DK4029059T3 - Fremstillingsfremgangsmåde - Google Patents

Fremstillingsfremgangsmåde Download PDF

Info

Publication number
DK4029059T3
DK4029059T3 DK19769096.9T DK19769096T DK4029059T3 DK 4029059 T3 DK4029059 T3 DK 4029059T3 DK 19769096 T DK19769096 T DK 19769096T DK 4029059 T3 DK4029059 T3 DK 4029059T3
Authority
DK
Denmark
Prior art keywords
manufacturing process
manufacturing
Prior art date
Application number
DK19769096.9T
Other languages
English (en)
Inventor
Philippe Caroff-Gaonac'h
Leonardus Petrus Kouwenhoven
Pavel Aseev
Original Assignee
Microsoft Technology Licensing Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsoft Technology Licensing Llc filed Critical Microsoft Technology Licensing Llc
Application granted granted Critical
Publication of DK4029059T3 publication Critical patent/DK4029059T3/da

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02Epitaxial-layer growth
    • C30B23/04Pattern deposit, e.g. by using masks
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/04Pattern deposit, e.g. by using masks
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N10/00Quantum computing, i.e. information processing based on quantum-mechanical phenomena
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/10Junction-based devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/40AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Artificial Intelligence (AREA)
  • Mathematical Physics (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Computational Mathematics (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Data Mining & Analysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Recrystallisation Techniques (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Memories (AREA)
DK19769096.9T 2019-09-10 2019-09-10 Fremstillingsfremgangsmåde DK4029059T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2019/074049 WO2021047754A1 (en) 2019-09-10 2019-09-10 Fabrication method

Publications (1)

Publication Number Publication Date
DK4029059T3 true DK4029059T3 (da) 2023-11-27

Family

ID=67956749

Family Applications (1)

Application Number Title Priority Date Filing Date
DK19769096.9T DK4029059T3 (da) 2019-09-10 2019-09-10 Fremstillingsfremgangsmåde

Country Status (5)

Country Link
US (1) US20240107897A1 (da)
EP (1) EP4029059B1 (da)
CN (1) CN114365290A (da)
DK (1) DK4029059T3 (da)
WO (1) WO2021047754A1 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023079561A1 (en) * 2021-11-07 2023-05-11 Yeda Research And Development Co. Ltd. Tapered nanowire device for quantum computing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8030108B1 (en) * 2008-06-30 2011-10-04 Stc.Unm Epitaxial growth of in-plane nanowires and nanowire devices
CA2989727C (en) * 2015-06-26 2024-01-23 University Of Copenhagen Network of nanostructures as grown on a substrate
GB201718897D0 (en) * 2017-11-15 2017-12-27 Microsoft Technology Licensing Llc Superconductor-semiconductor fabrication
US11707000B2 (en) * 2017-10-15 2023-07-18 Microsoft Technology Licensing, Llc Side-gating in selective-area-grown topological qubits

Also Published As

Publication number Publication date
WO2021047754A1 (en) 2021-03-18
CN114365290A (zh) 2022-04-15
EP4029059B1 (en) 2023-10-25
US20240107897A1 (en) 2024-03-28
EP4029059A1 (en) 2022-07-20

Similar Documents

Publication Publication Date Title
DE102016200026B8 (de) Wafer-Herstellungsverfahren
MA48475A (fr) Procédés de fabrication de niraparib
TWI800668B (zh) 晶片製造方法
DK3738452T3 (da) Fordamper
TWI800658B (zh) 晶片製造方法
DK4029059T3 (da) Fremstillingsfremgangsmåde
DK3791095T3 (da) Proceskomponent
TWI799659B (zh) 玻璃物品的製造方法
GB201820732D0 (en) Novel manufacturing process
DOS2019000267S (es) Ornamentación
TH1801006125A (th) กรรมวิธีผลิตกุ้งแปลงเพศ
ES1243687Y (es) Salmorejo
IT201900020430A1 (it) Espositore
DE202019004111U8 (de) Weichenstellvorichtung
TH190914S (th) ขันโตก
TH190911S (th) ขันโตก
TH190910S (th) ขันโตก
DK3786413T3 (da) Rullejalousi
ES1235736Y (es) Alcoholimetro
ES1234309Y (es) Bolardo
ES1232841Y (es) Barbacoa plancha
UA40486S (uk) Сендвичмейкер
UA40385S (uk) Сендвічмейкер
UA40386S (uk) Сендвічмейкер
UA40481S (uk) Сендвичмейкер