DE69710984D1 - Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung dieses Tintenstrahlaufzeichnungskopfes - Google Patents

Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung dieses Tintenstrahlaufzeichnungskopfes

Info

Publication number
DE69710984D1
DE69710984D1 DE69710984T DE69710984T DE69710984D1 DE 69710984 D1 DE69710984 D1 DE 69710984D1 DE 69710984 T DE69710984 T DE 69710984T DE 69710984 T DE69710984 T DE 69710984T DE 69710984 D1 DE69710984 D1 DE 69710984D1
Authority
DE
Germany
Prior art keywords
ink jet
recording head
jet recording
manufacturing
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710984T
Other languages
English (en)
Other versions
DE69710984T2 (de
Inventor
Tsutomu Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69710984D1 publication Critical patent/DE69710984D1/de
Application granted granted Critical
Publication of DE69710984T2 publication Critical patent/DE69710984T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69710984T 1996-10-24 1997-10-23 Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung dieses Tintenstrahlaufzeichnungskopfes Expired - Lifetime DE69710984T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28272396A JP3365224B2 (ja) 1996-10-24 1996-10-24 インクジェット式記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69710984D1 true DE69710984D1 (de) 2002-04-18
DE69710984T2 DE69710984T2 (de) 2002-11-21

Family

ID=17656213

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710984T Expired - Lifetime DE69710984T2 (de) 1996-10-24 1997-10-23 Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung dieses Tintenstrahlaufzeichnungskopfes

Country Status (4)

Country Link
US (1) US6183070B1 (de)
EP (1) EP0838338B1 (de)
JP (1) JP3365224B2 (de)
DE (1) DE69710984T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000015804A (ja) * 1998-06-30 2000-01-18 Ricoh Co Ltd インクジェットヘッド及びその製造方法
WO2001010646A1 (fr) * 1999-08-04 2001-02-15 Seiko Epson Corporation Tete d'enregistrement a jet d'encre, procede de fabrication associe et enregistreur a jet d'encre
US6345881B1 (en) * 1999-09-29 2002-02-12 Eastman Kodak Company Coating of printhead nozzle plate
KR100368929B1 (ko) * 2000-02-01 2003-01-24 한국과학기술원 발열장치 제조방법 및 열분사방식 잉크젯 프린트헤드제조방법
JP3661775B2 (ja) * 2001-02-14 2005-06-22 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP3952010B2 (ja) * 2003-12-03 2007-08-01 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP2006069151A (ja) * 2004-09-06 2006-03-16 Canon Inc 圧電膜型アクチュエータの製造方法及び液体噴射ヘッド
US20080018713A1 (en) * 2006-07-21 2008-01-24 Lopez Ali G Multi-crystalline silicon device and manufacturing method
EP1997637B1 (de) * 2007-05-30 2012-09-12 Océ-Technologies B.V. Verfahren zur Herstellung einer piezoelektrischen Tintenstrahlvorrichtung
JP7192460B2 (ja) * 2018-06-25 2022-12-20 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3645017C2 (de) * 1985-09-06 1990-07-12 Fuji Electric Co., Ltd., Kawasaki, Kanagawa, Jp
JPH0626254B2 (ja) * 1987-06-10 1994-04-06 横河電機株式会社 半導体圧力センサの製造方法
JPH0764060B2 (ja) * 1989-06-09 1995-07-12 シャープ株式会社 インクジェットプリンタ
JP2713310B2 (ja) * 1989-08-24 1998-02-16 富士通株式会社 高強度シリコンウェハの製造方法
US5265315A (en) 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
US5465108A (en) * 1991-06-21 1995-11-07 Rohm Co., Ltd. Ink jet print head and ink jet printer
US5956058A (en) 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP2721127B2 (ja) * 1994-03-03 1998-03-04 富士通株式会社 インクジェットヘッド
JP3366146B2 (ja) * 1995-03-06 2003-01-14 セイコーエプソン株式会社 インク噴射ヘッド
JPH08252920A (ja) * 1995-03-16 1996-10-01 Brother Ind Ltd 積層型圧電素子の製造方法

Also Published As

Publication number Publication date
JPH10119267A (ja) 1998-05-12
EP0838338B1 (de) 2002-03-13
EP0838338A3 (de) 1999-01-07
JP3365224B2 (ja) 2003-01-08
DE69710984T2 (de) 2002-11-21
US6183070B1 (en) 2001-02-06
EP0838338A2 (de) 1998-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition