machined onto the workpiece surface. Since the tool does not contact the workpiece, the actual cutting is done by the abrasive particles suspended in the slurry. These particles are driven with a percussive impact against the workpiece surface by the tool, ultrasonically vibrating perpendicular to the workpiece surface. This process finds particular utility in its ability to work difficult materials, such as glass, ceramics, calcined or vitrified refractory materials and hard and/or brittle metals, which are not susceptible to machining by any other traditional technique, or even such nontraditional techniques such as electrical discharge machining, electro-chemical machining or the like.
- Ultrasonic machining has proved particularly advantageous for reproducing complex shapes which could not be obtained by traditional machining, or by non-traditional techniques such as electrical discharge machining, electro-chemical machining, or the like because of the nature of the materials to be worked.
- Ultrasonic machining imparts some abrasive erosion of the tool as well as the workpiece, so that there is an ongoing and increasing loss of fine detail and resolution as the tool is used and worn. For this reason it has been considered rather important that the tool material be one that is comparatively tough and ductile, i.e. not readily abradable by ultrasonic machining, so as that the tool will be abraded to a much lesser degree than the workpiece. For example, tools are commonly made of materials such as cold rolled steel, austenitic stainless steel, copper, aluminum and the like.
- In addition to the above, ultrasonic machining in its normal practice, only abrades areas of the workpiece which are most adjacent to the tool face surfaces. Therefore, if ultrasonic machining is to be used on a workpiece that is already formed, or formed in part, as in a polishing operation, it is very important that the tool and workpiece be aligned and registered as accurately as possible, least the workpiece be abraded or polished nonuniformly and possibly even destroying the workpiece as desired. Setting-up the tool and workpiece with the necessarily accurate indexing and registration is a time consuming and laborious procedure .
- The foregoing limitations have generally resulted in the choice of other machining techniques when the nature of the materials to be worked permit, and has generally required the use of other techniques for polishing operations. Any of the polishing techniques in common use are historically labor intensive, time consuming and expensive operations, and in addition typically require skilled workers and often produce rather inconsistent results. Polishing by any method requires the removal of a very small amount of workpiece material, and ideally a very uniform removal thereof. Manual polishing, vibratory finishing, buffing, brushing and even extrusion honing cannot remove the workpiece material to the extent of uniformity often desired, particularly in the case of complex workpiece surfaces. Burnishing, on the other hand, tends to redistribute the workpiece surface material causing dimensional changes.
- The invention consists in the method of polishing a workpiece surface having a configuration preformed therein without adversely effecting the configuration detail and resolution, comprising:
- A. forming a tool;
- B. mounting said tool in a vibratable relationship to a workpiece so that a working surface of said tool is spaced from the workpiece surface having said configuration;
- C. applying a liquid abrasive slurry between said tool and said workpiece;
- D. causing a relative vibratory motion at an ultrasonic frequency between said tool and said workpiece; and
- E. stopping the relative vibratory motion when the configuration on the surface of the workpiece has been polished;
- (a) is effected at an ultrasonic frequency and amplitude sufficient to cause said working surface of said tool to be abraded into a negative complementary form of said configuration preformed on the surface of said workpiece; and
- (b) is continued to abrade said tool as said tool continues to reform and maintain said negative complementary form of said configuration on the surface of said workpiece, while at the same time imparting a polishing action on the configuration on the surface of said workpiece.
- U.S. Patent 2850854 shows a method for removing material by ultrasonic grinding. In contradistinction to the present method, it is envisaged that the ratio of stock removed to tool wear shall be at least 1:1, varying up to 100:1. In the present invention the tool is abraded but only "polishing" amounts of material are removed from the workpiece, so that the ratio of "stock removed" to "tool wear" would be much less than 1 to 1, a difference of kind rather than mere degree.
- Japanese Patent No. JP-A-54-133697 also relates to a grinding process, but in which a molded shaped head is utilised to grind a subsequent workpiece. Minimal tool wear for a given grinding performance is desired, the opposite of the present invention.
- According to the present invention, there is provided a method for ultrasonic polishing of a workpiece by means of a tool which is significantly more ultrasonically abradable than the workpiece and therefore, need not be preformed to provide a complement of the surface of the workpiece. Instead, a blank tool face can be used. When the tool is vibrated, imparting its vibrations to an abrasive slurry disposed in the gap between the tool and workpiece, the tool is quickly eroded in such a fashion that it quickly develops a complementary form of the workpiece with a high degree of resolution and detail. Thereafter, the tool will continue to be abraded at a comparatively high rate while continuing to maintain its high degree of resolution and detail, while at the same time the surface of the workpiece is abraded to a much lesser degree so that it is merely polished while the tool is being progressively abraded down, but at all times maintaining its high resolution and detail complimentary work surface.
- The present invention may be employed to polish any material more resistant to ultrasonic erosion than the material of which the tool is made. In this fashion, the tool will be re-dressed continuously and inherently to the complementary form of the workpiece, by virtue of the fact that the tool will be eroded to a greater extent than the workpiece. The preferential working of the tool results in a constant or even increasing conformity to the fine detail and resolution of the workpiece, so that as polishing of the workpiece occurs, there is no loss of resolution.
- By the present technique, ultrasonic polishing is made applicable even to relatively soft and easy to work materials, such as bronze, brass, or gold, to polymeric materials, and a wide diversity of other materials which were not heretofore thought to be appropriate for ultrasonic techniques, in addition to very much harder materials, including those where ultrasonic machining techniques have been employed previously, as discussed above.
- With ultrasonic polishing in accordance with the present invention, surface finishes can be attained, depending on the extent of polishing, of substantially any desired degree, regardless of the material and in any degree of intricacy and fineness of detail without substantial change in detail or resolution. Surface roughness can be reduced to as low as about 0.1 microns Ra, although such high degree of polish may not always be required and a lesser extent of polishing may often suffice for a given application.
- Because the process of this invention does remove a very uniform layer of material from a workpiece surface, the process is also ideally suited to the removal of thin layers of unwanted material from a workpiece surface, such as an EDM recast layer of material which is normally 0.003 to 0.006 mm thick. In addition, the process of this invention can be used to remove burrs from a workpiece surface or to radius the edges thereof.
- An ultrasonic machine tool as employed in the present invention is shown schematically in Fig. 1.
- Figs. 2 and 3 are "before" and "after" photomicrographs of a carbide compacting die illustrating the effectiveness of this invention.
- Ultrasonic machine tools are known to the art and the present invention is generally applicable for use with any such machine, utilizing typical parameters for vibrational frequency, amplitude and abrading particles. Typically, such equipment comprises a
frame 10 adapted to hold a workpiece 4 and atool holder 1 including an ultrasonic driver which vibrates thetool 2 at a frequency typically of about 20 KHz but in some applications from 10 to 40 KHz, most often about 19 to 22 KHz. Thetool holder 1 is adapted at 11 to advance the tool from a retracted position into working position and, during working, into the workpiece. The equipment will ordinarily be furnished with abrasive slurry handling means 6,7,8,9 so that the slurry can be disposed between thetool 2, and the workpiece 4. The slurry will often be pumped through the gap between the tool and workpiece to continuously provide fresh, unworn abrasive to the working surface and to flush away eroded material and debris. The slurry may be processed to remove debris and recirculated. The transducer will most typically be an electronically driven stack of piezoelectric element or a magnetostrictive transducer. - The abrasive slurry will ordinarily be formed of hard abrasive particles disposed in a liquid carrier. The abrasives are typically tungsten carbide, silicon carbide, aluminum oxide, boron carbide, boron nitride, diamond and the like, although it should be noted that when polishing softer materials in the present invention, softer abrasives may be used, such as alumina, corundum, garnet, and the like. The liquid carrier must be one capable of transmitting ultrasonic vibrations and should be chosen to be compatible with the workpiece and the electrode materials. Water is the best such transmitters, although other liquids such as cutting oil or fluid and the like may be used. When water is used, it may be necessary to add rust inhibitors. In polishing operations according to this invention, as opposed to machining according to the prior art, a relatively modest movement of the abrasive particles is preferred. Therefore, liquids other than water, such as cutting oil, can be used to effect a low amplitude particle movement, or in the alternative a lower power can be used with the water as the transmitter.
- Generally, the particle size of the abrasive is not critical as long as the particle size is such that it can be held in suspension. It is generally preferred, therefore, to use small particle sizes, less than 0.075 mm (200 mesh), and preferably, 0.025 to 0.015 mm (600 to 1000 mesh), with a particle concentration of from 10 to 20 volume percent of the fluid to attain the highest levels of polish.
- The workpiece to be polished can be substantially any material which, contrary to prior art practices, is ultrasonically harder than the tool material, typically, a metallic workpiece. The extent of polishing required will be determined by the initial surface roughness of the workpiece and the finish required after polishing. Both an advantage and a limitation of the procedure of the present invention resides in the fact that the configuration of the workpiece will not be altered during the polishing operation. It is thus important to recognize that the present invention will not improve resolution of fine detail, and the quality of the final product will, except for surface finish, be determined by the initial workpiece.
- The tool, as previously noted, must be formed of a material that is considerably more ultrasonically abradable than the workpiece material. An ultrasonically more abradable material does not mean one that is softer, but usually one that is more brittle. To understand ultrasonic abradability, it should be realized that in the ultrasonic machining of a surface, the tiny abrasive particles suspended in the fluid are impinged against the workpiece surface at an ultrasonic velocity, so that the tiny particles microscopically chip-away at the workpiece surface. To be chipped away in this fashion, the workpiece must have some degree of brittleness, whether or not the material is hard. It should be apparent that soft or resilient materials such as tough and ductile steels could not be readily machined in this fashion because the tiny abrasive particles would merely bounce therefrom. Accordingly, for the polishing of most metal workpieces, which would include everything from mild steel to hardened alloys and refractory metals such as titanium and tungsten, an ideal tool material would be a material having a significantly greater degree of ultrasonic abradability, such as graphite, glass, quartz and other such materials which have normally been considered ideal workpiece materials but not normally tool materials.
- When employed with suitable equipment, the tool may be provided with passages (5) communicating with the gap through which the abrasive slurry may be pumped to provide flushing of debris from the gap. In the present invention, the debris will predominantly be tool material particles eroded from the tool combined with minor amounts of material polished from the surfaces of the workpiece. In addition, the pumping will serve to provide fresh abrasive slurry to the gap so that cutting edges are not excessively worn during use.
- Contrary to prior art practices, it is not necessary to start the polishing process of this invention with a pre-shaped tool, and accordingly, indexing and registration of the tool and workpiece is not required. In the process of this invention, the surface contour of the workpiece first serves to shape the tool surface into very exact registration therewith. During the subsequent polishing operation, the tool is continually eroded and will perpetually generate and maintain very exact registration in situ. The preferential erosion of the tool is the feature of the present invention which permits a high polish on the workpiece surface by a very thin, highly uniform surface removal. In some applications, particularly where the surface to be polished has deeply recessed portions, it may be desirable to utilize a pre-shaped or partially pre-shaped tool to speed up the operation by minimizing the amount of time it takes to shape the tool into registration with the workpiece, and to and avoid an excessive polishing action on the raised portions of the workpiece surface before the tool is worn sufficiently to start polishing the deeper recessed portions.
- The relatively low mass of graphite or glass for examples, in relation to the materials most often employed for ultrasonic machining permits the employment of graphite tools of greater dimension than can be successfully driven by ultrasonic transducers.
