DE69732666D1 - Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierung - Google Patents
Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierungInfo
- Publication number
- DE69732666D1 DE69732666D1 DE69732666T DE69732666T DE69732666D1 DE 69732666 D1 DE69732666 D1 DE 69732666D1 DE 69732666 T DE69732666 T DE 69732666T DE 69732666 T DE69732666 T DE 69732666T DE 69732666 D1 DE69732666 D1 DE 69732666D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring probe
- calibrating
- control points
- contact unit
- coordinate system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 abstract 8
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
- G01C11/02—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/58—Wireless transmission of information between a sensor or probe and a control or evaluation unit
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Image Analysis (AREA)
- Radar Systems Or Details Thereof (AREA)
- Indicating And Signalling Devices For Elevators (AREA)
- Radio Relay Systems (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO963047 | 1996-07-22 | ||
NO963047A NO303595B1 (no) | 1996-07-22 | 1996-07-22 | System og fremgangsmÕte for bestemmelse av romlige koordinater |
PCT/NO1997/000189 WO1998004881A1 (en) | 1996-07-22 | 1997-07-21 | System and method for determining spatial coordinates |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69732666D1 true DE69732666D1 (de) | 2005-04-07 |
DE69732666T2 DE69732666T2 (de) | 2005-12-29 |
Family
ID=19899637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69732666T Expired - Lifetime DE69732666T2 (de) | 1996-07-22 | 1997-07-21 | Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierung |
Country Status (7)
Country | Link |
---|---|
US (1) | US6389158B1 (de) |
EP (1) | EP1015845B1 (de) |
AT (1) | ATE290201T1 (de) |
AU (1) | AU3636597A (de) |
DE (1) | DE69732666T2 (de) |
NO (1) | NO303595B1 (de) |
WO (1) | WO1998004881A1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO313113B1 (no) * | 1999-07-13 | 2002-08-12 | Metronor Asa | System for scanning av store objekters geometri |
DE10012273B4 (de) * | 2000-03-14 | 2006-09-28 | Daimlerchrysler Ag | Anlage zur messtechnischen räumlichen 3D-Lageerfassung von Oberflächenpunkten |
EP1285224A1 (de) * | 2000-05-16 | 2003-02-26 | Steinbichler Optotechnik Gmbh | Verfahren und vorrichtung zum bestimmen der 3d-form eines objektes |
US20020122117A1 (en) * | 2000-12-26 | 2002-09-05 | Masamichi Nakagawa | Camera device, camera system and image processing method |
JP4877891B2 (ja) * | 2001-08-03 | 2012-02-15 | 株式会社トプコン | 校正用被写体 |
US20050233770A1 (en) * | 2002-02-06 | 2005-10-20 | Ramsey Craig C | Wireless substrate-like sensor |
US20050224902A1 (en) * | 2002-02-06 | 2005-10-13 | Ramsey Craig C | Wireless substrate-like sensor |
US7289230B2 (en) * | 2002-02-06 | 2007-10-30 | Cyberoptics Semiconductors, Inc. | Wireless substrate-like sensor |
DE10303551A1 (de) * | 2003-01-29 | 2004-08-12 | Dr. Johannes Heidenhain Gmbh | Verfahren zum Übertragen von Steuerbefehlen von einem Sendeelement zu einem Messtaster |
EP1447644A1 (de) * | 2003-02-14 | 2004-08-18 | Metronor ASA | Messung von räumlichen Koordinaten |
DE50301235D1 (de) * | 2003-07-17 | 2006-02-02 | Axios 3D Services Gmbh | Lokator und optisches Messsystem |
US6950775B2 (en) * | 2003-12-01 | 2005-09-27 | Snap-On Incorporated | Coordinate measuring system and field-of-view indicators therefor |
US7403295B2 (en) * | 2004-10-25 | 2008-07-22 | Hoya Corporation | Position-detecting system |
DE102006003569A1 (de) | 2006-01-25 | 2007-07-26 | Axios 3D Services Gmbh | Positionsbestimmungssystem |
US7893697B2 (en) * | 2006-02-21 | 2011-02-22 | Cyberoptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
US7804306B2 (en) * | 2006-02-21 | 2010-09-28 | CyterOptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
WO2008042199A2 (en) | 2006-09-29 | 2008-04-10 | Cyberoptics Semiconductor, Inc. | Particles sensor integrated with substrate |
US7778793B2 (en) * | 2007-03-12 | 2010-08-17 | Cyberoptics Semiconductor, Inc. | Wireless sensor for semiconductor processing systems |
US20080246493A1 (en) * | 2007-04-05 | 2008-10-09 | Gardner Delrae H | Semiconductor Processing System With Integrated Showerhead Distance Measuring Device |
US20090015268A1 (en) * | 2007-07-13 | 2009-01-15 | Gardner Delrae H | Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment |
ES2758734T3 (es) * | 2009-05-05 | 2020-05-06 | Kapsch Trafficcom Ag | Procedimiento para calibrar la imagen de una cámara |
DE102009032262A1 (de) * | 2009-07-08 | 2011-01-13 | Steinbichler Optotechnik Gmbh | Verfahren zur Bestimmung der 3D-Koordinaten eines Objekts |
FR2980844B1 (fr) * | 2011-10-03 | 2014-05-09 | Renault Sa | Procede d'etalonnage d'une barre de mise a l'echelle |
EP2586396A1 (de) | 2011-10-26 | 2013-05-01 | Metronor AS | System zur Sicherstellung der Präzision bei medizinischen Behandlungen |
EP2698596A1 (de) * | 2012-08-16 | 2014-02-19 | Hexagon Technology Center GmbH | Verfahren und System zur Bestimmung der räumlichen Koordinaten mit einer mobilen Koordinatenmessmaschine |
CN103389072B (zh) * | 2013-07-22 | 2015-04-22 | 北京信息科技大学 | 一种基于直线拟合的像点定位精度评估方法 |
JP6325871B2 (ja) | 2014-03-28 | 2018-05-16 | 株式会社キーエンス | 光学式座標測定装置 |
JP6325896B2 (ja) | 2014-03-28 | 2018-05-16 | 株式会社キーエンス | 光学式座標測定装置 |
JP6325877B2 (ja) | 2014-04-18 | 2018-05-16 | 株式会社キーエンス | 光学式座標測定装置 |
EP3141864B1 (de) * | 2014-04-30 | 2019-06-05 | Shinano Kenshi Co., Ltd. | Messvorrichtung |
JP6002275B2 (ja) | 2014-04-30 | 2016-10-05 | シナノケンシ株式会社 | 計測装置 |
JP6316663B2 (ja) | 2014-05-30 | 2018-04-25 | 株式会社キーエンス | 座標測定装置 |
CN105423912A (zh) * | 2015-11-05 | 2016-03-23 | 天津大学 | 光笔跟踪*** |
US10024760B2 (en) * | 2015-12-17 | 2018-07-17 | General Electric Company | Methods for monitoring turbine components |
EP3203179B1 (de) * | 2016-02-05 | 2019-04-03 | Hexagon Technology Center GmbH | Messmaschine auf grundlage einer deltaroboteranordnung |
DE102016118617B4 (de) * | 2016-09-30 | 2019-02-28 | Carl Zeiss Industrielle Messtechnik Gmbh | Messsystem |
DE102018123815A1 (de) * | 2018-09-26 | 2020-03-26 | Ebm-Papst Mulfingen Gmbh & Co. Kg | Verfahren zur Positionsbestimmung in einem Raum |
US10955236B2 (en) * | 2019-04-05 | 2021-03-23 | Faro Technologies, Inc. | Three-dimensional measuring system |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO174025C (no) * | 1991-10-11 | 1994-03-02 | Metronor Sa | System for punktvis maaling av romlige koordinater |
US5175601A (en) | 1991-10-15 | 1992-12-29 | Electro-Optical Information Systems | High-speed 3-D surface measurement surface inspection and reverse-CAD system |
US5305091A (en) * | 1992-12-07 | 1994-04-19 | Oreo Products Inc. | Optical coordinate measuring system for large objects |
JP3000819B2 (ja) * | 1993-03-15 | 2000-01-17 | 松下電器産業株式会社 | 三次元測定用プローブ及び形状測定方法 |
US5557410A (en) * | 1994-05-26 | 1996-09-17 | Lockheed Missiles & Space Company, Inc. | Method of calibrating a three-dimensional optical measurement system |
NO301999B1 (no) * | 1995-10-12 | 1998-01-05 | Metronor As | Kombinasjon av laser tracker og kamerabasert koordinatmåling |
-
1996
- 1996-07-22 NO NO963047A patent/NO303595B1/no not_active IP Right Cessation
-
1997
- 1997-07-21 AT AT97933077T patent/ATE290201T1/de not_active IP Right Cessation
- 1997-07-21 EP EP97933077A patent/EP1015845B1/de not_active Expired - Lifetime
- 1997-07-21 AU AU36365/97A patent/AU3636597A/en not_active Abandoned
- 1997-07-21 DE DE69732666T patent/DE69732666T2/de not_active Expired - Lifetime
- 1997-07-21 WO PCT/NO1997/000189 patent/WO1998004881A1/en active IP Right Grant
- 1997-07-21 US US09/230,259 patent/US6389158B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE290201T1 (de) | 2005-03-15 |
NO963047L (no) | 1998-01-23 |
WO1998004881A1 (en) | 1998-02-05 |
DE69732666T2 (de) | 2005-12-29 |
US6389158B1 (en) | 2002-05-14 |
NO963047D0 (no) | 1996-07-22 |
EP1015845B1 (de) | 2005-03-02 |
NO303595B1 (no) | 1998-08-03 |
AU3636597A (en) | 1998-02-20 |
EP1015845A1 (de) | 2000-07-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |