DE69510569D1 - Beschleunigungsmessaufnehmer - Google Patents
BeschleunigungsmessaufnehmerInfo
- Publication number
- DE69510569D1 DE69510569D1 DE69510569T DE69510569T DE69510569D1 DE 69510569 D1 DE69510569 D1 DE 69510569D1 DE 69510569 T DE69510569 T DE 69510569T DE 69510569 T DE69510569 T DE 69510569T DE 69510569 D1 DE69510569 D1 DE 69510569D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
- G01P15/008—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses by using thermal pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP00444494A JP3363983B2 (ja) | 1994-01-20 | 1994-01-20 | ヒートワイヤ型加速度検出器 |
JP00581194A JP3332280B2 (ja) | 1994-01-24 | 1994-01-24 | ヒートワイヤ型加速度検出器 |
JP06432294A JP3345695B2 (ja) | 1994-02-23 | 1994-02-23 | 加速度センサ |
JP05412194A JP3332283B2 (ja) | 1994-03-24 | 1994-03-24 | 多軸加速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69510569D1 true DE69510569D1 (de) | 1999-08-12 |
DE69510569T2 DE69510569T2 (de) | 1999-10-28 |
Family
ID=27454083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69510569T Expired - Lifetime DE69510569T2 (de) | 1994-01-20 | 1995-01-20 | Beschleunigungsmessaufnehmer |
Country Status (3)
Country | Link |
---|---|
US (2) | US5719333A (de) |
EP (1) | EP0664456B1 (de) |
DE (1) | DE69510569T2 (de) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5835077A (en) * | 1995-01-13 | 1998-11-10 | Remec, Inc., | Computer control device |
US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
US6589433B2 (en) | 1996-06-26 | 2003-07-08 | Simon Fraser University | Accelerometer without proof mass |
US6182509B1 (en) | 1996-06-26 | 2001-02-06 | Simon Fraser University | Accelerometer without proof mass |
AU3162297A (en) | 1996-06-26 | 1998-01-14 | Simon Fraser University | Accelerometer without proof mass |
US6744346B1 (en) * | 1998-02-27 | 2004-06-01 | Micron Technology, Inc. | Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece |
DE19810286A1 (de) * | 1998-03-10 | 1999-09-23 | Siemens Ag | Mikrosensor, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Mikrosensors |
WO1999046559A1 (en) * | 1998-03-12 | 1999-09-16 | Honeywell Inc. | Orientation/attitude sensor |
US6129282A (en) * | 1998-07-20 | 2000-10-10 | Psc Scanning, Inc. | Rugged scanning subsystem for data reading |
US6229322B1 (en) * | 1998-08-21 | 2001-05-08 | Micron Technology, Inc. | Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus |
US6967497B1 (en) | 1998-08-21 | 2005-11-22 | Micron Technology, Inc. | Wafer processing apparatuses and electronic device workpiece processing apparatuses |
CA2254538C (en) | 1998-11-26 | 2006-02-07 | Canpolar East Inc. | Collision deformation sensor for use in the crush zone of a vehicle |
CA2254535C (en) | 1998-11-26 | 2003-10-28 | Canpolar East Inc. | Sensor for detection of acceleration and attitude within a vehicle |
US6171880B1 (en) | 1999-06-14 | 2001-01-09 | The United States Of America As Represented By The Secretary Of Commerce | Method of manufacture of convective accelerometers |
WO2001046701A1 (de) | 1999-12-20 | 2001-06-28 | Ploechinger Heinz | Sensor zur erfassung einer drehbewegung oder einer drehbeschleunigung |
US6795752B1 (en) | 2000-11-03 | 2004-09-21 | Memsic, Inc. | Thermal convection accelerometer with closed-loop heater control |
FR2817351B1 (fr) * | 2000-11-27 | 2003-02-14 | Sagem | Procede et dispositif de mesure thermique d'une acceleration |
WO2003036225A1 (en) * | 2001-10-26 | 2003-05-01 | University Of Rochester | Method for biomolecular sensing and system thereof |
FR2832802B1 (fr) * | 2001-11-27 | 2004-04-23 | Sagem | Accelerometre thermique |
DE10160353B4 (de) * | 2001-12-08 | 2005-07-28 | Robert Bosch Gmbh | Anordnung und Verfahren zur Ermittlung von Kenngrößen |
FR2838522B1 (fr) * | 2002-04-12 | 2004-06-25 | Sagem | Capteur inertiel a sonde de temperature integree |
DE10230198A1 (de) * | 2002-07-05 | 2004-01-22 | Robert Bosch Gmbh | Sensor mit einer Heizeinrichtung und Verfahren |
TW574128B (en) * | 2002-11-29 | 2004-02-01 | Lightuning Tech Inc | Thermal bubble type micro-machined inertial sensor |
US6884458B2 (en) * | 2002-12-04 | 2005-04-26 | The Board Of Trustees Of The University Of Illinois | Sensor for monitoring material deposition and method of monitoring material deposition |
FR2864247B1 (fr) * | 2003-12-22 | 2006-02-03 | Sagem | Accelerometre thermique a sensibilite reduite a un champ magnetique externe |
WO2005078458A1 (en) | 2004-02-05 | 2005-08-25 | Analog Devices, Inc. | Capped sensor |
JP4045549B2 (ja) * | 2004-02-12 | 2008-02-13 | 株式会社デンソー | 水素濃度検出装置及び水素濃度検出方法 |
NL1025834C2 (nl) * | 2004-03-26 | 2005-09-27 | Esquisse Schoonhoven | Transportmiddel voorzien van een beladingsmeter. |
US20050236080A1 (en) * | 2004-04-26 | 2005-10-27 | Allen Potter | Golf bag cover |
US7516660B2 (en) | 2004-05-21 | 2009-04-14 | Met Tech, Inc. | Convective accelerometer |
US7392703B2 (en) * | 2004-06-09 | 2008-07-01 | Memsic, Inc. | Z-axis thermal accelerometer |
US7305881B2 (en) * | 2004-06-09 | 2007-12-11 | Memsic, Inc. | Method and circuitry for thermal accelerometer signal conditioning |
KR100552480B1 (ko) * | 2004-07-08 | 2006-02-15 | 삼성전자주식회사 | 마이크로 가속도계 |
US8789896B2 (en) | 2004-10-08 | 2014-07-29 | Cequent Electrical Products | Brake control unit |
US8746812B2 (en) | 2004-10-08 | 2014-06-10 | Marcia Albright | Brake control unit |
US20060179940A1 (en) * | 2005-02-11 | 2006-08-17 | Finemems Inc. | Ultra-small Profile, Low Cost Chip Scale Accelerometers of Two and Three Axes Based on Wafer Level Packaging |
JP2006258678A (ja) * | 2005-03-18 | 2006-09-28 | Hitachi Ltd | 熱式流量計測装置 |
FR2885700B1 (fr) * | 2005-05-13 | 2007-08-17 | Sagem Defense Securite | Accelerometre thermique a detection et contre-reaction multiplexees |
FR2886021B1 (fr) * | 2005-05-17 | 2007-08-17 | Sagem Defense Securite | Systeme de mesure d'acceleration a cellules thermiques |
US7424826B2 (en) * | 2005-11-10 | 2008-09-16 | Memsic, Inc. | Single chip tri-axis accelerometer |
JP4955334B2 (ja) * | 2006-08-03 | 2012-06-20 | ローム株式会社 | 加速度センサ |
DE102007021172B4 (de) * | 2007-05-05 | 2010-11-18 | Refractory Intellectual Property Gmbh & Co. Kg | Verwendung eines Sensors |
US20090306924A1 (en) * | 2008-06-10 | 2009-12-10 | Datalogic Scanning, Inc. | Automatic calibration system for scanner-scale or other scale system |
US8011226B2 (en) * | 2008-08-26 | 2011-09-06 | Memsic, Inc. | Leakage detection method using micromachined-thermal-convection accelerometer |
TWI408372B (zh) * | 2009-08-14 | 2013-09-11 | Univ Chung Hua | 應用無線射頻識別標籤技術之熱氣泡式加速儀及其製備方法 |
CN102012437B (zh) * | 2009-09-08 | 2013-07-10 | 中华大学 | 应用无线射频识别标签技术的热气泡式加速仪及制备方法 |
WO2012172528A1 (en) * | 2011-06-17 | 2012-12-20 | Universidade Do Minho | 3 axis polymeric accelerometer and method of production |
US20130138393A1 (en) * | 2011-11-30 | 2013-05-30 | Karl S. Weibezahn | Inclinometer |
US9322837B2 (en) | 2012-09-12 | 2016-04-26 | Renesas Electronics Corporation | Semiconductor device |
TWI477779B (zh) * | 2013-06-11 | 2015-03-21 | Univ Chung Hua | 熱對流式線性加速儀 |
JP6653479B2 (ja) * | 2015-07-07 | 2020-02-26 | パナソニックIpマネジメント株式会社 | 慣性力センサ |
US10946841B2 (en) | 2016-09-16 | 2021-03-16 | Horizon Global Americas Inc. | Driver and diagnostic system for a brake controller |
US10363910B2 (en) | 2016-12-07 | 2019-07-30 | Horizon Global Americas Inc. | Automated gain and boost for a brake controller |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2455394A (en) * | 1943-06-29 | 1948-12-07 | Sperry Corp | Accelerometer |
US3627577A (en) * | 1968-05-22 | 1971-12-14 | Bell Telephone Labor Inc | Thin film resistors |
US3631729A (en) * | 1969-06-05 | 1972-01-04 | Hercules Inc | Fluid jet deflection-type instrument with jet buoyancy control |
US3635095A (en) * | 1969-06-05 | 1972-01-18 | Hercules Inc | Gravity-compensating means for fluid jet deflection-type instrument |
US3993967A (en) * | 1975-03-31 | 1976-11-23 | Western Electric Company, Inc. | Resistance-capacitance network |
US4020699A (en) * | 1976-02-05 | 1977-05-03 | United Technologies Corporation | Temperature stabilized fluidic angular rate sensor |
US4026159A (en) * | 1976-02-23 | 1977-05-31 | United Technologies Corporation | Fluidic angular rate sensor null error compensation |
US4156364A (en) * | 1977-07-28 | 1979-05-29 | The Johns Hopkins University | Ionic conduction angular rate sensor |
US4147063A (en) * | 1977-09-23 | 1979-04-03 | Systron-Donner Corporation | Two axis gas damped angular velocity sensor |
US4254659A (en) * | 1979-01-12 | 1981-03-10 | Kbg Corporation | Fluid dynamic angular rate sensor |
JPS55177655U (de) * | 1979-06-08 | 1980-12-19 | ||
JPS5945944B2 (ja) * | 1980-03-27 | 1984-11-09 | 本田技研工業株式会社 | ガスレ−トセンサ |
JPS5745967A (en) * | 1980-09-04 | 1982-03-16 | Toshiba Corp | Semiconductor device |
US4407161A (en) * | 1982-02-11 | 1983-10-04 | United Technologies Corporation | Fluid jet displacement detector |
JPS59218913A (ja) * | 1983-05-27 | 1984-12-10 | Honda Motor Co Ltd | 移動方向検出方式 |
US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
US4592232A (en) * | 1984-05-07 | 1986-06-03 | United Technologies Corporation | Angular velocity sensor |
US4584878A (en) * | 1984-09-24 | 1986-04-29 | Tamagawa Seigi Kabushiki Kaisha | Gas-rate sensor |
JPH07120946B2 (ja) * | 1985-06-25 | 1995-12-20 | キヤノン株式会社 | 位相同期回路 |
JPS6381269A (ja) * | 1986-09-25 | 1988-04-12 | Tamagawa Seiki Co Ltd | ガスレ−トセンサの温度制御装置 |
JPS63118667A (ja) * | 1986-11-06 | 1988-05-23 | Fujitsu Ltd | 三次元加速度センサ |
JPH0654322B2 (ja) * | 1987-05-27 | 1994-07-20 | 本田技研工業株式会社 | ガスレ−トセンサ |
JPS63293472A (ja) * | 1987-05-27 | 1988-11-30 | Honda Motor Co Ltd | ガスレ−トセンサ |
JPS63298067A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ本体 |
JPS63298066A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ本体 |
JPS63298068A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ |
US4930349A (en) * | 1987-05-29 | 1990-06-05 | Honda Giken Kogyo Kabushiki Kaisha & Stanley Electric Co. | Gas rate sensor |
JPH0614063B2 (ja) * | 1988-01-13 | 1994-02-23 | 本田技研工業株式会社 | ガスレートセンサ |
JPH01180458A (ja) * | 1988-01-13 | 1989-07-18 | Honda Motor Co Ltd | ガスレートセンサ |
JP2721840B2 (ja) * | 1989-06-28 | 1998-03-04 | 本田技研工業株式会社 | ガス式角速度検出器 |
JPH03176669A (ja) * | 1989-12-05 | 1991-07-31 | Murata Mfg Co Ltd | 加速度センサ |
JPH0830710B2 (ja) * | 1990-03-08 | 1996-03-27 | 本田技研工業株式会社 | 角速度検出器 |
US5107107A (en) * | 1990-03-30 | 1992-04-21 | The United States Of America As Represented By The Administarator Of The National Aeronautics And Space Administration | Laser optical disk position encoder with active heads |
JP2992660B2 (ja) * | 1991-06-19 | 1999-12-20 | 本田技研工業株式会社 | ガスレートセンサ |
DE4122435A1 (de) * | 1991-07-06 | 1993-01-07 | Bosch Gmbh Robert | Verfahren zur herstellung von beschleunigungssensoren und beschleunigungssensor |
US5385046A (en) * | 1992-04-10 | 1995-01-31 | Honda Giken Kogyo Kabushiki Kaisha | Gas flow type angular velocity sensor |
DE4243978C1 (de) * | 1992-12-23 | 1994-01-05 | Ploechinger Heinz Dipl Ing Fh | Neigungs- und Beschleunigungs-Sensor |
JP3247533B2 (ja) * | 1994-02-04 | 2002-01-15 | 本田技研工業株式会社 | 半導体ガスレートセンサの製造方法 |
US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
-
1995
- 1995-01-20 EP EP95300345A patent/EP0664456B1/de not_active Expired - Lifetime
- 1995-01-20 DE DE69510569T patent/DE69510569T2/de not_active Expired - Lifetime
- 1995-01-20 US US08/376,155 patent/US5719333A/en not_active Expired - Lifetime
-
1998
- 1998-02-09 US US09/020,999 patent/US5945601A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0664456B1 (de) | 1999-07-07 |
DE69510569T2 (de) | 1999-10-28 |
US5719333A (en) | 1998-02-17 |
US5945601A (en) | 1999-08-31 |
EP0664456A1 (de) | 1995-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |