DE69722746D1 - Absperr- und Durchflussvorrichtung - Google Patents

Absperr- und Durchflussvorrichtung

Info

Publication number
DE69722746D1
DE69722746D1 DE69722746T DE69722746T DE69722746D1 DE 69722746 D1 DE69722746 D1 DE 69722746D1 DE 69722746 T DE69722746 T DE 69722746T DE 69722746 T DE69722746 T DE 69722746T DE 69722746 D1 DE69722746 D1 DE 69722746D1
Authority
DE
Germany
Prior art keywords
shut
flow device
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69722746T
Other languages
English (en)
Other versions
DE69722746T2 (de
Inventor
Tadahiro Ohmi
Keiji Hirao
Shigeaki Tanaka
Michio Yamaji
Hiroshi Morokoshi
Nobikazu Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69722746D1 publication Critical patent/DE69722746D1/de
Application granted granted Critical
Publication of DE69722746T2 publication Critical patent/DE69722746T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7783—Valve closes in responses to reverse flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/88054—Direct response normally closed valve limits direction of flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Check Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Safety Valves (AREA)
DE69722746T 1996-11-20 1997-11-17 Absperr- und Durchflussvorrichtung Expired - Fee Related DE69722746T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30886596A JP3997337B2 (ja) 1996-11-20 1996-11-20 流体制御装置
JP30886596 1996-11-20

Publications (2)

Publication Number Publication Date
DE69722746D1 true DE69722746D1 (de) 2003-07-17
DE69722746T2 DE69722746T2 (de) 2004-04-22

Family

ID=17986197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69722746T Expired - Fee Related DE69722746T2 (de) 1996-11-20 1997-11-17 Absperr- und Durchflussvorrichtung

Country Status (9)

Country Link
US (1) US5988217A (de)
EP (1) EP0844424B1 (de)
JP (1) JP3997337B2 (de)
KR (1) KR100481773B1 (de)
CA (1) CA2221528C (de)
DE (1) DE69722746T2 (de)
IL (1) IL122205A (de)
SG (1) SG64461A1 (de)
TW (1) TW337545B (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
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AU2988099A (en) 1998-03-05 1999-09-20 Swagelok Company, The Modular surface mount manifold
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
WO1999064772A1 (en) * 1998-06-12 1999-12-16 Hollingshead J Gregory Modular chemical delivery blocks
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
JP4110304B2 (ja) * 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
US6640835B1 (en) * 2000-03-03 2003-11-04 Creative Pathways, Inc. Micromount™ system
TW500891B (en) * 2000-03-10 2002-09-01 Tokyo Electron Ltd A fluid control device
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
AU2002307547A1 (en) * 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
WO2004021412A2 (en) * 2002-08-27 2004-03-11 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
CA2507589A1 (en) 2002-11-26 2004-06-10 Swagelok Company Modular surface mount fluid system
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
CN101680561B (zh) * 2007-05-31 2011-12-21 东京毅力科创株式会社 流体控制装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8047815B2 (en) * 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8317493B2 (en) 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US8307854B1 (en) * 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
SG176152A1 (en) 2009-06-10 2011-12-29 Vistadeltek Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8327871B1 (en) * 2009-06-12 2012-12-11 Reliance Worldwide Corporation Multi-valve cartridge pressure regulator
US10107407B2 (en) * 2010-09-28 2018-10-23 Parker-Hannifin Corporation Modular valve manifold system
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP2016509242A (ja) * 2013-03-11 2016-03-24 メカニック・アナリティック・インコーポレーテッド 密封組立体を備えるダイヤフラム弁、これを含むクロマトグラフシステム、及びその作動方法
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
SG11201802438WA (en) * 2015-08-26 2018-04-27 Fujikin Kk Flow dividing system
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US11067184B2 (en) * 2017-06-05 2021-07-20 Robertshaw Controls Company Triple icemaker valve with multiple configurations
TW202117217A (zh) * 2019-09-19 2021-05-01 美商應用材料股份有限公司 清潔減少滯留區的隔離閥
JP7450278B2 (ja) * 2019-09-27 2024-03-15 株式会社フジキン バルブ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4182355A (en) * 1977-09-01 1980-01-08 Briel Adriaan Z A Reflux valve
US5161571A (en) * 1990-08-09 1992-11-10 Masako Kiyohara Check valve
US5107885A (en) * 1990-08-09 1992-04-28 Masako Kiyohara Check valve
US5139225A (en) * 1990-11-05 1992-08-18 Micron Technology, Inc. Pneumatically controlled multiple valve system for fluid transfer
JP2731080B2 (ja) * 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
US5749389A (en) * 1993-12-22 1998-05-12 Liquid Air Corporation Purgeable connection for gas supply cabinet
US5762086A (en) * 1995-12-19 1998-06-09 Veriflo Corporation Apparatus for delivering process gas for making semiconductors and method of using same

Also Published As

Publication number Publication date
KR19980042522A (ko) 1998-08-17
IL122205A (en) 2000-10-31
KR100481773B1 (ko) 2005-07-12
CA2221528A1 (en) 1998-05-20
EP0844424B1 (de) 2003-06-11
EP0844424A3 (de) 1998-06-03
EP0844424A2 (de) 1998-05-27
IL122205A0 (en) 1998-04-05
SG64461A1 (en) 1999-04-27
TW337545B (en) 1998-08-01
JPH10148272A (ja) 1998-06-02
JP3997337B2 (ja) 2007-10-24
US5988217A (en) 1999-11-23
CA2221528C (en) 2006-06-06
DE69722746T2 (de) 2004-04-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee