DE69501638T2 - Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid - Google Patents

Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid

Info

Publication number
DE69501638T2
DE69501638T2 DE69501638T DE69501638T DE69501638T2 DE 69501638 T2 DE69501638 T2 DE 69501638T2 DE 69501638 T DE69501638 T DE 69501638T DE 69501638 T DE69501638 T DE 69501638T DE 69501638 T2 DE69501638 T2 DE 69501638T2
Authority
DE
Germany
Prior art keywords
producing
silicon nitride
ceramic part
ceramic
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69501638T
Other languages
English (en)
Other versions
DE69501638D1 (de
Inventor
Yasushi Ito
Takehisa Yamamoto
Takao Nishioka
Akira Yamakawa
Osamu Komura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69501638D1 publication Critical patent/DE69501638D1/de
Application granted granted Critical
Publication of DE69501638T2 publication Critical patent/DE69501638T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3865—Aluminium nitrides
    • C04B2235/3869—Aluminium oxynitrides, e.g. AlON, sialon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/76—Crystal structural characteristics, e.g. symmetry
    • C04B2235/766—Trigonal symmetry, e.g. alpha-Si3N4 or alpha-Sialon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE69501638T 1994-04-26 1995-04-24 Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid Expired - Lifetime DE69501638T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6109113A JPH07299708A (ja) 1994-04-26 1994-04-26 窒化ケイ素系セラミックス部品の製造方法

Publications (2)

Publication Number Publication Date
DE69501638D1 DE69501638D1 (de) 1998-04-02
DE69501638T2 true DE69501638T2 (de) 1998-07-23

Family

ID=14501898

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69501638T Expired - Lifetime DE69501638T2 (de) 1994-04-26 1995-04-24 Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid

Country Status (6)

Country Link
US (1) US5599493A (de)
EP (1) EP0679616B1 (de)
JP (1) JPH07299708A (de)
KR (1) KR0138018B1 (de)
DE (1) DE69501638T2 (de)
TW (1) TW284747B (de)

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US5770322A (en) * 1994-11-14 1998-06-23 Sumitomo Electric Industries, Ltd. Ceramic sliding component
JP4070417B2 (ja) * 2000-03-31 2008-04-02 日本特殊陶業株式会社 窒化珪素質部材及びその製造方法並びに切削工具
DE10165080B4 (de) * 2000-09-20 2015-05-13 Hitachi Metals, Ltd. Siliciumnitrid-Pulver und -Sinterkörper sowie Verfahren zu deren Herstellung und Leiterplatte damit
JP2003176178A (ja) * 2001-12-07 2003-06-24 Nhk Spring Co Ltd ウエハ支持体およびその周辺部品
JP4087244B2 (ja) * 2002-12-20 2008-05-21 電気化学工業株式会社 セラミックスの改質方法
TW200903026A (en) 2007-07-12 2009-01-16 Young Optics Inc Fixed-focus lens
KR101019706B1 (ko) * 2008-12-30 2011-03-07 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
US8758461B2 (en) 2010-12-31 2014-06-24 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013003831A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
US8986409B2 (en) 2011-06-30 2015-03-24 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
WO2013049239A1 (en) 2011-09-26 2013-04-04 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
RU2014130167A (ru) 2011-12-30 2016-02-27 Сэнт-Гобэйн Керамикс Энд Пластикс Инк. Получение формованных абразивных частиц
CN109054745A (zh) 2011-12-30 2018-12-21 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
EP3851248B1 (de) 2011-12-30 2024-04-03 Saint-Gobain Ceramics & Plastics, Inc. Zusammengesetzte geformte schleifpartikel und verfahren zu ihrer herstellung
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013106597A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes and methods of forming same
EP2830829B1 (de) 2012-03-30 2018-01-10 Saint-Gobain Abrasives, Inc. Schleifmittel mit fibrillierten fasern
EP2852473B1 (de) 2012-05-23 2020-12-23 Saint-Gobain Ceramics & Plastics Inc. Geformte schleifpartikel und verfahren zur herstellung davon
WO2014005120A1 (en) 2012-06-29 2014-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP2906392A4 (de) 2012-10-15 2016-07-13 Saint Gobain Abrasives Inc Schleifpartikel mit besonderen formen und verfahren zur formung solcher partikel
CN104994995B (zh) 2012-12-31 2018-12-14 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
US10086437B2 (en) 2013-02-13 2018-10-02 Kyocera Corporation Cutting tool
CA2907372C (en) 2013-03-29 2017-12-12 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
CN105764653B (zh) 2013-09-30 2020-09-11 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
MX2016008494A (es) 2013-12-31 2016-10-28 Saint Gobain Abrasives Inc Articulo abrasivo que incluye partículas abrasivas perfiladas.
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
WO2015160854A1 (en) 2014-04-14 2015-10-22 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN106457521A (zh) 2014-04-14 2017-02-22 圣戈本陶瓷及塑料股份有限公司 包括成形磨粒的研磨制品
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
CN107636109A (zh) 2015-03-31 2018-01-26 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
WO2016201104A1 (en) 2015-06-11 2016-12-15 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
SI3455321T1 (sl) 2016-05-10 2022-10-28 Saint-Gobain Ceramics & Plastics, Inc. Metode oblikovanja abrazivnih delcev
CN109462993A (zh) 2016-05-10 2019-03-12 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
EP4349896A2 (de) 2016-09-29 2024-04-10 Saint-Gobain Abrasives, Inc. Feste schleifartikel und verfahren zur formung davon
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2018236989A1 (en) 2017-06-21 2018-12-27 Saint-Gobain Ceramics & Plastics, Inc. PARTICULATE MATERIALS AND METHODS OF FORMATION THEREOF
KR102047662B1 (ko) * 2017-11-30 2019-11-22 (주) 존인피니티 신규한 질화규소 분말의 제조방법
KR20220116556A (ko) 2019-12-27 2022-08-23 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법

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JPS6081076A (ja) * 1983-10-07 1985-05-09 株式会社日立製作所 セラミツクスの機械的強度向上法
JPS6355180A (ja) * 1986-08-22 1988-03-09 株式会社東芝 窒化ケイ素系セラミックス部品の製造方法
JPH02167864A (ja) * 1988-12-22 1990-06-28 Nkk Corp サイアロン焼結体の熱処理方法
JPH04367579A (ja) * 1991-06-14 1992-12-18 Toshiba Tungaloy Co Ltd 酸化膜付窒化ケイ素焼結体
JPH05149112A (ja) * 1991-11-25 1993-06-15 Riken Corp セラミツクバルブの製造方法
JP3198662B2 (ja) * 1992-09-21 2001-08-13 住友電気工業株式会社 窒化ケイ素系焼結体及びその製造方法
US5384292A (en) * 1993-04-14 1995-01-24 Sumitomo Electric Industries, Ltd. Silicon nitride composite sintered body and process for producing the same

Also Published As

Publication number Publication date
JPH07299708A (ja) 1995-11-14
EP0679616B1 (de) 1998-02-25
TW284747B (de) 1996-09-01
DE69501638D1 (de) 1998-04-02
EP0679616A3 (de) 1995-11-29
EP0679616A2 (de) 1995-11-02
KR0138018B1 (ko) 1998-04-27
US5599493A (en) 1997-02-04
KR950029233A (ko) 1995-11-22

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Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM