DE69934750D1 - Verfahren zur Herstellung einer keramischen Membranstruktur - Google Patents
Verfahren zur Herstellung einer keramischen MembranstrukturInfo
- Publication number
- DE69934750D1 DE69934750D1 DE69934750T DE69934750T DE69934750D1 DE 69934750 D1 DE69934750 D1 DE 69934750D1 DE 69934750 T DE69934750 T DE 69934750T DE 69934750 T DE69934750 T DE 69934750T DE 69934750 D1 DE69934750 D1 DE 69934750D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- membrane structure
- ceramic membrane
- ceramic
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/66—Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
- Laminated Bodies (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26067798 | 1998-09-14 | ||
JP26067798A JP3462400B2 (ja) | 1998-09-14 | 1998-09-14 | セラミックダイヤフラム構造体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69934750D1 true DE69934750D1 (de) | 2007-02-22 |
DE69934750T2 DE69934750T2 (de) | 2007-10-31 |
Family
ID=17351249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1999634750 Expired - Lifetime DE69934750T2 (de) | 1998-09-14 | 1999-09-13 | Verfahren zur Herstellung einer keramischen Membranstruktur |
Country Status (4)
Country | Link |
---|---|
US (1) | US6348115B1 (de) |
EP (1) | EP0987101B1 (de) |
JP (1) | JP3462400B2 (de) |
DE (1) | DE69934750T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6717337B2 (en) * | 2001-05-23 | 2004-04-06 | The United States Of America As Represented By The Secretary Of The Navy | Piezoelectric acoustic actuator |
JP3445262B2 (ja) * | 2001-11-22 | 2003-09-08 | 松下電器産業株式会社 | 圧電体の製造方法、圧電体、超音波探触子、超音波診断装置および非破壊検査装置 |
US20040120836A1 (en) * | 2002-12-18 | 2004-06-24 | Xunhu Dai | Passive membrane microvalves |
US7126255B2 (en) * | 2004-04-05 | 2006-10-24 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film-type device |
JP2006147839A (ja) * | 2004-11-19 | 2006-06-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
JP4963159B2 (ja) * | 2004-11-19 | 2012-06-27 | 日本碍子株式会社 | 圧電/電歪デバイス |
CN100530734C (zh) * | 2004-12-22 | 2009-08-19 | 日本碍子株式会社 | 膜片结构体 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3366132B2 (ja) | 1994-06-03 | 2003-01-14 | 日本碍子株式会社 | セラミックダイヤフラム構造体及びその製造方法 |
US5545461A (en) | 1994-02-14 | 1996-08-13 | Ngk Insulators, Ltd. | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3492492B2 (ja) * | 1996-06-14 | 2004-02-03 | 日本碍子株式会社 | セラミックダイヤフラム構造体の製造方法 |
DE69707359T2 (de) * | 1996-06-14 | 2002-06-27 | Ngk Insulators, Ltd. | Verfahren zur Herstellung einer keramischen Membranstruktur |
-
1998
- 1998-09-14 JP JP26067798A patent/JP3462400B2/ja not_active Expired - Fee Related
-
1999
- 1999-08-24 US US09/382,071 patent/US6348115B1/en not_active Expired - Lifetime
- 1999-09-13 EP EP19990307212 patent/EP0987101B1/de not_active Expired - Lifetime
- 1999-09-13 DE DE1999634750 patent/DE69934750T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0987101A3 (de) | 2002-08-28 |
US6348115B1 (en) | 2002-02-19 |
EP0987101B1 (de) | 2007-01-10 |
JP3462400B2 (ja) | 2003-11-05 |
JP2000091662A (ja) | 2000-03-31 |
DE69934750T2 (de) | 2007-10-31 |
EP0987101A2 (de) | 2000-03-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |