DE69739830D1 - Tiegel für kristallziehung und verfahren zu dessen herstellung - Google Patents
Tiegel für kristallziehung und verfahren zu dessen herstellungInfo
- Publication number
- DE69739830D1 DE69739830D1 DE69739830T DE69739830T DE69739830D1 DE 69739830 D1 DE69739830 D1 DE 69739830D1 DE 69739830 T DE69739830 T DE 69739830T DE 69739830 T DE69739830 T DE 69739830T DE 69739830 D1 DE69739830 D1 DE 69739830D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- crystal drawing
- drawing mirror
- mirror
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18816096 | 1996-06-27 | ||
JP28013896 | 1996-09-30 | ||
PCT/JP1997/002211 WO1997049844A1 (fr) | 1996-06-27 | 1997-06-26 | Creuset destine au tirage du cristal et son procede de production |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69739830D1 true DE69739830D1 (de) | 2010-05-20 |
Family
ID=26504761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69739830T Expired - Lifetime DE69739830D1 (de) | 1996-06-27 | 1997-06-26 | Tiegel für kristallziehung und verfahren zu dessen herstellung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6136094A (de) |
EP (1) | EP0913504B1 (de) |
KR (2) | KR20000022158A (de) |
DE (1) | DE69739830D1 (de) |
TW (1) | TW531573B (de) |
WO (1) | WO1997049844A1 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11209115A (ja) * | 1998-01-23 | 1999-08-03 | Toyo Tanso Kk | 高純度c/cコンポジットおよびその製造方法 |
EP1120484B1 (de) * | 1998-06-04 | 2009-02-11 | Toyo Tanso Co., Ltd. | Kohlenfaserstoffverstärktes Kohlenstoff-Material und seine Verwendung in Bauteilen einer Einkristallziehungsanlage |
FR2801304B1 (fr) * | 1999-11-24 | 2002-02-15 | Snecma | Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin |
WO2001038625A2 (fr) * | 1999-11-24 | 2001-05-31 | Snecma Moteurs | Procede de fabrication d'un bol en materiau composite thermostructural, bol tel qu'obtenu par le procede, et utilisation du bol comme support de creuset |
FR2812889B1 (fr) * | 2000-08-11 | 2002-11-15 | Snecma Moteurs | Procede de fabrication d'un bol monobloc en materiau composite thermostructural, notamment pour une installation de production de silicium, et bol tel qu'obtenu par ce procede |
WO2001064976A1 (fr) * | 2000-03-03 | 2001-09-07 | Shin-Etsu Handotai Co.,Ltd. | Godet de recuperation de fuites de bain fondu pour appareil de tirage vertical de monocristaux |
JP4700218B2 (ja) * | 2001-05-02 | 2011-06-15 | 東洋炭素株式会社 | 単結晶引き上げ用炭素繊維強化炭素複合材料製ルツボ |
FR2825699A1 (fr) * | 2001-06-12 | 2002-12-13 | Eads Launch Vehicles | Procede de densification et de traitement anticorrosion d'un materiau composite thermostructural |
DE10321785A1 (de) * | 2003-05-14 | 2004-12-16 | Sgl Carbon Ag | Dauerhafter CFC-Stütztiegel für Hochtemperaturprozesse beim Ziehen von Halbleiterkristallen |
CN100567217C (zh) * | 2006-12-06 | 2009-12-09 | 湖南南方搏云新材料有限责任公司 | 硅晶体生长炉用高纯固化炭毡制造方法 |
JP2009203093A (ja) * | 2008-02-26 | 2009-09-10 | Ibiden Co Ltd | ルツボ保持部材 |
JP2009203091A (ja) * | 2008-02-26 | 2009-09-10 | Ibiden Co Ltd | ルツボ保持部材 |
JP2009203092A (ja) * | 2008-02-26 | 2009-09-10 | Ibiden Co Ltd | 容器保持部材 |
JP2009269774A (ja) * | 2008-04-30 | 2009-11-19 | Ibiden Co Ltd | 高純度炭素繊維強化炭素複合材およびその製造方法 |
JP5286589B2 (ja) | 2008-05-01 | 2013-09-11 | イビデン株式会社 | ルツボ保持部材およびその製造方法 |
JP5286591B2 (ja) * | 2008-05-21 | 2013-09-11 | イビデン株式会社 | ルツボ保持部材及びその製造方法 |
JP5002846B2 (ja) * | 2008-06-17 | 2012-08-15 | イビデン株式会社 | ルツボ保持部材及びその製造方法 |
US8328937B2 (en) * | 2009-07-21 | 2012-12-11 | Toyota Jidosha Kabushiki Kaisha | Seed crystal axis for solution growth of single crystal |
CN102140676B (zh) * | 2010-02-01 | 2015-05-27 | 科发伦材料株式会社 | 碳纤维补强碳复合材料坩埚以及该坩埚的制造方法 |
US9216923B2 (en) * | 2011-07-25 | 2015-12-22 | Shin-Etsu Quartz Products Co., Ltd. | Metal and graphite mold and method of making a crucible |
US8858697B2 (en) | 2011-10-28 | 2014-10-14 | General Electric Company | Mold compositions |
US9011205B2 (en) | 2012-02-15 | 2015-04-21 | General Electric Company | Titanium aluminide article with improved surface finish |
US8932518B2 (en) | 2012-02-29 | 2015-01-13 | General Electric Company | Mold and facecoat compositions |
US8906292B2 (en) | 2012-07-27 | 2014-12-09 | General Electric Company | Crucible and facecoat compositions |
WO2014022725A2 (en) * | 2012-08-01 | 2014-02-06 | Allied Mineral Products, Inc. | Reinforced refractory containers |
US8708033B2 (en) | 2012-08-29 | 2014-04-29 | General Electric Company | Calcium titanate containing mold compositions and methods for casting titanium and titanium aluminide alloys |
US8992824B2 (en) | 2012-12-04 | 2015-03-31 | General Electric Company | Crucible and extrinsic facecoat compositions |
US9592548B2 (en) | 2013-01-29 | 2017-03-14 | General Electric Company | Calcium hexaluminate-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
US9511417B2 (en) | 2013-11-26 | 2016-12-06 | General Electric Company | Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
US9192983B2 (en) | 2013-11-26 | 2015-11-24 | General Electric Company | Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
US10391547B2 (en) | 2014-06-04 | 2019-08-27 | General Electric Company | Casting mold of grading with silicon carbide |
CN108950685A (zh) * | 2018-07-24 | 2018-12-07 | 上海骐杰碳素材料有限公司 | 一种涂层坩埚的制作方法 |
KR102192939B1 (ko) * | 2019-07-31 | 2020-12-18 | 울산과학기술원 | 차량용 고압 연료 탱크 및 그 제조 방법 |
CN112341232B (zh) * | 2020-10-28 | 2022-04-08 | 西安超码科技有限公司 | 一种炭/炭坩埚及其制造方法 |
CN113186598A (zh) * | 2021-03-27 | 2021-07-30 | 核工业第八研究所 | 基于缠绕工艺和针刺工艺制备的碳/碳复合材料坩埚 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0343250Y2 (de) * | 1986-06-27 | 1991-09-10 | ||
US5207992A (en) * | 1986-12-26 | 1993-05-04 | Toshiba Ceramics Co., Ltd. | Silicon single crystal pulling-up apparatus |
SU1487514A1 (ru) * | 1987-10-19 | 1990-10-15 | Gnii Pi Redkometa | Подставка под кварцевый тигель ; |
SE463834B (sv) * | 1988-03-15 | 1991-01-28 | Asea Plast Ab | Tryckkaerl |
JP2757025B2 (ja) * | 1989-07-12 | 1998-05-25 | 株式会社新川 | 薄膜供給機構 |
JP3249141B2 (ja) * | 1990-12-28 | 2002-01-21 | 東邦テナックス株式会社 | 管状複合構造材 |
KR0126784B1 (en) * | 1994-07-08 | 1998-04-02 | Samsung Electronics Co Ltd | Cleaning method of semiconductor substrate and cleaning material therefor |
JP3190207B2 (ja) * | 1994-07-19 | 2001-07-23 | 東芝電興株式会社 | シリコン単結晶引き上げ装置 |
US5616175A (en) | 1994-07-22 | 1997-04-01 | Herecules Incorporated | 3-D carbon-carbon composites for crystal pulling furnace hardware |
US5858486A (en) * | 1995-02-27 | 1999-01-12 | Sgl Carbon Composites, Inc. | High purity carbon/carbon composite useful as a crucible susceptor |
US5683281A (en) * | 1995-02-27 | 1997-11-04 | Hitco Technologies, Inc | High purity composite useful as furnace components |
KR100360394B1 (ko) * | 1995-12-20 | 2003-01-24 | 삼성전자 주식회사 | 반도체기판의세정방법및이에사용되는세정액 |
JP3653647B2 (ja) * | 1996-05-31 | 2005-06-02 | イビデン株式会社 | シリコン単結晶引き上げ装置用の保温筒 |
KR980012037A (ko) * | 1996-07-29 | 1998-04-30 | 김광호 | 웨이퍼 세정방법 |
KR19980028655A (ko) * | 1996-10-23 | 1998-07-15 | 김광호 | 중합체 제거용 세정액 및 이를 사용하는 반도체소자의 제조방법 |
KR19980084291A (ko) * | 1997-05-22 | 1998-12-05 | 윤종용 | 세정방법 |
JPH10330185A (ja) * | 1997-05-28 | 1998-12-15 | Toyo Tanso Kk | 単結晶引き上げ用ルツボ及びその製造方法 |
-
1997
- 1997-06-26 KR KR1019980710576A patent/KR20000022158A/ko not_active IP Right Cessation
- 1997-06-26 EP EP97928477A patent/EP0913504B1/de not_active Expired - Lifetime
- 1997-06-26 TW TW086108984A patent/TW531573B/zh not_active IP Right Cessation
- 1997-06-26 DE DE69739830T patent/DE69739830D1/de not_active Expired - Lifetime
- 1997-06-26 US US09/147,446 patent/US6136094A/en not_active Expired - Lifetime
- 1997-06-26 WO PCT/JP1997/002211 patent/WO1997049844A1/ja active IP Right Grant
- 1997-06-26 KR KR1019980010576A patent/KR100273054B1/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0913504A4 (de) | 2001-12-19 |
TW531573B (en) | 2003-05-11 |
KR19990075991A (ko) | 1999-10-15 |
WO1997049844A1 (fr) | 1997-12-31 |
EP0913504A1 (de) | 1999-05-06 |
US6136094A (en) | 2000-10-24 |
EP0913504B1 (de) | 2010-04-07 |
KR20000022158A (ko) | 2000-04-25 |
KR100273054B1 (ko) | 2000-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent |