DE69516510D1 - Vorrichtung zur Temperaturmessung - Google Patents

Vorrichtung zur Temperaturmessung

Info

Publication number
DE69516510D1
DE69516510D1 DE69516510T DE69516510T DE69516510D1 DE 69516510 D1 DE69516510 D1 DE 69516510D1 DE 69516510 T DE69516510 T DE 69516510T DE 69516510 T DE69516510 T DE 69516510T DE 69516510 D1 DE69516510 D1 DE 69516510D1
Authority
DE
Germany
Prior art keywords
measuring device
temperature measuring
temperature
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69516510T
Other languages
English (en)
Other versions
DE69516510T2 (de
Inventor
Seishiro Kobayashi
Akiyoshi Nabei
Shuichi Takashina
Takashi Fujishiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Meter Co Ltd
Original Assignee
Anritsu Meter Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Meter Co Ltd filed Critical Anritsu Meter Co Ltd
Application granted granted Critical
Publication of DE69516510D1 publication Critical patent/DE69516510D1/de
Publication of DE69516510T2 publication Critical patent/DE69516510T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
DE69516510T 1995-05-31 1995-08-23 Vorrichtung zur Temperaturmessung Expired - Fee Related DE69516510T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13438895A JP3333353B2 (ja) 1995-05-31 1995-05-31 温度測定装置

Publications (2)

Publication Number Publication Date
DE69516510D1 true DE69516510D1 (de) 2000-05-31
DE69516510T2 DE69516510T2 (de) 2000-11-23

Family

ID=15127240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69516510T Expired - Fee Related DE69516510T2 (de) 1995-05-31 1995-08-23 Vorrichtung zur Temperaturmessung

Country Status (4)

Country Link
US (1) US5743644A (de)
EP (1) EP0747682B1 (de)
JP (1) JP3333353B2 (de)
DE (1) DE69516510T2 (de)

