DE69418423D1 - Schleifbearbeitungsverfahren für Keramikwerkstoffe - Google Patents
Schleifbearbeitungsverfahren für KeramikwerkstoffeInfo
- Publication number
- DE69418423D1 DE69418423D1 DE69418423T DE69418423T DE69418423D1 DE 69418423 D1 DE69418423 D1 DE 69418423D1 DE 69418423 T DE69418423 T DE 69418423T DE 69418423 T DE69418423 T DE 69418423T DE 69418423 D1 DE69418423 D1 DE 69418423D1
- Authority
- DE
- Germany
- Prior art keywords
- grinding process
- ceramic materials
- ceramic
- grinding
- materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5302311A JPH07132448A (ja) | 1993-11-08 | 1993-11-08 | セラミックス材料の研削加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69418423D1 true DE69418423D1 (de) | 1999-06-17 |
DE69418423T2 DE69418423T2 (de) | 1999-12-23 |
Family
ID=17907432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69418423T Expired - Lifetime DE69418423T2 (de) | 1993-11-08 | 1994-02-28 | Schleifbearbeitungsverfahren für Keramikwerkstoffe |
Country Status (4)
Country | Link |
---|---|
US (1) | US5564966A (de) |
EP (1) | EP0652076B1 (de) |
JP (1) | JPH07132448A (de) |
DE (1) | DE69418423T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19632809C2 (de) * | 1996-08-14 | 2002-06-20 | Infineon Technologies Ag | Gerät zum chemisch-mechanischen Polieren von Wafern |
WO1999007507A2 (en) * | 1997-08-12 | 1999-02-18 | Arizona Board Of Regents, A Body Corporate Acting On Behalf Of Arizona State University | Method and apparatus for hard machining |
US6733365B1 (en) * | 1997-08-12 | 2004-05-11 | Arizona Board Of Regents | Method and apparatus for hard machining |
US6030277A (en) * | 1997-09-30 | 2000-02-29 | Cummins Engine Company, Inc. | High infeed rate method for grinding ceramic workpieces with silicon carbide grinding wheels |
FR2773507B1 (fr) * | 1998-01-14 | 2000-03-31 | Christian Bachmann | Machine de faconnage de bords de plaques de verre ou analogue |
US6074278A (en) * | 1998-01-30 | 2000-06-13 | Norton Company | High speed grinding wheel |
JPH11335158A (ja) * | 1998-03-24 | 1999-12-07 | Sumitomo Electric Ind Ltd | セラミックス基板及びその研磨方法 |
US6019668A (en) * | 1998-03-27 | 2000-02-01 | Norton Company | Method for grinding precision components |
US6050881A (en) * | 1998-07-27 | 2000-04-18 | Ford Global Technologies, Inc. | Surface finishing covalent-ionic ceramics |
DE10025173A1 (de) * | 2000-05-24 | 2001-11-29 | Swarovski Tyrolit Schleif | Verfahren zum Schleifen von insbesondere Nickel enthaltenden metallischen Werkstücken |
DE102006042762B3 (de) * | 2006-09-12 | 2008-04-03 | Gebr. Brasseler Gmbh & Co. Kg | Verfahren zur Herstellung eines chirurgischen Instruments |
CN100436054C (zh) * | 2006-12-15 | 2008-11-26 | 华南理工大学 | 一种超硬碳化硅陶瓷纳米镜面的磨削方法 |
CN101339114B (zh) * | 2008-09-03 | 2012-05-23 | 石家庄铁道学院 | 陶瓷磨削加工性能测试方法 |
US8602845B2 (en) * | 2011-09-23 | 2013-12-10 | United Technologies Corporation | Strengthening by machining |
CN103707133A (zh) * | 2013-12-17 | 2014-04-09 | 湘潭大学 | 一种工程陶瓷高效低损伤的高静液压磨削方法 |
JP7158316B2 (ja) * | 2019-03-05 | 2022-10-21 | Jx金属株式会社 | スパッタリングターゲット及びその製造方法 |
CN113290432A (zh) * | 2021-06-25 | 2021-08-24 | 深圳市仕兴鸿精密机械设备有限公司 | 一种增强型金属陶瓷刀片的仿形磨削工艺 |
CN114211316B (zh) * | 2021-12-23 | 2023-04-07 | 宁波江丰复合材料科技有限公司 | 一种陶瓷及其机械加工方法与应用 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US455391A (en) * | 1891-07-07 | Tool-holder | ||
GB816751A (en) * | 1954-07-06 | 1959-07-15 | John Kitchen | Improvements in or relating to holders for tool bits for machine tools |
US945674A (en) * | 1908-10-13 | 1910-01-04 | Ready Tool Company | Tool-holder. |
US2551948A (en) * | 1949-04-11 | 1951-05-08 | William S Hutchinson | Boring bar |
DE1117970B (de) * | 1958-04-26 | 1961-11-23 | Robert Breuning | Zerspanungswerkzeug mit einem laengsverstellbaren zylindrischen Schneidstahl oder Schneidstahleinsatz |
US4227841A (en) * | 1979-02-15 | 1980-10-14 | Hoover Donald L | Boring bar |
US4663890A (en) * | 1982-05-18 | 1987-05-12 | Gmn Georg Muller Nurnberg Gmbh | Method for machining workpieces of brittle hard material into wafers |
US4619564A (en) * | 1985-06-12 | 1986-10-28 | Mls, Inc. | Boring bar |
DE3737641A1 (de) * | 1987-10-19 | 1989-04-27 | Fortuna Werke Maschf Ag | Verfahren zum aussenrundschleifen von werkstuecken |
US4839996A (en) * | 1987-11-11 | 1989-06-20 | Disco Abrasive Systems, Ltd. | Method and apparatus for machining hard, brittle and difficultly-machinable workpieces |
JP3207898B2 (ja) * | 1991-11-29 | 2001-09-10 | 日産自動車株式会社 | 高速研削用砥石 |
-
1993
- 1993-11-08 JP JP5302311A patent/JPH07132448A/ja active Pending
-
1994
- 1994-02-24 US US08/200,997 patent/US5564966A/en not_active Expired - Fee Related
- 1994-02-28 EP EP94102982A patent/EP0652076B1/de not_active Expired - Lifetime
- 1994-02-28 DE DE69418423T patent/DE69418423T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0652076A1 (de) | 1995-05-10 |
JPH07132448A (ja) | 1995-05-23 |
DE69418423T2 (de) | 1999-12-23 |
US5564966A (en) | 1996-10-15 |
EP0652076B1 (de) | 1999-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM |
|
8330 | Complete disclaimer |