DE69934750D1 - Verfahren zur Herstellung einer keramischen Membranstruktur - Google Patents

Verfahren zur Herstellung einer keramischen Membranstruktur

Info

Publication number
DE69934750D1
DE69934750D1 DE69934750T DE69934750T DE69934750D1 DE 69934750 D1 DE69934750 D1 DE 69934750D1 DE 69934750 T DE69934750 T DE 69934750T DE 69934750 T DE69934750 T DE 69934750T DE 69934750 D1 DE69934750 D1 DE 69934750D1
Authority
DE
Germany
Prior art keywords
producing
membrane structure
ceramic membrane
ceramic
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69934750T
Other languages
English (en)
Other versions
DE69934750T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Katsuyuki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69934750D1 publication Critical patent/DE69934750D1/de
Application granted granted Critical
Publication of DE69934750T2 publication Critical patent/DE69934750T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/66—Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Laminated Bodies (AREA)
  • Measuring Fluid Pressure (AREA)
DE1999634750 1998-09-14 1999-09-13 Verfahren zur Herstellung einer keramischen Membranstruktur Expired - Lifetime DE69934750T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26067798 1998-09-14
JP26067798A JP3462400B2 (ja) 1998-09-14 1998-09-14 セラミックダイヤフラム構造体の製造方法

Publications (2)

Publication Number Publication Date
DE69934750D1 true DE69934750D1 (de) 2007-02-22
DE69934750T2 DE69934750T2 (de) 2007-10-31

Family

ID=17351249

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999634750 Expired - Lifetime DE69934750T2 (de) 1998-09-14 1999-09-13 Verfahren zur Herstellung einer keramischen Membranstruktur

Country Status (4)

Country Link
US (1) US6348115B1 (de)
EP (1) EP0987101B1 (de)
JP (1) JP3462400B2 (de)
DE (1) DE69934750T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717337B2 (en) * 2001-05-23 2004-04-06 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric acoustic actuator
JP3445262B2 (ja) * 2001-11-22 2003-09-08 松下電器産業株式会社 圧電体の製造方法、圧電体、超音波探触子、超音波診断装置および非破壊検査装置
US20040120836A1 (en) * 2002-12-18 2004-06-24 Xunhu Dai Passive membrane microvalves
US7126255B2 (en) * 2004-04-05 2006-10-24 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film-type device
JP2006147839A (ja) * 2004-11-19 2006-06-08 Ngk Insulators Ltd 圧電／電歪デバイス
JP4963159B2 (ja) * 2004-11-19 2012-06-27 日本碍子株式会社 圧電／電歪デバイス
CN100530734C (zh) * 2004-12-22 2009-08-19 日本碍子株式会社 膜片结构体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3366132B2 (ja) 1994-06-03 2003-01-14 日本碍子株式会社 セラミックダイヤフラム構造体及びその製造方法
US5545461A (en) 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
JP3492492B2 (ja) * 1996-06-14 2004-02-03 日本碍子株式会社 セラミックダイヤフラム構造体の製造方法
DE69707359T2 (de) * 1996-06-14 2002-06-27 Ngk Insulators, Ltd. Verfahren zur Herstellung einer keramischen Membranstruktur

Also Published As

Publication number Publication date
EP0987101A3 (de) 2002-08-28
US6348115B1 (en) 2002-02-19
EP0987101B1 (de) 2007-01-10
JP3462400B2 (ja) 2003-11-05
JP2000091662A (ja) 2000-03-31
DE69934750T2 (de) 2007-10-31
EP0987101A2 (de) 2000-03-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition