DK1288721T3 - Fotolitografi med substrat med flere niveauer - Google Patents

Fotolitografi med substrat med flere niveauer

Info

Publication number
DK1288721T3
DK1288721T3 DK02102074T DK02102074T DK1288721T3 DK 1288721 T3 DK1288721 T3 DK 1288721T3 DK 02102074 T DK02102074 T DK 02102074T DK 02102074 T DK02102074 T DK 02102074T DK 1288721 T3 DK1288721 T3 DK 1288721T3
Authority
DK
Denmark
Prior art keywords
region
pattern area
expose
pattern
multilayer substrate
Prior art date
Application number
DK02102074T
Other languages
English (en)
Inventor
Brian Martin
John Perring
John Shannon
Original Assignee
X Fab Semiconductor Foundries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by X Fab Semiconductor Foundries filed Critical X Fab Semiconductor Foundries
Application granted granted Critical
Publication of DK1288721T3 publication Critical patent/DK1288721T3/da

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/703—Non-planar pattern areas or non-planar masks, e.g. curved masks or substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/70—Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/203—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure comprising an imagewise exposure to electromagnetic radiation or corpuscular radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Optical Communication System (AREA)
  • Magnetic Heads (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)
DK02102074T 2001-09-01 2002-07-30 Fotolitografi med substrat med flere niveauer DK1288721T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0121217A GB2379284A (en) 2001-09-01 2001-09-01 Multiple level photolithography

Publications (1)

Publication Number Publication Date
DK1288721T3 true DK1288721T3 (da) 2007-06-04

Family

ID=9921363

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02102074T DK1288721T3 (da) 2001-09-01 2002-07-30 Fotolitografi med substrat med flere niveauer

Country Status (6)

Country Link
US (2) US6949330B2 (da)
EP (1) EP1288721B1 (da)
AT (1) ATE353450T1 (da)
DE (1) DE60218002T2 (da)
DK (1) DK1288721T3 (da)
GB (1) GB2379284A (da)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2379284A (en) * 2001-09-01 2003-03-05 Zarlink Semiconductor Ltd Multiple level photolithography
US20050130075A1 (en) * 2003-12-12 2005-06-16 Mohammed Shaarawi Method for making fluid emitter orifice
US7259106B2 (en) * 2004-09-10 2007-08-21 Versatilis Llc Method of making a microelectronic and/or optoelectronic circuitry sheet
US7915171B2 (en) * 2008-04-29 2011-03-29 Intel Corporation Double patterning techniques and structures
US8057964B2 (en) * 2008-10-31 2011-11-15 Altera Corporation Photolithographic reticles with electrostatic discharge protection structures
CN111162007B (zh) * 2018-11-08 2022-04-12 中芯国际集成电路制造(上海)有限公司 半导体器件及其制造方法

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Also Published As

Publication number Publication date
EP1288721A3 (en) 2003-09-17
EP1288721B1 (en) 2007-02-07
DE60218002T2 (de) 2007-11-15
GB0121217D0 (en) 2001-10-24
GB2379284A (en) 2003-03-05
US6949330B2 (en) 2005-09-27
EP1288721A2 (en) 2003-03-05
ATE353450T1 (de) 2007-02-15
US7349070B2 (en) 2008-03-25
DE60218002D1 (de) 2007-03-22
US20060050255A1 (en) 2006-03-09
US20030044734A1 (en) 2003-03-06

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