DE69630925D1 - Verfahren und Vorrichtung zur Ellipsometrie mit Vielfachdetektoren - Google Patents

Verfahren und Vorrichtung zur Ellipsometrie mit Vielfachdetektoren

Info

Publication number
DE69630925D1
DE69630925D1 DE69630925T DE69630925T DE69630925D1 DE 69630925 D1 DE69630925 D1 DE 69630925D1 DE 69630925 T DE69630925 T DE 69630925T DE 69630925 T DE69630925 T DE 69630925T DE 69630925 D1 DE69630925 D1 DE 69630925D1
Authority
DE
Germany
Prior art keywords
ellipsometry
multiple detectors
detectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69630925T
Other languages
English (en)
Other versions
DE69630925T2 (de
Inventor
Bernard Drevillon
Jean-Yves Parey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE69630925D1 publication Critical patent/DE69630925D1/de
Application granted granted Critical
Publication of DE69630925T2 publication Critical patent/DE69630925T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69630925T 1995-08-03 1996-07-25 Verfahren und Vorrichtung zur Ellipsometrie mit Vielfachdetektoren Expired - Lifetime DE69630925T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9509478 1995-08-03
FR9509478A FR2737572B1 (fr) 1995-08-03 1995-08-03 Ellipsometre multi-detecteurs et procede de mesure ellipsometrique multi-detecteurs

Publications (2)

Publication Number Publication Date
DE69630925D1 true DE69630925D1 (de) 2004-01-15
DE69630925T2 DE69630925T2 (de) 2004-05-19

Family

ID=9481691

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69630925T Expired - Lifetime DE69630925T2 (de) 1995-08-03 1996-07-25 Verfahren und Vorrichtung zur Ellipsometrie mit Vielfachdetektoren

Country Status (5)

Country Link
US (1) US5757671A (de)
EP (1) EP0760475B1 (de)
JP (1) JP4171079B2 (de)
DE (1) DE69630925T2 (de)
FR (1) FR2737572B1 (de)

