EP0307403A1 - Ink writing head with piezoelectrically excitable membrane. - Google Patents
Ink writing head with piezoelectrically excitable membrane.Info
- Publication number
- EP0307403A1 EP0307403A1 EP87903243A EP87903243A EP0307403A1 EP 0307403 A1 EP0307403 A1 EP 0307403A1 EP 87903243 A EP87903243 A EP 87903243A EP 87903243 A EP87903243 A EP 87903243A EP 0307403 A1 EP0307403 A1 EP 0307403A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- layer
- ink
- writing head
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 63
- 230000002093 peripheral effect Effects 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 230000008602 contraction Effects 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 230000003068 static effect Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 208000000260 Warts Diseases 0.000 claims description 8
- 201000010153 skin papilloma Diseases 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract 2
- 230000005284 excitation Effects 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 206010054786 Skin burning sensation Diseases 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Definitions
- the invention relates to an ink writing head and a method for producing an ink writing head according to the preamble of claims 1 and 13.
- the drive elements be they piezo tubes or piezo plates, are necessary for a whole series of functions.
- ink channels and the outlet openings should be able to be cleaned and vented with such elements.
- the object of the invention is therefore to design an ink head of the type mentioned at the outset in such a way that it can be easily produced on the one hand in the galvanoplastic process and on the other hand it has high efficiency. 3
- This object is achieved in a device of the type mentioned at the outset in accordance with the characterizing part of the first patent claim.
- the membrane has a piezoelectrically excitable peripheral area and a piezoelectrically excitable central area, which are controlled such that the membrane in its peripheral area is shortened by transverse contraction and extended in its central area to produce a membrane deflection, he ⁇ there is a particularly large stroke.
- This stroke is the result of the exploitation of two effects, namely the exploitation of the transverse contraction in the ceramic itself and the curvature of the bond between adjacent layers, which expand differently.
- the cross-contraction can increase the stroke of the membrane by reducing the layer thickness and increasing the length dimensions.
- a particularly advantageous force effect is obtained if the membrane regions are arranged concentrically with one another, so that they bulge out like warts when excited.
- This wart-like bulge represents the smallest and most compact geometric shape, which starts from a flat layer and widens and closes a cavity. It is rotationally symmetrical about a surface normal and leaves the plane in a toroidal fillet which merges into a lenticular spherical section. The required state of curvature changes at the transition line.
- the electrodes are accordingly arranged or the corresponding membrane areas are polarized and controlled via the electrodes in such a way that the peripheral area (circular ring) is shortened, but the central area is lengthened.
- the edge of the membrane changed its deflection is not when deflected, which is why it can be firmly clamped.
- the bending line essentially corresponds to a deflection under internal pressure.
- a plurality of membranes which can be activated individually and independently of one another are arranged on a common substrate surface, the control lines for the individual membrane regions leading over unpolarized regions of the substrate surface, so that no undesirable effects occur when the control is carried out via these control lines piezoelectric effects occur.
- a further piezoelectrically excitable 'layer may be provided, each in the opposite.
- Direction to the first piezoelectrically excitable layer is polarized. This almost doubles the stroke.
- a particularly simple, operationally reliable ink writing head can be formed in that each ink channel is assigned three membranes which are connected to one another via a pump channel for the writing liquid and form a static pump with two controllable locking slides and a variable cavity.
- the first membrane area is connected on the one hand to the ink supply system via a supply channel and on the other hand to the variable cavity and serves as an inlet valve.
- the second membrane area is assigned to the variable cavity and is a third membrane area. arranged as an outlet valve between the cavity and the ink channel.
- the pump channel connecting the membranes has separating webs in the area of the membranes / valves, which cooperate with the membrane surfaces in such a way that the pump channel opens after the membrane surfaces have been deflected via the separating webs, and the pump channel channel in the area of the dividers via the Membrane surfaces in the undeflected state of the membrane surfaces is interrupted.
- the separating webs can be designed as continuous webs or as collar-shaped elevations with outlet openings or inlet openings in between.
- the inventive ink writing head Since it can be used in the inventive ink writing head, ink having low viscosity, whereby the penetration can Tin ⁇ 'is of dirt avoided in the ink channels te be significantly better filtered.
- the separating web can be cleaned directly with ultrasound and impurities on the dividing web can be ground.
- the transducer elements keep the ink channels closed as long as the transducer elements are not actuated, a mechanical closure of the nozzles between the writing head and paper is not necessary and the drive of such a closure can be dispensed with. This makes it possible to reduce the paper gap very much, so that the typeface is less affected by the scattering of the flight speed and the direction of flight of the drops. Since the pressure on the nozzle can be statically impressed, the flight speed can be increased. There is no crosstalk between the nozzles since there is no flow connection when spraying.
- the spray frequency is not limited by reflections in the channel and not by crosstalk from neighboring nozzles but only by the eigenvalues of the individual transducer elements.
- An individual adjustment of the transducer elements can be omitted, since the transducer is coupled to the ink in a much more direct and uniform manner. Since the ink supply system according to the invention is independent of static negative pressure, it becomes significantly less sensitive, which also means that the acceleration sensitivity of the ink writing head disappears. 5
- Static pumping removes air bubbles from the ink channel. Empty channels can be filled in an electrically controlled manner.
- the ink reservoir can be accommodated in the printer stationary without difficulty. Pressure waves from the moving supply hose have no effect on the drop formation.
- the entire print head can be produced in a particularly simple manner using planar techniques.
- Part namely the piezoceramic, can be checked before the actual assembly.
- FIG. 1 is a schematic comparison illustration between the deformation of a membrane plate under internal pressure and a membrane plate with an embossed curvature
- FIG. 5 shows a static pump according to FIG. 4 in cross section
- 6 to 10 are schematic representations of the layer structure of the ink writing head according to the invention.
- FIG. 11 shows a schematic sectional illustration of a transducer element with collar-shaped separating webs
- FIG. 12 shows a schematic illustration of the ink writing head according to the invention.
- Fig. 13 is a schematic representation of the inclination of the ink writing head in a line printing device.
- a planar transducer made of piezoceramic consists of a piezoelectrically excitable layer 1 made of piezoceramic which is polarized in one direction and a support layer 2, e.g. B. made of nickel.
- This electrically controllable membrane formed in this way is controlled via corresponding electrodes 3, 4, the support layer 2 serving as a continuous mass electrode and the actual control electrodes consisting of a peripheral control electrode 3 and a central control electrode 4.
- These control electrodes 3 and 4 define membrane regions arranged concentrically to one another in the form of circular surfaces or circular ring surfaces.
- the membrane bulges in the direction shown in FIG. 2 shown direction if it a contraction of the piezoceramic layer 1 in the area of the ring electrode 3 occurs due to the circular ring electrode 3 and an expansion of the piezoceramic layer 1 in the area of the electrode 4
- Such an ideal shape can now be produced by exposing a flat elastic membrane to a uniform internal pressure. This results in the shape shown on the left-hand side of FIG. 1 a with the slope profile shown in FIG. 1 b and a curvature profile according to FIG. 1 c, the abscissa being assigned to the radius of the membrane surface.
- control electrodes 3 and 4 are now designed in accordance with the invention in connection with the piezoelectrically excitable layer 1 and the support layer 2, which serves as a ground electrode, such that this ideal shape approximately results during the deflection.
- the circular outer electrode 3 is arranged in the outer region of curvature of the membrane and is subjected to an electrical field such that the piezoelectric layer contracts in this region of curvature.
- Internal electrode 4 in turn is acted on by a field such that the central region of the piezo ceramic layer 1 expands.
- Two effects are thus exploited simultaneously, namely the transverse contraction of the ceramic itself and the curvature of the bond between adjacent layers, which expand differently.
- the radius of curvature up to which plane layers can be warped in this way is approximately 0.1 to 0.4 m, depending on how thin the layers can be made.
- the ratio of the electrode areas to one another is now dimensioned such that the desired approximation of the course results in FIG. This results in an inclination according to FIG. 1b with the associated curvature FIG. 1c (right side FIG. 1).
- a static pump consisting of two controllable gate valves SE and SA and a variable cavity H can be formed.
- three membrane areas for SE, H, SA are formed in a ceramic substrate.
- a pump channel P is formed in a carrier layer T supporting the substrate 1 with its associated support layer 2. This pump channel P is connected to a fluid supply V (FIG. 4).
- a transverse rib Q is formed in the pump channel in the area of the inlet valve SE, to which the membrane made of piezoceramic 1 and
- the pump channel can also be designed in a different way. It is thus also possible to replace the transverse ribs Q by walls of round inlet and outlet openings A which are shaped like a collar and which protrude into the pump channels. The membrane surface then lies on this collar in the unexcited state in a manner analogous to that of the transverse rib and thus closes the inlet or outlet.
- an ink writing head can be constructed, in which e.g. nine writing nozzles S1 to S9 are arranged. Each of these writing nozzles consists of an inlet valve SE, a variable cavity H and an outlet valve SA. The writing nozzles S1 to S9 are connected to the storage area V. In order to be able to form a write head with a larger number of nozzles, it is also possible to pack several substrates 1 with write nozzles one above the other.
- the writing nozzles S1 to S9 are functionally completely separated from the ink supply V.
- a mechanical closure of the nozzles between the print head and the paper arranged in front of it and the drive of this closure can thus be omitted, since the ink channels are closed by the outlet valves SA as long as these outlet valves SA are not can be controlled.
- Crosstalk between the nozzles is eliminated since there is no flow connection during the actual spraying process.
- the spraying processes are not limited by the reflection in the spray channel and not by the crosstalk from neighboring nozzles, but only by the eigenvalues of the individual writing nozzles S1 to S9. Static pumping removes air bubbles from ink channel P and refills empty channels.
- the ink writing head according to the invention can be manufactured particularly simply using planar technology.
- a substrate 1 consisting of piezoceramic with a thickness of approximately 200 ⁇ m is first polarized and tested. Then the piezoceramic 1 is passed through on both sides
- Vacuum vaporization or sputtering metallized e.g. 50 nm Ti and 500 nm Cu.
- the support layer 2 is galvanically deposited over the entire surface.
- the peripheral and central can be on the opposite side of the ceramic 1 with the help of a photoresist marking
- Control electrodes 3 and 4 together with leads L are generated (e.g. 100 ⁇ m Ni).
- a thin intermediate layer Z e.g. 0.2 mm Al or Cu
- Z e.g. 0.2 mm Al or Cu
- It is vapor-deposited or sputtered and structured using photolithography and etching technology.
- the channels P can be formed by galvanic deposition of a metal layer W between a photoresist structure (for example 50 ⁇ m Ni). After a metallic conductive layer has been applied over the non-conductive photoresist, the entire surface of the carrier layer T is then deposited (for example 100 ⁇ m Ni).
- the channel walls W can also with the carrier layer T in one step generated together.
- a structure K made of photoresite or metal (eg Cu) of the shape of the later channels and cavities is produced on the support layer 2. If photoresite is used, its surface must then be made conductive with a further thin metal layer. If metal is used, the channel wall support layer metal can be electroplated directly onto the structure K and the remaining exposed substrate surface 2 (for example 100 ⁇ m Ni), FIG. 11.
- the structure K made of photoresist or metal is then selectively detached from the overall structure and finally the crosspiece Q is separated from the wart by removing the intermediate layer.
- the etchable filler is then removed and the auxiliary layer (Z) is also removed so that the transverse ribs Q can detach from the support layer 2 when the substrate 1 bulges up.
- Auxiliary layers or the materials structuring the channels can be provided with openings which are closed again later.
- a further support layer SS can be applied outside the electrodes on the back of the ceramic layer 1. It is also possible to produce the lines L for the electrodes 3 and 4 (FIG. 10) simultaneously with the support layer, ie from the same material and in the same thickness.
- the transverse rib Q described it is also possible according to FIG. 12 to design the transverse rib in a circular manner, with the axis of the outlet nozzle A then having a direction perpendicular to the substrate surface 1. It is therefore possible to construct the ink writing head in such a way that the outlet nozzles A are arranged on the end face of the substrate or in such a way that they are arranged on the substrate surface. Which is the more advantageous arrangement depends on the intended use.
- the ink writing head can be inclined at an angle to the raster line.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Une tête d'écriture pourvue de canaux éjecteurs d'encre avec leurs éléments transducteurs piézoélectriques, canaux qui sont alimentés en liquide d'écriture par des conduits d'alimentation, comporte des éléments transducteurs avec une membrane excitable électriquement comprenant une première couche à excitation piézoélectrique et une couche protectrice solidement liée à cette dernière. La couche à excitation piézoélectrique possède des régions orientables divisées respectivement en une région périphérique et une région centrale. Pour produire l'orientation nécessaire de la membrane, ses régions sont excitées de manière à raccourcir la région périphérique de préférence par contraction transversale et à agrandir la région centrale.A writing head provided with ink ejector channels with their piezoelectric transducer elements, channels which are supplied with writing liquid by supply conduits, comprises transducer elements with an electrically excitable membrane comprising a first piezoelectric excitation layer and a protective layer firmly bonded thereto. The piezoelectric excited layer has orientable regions divided into a peripheral region and a central region, respectively. To produce the necessary orientation of the membrane, its regions are energized so as to shorten the peripheral region preferably by transverse contraction and to enlarge the central region.
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3618107 | 1986-05-30 | ||
DE19863618107 DE3618107A1 (en) | 1986-05-30 | 1986-05-30 | INK WRITING HEAD WITH PIEZOELECTRICALLY EXTENDABLE MEMBRANE |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0307403A1 true EP0307403A1 (en) | 1989-03-22 |
EP0307403B1 EP0307403B1 (en) | 1990-08-01 |
Family
ID=6301882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87903243A Expired - Lifetime EP0307403B1 (en) | 1986-05-30 | 1987-05-19 | Ink writing head with piezoelectrically excitable membrane |
Country Status (5)
Country | Link |
---|---|
US (1) | US4888598A (en) |
EP (1) | EP0307403B1 (en) |
JP (1) | JPH01500891A (en) |
DE (2) | DE3618107A1 (en) |
WO (1) | WO1987007217A1 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2942089A (en) * | 1988-02-05 | 1989-08-25 | Debiopharm S.A. | Pump |
DE3814150A1 (en) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS |
US5255016A (en) * | 1989-09-05 | 1993-10-19 | Seiko Epson Corporation | Ink jet printer recording head |
JP3139511B2 (en) * | 1990-11-09 | 2001-03-05 | セイコーエプソン株式会社 | Inkjet recording head |
US6601949B1 (en) * | 1992-08-26 | 2003-08-05 | Seiko Epson Corporation | Actuator unit for ink jet recording head |
GB2286157B (en) * | 1994-01-31 | 1998-01-14 | Neopost Ltd | Ink jet printing device |
JPH08108533A (en) * | 1994-10-06 | 1996-04-30 | Sharp Corp | Ink jet head, using method therefor and manufacture thereof |
US6000785A (en) * | 1995-04-20 | 1999-12-14 | Seiko Epson Corporation | Ink jet head, a printing apparatus using the ink jet head, and a control method therefor |
EP0738601B1 (en) * | 1995-04-20 | 2000-03-15 | Seiko Epson Corporation | An ink jet head, a printing apparatus using the ink jet head, and a method of controlling it |
JP3439570B2 (en) * | 1995-05-08 | 2003-08-25 | 日本碍子株式会社 | Diaphragm structure |
DE69612333T2 (en) * | 1995-07-26 | 2001-10-11 | Sony Corp | Printing device and method for its manufacture |
DE19724240C2 (en) * | 1997-06-09 | 2003-06-05 | Sascha Bechtel | Feed pump, especially micro feed pump |
AU755025B2 (en) * | 1997-11-28 | 2002-11-28 | Sony Corporation | Apparatus and method for driving recording head for ink-jet printer |
US6222304B1 (en) * | 1999-07-28 | 2001-04-24 | The Charles Stark Draper Laboratory | Micro-shell transducer |
US6712455B2 (en) | 2001-03-30 | 2004-03-30 | Philip Morris Incorporated | Piezoelectrically driven printhead array |
US7832429B2 (en) * | 2004-10-13 | 2010-11-16 | Rheonix, Inc. | Microfluidic pump and valve structures and fabrication methods |
DE102009002631B4 (en) * | 2009-04-24 | 2015-08-20 | Michael Förg | Piezoelectric actuator and microvalve with such |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1065880B (en) * | 1959-09-24 | |||
DE1165667B (en) * | 1962-06-28 | 1964-03-19 | Siemens Ag | Piezoelectric flexural oscillator |
DE1287135B (en) * | 1967-06-16 | 1969-01-16 | Telefunken Patent | Electroacoustic transducer with a membrane covered with a layer of semiconductor material |
JPS58112747A (en) * | 1981-12-26 | 1983-07-05 | Fujitsu Ltd | Ink jet recording device |
EP0095911B1 (en) * | 1982-05-28 | 1989-01-18 | Xerox Corporation | Pressure pulse droplet ejector and array |
DE3320441A1 (en) * | 1983-06-06 | 1984-12-06 | Siemens AG, 1000 Berlin und 8000 München | WRITING DEVICE WORKING WITH LIQUID DROPLETS WITH ROD-SHAPED PIEZOELECTRIC TRANSFORMERS CONNECTED ON BOTH ENDS WITH A NOZZLE PLATE |
DE3320443C2 (en) * | 1983-06-06 | 1994-08-18 | Siemens Ag | Liquid pump |
DE3342844A1 (en) * | 1983-11-26 | 1985-06-05 | Philips Patentverwaltung Gmbh, 2000 Hamburg | MICROPLANAR INK JET PRINT HEAD |
JPS61106259A (en) * | 1984-10-31 | 1986-05-24 | Hitachi Ltd | Ink droplet jet discharging device |
-
1986
- 1986-05-30 DE DE19863618107 patent/DE3618107A1/en not_active Withdrawn
-
1987
- 1987-05-19 EP EP87903243A patent/EP0307403B1/en not_active Expired - Lifetime
- 1987-05-19 WO PCT/DE1987/000229 patent/WO1987007217A1/en active IP Right Grant
- 1987-05-19 JP JP62503023A patent/JPH01500891A/en active Pending
- 1987-05-19 DE DE8787903243T patent/DE3764094D1/en not_active Expired - Fee Related
-
1988
- 1988-10-11 US US07/272,984 patent/US4888598A/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO8707217A1 * |
Also Published As
Publication number | Publication date |
---|---|
US4888598A (en) | 1989-12-19 |
DE3618107A1 (en) | 1987-12-03 |
EP0307403B1 (en) | 1990-08-01 |
DE3764094D1 (en) | 1990-09-06 |
WO1987007217A1 (en) | 1987-12-03 |
JPH01500891A (en) | 1989-03-30 |
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