DE69938999D1 - Verfahren und Vorrichtung zur Verwendung von Schiebefenstern in einem mikro-elektromechanischen System - Google Patents
Verfahren und Vorrichtung zur Verwendung von Schiebefenstern in einem mikro-elektromechanischen SystemInfo
- Publication number
- DE69938999D1 DE69938999D1 DE69938999T DE69938999T DE69938999D1 DE 69938999 D1 DE69938999 D1 DE 69938999D1 DE 69938999 T DE69938999 T DE 69938999T DE 69938999 T DE69938999 T DE 69938999T DE 69938999 D1 DE69938999 D1 DE 69938999D1
- Authority
- DE
- Germany
- Prior art keywords
- electro
- micro
- mechanical system
- sliding windows
- windows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/16—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices
- G01R15/165—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Control Or Security For Electrophotography (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/200,353 US6177800B1 (en) | 1998-11-10 | 1998-11-10 | Method and apparatus for using shuttered windows in a micro-electro-mechanical system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69938999D1 true DE69938999D1 (de) | 2008-08-14 |
Family
ID=22741366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69938999T Expired - Lifetime DE69938999D1 (de) | 1998-11-10 | 1999-11-05 | Verfahren und Vorrichtung zur Verwendung von Schiebefenstern in einem mikro-elektromechanischen System |
Country Status (4)
Country | Link |
---|---|
US (1) | US6177800B1 (de) |
EP (1) | EP1003044B1 (de) |
JP (1) | JP4558869B2 (de) |
DE (1) | DE69938999D1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020086456A1 (en) * | 2000-12-19 | 2002-07-04 | Cunningham Shawn Jay | Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture |
US6418006B1 (en) * | 2000-12-20 | 2002-07-09 | The Board Of Trustees Of The University Of Illinois | Wide tuning range variable MEMs capacitor |
KR100397090B1 (ko) * | 2001-05-22 | 2003-09-06 | 권동일 | 박막소재의 특성평가를 위한 정전방식 평가소자 및 그제조방법 |
US6806717B2 (en) * | 2001-09-27 | 2004-10-19 | Xerox Corporation | Spacing compensating electrostatic voltmeter |
US7274193B2 (en) | 2003-03-28 | 2007-09-25 | Canon Kabushiki Kaisha | Micromechanical potential sensor |
JP2004301554A (ja) * | 2003-03-28 | 2004-10-28 | Canon Inc | 電位測定装置及び画像形成装置 |
JP2004294351A (ja) * | 2003-03-28 | 2004-10-21 | Canon Inc | 電位センサおよび画像形成装置 |
JP2004294350A (ja) * | 2003-03-28 | 2004-10-21 | Canon Inc | 電位センサおよび画像形成装置 |
JP5027984B2 (ja) * | 2003-03-28 | 2012-09-19 | キヤノン株式会社 | 揺動体を用いた電位測定装置、電位測定方法、及び画像形成装置 |
JP4794828B2 (ja) * | 2004-06-08 | 2011-10-19 | キヤノン株式会社 | 電位測定装置および画像形成装置 |
JP2006003131A (ja) * | 2004-06-15 | 2006-01-05 | Canon Inc | 電位センサ |
US7049804B2 (en) * | 2004-07-12 | 2006-05-23 | Canon Kabushiki Kaisha | Electric potential measuring apparatus, and image forming apparatus |
JP4440065B2 (ja) * | 2004-10-08 | 2010-03-24 | キヤノン株式会社 | 電位測定装置及び画像形成装置 |
US20060029151A1 (en) * | 2004-08-05 | 2006-02-09 | Moran Robert D | Capacitive data link |
US7350919B2 (en) * | 2004-12-03 | 2008-04-01 | Searete Llc | Vision modification with reflected image |
US8104892B2 (en) * | 2004-12-03 | 2012-01-31 | The Invention Science Fund I, Llc | Vision modification with reflected image |
US7656569B2 (en) * | 2004-12-03 | 2010-02-02 | Searete Llc | Vision modification with reflected image |
US7334892B2 (en) * | 2004-12-03 | 2008-02-26 | Searete Llc | Method and system for vision enhancement |
US7931373B2 (en) * | 2004-12-03 | 2011-04-26 | The Invention Science Fund I, Llc | Vision modification with reflected image |
US8244342B2 (en) * | 2004-12-03 | 2012-08-14 | The Invention Science Fund I, Llc | Method and system for adaptive vision modification |
US7344244B2 (en) * | 2004-12-03 | 2008-03-18 | Searete, Llc | Adjustable lens system with neural-based control |
US7390088B2 (en) * | 2004-12-03 | 2008-06-24 | Searete Llc | Adjustable lens system with neural-based control |
US7594727B2 (en) * | 2004-12-03 | 2009-09-29 | Searete Llc | Vision modification with reflected image |
US9155483B2 (en) | 2004-12-03 | 2015-10-13 | The Invention Science Fund I, Llc | Vision modification with reflected image |
US7470027B2 (en) * | 2004-12-03 | 2008-12-30 | Searete Llc | Temporal vision modification |
US7486988B2 (en) * | 2004-12-03 | 2009-02-03 | Searete Llc | Method and system for adaptive vision modification |
US7334894B2 (en) * | 2004-12-03 | 2008-02-26 | Searete, Llc | Temporal vision modification |
JP2006317358A (ja) * | 2005-05-16 | 2006-11-24 | Canon Inc | 電位測定装置、およびそれを用いた画像形成装置 |
US7324766B2 (en) * | 2005-05-20 | 2008-01-29 | Xerox Corporation | Cross-process charge uniformity scanner |
JP4921034B2 (ja) * | 2005-05-27 | 2012-04-18 | キヤノン株式会社 | 電位測定装置 |
US7382137B2 (en) * | 2005-05-27 | 2008-06-03 | Canon Kabushiki Kaisha | Potential measuring apparatus |
JP5188024B2 (ja) * | 2006-02-09 | 2013-04-24 | キヤノン株式会社 | 揺動体装置、電位測定装置、及び光偏向装置 |
JP4993349B2 (ja) | 2007-01-29 | 2012-08-08 | キヤノン株式会社 | 電位測定装置、及び画像形成装置 |
DE102008052477A1 (de) | 2008-10-20 | 2010-06-10 | Siemens Aktiengesellschaft | Als mikromechanisches System ausgebildeter Sensor für elektrische Felder |
DE102009013273A1 (de) | 2009-03-13 | 2010-09-16 | Siemens Aktiengesellschaft | Sensoranordnung zur Messung elektrischer Potentiale |
JP5781002B2 (ja) * | 2012-04-23 | 2015-09-16 | 株式会社コガネイ | 電位測定装置 |
JP6039916B2 (ja) * | 2012-04-23 | 2016-12-07 | 株式会社コガネイ | 電位測定装置 |
US10119998B2 (en) | 2016-11-07 | 2018-11-06 | Fluke Corporation | Variable capacitance non-contact AC voltage measurement system |
US10352967B2 (en) | 2016-11-11 | 2019-07-16 | Fluke Corporation | Non-contact electrical parameter measurement systems |
US10120021B1 (en) | 2017-06-16 | 2018-11-06 | Fluke Corporation | Thermal non-contact voltage and non-contact current devices |
CA3022581A1 (en) | 2017-11-09 | 2019-05-09 | Janaranjana Sampath Hiniduma Liyanage | Torsional moving electric field sensor with modulated sensitivity and without reference ground |
CN112903183B (zh) * | 2019-11-19 | 2022-11-22 | 北京大学 | 一种片上微型电离真空传感器及其制造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3852668A (en) * | 1973-08-14 | 1974-12-03 | Xerox Corp | Electrometer system |
US4030347A (en) | 1975-10-31 | 1977-06-21 | Electrical Power Research Institute | Biaxial capacitance strain transducer |
US4529940A (en) * | 1982-12-13 | 1985-07-16 | The Simco Company, Inc. | Panoramic electrostatic field sensor |
JPS60192267A (ja) * | 1984-03-13 | 1985-09-30 | Nikka Seiki Kk | コンデンサ−型回転静電電圧計 |
US4835461A (en) | 1984-04-13 | 1989-05-30 | Xerox Corporation | Microdeflector probe for electrostatic voltmeter |
US5025346A (en) | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
JPH04307373A (ja) * | 1991-04-04 | 1992-10-29 | Canon Inc | 表面電位センサー |
JPH0587852A (ja) * | 1991-07-12 | 1993-04-06 | Jientetsuku Kk | 感光ドラムの表面電位測定用プローブ |
US5212451A (en) * | 1992-03-09 | 1993-05-18 | Xerox Corporation | Single balanced beam electrostatic voltmeter modulator |
US5349855A (en) | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
JPH07218566A (ja) * | 1994-02-04 | 1995-08-18 | Gentec Kk | 無振動交流式非接触表面電位計 |
US5489850A (en) * | 1994-05-09 | 1996-02-06 | Xerox Corporation | Balanced beam electrostatic voltmeter modulator employing a shielded electrode and carbon fiber conductors |
US5517123A (en) * | 1994-08-26 | 1996-05-14 | Analog Devices, Inc. | High sensitivity integrated micromechanical electrostatic potential sensor |
JPH08114500A (ja) * | 1994-10-13 | 1996-05-07 | Murata Mfg Co Ltd | チョッパ式赤外線センサ |
US5703487A (en) * | 1996-01-11 | 1997-12-30 | Xerox Corporation | Detection of charge deficient spot susceptibility |
JP3673597B2 (ja) * | 1996-04-30 | 2005-07-20 | キヤノン株式会社 | 表面電位計 |
-
1998
- 1998-11-10 US US09/200,353 patent/US6177800B1/en not_active Expired - Lifetime
-
1999
- 1999-11-05 DE DE69938999T patent/DE69938999D1/de not_active Expired - Lifetime
- 1999-11-05 EP EP99122147A patent/EP1003044B1/de not_active Expired - Lifetime
- 1999-11-08 JP JP31718599A patent/JP4558869B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6177800B1 (en) | 2001-01-23 |
EP1003044A3 (de) | 2001-04-18 |
JP2000147035A (ja) | 2000-05-26 |
EP1003044A2 (de) | 2000-05-24 |
JP4558869B2 (ja) | 2010-10-06 |
EP1003044B1 (de) | 2008-07-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |