DE69718410D1 - Tintenstrahlkopf und Verfahren zu dessen Herstellung - Google Patents
Tintenstrahlkopf und Verfahren zu dessen HerstellungInfo
- Publication number
- DE69718410D1 DE69718410D1 DE69718410T DE69718410T DE69718410D1 DE 69718410 D1 DE69718410 D1 DE 69718410D1 DE 69718410 T DE69718410 T DE 69718410T DE 69718410 T DE69718410 T DE 69718410T DE 69718410 D1 DE69718410 D1 DE 69718410D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- same
- ink jet
- jet head
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14411—Groove in the nozzle plate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28272496 | 1996-10-24 | ||
JP3248197 | 1997-02-17 | ||
JP29128597A JP3713921B2 (ja) | 1996-10-24 | 1997-10-23 | インクジェット式記録ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69718410D1 true DE69718410D1 (de) | 2003-02-20 |
DE69718410T2 DE69718410T2 (de) | 2003-07-31 |
Family
ID=27287722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69718410T Expired - Lifetime DE69718410T2 (de) | 1996-10-24 | 1997-10-24 | Tintenstrahlkopf und Verfahren zu dessen Herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6260960B1 (de) |
EP (1) | EP0838336B1 (de) |
JP (1) | JP3713921B2 (de) |
DE (1) | DE69718410T2 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999065689A1 (fr) * | 1998-06-18 | 1999-12-23 | Matsushita Electric Industrial Co., Ltd. | Dispositif de projection de fluide et son procede de fabrication |
JP3868143B2 (ja) | 1999-04-06 | 2007-01-17 | 松下電器産業株式会社 | 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法 |
KR100370638B1 (ko) * | 1999-07-13 | 2003-02-05 | 삼성전기주식회사 | 무진동판 압전/전왜 마이크로 액츄에이터 및 그 제조방법 |
WO2001010646A1 (fr) * | 1999-08-04 | 2001-02-15 | Seiko Epson Corporation | Tete d'enregistrement a jet d'encre, procede de fabrication associe et enregistreur a jet d'encre |
JP2002103618A (ja) | 2000-01-17 | 2002-04-09 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
US20060050109A1 (en) * | 2000-01-31 | 2006-03-09 | Le Hue P | Low bonding temperature and pressure ultrasonic bonding process for making a microfluid device |
JP2001347672A (ja) * | 2000-06-07 | 2001-12-18 | Fuji Photo Film Co Ltd | インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法ならびにインクジェットプリンタ |
JP2002086725A (ja) * | 2000-07-11 | 2002-03-26 | Matsushita Electric Ind Co Ltd | インクジェットヘッド、その製造方法及びインクジェット式記録装置 |
US6778724B2 (en) * | 2000-11-28 | 2004-08-17 | The Regents Of The University Of California | Optical switching and sorting of biological samples and microparticles transported in a micro-fluidic device, including integrated bio-chip devices |
JP3661775B2 (ja) | 2001-02-14 | 2005-06-22 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
KR100438836B1 (ko) * | 2001-12-18 | 2004-07-05 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
CN100337825C (zh) * | 2002-12-10 | 2007-09-19 | 松下电器产业株式会社 | 喷墨头的制造方法及喷墨式记录装置 |
JP2004320127A (ja) * | 2003-04-11 | 2004-11-11 | Tdk Corp | 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品 |
CN1856403B (zh) * | 2003-09-24 | 2010-06-02 | 精工爱普生株式会社 | 液体喷头、其制造方法以及液体喷射设备 |
JP4591019B2 (ja) * | 2004-05-24 | 2010-12-01 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
JP5070674B2 (ja) * | 2004-06-14 | 2012-11-14 | 富士ゼロックス株式会社 | インクジェット記録ヘッド、及びインクジェット記録装置 |
JP4654458B2 (ja) * | 2004-12-24 | 2011-03-23 | リコープリンティングシステムズ株式会社 | シリコン部材の陽極接合法及びこれを用いたインクジェットヘッド製造方法並びにインクジェットヘッド及びこれを用いたインクジェット記録装置 |
JP4546483B2 (ja) * | 2005-01-24 | 2010-09-15 | パナソニック株式会社 | 半導体チップの製造方法 |
US7788776B2 (en) * | 2005-03-28 | 2010-09-07 | Brother Kogyo Kabushiki Kaisha | Method of producing piezoelectric actuator |
JP4182360B2 (ja) | 2006-06-05 | 2008-11-19 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP4986216B2 (ja) * | 2006-09-22 | 2012-07-25 | 富士フイルム株式会社 | 液体吐出ヘッドの製造方法及び画像形成装置 |
JP4221611B2 (ja) * | 2006-10-31 | 2009-02-12 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
KR101301157B1 (ko) * | 2007-11-09 | 2013-09-03 | 삼성전자주식회사 | 다단계 기판 식각 방법 및 이를 이용하여 제조된테라헤르츠 발진기 |
WO2013079369A1 (en) | 2011-11-30 | 2013-06-06 | Oce-Technologies B.V. | Inkjet print head and method for manufacturing such print head |
CN103252997B (zh) * | 2012-02-16 | 2015-12-16 | 珠海纳思达珠海赛纳打印科技股份有限公司 | 一种液体喷头及其制造方法 |
JP6115206B2 (ja) * | 2013-03-13 | 2017-04-19 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子及びその製造方法 |
JP6263871B2 (ja) * | 2013-06-25 | 2018-01-24 | セイコーエプソン株式会社 | 流路ユニット、液体噴射ヘッド、液体噴射装置 |
JP2015164149A (ja) * | 2014-02-28 | 2015-09-10 | 株式会社リコー | 分極処理前基板、アクチュエータ基板、アクチュエータ基板の製造方法、液滴吐出ヘッド及び画像形成装置 |
KR102117471B1 (ko) * | 2015-01-12 | 2020-06-01 | 삼성전기주식회사 | 음향 공진기 및 그 제조 방법 |
JP6973051B2 (ja) * | 2017-12-26 | 2021-11-24 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
CN110526204B (zh) * | 2019-08-02 | 2023-01-24 | 大连理工大学 | 采用多步腐蚀减小压电喷墨打印头铜微电极侧蚀量的方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58143535A (ja) * | 1982-02-22 | 1983-08-26 | Hitachi Ltd | 半導体装置の製造方法 |
JPS58217368A (ja) * | 1982-06-11 | 1983-12-17 | Ricoh Co Ltd | 液体噴射装置のノズル構造体の製造方法 |
DE3717294C2 (de) * | 1986-06-10 | 1995-01-26 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf |
JPS6331172A (ja) * | 1986-07-24 | 1988-02-09 | Nec Corp | 半導体装置の製造方法 |
JPH0748485B2 (ja) * | 1987-02-23 | 1995-05-24 | 日本電装株式会社 | エツチング方法 |
US5010355A (en) * | 1989-12-26 | 1991-04-23 | Xerox Corporation | Ink jet printhead having ionic passivation of electrical circuitry |
US5265315A (en) | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
KR940003582B1 (ko) * | 1991-04-30 | 1994-04-25 | 삼성전자 주식회사 | 위상변화 마스크의 제조방법 |
JP3161635B2 (ja) * | 1991-10-17 | 2001-04-25 | ソニー株式会社 | インクジェットプリントヘッド及びインクジェットプリンタ |
US5277755A (en) * | 1991-12-09 | 1994-01-11 | Xerox Corporation | Fabrication of three dimensional silicon devices by single side, two-step etching process |
US5354419A (en) | 1992-08-07 | 1994-10-11 | Xerox Corporation | Anisotropically etched liquid level control structure |
US5896150A (en) | 1992-11-25 | 1999-04-20 | Seiko Epson Corporation | Ink-jet type recording head |
US5308442A (en) * | 1993-01-25 | 1994-05-03 | Hewlett-Packard Company | Anisotropically etched ink fill slots in silicon |
US6074048A (en) * | 1993-05-12 | 2000-06-13 | Minolta Co., Ltd. | Ink jet recording head including interengaging piezoelectric and non-piezoelectric members and method of manufacturing same |
DE69510284T2 (de) | 1994-08-25 | 1999-10-14 | Seiko Epson Corp. | Flüssigkeitsstrahlkopf |
JPH08164605A (ja) * | 1994-12-14 | 1996-06-25 | Sharp Corp | インクジェットヘッドおよびその製造方法 |
JP3689913B2 (ja) * | 1994-12-27 | 2005-08-31 | セイコーエプソン株式会社 | 薄膜圧電体素子の製造法 |
JPH08191103A (ja) * | 1995-01-10 | 1996-07-23 | Nippondenso Co Ltd | 半導体装置の製造方法 |
EP0736385B1 (de) | 1995-04-03 | 1998-02-25 | Seiko Epson Corporation | Tintenstrahldruckkopf und dessen Herstellungsverfahren |
DE69627045T2 (de) | 1995-04-19 | 2003-09-25 | Seiko Epson Corp., Tokio/Tokyo | Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung |
-
1997
- 1997-10-23 JP JP29128597A patent/JP3713921B2/ja not_active Expired - Fee Related
- 1997-10-24 US US08/957,380 patent/US6260960B1/en not_active Expired - Fee Related
- 1997-10-24 DE DE69718410T patent/DE69718410T2/de not_active Expired - Lifetime
- 1997-10-24 EP EP97118552A patent/EP0838336B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0838336A3 (de) | 1999-04-21 |
JP3713921B2 (ja) | 2005-11-09 |
EP0838336A2 (de) | 1998-04-29 |
DE69718410T2 (de) | 2003-07-31 |
US6260960B1 (en) | 2001-07-17 |
EP0838336B1 (de) | 2003-01-15 |
JPH10286960A (ja) | 1998-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |