EA201790268A1 - Способ и устройство для экономии электроэнергии и одновременного повышения пропускной скорости в вакуумных установках для нанесения покрытий - Google Patents
Способ и устройство для экономии электроэнергии и одновременного повышения пропускной скорости в вакуумных установках для нанесения покрытийInfo
- Publication number
- EA201790268A1 EA201790268A1 EA201790268A EA201790268A EA201790268A1 EA 201790268 A1 EA201790268 A1 EA 201790268A1 EA 201790268 A EA201790268 A EA 201790268A EA 201790268 A EA201790268 A EA 201790268A EA 201790268 A1 EA201790268 A1 EA 201790268A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- segments
- reactor
- gas
- spray
- simultaneous increase
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/32779—Continuous moving of batches of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32788—Means for moving the material to be treated for extracting the material from the process chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32889—Connection or combination with other apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Abstract
Устройство и способ экономии электроэнергии и одновременного повышения пропускной скорости в вакуумных установках для нанесения покрытий, состоящих из последовательности распылительных сегментов (3) и газовых разделительных сегментов (2) с одной сплошной подложечной плоскостью (1), характеризующиеся следующими признаками: а) каждый распылительный сегмент (3) состоит из ванны (12) реактора с расположенным внутри транспортирующим устройством (11), причем фланец (6) реактора установлен в непосредственной близости над подложечной плоскостью (1), причем катодный опорный блок (5) с мишенями (8) и впускные каналы (10) для газа находятся в непосредственной близости от подложки с отбойными щитками (9) в крышке (4) реактора; b) газовые разделительные сегменты (2) в области подложечной плоскости (1) снабжены проходящим по всей длине газового разделительного сегмента (2) сводом (14) туннеля; с) вакуумирование распылительных сегментов (3) и/или газовых разделительных сегментов (2) осуществляется с помощью одного или нескольких вакуумных насосов (15), причем отводимый при этом воздух собирается в изменяющемся в объеме воздухосборнике (25).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014011877.0A DE102014011877B4 (de) | 2014-08-11 | 2014-08-11 | Verfahren und Vorrichtung zur Energieeinsparung und gleichzeitigen Erhöhung der Durchlaufgeschwindigkeit bei Vakuum-Beschichtungsanlagen |
PCT/DE2015/000397 WO2016023533A2 (de) | 2014-08-11 | 2015-08-05 | Verfahren und vorrichtung zur energieeinsparung und gleichzeitigen erhöhung der durchlaufgeschwindigkeit bei vakuum-beschichtungsanlagen |
Publications (2)
Publication Number | Publication Date |
---|---|
EA201790268A1 true EA201790268A1 (ru) | 2017-06-30 |
EA035334B1 EA035334B1 (ru) | 2020-05-28 |
Family
ID=54356304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EA201790268A EA035334B1 (ru) | 2014-08-11 | 2015-08-05 | Вакуумная установка для нанесения покрытий и способ нанесения покрытий |
Country Status (11)
Country | Link |
---|---|
US (1) | US9960020B2 (ru) |
EP (1) | EP3180456B1 (ru) |
JP (1) | JP6353602B2 (ru) |
KR (1) | KR101924739B1 (ru) |
CN (1) | CN106574364B (ru) |
DE (1) | DE102014011877B4 (ru) |
EA (1) | EA035334B1 (ru) |
ES (1) | ES2731237T3 (ru) |
HU (1) | HUE044236T2 (ru) |
PL (1) | PL3180456T3 (ru) |
WO (1) | WO2016023533A2 (ru) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016012460A1 (de) * | 2016-10-19 | 2018-04-19 | Grenzebach Maschinenbau Gmbh | Vorrichtung und Verfahren zur Herstellung definierter Eigenschaften von Gradientenschichten in einem System mehrlagiger Beschichtungen bei Sputter - Anlagen |
DE102018102693B4 (de) | 2018-02-07 | 2024-06-27 | VON ARDENNE Asset GmbH & Co. KG | Dehydratationsnetzwerk, Vakuumanordnung und Verfahren |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05311403A (ja) * | 1992-05-11 | 1993-11-22 | Shin Meiwa Ind Co Ltd | 成膜装置のガス再生装置 |
US5407551A (en) | 1993-07-13 | 1995-04-18 | The Boc Group, Inc. | Planar magnetron sputtering apparatus |
US5705044A (en) * | 1995-08-07 | 1998-01-06 | Akashic Memories Corporation | Modular sputtering machine having batch processing and serial thin film sputtering |
DE19736318C2 (de) * | 1997-08-21 | 2000-12-21 | Leybold Systems Gmbh | Vorrichtung zum Beschichten von plattenförmigen Substraten mit dünnen Schichten mittels Kathodenzerstäubung |
JP4187323B2 (ja) * | 1998-10-13 | 2008-11-26 | Tdk株式会社 | 真空成膜処理装置および方法 |
JP4796688B2 (ja) * | 2000-08-31 | 2011-10-19 | アルバック・クライオ株式会社 | 希ガス回収方法及び希ガス回収装置 |
DE10122310B4 (de) | 2001-05-08 | 2007-08-02 | Von Ardenne Anlagentechnik Gmbh | Längserstreckte Vakuumbeschichtungsanlage |
DE10322935A1 (de) * | 2003-05-21 | 2004-12-16 | Unaxis Deutschland Holding Gmbh | Mit einem Spalt versehene Trennwand zwischen zwei hintereinander angeordneten Prozesskammern |
DE10352143B4 (de) * | 2003-11-04 | 2009-06-25 | Von Ardenne Anlagentechnik Gmbh | Längserstreckte Vakuumanlage zur ein- oder beidseitigen Beschichtung flacher Substrate |
ATE360180T1 (de) * | 2004-03-15 | 2007-05-15 | Applied Materials Gmbh & Co Kg | Vakuumbehandlungsanlage mit umsetzbarem wartungsventil |
DE102005001353B4 (de) * | 2005-01-11 | 2010-01-07 | Von Ardenne Anlagentechnik Gmbh | Pumpkanal einer längserstreckten Vakuumbeschichtunganlage |
TWI304241B (en) * | 2005-02-04 | 2008-12-11 | Advanced Display Proc Eng Co | Vacuum processing apparatus |
US20110308458A1 (en) * | 2010-06-21 | 2011-12-22 | Semes Co., Ltd. | Thin Film Deposition Apparatus |
DE102012110334B3 (de) | 2012-10-29 | 2013-11-28 | Von Ardenne Anlagentechnik Gmbh | Planarmagnetron |
-
2014
- 2014-08-11 DE DE102014011877.0A patent/DE102014011877B4/de not_active Expired - Fee Related
-
2015
- 2015-08-05 CN CN201580040807.0A patent/CN106574364B/zh active Active
- 2015-08-05 US US15/328,818 patent/US9960020B2/en active Active
- 2015-08-05 HU HUE15785048 patent/HUE044236T2/hu unknown
- 2015-08-05 EA EA201790268A patent/EA035334B1/ru not_active IP Right Cessation
- 2015-08-05 ES ES15785048T patent/ES2731237T3/es active Active
- 2015-08-05 WO PCT/DE2015/000397 patent/WO2016023533A2/de active Application Filing
- 2015-08-05 KR KR1020177002297A patent/KR101924739B1/ko active IP Right Grant
- 2015-08-05 PL PL15785048T patent/PL3180456T3/pl unknown
- 2015-08-05 EP EP15785048.8A patent/EP3180456B1/de active Active
- 2015-08-05 JP JP2017504378A patent/JP6353602B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
HUE044236T2 (hu) | 2019-10-28 |
JP6353602B2 (ja) | 2018-07-04 |
ES2731237T3 (es) | 2019-11-14 |
PL3180456T3 (pl) | 2019-10-31 |
DE102014011877B4 (de) | 2021-08-05 |
US9960020B2 (en) | 2018-05-01 |
EP3180456A2 (de) | 2017-06-21 |
KR20170024035A (ko) | 2017-03-06 |
EA035334B1 (ru) | 2020-05-28 |
US20170213708A1 (en) | 2017-07-27 |
CN106574364A (zh) | 2017-04-19 |
KR101924739B1 (ko) | 2019-02-27 |
EP3180456B1 (de) | 2019-05-01 |
WO2016023533A2 (de) | 2016-02-18 |
JP2017524071A (ja) | 2017-08-24 |
WO2016023533A3 (de) | 2016-04-07 |
DE102014011877A1 (de) | 2016-02-11 |
CN106574364B (zh) | 2019-08-02 |
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MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ BY KZ KG TJ TM |