- As noted above, the process of this invention is also ideally suited to the removal of any undesired layer of material from a workpiece surface. For example, an EDM recast layer, typically from 0.003 to 0.006 mm (0.0001 to 0.0002 inch) thick can readily be removed by the practice of this process with the result that the recast layer is removed without any loss of resolution of detail in the workpiece surface. In a like manner, workpieces coated with material such as ceramic, can be processed as described herein to remove or selectively remove the ceramic coating therefrom without any loss of resolution of detail in the workpiece surface. In addition to these variations, the process of this invention can be used to remove burrs which protrude from the workpiece surface, or to radius sharp corners on the edges of the workpiece. Either of these objects can be readily effected by using such an ultrasonically abradable tool without losing any of the workpiece detail.
Claims (16)
- The method of polishing a workpiece (4) surface having a configuration preformed therein without adversely effecting the configuration detail and resolution, comprising:A. forming a tool (2);B. mounting said tool (2) in a vibratable relationship (1) to a workpiece so that a working surface of said tool is spaced from the workpiece surface having said configuration;C. applying a liquid abrasive slurry between said tool and said workpiece;D. causing a relative vibratory motion at an ultrasonic frequency between said tool and said workpiece; andE. stopping the relative vibratory motion when the configuration on the surface of the workpiece has been polished;characterised in that the tool (2) is formed in a material that is more ultrasonically abradable than the said workpiece, and in that the relative vibratory motion(a) is effected at an ultrasonic frequency and amplitude sufficient to cause said working surface of said tool to be abraded into a negative complementary form of said configuration preformed on the surface of said workpiece; and(b) is continued to abrade said tool as said tool continues to reform and maintain said negative complementary form of said configuration on the surface of said workpiece, while at the same time imparting a polishing action on the configuration on the surface of said workpiece.
- The method as claimed in claim 1 wherein said vibratory motion is effected at a frequency of from about 10KHz to about 40 KHz.
- The method as claimed in claim 1 wherein the process is utilized to remove an unwanted layer of material from the workpiece surface.
- The method as claimed in claim 1 wherein the process is utilized to remove any unwanted burrs from the workpiece surface.
- The method as claimed in claim 1 wherein the process is utilized to radius the edges of the workpiece (4).
- The method as claimed in claim 1 wherein said tool (2) is preshaped to a form having a general conformance to the preshaped surface of the workpiece.
- The method as claimed in claim 1 wherein the abrasive in said slurry has a particle size less than about 0,075 mm (200 mesh).
- The method as claimed in claim 7 wherein said abrasive has a particle size of from 0,025 to 0,015 mm (600 to 100 mesh).
- The method as claimed in claim 7 wherein said abrasive is present in said slurry at a concentration of from 10 to 20 volume percent.
- The method as claimed in claim 1 wherein said tool material is selected from the group consisting of graphite, glass and quartz.
- The method as claimed in claim 1 wherein said tool material is an unformed block of graphite.
- The method of claim 1 wherein said tool material is an unformed block of glass.
- The method as claimed in claim 1 wherein said liquid abrasive slurry flows continuously through the gap between said tool and said workpiece.
- The method as claimed in claim 1 wherein said liquid abrasive slurry flushes tool particles and particles abraded from said workpiece from said gap.
- The method as claimed in claim 1 wherein said abrasive in said slurry is a member selected from the group consisting of tungsten carbide, aluminum oxide, silicon carbide, boron carbide, boron nitride, alumina, corundum, diamond, and mixtures thereof.
- The method as claimed in claim 15 wherein said workpiece (4) is made of a material selected from the group consisting of bronze, brass, gold, and polymeric materials.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT89903596T ATE96071T1 (en) | 1988-03-10 | 1989-03-10 | ULTRASONIC POLISHING. |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16650288A | 1988-03-10 | 1988-03-10 | |
US166502 | 1988-03-10 | ||
US30576889A | 1989-02-03 | 1989-02-03 | |
US305768 | 1989-02-03 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0403537A1 EP0403537A1 (en) | 1990-12-27 |
EP0403537A4 EP0403537A4 (en) | 1991-09-11 |
EP0403537B1 true EP0403537B1 (en) | 1993-10-20 |
Family
ID=26862319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP89903596A Expired - Lifetime EP0403537B1 (en) | 1988-03-10 | 1989-03-10 | Ultrasonic polishing |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0403537B1 (en) |
JP (1) | JP2691787B2 (en) |
KR (1) | KR930012261B1 (en) |
AU (1) | AU619263B2 (en) |
DE (1) | DE68910115T2 (en) |
RU (1) | RU1836206C (en) |
WO (1) | WO1989008535A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5245796A (en) * | 1992-04-02 | 1993-09-21 | At&T Bell Laboratories | Slurry polisher using ultrasonic agitation |
DE4447669B4 (en) * | 1994-02-27 | 2005-12-08 | Hahn, Rainer, Dr.Med.Dent. | Use of a suspension which serves to transmit sound between an ultrasonically stressed working tip and a material to be processed |
KR100299975B1 (en) * | 1998-02-19 | 2001-10-27 | 이정기 | Method for manufacturing electrodes of plasma chamber |
DE19817863A1 (en) * | 1998-04-22 | 1999-11-04 | Lzh Laserzentrum Hannover Ev | Method for smoothing surface of workpiece, particularly optical functional surface |
CN102615554B (en) * | 2012-04-15 | 2014-08-20 | 长春中俄科技园股份有限公司 | Processing method of miniature spherical or aspherical lens array |
CN110509123A (en) * | 2019-08-31 | 2019-11-29 | 巩义市宇通新材料科技有限公司 | A kind of throwing device of ultrasonic wave grinder |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2774193A (en) * | 1955-10-10 | 1956-12-18 | Thatcher | Tools for ultrasonic cutting |
US2804724A (en) * | 1956-02-24 | 1957-09-03 | Charles J Thatcher | High speed machining by ultrasonic impact abrasion |
US2850854A (en) * | 1956-08-20 | 1958-09-09 | Levy Sidney | Method for removing material |
US3593410A (en) * | 1967-11-21 | 1971-07-20 | Robert A Taylor | Method for casting and finishing tools or dies |
US4071385A (en) * | 1976-05-19 | 1978-01-31 | Arthur Kuris | Ultrasonic inlaid article |
JPS54133697A (en) * | 1978-04-07 | 1979-10-17 | Matsushita Electric Ind Co Ltd | Supersonic method |
JPS5741151A (en) * | 1980-08-25 | 1982-03-08 | Nippon Steel Corp | Process for machining injection nozzle of molten metal |
DE3125316A1 (en) * | 1981-06-27 | 1983-01-13 | Volkswagenwerk Ag, 3180 Wolfsburg | DEVICE FOR MANUFACTURING A ROOM FORMULA ELECTRODE FROM GRAPHITE WITH THE AID OF A THREE-DIMENSIONAL SHAPED FILE |
-
1989
- 1989-03-10 KR KR1019890702077A patent/KR930012261B1/en not_active IP Right Cessation
- 1989-03-10 WO PCT/US1989/000962 patent/WO1989008535A1/en active IP Right Grant
- 1989-03-10 DE DE89903596T patent/DE68910115T2/en not_active Expired - Lifetime
- 1989-03-10 AU AU32193/89A patent/AU619263B2/en not_active Expired
- 1989-03-10 EP EP89903596A patent/EP0403537B1/en not_active Expired - Lifetime
- 1989-03-10 JP JP1503363A patent/JP2691787B2/en not_active Expired - Fee Related
-
1990
- 1990-09-07 RU SU904831512A patent/RU1836206C/en active
Also Published As
Publication number | Publication date |
---|---|
WO1989008535A1 (en) | 1989-09-21 |
AU3219389A (en) | 1989-10-05 |
DE68910115D1 (en) | 1993-11-25 |
JP2691787B2 (en) | 1997-12-17 |
KR930012261B1 (en) | 1993-12-28 |
RU1836206C (en) | 1993-08-23 |
EP0403537A4 (en) | 1991-09-11 |
KR900700238A (en) | 1990-08-11 |
JPH03504108A (en) | 1991-09-12 |
DE68910115T2 (en) | 1994-02-17 |
AU619263B2 (en) | 1992-01-23 |
EP0403537A1 (en) | 1990-12-27 |
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