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WO1997003342A1 (en) * 1995-07-10 1997-01-30 Cvc Products, Inc. Automated calibration of temperature sensors in rapid thermal processing
US6027452A (en) * 1996-06-26 2000-02-22 Vital Insite, Inc. Rapid non-invasive blood pressure measuring device
US6495195B2 (en) * 1997-02-14 2002-12-17 Arcturus Engineering, Inc. Broadband absorbing film for laser capture microdissection
US6056435A (en) * 1997-06-24 2000-05-02 Exergen Corporation Ambient and perfusion normalized temperature detector
KR100551980B1 (ko) * 1997-11-03 2006-02-20 에이에스엠 아메리카, 인코포레이티드 저질량 지지체를 이용한 웨이퍼의 처리방법 및 장치
DE19853513A1 (de) * 1997-11-21 1999-05-27 Omega Engineering Kombination aus Pyrometer und Multimeter
US6292685B1 (en) * 1998-09-11 2001-09-18 Exergen Corporation Temporal artery temperature detector
DE19929503B4 (de) * 1999-06-28 2008-06-26 Braun Gmbh IR-Thermometer für unterschiedliche Messorte
DE19940463A1 (de) * 1999-08-26 2001-03-01 Ruetgers Automotive Ag Verfahren zum Bestimmen eines Abbilds einer Temperaturverteilung auf einer Reiboberfläche
US6191399B1 (en) 2000-02-01 2001-02-20 Asm America, Inc. System of controlling the temperature of a processing chamber
US6596973B1 (en) 2002-03-07 2003-07-22 Asm America, Inc. Pyrometer calibrated wafer temperature estimator
US6818864B2 (en) * 2002-08-09 2004-11-16 Asm America, Inc. LED heat lamp arrays for CVD heating
DE10332248B4 (de) * 2003-07-11 2014-05-22 Iav Gmbh Ingenieurgesellschaft Auto Und Verkehr Verfahren und Vorrichtung zur Kalibrierung eines Lichtleiteraufnehmers
US7938783B2 (en) 2003-08-19 2011-05-10 Advanced Monitors Corporation Medical body core thermometer
US7785266B2 (en) 2003-08-19 2010-08-31 Advanced Monitors Corporation Medical thermometer for determining body core temperature
DE10346993A1 (de) * 2003-10-07 2005-06-02 Alcan Technology & Management Ag Berührungslose Temperaturmessung
DE10360676A1 (de) * 2003-12-23 2005-07-21 Daimlerchrysler Ag Verfahren zur Temperaturerfassung
JP2006292713A (ja) * 2005-03-18 2006-10-26 Keyence Corp 放射温度計
US7520668B2 (en) * 2007-01-24 2009-04-21 Innova Electronics Corporation Multi function thermometer
US7661876B2 (en) * 2007-11-14 2010-02-16 Fluke Corporation Infrared target temperature correction system and method
EP2250720B1 (de) 2008-03-07 2019-08-14 Milwaukee Electric Tool Corporation Batteriepackung für ein elektrowerkzeug und ein nicht motorisiertes abtastwerkzeug
US20090257469A1 (en) * 2008-04-09 2009-10-15 Jones Mike N Infrared thermometer
US8529126B2 (en) 2009-06-11 2013-09-10 Rosemount Inc. Online calibration of a temperature measurement point
US20120083710A1 (en) 2010-09-30 2012-04-05 Medism Ltd. Ergonomic hand-held thermometer
JP5520238B2 (ja) * 2011-01-27 2014-06-11 旭化成エレクトロニクス株式会社 温度測定装置における補正データの取得方法およびこれを行う、温度測定方法、及び、温度測定装置。
US9885123B2 (en) 2011-03-16 2018-02-06 Asm America, Inc. Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow
CN102564598B (zh) * 2012-01-06 2013-09-25 电子科技大学 一种红外探测器测温的定标和校正方法及相应的测温方法
US9307912B2 (en) * 2012-08-08 2016-04-12 Welch Allyn, Inc. Temperature measurement system
US8452382B1 (en) 2012-09-21 2013-05-28 Brooklands Inc. Non-contact thermometer sensing a carotid artery
DE102012025504A1 (de) * 2012-12-27 2014-07-03 Ircam Gmbh Verfahren und Vorrichtung zur automatischen Emissionsgrad-Bestimmung bei der Temperaturmessung mit Wärmebildkameras
GB2528044B (en) 2014-07-04 2018-08-22 Arc Devices Ni Ltd Non-touch optical detection of vital signs
US8965090B1 (en) 2014-07-06 2015-02-24 ARC Devices, Ltd Non-touch optical detection of vital signs
DE102014012697B4 (de) * 2014-09-01 2016-06-09 Minkon GmbH Verfahren zur optischen Temperaturbestimmung eines geschmolzenen Metalls sowie Abspulvorrichtung zur Durchführung eines solchen Verfahrens
US9854973B2 (en) 2014-10-25 2018-01-02 ARC Devices, Ltd Hand-held medical-data capture-device interoperation with electronic medical record systems
US10390692B2 (en) * 2015-11-25 2019-08-27 Htc Corporation Hybrid detection apparatus
US10506926B2 (en) 2017-02-18 2019-12-17 Arc Devices Limited Multi-vital sign detector in an electronic medical records system
US10492684B2 (en) 2017-02-21 2019-12-03 Arc Devices Limited Multi-vital-sign smartphone system in an electronic medical records system
US10602987B2 (en) 2017-08-10 2020-03-31 Arc Devices Limited Multi-vital-sign smartphone system in an electronic medical records system
US10485431B1 (en) 2018-05-21 2019-11-26 ARC Devices Ltd. Glucose multi-vital-sign system in an electronic medical records system
US11391634B2 (en) 2019-02-12 2022-07-19 Accure Acne, Inc. Temperature sensing apparatus for use with a photo-thermal targeted treatment system and associated methods
WO2021247300A1 (en) 2020-06-01 2021-12-09 Arc Devices Limited Apparatus and methods for measuring blood pressure and other vital signs via a finger

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US3777568A (en) * 1971-12-21 1973-12-11 Sensors Inc D. c. electronic apparatus for ir radiation temperature measurement
JPS5234230B2 (de) * 1971-12-27 1977-09-02
US3969943A (en) * 1974-03-06 1976-07-20 Nippon Steel Corporation Method of measuring the temperature of furnace hot stock and apparatus therefor
JPS55121123A (en) * 1979-03-14 1980-09-18 Toshiba Corp Contactless temperature sensing unit
JPS5614126A (en) * 1979-07-17 1981-02-10 Daido Steel Co Ltd Radiation thermometer
WO1981000764A1 (en) * 1979-09-12 1981-03-19 M Jacobs Hand-held digital temperature measuring instrument
JPS56104226A (en) * 1980-01-23 1981-08-19 Fujitsu Ltd Temperature measuring system using infrared ray
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
DE4004408A1 (de) * 1990-02-13 1991-08-14 Ultrakust Electronic Gmbh Infrarot-temperatursensor
US5186541A (en) * 1991-10-21 1993-02-16 Gentri Controls, Inc. Non-contact infrared temperature sensing system

Also Published As

Publication number Publication date
DE69516510T2 (de) 2000-11-23
US5743644A (en) 1998-04-28
EP0747682A1 (de) 1996-12-11
JP3333353B2 (ja) 2002-10-15
EP0747682B1 (de) 2000-04-26
JPH08327458A (ja) 1996-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee