DE69602936T2 - Detektor-Objektivlinse - Google Patents

Detektor-Objektivlinse

Info

Publication number
DE69602936T2
DE69602936T2 DE69602936T DE69602936T DE69602936T2 DE 69602936 T2 DE69602936 T2 DE 69602936T2 DE 69602936 T DE69602936 T DE 69602936T DE 69602936 T DE69602936 T DE 69602936T DE 69602936 T2 DE69602936 T2 DE 69602936T2
Authority
DE
Germany
Prior art keywords
objective lens
detector objective
detector
lens
objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69602936T
Other languages
English (en)
Other versions
DE69602936D1 (de
Inventor
Koshi Ueda
Toshimichi Iwai
Gerald Schoenecker
Juergen Frosien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advanced Circuit Testing ACT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Circuit Testing ACT filed Critical Advanced Circuit Testing ACT
Application granted granted Critical
Publication of DE69602936D1 publication Critical patent/DE69602936D1/de
Publication of DE69602936T2 publication Critical patent/DE69602936T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2594—Measuring electric fields or potentials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
DE69602936T 1996-07-25 1996-07-25 Detektor-Objektivlinse Expired - Lifetime DE69602936T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96112017A EP0821393B1 (de) 1996-07-25 1996-07-25 Detektor-Objektivlinse

Publications (2)

Publication Number Publication Date
DE69602936D1 DE69602936D1 (de) 1999-07-22
DE69602936T2 true DE69602936T2 (de) 1999-11-04

Family

ID=8223041

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602936T Expired - Lifetime DE69602936T2 (de) 1996-07-25 1996-07-25 Detektor-Objektivlinse

Country Status (4)

Country Link
US (1) US5895917A (de)
EP (1) EP0821393B1 (de)
JP (1) JPH1064464A (de)
DE (1) DE69602936T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59711915D1 (de) * 1997-09-29 2004-10-21 Advantest Corp Objektivlinse
EP0910108B1 (de) * 1997-09-29 2004-11-24 Advantest Corporation Elektronenstrahl-Linse
DE19828476A1 (de) * 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
JP4236742B2 (ja) * 1998-10-29 2009-03-11 株式会社日立製作所 走査形電子顕微鏡
GB2348048A (en) 1999-03-19 2000-09-20 Shimadzu Research Lab Magnetic immersion lenses
EP1120809B1 (de) * 2000-01-27 2012-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Objektivlinse für eine Ladungsträgerstrahl-Vorrichtung
CN100565774C (zh) 2002-03-21 2009-12-02 汉民微测科技股份有限公司 回转减速浸没式物镜电子光学聚焦、偏转和信号的收集方法
DE10317894B9 (de) 2003-04-17 2007-03-22 Leo Elektronenmikroskopie Gmbh Fokussiersystem für geladene Teilchen, Elektronenmikroskopiesystem und Elektronenmikroskopieverfahren
US6897442B2 (en) * 2003-04-25 2005-05-24 Applied Materials Israel, Ltd. Objective lens arrangement for use in a charged particle beam column
AU2003284339A1 (en) * 2003-07-30 2005-03-07 Applied Materials Israel, Ltd. Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
US7842933B2 (en) * 2003-10-22 2010-11-30 Applied Materials Israel, Ltd. System and method for measuring overlay errors
DE102004037781A1 (de) * 2004-08-03 2006-02-23 Carl Zeiss Nts Gmbh Elektronenstrahlgerät
JP2006004953A (ja) * 2005-08-24 2006-01-05 Ebara Corp 電子線装置及び該装置を用いたデバイス製造方法
US9046475B2 (en) 2011-05-19 2015-06-02 Applied Materials Israel, Ltd. High electron energy based overlay error measurement methods and systems
EP2629317B1 (de) * 2012-02-20 2015-01-28 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Teilchenstrahlvorrichtung mit dynamischem Fokus und Verfahren zu deren Betrieb
US10096447B1 (en) * 2017-08-02 2018-10-09 Kla-Tencor Corporation Electron beam apparatus with high resolutions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0236807A3 (de) * 1986-03-07 1990-05-16 Siemens Aktiengesellschaft Spektrometerobjektiv für die Korpuskularstrahl-Messtechnik
NL8602177A (nl) * 1986-08-27 1988-03-16 Philips Nv Electronen detectie met energie discriminatie.
DE3638682A1 (de) * 1986-11-13 1988-05-19 Siemens Ag Spektrometerobjektiv fuer korpuskularstrahlmesstechnik
JPH0636346B2 (ja) * 1988-03-09 1994-05-11 セイコー電子工業株式会社 荷電粒子線装置及びこれによる試料観察方法
US4926054A (en) * 1988-03-17 1990-05-15 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Objective lens for focusing charged particles in an electron microscope
DE4236273A1 (en) * 1992-10-27 1993-07-01 Siemens Ag Lens for focussing electrons for specimen inspection - has field generated by coils and cone-shaped electrode set into entry section

Also Published As

Publication number Publication date
EP0821393B1 (de) 1999-06-16
EP0821393A1 (de) 1998-01-28
DE69602936D1 (de) 1999-07-22
US5895917A (en) 1999-04-20
JPH1064464A (ja) 1998-03-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ADVANTEST CORP., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Free format text: RECHTSANW. UND PAT.-ANW. DR.-ING. DR.JUR. VOLKMAR TETZNER, PAT.-ANW. DIPL.-ING. MICHAEL TETZNER, 81479 MUENCHEN