DE69823511D1 - Druckwandler - Google Patents

Druckwandler

Info

Publication number
DE69823511D1
DE69823511D1 DE69823511T DE69823511T DE69823511D1 DE 69823511 D1 DE69823511 D1 DE 69823511D1 DE 69823511 T DE69823511 T DE 69823511T DE 69823511 T DE69823511 T DE 69823511T DE 69823511 D1 DE69823511 D1 DE 69823511D1
Authority
DE
Germany
Prior art keywords
pressure converter
converter
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69823511T
Other languages
English (en)
Other versions
DE69823511T2 (de
Inventor
Christopher P Grudzien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69823511D1 publication Critical patent/DE69823511D1/de
Application granted granted Critical
Publication of DE69823511T2 publication Critical patent/DE69823511T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69823511T 1997-07-03 1998-06-26 Druckwandler Expired - Lifetime DE69823511T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US887579 1997-07-03
US08/887,579 US5965821A (en) 1997-07-03 1997-07-03 Pressure sensor
PCT/US1998/013458 WO1999001731A1 (en) 1997-07-03 1998-06-26 Pressure sensor

Publications (2)

Publication Number Publication Date
DE69823511D1 true DE69823511D1 (de) 2004-06-03
DE69823511T2 DE69823511T2 (de) 2005-03-03

Family

ID=25391439

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69823511T Expired - Lifetime DE69823511T2 (de) 1997-07-03 1998-06-26 Druckwandler

Country Status (7)

Country Link
US (1) US5965821A (de)
EP (1) EP0995093B1 (de)
JP (1) JP4187923B2 (de)
KR (1) KR100423275B1 (de)
DE (1) DE69823511T2 (de)
TW (1) TW508434B (de)
WO (1) WO1999001731A1 (de)

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DE19729785C2 (de) * 1997-07-11 1999-08-19 Micronas Semiconductor Holding Kondensatoranordnung und ihr Herstellungsverfahren
US6877713B1 (en) * 1999-07-20 2005-04-12 Deka Products Limited Partnership Tube occluder and method for occluding collapsible tubes
US6382923B1 (en) * 1999-07-20 2002-05-07 Deka Products Ltd. Partnership Pump chamber having at least one spacer for inhibiting the pumping of a gas
US6874377B2 (en) * 1999-11-10 2005-04-05 Honeywell International Inc. Sensor package for flush mounting of a sensor
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
JP2002315097A (ja) * 2001-04-16 2002-10-25 Mitsubishi Electric Corp 圧力感応装置及びこれに用いられる半導体基板の製造方法
JP2004012141A (ja) * 2002-06-03 2004-01-15 Omron Corp 静電容量式圧力センサおよびその製造方法
FI116097B (fi) * 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Voima- tai paineanturi ja menetelmä sen soveltamiseksi
JP3681721B2 (ja) * 2002-12-04 2005-08-10 株式会社テムテック研究所 静電容量型のダイヤフラム圧力センサの製造方法
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
DE10333438A1 (de) * 2003-07-23 2005-02-17 Robert Bosch Gmbh Brennraumdrucksensor mit Metallmembran mit piezoresistiver Metalldünnschicht
JP2005134221A (ja) * 2003-10-29 2005-05-26 Kyocera Corp 圧力検出装置用パッケージ
US7662139B2 (en) 2003-10-30 2010-02-16 Deka Products Limited Partnership Pump cassette with spiking assembly
US8158102B2 (en) 2003-10-30 2012-04-17 Deka Products Limited Partnership System, device, and method for mixing a substance with a liquid
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US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7093494B2 (en) * 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7089797B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Temperature insensitive pressure sensor
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7159467B2 (en) 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7121145B2 (en) * 2004-10-18 2006-10-17 Silverbrook Research Pty Ltd Capacitative pressure sensor
US7124643B2 (en) * 2004-10-18 2006-10-24 Silverbrook Research Pty Ltd Pressure sensor with non-planar membrane
JP4601399B2 (ja) * 2004-11-15 2010-12-22 京セラ株式会社 圧力検出装置用パッケージおよび圧力検出装置
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US20140199193A1 (en) 2007-02-27 2014-07-17 Deka Products Limited Partnership Blood treatment systems and methods
CA2970214C (en) 2006-04-14 2021-08-17 Deka Products Limited Partnership System for pumping a biological fluid
KR20070106225A (ko) * 2006-04-28 2007-11-01 주식회사 엠디티 접촉식 정전용량 압력센서
WO2008088898A1 (en) * 2007-01-19 2008-07-24 Sierra Scientific Instruments, Inc. Micro-remote gastrointestinal physiological measurement device
US20080202251A1 (en) * 2007-02-27 2008-08-28 Iee International Electronics & Engineering S.A. Capacitive pressure sensor
WO2008133942A2 (en) * 2007-04-23 2008-11-06 Sierra Scientific Instruments, Inc. Suspended membrane pressure sensing array
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
DE102007049446A1 (de) 2007-10-16 2009-04-23 Cequr Aps Katheter-Einführeinrichtung
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
KR102060347B1 (ko) 2008-01-23 2019-12-30 데카 프로덕츠 리미티드 파트너쉽 복수의 유체 라인을 사용하는 의료용 치료 시스템에 사용하기 위한 펌프 카세트 및 방법
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
US8547239B2 (en) 2009-08-18 2013-10-01 Cequr Sa Methods for detecting failure states in a medicine delivery device
US8672873B2 (en) 2009-08-18 2014-03-18 Cequr Sa Medicine delivery device having detachable pressure sensing unit
SG182731A1 (en) 2010-02-02 2012-08-30 Mks Instr Inc Capacitive pressure sensor
US9211378B2 (en) 2010-10-22 2015-12-15 Cequr Sa Methods and systems for dosing a medicament
TWI568999B (zh) 2011-09-29 2017-02-01 Ｍｋｓ公司 具有改良的電極結構之電容式壓力感測器
JP5826943B2 (ja) 2011-10-11 2015-12-02 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 静電容量型圧力計アセンブリ
KR101303197B1 (ko) 2011-10-18 2013-09-04 김광식 압력센서 및 압력센서의 제조방법
JP5963486B2 (ja) * 2012-03-15 2016-08-03 日本電産コパル電子株式会社 静電容量センサ、測定装置、および測定方法
DE102014200500A1 (de) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
DE102014101700A1 (de) 2014-02-12 2015-08-13 Vega Grieshaber Kg Druckmesszelle
AU2016334242B2 (en) 2015-10-09 2020-09-24 Deka Products Limited Partnership Fluid pumping and bioreactor system
US11299705B2 (en) 2016-11-07 2022-04-12 Deka Products Limited Partnership System and method for creating tissue
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
KR20230138506A (ko) 2021-03-26 2023-10-05 고쿠리츠다이가쿠호진 도호쿠다이가쿠 정전용량식 압력 센서 및 그것을 사용하는 압력 검출방법

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JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
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US4542436A (en) * 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
GB2188155B (en) * 1986-03-21 1990-01-10 Furness Controls Ltd Pressure transducer
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DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
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JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
DE59200253D1 (de) * 1991-05-26 1994-07-28 Endress Hauser Gmbh Co Durchkontaktierung eines Isolierstoffteils.
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JP3083115B2 (ja) * 1991-12-26 2000-09-04 株式会社不二工機 静電容量型圧力センサ素子
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Also Published As

Publication number Publication date
EP0995093B1 (de) 2004-04-28
WO1999001731A1 (en) 1999-01-14
JP4187923B2 (ja) 2008-11-26
TW508434B (en) 2002-11-01
KR100423275B1 (ko) 2004-03-18
KR20010021500A (ko) 2001-03-15
US5965821A (en) 1999-10-12
DE69823511T2 (de) 2005-03-03
EP0995093A1 (de) 2000-04-26
JP2001509585A (ja) 2001-07-24

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Legal Events

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8364 No opposition during term of opposition