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US6483580B1 (en) 1998-03-06 2002-11-19 Kla-Tencor Technologies Corporation Spectroscopic scatterometer system
US20020030813A1 (en) * 1999-03-29 2002-03-14 Norton Adam E. Spectroscopic measurement system using an off-axis spherical mirror and refractive elements
US5929994A (en) * 1998-05-20 1999-07-27 Ahead Optoelectronics, Inc. Intergrating sphere ellipsometer
US6184984B1 (en) 1999-02-09 2001-02-06 Kla-Tencor Corporation System for measuring polarimetric spectrum and other properties of a sample
US6535286B1 (en) * 2000-03-21 2003-03-18 J.A. Woollam Co. Inc. Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use
JP3447654B2 (ja) * 2000-03-24 2003-09-16 Ｎｅｃエレクトロニクス株式会社 異方性薄膜評価法及び評価装置
FR2810108B1 (fr) * 2000-06-09 2004-04-02 France Telecom Ellipsometre spectroscopique a faible bruit
US6791686B1 (en) * 2000-07-26 2004-09-14 Nova Measuring Instruments Ltd. Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof
JP2002267418A (ja) * 2001-03-09 2002-09-18 Horiba Ltd 膜厚測定装置
US7382447B2 (en) * 2001-06-26 2008-06-03 Kla-Tencor Technologies Corporation Method for determining lithographic focus and exposure
JP4938219B2 (ja) * 2001-12-19 2012-05-23 ケーエルエー−テンカー コーポレイション 光学分光システムを使用するパラメトリック・プロフィーリング
GB0302378D0 (en) * 2003-02-01 2003-03-05 Council Cent Lab Res Councils Detection system
US7369234B2 (en) * 2003-02-03 2008-05-06 Rudolph Technologies, Inc. Method of performing optical measurement on a sample
JP4555900B2 (ja) * 2003-02-03 2010-10-06 ルドルフテクノロジーズ インコーポレイテッド 試料の光学測定を行う方法
EP1460765A1 (de) * 2003-03-19 2004-09-22 STMicroelectronics S.r.l. Fehlerkorrekturmethode für als Symbolsequenz codierte digitale Daten
US6963402B2 (en) * 2003-05-22 2005-11-08 Chism Ii William W Polarization modulation photoreflectance characterization of semiconductor quantum confined structures
US7239392B2 (en) 2003-05-22 2007-07-03 Xitronix Corporation Polarization modulation photoreflectance characterization of semiconductor electronic interfaces
US7515253B2 (en) 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
JP2006284335A (ja) * 2005-03-31 2006-10-19 Univ Nagoya クロロフィル蛍光測定方法およびクロロフィル蛍光測定装置
KR101314929B1 (ko) * 2005-10-27 2013-10-04 지트로닉스 코포레이션 반도체 구조에서 변형 및 활성 도펀트의 광반사율에 의한특성 기술 방법
WO2008081374A2 (en) * 2006-12-28 2008-07-10 Koninklijke Philips Electronics N.V. Reflection or single scattering spectroscopy and imaging
US7800755B1 (en) 2007-07-02 2010-09-21 The United States Of America As Represented By The Secretary Of The Navy High-speed polarimeter having a multi-wavelength source
US10908084B2 (en) * 2008-10-14 2021-02-02 Timothy M. Ragan Devices and methods for direct-sampling analog time-resolved detection
CN102192882B (zh) * 2011-03-11 2013-01-09 山东大学 利用锁相放大器进行磁光椭偏测量的测量方法
US9341697B2 (en) 2012-06-25 2016-05-17 Teledyne Scientific & Imaging, Llc Moving platform orientation tracking system
DE102012212982A1 (de) * 2012-07-24 2013-05-08 Siemens Aktiengesellschaft Prozessmessgerät
US8994943B2 (en) * 2012-11-30 2015-03-31 Infineon Technologies Ag Selectivity by polarization
US9631954B2 (en) * 2014-02-04 2017-04-25 Teledyne Scientific & Imaging, Llc Moving platform roll sensor system
US9354118B2 (en) 2014-02-06 2016-05-31 Film Sense, LLC Multiple wavelength ellipsometer system and related method
US10892832B2 (en) 2014-11-11 2021-01-12 Teledyne Scientific & Imaging, Llc Moving platform roll angle determination system using RF communications link
US9739571B2 (en) 2015-01-06 2017-08-22 Teledyne Scientific & Imaging, Llc Moving object command link system and method
CN110411952B (zh) * 2019-07-15 2022-05-20 复旦大学 多偏振通道面阵列探测的椭圆偏振光谱获取***和方法
FR3127564A1 (fr) * 2021-09-30 2023-03-31 Centre National De La Recherche Scientifique - Cnrs Dispositif de détermination d’informations polarimétriques d'un faisceau lumineux et procédé associé

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329357A (en) * 1986-03-06 1994-07-12 Sopra-Societe De Production Et De Recherches Appliquees Spectroscopic ellipsometry apparatus including an optical fiber
US4884265A (en) * 1987-04-30 1989-11-28 Loral Corporation Digital demodulator for frequency-division-multiplexed signals
US5042951A (en) * 1989-09-19 1991-08-27 Therma-Wave, Inc. High resolution ellipsometric apparatus
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
US5196903A (en) * 1990-03-29 1993-03-23 Jeol Ltd. Pulsed light source spectrometer with interferometer
FR2685962B1 (fr) * 1992-01-07 1994-05-20 Centre Nal Recherc Scientifique Ellipsometre infrarouge.
US5408322A (en) * 1993-04-26 1995-04-18 Materials Research Corporation Self aligning in-situ ellipsometer and method of using for process monitoring
US5412473A (en) * 1993-07-16 1995-05-02 Therma-Wave, Inc. Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
FR2714970B1 (fr) * 1994-01-12 1996-03-29 Centre Nat Rech Scient Ellipsomètre spectroscopique modulé.

Also Published As

Publication number Publication date
EP0760475B1 (de) 2003-12-03
US5757671A (en) 1998-05-26
EP0760475A2 (de) 1997-03-05
FR2737572A1 (fr) 1997-02-07
JP4171079B2 (ja) 2008-10-22
DE69630925T2 (de) 2004-05-19
EP0760475A3 (de) 1997-07-23
JPH09189655A (ja) 1997-07-22
FR2737572B1 (fr) 1997-10-24

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Legal Events

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