KR960008429A - 노광 장치 - Google Patents

노광 장치

Info

Publication number
KR960008429A
KR960008429A KR1019950025127A KR19950025127A KR960008429A KR 960008429 A KR960008429 A KR 960008429A KR 1019950025127 A KR1019950025127 A KR 1019950025127A KR 19950025127 A KR19950025127 A KR 19950025127A KR 960008429 A KR960008429 A KR 960008429A
Authority
KR
South Korea
Prior art keywords
exposure device
exposure
Prior art date
Application number
KR1019950025127A
Other languages
English (en)
Other versions
KR100381629B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6215312A external-priority patent/JPH0855784A/ja
Priority claimed from JP21531194A external-priority patent/JP3460129B2/ja
Priority claimed from JP21531094A external-priority patent/JP3458477B2/ja
Application filed filed Critical
Publication of KR960008429A publication Critical patent/KR960008429A/ko
Application granted granted Critical
Publication of KR100381629B1 publication Critical patent/KR100381629B1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1019950025127A 1994-08-16 1995-08-16 노광장치 KR100381629B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP6215312A JPH0855784A (ja) 1994-08-16 1994-08-16 露光装置
JP21531194A JP3460129B2 (ja) 1994-08-16 1994-08-16 露光装置および露光方法
JP21531094A JP3458477B2 (ja) 1994-08-16 1994-08-16 露光装置および露光方法
JP215311/1994 1994-08-16
JP215310/1994 1994-08-16
JP215312/1994 1994-08-16

Publications (2)

Publication Number Publication Date
KR960008429A true KR960008429A (ko) 1996-03-22
KR100381629B1 KR100381629B1 (ko) 2003-08-21

Family

ID=27329744

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950025127A KR100381629B1 (ko) 1994-08-16 1995-08-16 노광장치

Country Status (2)

Country Link
US (1) US5617211A (ko)
KR (1) KR100381629B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030017835A (ko) * 2001-08-23 2003-03-04 주식회사 덕인 회전 마스크 패턴을 사용한 에스엘에스 공정 방법 및 그장치

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157497A (en) * 1993-06-30 2000-12-05 Nikon Corporation Exposure apparatus
US5729331A (en) * 1993-06-30 1998-03-17 Nikon Corporation Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
JPH08130181A (ja) * 1994-10-28 1996-05-21 Nikon Corp 投影露光装置
US5912983A (en) * 1997-01-24 1999-06-15 Oki Electric Industry Co., Ltd Overlay accuracy measuring method
JP4029130B2 (ja) * 1997-06-03 2008-01-09 株式会社ニコン 露光装置及び露光方法
DE19757074A1 (de) * 1997-12-20 1999-06-24 Zeiss Carl Fa Projektionsbelichtungsanlage und Belichtungsverfahren
TW396395B (en) * 1998-01-07 2000-07-01 Nikon Corp Exposure method and scanning-type aligner
AU1890699A (en) * 1998-01-16 1999-08-02 Nikon Corporation Exposure method and lithography system, exposure apparatus and method of producing the apparatus, and method of producing device
JP2000047390A (ja) * 1998-05-22 2000-02-18 Nikon Corp 露光装置およびその製造方法
US6975399B2 (en) * 1998-08-28 2005-12-13 Nikon Corporation mark position detecting apparatus
JP3882588B2 (ja) * 2001-11-12 2007-02-21 株式会社ニコン マーク位置検出装置
TW447009B (en) * 1999-02-12 2001-07-21 Nippon Kogaku Kk Scanning exposure method and scanning type exposure device
JP2001215718A (ja) * 1999-11-26 2001-08-10 Nikon Corp 露光装置及び露光方法
EP1107064A3 (en) * 1999-12-06 2004-12-29 Olympus Optical Co., Ltd. Exposure apparatus
KR100827874B1 (ko) * 2000-05-22 2008-05-07 가부시키가이샤 니콘 노광 장치, 노광 장치의 제조 방법, 노광 방법, 마이크로 장치의 제조 방법, 및 디바이스의 제조 방법
US7242456B2 (en) * 2004-05-26 2007-07-10 Asml Holdings N.V. System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions
US7388663B2 (en) * 2004-10-28 2008-06-17 Asml Netherlands B.V. Optical position assessment apparatus and method
US7061581B1 (en) * 2004-11-22 2006-06-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7349068B2 (en) * 2004-12-17 2008-03-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4858439B2 (ja) * 2005-01-25 2012-01-18 株式会社ニコン 露光装置及び露光方法並びにマイクロデバイスの製造方法
DE102005030839A1 (de) * 2005-07-01 2007-01-11 Carl Zeiss Smt Ag Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven
CN102298228B (zh) 2006-01-26 2014-04-23 夏普株式会社 液晶显示装置的制造方法和液晶显示装置
US20110080570A1 (en) * 2008-06-09 2011-04-07 Hideaki Sunohara Exposure apparatus and exposure method
US8384875B2 (en) * 2008-09-29 2013-02-26 Nikon Corporation Exposure apparatus, exposure method, and method for producing device
KR101202319B1 (ko) * 2010-07-26 2012-11-16 삼성전자주식회사 노광 장치 및 그 제어 방법
JP6338386B2 (ja) * 2014-01-31 2018-06-06 キヤノン株式会社 リソグラフィ装置、及び物品の製造方法
US10114297B2 (en) * 2016-07-22 2018-10-30 Applied Materials, Inc. Active eye-to-eye with alignment by X-Y capacitance measurement

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3943359A (en) * 1973-06-15 1976-03-09 Hitachi, Ltd. Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
JPS5212577A (en) * 1975-07-21 1977-01-31 Nippon Kogaku Kk <Nikon> Automatic location device
DE2845603C2 (de) * 1978-10-19 1982-12-09 Censor Patent- und Versuchs-Anstalt, 9490 Vaduz Verfahren und Einrichtung zum Projektionskopieren
US4629313A (en) * 1982-10-22 1986-12-16 Nippon Kogaku K.K. Exposure apparatus
JP2530587B2 (ja) * 1983-11-26 1996-09-04 株式会社ニコン 位置決め装置
US4801808A (en) * 1984-07-27 1989-01-31 Canon Kabushiki Kaisha Alignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical system
JPS6155710A (ja) * 1984-08-27 1986-03-20 Sharp Corp アライメント方法
US4801208A (en) * 1984-11-19 1989-01-31 Nikon Corporation Projection type exposing apparatus
US5237393A (en) * 1990-05-28 1993-08-17 Nec Corporation Reticle for a reduced projection exposure apparatus
US5044750A (en) * 1990-08-13 1991-09-03 National Semiconductor Corporation Method for checking lithography critical dimensions
US5296917A (en) * 1992-01-21 1994-03-22 Mitsubishi Denki Kabushiki Kaisha Method of monitoring accuracy with which patterns are written
US5444538A (en) * 1994-03-10 1995-08-22 New Vision Systems, Inc. System and method for optimizing the grid and intrafield registration of wafer patterns

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030017835A (ko) * 2001-08-23 2003-03-04 주식회사 덕인 회전 마스크 패턴을 사용한 에스엘에스 공정 방법 및 그장치

Also Published As

Publication number Publication date
US5617211A (en) 1997-04-01
KR100381629B1 (ko) 2003-08-21

Similar Documents

Publication Publication Date Title
DE69522422D1 (de) Belichtungsvorrichtung
KR960008429A (ko) 노광 장치
BR9508012A (pt) Aparelho
DE69512171D1 (de) Fixiervorrichtung
DE69521759D1 (de) Abbildungsvorrichtung
DE69522421D1 (de) Bildaufnahmevorrichtung
DE69515262D1 (de) Bilderzeugungsgerät
DE69520245D1 (de) Abbildungsgerät
DE69530095D1 (de) X-y-theta positioniervorrichtung
DE69515374D1 (de) Bilderzeugungsgerät
DE69520897D1 (de) Bilderzeugungsgerät
DE69511147D1 (de) Bilderzeugungsgerät
DE69516347D1 (de) Bilderzeugungsgerät
DE69523349D1 (de) Bilderzeugungsgerät
DE69502822D1 (de) Feuchtigkeitsabsorbierendes gerät
NO970620D0 (no) Vakuum-planteanordning
DE69508309D1 (de) Bilderzeugungsgerät
DE69511212D1 (de) Bilderzeugungsgerät
DE69630548D1 (de) Belichtungsvorrichtung
DE69514282D1 (de) Bilderzeugungsgerät
DE69518187D1 (de) Bilderzeugungsgerät
DE69517866D1 (de) Bilderzeugungsgerät
DE69502531D1 (de) Bilderzeugungsgerät
DE69518218D1 (de) Bilderzeugungsvorrichtung
DE69522867D1 (de) Bilderzeugungsgerät

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130321

Year of fee payment: 11

FPAY Annual fee payment

Payment date: 20140319

Year of fee payment: 12

EXPY Expiration of term