KR960008429A - 노광 장치 - Google Patents
노광 장치Info
- Publication number
- KR960008429A KR960008429A KR1019950025127A KR19950025127A KR960008429A KR 960008429 A KR960008429 A KR 960008429A KR 1019950025127 A KR1019950025127 A KR 1019950025127A KR 19950025127 A KR19950025127 A KR 19950025127A KR 960008429 A KR960008429 A KR 960008429A
- Authority
- KR
- South Korea
- Prior art keywords
- exposure device
- exposure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6215312A JPH0855784A (ja) | 1994-08-16 | 1994-08-16 | 露光装置 |
JP21531194A JP3460129B2 (ja) | 1994-08-16 | 1994-08-16 | 露光装置および露光方法 |
JP21531094A JP3458477B2 (ja) | 1994-08-16 | 1994-08-16 | 露光装置および露光方法 |
JP215311/1994 | 1994-08-16 | ||
JP215310/1994 | 1994-08-16 | ||
JP215312/1994 | 1994-08-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960008429A true KR960008429A (ko) | 1996-03-22 |
KR100381629B1 KR100381629B1 (ko) | 2003-08-21 |
Family
ID=27329744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950025127A KR100381629B1 (ko) | 1994-08-16 | 1995-08-16 | 노광장치 |
Country Status (2)
Country | Link |
---|---|
US (1) | US5617211A (ko) |
KR (1) | KR100381629B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030017835A (ko) * | 2001-08-23 | 2003-03-04 | 주식회사 덕인 | 회전 마스크 패턴을 사용한 에스엘에스 공정 방법 및 그장치 |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6157497A (en) * | 1993-06-30 | 2000-12-05 | Nikon Corporation | Exposure apparatus |
US5729331A (en) * | 1993-06-30 | 1998-03-17 | Nikon Corporation | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus |
JPH08130181A (ja) * | 1994-10-28 | 1996-05-21 | Nikon Corp | 投影露光装置 |
US5912983A (en) * | 1997-01-24 | 1999-06-15 | Oki Electric Industry Co., Ltd | Overlay accuracy measuring method |
JP4029130B2 (ja) * | 1997-06-03 | 2008-01-09 | 株式会社ニコン | 露光装置及び露光方法 |
DE19757074A1 (de) * | 1997-12-20 | 1999-06-24 | Zeiss Carl Fa | Projektionsbelichtungsanlage und Belichtungsverfahren |
TW396395B (en) * | 1998-01-07 | 2000-07-01 | Nikon Corp | Exposure method and scanning-type aligner |
AU1890699A (en) * | 1998-01-16 | 1999-08-02 | Nikon Corporation | Exposure method and lithography system, exposure apparatus and method of producing the apparatus, and method of producing device |
JP2000047390A (ja) * | 1998-05-22 | 2000-02-18 | Nikon Corp | 露光装置およびその製造方法 |
US6975399B2 (en) * | 1998-08-28 | 2005-12-13 | Nikon Corporation | mark position detecting apparatus |
JP3882588B2 (ja) * | 2001-11-12 | 2007-02-21 | 株式会社ニコン | マーク位置検出装置 |
TW447009B (en) * | 1999-02-12 | 2001-07-21 | Nippon Kogaku Kk | Scanning exposure method and scanning type exposure device |
JP2001215718A (ja) * | 1999-11-26 | 2001-08-10 | Nikon Corp | 露光装置及び露光方法 |
EP1107064A3 (en) * | 1999-12-06 | 2004-12-29 | Olympus Optical Co., Ltd. | Exposure apparatus |
KR100827874B1 (ko) * | 2000-05-22 | 2008-05-07 | 가부시키가이샤 니콘 | 노광 장치, 노광 장치의 제조 방법, 노광 방법, 마이크로 장치의 제조 방법, 및 디바이스의 제조 방법 |
US7242456B2 (en) * | 2004-05-26 | 2007-07-10 | Asml Holdings N.V. | System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions |
US7388663B2 (en) * | 2004-10-28 | 2008-06-17 | Asml Netherlands B.V. | Optical position assessment apparatus and method |
US7061581B1 (en) * | 2004-11-22 | 2006-06-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7349068B2 (en) * | 2004-12-17 | 2008-03-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4858439B2 (ja) * | 2005-01-25 | 2012-01-18 | 株式会社ニコン | 露光装置及び露光方法並びにマイクロデバイスの製造方法 |
DE102005030839A1 (de) * | 2005-07-01 | 2007-01-11 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven |
CN102298228B (zh) | 2006-01-26 | 2014-04-23 | 夏普株式会社 | 液晶显示装置的制造方法和液晶显示装置 |
US20110080570A1 (en) * | 2008-06-09 | 2011-04-07 | Hideaki Sunohara | Exposure apparatus and exposure method |
US8384875B2 (en) * | 2008-09-29 | 2013-02-26 | Nikon Corporation | Exposure apparatus, exposure method, and method for producing device |
KR101202319B1 (ko) * | 2010-07-26 | 2012-11-16 | 삼성전자주식회사 | 노광 장치 및 그 제어 방법 |
JP6338386B2 (ja) * | 2014-01-31 | 2018-06-06 | キヤノン株式会社 | リソグラフィ装置、及び物品の製造方法 |
US10114297B2 (en) * | 2016-07-22 | 2018-10-30 | Applied Materials, Inc. | Active eye-to-eye with alignment by X-Y capacitance measurement |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3943359A (en) * | 1973-06-15 | 1976-03-09 | Hitachi, Ltd. | Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope |
JPS5212577A (en) * | 1975-07-21 | 1977-01-31 | Nippon Kogaku Kk <Nikon> | Automatic location device |
DE2845603C2 (de) * | 1978-10-19 | 1982-12-09 | Censor Patent- und Versuchs-Anstalt, 9490 Vaduz | Verfahren und Einrichtung zum Projektionskopieren |
US4629313A (en) * | 1982-10-22 | 1986-12-16 | Nippon Kogaku K.K. | Exposure apparatus |
JP2530587B2 (ja) * | 1983-11-26 | 1996-09-04 | 株式会社ニコン | 位置決め装置 |
US4801808A (en) * | 1984-07-27 | 1989-01-31 | Canon Kabushiki Kaisha | Alignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical system |
JPS6155710A (ja) * | 1984-08-27 | 1986-03-20 | Sharp Corp | アライメント方法 |
US4801208A (en) * | 1984-11-19 | 1989-01-31 | Nikon Corporation | Projection type exposing apparatus |
US5237393A (en) * | 1990-05-28 | 1993-08-17 | Nec Corporation | Reticle for a reduced projection exposure apparatus |
US5044750A (en) * | 1990-08-13 | 1991-09-03 | National Semiconductor Corporation | Method for checking lithography critical dimensions |
US5296917A (en) * | 1992-01-21 | 1994-03-22 | Mitsubishi Denki Kabushiki Kaisha | Method of monitoring accuracy with which patterns are written |
US5444538A (en) * | 1994-03-10 | 1995-08-22 | New Vision Systems, Inc. | System and method for optimizing the grid and intrafield registration of wafer patterns |
-
1995
- 1995-08-16 US US08/515,783 patent/US5617211A/en not_active Expired - Lifetime
- 1995-08-16 KR KR1019950025127A patent/KR100381629B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030017835A (ko) * | 2001-08-23 | 2003-03-04 | 주식회사 덕인 | 회전 마스크 패턴을 사용한 에스엘에스 공정 방법 및 그장치 |
Also Published As
Publication number | Publication date |
---|---|
US5617211A (en) | 1997-04-01 |
KR100381629B1 (ko) | 2003-08-21 |
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Legal Events
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E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
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FPAY | Annual fee payment |
Payment date: 20130321 Year of fee payment: 11 |
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EXPY | Expiration of term |